JP3172759U - 半導体基板 - Google Patents
半導体基板 Download PDFInfo
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- JP3172759U JP3172759U JP2011006196U JP2011006196U JP3172759U JP 3172759 U JP3172759 U JP 3172759U JP 2011006196 U JP2011006196 U JP 2011006196U JP 2011006196 U JP2011006196 U JP 2011006196U JP 3172759 U JP3172759 U JP 3172759U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 93
- 239000000758 substrate Substances 0.000 title claims abstract description 81
- 238000006243 chemical reaction Methods 0.000 claims abstract description 28
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 13
- 230000000694 effects Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000007639 printing Methods 0.000 claims abstract description 5
- 238000004528 spin coating Methods 0.000 claims abstract description 5
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- 238000007641 inkjet printing Methods 0.000 claims abstract description 4
- 238000004544 sputter deposition Methods 0.000 claims abstract description 4
- 238000007740 vapor deposition Methods 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 29
- 239000002245 particle Substances 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 230000001788 irregular Effects 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 229920005596 polymer binder Polymers 0.000 claims description 6
- 239000002491 polymer binding agent Substances 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 239000005083 Zinc sulfide Substances 0.000 claims description 4
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000975 dye Substances 0.000 claims description 3
- 239000007850 fluorescent dye Substances 0.000 claims description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 3
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 239000002096 quantum dot Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 3
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
【解決手段】本半導体基板1は、基板11と、少なくとも一つの半導体層12と、第一抗反射層13と、第二抗反射層14とを備える。半導体層12は、基板11上に設置される。第一抗反射層13は、半導体層12上に設置される。第二抗反射層14は、第一抗反射層13上に設置されて、且つ、第二抗反射層14は不連続層で、光子変換効果を有する。前記第一及び第二抗反射層は、スパッタリング、蒸着、塗布、スピンコート、印刷、インクジェット印刷またはそれらの組合せを含む方法により形成できる。前記第一抗反射層は、表面処理されたざらついた面に形成されることが望ましい。
【選択図】図1
Description
11 基板
12 半導体層
13 第一抗反射層
14、24、34 第二抗反射層
141 膜層
15 電極層
151 バスバー電極
241、242、243、244 バンチ
Claims (15)
- 基板と、
前記基板上に設置される少なくとも一つの半導体層と、
前記半導体層上に設置される第一抗反射層と、
前記第一抗反射層上に設置され、互いに不連続層で、光子変換効果を有する第二抗反射層とを備えることを特徴とする半導体基板。 - 前記第一抗反射層と前記第二抗反射層が、スパッタリング、蒸着、塗布、スピンコート、印刷、インクジェット印刷またはそれらの組合せを含む方法により形成された層であることを特徴とする請求項1に記載の半導体基板。
- 前記第一抗反射層は、表面処理されたざらついた面に形成されたことを特徴とする請求項1に記載の半導体基板。
- 前記第一抗反射層の材質は、窒化ケイ素、酸化ケイ素、窒化酸化シリコンまたは酸化アルミニウムであることを特徴とする請求項1に記載の半導体基板。
- 前記第二抗反射層は、複数の光子変換粒子を含むことを特徴とする請求項1に記載の半導体基板。
- 前記光子変換粒子の材質は、酸化アルミニウム、フッ化マグネシウム、酸化タンタル、五酸化ニオブ、酸化チタン、二酸化ケイ素、酸化ジルコニウム、硫化亜鉛、蛍光粉体、有機蛍光色素、高分子蛍光材料、無機蛍光材料、量子ドット蛍光材料、混成蛍光材料、リン光粉体、染料、またはそれらの組合せを含むことを特徴とする請求項5に記載の半導体基板。
- 前記第二抗反射層はさらに、高分子バインダを含むことを特徴とする請求項5に記載の半導体基板。
- 前記第二抗反射層は、複数のバンチ(bunch)から構成され、前記バンチは、複数粒子から組成されることを特徴とする請求項1に記載の半導体基板。
- 前記バンチを組成する前記粒子の数量は同一または異なることを特徴とする請求項8に記載の半導体基板。
- 前記バンチは、規則的または不規則な形状であることを特徴とする請求項8に記載の半導体基板。
- 前記バンチ相互の形状は同一、実質的に同一または異なることを特徴とする請求項8に記載の半導体基板。
- 前記バンチの設置位置は、規則的または不規則な分布であることを特徴とする請求項8に記載の半導体基板。
- 前記半導体基板はさらに、電極層を備え、前記電極層は前記第一抗反射層上に設置されることを特徴とする請求項1に記載の半導体基板。
- 前記電極層は、複数のバスバー電極(bus bar electrode)及び複数のくし型電極(finger electrode)を備えることを特徴とする請求項13に記載の半導体基板。
- 前記第二抗反射層は、前記バスバー電極で切断され、不連続層とされたことを特徴とする請求項14に記載の半導体基板。
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EP2947697A1 (en) * | 2013-12-23 | 2015-11-25 | Merck Patent GmbH | Antireflection films and photovoltaic devices |
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