JP3153343B2 - Electric and magnetic field control of mass spectrometer - Google Patents
Electric and magnetic field control of mass spectrometerInfo
- Publication number
- JP3153343B2 JP3153343B2 JP17056192A JP17056192A JP3153343B2 JP 3153343 B2 JP3153343 B2 JP 3153343B2 JP 17056192 A JP17056192 A JP 17056192A JP 17056192 A JP17056192 A JP 17056192A JP 3153343 B2 JP3153343 B2 JP 3153343B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- electric field
- mass spectrometer
- voltage
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、ピーク近傍を長時間観
測できるように電場をリンクスキャンする質量分析計の
電場及び磁場制御方式に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for controlling an electric field and a magnetic field of a mass spectrometer for link-scanning an electric field so that the vicinity of a peak can be observed for a long time.
【０００２】[0002]
【従来の技術】図３は質量分析計の全体の構成概要を示
す図、図４は質量分析計の電場及び磁場の制御例及びマ
ススペクトルの例を示す図である。図３において、１１
はイオン源、１２は電場、１３は磁場、１４はイオン検
出器、１５は加速電源、１６は電場電源、１７は磁場電
源、１８はプリアンプ、１９と２０はＤＡＣ、２１はＡ
ＤＣ、２２はディスプレイ、２３はデータ処理装置（Ｃ
ＰＵ）、２４はプロファイルバッファメモリを示す。2. Description of the Related Art FIG. 3 is a diagram showing an outline of the entire configuration of a mass spectrometer, and FIG. 4 is a diagram showing an example of control of an electric field and a magnetic field of a mass spectrometer and an example of a mass spectrum. In FIG. 3, 11
Is an ion source, 12 is an electric field, 13 is a magnetic field, 14 is an ion detector, 15 is an acceleration power supply, 16 is an electric field power supply, 17 is a magnetic field power supply, 18 is a preamplifier, 19 and 20 are DACs, and 21 is A
DC, 22 is a display, 23 is a data processing device (C
PU), 24 denotes a profile buffer memory.
【０００３】ＤＡＣ１９と２０は、データ処理装置１３
の制御指令に従ってデジタル信号をアナログ信号に変換
して加速電源１５、電場電源１６、磁場電源１７の各電
源を制御し、加速電圧／電場電圧、磁場強度を所望の値
に設定するデジタルーアナログコンバータである。ＡＤ
Ｃ２１は、コレクタースリット１４からの信号を増幅し
たプリアンプ１８のアナログ出力信号をデータ処理装置
２３に送るためデジタル信号に変換するものアナログー
デジタルコンバータであり、イオン検出器１４で検出し
たマスピーク信号は、プリアンプ１８で増幅され、ＡＤ
Ｃ２１でアナログ信号からデジタル信号に変換されてデ
ータ処理装置２３に送られる。データ処理装置２３で
は、ＤＡＣ１９と２０を通して加速電源１５、電場電源
１６、磁場電源１７を制御し測定すべき磁場強度の設
定、分析系電源のスィープを行い、コレクタースリット
１４で検出されるプロファイルデータをプリアンプ１
８、ＡＤＣ２１を通して取り込み、プロファイルバッフ
ァメモリ２４への格納、加算処理を行う。[0003] The DACs 19 and 20 are
A digital-to-analog converter that converts a digital signal into an analog signal in accordance with the control command of the above, controls the power supplies of the acceleration power supply 15, the electric field power supply 16, and the magnetic field power supply 17, and sets the acceleration voltage / field voltage and the magnetic field strength to desired values. It is. AD
C21 is an analog-to-digital converter that converts an analog output signal of the preamplifier 18 obtained by amplifying the signal from the collector slit 14 to a digital signal for sending to the data processing device 23. The mass peak signal detected by the ion detector 14 is Amplified by the preamplifier 18
At C21, the signal is converted from an analog signal to a digital signal and sent to the data processing device 23. The data processor 23 controls the acceleration power supply 15, the electric field power supply 16, and the magnetic field power supply 17 through the DACs 19 and 20, sets the magnetic field strength to be measured, sweeps the analysis system power supply, and outputs profile data detected by the collector slit 14. Preamplifier 1
8. The data is fetched through the ADC 21, stored in the profile buffer memory 24, and added.
【０００４】上記のように二重収束質量分析系では、イ
オン源と電場と磁場とを備え、まず試料をイオン源でイ
オン化したビームを加速してイオンの持っている質量数
に応じて磁場での軌道が曲げられる性質を利用し、質量
数毎に分離するとともに、電場での軌道がイオンのエネ
ルギーに応じて曲げられることを利用してエネルギーの
広がりによるビームの広がりを補正してターゲットピー
クを捕捉することによって、物質を構成している個々の
化合物の質量数を測定している。このときの質量数Ｍ
（ｍ／ｚ）は、加速電圧／電場電圧をＥ、磁場の強さを
Ｂとすると、 となる。したがって、図４（イ）に示すように電場を一
定にしたまま磁場を掃引すると、図４（ロ）に示すよう
に横軸に質量数（時間）、縦軸にイオン強度をとったマ
ススペクトルが得られる。As described above, a double focusing mass spectrometry system has an ion source, an electric field and a magnetic field. First, a beam obtained by ionizing a sample with an ion source is accelerated to generate a magnetic field according to the mass number of the ions. By using the property that the trajectory is bent, it is separated for each mass number, and by using the fact that the trajectory in the electric field is bent according to the energy of ions, the spread of the beam due to the spread of energy is corrected and the target peak is By capturing, the mass numbers of the individual compounds constituting the substance are measured. Mass number M at this time
(M / z) is given assuming that the acceleration voltage / electric field voltage is E and the strength of the magnetic field is B Becomes Therefore, when the magnetic field is swept while the electric field is kept constant as shown in FIG. 4A, the mass spectrum (mass number (time) is plotted on the horizontal axis and the ion intensity is plotted on the vertical axis as shown in FIG. 4B) Is obtained.
【０００５】また、例えば特開昭６１−２３３９５９号
公報に磁場強度と加速電圧を同時に同期させて走査させ
ることによって総合的なスキャンスピードを高めるよう
にした質量分析計や、特開平３−１５１４７号公報、特
公平３−３２０１７号公報にイオン加速度を一定にして
磁場強度をスキャンする定性分析と所定の一定電流値の
間にイオン加速度を変化させて定量分析を行う質量分析
計、磁場強度をステップ状に変化させながら加速電圧／
電場電圧をスィープする質量分析計が提案されている。[0005] For example, Japanese Patent Application Laid-Open No. 61-233959 discloses a mass spectrometer in which the scanning speed is increased by simultaneously synchronizing the magnetic field intensity and the acceleration voltage to increase the overall scanning speed. Japanese Unexamined Patent Publication No. Hei 3-32017 discloses a qualitative analysis in which the magnetic field intensity is scanned with a constant ion acceleration and a mass spectrometer for performing a quantitative analysis by changing the ion acceleration between predetermined constant current values. Acceleration voltage /
Mass spectrometers that sweep electric field voltages have been proposed.
【０００６】[0006]
【発明が解決しようとする課題】しかし、磁場コイル
は、時定数が大きく所望の強さに制御するには時間がか
かるので、上記のように電場を一定にしたまま磁場を掃
引すると、図４（ロ）に示すマススペクトルから明らか
なようにピークのないピークとピークとの間で掃引して
いる時間が無駄になるという問題が生じる。この点は、
磁場強度と加速電圧を同時に同期させて走査させるスキ
ャンスピードを高めるものにおいても同様であり、しか
も、ピーク近傍の観測時間が短くなりＳ／Ｎを悪くする
という問題も生じる。However, since the magnetic field coil has a large time constant and takes a long time to control it to a desired strength, when the magnetic field is swept while keeping the electric field constant as shown in FIG. As is apparent from the mass spectrum shown in (b), there is a problem that the time for sweeping between peaks having no peak is wasted. This point
The same applies to the case where the scanning speed for scanning by simultaneously synchronizing the magnetic field strength and the acceleration voltage is increased, and the observation time near the peak is shortened and the S / N is deteriorated.
【０００７】また、定性分析と定量分析とを行うもので
は、イオン加速度を一定にして磁場強度をスキャンする
モードと所定の一定電流値にしてその間にイオン加速度
を変化させるモードとの切り換えを行うので、操作が煩
雑になると共に分析に時間がかかるという問題がある。
磁場強度をステップ状に変化させ加速電圧／電場電圧を
スィープさせる方式も同様である。In the qualitative analysis and the quantitative analysis, the mode is switched between a mode in which the magnetic field intensity is scanned with a constant ion acceleration and a mode in which the ion acceleration is changed during a predetermined constant current value. However, there is a problem that the operation becomes complicated and the analysis takes time.
The same applies to a method in which the magnetic field intensity is changed stepwise to sweep the acceleration voltage / electric field voltage.
【０００８】本発明は、上記の課題を解決するものであ
って、磁場強度の掃引している時間の無駄をなくしＳ／
Ｎを改善した測定が可能な質量分析計の電場及び磁場制
御方式を提供することを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and eliminates waste of time for sweeping magnetic field intensity.
It is an object of the present invention to provide an electric field and magnetic field control method of a mass spectrometer capable of measuring with improved N.
【０００９】[0009]
【課題を解決するための手段】そのために本発明は、イ
オン源と電場と磁場とを備え、試料をイオン化し該イオ
ン化したビームを加速し、質量数毎に分離するととも
に、エネルギーのずれによるビームの広がりを補正して
ターゲットピークを捕捉する二重収束型の質量分析計に
おいて、磁場強度を単調な関数に従って掃引し、ターゲ
ットピークが出現する磁場強度の前後で鋸波状に加速電
圧／電場電圧をスィープさせることを特徴とするもので
ある。SUMMARY OF THE INVENTION To this end, the present invention provides an ion source, an electric field and a magnetic field, ionizes a sample, accelerates the ionized beam, separates the ionized beam for each mass number, and generates a beam due to energy shift. In a double focusing mass spectrometer that captures a target peak by correcting the spread of the magnetic field, the magnetic field strength is swept according to a monotonic function, and the acceleration voltage / electric field voltage is sawtoothed before and after the magnetic field strength at which the target peak appears. It is characterized by sweeping.
【００１０】[0010]
【作用】本発明の質量分析計の電場及び磁場制御方式で
は、磁場強度を一定の勾配で掃引し、ターゲットピーク
が出現する磁場強度の前後で加速電圧／電場電圧をスィ
ープさせるので、ピークとピークとの間の無駄な磁場の
掃引時間をなくし、ピークでの観測時間を長くすること
ができる。According to the electric field and magnetic field control method of the mass spectrometer of the present invention, the magnetic field intensity is swept at a constant gradient, and the acceleration voltage / electric field voltage is swept before and after the magnetic field intensity at which the target peak appears. The useless time for sweeping the magnetic field between them can be eliminated, and the observation time at the peak can be lengthened.
【００１１】[0011]
【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。図１は本発明の質量分析計の電場及び磁場制御
方式の１実施例を説明するための図、図２は本発明の質
量分析計の電場及び磁場制御方式の実行手順を説明する
ための図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram for explaining an embodiment of the electric field and magnetic field control method of the mass spectrometer of the present invention, and FIG. It is.
【００１２】本発明の質量分析計の質量掃引法は、図１
に示すように従来と同様に磁場強度Ｂを変化させると共
に、加速電圧／電場電圧Ｅをピーク位置ｔa 、ｔb を中
心として鋸波状にスィープさせることによって、従来の
磁場強度Ｂのみでスキャンして得られる観測時間よりも
ピークでの観測時間を長く設定できるようにしたもので
ある。The mass sweep method of the mass spectrometer of the present invention is shown in FIG.
As shown in (1), the magnetic field intensity B is changed in the same manner as in the prior art, and the acceleration voltage / electric field voltage E is swept in a sawtooth shape around the peak positions t a and t b , thereby scanning with only the conventional magnetic field intensity B. The observation time at the peak can be set to be longer than the observation time obtained by the measurement.
【００１３】いま、ピークＭa の質量が観測される加速
電圧／電場電圧をＥa 、磁場強度をＢa とすると、これ
らの関係は、 となる。そこで、ピークＭa に対してその両側ΔＭをと
り、Ｍa −ΔＭからＭa＋ΔＭの範囲を考えた場合、磁
場掃引の時間軸でｔa ′のタイミングにＭa −ΔＭの質
量が観測されるようにするには、このときの磁場強度Ｂ
a ′から、 により制御すべき加速電圧／電場電圧Ｅa ′が求まる。
同様に磁場掃引の時間軸でｔa ″のタイミングにＭa ＋
ΔＭの質量が観測されるようにするには、このときの磁
場強度Ｂa ″から、 により制御すべき加速電圧／電場電圧Ｅa ″が求まる。
したがって、これらのタイミングで加速電圧／電場電圧
をＥa ′からＥa ″までスィープさせることによって、
磁場を従来と同様に掃引しながらＭa −ΔＭからＭa ＋
ΔＭの範囲で観測時間を長くすることができ、Ｓ／Ｎを
改善することができる。Assuming that the acceleration voltage / electric field voltage at which the mass of the peak M a is observed is E a and the magnetic field strength is B a , these relations are as follows. Becomes Therefore, the take sides .DELTA.M, when considering the range of the M a + .DELTA.M from M a -DerutaM, mass M a -DerutaM the timing of t a 'on the time axis of the magnetic field sweep is observed with respect to the peak M a To achieve this, the magnetic field strength B at this time
From a ′, , The acceleration voltage / electric field voltage E a ′ to be controlled is obtained.
Similarly M to the timing of t a "on the time axis of the magnetic field sweeping a +
In order for the mass of ΔM to be observed, from the magnetic field strength B a ″ at this time, Acceleration voltage / electric field voltage E a "is determined to be controlled by.
Therefore, by sweeping the acceleration voltage / electric field voltage from E a ′ to E a ″ at these timings,
While sweeping a magnetic field as in the conventional M a -ΔM from M a +
The observation time can be lengthened in the range of ΔM, and the S / N can be improved.
【００１４】本発明によるピークの観測は例えば以下の
手順にしたがって実行される。まず、図４に示すように
従来の方式と同様に加速電圧／電場電圧を一定にして磁
場強度を掃引し（ステップＳ１）、ピークの位置ｔa と
その半値幅Δｔa の検出を行い、そのピークの位置ｔa
と半値幅Δｔa から対応する質量数Ｍa 、質量数幅ΔＭ
a を求める（ステップＳ２）。そして、ピークの位置ｔ
a に対して加速電圧／電場電圧のスィープ開始点
ｔa ′、終了点ｔa ″を決定し（ステップＳ３）、それ
ぞれの位置における磁場強度Ｂa ′、Ｂa ″を求める
（ステップＳ４）。しかる後、上記の式によりｔa ′〜
ｔa ″でピークの質量数Ｍa を中心としてΔＭaの質量
数幅を観測する加速電圧／電場電圧Ｅa ′、Ｅa ″を求
める（ステップＳ５）。他のピークについても同様であ
る。The observation of a peak according to the present invention is performed, for example, according to the following procedure. First, the field strength was swept by a constant conventional method as well as the acceleration voltage / electric field voltage, as shown in FIG. 4 (step S1), the detection is performed position t a and the half width Delta] t a of the peak, its Peak position t a
And the corresponding mass number M a and the mass number width ΔM from the half width Δt a
a is obtained (step S2). And the peak position t
sweep start point t a of the acceleration voltage / electric field voltage to a ', "to determine the (step S3), and magnetic field strength B a at each location end point t a', B a" Request (step S4). Thereafter, t a 〜
t a "acceleration voltage / electric field voltage E a for observing the mass number range of .DELTA.M a around the mass number M a peak at ', E a" Request (step S5). The same applies to other peaks.
【００１５】以上のようにして求めたタイミング、加速
電圧／電場電圧に基づき、図１に示すように磁場強度Ｂ
を一定の傾きで掃引しながら、それぞれのタイミングで
加速電圧／電場電圧を鋸歯状にスィープさせる（ステッ
プＳ６）。Based on the timing and acceleration voltage / electric field voltage obtained as described above, the magnetic field intensity B
Is swept at a constant slope, and the acceleration voltage / electric field voltage is swept in a sawtooth shape at each timing (step S6).
【００１６】なお、本発明は、上記の実施例に限定され
るものではなく、種々の変形が可能である。例えば上記
の実施例では、ピークの半値幅を用いてスィープ範囲を
決定したが、半値幅に一定の幅を加えたり他の情報によ
り決定してもよい。また、スィープ開始点ｔa ′、終了
点ｔa ″は、ピークとピークとの中間点で設定してもよ
いが、中間点よりピーク寄りでピーク位置から一定の幅
に設定するようにしてもよい。また、磁場の掃引は、制
御可能な範囲で任意の関数を用いてもよい。It should be noted that the present invention is not limited to the above-described embodiment, and various modifications are possible. For example, in the above embodiment, the sweep range is determined using the half width of the peak. However, the sweep range may be determined by adding a certain width to the half width or by other information. Further, the sweep start point t a ′ and the end point t a ″ may be set at an intermediate point between the peaks, but may be set at a certain distance from the peak position near the peak from the intermediate point. The sweep of the magnetic field may use an arbitrary function within a controllable range.
【００１７】[0017]
【発明の効果】以上の発明から明らかなように、本発明
によれば、磁場強度を一定の勾配で掃引し、ターゲット
ピークが出現する磁場強度の前後で加速電圧／電場電圧
をスィープさせるので、ピークとピークとの間の無駄時
間を省き、ピークでの観測時間を長くすることができ、
Ｓ／Ｎを改善することができる。As is apparent from the above invention, according to the present invention, the magnetic field intensity is swept at a constant gradient, and the acceleration voltage / electric field voltage is swept before and after the magnetic field intensity at which the target peak appears. Eliminating wasted time between peaks, increasing the observation time at peaks,
S / N can be improved.
【図１】 本発明の質量分析計の電場及び磁場制御方式
の１実施例を説明するための図である。FIG. 1 is a diagram for explaining one embodiment of an electric field and magnetic field control system of a mass spectrometer of the present invention.
【図２】 本発明の質量分析計の電場及び磁場制御方式
の実行手順を説明するための図である。FIG. 2 is a diagram for explaining an execution procedure of an electric field and magnetic field control method of the mass spectrometer of the present invention.
【図３】 質量分析計の全体の構成概要を示す図であ
る。FIG. 3 is a diagram showing an overall configuration outline of a mass spectrometer.
【図４】 質量分析計の電場及び磁場の制御例及びマス
スペクトルの例を示す図である。FIG. 4 is a diagram showing an example of controlling an electric field and a magnetic field of a mass spectrometer and an example of a mass spectrum.
１１…イオン源、１２…電場、１３…磁場、１４…コレ
クタースリット、１５…加速電源、１６…電場電源、１
７…磁場電源、１８…プリアンプ、１９と２０…ＤＡ
Ｃ、２１…ＡＤＣ、２２…ディスプレイ、２３…データ
処理装置（ＣＰＵ）、２４…プロファイルバッファメモ
リReference numeral 11: ion source, 12: electric field, 13: magnetic field, 14: collector slit, 15: acceleration power supply, 16: electric field power supply, 1
7 ... magnetic field power supply, 18 ... preamplifier, 19 and 20 ... DA
C, 21 ADC, 22 display, 23 data processing device (CPU), 24 profile buffer memory
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 49/26 G01N 27/62 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H01J 49/26 G01N 27/62
Claims (1)
イオン化し該イオン化したビームを加速し、質量数毎に
分離するとともに、エネルギーのずれによるビームの広
がりを補正してターゲットピークを捕捉する二重収束型
の質量分析計において、磁場強度を単調な関数に従って
掃引し、ターゲットピークが出現する磁場強度の前後で
鋸波状に加速電圧／電場電圧をスィープさせることを特
徴とする質量分析計の電場及び磁場制御方式。1. An ion source, an electric field, and a magnetic field, which ionize a sample, accelerate the ionized beam, separate the ionized beams by mass number, and correct a beam spread due to energy shift to capture a target peak. In a double-focusing mass spectrometer, the magnetic field strength is swept according to a monotonic function, and before and after the magnetic field strength at which the target peak appears.
An electric field and magnetic field control method for a mass spectrometer , wherein an acceleration voltage / an electric field voltage is swept in a sawtooth waveform .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17056192A JP3153343B2 (en) | 1992-06-29 | 1992-06-29 | Electric and magnetic field control of mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17056192A JP3153343B2 (en) | 1992-06-29 | 1992-06-29 | Electric and magnetic field control of mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0613021A JPH0613021A (en) | 1994-01-21 |
| JP3153343B2 true JP3153343B2 (en) | 2001-04-09 |
Family
ID=15907136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17056192A Expired - Fee Related JP3153343B2 (en) | 1992-06-29 | 1992-06-29 | Electric and magnetic field control of mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3153343B2 (en) |
-
1992
- 1992-06-29 JP JP17056192A patent/JP3153343B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613021A (en) | 1994-01-21 |
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