JP3189065B2 - Lighting equipment in surface inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an enlarged image, a reduced image, and a direct contact of a head with a subject such as a metal surface or human skin.
The present invention relates to a lighting device in a surface inspection device that displays a 1: 1 image on a monitor screen.

[0002]

2. Description of the Related Art To visually capture and observe the state of an uneven surface, such as a metal surface or a human skin that has been subjected to chemical treatment, light from the side (side emission) is applied. In addition, in order to observe the overall color tone and the rough surface state, light from above a certain angle (emitted light) suitable for the surface state is required.

Conventionally, as a surface illumination device of this type, a light is radiated around a lens barrel (head) accommodating an enlargement optical system as disclosed in JP-A-1-114170 and JP-A-1-308527. It is known that a fiber is arranged and a light guide cap such as a cylinder lens is provided in front of the fiber.

[0004] However, in these lighting devices, since the side light and the incident light are constant, there are cases where the illumination device cannot be satisfied depending on the surface state to be observed.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a lighting device for a surface inspection apparatus, which can change side light and incident light.

[0006]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. According to a first aspect of the present invention, an optical fiber is arranged around a lens barrel. An annular side-projection optical system arranged in front of the distal end of the optical fiber for side emission of light emitted from the optical fiber, and an annular direct-projection optical system arranged in an annular shape for incident light are arranged side by side on a concentric circle, and are mirrored. A lighting device for a surface inspection device, further comprising means for shifting light emitted from the optical fiber to the optical system for side emission or the optical system for incident light by moving the optical fiber in a radial direction of a cylinder.

According to a second aspect of the present invention, an optical fiber is disposed around a lens barrel, and an optical fiber is provided in front of the optical fiber.
An annular side-emission optical system that emits side-emission light, and an annular incident-light optical system that is epi-emission light are arranged side by side on a concentric circle, and a lens barrel is provided between these two optical systems and the optical fiber. An illumination device for a surface inspection apparatus, further comprising an optical path switching split ring lens that moves in a radial direction and diverts outgoing light of the optical fiber to the optical system for side emission or the optical system for incident light.

According to a third aspect of the present invention, there is provided an annular side-emission optical system in which an optical fiber is disposed around the inside of a lens barrel, and the front end of the optical fiber is a side-emission light emitted from the optical fiber. , An annular optical system for incident light to be incident light is juxtaposed on a concentric circle,
An illumination device for a surface inspection device, wherein an end of the optical fiber is connected to an optical path switching member for moving the optical fiber in a radial direction of a lens barrel.

According to a fourth aspect of the present invention, there is provided an annular optical fiber for arranging an optical fiber around the inside of a lens barrel, and in front of the distal end thereof, using an emitted light of the optical fiber as a lateral light. Ring-shaped optical systems for incident light to be incident light are arranged concentrically side by side, a split ring lens is arranged between both optical systems and the optical fiber, and the tip of the optical fiber is placed in the radial direction of the lens barrel. A lighting device in a surface inspection device, wherein the lighting device is connected to an optical path switching member to be moved.

According to a fifth aspect of the present invention, there is provided a ring-shaped side light emitting optical system in which an optical fiber is disposed around the inside of a lens barrel, and the emitted light of the optical fiber is formed as a side light. And an optical system for switching an optical path that moves in the radial direction of a lens barrel in front of an exit light exit of an optical fiber. It is.

[0011]

According to the above arrangement, by changing the optical path of the light emitted from the optical fiber, the side light and the incident light can be switched, and the amount of the side light and the incident light can be relatively continuously changed. Can be changed, and illumination suitable for the observation surface can be performed.

[0012]

FIG. 1 shows a first embodiment of the present invention.
Reference numeral 1 denotes a lens barrel that accommodates an optical system 2 for magnification (zoom optical system in the embodiment), 3 denotes an optical fiber disposed around the optical system 2 for enlargement, and 4 denotes an optical fiber disposed below the optical fiber-3. This is a four-part ring lens.

As shown in FIG. 2, each of the divided ring lenses 4 has inner ends of flexible portions 7a, 7b, 7c, 7d formed by providing T-shaped slits 6 at four locations of a mounting cylinder 5. When the operating ring 8 is rotated, the driving ring 10 is axially moved via a pin 9 which engages with the cam groove 8a, and the driving ring 10 is moved by the flexible portions 7a, 7a.
The ring lens 4 is configured to move in the radial direction of the lens barrel 1 via the tapered portions 71 of b, 7c, and 7d.

Numeral 11 denotes a cylindrical light guide of a side emission optical system made of a transparent acrylic resin provided below the ring lens 4.
Reference numeral 2 denotes a mirror of a side emission optical system provided below the mirror.
The mirror 12 and the cylindrical light guide 11 constitute an optical system for side emission.

Reference numeral 13 denotes a mirror of an optical system for reflected light formed at the upper end of a metal tube 14 provided inside the cylindrical light guide 11.
Reference numeral 15 denotes a mirror of an incident light optical system disposed inside the portion where the optical fiber-3 is provided. The mirror 13 and the mirror 15 constitute an optical system for incident light.

FIG. 3 is an explanatory view showing the operation and effect of the first embodiment. By rotating the operating ring 8 and moving the ring lens 4 via the drive ring 10 in the radial direction of the lens barrel 1, FIG. (A), most of the light emitted from the optical fiber-3 is made incident on the side emission optical system, and as shown in (b), the side emission optical system and the incident light optical system are used. It is possible to make the incident light evenly, or to make almost all the outgoing light of the optical fiber-3 enter the incident light optical system as shown in FIG.

Therefore, the amount of side emission and the amount of incident light can be relatively continuously changed in accordance with the movement of the ring lens 4, so that optimal illumination can be performed according to the state of the observation surface.

FIG. 4 shows a second embodiment of the present invention. Instead of providing a movable split ring lens and changing the traveling direction of the light emitted from the optical fiber-3 as in the first embodiment, FIG. , The direction of the tip of the optical fiber-3 is changed.

That is, T-shaped slits 6 are provided at four places without providing a split ring lens, and flexible portions 7a, 7b, 7
An optical fiber-mounting hole 72 is provided at the distal end of the mounting cylinder 5 'formed with c and 7d.
By inserting and fixing the tip of the drive ring 10 and moving the drive ring 10 in the same manner as in the first embodiment, the flexible portions 7a and 7
b, 7c and 7d are moved in the radial direction to change the direction of the lower end of the optical fiber-3.

This embodiment has a feature that the switching between the side emission light and the incident light becomes clearer than in the first embodiment.

FIG. 6 is a view for explaining the structure, operation and effect of the main part of the third embodiment of the present invention. In the case where an optical system similar to that of the first embodiment is arranged, a split ring lens is used. 4 is fixed to the boundary between the side projection optical system and the epi-illumination optical system, and the optical fiber-3 is changed in the same manner as in the second embodiment.

According to this configuration, it is obvious that a device having the same function as that of the first embodiment can be obtained, so that the detailed description is omitted.

FIG. 7 shows a fourth embodiment, in which an optical fiber-3 is disposed around the inside of a lens barrel, and an annular side-projection optical system and an epi-illumination optical system are arranged in the same manner as in the above-described embodiment. Is established,
A movable split ring prism 16 having a trapezoidal cross section and having a mirror 13 for an epi-illumination optical system is provided on the incident side of both optical systems.

In the case of the first embodiment, the movable split ring prism 16 is attached to the inner end of the flexible portion of the mounting cylinder having the same structure as that of the first embodiment, and is moved by a similar mechanism. Is the same as

According to this configuration, when the movable split ring prism 16 is set at the position (a), side illumination is provided,
When the position is (b), side illumination and epi-illumination are performed, and when the position is (c), epi-illumination is performed.

[0026]

According to the present invention, it is possible to illuminate only the side light or the incident light or the intermediate light depending on the state of the surface to be observed, so that it is possible to observe the surface state properly. is there.

[Brief description of the drawings]

FIG. 1 is an enlarged side view of a part of a first embodiment of the present invention.

FIG. 2 is an enlarged perspective view of a mounting cylinder in the first embodiment.

FIG. 3 is a schematic view for explaining the operation and effect of the first embodiment.

FIG. 4 is an enlarged side view of a part of a second embodiment of the present invention.

FIG. 5 is an enlarged perspective view of a mounting member according to a second embodiment.

FIG. 6 is a schematic diagram for explaining the configuration, operation, and effects of a main part of a third embodiment of the present invention.

FIG. 7 is a schematic diagram for explaining the configuration, operation, and effects of a main part of a fourth embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 lens barrel 2 magnification optical system 3 optical fiber 4 ring lens 5, 5 ′ mounting cylinder 6 slit 7 a, 7 b, 7 c, 7 d flexible portion 8 operating ring 8 a cam groove 9 pin 10 drive ring 11 cylindrical light conductor 12,13 mirror 14 metal tube 15 mirror

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-4-107413 (JP, A) JP-A-4-107414 (JP, A) JP-A-1-308527 (JP, A) JP-A-1-107527 113170 (JP, A) Hikaru Hei 2-83535 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) H04N 5/222-5/257

Claims (5)

(57) [Claims] An optical fiber is disposed around a lens barrel,
At the front end of the optical fiber, a side emission optical system arranged in an annular shape with the emitted light of the optical fiber as a side emission light, and a direct emission optical system arranged in an annular shape as the incident light are arranged side by side on a concentric circle.
An illumination device for a surface inspection apparatus, further comprising means for shifting light emitted from the optical fiber to the optical system for side emission or the optical system for incident light by moving the optical fiber in a radial direction of a lens barrel. 2. An optical fiber is disposed around a lens barrel, and an annular side-emission optical system for emitting side-light from the optical fiber in front of the distal end of the optical fiber; The optical systems are arranged concentrically and are moved between the two optical systems and the optical fiber in the radial direction of the lens barrel to direct the light emitted from the optical fiber to the side light emitting optical system or the incident light optical system. An illumination device in a surface inspection device, wherein a split ring lens for changing an optical path is arranged. 3. An optical fiber is disposed around the inside of the lens barrel,
An annular side-emission optical system that uses the outgoing light of the optical fiber as side-emission light and an annular incident-light optical system that serves as epi-light are arranged concentrically in front of the front end of the optical fiber. An illumination device in the surface inspection device, wherein the illumination device is connected to an optical path switching member that moves the lens in the radial direction of the lens barrel. 4. An optical fiber is arranged around the inside of a lens barrel,
In front of the tip, an annular side-emission optical system that uses the outgoing light of the optical fiber as the side-emission light, and an annular incident-light optical system that is the incident light are arranged side by side on a concentric circle. -A split ring lens is arranged between the optical fibers-
An illumination device for a surface inspection device, wherein the illumination device is connected to an optical path switching member that moves a distal end of the lens in a radial direction of a lens barrel. 5. An optical fiber is disposed around the inside of a lens barrel,
In addition, an annular side-emission optical system that uses the emitted light as the side-emission light, and an annular incident-light optical system that is used as the incident light are coaxially provided, and a radius of a lens barrel is provided in front of the emission light exit of the optical fiber. An illumination device in a surface inspection apparatus, comprising an optical path switching optical system that moves in a direction.