JP3167456B2 - Composite plating method by electroless gold plating - Google Patents

Composite plating method by electroless gold plating

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Publication number
JP3167456B2
JP3167456B2 JP28100392A JP28100392A JP3167456B2 JP 3167456 B2 JP3167456 B2 JP 3167456B2 JP 28100392 A JP28100392 A JP 28100392A JP 28100392 A JP28100392 A JP 28100392A JP 3167456 B2 JP3167456 B2 JP 3167456B2
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JP
Japan
Prior art keywords
gold
plating
fluororesin
electroless
eutectoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP28100392A
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Japanese (ja)
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JPH06108260A (en
Inventor
裕二 柳田
泰彦 岩城
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SANNO CO., LTD.
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SANNO CO., LTD.
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、金マトリックス中に高
い共析量で均一に微細なフッ素樹脂を共析した複合めっ
きを得ることができる無電解金めっきによる複合めっき
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite plating method by electroless gold plating which can obtain a composite plating in which a fine fluororesin is eutectoid uniformly in a gold matrix in a high eutectoid amount.

【0002】[0002]

【従来の技術】電解めっきや無電解めっきによって生成
する金属マトリックス中に、金属、無機・有機化合物な
どの微粒子や繊維状物を分散共析した複合めっきは、そ
れを構成する金属マトリックスの性質に異種の共析物の
性質を組合わせた機能を有するものである。
2. Description of the Related Art Composite plating, in which fine particles and fibrous materials such as metals and inorganic and organic compounds are dispersed and eutectoid in a metal matrix formed by electrolytic plating or electroless plating, is based on the properties of the metal matrix that constitutes it. It has the function of combining the properties of different eutectoids.

【0003】したがって、耐食性や耐摩耗性、潤滑性な
どの向上や外観の美化、その他を目的として、その目的
に適当な金属マトリックスと共析物質とを選択して行わ
れ、多くの提案がなされている。
Therefore, for the purpose of improving corrosion resistance, abrasion resistance, lubricity, etc., and beautifying the appearance, etc., a metal matrix and an eutectoid material suitable for the purpose are selected, and many proposals have been made. ing.

【0004】しかして、金−フッ素樹脂複合めっきが得
られるならば、金及びフッ素樹脂がそれぞれ個々に有す
る耐食性、耐薬品性、高電導性、撥水性などといった特
性を生かしたプラスチックやゴム用型用金型、医療用器
具、撥水性触媒その他多くの用途に適用可能と考えられ
る。
[0004] If gold-fluorine resin composite plating can be obtained, plastic and rubber molds that take advantage of the properties of gold and fluorine resin, such as corrosion resistance, chemical resistance, high electrical conductivity, and water repellency, respectively, can be obtained. It is thought that it can be applied to metal molds, medical devices, water repellent catalysts, and many other applications.

【0005】しかしながら、基材に金めっきを施したも
のは、耐食、高電導性が要求されるリレー、スイッチ、
接点、コネクターなどの電気接触部品に用いられている
が、高価であるので無機粒子を共析させるものが知られ
ており(たとえば、特公昭59−150098号公
報)、又、共析物質として有機高分子を使用して導体表
面の特性を改善することも知られている(たとえば、特
開昭48−28332号公報)が、金−フッ素樹脂複合
めっきは知られていない。
[0005] However, gold-plated substrates require relays, switches, and switches that require corrosion resistance and high conductivity.
Although it is used for electrical contact parts such as contacts and connectors, it is expensive and known to eutect inorganic particles (for example, Japanese Patent Publication No. 59-15098). It is also known to use a polymer to improve the properties of the conductor surface (for example, JP-A-48-28332), but gold-fluorine resin composite plating is not known.

【0006】[0006]

【発明が解決しようとする課題】すなわち、特公昭59
−150098号公報は、金などの金属マトリックス
に、WC、TiCなどの硬質無機粒子、又は、MoS
などの潤滑性無機粒子を分散共析させたものであり、特
開昭48−28332号公報は、銅、ニッケルなどの金
属マトリックスに、天然又は合成ゴムラテックスのよう
な有機高分子化合物を共析させたものであり、その実施
例にニッケル−テフロンの複合めっきの例が示されてい
るものであって、金マトリックスにフッ素樹脂を共析さ
せたものではない。
[Problems to be solved by the invention]
Japanese Patent Application Publication No. 150098 discloses hard inorganic particles such as WC and TiC or MoS 2 in a metal matrix such as gold.
JP-A-48-28332 discloses that a polymer matrix such as natural or synthetic rubber latex is codeposited on a metal matrix such as copper or nickel. In this example, an example of composite plating of nickel-Teflon is shown, and it is not that a fluororesin is codeposited on a gold matrix.

【0007】これは、一般的に用いられている金めっき
浴に、Ni−PTFE複合めっきに用いられているPT
FEディスパージョンのようなフッ素樹脂を添加した場
合には、ほとんどの場合、PTFE微粒子が凝集して沈
降してしまい、めっき浴中に分散しなかったり、共析し
たとしてもPTFE粒子がめっき層中に不均一、かつ、
ごく微量共析した皮膜しか得られないという問題による
と考えられる。
[0007] This is because a commonly used gold plating bath is provided with a PT used for Ni-PTFE composite plating.
In most cases, when a fluororesin such as FE dispersion is added, PTFE fine particles are aggregated and settle, and are not dispersed in the plating bath or even if they are eutectoid, PTFE particles remain in the plating layer. Uneven and
This is probably because only a very small amount of eutectoid film can be obtained.

【0008】本発明は、金マトリックスに、フッ素樹脂
を高い共析量で均一に分散した複合めっき層を形成し得
る方法を提供することを目的とするものである。
An object of the present invention is to provide a method capable of forming a composite plating layer in which a fluorine resin is uniformly dispersed at a high eutectoid amount in a gold matrix.

【0009】[0009]

【課題を解決するための手段】本発明者は、前記問題を
解決し、前記目的を達成するために、無電解金めっき法
について鋭意研究を重ねた結果、特定伝導塩濃度、金塩
濃度の自己触媒厚付け型無電解金めっき浴を使用するこ
とによって目的を達し得ることを見出して本発明を完成
するに至った。すなわち、本発明は、伝導塩濃度が15
0g/l以下、金塩濃度が金として20g/l以下の、
微細なフッ素樹脂を添加した自己触媒厚付け型無電解金
シアンめっき浴を用いて無電解めっき処理し、前記フッ
素樹脂を分散含有する金めっき層を形成する無電解金め
っきによる複合めっき方法である。
Means for Solving the Problems The present inventor has conducted intensive studies on the electroless gold plating method in order to solve the above-mentioned problems and achieve the above-mentioned object. The inventors have found that the object can be achieved by using an electroless gold plating bath having a self-catalyst thickening type, and have completed the present invention. That is, the present invention provides a conductive salt concentration of 15
0 g / l or less, gold salt concentration of 20 g / l or less as gold,
This is a composite plating method by electroless gold plating in which an electroless plating treatment is performed using an autocatalytic thickening type electroless gold cyan plating bath to which a fine fluororesin is added to form a gold plating layer containing the fluororesin dispersed therein. .

【0010】本発明における金めっき浴としては、DM
AB、又は、水素化ホウ素化合物やチオ尿素などを還元
剤とした、伝導塩濃度が150g/l以下、金塩濃度が
金として20g/l以下の自己触媒厚付け型無電解めっ
き浴が挙げられる。
[0010] The gold plating bath in the present invention includes DM
An autocatalytic thickening type electroless plating bath having a conductive salt concentration of 150 g / l or less and a gold salt concentration of 20 g / l or less as gold using AB or a borohydride compound or thiourea as a reducing agent. Can be

【0011】フッ素樹脂としては、PTFE、FEPそ
の他用途に応じて他のフッ素樹脂の中から選択して使用
すればよい。PTFEとしては、Ni−PTFE複合め
っき用として市販されている複合めっき用ディスパージ
ョン、通常他の用途で使用されている市販のPTFEデ
ィスパージョン(たとえば、デュポン社製30−J(商
品名)、ダイキン工業社製D−1、D−2(いずれも商
品名)、あるいは、FEPディスパージョン(たとえ
ば、デュポン社製120−J(商品名))などが挙げら
れる。又、フッ素樹脂粉末(たとえば、PTFEでは、
デュポン社製MP−1100、MP−1125、TLP
−10M(いずれも商品名)、旭硝子社製L−170
J、L−172J、L−173J(いずれも商品名)、
FEPとしては、旭硝子社製アフロンPFA(商品
名))などが挙げられ、ゲル化し可溶化する前処理を施
したものを使用することも好ましい。市販のフッ素樹脂
エマルジョンの場合も前処理をして使用することもでき
る。
The fluororesin may be selected from PTFE, FEP and other fluororesins depending on the intended use. As PTFE, a composite plating dispersion commercially available for Ni-PTFE composite plating, a commercially available PTFE dispersion generally used for other applications (for example, 30-J (trade name) manufactured by DuPont), Daikin D-1 and D-2 (all trade names) manufactured by Kogyo Co., Ltd., or FEP dispersion (for example, 120-J (trade name) manufactured by DuPont), etc. Further, fluororesin powder (for example, PTFE) Then
DuPont MP-1100, MP-1125, TLP
-10M (all trade names), L-170 manufactured by Asahi Glass Co., Ltd.
J, L-172J, L-173J (all are trade names),
Examples of the FEP include Aflon PFA (trade name) manufactured by Asahi Glass Co., Ltd., and it is also preferable to use a gel that has been subjected to a pretreatment for solubilization. A commercially available fluororesin emulsion can also be used after pretreatment.

【0012】[0012]

【作用】前記のようなめっき浴(たとえば、シアン化金
(I)カリウム、又は、シアン化金(III)カリウム
(金として)1.0〜6.0g/l、水酸化カリウム5
〜35g/l、シアン化カリウム0.5〜10g/l、
DMAB4〜6g/l)に、フッ素系両性界面活性剤の
ような界面活性剤を20ml/l以下、フッ素樹脂ディ
スパージョンを20ml/l以下添加し、65〜80℃
で無電解めっき処理を行うことが好ましい。
The plating bath as described above (for example, potassium (I) cyanide or potassium (III) cyanide (as gold) 1.0 to 6.0 g / l, potassium hydroxide 5)
~ 35 g / l, potassium cyanide 0.5-10 g / l,
DMAB 4 to 6 g / l), a surfactant such as a fluorine-based amphoteric surfactant is added in an amount of 20 ml / l or less, and a fluororesin dispersion is added in an amount of 20 ml / l or less.
It is preferable to perform an electroless plating process.

【0013】金めっき浴の伝導塩濃度を150g/l以
下、金塩濃度を金として20g/l以下としたのは、フ
ッ素樹脂は界面活性剤の性質から無電解の添加により分
散性が低下し、凝集などにより見かけの粒径が増大し、
ストークスの式の関係により水溶液から分離するものと
考えられ、かきまぜなどの強制的な分散手段の有無にか
かわらず、これら限定値を超えるとフッ素樹脂の高共析
量、均一分布性が得られないからである。又、分散性を
よくするために、フッ素系両性界面活性剤等のような界
面活性剤の添加が考えられるが、過剰の添加は、共析量
に悪影響を及ぼすために好ましくない。
The reason that the concentration of the conductive salt in the gold plating bath is 150 g / l or less and the concentration of the gold salt is 20 g / l or less in terms of gold is that the dispersibility of the fluororesin decreases due to the electroless addition due to the nature of the surfactant. The apparent particle size increases due to aggregation,
It is thought that it is separated from the aqueous solution by the relationship of Stokes formula, and regardless of the presence or absence of forced dispersing means such as stirring, if these limits are exceeded , high eutectoid amount of fluororesin, uniform distribution cannot be obtained Because. Further, in order to improve dispersibility, it is conceivable to add a surfactant such as a fluorine-based amphoteric surfactant, but an excessive addition is not preferable because it adversely affects the amount of eutectoid.

【0014】この無電解めっき法では、通常、めっき浴
を2回以上繰返して用いることによって析出速度とフッ
素樹脂共析量の低下がみられるが、析出速度の低下に対
しては、繰返しごとに還元剤を消費量よりも過剰に、す
なわち、消費量の1.3倍(n=膜厚、2μm析出を
1回としたときの繰返し回数)を補充することによりめ
っき皮膜の析出速度を一定にすることができる。又、フ
ッ素樹脂共析量の低下に対しては、シアン濃度の増加に
より共析量の低下がおこることを確認し、シアン濃度の
上昇を防ぐために金塩としてのシアン化金(I)カリウ
ムの代りに金として同じ価数の金塩として亜硫酸金
(I)塩(例えば、アルカリ金属塩、若くはアンモニウ
ム塩)を用いることによって、フッ素樹脂共析量の低下
を制御するとともに析出速度の低下も抑制できるもので
ある。又、フッ素樹脂共析量を制御する方法としては、
パーフルオロアルキルアミンオキシドを代表とするノニ
オン性界面活性剤を0.2ml/l以下添加することに
よってフッ素樹脂共析量を35容量%以下に制御するこ
とができる。
In this electroless plating method, the deposition rate and the fluorine resin eutectoid amount are usually reduced by repeatedly using the plating bath two or more times. The deposition rate of the plating film is kept constant by replenishing the reducing agent in excess of the consumption amount, that is, by replenishing 1.3 n times the consumption amount (n = the number of repetitions when the film thickness is 2 μm is defined as one time). Can be In addition, it was confirmed that the decrease in the eutectoid amount was caused by an increase in the cyanide concentration with respect to the decrease in the eutectoid amount of the fluororesin. Instead of using a gold (I) sulfite (for example, an alkali metal salt, or an ammonium salt) as a gold salt having the same valence as gold, it is possible to control the decrease in the eutectoid amount of the fluororesin and to decrease the deposition rate. It can be suppressed. Also, as a method of controlling the amount of eutectoid fluorocarbon,
By adding 0.2 ml / l or less of a nonionic surfactant represented by perfluoroalkylamine oxide, it is possible to control the eutectoid content of the fluororesin to 35% by volume or less.

【0015】なお、還元剤としてDMAB以外に、水素
化ホウ素やチオ尿素などの自己触媒型の還元反応を呈す
る還元剤や、建浴時の金塩として亜硫酸金(I)塩や塩
化金(III)酸塩などを用いた場合、フッ素樹脂の共
析は、認められるものの析出速度が低い点やめっき浴が
自己分解、又は、異常析出し易いことが認められる。
In addition to DMAB as a reducing agent, a reducing agent exhibiting an autocatalytic reduction reaction such as borohydride or thiourea, or a gold (I) sulfite or a gold (III) chloride as a gold salt at the time of building bath. ) When an acid salt or the like is used, eutectoid of the fluororesin is recognized, but it is recognized that the deposition rate is low and that the plating bath is easily decomposed or abnormally precipitated.

【0016】[0016]

【実施例】次に、本発明の実施例を述べる。 実施例 1 シアン化金(I)カリウムを金として3g/l、水酸化
カリウム45g/l、シアン化カリウム2.3g/l、
DMAB4.0g/l、炭酸カリウム100g/l、ト
リエタノールアミン15g/l、酢酸鉛0.03g/l
のような組成を有するDMABを還元剤とする自己触媒
厚付け型無電解金めっき液を用い、市販の複合めっき用
フッ素樹脂ディスパージョンを10ml/l添加して液
温72℃、液負荷1.0dm/lで無電解めっき処理
を行った。
Next, an embodiment of the present invention will be described. Example 1 Using gold (I) cyanide as gold, 3 g / l, potassium hydroxide 45 g / l, potassium cyanide 2.3 g / l,
DMAB 4.0 g / l, potassium carbonate 100 g / l, triethanolamine 15 g / l, lead acetate 0.03 g / l
A commercially available fluororesin dispersion for composite plating was added at 10 ml / l using a self-catalyzed thick electroless gold plating solution having DMAB having a composition as described above as a reducing agent, and a solution temperature of 72 ° C. and a liquid load of 1. The electroless plating was performed at 0 dm 2 / l.

【0017】その結果、皮膜の析出速度は、2μm/h
rであり、フッ素樹脂共析量は、25容量%であり均一
に分散しためっき層が得られた。 実施例 2 1) フッ素樹脂ディスパージョンの前処理 市販のフッ素樹脂ディスパージョンとして一般的である
PTFEディスパージョン(粒径0.1〜0.2μmの
フッ素樹脂が非イオン性又は、アニオン性又は、両性の
界面活性剤により水溶液中に分散した状態で存在してい
る)(ダイキン工業社製D−2)20mlと、純粋80
mlと、パーフルオロアルキル第4級アンモニウムヨウ
化物(カチオン性界面活性剤:3M社製FC−135)
0.5mlとを加えてよくかきまぜる。これを遠心分離
器を用いて3500r.p.m.で30分間遠心分離を
行った後、ゲル化し、沈降したフッ素樹脂から上澄み液
を分離する。このフッ素樹脂に前述のカチオン性界面活
性剤を0.5ml加え、純水を加えて30mlとしよく
かきまぜて保存する。
As a result, the deposition rate of the film is 2 μm / h
r, the eutectoid content of the fluororesin was 25% by volume, and a uniformly dispersed plating layer was obtained. Example 2 1) Pretreatment of Fluororesin Dispersion PTFE dispersion (fluorine resin having a particle size of 0.1 to 0.2 μm is nonionic, anionic, or amphoteric) is generally used as a commercially available fluororesin dispersion. (D-2 manufactured by Daikin Industries, Ltd.) and pure 80
ml and perfluoroalkyl quaternary ammonium iodide (cationic surfactant: FC-135 manufactured by 3M)
Add 0.5 ml and stir well. This was centrifuged at 3500 rpm. p. m. After centrifugation for 30 minutes at, the supernatant liquid is separated from the gelled and precipitated fluororesin. 0.5 ml of the above-mentioned cationic surfactant is added to this fluororesin, and pure water is added to make 30 ml, and the mixture is stirred well and stored.

【0018】2) めっき処理 自己触媒厚付け型無電解金めっき液として市販の自己触
媒厚付け型無電解金めっき液(奥野製薬工業社製OPC
ムデンゴールド25)を用い、フッ素樹脂として1)で調
整したディスパージョンを12ml/lを添加して、S
−131(旭硝子社製界面活性剤)を1.0ml/l、
FC−135(3M社製界面活性剤)1. 0ml/lを
添加して液温74℃、液負荷1.0dm/lで無電解
めっき処理を行った。
2) Plating treatment A commercially available autocatalytic thickening type electroless gold plating solution (OPC manufactured by Okuno Pharmaceutical Co., Ltd.)
Using Muden Gold 25), add 12 ml / l of the dispersion prepared in 1) as a fluororesin,
1.0 ml / l of -131 (a surfactant manufactured by Asahi Glass Co., Ltd.)
1.0 ml / l of FC-135 (a surfactant manufactured by 3M) was added, and electroless plating was performed at a liquid temperature of 74 ° C and a liquid load of 1.0 dm 2 / l.

【0019】その結果、皮膜の析出速度は、10μm/
hrであり、フッ素樹脂共析量15容量%の均一に分散
した複合めっき層が得られた。 実施例 3 市販の自己触媒厚付け型無電解金めっき液として上村工
業社製GOBEL−2MN、液温を65℃とした以外
は、実施例2と同様に処理した結果、皮膜の析出速度
は、1.2μm/hrであり、フッ素樹脂共析量は、標
準で28容量%(最高35容量%)の均一に分散した複
合めっき層が得られた。 実施例 4 市販の自己触媒厚付け型無電解金めっき液として日本エ
レクトロプレイティング・エンジニヤース社製レクトレ
ス3G(シアン化金(I)カリウムを金として3g/l
添加)、液温を74℃とした以外は、実施例2と同様に
処理した結果、皮膜の析出速度は、1.4μm/hrで
あり、フッ素樹脂共析量は、標準で28容量%(最高3
5容量%)の均一に分散した複合めっき層が得られた。 実施例 5 実施例1、実施例3及び、実施例4と同様な処理に置い
て、還元剤としてのDMABを2時間ごとの消費量の
1.3倍(n:2時間を1単位としたときの繰り返し
回数)づつ補給し、金塩として亜硫酸金(I)ナトリウ
ムを消費量分補給し、フッ素樹脂ディスパージョンを消
費量分補給しながら連続してめっき処理し、1.2ター
ン(ターン:建浴時めっき液中に含まれる金含有量を1
とした場合の金の消費総量)まで繰り返した結果、皮膜
の生成速度及びフッ素樹脂の共析量は、初期の性能を維
持し得た。 比較例 1 還元剤としてのDMABの2時間ごとに消費量分の補給
とした以外実施例5と同様のめっき処理に行った結果、
1.2ターン後の皮膜の生成速度は、初期値の20%ま
での低下が認められた。 比較例 2 消費した金の補充金塩としてシアン化金(I)カリウム
を用いた以外実施例5と同様のめっき処理に行った結
果、1.2ターン後のフッ素樹脂の共析量は、初期値の
12%までの低下が認められた。
As a result, the deposition rate of the film was 10 μm /
hr and a uniformly dispersed composite plating layer having a fluorine resin eutectoid amount of 15% by volume was obtained. Example 3 As a result of treating in the same manner as in Example 2 except that GOBEL-2MN manufactured by Uemura Kogyo Co., Ltd. was used as a commercially available autocatalyst thickening type electroless gold plating solution and the solution temperature was 65 ° C., the deposition rate of the film was It was 1.2 μm / hr, and a fluororesin eutectoid amount of 28% by volume (35% by volume at maximum) was obtained as a uniformly dispersed composite plating layer. Example 4 A commercially available autocatalytic thickening type electroless gold plating solution made by Nippon Electroplating Engineers, Inc., Rectress 3G (3 g / l of gold (I) potassium cyanide as gold)
Addition) and the same treatment as in Example 2 except that the liquid temperature was 74 ° C. As a result, the deposition rate of the film was 1.4 μm / hr, and the eutectoid amount of the fluororesin was 28% by volume ( Up to 3
5% by volume) of a uniformly dispersed composite plating layer. Example 5 In a process similar to that of Example 1, Example 3, or Example 4, the amount of DMAB as a reducing agent was 1.3 n times the consumption every two hours (n: 2 hours as one unit). The number of repetitions of the process is repeated, and gold (I) sodium sulfite is supplied as a gold salt for the consumption amount, and the plating treatment is continuously performed while supplying the fluororesin dispersion for the consumption amount, and 1.2 turns (turns) : The gold content in the plating solution at the time of bathing is 1
As a result, the film formation rate and the eutectoid amount of the fluororesin could maintain the initial performance. Comparative Example 1 As a result of performing the same plating treatment as in Example 5 except that DMAB as a reducing agent was replenished every 2 hours for the consumption amount,
The formation rate of the film after 1.2 turns was reduced to 20% of the initial value. Comparative Example 2 As a result of performing the same plating treatment as in Example 5 except that potassium (I) cyanide was used as a gold salt for replenishing consumed gold, the eutectoid amount of the fluororesin after 1.2 turns was initially small. A reduction of the value to 12% was observed.

【0020】[0020]

【発明の効果】本発明は、特定伝導塩濃度、金塩濃度の
自己触媒厚付け型無電解金めっき浴を使用するものであ
るから、無電解めっき法によって、フッ素樹脂が高共析
量で均一に分散した複合めっき層が得られたものであっ
てきわめて優れた効果が認められる。
The present invention uses a self-catalytic thickening type electroless gold plating bath having a specific conductive salt concentration and a gold salt concentration. A uniformly dispersed composite plating layer was obtained, and an extremely excellent effect was observed.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 伝導塩濃度が150g/l以下、金塩濃
度が金として20g/l以下の、微細なフッ素樹脂を添
加した自己触媒厚付け型無電解金シアンめっき浴を用い
て無電解めっき処理し、前記フッ素樹脂を分散含有する
金めっき層を形成することを特徴とする無電解金めっき
による複合めっき方法。
A conductive salt concentration of 150 g / l or less, a gold salt concentration
Add fine fluororesin with a degree of gold of 20 g / l or less
A composite plating method based on electroless gold plating, wherein an electroless plating treatment is performed using a self-catalyzed thick electroless gold cyan plating bath to form a gold plating layer containing the fluororesin dispersed therein.
JP28100392A 1992-09-25 1992-09-25 Composite plating method by electroless gold plating Expired - Lifetime JP3167456B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28100392A JP3167456B2 (en) 1992-09-25 1992-09-25 Composite plating method by electroless gold plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28100392A JP3167456B2 (en) 1992-09-25 1992-09-25 Composite plating method by electroless gold plating

Publications (2)

Publication Number Publication Date
JPH06108260A JPH06108260A (en) 1994-04-19
JP3167456B2 true JP3167456B2 (en) 2001-05-21

Family

ID=17632922

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6759655B2 (en) 1998-11-30 2004-07-06 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US7952074B2 (en) 1996-03-05 2011-05-31 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
US8558173B2 (en) 1999-12-02 2013-10-15 Hitachi, Ltd. Method of inspecting pattern and inspecting instrument
KR101763514B1 (en) * 2016-01-25 2017-07-31 홍순창 A plant cultivation system

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Publication number Priority date Publication date Assignee Title
JP2003305743A (en) * 2002-04-12 2003-10-28 Sumitomo Rubber Ind Ltd Mold for golf ball, manufacturing method therefor, and golf ball manufacturing method
JP2008221773A (en) * 2007-03-15 2008-09-25 Konica Minolta Opto Inc Injection molding mold

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7952074B2 (en) 1996-03-05 2011-05-31 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
US6759655B2 (en) 1998-11-30 2004-07-06 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US8558173B2 (en) 1999-12-02 2013-10-15 Hitachi, Ltd. Method of inspecting pattern and inspecting instrument
KR101763514B1 (en) * 2016-01-25 2017-07-31 홍순창 A plant cultivation system

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