JP3223509B2 - LC noise filter and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an LC noise filter, in particular, an LC in which a distributed constant circuit of an LC composed of an inductor conductor and a capacitor conductor is formed in a laminated body having a plurality of insulating layers laminated. Related to a noise filter.

[Prior art] With the development of electronic technology in recent years, electronic circuits are widely used in various fields, and therefore, these electronic circuits operate stably and reliably without being affected by external noise. It is desired to make it.

In particular, in recent years, various high-performance electronic devices have been used in large numbers, and accordingly, regulations on noise have become increasingly intense. Therefore, it is desired to develop a small and high-performance noise filter capable of reliably removing generated noise.

However, in the conventional LC noise filter, as shown in FIG. 8, two sets of windings 12 and 14 are wound around the core 10 and these windings 12 and 14 are wound.
Capacitors 16 and 18 were connected to both ends of 14 in parallel, respectively.

Therefore, the core 10 and the windings 12,1 which constitute the inductor
4 becomes larger, and inductor and capacitor 1
Since the filters 6 and 18 are formed of different members, the entire filter becomes large, and there is a problem that the required quality of miniaturization and weight reduction cannot be satisfied.

To solve such a problem, Japanese Patent Application Laid-Open No. 56-50507
No., JP-A-56-144524, JP-A-56-142622, JP-A-56-142622
A proposal according to 63-76313 has been made.

In this prior art, for example, in a composite electronic component according to Japanese Patent Application Laid-Open No. 56-50507, as shown in FIG.
a, 20b, 20c ... are laminated to form a laminate.
The conductive patterns 22a, which continuously circulate from one layer to the next layer between the insulator layers 20a, 20b,...
22b and 22c are provided so that a coil L having a predetermined number of turns is provided.
To form

Also, conductive layers 24a, 24b are arranged at intervals from the circumferential conductive patterns 22a, 22c between the insulating layers 20a, 20b, 20c..., And these conductive layers 24a, 24b and the conductive patterns 22a, 22c To form a capacitance C.

As a result, a lumped-constant noise filter composed of L and C can be obtained as shown in FIG.

Furthermore, in this prior art, since L and C are incorporated in the laminate, it can be used as a small and lightweight LC noise filter.

[Problems to be Solved by the Invention] However, in this LC filter, only the conductive layers 24a and 24c forming the capacitance are provided adjacent to the linear portions of the portions 22a and 22c of the conductive pattern forming the coil. . Therefore, there is a problem that the capacitance C between the coil and the conductive layer 24 is small, and good attenuation characteristics cannot be obtained.

In particular, this LC filter is formed as a lumped constant type LC filter as shown in FIG. For this reason, there has been a problem that various types of noise, particularly common mode noise such as switching surge, and normal mode noise such as ripple cannot be reliably removed.

Further, this LC filter has a problem that it can be used only as a three-terminal type normal mode filter and cannot be used as a four-terminal type common mode noise.

The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a small-sized LC noise filter capable of reliably removing intruding noise and a method of manufacturing the same.

Another object of the present invention is to provide an LC noise filter which can be used not only as a normal mode noise filter but also as a common mode noise filter as required, and a method of manufacturing the same.

[Means for Solving the Problems] In order to achieve the above object, an LC noise filter of the present invention comprises: a laminated body formed by laminating insulating layers each including a plurality of segments; A first conductive element that continuously circulates in the same direction from a segment between one layer to a segment between other layers, and a first conductor that forms a coil having a predetermined number of turns; A second conductor that provides a second conductive element opposed to the first conductive element via an insulating layer of the first conductive element, and forms a capacitance with the first conductor. I do.

[Operation] Next, the operation of the present invention will be described.

In the LC element of the present invention, the insulating layer is composed of a plurality of segments, and the insulating layer is laminated over a plurality of layers to form a laminate.

And the first conductor comprises a first conductive element,
It is formed by providing a continuous circuit between the layers of the insulating layer from the segment between one layer to the segment between the other layers. Thereby, the first conductor functions as a coil having a predetermined inductance.

The second conductor is formed by providing a second conductive element between layers of the laminate.

A feature of the present invention is that the second conductive element is provided so as to face the first conductive element via an insulating layer, and a capacitance is formed between the two.

At this time, it is presumed that the second conductor forms capacitance in a distributed constant manner with the first conductor.
Therefore, the LC noise filter of the present invention functions as a distributed constant type LC filter,
As compared with a filter, a good attenuation characteristic can be obtained over a relatively wide band, and various noises can be removed without ringing or the like. In particular, in the LC noise filter of the present invention, the L component and the C component of the distributed constant circuit function effectively, and various noises can be effectively removed.

Furthermore, the LC noise filter of the present invention can be used as a normal mode type LC noise filter by providing a ground terminal on the second conductor and providing input / output terminals at both ends of the first conductor.

In the LC noise filter of the present invention, a larger capacitance can be obtained by dividing the second conductor into a plurality of parts and using each of the divided sections as a normal mode type LC noise filter of a divided ground type.

Further, the LC noise filter according to the present invention is provided with input / output terminals at both ends of the first and second conductors,
It can also be used as a common mode LC noise filter.

Next, a preferred embodiment of the present invention will be described in detail with reference to the drawings.

First Embodiment FIG. 1 shows an example of a manufacturing process of an LC noise filter of the present invention, FIG. 2 shows an example of an LC noise filter formed according to this manufacturing process, and FIG. Shows an equivalent circuit diagram thereof.

The LC element of the embodiment has two insulating substrates 100-1, 100-2.
, 32-4, sandwiched between a plurality of insulating plates 32-1, 32-2,..., 32-4, and interlayers 36-1, 36-2,. And a first conductor 40 and a second conductor 50 provided on the first and second substrates.

Each of the insulating plates 32 is composed of three segments 32a, 32b, and 32c. For example, the insulating plate 32-2 shown in FIG.
Is composed of a central segment 32a-2 and side segments 32b-2, 32c-2 located on both sides thereof.
The center segment 32a is tapered on both the left and right sides so as to have a trapezoidal cross section, and the side segments 32b and 32c located on both sides thereof are also provided with acute angle tapers so as to mesh with the taper.

These insulating plates 32 and substrate 100 may be formed using various insulating materials as needed. As the insulating material, for example, ceramics, plastics, various synthetic resins, and the like can be considered. In the embodiment, ceramics is used.

Further, the first conductor 40 is provided between the interlayers 36-1, 36 of the insulating plate 32.
36-4, a plurality of first conductive elements 44-1, 44-2,..., 44-6 provided to continuously circulate from a segment between one layer to a segment between other layers. It is configured. Similarly, the second conductor 50 is provided on the interlayers 36-1, 36-2... 36-4 of the insulating plate 32 so as to continuously circulate from a segment between one layer to a segment between the other layers. The plurality of second conductive elements 54-
., 54-7.

What is characteristic here is that the first and second conductive elements 44 and 54 are opposed to each other via the insulating plate 32, and form a substantially continuous capacitance therebetween.

As a result, the first and second conductors 40 and 50 each function as a coil having a predetermined number of turns, and the capacitance C is substantially reduced between the first and second conductors 40 and 50 via the insulating plate 32. It is presumed that it is formed continuously and that the capacitance C is formed between the first and second conductors 40 and 50 in a distributed manner.

Here, the first and second conductive elements of the embodiment
44 and 54 are formed on the surface of the insulating plate 32 in the following order by using a technique such as printing, shaking, plating or the like.

First, as shown in FIG. 1A, an insulating plate 32-1 is first laminated on a substrate 100-1. And this insulating plate 32
An auxiliary terminal portion 52a 'is formed on the end surface of the central segment 32a-1 located at the center of the -1. In addition, segment 3
On the surfaces of 2a-1 and 32b-1, a second conductive element 54-1 continuous from the auxiliary terminal portion 52a 'is formed.

Next, as shown in FIG. 1B, the end of the second conductive element 54 is exposed on the surface of the insulating plate 32-1.
Central segment 32a constituting a part of the next insulating plate 32-2
-2 is laminated. Then, the second conductive element 54-
From the side segment 32b-1, the second conductive element 54-2, which continues from the first, is separated from the center segment 32a of the next layer.
-2 to form a coating. At the same time, the auxiliary terminal portion 42a 'is formed on the end surface of the first layer side segment 32c-1. Further, from the side segment 32c-1 to the surface of the central segment 32a-2 of the next layer, the auxiliary terminal 42a 'is continuous with the second conductive element 54-1 via the central segment 32a-2. The facing first conductive element 44-1 is coated.

Next, as shown in FIG. 1 (c), the side segments 32b-2, 32c-2 of the next layer are connected to the insulating plate 32-1 so that the ends of the conductive elements 44-2, 54-1 are exposed. Laminated on the surface of. Then, a second conductive element 54-3, which is continuous from the second conductive element 54-2, is formed on the segments 32a-2 and 32c-2. At the same time, the segment
32a-2, 32b-2, the first conductive element 44-
1 and these segments 32a-2, 32b-
The first conductive element 44-2 opposed to the second conductive element 54-2 through 2 is coated and formed in a substantially U-shape.

Such an insulating layer laminating step and an element forming step are repeatedly performed as shown in FIGS. 1 (d) to 1 (g).
Thereafter, as shown in FIG. 2H, the insulating substrate 100-2 is laminated on the insulating plate 32-4 to form the laminate 30. Thereby, the first conductor 40 and the second conductor 50 are
Each of the coils has a predetermined number of turns.

At this time, in the step of FIG. 11G, the first conductive element 44-6 is attached to the end face of the side segment 32b-4.
To form a continuous auxiliary terminal portion 42b '.

In the final step shown in FIG. 1 (i), the auxiliary terminal portions 42a ', 42b', 52
The terminals 42a, 42b, 42 electrically connected to a 'are coated.

As a result, as shown in FIG. 2, the LC noise filter of this embodiment has two input / output terminals 42a,
42b and one ground terminal 52a.
It becomes an LC element. Moreover, since this LC element is formed as an SMD type (surface mount device) element, its handling is extremely easy.

FIG. 3A shows an equivalent circuit diagram of the LC noise filter of this embodiment.

As shown in the figure, the first conductor 40 has both ends connected to terminals 42a and 42b, and functions as a coil having a predetermined inductance L1. Similarly, the second conductor is
One end thereof is connected to the terminal 52a and a predetermined inductance L
Functions as a coil with two.

Moreover, as described above, these first and second conductors 40, 50
It is presumed that the capacitance C is formed almost continuously and in a distributed constant manner between.

Therefore, the LC noise filter of the present invention can exhibit excellent characteristics not found in the conventional lumped-constant LC element,
By using this LC noise filter as an LC noise filter, it can be used as a normal mode LC noise filter having excellent attenuation characteristics over a wide band.

In addition, according to the present invention, the first and second conductors 40 and 50 are opposed to each other via the insulating plate 32. Therefore, it is possible to obtain a sufficiently large capacitance C as compared with the conventional LC noise filter, and from this viewpoint, it can be used as an LC noise filter having better attenuation characteristics than the conventional LC noise filter. Will be understood.

Further, the conductive elements 44 and 54 of the present embodiment are three-dimensionally arranged as shown in FIG. At this time, the first
Taking the conductive element 44-1 as an example, the conductive element 44-1 not only forms a capacitance in opposition to the second conductive element 54-1 through the insulating plate 32-2, but also forms a capacitance. , And the second conductive element 54-3 located thereunder also forms a capacitance.
As described above, since each conductive element 44 forms a capacitance with the second conductive element 54 located on the upper and lower sides thereof, a sufficiently large space is provided between the two in a limited space. It can be understood that the capacitance C can be obtained, and as a result, the LC noise filter has good characteristics.

In order to further increase the capacitance C of the LC element, it is preferable to provide unevenness by edging or the like on the surface of the insulating plate 32 as shown in FIG. By covering the surface of the insulating plate 32 thus formed with the conductive elements 44 and 52, the conductive elements 44 and 54 are opposed to each other in a wide area. This allows LC of the same size
Even with the element, it is possible to obtain a larger capacitance C.

As described above, according to the present invention, it is possible to obtain an LC element in which the capacitance C is formed in a distributed constant. In addition, the capacitance C can be set to a large value as needed without increasing the size of the element itself, and it is possible to exhibit excellent characteristics not available in the conventional LC noise filter.

In the above embodiment, the LC noise filter of the present invention is used.
The case of forming as an SMD type element has been described by way of example, but the present invention is not limited to this, and the terminal 42a, 42b, 52 may be formed as a discrete type element having a pin structure.

FIG. 3A shows an LC noise filter according to this embodiment.
Not only can it be used as a normal mode LC noise filter as shown in FIG. 3 but also as a four-terminal common mode LC noise filter as shown in FIG. 3 (b).
In this case, terminals 52a and 52b are provided at both ends of the second conductor 50.
And these terminals 52a and 52b may be used as input / output terminals without being grounded.

Further, in the LC element of the present invention, the first and second conductors
The conductive patterns of 40 and 50 are not limited to the above embodiment, and if a coil having a predetermined number of turns can be formed,
Any pattern can be used as needed.

Second Embodiment Next, a preferred second embodiment of the LC noise filter of the present invention will be described. Members corresponding to those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

Although the LC noise filter of the above embodiment uses an insulating plate as an insulating layer, the present embodiment is characterized in that an insulating thin film is used as an insulating layer. This makes it possible to form an LC noise filter using the thin film forming technique.

FIG. 6 shows a preferred example of a manufacturing process of the LC noise filter.

As shown in FIG. 6 (a), the LC element of this embodiment is formed by first forming an auxiliary terminal portion 52a 'on the end surface of an insulating substrate 100 and forming the auxiliary terminal portion 52a on the surface of the insulating substrate 100.
A second conductive element 54-1 continuous from a 'is formed in a substantially L-shape.

Next, as shown in FIG. 6 (b), the insulating thin film 200-1 is formed as a central segment 32a-2 on the surface of the insulating substrate 100 so that the end of the second conductive element 54 is exposed. I do.

Next, as shown in FIG. 6 (c), a second conductive element 54-2 continuous from the second conductive element 54-1 is formed on the insulating substrate 100 and the central segment 32a-2. I do. At the same time, the auxiliary terminal portion 42a 'is formed on the end surface of the insulating substrate 100 by coating.
From the central terminal 32a-2 to the auxiliary terminal portion 52a '.
And the second through the central segment 32a-2.
The first conductive element 44-1 opposed to the first conductive element 54-1 is coated in a substantially U-shape.

Next, as shown in FIG.
The insulating thin films 200-2,2-2 are exposed so that the ends of 44-1 and 54-2 are exposed.
00-3 is coated and formed as side segments 32b-2 and 32c-2.

Next, as shown in FIG. 6 (e), each segment 32a-
On the 2,32b-2,32c-2, the conductive element 54-2,44
The first conductive element 44-2 and the second conductive element 54-3 are formed so as to be opposed to each other through the insulating thin film 200.

The thin film forming step and the element forming step are repeated as shown in FIGS. 6 (g) to (l) to form the laminate 30.

At this time, in the step of FIG. 6H, the auxiliary terminal portion 42b 'continuous from the first conductive element 44-5 is formed over the side surface of the substrate 100.

In the final step shown in FIG. 6 (m), the auxiliary terminal portions 42a ', 42b', 52
The terminals 42a, 42b, 52a electrically connected to a 'are formed by coating.

As a result, according to this embodiment, a three-terminal LC element having a distributed constant type equivalent circuit composed of L and C as shown in FIG. 3 can be obtained. Therefore, by using the LC element of this embodiment as, for example, a noise filter, it is possible to exhibit good attenuation characteristics over a wide band.

In this embodiment, the terminal is provided only at one end of the second conductor 50.
Although the case where the second conductor 50a is provided and used as a ground terminal has been described as an example, the present invention is not limited to this.
May be provided at both ends to form a four-terminal LC element. In this case, it can be used as a common mode type LC noise filter as shown in FIG. 3 (b).

Further, the patterns of the first and second conductors 40 and 50 and the pattern of the insulating thin film 200 are not limited to these, and may be any patterns as necessary.

The LC noise filter of this embodiment can be easily formed by using various thin film forming techniques, for example, a vapor deposition method, a sputtering method, an ion plating method, a vapor phase growth method and the like.

For example, when the LC noise filter of this embodiment is formed by a sputtering method, a plurality of vacuum chambers separated by gates are prepared, and argon gas is sealed in each vacuum chamber. Then, a target formed using a base material corresponding to the material of the insulating thin film 200 and the conductive elements 44 and 54 is provided in each vacuum chamber. And
Each target in each of the chambers is a substrate 100
And so as to face. A mask for specifying a pattern is provided between the target and the substrate 100.

A negative DC voltage is applied to the target via a negative electrode, and a ground electrode is connected to the substrate 100. Then, by applying a high-frequency voltage between the negative electrode and the ground electrode, the target receives the impact of positively ionized gas and emits its atoms or molecules, which are sputtered toward the substrate 100 to form a thin film. Adhere to the shape. The sputter pattern at this time is determined by the mask pattern.

Accordingly, a vacuum chamber corresponding to a thin film forming step of forming the insulating thin film 200 on the substrate 100 and a chamber for an element forming step of forming the conductive elements 44 and 54 are provided, and a thin film forming step is performed. By alternately repeating the element forming step, the LC noise filter of the embodiment can be easily formed.

It should be noted that the present invention formed in such a thin film forming technology
The LC noise filter can be smaller and lighter than that of the first embodiment.

Third Embodiment In each of the above embodiments, each of the conductive elements 44 and 54 of the first and second conductors 40 and 50 is configured to circulate in a coil shape with the same diameter. The present invention is not limited to this, and the LC element can be formed by changing the coil diameter as needed.

For example, each of the conductive elements 44 and 54 of the first and second conductors 40 and 50 continuously circulates from one insulating layer to the next while gradually decreasing the coil diameter. The resonance characteristics of the LC elements of the embodiments can be different from those of the above embodiments. In addition, the attenuation characteristics are slightly different from those of the above embodiments, but are excellent over a wide band.

Also, contrary to the embodiment, by forming the first and second conductors 40 and 50 so that the coil diameter gradually increases, the inductance L of each conductor gradually increases. Thereby, it can be used as a noise filter capable of removing noise while effectively suppressing ringing.

Further, in the present embodiment, the case where the coil diameters of the first and second conductors 40 and 50 are changed to shift the resonance point of the LC element has been described as an example. For example, by changing the facing width (area) of the first and second conductive elements 44 and 54, the resonance point can be shifted.

Fourth Embodiment In the above-described embodiment, the case where the second conductor 50 is configured to be a coil having a predetermined number of turns has been described as an example. However, the present invention is not limited to this, and the second conductor 50 may be used as necessary. Conductor
The 50 may be divided into a plurality of sections, and each divided section may be formed to be grounded.

FIG. 7 shows an equivalent circuit diagram of the LC noise filter thus formed.

In the figure, a first conductor 50 is connected to input / output terminals 42a and 42b at both ends, and is formed so as to function as an inductor conductor as in the above-described embodiments.

Further, the second conductor 50 includes a plurality of divided ground conductors 58-
1,58-2,58-3,58-4. Thereby, each of these divided ground conductors 58-1, 58-2,.
Is connected almost directly to the ground terminal 52, which is the same state as when a plurality of LC elements are connected in a distributed manner and in series.

Therefore, the capacitance formed as a distributed constant between the first and second conductors 40 and 50 can effectively function as the C component of the LC filter.

By the way, in such an LC element, it has been confirmed that the position where the divided ground conductor 58 faces the first conductor 40 greatly affects the attenuation characteristics of the noise filter.

As a result of the study by the present inventor, one of the plurality of divided ground conductors 58 (58-1 in the embodiment) is placed at a position close to one of the input / output terminals 42a of the first conductor 50 in terms of electric circuit. The other one (58-4 in the embodiment) is connected to another input / output terminal 42
By placing it close to the position close to the electrical circuit with b,
It was confirmed that good damping characteristics could be obtained.

As a result of the study by the present inventor, as shown in FIG. 7, it is preferable that each of the divided ground conductors 58 be grounded only at one end thereof, and that the divided ground conductor 58 be located at a place electrically close to the input / output terminals 42a and 42b. Divided ground conductors 58-1 and 58-4 are input / output terminals 42a,
It has been found that it is preferable to ground the one closer to 42b in order to obtain good attenuation characteristics.

Other Embodiments The present invention is not limited to the above embodiments, and various modifications can be made within the scope of the present invention.

For example, in each of the embodiments described above, the case where each insulating layer is composed of three segments has been described as an example. However, the present invention is not limited thereto, and each insulating layer may be composed of an arbitrary number of segments as necessary. Is also good.

For example, in each of the above embodiments, the first and second conductors 40, 50
Is formed on the insulating plate 32, for example.
Although the description has been made taking the case of forming a coating on the example of 200, the present invention is not limited to this. For example, a conductive plate is punched and formed into the shape of each of the first and second conductive elements 44 and 54, and this is insulated. It may be fixed on the plate 32 or the insulating thin film 200.

Further, in each of the above embodiments, the case where the insulating thin film 200 is formed by a thin film forming technique has been described as an example.However, the present invention is not limited to this. It can also be formed.

In the above embodiments, when increasing the inductance of the first and second conductors 40 and 50, for example, by increasing the number of laminated insulating layers (the insulating plate 32 and the insulating thin film 200), The case where the number of turns of 40, 50 and 60 is set large is described as an example. However, the present invention is not limited to this, and other than this, for example, each of the conductive elements 44, 54
May be formed using an energizing magnetic material such as Fe, or a magnetic material may be adhered or powder-coated on each of the conductive elements 44 and 54. Also, by using a method such as mixing a magnetic substance in the insulating plate 32 and the insulating thin film 200, the inductance L can be increased.

In addition, for example, as shown by a broken line in FIG.
An open magnetic path or a closed magnetic path passing around the stacked body 30 through the insertion hole 70 may be formed by powder-coating the surface of the magnetic material 30 with a magnetic material or storing the surface in a magnetic container.

If necessary, the lengths of the first and second conductors 40 and 50 are set to different values, for example, the first conductor 40 is replaced with the second conductor.
It is also possible to form it longer than 50 and set its inductance L large.

In each of the above embodiments, the first and second conductors 40, 50
In order to increase the value of the capacitance formed as a distributed constant between the conductive elements 44 and 54, the width of each of the conductive elements 44 and 54 may be increased and the facing area thereof may be increased.

In addition, other than this, an insulating plate used as an insulating layer
32. The capacitance can be increased by using a high dielectric constant as the insulating thin film 200 or by increasing the number of stacked insulating layers.

In addition, the capacitance can be increased by, for example, reducing the thickness of each of the insulating layers, or by adopting an electrolytic capacitor method and making the conductor have a porous structure.

Further, in the LC element of the present invention, for example, when the second conductor 50 is grounded and used as a normal mode filter, the conductive property of the second conductor 50 is larger than the width of the conductive element 44 of the first conductor 40. By making the width of the conductive element 54 large, the second conductive element 54 functions as a shield for the first conductive element 44, effectively preventing the leakage of magnetic flux between the layers and the occurrence of a short circuit phenomenon. Can be prevented.

Further, in each of the above embodiments, the case where the insulating plate 32 or the insulating thin film 200 used as the insulating layer is formed using an insulating material such as a ceramic or a plastic has been described as an example. By using the electromagnetic wave absorbing heat generating element as above, performance in a high frequency band as a noise filter can be improved.

Further, in each of the embodiments described above, an example was described in which the LC noise filter of the present invention was used as a filter, particularly as a noise filter.However, the present invention is not limited to this. Also, it can be used as a varistor or the like.

In each of the above embodiments, the case where the thin film forming technique is used has been described as an example. However, the LC element of the present invention may be formed using the thick film forming technique as needed.

[Effects of the Invention] As described above, according to the present invention, a sufficiently large capacitance can be formed between the first and second conductors facing each other with the insulating layer interposed therebetween. In addition, an inexpensive LC noise filter can be obtained.

In particular, according to the present invention, between the first and second conductors,
It is presumed that the capacitance is formed in a distributed constant manner through the insulating layer, and as a result, an LC with excellent attenuation characteristics that can reliably attenuate and remove various intruding noises compared to conventional lumped-constant noise filters It can be used as a noise filter.

Furthermore, according to the present invention, by using both the first and second conductors as current-carrying conductors, it can be used as a common-mode noise filter, and by grounding the second conductor, a normal-mode noise filter can be used. There is also an effect that it can be used as a noise filter.

Further, according to the present invention, an insulating layer and a conductor can be formed on a substrate by a film forming technique. This makes it possible to form an IC on a wafer by combining the present invention with a semiconductor manufacturing technique. At the same time, an LC noise filter can be formed. Therefore, the LC noise filter of the present invention is incorporated into various ICs, for example, as an LC filter or the like,
There is also an effect that an IC with a built-in filter can be formed.

[Brief description of the drawings]

1 (a) to 1 (i) are explanatory views of a series of manufacturing steps for forming an LC noise filter of the present invention by laminating an insulating plate on a substrate, and FIG. 2 is formed by the manufacturing steps. FIGS. 3 (a) and 3 (b) are equivalent circuit diagrams of the LC element of the embodiment, FIG. 4 is an explanatory view of a three-dimensional arrangement of each conductive element, FIG. FIG. 6 (a) to FIG. 6 (m) are diagrams illustrating a case where an effective covering area of a conductive element is increased by forming irregularities on a substrate surface and forming a conductive element thereon. FIG. 7 is an explanatory view showing a manufacturing process of an LC noise filter formed by coating and forming a conductive element and an insulating thin film using a technique. FIG. 7 is an equivalent circuit when the LC element of the present invention is formed as a split ground type. FIG. 8 is a diagram showing an example of a conventional general LC noise filter. 9 (a) to 9 (f) are explanatory diagrams showing an example of a manufacturing process of a conventional LC noise filter, and FIG. 10 is an equivalent circuit diagram of the LC element shown in FIG. 30 ... laminated body, 32 ... insulating plate, 32a, 32b, 32c ... segment, 36 ... interlayer, 40 ... first conductor, 42 ... input / output terminal, 44 ... first conductive element , 50 ... second conductor, 52 ... ground terminal, 54 ... second conductive element, 100 ... substrate, 200 ... insulating thin film.

Claims (11)

(57) [Claims] 1. A laminate formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor forming a capacitance between the first conductor and the first conductor. The second conductor comprises: a second conductive element between the insulating layers;
An LC noise filter which is provided so as to continuously circulate in the same direction from a segment between one layer to a segment between other layers to form a coil having a predetermined number of turns. 2. A laminate formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor that forms a capacitance between the first conductor and the first conductor. The first and second conductors are formed as inductor conductors having input / output terminals at both ends thereof. An LC noise filter characterized by the following. 3. The LC noise filter according to claim 1, wherein the first and second conductors are formed as inductor conductors having input / output terminals at both ends. 4. A laminate formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor forming a capacitance between the first conductor and the first conductor. The first conductor is formed as an inductor conductor having input / output terminals connected to both ends thereof, The second conductor is divided into a plurality of parts, each divided section is formed as a capacitor conductor grounded, and the laminate is formed by laminating an insulating plate composed of a plurality of segments as an insulating layer; And the second conductive element is connected between the segments to the first and second conductive elements between other layers. 5. A laminated body formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor forming a capacitance between the first conductor and the first conductor. The first conductor is formed as an inductor conductor having input / output terminals connected to both ends thereof, The second conductor is divided into a plurality of parts, each divided section is formed as a capacitor conductor grounded, and the laminated body is formed by laminating an insulating thin film composed of a plurality of segments as an insulating layer; An LC noise filter, wherein the two conductive elements are connected between the segments to first and second conductive elements between other layers. 6. The laminate according to claim 1, wherein the laminate is formed by laminating an insulating thin film composed of a plurality of segments as an insulating layer, wherein the first and second conductive elements are: An LC noise filter connected between the segments to first and second conductive elements between other layers. 7. A laminated body formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor forming a capacitance between the first conductor and the first conductor. The first conductor is formed as an inductor conductor having input / output terminals connected to both ends thereof, The LC noise filter is characterized in that the second conductor is divided into a plurality of parts, each of the divided sections is formed as a capacitor conductor grounded, and the divided section of the second conductor is grounded only at one end thereof. . 8. A laminate formed by laminating an insulating layer composed of a plurality of segments, and between the layers of the insulating layer, continuously in the same direction from a segment between one layer to a segment between other layers. The first to go around
A first conductor that forms a coil having a predetermined number of turns, and a second conductive element that faces the first conductive element via an insulating layer between layers of the insulating layer. And a second conductor forming a capacitance between the first conductor and the first conductor. The first conductor is formed as an inductor conductor having input / output terminals connected to both ends thereof, The second conductor is divided into a plurality of portions, each of the divided sections is formed as a grounded capacitor conductor, and the divided section of the second conductor opposed to both ends of the first conductor is an input of the first conductor. An LC noise filter, which is grounded at a position close to an output terminal in an electric circuit. 9. The LC noise filter according to claim 6, wherein only one end of the divided section of the second conductor is grounded. 10. The divided section of the second conductor facing both ends of the first conductor, wherein the divided section of the second conductor faces the input / output terminal of the first conductor. An LC noise filter which is grounded at a position close to a circuit. 11. A film laminating step of sequentially laminating an insulating thin film layer composed of a plurality of segment thin films on a substrate, and a first conductive layer connected between layers each time said segment thin films are laminated. At least one of the element and the second conductive element is coated so as to continuously circulate from the segment thin film between one layer to the segment thin film between other layers, and has a first conductor having a predetermined number of turns and a predetermined number of turns. And an element forming step of forming a second conductor is alternately repeated. In the element forming step, the first conductive element and the second conductive element face each other via the insulating thin film layer. The second conductor is divided into a plurality of portions, and each of the divided sections is formed so as to function as a grounded capacitor conductor. Filter manufacturing method.