JP3221030B2 - Cold trap with pulse tube refrigerator - Google Patents
Cold trap with pulse tube refrigeratorInfo
- Publication number
- JP3221030B2 JP3221030B2 JP04153892A JP4153892A JP3221030B2 JP 3221030 B2 JP3221030 B2 JP 3221030B2 JP 04153892 A JP04153892 A JP 04153892A JP 4153892 A JP4153892 A JP 4153892A JP 3221030 B2 JP3221030 B2 JP 3221030B2
- Authority
- JP
- Japan
- Prior art keywords
- cold trap
- pulse tube
- tube refrigerator
- processing chamber
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005057 refrigeration Methods 0.000 description 6
- 230000002411 adverse Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
- F25D19/006—Thermal coupling structure or interface
Description
【０００１】[0001]
【産業上の利用分野】本発明は、パルス管冷凍機付コー
ルドトラツプに関し、各種高真空発生装置に使用され
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cold trap with a pulse tube refrigerator, and is used for various high vacuum generators.
【０００２】[0002]
【従来の技術】コールドトラツプの従来技術としては様
々なものが提案されてきている。例えば、特開平５８−
１４８２１４号公報に開示されたものでは、ターボ分子
ポンプ等の高真空発生装置と処理室との間に配設される
コールドトラツプにおいて、その分子流路上に配設され
たバツフル状板を逆ブライトンサイクルを用いた冷凍機
の冷凍出力部に熱的に結合している。この冷凍出力部は
膨張機を有している。2. Description of the Related Art Various conventional cold trap technologies have been proposed. For example, JP-A-58-
In a cold trap provided between a processing chamber and a high vacuum generating device such as a turbo molecular pump, a baffle plate provided on a molecular flow path of a cold trap provided between the processing chamber and the high-vacuum generator is disclosed in Japanese Patent No. 148214. It is thermally coupled to the refrigeration output of a cycle-based refrigerator. This refrigeration output section has an expander.
【０００３】処理室を高真空状態とする場合には、高真
空発生装置にて処理室内の各種分子を除去すると同時
に、処理室内に多量に存在する水分子を冷凍出力により
バツフル状板を介して除去している。When the processing chamber is brought into a high vacuum state, various molecules in the processing chamber are removed by a high vacuum generator, and at the same time, a large amount of water molecules present in the processing chamber are removed by a refrigeration output through a baffle plate. Has been removed.
【０００４】[0004]
【発明が解決しようとする課題】しかし、上述した従来
技術のコールドトラツプでは、例えば電動機等で駆動す
る膨張機（即ち可動部）があるために、その耐久・信頼
性に問題が生じたりメンテナンスが必要となる。更に
は、膨張機の振動により処理室〜高真空発生装置の真空
系に悪影響を及ぼすおそれがある。However, in the above-described conventional cold trap, since there is an expander (that is, a movable portion) driven by, for example, an electric motor or the like, a problem occurs in durability and reliability or maintenance. Is required. Further, the vibration of the expander may adversely affect the vacuum system of the processing chamber to the high vacuum generator.
【０００５】そこで、本発明では、コールドトラツプか
ら可動部を除去することを、その技術的課題とする。Therefore, it is an object of the present invention to remove a movable portion from a cold trap.
【０００６】[0006]
【０００７】[0007]
【課題を解決するための手段】前述した本発明の技術的
課題を解決するために講じた本発明の技術的手段は、高
真空発生装置と処理室との間に配設されるコールドトラ
ツプにおいて、コールドトラツプの分子流路上にバツフ
ル状板を配設し、バツフル状板をパルス管冷凍機のコー
ルドエンドに熱的に結合させたことである。The technical means of the present invention taken to solve the above-mentioned technical problem of the present invention is a cold trap disposed between a high vacuum generator and a processing chamber. , A baffle-like plate is disposed on the molecular channel of the cold trap, and the baffle-like plate is thermally coupled to a cold end of the pulse tube refrigerator.
【０００８】[0008]
【作用】上述した本発明の技術的手段によれば、処理室
内の各種気体分子は高真空発生装置に除去されると共
に、特に処理室内の水分子はパルス管冷凍機のコールド
エンドに結合されたバツフル状板により効率よく除去さ
れる。According to the above-mentioned technical means of the present invention, various gas molecules in the processing chamber are removed by the high vacuum generator, and water molecules in the processing chamber are particularly connected to the cold end of the pulse tube refrigerator. It is efficiently removed by the baffle-like plate.
【０００９】[0009]
【実施例】以下、本発明の技術的手段を具体化した実施
例について添付図面に基づいて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment embodying the technical means of the present invention will be described below with reference to the accompanying drawings.
【００１０】図１において、高真空発生装置（例えばタ
ーボ分子ポンプ、油拡散ポンプ或いはクライオポンプ
等）１１と高真空となるべき処理室１２との間にコール
ドトラツプ１３が配設されている。また、処理室１２の
コールドトラツプ１３との接続部には、処理室１２と高
真空発生装置１１及びコールドトラツプ１３との間を開
閉できるメインバルブ１４が配設されている。In FIG. 1, a cold trap 13 is disposed between a high vacuum generating device (for example, a turbo molecular pump, an oil diffusion pump, a cryopump, etc.) 11 and a processing chamber 12 to be set to a high vacuum. A main valve 14 that can open and close the processing chamber 12, the high vacuum generator 11, and the cold trap 13 is provided at a connection portion of the processing chamber 12 with the cold trap 13.
【００１１】コールドトラツプ１３において、その分子
流路１５上にバツフル状板１６を配設する。そして、バ
ツフル状板１６はパルス管冷凍機１７のコールドエンド
１８に熱的に結合している。尚、コールドエンド１８は
パルス管冷凍機１７の図示しない圧縮機と接続してい
る。周知の如く、このコールドエンド１８と連続的に配
設されるパルス管１９には可動部が存在しない。In the cold trap 13, a baffle plate 16 is provided on the molecular channel 15. The baffle plate 16 is thermally connected to the cold end 18 of the pulse tube refrigerator 17. The cold end 18 is connected to a compressor (not shown) of the pulse tube refrigerator 17. As is well known, the pulse tube 19 provided continuously with the cold end 18 has no movable part.
【００１２】以上の構成を有するパルス管冷凍機付コー
ルドトラツプの作動について以下に説明する。The operation of the cold trap with a pulse tube refrigerator having the above-described configuration will be described below.
【００１３】処理室１２内を高真空状態とするために高
真空発生装置１１及びパルス管冷凍機を運転させる。こ
こで、処理室１２内の各種気体分子は高真空発生装置１
１により除去されていく。コールドトラツプ１３では、
コールドエンド１８の冷凍出力によりバツフル状板１６
が冷凍状態（例えば１５０Ｋ以下程度の極低温領域）に
ある。従つて、処理室１２内に存在する水分子は分子流
路１５を通過する際にバツフル状板１６上に凝固する。
この結果、処理室１２内は高真空状態となるものであ
る。The high vacuum generator 11 and the pulse tube refrigerator are operated to bring the inside of the processing chamber 12 into a high vacuum state. Here, various gas molecules in the processing chamber 12 are supplied to the high vacuum generator 1.
1 to be removed. In cold trap 13,
The chilled output of the cold end 18 causes the baffle-shaped plate 16
Is in a frozen state (for example, in a very low temperature range of about 150 K or less). Therefore, the water molecules existing in the processing chamber 12 solidify on the baffle-like plate 16 when passing through the molecular channel 15.
As a result, the inside of the processing chamber 12 is brought into a high vacuum state.
【００１４】[0014]
【発明の効果】上述したように本発明のパルス管冷凍機
付コールドトラツプでは、コールドトラツプ内に非可動
タイプの冷凍手段が配設されているので、そのメンテナ
ンス間隔も非常に長くメンテナンスによる真空系への悪
影響が防止できる。また、非可動タイプであるために振
動による真空系への悪影響が防止できる。As described above, in the cold trap with the pulse tube refrigerator according to the present invention, since the non-movable type refrigeration means is provided in the cold trap, the maintenance interval is very long and maintenance is required. The adverse effect on the vacuum system can be prevented. Further, since it is a non-movable type, it is possible to prevent the vacuum system from being adversely affected by vibration.
【００１５】ところで、非可動タイプの冷凍手段として
は液体窒素を用いたもの等があるが冷凍出力温度が一定
であり、これに対して本発明のパルス管冷凍機を用いれ
ばコールドトラツプ内の温度を可変とできるといつた利
点を有している。By the way, there is a non-movable type refrigeration means using liquid nitrogen, etc., but the refrigeration output temperature is constant. On the other hand, if the pulse tube refrigerator of the present invention is used, the cold trap inside the cold trap will be reduced. It has the advantage that the temperature can be made variable.
【図１】本発明実施例のパルス管冷凍機付コールドトラ
ツプの構成図を示す。FIG. 1 is a configuration diagram of a cold trap with a pulse tube refrigerator according to an embodiment of the present invention.
１１ 高真空発生装置、 １２ 処理室、 １３ コールドトラツプ、 １６ バツフル状板、 １７ パルス管冷凍機、 １８ コールドエンド。 11 High vacuum generator, 12 processing room, 13 cold trap, 16 baffle plate, 17 pulse tube refrigerator, 18 cold end.
Claims (1)
れるコールドトラツプにおいて、 前記コールドトラツプの分子流路上にバツフル状板を配
設し、該バツフル状板をパルス管冷凍機のコールドエン
ドに熱的に結合させたことを特徴とするパルス管冷凍機
付コールドトラツプ。1. A cold trap disposed between a high vacuum generator and a processing chamber, wherein a baffle plate is disposed on a molecular flow path of the cold trap, and the baffle plate is cooled by a pulse tube. A cold trap with a pulse tube refrigerator characterized by being thermally coupled to the cold end of the machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04153892A JP3221030B2 (en) | 1992-02-27 | 1992-02-27 | Cold trap with pulse tube refrigerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04153892A JP3221030B2 (en) | 1992-02-27 | 1992-02-27 | Cold trap with pulse tube refrigerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05237304A JPH05237304A (en) | 1993-09-17 |
| JP3221030B2 true JP3221030B2 (en) | 2001-10-22 |
Family
ID=12611198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04153892A Ceased JP3221030B2 (en) | 1992-02-27 | 1992-02-27 | Cold trap with pulse tube refrigerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3221030B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6547741B2 (en) | 1998-01-13 | 2003-04-15 | Omron Corporation | Wrist sphygmomanometer |
| US7963921B1 (en) | 1997-12-24 | 2011-06-21 | Kaz Usa, Inc. | Method and measuring device for determining blood pressure |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10184540A (en) * | 1996-12-25 | 1998-07-14 | Anelva Corp | Cryopump |
| JP2000268756A (en) | 1999-03-12 | 2000-09-29 | Toshiba Corp | Charged particle beam apparatus and control method for charged particle beam |
-
1992
- 1992-02-27 JP JP04153892A patent/JP3221030B2/en not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7963921B1 (en) | 1997-12-24 | 2011-06-21 | Kaz Usa, Inc. | Method and measuring device for determining blood pressure |
| US6547741B2 (en) | 1998-01-13 | 2003-04-15 | Omron Corporation | Wrist sphygmomanometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05237304A (en) | 1993-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RVOP | Cancellation by post-grant opposition |