JPH05199442A - Illuminating device in surface inspecting device - Google Patents

Abstract

PURPOSE:To constitute the device so that a side illuminating light and a vertical illuminating light can be varied by changing an optical path of an emitted light of an optical fiber. CONSTITUTION:A side illuminating light optical system is constituted of a mirror 12 and a cylindrical optical guide 11, and a vertical illuminating light optical system is constituted of a mirror 13 and a mirror 15. By turning an operating ring 8 and moving a ring lens 4 in the inside direction of a lens barrel 1 through a driving ring 10, it is possible that the greater part of an emitted light from an optical fiber 3 is made incident on the side illuminating light optical system, made incident equally on the side illuminating light optical system and the vertical illuminating light optical system, and most of emitted light is made incident on the vertical illuminating light optical system. Accordingly, since the side illuminating light quantity and the vertical illuminating light quantity are varied relatively in accordance with motion of the ring lens 4, optimal illumination corresponding to a state of the observation surface can be executed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnified image, a reduced image, or the like obtained by directly contacting a head with an object such as a metal surface or human skin.
The present invention relates to an illuminating device in a surface inspection device that displays a 1 × image on a monitor screen.

[0002]

2. Description of the Related Art In order to visually capture and observe the state of uneven surfaces such as the surface of a metal treated with chemicals and the skin of a person, irradiation with light from the side (side light) is applied. Is required, and in order to observe the overall color tone and the state of surface roughening, it is necessary to provide light from a certain angle (incident light) suitable for the state of the surface. Conventionally, as surface illumination devices of this type, JP-A-1-114170 and JP-A-1-308 have been proposed.
It is known that an optical fiber is arranged around the inside of a lens barrel (head) accommodating a magnifying optical system as disclosed in Japanese Patent No. 527 and a light guide cap such as a cylinder lens is provided in front of the optical fiber. However, in these illumination devices, the side light and the incident light are constant, which may be unsatisfactory depending on the surface condition to be observed.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to provide an illumination device for a surface inspection device which can change side light and incident light.

[0004]

In order to solve the above-mentioned problems, the present invention has an optical fiber arranged around the inside of a lens barrel,
Moreover, while providing a side-light optical system that makes the emitted light side-light and an incident-light optical system that makes incident light, a means for redirecting the output light of the optical fiber to the side-light optical system or the incident-light optical system is provided. It is provided.

[0005]

According to the above construction, by changing the optical path of the light emitted from the optical fiber, it is possible to switch the side incident light and the incident light, to relatively change the amounts of the side incident light and the incident light, and to change the incident light angle. It becomes possible, and illumination suitable for the observation surface can be performed.

[0006]

FIG. 1 shows the first embodiment of the present invention.
Reference numeral 1 is a lens barrel that houses a magnifying optical system 2 (a zoom optical system in the embodiment), 3 is an optical fiber arranged around the magnifying optical system 2, and 4 is a four-divided ring lens arranged below the optical fiber 3. Is. Each divided ring lens 4 is
As shown in FIG. 2, T-shaped slits 6 are provided at four locations on the mounting cylinder 5, and the flexible rings 7a, 7b, 7c, and 7d are attached to the inner ends thereof, and the operating ring 8 is rotated. When moved, the drive ring 10 moves in the axial direction via the pin 9 that engages with the cam groove 8a, and the drive ring 10 is moved by the flexible portion 7 described above.
The ring lens 4 is configured to move in the radial direction of the lens barrel 1 via the tapered portions 71 of a, 7b, 7c, and 7d.

Reference numeral 11 denotes a cylindrical light guide for a side-lighting optical system made of a transparent acrylic resin provided below the ring lens 4.
Reference numeral 2 denotes a mirror of an optical system for side light emission provided below the mirror.
The mirror 12 and the tubular light guide 11 form a side-lighting optical system. Reference numeral 13 denotes an incident light optical system mirror formed on the upper end of a metal tube 14 provided inside the cylindrical light guide 11, and reference numeral 15 denotes an incident light optical system mirror arranged inside the portion where the optical fiber 3 is provided. , Mirror 13 and mirror 15
Constitutes an optical system for incident light.

FIG. 3 is an explanatory view showing the operation and effect of the first embodiment. By rotating the operating ring 8 and moving the ring lens 4 inward of the lens barrel 1 via the drive ring 10. , As shown in (a), most of the light emitted from the optical fiber 3 is made incident on the side-emission optical system, or as shown in (b), the side-emission optical system and the incident-light optical system are evenly distributed. It is possible to make the light incident, or almost all the light emitted from the optical fiber 3 can be made incident on the incident light optical system as shown in (c). Therefore, the amount of side incident light and the amount of incident light are relatively changed according to the movement of the ring lens 4, so that optimum illumination can be performed according to the state of the observation surface.

FIG. 4 shows a second embodiment of the present invention. Instead of providing the movable split ring lens to change the traveling direction of the light emitted from the optical fiber 3 as in the first embodiment, an optical fiber is used. The orientation of the tip of 3 is changed. That is, the split ring lens is not provided, and the T-shaped slits 6 are provided at four positions to provide the flexible portions 7a,
An optical fiber mounting hole 72 is provided at the tip of the mounting cylindrical body 5'formed with 7b, 7c and 7d, and the optical fiber 3 is inserted and fixed in this mounting hole 72 to mount the drive ring 10 in the same manner as in the first embodiment. By moving the flexible parts 73, 7
b, 7c, 7d are moved inward to change the direction of the lower end of the optical fiber 3. In the case of this embodiment, there is a feature that the switching between the side incident light and the incident light becomes clearer than in the case of the first embodiment.

[0010]
FIG. 6 is a diagram for explaining the configuration, operation, and effect of the main part of the third embodiment of the present invention, in which the split ring lens 4 is arranged on the side where the optical system similar to that of the first embodiment is arranged. The optical fiber 3 is fixed at the boundary between the optical system for reflection and the optical system for reflection, and the optical fiber 3 is changed in the same manner as in the second embodiment. According to this configuration, it is obvious that the one having the same function as that of the first embodiment can be obtained, and therefore the detailed description will be omitted.

FIG. 7 shows a fourth embodiment, in which the optical fiber 3 is arranged around the inside of the lens barrel, the side-emission optical system and the incident-light optical system are provided, and the incident side of both optical systems is A movable split ring prism 16 having a trapezoidal cross section and including a mirror 13 for an epi-illumination optical system is provided. The movable split ring prism 16 is attached to the inner end of the flexible portion of the mounting cylinder having the same configuration as in the first embodiment, and is configured to be moved by the same mechanism as in the first embodiment. is there.

[0012]

According to the present invention, it is possible to illuminate only the side light or the incident light or an intermediate light depending on the condition of the surface to be observed. Therefore, it is possible to properly observe the surface condition. is there.

[Brief description of drawings]

FIG. 1 is an enlarged side view in which a part of a first embodiment of the present invention is cut away.

FIG. 2 is an enlarged perspective view of a mounting cylinder according to the first embodiment.

FIG. 3 is a schematic diagram for explaining the operation and effect of the first embodiment.

FIG. 4 is an enlarged side view in which a part of the second embodiment of the present invention is cut away.

FIG. 5 is an enlarged perspective view of a mounting code body according to a second embodiment.

FIG. 6 is a schematic diagram for explaining the configuration, operation, and effect of the main part of the third embodiment of the present invention.

FIG. 7 is a schematic diagram for explaining a configuration, an operation, and an effect of a main part of a fourth embodiment of the present invention.

[Explanation of symbols]

 1 lens barrel 2 magnifying optical system 3 optical fiber 4 ring lens 5, 5'mounting cylinder 6 slits 7a, 7b, 7c, 7d flexible part 8 actuating ring 8a cam groove 9 pin 10 drive ring 11 cylindrical light guide 12, 13 mirror 14 metal tube 15 mirror

Claims (5)

[Claims] 1. An optical fiber is arranged around the inside of a lens barrel,
An optical system for side-illumination that makes emitted light of an optical fiber into side-emission light and an optical system for direct-emission light that makes incident light are provided in front of its tip, and the emitted light of the optical fiber is used for the side-emission optical system or incident-light. An illuminating device in a surface inspection device, which is provided with means for changing to an optical system. 2. An optical fiber is disposed around a lens barrel, and a side-emission optical system for making emitted light of the optical fiber a side-emission light and an incident-light optical system for making an incident light are provided in front of the tip of the optical fiber.
An illuminating device in a surface inspection apparatus, wherein a split ring lens for switching an optical path is arranged between these both optical systems and the optical fiber. 3. An optical fiber is arranged around the inside of the lens barrel,
An optical system for side-illumination that makes the emitted light of the optical fiber side-illuminate and an optical system for incident-light that makes incident light are provided in front of the tip,
An illuminating device in a surface inspection device, wherein the tip of the optical fiber is linked to an optical path switching member. 4. An optical fiber is arranged around the inside of the lens barrel,
An optical system for side-emission that makes emitted light of an optical fiber a side-emitted light in front of its tip, and an optical system for incident-light that makes an incident light are provided, and a split ring lens is arranged between these optical systems and the optical fiber. An illuminating device in a surface inspection device, wherein a tip portion is linked to an optical path switching member. 5. An optical fiber is arranged around the inside of the lens barrel,
A surface characterized by providing a side-lighting optical system that makes the emitted light side-lighting and an incident-light optical system that makes incident light, and a switching optical system in front of the exit light outlet of the optical fiber. Lighting equipment for inspection equipment.