JP3177191B2 - In-line heater - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-line heater used for a cleaning step and an etching step in semiconductor manufacturing, and more particularly to an in-line heater which does not require a maintenance space and has no restriction on an installation position.

[0002]

2. Description of the Related Art In the field of semiconductor manufacturing, etc., a cleaning step and an etching step using pure water or a chemical solution are required. A method is employed in which pure water or a chemical solution in the middle of a pipe is heated by a heater. The reason is that if the liquid in the processing tank was directly heated using the input heater,
A temperature difference occurs inside the processing tank, which causes a variation in the quality of the semiconductor wafer.In addition, when the input heater is damaged, impurities adhere to the semiconductor wafer due to contamination of the processing tank. is there. On the other hand, as shown in FIG. 9, in the system in which the inline heater HT is arranged in the middle of the pipe, not only can pure water or a chemical solution having a uniform temperature be supplied to the processing tank TK, but also a filter can be provided between the inline heater HT and the processing tank TK. By providing the FI, contamination of the processing tank TK can be prevented. In addition, as a heater of such a system, for example, JP-A-5-2317
A fluid heater of No. 12 and a vessel for instantaneous fluid heating of Japanese Utility Model Publication No. 7-35950 are known.

[0003]

All of these heaters use a halogen lamp as a heat source. However, in the conventional halogen lamp, wiring is led out from both ends in the longitudinal direction, so that it is extremely difficult to maintain the wiring. There was inconvenience. That is, in the conventional heater, the lead wire from the halogen lamp is led out to both the distal end side and the base end side, and is held at both ends of the heater. Therefore, at the time of maintenance, the held lead wire is first removed. And a work space (maintenance space) for it was needed. in this way,
In the conventional heater, it is necessary to secure a sufficient working space on the distal end side and the proximal end side, and therefore, there is also an inconvenience that the mounting position of the heater is restricted. Furthermore, in the conventional heater, since the distal end side and the base end side of the halogen lamp are fixed to a cylindrical container, there is a problem that a clamping force is constantly applied. Therefore, the life of the halogen lamp is shortened due to the steady stress, and in an extreme case, there is a possibility that the torsion force is applied to both ends of the halogen lamp due to an unexpected cause and the halogen lamp is damaged. The present invention, which focuses on the above problems, provides an in-line heater that requires no maintenance space, has no restrictions on mounting locations, and can be expected to have a longer life of a heat source such as a halogen lamp. Aim.

[0004]

According to the present invention, there is provided an in-line heater (HT) for heating a fluid moving in a glass container (11) by a heat source (20). The glass container (11) is divided by a shield (14) into a pair of heating chambers (15, 16) that communicate with each other at a distal end, and the pair of heating chambers is defined by a glass wall. Insertion holes (19) are formed, and the heat source (20) is inserted into the insertion holes (19). The glass container (11) has a substantially cylindrical shape.
Is stored in the storage container (1).
Have detachable lids (4a, 4a) on their proximal and distal ends.
b) is fixed, and the lids (4a, 4b) are
Reflectors (7a, 7b) are attached, and the heat source
Lead wires (25, 26) of (20) are all drawn to the base end side.
And the heat source body (20) is inserted into the insertion hole (19).
And inserted into the container (1) to cover the lid (4a).
After contact, the base end side of the heat source body is fixed with a holding plate (21).
The heat source (20)
Is an outer tube (23) made of quartz glass and an inner tube made of quartz glass.
The internal pipe (24) is composed of a double structure of a partial pipe (24).
Is formed by a good conductor (29) formed in a loop shape.
Said good conductor (29) held in an outer tube (23);
Is connected to one of the lead wires (26) and the inner tube (2).
4) connected to the filament (28) held in
Have been .

[0005]

[0006]

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail based on embodiments. FIG. 1 is a sectional view of an inline heater HT according to the present invention, and FIG. 2 is a right side view of the inline heater HT. As shown in the figure, the inline heater HT is configured by housing a heating main body 2 having a schematic shape as shown in FIG. The storage container 1 includes a cylindrical body 3 having flanges 3a and 3b, and a lid 4 fixed to the flanges 3a and 3b.
a, 4b, and the outer circumference of the cylindrical body 3 is
The two mounting plates 3c, 3c are fixed. This mounting plate 3
Each of c and 3c has about four through holes, and is used when the inline heater HT is attached to another member. O-rings 5 are fitted to the lids 4a and 4b in the circumferential direction, and stainless steel reflecting plates 7a and 7b are fixed by mounting nuts 6. The mounting nut 6 is provided at a position where it does not come into contact with the quartz glass body 11.

The reflecting plate 7a of the front cover 4a has a structure shown in FIG.
As shown in the front view of (a), four round holes 8 are formed, and the tip of the halogen lamp 20 is inserted into the four round holes 8. The distal end of the halogen lamp 20 is prevented from entering further by the distal end cover 4a. On the other hand, as shown in FIG. 1 and FIG. 4 (b), four through holes 9 are formed in the base end cover 4b corresponding to the round holes 8 of the reflection plate 7b. The base end of
The round hole 8 and the through hole 9 are inserted. Further, two through-holes 10 are formed in the base-side lid 4b, and the two through-holes 10 are provided with the inflow holes 1 of the quartz glass body.
7 and the outflow hole 18 are inserted. The heating body 2 is shown in FIG.
As shown in FIG.
1 is covered with a heat insulating material 12. A flange 13 for positioning is provided around the heat insulating material 12, so that the entire heating main body 2 is cylindrical.
Is held in In addition, the AA sectional view of the heating main body 2 is as shown in FIG.

At the center of the quartz glass body 11, a shielding plate 14 shorter than the axial length of the quartz glass body 11 is provided to define two heating chambers 15, 16 on the inlet side and the outlet side. . The first heating chamber 15 has an inflow hole 17, and the second heating chamber 16 has an outflow hole 18. As shown in the figure, the inflow hole 17 and the outflow hole 18 are both provided outside the outer periphery of the quartz glass body 11, so that the liquid does not accumulate during non-operation. Shield plate 1
4 is made of, for example, quartz glass, but is shorter than the length of the quartz glass body 11 in the axial direction, so that the fluid introduced from the inflow hole 17 advances to the tip side of the first heating chamber 15,
It moves to the second heating chamber 16 and returns to the outflow hole 18. As shown in FIG. 3 and FIG.
The heating chamber 15 and the second heating chamber 16 are formed with two insertion holes 19 defined by glass walls, into which a total of four halogen lamps 20 are inserted. Since the liquid in the heating chambers 15 and 16 is indirectly heated via the glass wall, even if the halogen lamp 20 is broken, the liquid inside is not affected.

The shape of the halogen lamp 20 is shown in FIGS.
As shown in FIG. As shown, the halogen lamp 20 has a double structure of an outer tube 23 made of quartz glass and an inner tube 24 made of quartz glass.
26 are led out in the same direction (proximal end side) of the outer tube 23 and are configured. The lead wire 25 is transmitted to the inner tube 24 via a steatite base 27 and is connected to a tungsten filament 28. The filament 28 is held in the inner tube 24 by the loop holder 28a. On the other hand, the lead wire 26 is connected to a positioning lead wire 29 via a base 27 made of steatite. The positioning conductor 29 is a good conductor having a predetermined rigidity, and its proximal end 29a and distal end 29b are connected to the outer tube 23.
Are formed in the shape of a loop having a contour substantially equal to the inner circumference.
Then, the proximal portion of the proximal loop 29a and the proximal portion of the distal loop 29b are fixed to the holding portions 30a and 30b, so that the inner tube 24 is positioned and held in the outer tube 23. In addition, although the tip side loop 29b is connected to the filament 28 of the inner tube 24 via the connection part 29c,
Since the connecting portion 29c is inclined toward the distal end, the inner tube 24 is also positioned in the axial direction.

Next, a method of assembling the inline heater HT including the above components will be described.
First, the reflectors 7a and 7b are attached to the lids 4a and 4b to which the O-rings 5 are fitted. Then, the tip side lid 4a is
After being fixed to the flange 3a of the cylindrical body 3, the heating body 2 (see FIG. 3) is inserted from the base end side of the cylindrical body 3. At this time, the storage is completed when the tip of the quartz glass body 11 comes into contact with the reflection plate 7a. Thereafter, if the base end cover 4b is fixed to the flange 3b of the cylindrical body 3, the quartz glass body 11 is held in the storage container 1. Since the mounting nut 6 is located outside the quartz glass body 11, there is no danger of damaging the quartz glass body 11 or applying an impact through the mounting nut 6.

Next, the halogen lamp 20 is inserted into the insertion hole 19 of the quartz glass body 11.
Of the halogen lamp 20 is completed when the front end of the lamp comes into contact with the front end cover 4a. The halogen lamp 20 is
It is inserted through the through hole 9 of the base end cover 4b and the round hole 8 of the reflection plates 7b, 7a. Finally, halogen lamp 2
A disk-shaped holding plate 21 (see FIG. 8) is placed on the base end side of the bracket 0, and the mounting screw 22 is tightened from above to complete the assembly operation. As described above, the in-line heater HT of the present invention
Then, the halogen lamp 20 is slid into the insertion hole 19 and assembled, and thereafter, only the base end side of the halogen lamp 20 is held by the holding plate 21, so that a large load is not applied to the halogen lamp 20, and the halogen lamp 20 is long. Life extension can be realized. On the other hand, at the time of maintenance, it is sufficient to loosen the mounting screw 22 and remove the holding plate 21, so that it is not necessary to secure a working space at the tip end side of the inline heater HT, and naturally, the mounting position of the inline heater HT is also restricted. There is no.

[0013]

As described above, in the in-line heater according to the present invention, all the lead wires of the heat source body are drawn out to the base end side, and after the heat source body is inserted into the insertion holes, the heat source body is connected to the base end side. Is fixed and held by a holding plate. Therefore, there is no need to provide a maintenance space on the tip side of the inline heater, and there is no restriction on the installation location. Also,
Since a useless load is not applied to a heat source such as a halogen lamp, a long life of the heat source can be expected.

[Brief description of the drawings]

FIG. 1 is a sectional view of an inline heater according to an embodiment of the present invention.

FIG. 2 is a right side view of the in-line heater of FIG.

FIG. 3 illustrates a schematic shape of a heating main body.

FIG. 4 is a front view of a distal lid and a proximal lid.

FIG. 5 is a sectional view taken along line AA of FIG. 3;

FIG. 6 is a perspective view of a halogen lamp.

FIG. 7 is a front view of the halogen lamp.

FIG. 8 illustrates a holding plate and mounting screws.

FIG. 9 illustrates an example of using an inline heater.

[Explanation of symbols]

 HT In-line heater 11 Glass container 14 Shield (Shield plate) 15 Heating chamber 16 Heating chamber 19 Insertion hole 20 Heat source body (Halogen lamp) 21 Press plate 25 Lead wire 26 Lead wire

Claims (1)

(57) [Claims] An in-line heater (HT) for heating a fluid moving in a glass container (11) by a heat source (20), wherein the glass container (11) is provided by a shield (14). ,
The heating chamber is divided into a pair of heating chambers (15, 16) communicating with each other at an end portion, and the pair of heating chambers are formed with insertion holes (19) defined by glass walls, respectively. The heat source body (20) is inserted in the glass container (11) , and the glass container (11) is a substantially cylindrical storage container.
(1) stored in the storage container (1)
The detachable lids (4a, 4b) are fixed to the side and the tip side.
Each of the lids (4a, 4b) has a reflecting plate (7).
a, 7b) are attached , and the lead wires (25, 26) of the heat source body (20) are all
The heat source body (20) is pulled out to the proximal end side and is inserted into the insertion hole.
(19) the lid of the storage container (1)
After contacting (4a), the base end of the heat source body is
The heat source (20) is fixed by the storage container (21), and the heat source (20) is an external tube (23) made of quartz glass.
And a double structure of quartz glass inner tube (24),
The inner pipe (24) is a good conductor formed in a loop shape.
(29) held in said outer tube (23) by:
The good conductor (29) is connected to one of the lead wires (26).
And a filament held in the inner tube (24)
(28) An in-line heater connected to (28) .