JP3191261B2 - Infrared camera - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared camera used for an infrared thermal imaging device.

[0002]

2. Description of the Related Art In general, an infrared camera used in an infrared thermal imaging apparatus which detects infrared radiation emitted from the surface of a subject and displays its temperature distribution as a visible image (thermal image) is shown in FIG. Some are configured as follows. First, the optical system scanning mechanism of the infrared camera will be described. Light emitted from the surface of the subject 50 is blocked by a silicon window 51 provided in a front opening (not shown) of a housing (not shown) so that visible light 52 is blocked. Incident. In the housing, a decahedral rotating mirror 55 rotated at a constant speed by a driving motor (not shown) is disposed on substantially the same plane as the silicon window 51, and is incident on the housing. The infrared light 53 enters the rotating mirror 55.

The rotating mirror 55 has a polygonal pyramid shape in which mirrors 55a to 55j each having a decahedral shape are slightly inclined in a direction perpendicular to the rotation center O of the rotating mirror. Therefore, when the infrared ray 53 enters the rotating mirror 55, it is reflected by each of the mirrors 55a to 55j. At this time, each of the mirrors 55a to 55j scans a portion of the subject 50 that is slightly shifted in the vertical direction in the horizontal direction, and scans a range of 1 ° in the vertical direction with one rotation of the rotating mirror 55. You. The infrared light 53 scanned in the horizontal and vertical directions in this manner is reflected by a turn-back mirror 56 disposed substantially on the same plane as the rotating mirror 55, passes through an infrared transmission filter 57, and is condensed. 58
The beam is converged by this to be incident on the infrared detector 59.

The infrared detector 59 is composed of ten detection elements arranged in parallel in the direction of the rotation center O of the rotation mirror 55, and the element interval is 1 for each element for a vertical viewing angle of 10 °. The interval is set to an angle corresponding to every °.
Therefore, in the first mirror 55a of the rotating mirror 55, the infrared detectors 59 of 10 elements simultaneously receive thermal image signals at intervals of 1 ° with respect to the vertical direction of the subject 50, and 0.1 mm per line.
It is output as ten scanning line signals with an interval of °. Next, with the rotation of the rotating mirror 55, the next mirror 55 is rotated.
b reflects the infrared light 53 from the subject 50,
Due to the difference in inclination of 55b, a 10-element infrared detector 59
Receive the thermal image signal at a position shifted by 0.1 ° from the previous position at the same time, and similarly output as 10 scanning line signals at intervals of 0.1 ° for every 1 °.

[0005] When the rotating mirror 55 makes one rotation in this way, the object 50 has been scanned over a vertical viewing angle of 10 °, and ten 0.
Infrared rays 53 from different subjects 50 enter by 1 ° each, and the infrared detector 59 as a whole is output as 100 infrared scanning signals. The infrared scanning signal output from the infrared detector 59 is amplified by an amplifier circuit 60, processed by a processor 61, and displayed as a thermal image on a monitor 62.

On the other hand, the infrared detector 59 detects the infrared ray 53 and converts it into an electric signal, and forms a two-dimensional image of the thermal image of the subject 50 whose temperature is changing with a limited number of elements. In order to obtain high sensitivity, an infrared detector 59 having high sensitivity and high response speed is required. Therefore, conventionally, a quantum infrared detector 59 such as indium antimony (InSb) or mercury cadmium tellurium (HgCdTe) has been used. However, these InSb elements and HgCdTe elements require -200 to obtain high sensitivity.
Since it is necessary to cool at a very low temperature of about ° C, it is cooled to a very low temperature by using a JT cooler method or a liquid nitrogen cooling method using argon gas as a cooling medium.

[0007]

As described above, in contrast to the structure in which one rotating mirror 55 scans the infrared ray 53 in the horizontal and vertical directions, the scanned infrared ray 53 is used.
Detector 59 that collects light by a condenser lens 58
The number of elements is plural and 1 ° with respect to the vertical direction.
Are arranged at intervals corresponding to the above, and the light condensing positions are wide in a plurality, and as a result, positional displacement, that is, scanning distortion occurs. In the design, when the distance between the subject 50 and the infrared camera is at a certain distance, the scanning distortion is designed to be eliminated. However, when the distance is much more than that, the scanning distortion is increased. was there. In addition, it is difficult and very difficult to correct the deviation of the optical axis of the infrared ray 53 in the vertical direction and the horizontal direction with one folding mirror 56, and this adjustment requires skill and many There was a problem that it took time.

Further, argon gas, liquid nitrogen, and the like that cool the infrared detecting element 59 are consumables, and there is a problem in the supply system when used for a long time. Therefore, an electronic cooling type using the Peltier effect was developed. However, since the cooling temperature of this type is about −70 ° C., which is considerably higher than that of the cryogenic type, the ordinary infrared detector 59 is not used. Sufficient sensitivity could not be obtained, and a good screen could not be obtained as an infrared thermal imaging device. Further, in order to obtain the same operation as that of the sprite element 32 with a normal quantum infrared detector, a configuration as shown in FIG. 8 is necessary. However, this method has problems such as a very complicated circuit and a large-scale circuit. Further, since the silicon window 51 and the rotating mirror 55 must be arranged on substantially the same plane, the installation position of the turn-back mirror 56 must be naturally arranged on the substantially same plane due to restrictions. In addition, since the infrared detector 59 must also be arranged on the same plane in order to maintain the optical positional accuracy, the infrared light 53 from the silicon window 51 is directly incident on the infrared detector 59 depending on the direction of the infrared camera. In some cases, an accurate thermal image cannot be obtained.

According to the present invention, there is provided a window which transmits only infrared rays radiated from the surface of a subject, and a vertically reflecting infrared ray transmitted through the window and which is capable of adjusting a tilt angle in a vertical direction. A folded mirror,
A multi-plane rotating mirror which is arranged on the reflection direction side of the turning mirror and rotates horizontally, a vibration mirror which scans the infrared light from the first turning mirror in the vertical direction at a predetermined angle and reflects the infrared light to the turning mirror, and An optical system comprising a second folded mirror provided so as to reflect in the horizontal direction infrared rays scanned in the vertical direction by the mirror and horizontally scanned by the rotating mirror and to be capable of adjusting the tilt angle in the horizontal direction. By configuring the scanning mechanism and an infrared detector that receives infrared rays from the second folding mirror of the optical system scanning mechanism and outputs the infrared rays as a thermal image signal, infrared rays from the subject can be viewed from the infrared detector. The part that spatially transmits the line scanning in the horizontal direction and the part that spatially transmits the line scanning in the vertical direction are completely independent. In addition, an electronically cooled sprite element is used as the infrared detector, and the scanning speed of the infrared beam that scans over the sprite element surface by the rotation of the rotating mirror and the transfer speed of the excess carrier signal in the sprite element are determined. By applying a bias to the sprite element so as to coincide with each other, a highly sensitive thermal image can be obtained in real time even in the electronic cooling type.

[0010]

The infrared light emitted from the subject and passed through the window is reflected by the first turning mirror in the direction of the vibration mirror, scanned by the vibration mirror at a predetermined angle in the vertical direction, and reflected in the direction of the rotating mirror. You. The infrared light incident on the rotating mirror is scanned in the horizontal direction by each plane mirror, reflected by the second turning mirror provided so that the tilt angle can be adjusted in the horizontal direction, and incident on the infrared detector. The image is photoelectrically converted by the detector and a thermal image signal is output.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail with reference to FIGS. FIG. 1 is a perspective view of an essential part showing an optical scanning mechanism of an electronically cooled infrared camera, and FIGS. 2 and 3 are a plan view and a vertical sectional view of the optical scanning mechanism. (The arrangement is opposite to that of the infrared detector 10.)
FIG. 4 is a partially broken plan view of the infrared camera, and FIG.
FIG. 6 is a sectional view taken along the line I, and FIG. 6 is an explanatory view of a sprite element inside the infrared detector 10. In FIG. 1 to FIG.
Is a window, 2 is a visible light, 3 is an infrared ray (infrared image) emitted from the subject 1, 4 is a window that blocks the visible light 2 and transmits only the infrared ray 3, and is made of silicon. Is fixed by a window fixing member 13 to an opening 12 that is open to the outside.

Reference numeral 5 denotes a first folding mirror, which receives infrared rays 3 of the subject 1 transmitted through a window (hereinafter, referred to as a silicon window) 4 and reflects the infrared rays 3 to a vibration mirror 6 located vertically below. The mirror that covers the rotating mirror 7
It is fixed to the upper surface of the cover part 14 by screws 16 via support columns 15, and is disposed so as to be located on substantially the same plane as the silicon window 4. The vertical tilt angle of the first turning mirror 5 is set by the support pillar 15, and the reflecting surface 5a is accurately set to the vibration mirror 6
A vertical adjustment mechanism 17 for finely adjusting the inclination angle of the reflection surface 5a is provided on the back surface of the first folded mirror 5 so as to face in the direction. The vertical adjustment mechanism 17 includes a fixing screw 18 and three adjusting screws 1 provided at the respective vertices of a substantially equilateral triangle with the fixing screw 18 as a center.
9, 20, 20 '. The fixing screw 18 is for fixing the turning mirror 5 to the support column 15, and the adjusting screws 19, 20 and 20 ′ are for finely adjusting the inclination angle of the turning mirror 5 mainly in the vertical direction. Things. 6 is the reflected light (infrared ray) from the folded mirror 5
3 is a vibration mirror that scans the mirror 3 in the vertical direction. The vibration mirror is located on substantially the same plane as the rotary mirror 7 and on the same vertical plane as the silicon window 4 when viewed from the vertical direction. (The vertical viewing angle).
It is set to swing in the effective range of °.

The rotating mirror 7 has eight plane mirrors 7a.
, And each plane mirror 7 is
are attached to the rotating shaft of the motor 22 with parallel plane angles. In order to prevent dust from adhering to each of the plane mirrors 7a... And to prevent noise caused by rotation of the rotating mirror 7, the periphery of the rotating mirror 7 is formed on an upper surface of the motor case 23. Is covered with a mirror cover portion 14 provided in the circumstance. Rotating mirror-7
Is rotated at a high speed by a motor 22 at a constant speed. In this embodiment, the rotation speed is set to 14,400 rpm. Reference numeral 8 denotes a second folding mirror, which receives the infrared rays 3 scanned in the horizontal direction by the plane mirrors 7a of the rotating mirror 7, and reflects the infrared rays 3 toward the infrared detector 10 located in the horizontal direction. , Are located on substantially the same vertical plane as the silicon window 4 and on the same plane as the rotary mirror 7, and are fixed to the housing 11 via the support columns 24 by screws 27. As in the case of the first mirror 5, the horizontal inclination angle of the mirror 8 is the same as that of the support pillar 2.
4 and a horizontal fine adjustment mechanism 26 for finely adjusting the tilt angle is provided on the back surface of the second turning mirror 8. The horizontal adjustment mechanism 26 includes a fixing screw 25 and adjustment screws 28 and 2 provided at the respective vertices of a substantially equilateral triangle with the fixing screw 25 as a center.
9, 29 ', and the vertical adjustment mechanism 17
Since it has the same configuration and operation as described above, detailed description is omitted. Reference numeral 9 denotes a condensing lens for forming an image of the reflected light (infrared light) 3 from the second turning mirror 8 on the infrared detector 10. The converging lens 9 is fixed to the housing 11 by a screw 30 via a support column 31. ing.

The infrared detector 10 is a single element sprite element (Singnal Procesing In The El
As shown in FIG. 6, a sprite element 32 is mounted on a sapphire substrate 33 as a so-called infrared sensing strip for sensing infrared rays. The bias electrodes 35 and 35 ′ are connected, and an amplifier 37 is connected to the output terminal 36.
Is connected. The infrared detector 10 using the sprite element 32 is of an electronic cooling type and is cooled to about -70 ° C. The infrared detector (sprite element) 10 is vertically separated from the silicon window 4 so that the vibration mirror 6 is formed.
, The rotating mirror 7 and the second turning mirror 8 are arranged on substantially the same plane, and as close as possible to the vertical plane where the silicon window 4 is located. 38
Is a processor, which is arranged outside the infrared camera, and performs various signal processing. Reference numeral 39 denotes a display device for displaying a thermal image of the subject 1. 40 is a room temperature calibration wall, 4
Numeral 1 denotes a sound deadening wall of the rotary mirror-7.

Next, the operation will be described. First,
In the optical scanning mechanism, the infrared rays 3 from the subject 1
However, in order to completely separate a portion that spatially transmits a line scanning horizontally from the sprite element 10 and a portion that spatially transmits a line scanning vertically, a rotating mirror is used. -7 and a vibration mirror-6, and in order to make the vertical optical axis fine adjustment and the horizontal optical axis fine adjustment independent, a vertical mirror 5 and a horizontal mirror 8 are used. Used. The return mirror 5 is positioned so as to receive the infrared ray 3 incident from the silicon window 4 and to totally reflect the infrared ray 3 to the vibration mirror 6. In addition, the turning mirror 8 receives the scanned infrared light 3 from the rotating mirror 7 and is positioned so as to totally reflect the infrared light 3 to the condenser lens 9 accurately. However, both of them are machined, and the parts such as the support columns 15 and 24 that support them are also machined, so that the optical paths in the vertical and horizontal directions slightly shift. It is very important to correct this shift in an optical system. Therefore, for the deviation in the vertical direction, the screw 1 of the first folded mirror-5 vertical adjustment mechanism 17 is mainly used.
9, 20, 20 '. On the other hand, horizontal displacement is adjusted mainly by adjusting screws 28, 29, 29 'of the horizontal adjusting mechanism 26 of the second folding mirror-8.

Next, an infrared detector (sprite element) 1
Numeral 0 is vertically spaced from the silicon window 4 and is arranged as close as possible to the direction of the vertical plane where the silicon window 4 is located. Conventionally, since the infrared detector 59 is located substantially on the same plane as the silicon window 51, the optical path length of the scanning system becomes longer, and the infrared detector 59 is mounted on the silicon window 51.
In this case, the infrared ray directly passes from the silicon window 51 to the infrared detector 59 without passing through the optical system scanning mechanism depending on the direction of the infrared camera, and an accurate thermal image is not obtained. I couldn't get it. In addition, since the length of the optical system becomes longer, if the portion of this optical system is housed in the housing 11, the length of the infrared camera 54 itself in the horizontal direction becomes longer, and the size of the infrared camera 54 cannot be reduced.
As described above, in this embodiment, the infrared detector 10 is vertically separated from the silicon window 4 and is arranged as close as possible to the vertical plane where the silicon window 4 is located. Infrared light passing through the system (only infrared light 3 reflected by rotating mirror 7) 3
Since infrared rays other than the above do not directly enter, an accurate thermal image can be obtained.

Next, an optical scanning mechanism will be described with reference to FIG. Light from the surface of the subject 1 is blocked from visible light 2 by the silicon window 4 provided in the opening 12 of the housing 11, and only infrared light 3 enters the infrared camera. The infrared light (infrared image) 3 incident on the inside is reflected by the first turning mirror 5 located on the same plane as the silicon window 4 in the direction of the vibration mirror 6 located almost on the same plane as the rotating mirror 7. Is done. The reflected light (infrared light 3) is vertically shaken by about 10 ° by the vibration mirror 6, and the plane mirrors 7a of the rotating mirror 7 ...
Incident on. Therefore, each of the plane mirrors 7a... Scans a portion of the surface of the subject 1 that is slightly displaced in the vertical direction in the horizontal direction by vibrating the vibration mirror 6 in the vertical direction. Usually, the number of horizontal scanning lines of this type of apparatus is 100.
About a book. In this embodiment, an octahedral rotating mirror-7 is used.
, The rotating mirror 7 must rotate at least 12.5 while the vibrating mirror 6 shakes by 10 °.
Actually, taking into account the time required for the vibration mirror 6 to return, 1
Six turns. That is, a range of 10 ° in the vertical direction is scanned by 16 rotations of the rotating mirror 7, and the second folded mirror 8 is scanned.
Direction, where it is reflected toward the condenser lens 9,
The light beam is narrowed by the condenser lens 9 and the infrared detector 1
0, and is optically scanned in the direction shown by the arrow B on the surface of the sprite element 32.
Is transmitted in the scanning direction indicated by the arrow B, and the electric signal of the thermal image is amplified by the amplifier 37, subjected to various kinds of signal processing by the processor 38, and displayed on the display device 39.

On the other hand, the infrared light 3 corresponding to 0.1 ° is incident on the infrared detector 10 by the one plane mirror 7a.
When the next plane mirror 7b scans, the vibration mirror-6 is used.
Is shifted by 0.1 °, and a position shifted by 0.1 ° in the vertical direction from the portion previously scanned horizontally by the plane mirror 7a is similarly scanned. Therefore, the vertical mirror 10a of the subject 1 is scanned by 12.5 rotations of the rotating mirror 7, and the horizontal viewing angle (15 in this embodiment) is determined by the plane mirrors 7a of the rotating mirror 7 in the horizontal direction. °) is scanned. Therefore, in order to obtain a thermal image of 100 horizontal scanning lines in real time,
The rotating mirror 7 is set to rotate at a high rotation speed of 14,400 rpm, and a real-time thermal image signal of 15 screens can be obtained from the infrared detector 10 per second.

Therefore, in this embodiment, the infrared detector 1
As 0, an electronic cooling type is adopted, and a sprite element having a single element structure cooled to -70 ° C is used. As shown in FIG. 6, the sprite element 32 has an elongated shape. First, when infrared rays 3 enter the first end, excess carriers are generated in that part. Therefore, when the infrared light 3 is scanned by the optical scanning system on the surface of the sprite element 32 (on the infrared sensing strip) in the direction of arrow B, excess carriers are successively generated in this portion. Therefore, this sprite element 3
A bias current (in this embodiment, a current of about 16 mA is applied) in the direction from the bias electrode 35 ′ to the bias electrode 35, and the scanning speed of the infrared rays 3 and the generation in the sprite element 32 occur. When the excess carrier matches the transmission speed of the signal moving in the direction of arrow C, the excess carrier generated in each portion is accumulated one after another, and at the output end, all the electric signals photoelectrically converted by the excess carrier are added. Output at the same time. By adjusting the bias current applied to both ends of the sprite element 32, a highly sensitive thermal image can be obtained.

In order to make the scanning speed of the infrared ray 3 by the rotation of the rotary mirror 7 coincide with the transmission speed of the signal of the sprite element 32, the vibration of the vibration mirror 6 is stopped by the galvanometer 21. Only vertical scanning stops. On the other hand, the rotating mirror 7 is rotated by the motor 22, and the infrared rays 3 are scanned in the horizontal direction. In this state, a vertical slit is attached to the subject 1 so that the display device 3
The scanning speed of the infrared ray 3 and the sprite element are adjusted by adjusting the bias current of the sprite element 32 so that the image of the slit becomes sharpest while observing the display screen 9 or the output signal of the amplifier 37 with a synchroscope. The moving speed of the 32 signals is matched. In this case, since the adjustment is performed while observing the temperature distribution of the subject 1 in one dimension, that is, since the adjustment is performed at the same temperature distribution, the adjustment can be performed accurately. In the conventional device, only scanning in the horizontal direction cannot be stopped, and the infrared detector 59 is composed of 10 elements. Therefore, a part to be assigned to each element is determined. Since the subject 50 is viewed two-dimensionally, the temperature distribution is different, and it was not possible to receive infrared rays 3 only at an arbitrary position in the vertical direction.

The larger the bias current applied to both ends of the sprite element 32, the faster the transfer speed of excess carriers generated in the sprite element, and
If the scanning speed is matched with that, the sensitivity will be good, but
Since the sprite element 32 is cooled, the sprite element 32 generates heat as much as the applied current increases, and the cooling effect deteriorates. In order to obtain a high-sensitivity thermal image in real time, the rotational speed of the rotating mirror 7 and the number of plane mirrors may be increased as much as possible if the above cooling effect is not taken into consideration. The number of plane mirrors depends on the life of the motor 22, the rotating mirror 7 (plane mirror 7a,.
······························································ Plane mirror 7 with respect to wind noise and wind intensity of infrared light 3
Considering the size of a ... and the load of the motor 22, a 6- to 10-hedron is appropriate. For this reason, in this embodiment, various values were determined in the following procedure. First, an octahedron is used for the rotating mirror 7, and this rotating mirror 7 is used.
The rotatable limit at 7 is 1 per minute from motor 22
7000 rotations. Therefore, when the rotating mirror 7 is rotated at a rotation speed of 17000 rpm, a 17.8 display screen is obtained per second. Therefore, in this embodiment, it was decided to use 15 display screens with good division. From the number of 15 display screens, the rotation speed of the rotating mirror 7 is 14,400 rpm.
The scanning speed of the infrared light 3 incident on the sprite element 32 is determined from the rotation speed. A bias current is determined from the scanning speed, a calorific value of the sprite element 32 is calculated from the current value, and a maximum value of the cooling temperature is determined from the calorific value, environmental conditions where the infrared camera is placed, and the performance of the electronic cooler. From this result, the number of rotations of the rotating mirror 7 is confirmed once again. Each value was determined by the above procedure.

[0022]

According to the present invention, there is provided a window which transmits only infrared rays radiated from the surface of an object, and a window which reflects the infrared rays transmitted through the window in the vertical direction and is capable of adjusting the tilt angle in the vertical direction. 1-fold mirror
A multi-plane rotating mirror disposed on the reflection direction side of the turning mirror and rotating horizontally, and a vibration mirror reflecting the infrared light from the first turning mirror in the vertical direction at a predetermined angle and reflecting the infrared light to the rotating mirror, A second mirror is provided which reflects the infrared rays scanned in the vertical direction by the vibration mirror and in the horizontal direction by the rotating mirror in the horizontal direction and is capable of adjusting the tilt angle in the horizontal direction. Therefore, the part that spatially transmits the line scanning in the horizontal direction as viewed from the infrared detector and the part that spatially transmits the line scanning in the vertical direction are completely independent, Furthermore, since a sprite element having a single element structure is used as the infrared detection element, this element is always viewed at one point when viewed in the horizontal direction, and simply viewed up and down when viewed in the vertical direction. It means looking at only one location that is vibrating, it does not produce a spherical aberration due to scanning distortion and the condenser lens. In addition, high-speed line scanning can be performed by simple scanning simply by stopping the vibration mirror.

Nothing is interposed in the infrared light path from the window to the first turn-back mirror, and nothing is present in the infrared light path from the rotating mirror to the second turn-back mirror. Since the optical axis is not interposed, the fine adjustment of the optical axis in the vertical direction and the horizontal direction can be independently adjusted only by the first and second folding mirrors, respectively. It ’s easy to use. Further, the window and the first folded mirror are arranged on substantially the same plane, and the vibration mirror, the rotating mirror, the second folded mirror, and the infrared detector are arranged substantially in the same plane by being vertically separated from the window. In addition, since the infrared detector is disposed close to the silicon window, an infrared image of the subject 1 does not directly enter the infrared detector from the window, and an accurate thermal image can be obtained. In addition, an electronically cooled sprite element is used as the infrared detector, and a bias is applied to the sprite element so that the scanning speed of the infrared ray due to the rotation of the rotating mirror and the signal transmission speed of the sprite element match. As a result, a high-sensitivity thermal image can be obtained in real time even with an electronic cooling system having a small cooling capacity.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part showing an embodiment of the present invention.

FIG. 2 is a plan view showing an embodiment of the present invention.

FIG. 3 is a vertical sectional view showing an embodiment of the present invention.

FIG. 4 is a partially cutaway plan view showing an embodiment of the present invention.

FIG. 5 shows an embodiment of the present invention, and shows II in FIG.
It is a line sectional view.

FIG. 6 shows an embodiment of the present invention and is an explanatory view of a sprite element.

FIG. 7 is a perspective view of a main part showing a conventional example.

FIG. 8 shows a conventional example, and is an explanatory diagram of an infrared detecting element and a peripheral circuit configuration for obtaining the same operation as a sprite element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Subject 3 Infrared ray 4 Silicon window 5 First folded mirror 6 Vibration mirror 7 Rotating mirror 8 Second folded mirror 10 Infrared detector (sprite element)

Claims (3)

(57) [Claims] 1. A window that transmits only infrared rays emitted from the surface of a subject, and a first turn-up that reflects the infrared rays transmitted through the window in a vertical direction and is capable of adjusting a tilt angle in a vertical direction. A mirror, a multi-plane rotating mirror disposed on the reflection direction side of the turning mirror and rotating horizontally, and reflecting the infrared rays from the first turning mirror in the vertical direction at a predetermined angle while reflecting the infrared rays to the turning mirror. Vibration mirror
A second folding mirror which is vertically scanned by the vibration mirror, reflects the infrared rays scanned in the horizontal direction by the rotating mirror in the horizontal direction, and is capable of adjusting the tilt angle in the horizontal direction. An infrared camera comprising: an optical system scanning mechanism comprising: and an infrared detector that receives infrared rays from the second folding mirror of the optical system scanning mechanism and outputs the infrared rays as a thermal image signal. 2. An electronic cooling type sprite element is used as the infrared detector, and the signal transmission movement speed of the sprite element becomes equal to the scanning speed of infrared rays scanning on the sprite element surface by the rotation of the rotary mirror. 2. The infrared camera according to claim 1, wherein the bias current is applied to the sprite element. 3. The vibration mirror, the rotating mirror, and the second folding mirror are arranged so that the silicon window and the first folding mirror are substantially flush with each other and are vertically separated from the window. And the infrared detector is disposed substantially on the same plane, and the infrared detector is disposed close to a vertical plane where the window is located, according to claim 1 or 2, respectively. Infrared camera.