JP3153031B2 - Dicing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus for grooving a semiconductor wafer or the like, and more particularly, to a dicing apparatus in which a cutting fluid supplied for discharging cutting chips and cooling a grinding wheel is scattered by the rotation of the grinding blade during cutting. And a dicing apparatus that prevents contamination of the surroundings and reduces the adverse effects on the workpiece by returning to the cut portion after the dirty cutting fluid is scattered during cutting.

[0002]

2. Description of the Related Art A dicing apparatus for forming a thin groove between chips for separating semiconductor chips formed on a semiconductor wafer is widely used. FIG. 12 is a diagram showing a basic configuration of a conventional dicing apparatus. In the drawings, common parts are denoted by the same reference numerals.

In FIG. 12, reference numeral 100 denotes a semiconductor wafer as an object to be grooved, and 101 denotes a stage for holding the semiconductor wafer 100, which has a moving function. Reference numeral 1 denotes a grindstone blade which rotates at high speed. Usually, the grindstone blade 1 is called a blade, and the name of the blade will be used in the following description. Reference numeral 2 denotes a flange cover provided around the blade 1, to which a portion for performing various processes required for cutting is attached. 9
Is a spindle motor for rotating the grindstone blade 1.

[0004] At the time of machining in a dicing apparatus, it is necessary to supply a cutting fluid such as pure water to a cutting portion. Reference numeral 3 denotes a cutting fluid supply pipe for supplying a cutting fluid to the cutting portion. The supply of the cutting fluid to the cutting fluid supply pipe 3 is performed via hoses 121 and 122. Since the cutting fluid supply pipes 3 are usually provided on both sides of the blade 1, there are two pipes parallel to the blade 1. The arrow in the figure is the direction of injection of the cutting fluid. The supplied cutting fluid scatters violently toward the rear side in the rotation direction because the blade 1 rotates at high speed. Reference numeral 8 denotes a shielding plate called a mist trap for preventing the dicing device from being stained by the scattering of the cutting fluid.

[0005] The blade 1 may be worn during the processing or may be broken and chipped. If the processing is performed in a worn or chipped state, a wafer or the like may be damaged. Detecting corruption is performed. As a detector for this purpose, two optical fibers connected to a light source and a light receiving element are usually used. The optical fiber is moved to a measurable position during measurement, and is attached to the flange cover 2 so that it can be retracted during non-measurement. Have been.

[0006] Further, the cutting fluid is supplied to the cutting portion of the blade 1, and the cutting fluid is always adhered to the blade 1 so that the blade 1 and the cutting fluid are well adapted in this case. desirable. However, since the blade 1 is rotating at a high speed, there is a problem that the attached cutting fluid is scattered from the blade 1 by the centrifugal force of rotation. Therefore, cutting fluid or a liquid similar to the cutting fluid is jetted to the blade 1 in front of the rotational position of the cutting portion to improve the familiarity. An injection nozzle for this purpose is also attached to the flange cover 2.

[0007]

As described above, in the dicing apparatus, a cutting fluid is supplied to the blade 1 at the time of machining, and the scattering of the cutting fluid is a serious problem.
At the same time, the dirty cutting fluid contains cuttings,
There is a problem that if a dirty cutting fluid is present in the cutting portion, it adversely affects the surface of the workpiece. Therefore, it is common to collect dirty cutting fluid as quickly as possible, regenerate it in a clean state with a filter or the like, and then use it again.
However, it is difficult to completely recover dirty cutting fluid,
At present, the adverse effect of dirty cutting fluid on the workpiece has become a problem.

FIG. 13 is a view showing a cutting portion of a conventional dicing apparatus. As shown, the cutting fluid supply pipe 3 extends from a mounting member 32 provided on the flange cover 2. Reference numeral 202 denotes a microscope for adjusting the cutting position of the blade 1 to the position of the workpiece 100 before processing, and reference numeral 201 denotes a seat cover for preventing the microscope 202 from being stained with a cutting fluid. The dicing apparatus is required to be reduced in size, and the cutting fluid supply pipe 3 extends from the rear side in the rotational direction with respect to the cutting portion as shown in FIG.

However, in the configuration shown in FIG. 13, the cutting fluid supplied to the cutting portion is scattered by the rotating blade 1 as shown in FIG. Therefore, there is a problem that the contaminated cutting fluid is supplied to the cutting portion again and adversely affects the cutting fluid. FIG. 14 is a view for explaining the movement of the shielding plate and the scattered cutting fluid in the conventional dicing apparatus. In order to prevent the cutting fluid from hitting the flange cover 2 and returning to the cutting portion, the rear portion of the flange cover 2 is large. is open. Therefore, as shown in the figure, the cutting fluid scattered from the cutting portion is scattered over a wide range. Since the scattered cutting fluid contaminates the entire device, as shown in FIG. 14, the shielding plate 8 is extended to prevent the scattered cutting fluid. In the conventional apparatus, the shield plate 8 is arranged so that the blade 1 side is higher so that the drops of the cutting fluid adhered fall along the shield plate 8.

In practice, however, a problem arises in that a part of the cutting fluid drop 300 attached to the upper part of the shielding plate 8 falls on the stage 101 holding the workpiece as it is and returns to the cutting portion again. I have. Also, a duct as shown in FIG. 15 which is a path of the scattered cutting fluid is provided. FIG. 16 is a side view of FIG. By providing such a duct, the scattering of the cutting fluid is greatly reduced, but the cutting fluid that hits the upper surface 181 and the side surface 183 of the duct is dropped and falls on the lower surface 182, and returns to the cutting portion again. Becomes The inclination of the lower surface 182 on the blade 1 side cannot be physically increased because the stage 101 moves.

As described above, the conventional dicing apparatus has a problem that when the scattering of the cutting fluid is prevented, the contaminated cutting fluid returns to the cutting portion again and adversely affects the workpiece. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has a dicing method that prevents scattering of a cutting fluid and prevents a dirty cutting fluid from returning to a cutting portion and adversely affecting a workpiece or the like. The purpose is to realize the device.

[0012]

According to a first aspect of the present invention, there is provided a dicing apparatus which rotates a grindstone blade at a high speed to perform thin groove machining, and feeds a cutting fluid to a cut portion substantially in parallel with the grindstone blade. The cutting fluid supply pipe is provided, and the cutting fluid supply pipe extends from the front side in the rotation direction to the cutting portion to the cutting portion.

A dicing apparatus according to a second aspect of the present invention comprises:
The grinding wheel is rotated at high speed to perform thin grooving, and the cutting fluid is supplied to the cutting part at the time of processing.However, behind the cutting part in the rotation direction, the width is less than the diameter of the grinding wheel blade, horizontal or grinding wheel It is characterized by including a cutting fluid scattering prevention flow control plate that is inclined so that the blade side is lowered. The dicing apparatus according to the third aspect of the present invention performs thin grooving by rotating a grindstone blade at high speed, and a cutting fluid is supplied to a cutting portion at the time of machining, but a cutting fluid or a liquid similar to the cutting fluid is supplied to the grindstone blade. Characterized in that one or a plurality of injection nozzles for injecting is provided.

A dicing apparatus according to a fourth aspect of the present invention comprises:
This is a device that rotates the grindstone blade at high speed to perform thin grooving.The flange cover is provided around the grindstone blade so that the distance between the blade edge of the grindstone blade is constant, and the grindstone stored in the hole of the flange cover. And a detector for detecting the state of the blade,
The hole of the flange cover for accommodating the detector is provided in a portion of the grindstone blade other than on the plane formed by the blade tip.

[0015] A dicing apparatus according to a fifth aspect of the present invention comprises:
The grinding blades rotating at high speed performed thin grooves, but cutting fluid to the cutting part during machining Ru is supplied, the grinding blade relative to the cutting portion
From the near side in the rotating direction, the cutting fluid
Equipped with an injection nozzle, the whetstone blade has a blade and a blade shaft
A flange having a frustoconical inclined portion centered on the heart;
The injection nozzle is provided with a cutting fluid,
Face the tangent to the outer periphery of the flange
It is characterized by spouting into rows .

[0016]

In the dicing apparatus according to the first aspect of the present invention, since the cutting fluid supply pipe extends from the front side in the rotation direction to the cutting part to the cutting part, the cutting fluid scattered by the blade hits the cutting fluid supply pipe and cuts. There is almost no return to the part, and the adverse effect of the dirty cutting fluid on the workpiece is reduced.

In the conventional dicing apparatus, the size of the apparatus has been reduced by providing a cutting fluid supply pipe on the rear side in the rotational direction with respect to the cutting portion due to a seat cover for separating the microscope and the like. However, even if the restriction on arrangement is slightly increased, a great effect can be obtained by extending the cutting fluid supply pipe from the front side in the rotation direction to the cutting portion with respect to the cutting portion as in the present invention.

In the dicing apparatus according to the second aspect of the present invention, the cutting fluid is scattered behind the cutting portion in the rotational direction with a width equal to or less than the diameter of the grindstone blade and inclined horizontally or with a slope such that the grindstone blade side is lowered. Although it is equipped with a flow control plate for prevention, even if the flow control plate for preventing cutting fluid scattering is horizontal or inclined so that the grinding wheel blade side becomes lower, it is scattered if it is within a range not far from the center plane of the grinding wheel blade. Since the flow force of the cutting fluid is large, the droplets of the cutting fluid adhering to the cutting fluid scattering prevention flow restricting plate can be flowed along the cutting fluid scattering preventing flow restricting plate to a range where there is no influence.

In the dicing apparatus according to the third aspect of the present invention, the grindstone blade is provided with one or a plurality of jet nozzles for jetting a cutting fluid or a liquid similar to the cutting fluid. It can be maintained in a familiar state. In the dicing apparatus according to the fourth aspect of the present invention, the dicing apparatus has a flange cover provided around the grindstone blade so that the gap between the grindstone blade and the cutting edge is constant. This is important for maintaining a state that has been adjusted to the cutting fluid. However, when a hole is provided in the flange cover to accommodate the detector, the gap between the hole and the grindstone blade is not constant, so the cutting fluid scatters into the hole and the grindstone blade is adapted to the cutting fluid. Is inhibited. Since the effect of the hole provided in the flange cover is particularly large when the hole is on a plane formed by the blade edge of the grinding wheel blade, the position of the hole provided in the flange cover as in the fourth embodiment of the present invention is changed by the position of the grinding wheel blade. The effect of the hole can be reduced by using a portion other than the plane formed by the cutting edge.

[0020] In the dicing apparatus according to the fifth aspect of the present invention, the front side in the rotation direction of the grindstone blade with respect to the cut portion.
Therefore, a conventional dicing apparatus is provided with an injection nozzle for injecting a cutting fluid toward the grindstone blade. However, the conventional dicing apparatus injects the cutting fluid perpendicular to the grindstone blade or along a tangent to the tip of the grindstone blade. However, if the jet was injected vertically, it would hit the inclined part of the flange of the whetstone blade and scatter on both sides, so it would not fit the whetstone blade. And the cutting fluid does not fit well into the grindstone blade. In contrast, in a dicing apparatus of the fifth aspect of the present invention, the injection Nozzle is grinding blade relative to the cutting portion
From the near side in the direction of rotation of the
Toward the sloping part of the flange,
Since the jets are ejected in parallel , the scattering at the slope portion is small, and the period during which the cutting fluid hits the grindstone blade is long, so that the cutting fluid sufficiently permeates the grindstone blade.

[0021]

FIG. 1 is a side view of a dicing apparatus according to an embodiment of the present invention, viewed from the blade side. In FIG. 1, reference numeral 1 denotes a blade, and reference numeral 2 denotes a flange cover provided around the blade 1 so as to have a predetermined gap. Reference numeral 3 denotes a cutting fluid supply pipe attached to the flange cover 2, reference numeral 4 denotes a flow restricting plate for preventing the cutting fluid from scattering (hereinafter, simply referred to as a flow restricting plate), reference numeral 5 denotes an injection nozzle, and reference numeral 6 denotes a blade. A breakage detection sensor (hereinafter simply referred to as a breakage sensor) 7 is a second injection nozzle that can be adjusted so that the injection direction can be changed. Numerals 21 to 24 are water inlets to which hoses for supplying cutting fluid are attached, 25 is a knob for moving the break sensor 6 up and down, 26 is a cable containing two optical fibers connected to the break sensor 6 It is. In the case where the workpiece is a semiconductor wafer, pure water is generally used as the cutting fluid, and pure water is generally supplied also from the injection nozzles 5 and 7. In this embodiment, the cutting fluid is also used. Pure water shall be used.

In the present embodiment, the blade 1 is further purified water so that the pure water contaminated by the cutting is supplied to the cutting portion again so that the contaminated pure water can be recovered so as not to have an adverse effect. The following countermeasures are taken in comparison with the conventional example in order to maintain a sufficiently adapted state. (1) Arrangement of the cutting fluid supply pipe 3 (2) Shape and arrangement of the flow control plate 4 (3) Space between the tip of the flow control plate 4 and the blade and arrangement of a new injection nozzle 5 (4) Installation of a breakage sensor Structure (5) Second injection nozzle 7 arranged in front of cutting part
Hereinafter, each of the above countermeasures will be described in detail.

A cutting fluid supply pipe 3 extending in parallel with the blade 1 and supplying pure water to the cutting portion has conventionally been extended from the rear side in the rotation direction of the blade 1 as shown in FIG.
In the present embodiment, as shown in FIG. 1, it extends from the front side in the rotation direction. As a result, the dirty pure water scattered in the cutting portion hits the cutting fluid supply pipe 3 and adheres as a droplet, and does not return to the cutting portion along the pipe itself. The amount of water is significantly reduced.

Conventionally, there has been little awareness of the adverse effects of dirty pure water being supplied to the cutting portion again. The pipe 3 extended from the side after one rotation, that is, the side from which pure water was scattered. However, the present inventor has discovered that such an arrangement is a major cause of dirty water being supplied to the cutting portion, and has solved this problem by extending the cutting fluid supply pipe 3 from the front side of the rotation of the blade 1. I thought that I could solve it. In addition, the fact that such an arrangement is adopted makes the apparatus large in size almost no problem.

Next, the flow control plate 4 will be described. FIG. 2 is a perspective view showing the shape of the cutting-fluid-preventing flow control plate 4 of the present embodiment, and FIG. 3 is a top view and a side view thereof. In FIG. 3, reference numeral 8 denotes a fixed shielding plate provided at the rear of the apparatus, and 9 denotes a spindle motor. The blade 1, the flange cover 2, and the flow control plate 4 move together with the spindle motor 9, but the shielding plate 8 is fixed.

As shown in the figure, the flow control plate 4 has almost the same width as the flange cover 2 provided around the blade 1 and is attached to the flange cover 2 at an inclination such that the blade 1 side is lowered. I have. In this embodiment, one of the tips is curved. The flow control plate 4 may be a single plate, but as shown by the dotted line in FIG. 2, the flow control plate 4 may be configured such that the side close to the blade 1 having strong water momentum is bent to prevent the cutting fluid from scattering. Good.

As shown in the figure, the diameter of the blade 1 is represented by A, and the horizontal length of the flow control plate 4 is represented by B. For example, the diameter of a normal blade is about 60 mm, and the width of the flange cover 2 at this time is about 30 mm.
The width of the flow control plate 4 is also about 30 mm. The length of the flow control plate 4 in the horizontal direction is about 70 mm. Assuming that the wafer 100 to be processed is 6 inches, about 150 mm
It is. The shielding plate 8 is provided at a distance from the moving range of the stage 101 holding the wafer 100.

Here, the operation of the flow control plate 4 will be considered. Pure water is supplied to the cutting portion from the cutting fluid supply pipe 3, and a pure water layer is formed on the semiconductor wafer 100.
Since the tip of the blade 1 rotates at a high speed in the pure water layer, the pure water in this portion is scattered vigorously as shown in FIG. The momentum is particularly strong on the plane containing the blade 1,
It becomes weaker as you move away from the plane. Therefore, the momentum of the pure water that is scattered and hits the flow control plate 4 is strong, and even after hitting with the force, the pure water flows upward along the flow control plate 4 and jumps out from the curved tip. The pure water that has flowed out is caught by a fixed plate 8 provided at the rear and collected downward.

Therefore, even if the water stream hits the flow control plate 4, even if it drops, it does not fall onto the lower wafer 100 or the stage 101, and the scattered dirty water does not return to the cutting section again. The momentum of the pure water scattered here becomes weaker as the distance from the plane including the blade 1 is increased. Therefore, if the width of the flow control plate 4 is too wide, the momentum of the pure water scattered at a portion away from the plane including the blade 1 is increased. Because it is weak, dirty pure water drops and falls down. Therefore, it is not preferable because the contaminated pure water returns to the cutting portion again. The width of the flow control plate 4 is determined in consideration of the rotation speed of the blade 1 and the like, but does not become larger than the diameter of the blade 1.

Conversely, if the width of the flow control plate 4 is too narrow,
There is a problem that pure water is scattered due to strong momentum of scattered pure water in a portion where the water is not blocked, and the fixed plate 8 cannot sufficiently prevent the scattered water. Further, here, the flow control plate 4 is shown to be inclined so that the blade 1 side becomes lower. However, it may be appropriate that the flow control plate 4 is horizontal depending on the conditions such as the rotation speed of the blade 1. However, if the blade 1 is disposed so as to be higher, the angle of the scattered water flow hitting the flow control plate 4 becomes larger, so that the force of the water flow after hitting the flow control plate 4 becomes weaker, and the water flow falls from the flow control plate 4. This is not preferable because the number of dirty drops increases.

Further, in this embodiment, the end of the flow control plate 4 is slightly curved downward. This is because the fixed plate 8 makes it easier to catch the water flow that jumps out from the end of the flow control plate.
At the end, the water flow is weakened, which prevents the droplets from flowing back. The other end of the flow control plate 4 extends to the vicinity of the blade 1, and the extension line intersects the blade 1 at a position higher than the center of rotation of the blade 1 as shown in the figure. This is because the opening for receiving the scattered pure water is widened to reduce the amount of dirty pure water that hits the flange cover 2 and returns to the cut portion.

Next, the shape of the tip of the flow control plate 4 on the blade 1 side will be described. FIG. 4 is a top view and a side view showing the structure of this part. The blade 1 and the flange cover 2 are formed so as to have a substantially constant interval. Pure water adhering to the blade 1 is further shaken off from the blade 1 by a centrifugal force after passing the cutting portion. For cutting, it is desirable that the blade 1 is maintained in a state in which the blade 1 has been adjusted to the pure water to some extent. Therefore, by setting a fixed narrow interval between the blade 1 and the flange cover 2, a water path is formed so that the pure water that has been shaken off adheres to the blade 1 again. However, the pure water adhering to the blade 1 is already dirty, and it is not preferable to supply the pure water to the cutting portion again. Therefore, in this embodiment, as shown in FIG. 4, the distance between the tip of the flow control plate 4 and the blade 1 is made smaller than the distance between the blade 1 and the flange cover 2. As a result, most of the contaminated pure water adhering to the blade 1 and rotating from the cutting portion is guided to the flow control plate 4 side and collected, so that the amount of the contaminated pure water returning to the cutting portion is reduced. As actual values in the present embodiment, the distance between the blade 1 and the flange cover 2 is 5 mm to 7 mm, and the distance between the tip of the flow control plate 4 and the blade 1 is 1 mm to 3 mm.

However, most of the pure water adhering to this portion is shaken off from the blade 1, so that the flow control plate 4
In the subsequent rotating part, the blade 1 and the flange cover 2
, The amount of pure water held in the water path between the blades 1 and 2 decreases, and a new problem occurs in that the familiarity of the blade 1 with pure water decreases. Therefore, in this embodiment, as shown in FIG. 4, the injection nozzle 5 for injecting pure water to the blade 1 immediately after the flow control plate 4
Is provided. Thereby, the familiarity of the blade 1 with pure water is improved.

When the injection nozzles 5 are provided to improve the adaptability of the blade 1 to pure water, the number of the injection nozzles is not limited to one, and as shown in FIG. Provision of the injection nozzles 51 to 55 may further improve the adaptability of the blade 1 to pure water. Next, the mounting structure of the blade damage detection sensor (hereinafter, referred to as a damage sensor) 6 will be described. FIG. 6 is a diagram showing a mounting structure of a conventional breakage sensor.

This sensor detects the breakage of the blade by detecting the situation in which the blade blocks light, and it is difficult to provide a light emitter and a light receiver for that purpose. And connect them with optical fibers. The damaged sensor is moved to a detectable position only when detecting, and retracted when not detecting. In FIG. 6, 1 is a blade, and 2 is a flange cover. Reference numeral 21 denotes a hole provided in the flange cover 2 for accommodating the damage sensor 6, and reference numeral 22 denotes a member to which a moving screw for vertically moving the damage sensor 6 is attached. Breakage sensor 6
Has an optical fiber 61 connected to a light emitting device, an optical fiber 62 connected to a light receiving device, a moving block 63, a moving screw 64, and a knob 65. The moving block 63 is accommodated in the hole 21 so as to be movable up and down. By turning the knob 65, the moving block 63 is moved to and retracted from the detectable position. FIG. 6 shows a state at the time of detection, in which the blade edge of the blade 1 enters the groove of the moving block 63, and the state of breakage of the blade 1 can be detected by the state of blocking light from the optical fiber 61 to the optical fiber 62.

FIG. 7 is a view showing a state in which the knob 65 is turned to retract the moving block 63 at the time of non-detection. FIG.
In the non-detection state, normal cutting is performed, and pure water is supplied to the cut portion. At this time, as described above, it is important that the gap between the blade 1 and the flange cover 2 is at a constant interval so as to provide a water path for adjusting the blade to pure water. However, as shown in FIG. 7, when the breakage sensor 6 is retracted, the holes 21 provided in the flange cover 2 are provided.
Changes the path of the water and obstructs the flow.

In order to solve this problem, in the present embodiment, as shown in FIG. 8, a portion of the hole 21 provided on the flange cover 2 on the blade 1 side is left with a central portion 23 opposed to the blade edge of the blade 1. The structure has openings 24 on both sides. As shown in FIG. 6, the distal end of the moving block 63 has a structure having two projections that sandwich the blade 1.
An optical fiber is fixed to these two projections. Therefore, if the two protrusions move through the two openings 24, the central portion 23 can be left.

In the structure in which the central portion 23 remains as shown in FIG. 8, since the surface of the flange cover 2 facing the cutting edge of the blade 1 is continuous, it is compared with the conventional example shown in FIGS. Therefore, the degree of obstruction of the water path between the blade 1 and the flange cover 2 is improved. Since the blade edge of the blade 1 is thin and most of the attached pure water is shaken off from the blade edge, even if the width of the central portion 23 shown by the reference numeral 23 in FIG. In the above embodiment, the block 63 for holding the optical fibers 61 and 62 is used.
Is vertically movable integrally, but is not necessarily limited to this. As shown in FIG. 8C, the blocks 66 and 67 are individually finely adjusted with knobs 65 on both side surfaces of the flange cover 2. It may be configured to be mounted as possible and to hold the optical fibers 61 and 62 thereon.

Next, the injection direction of the second injection nozzle 7 for injecting pure water to the blade 1 at the front side of the cutting portion will be described. This second injection nozzle 7 has been conventionally used for adapting the blade 1 to pure water, but conventionally, as shown in FIG. 9, the injection direction is set to the tangential direction of the blade edge of the blade 1, As shown in FIG. 10, the direction was perpendicular to the center of the blade 1, that is, the tangent to the cutting edge of the blade 1.

In the case of jetting as shown in FIG. 9, since the blade 1 is rotating at a high speed and the time during which the pure water is in contact with the blade 1 is short, the jetted pure water is not sufficiently adapted to the blade 1. There is. Therefore, as shown in FIG.
Injection is performed in a direction perpendicular to the tangent to the edge of the blade 1. However, the tip of the flange 12 supporting the blade 11 of the blade 1 is inclined, and there is a problem that the injected pure water hits the inclined part of the flange 12 and scatters violently.

Therefore, in this embodiment, as shown in FIG. 11, the injection direction of the second injection nozzle 7 is set in the middle between FIG. 9 and FIG. In FIG. 11, reference numeral 16 denotes a pedestal attached to the spindle motor 9. Blade 1 is blade 1
1 and a flange 12 and a nut 15
Is fixed to the base 16. The flange 12 has an inclined portion and an edge 13 for chucking the blade 1 when the blade 1 is replaced. The second injection nozzle 7 is configured to be rotatable so that the injection direction can be changed to an appropriate direction. In this embodiment, as shown in FIG. 11, the injection direction of the second injection nozzle 7 is set in the middle between FIG. 9 and FIG. 10, but more specifically, the injection direction of the second injection nozzle 7 is set to this direction. Flange 1
2 in the tangential direction of the edge 13. By setting the jetting direction in this way, the pure water that hits the inclined portion of the flange 12 does not scatter so much because the contact angle is small, and the pure water that hits the edge 13 goes toward the inside, that is, toward the tip of the blade 1. Because it returns to the direction, it does not fly. Moreover, since the jet is sprayed at a certain angle with respect to the blade 1, the familiarity of the pure water with the blade 1 is also improved.

The above is a description of the present embodiment. However, the drawings and the like are merely examples, and the angle and position of each part can be variously modified in accordance with the diameter and rotation speed of the blade. is there.

[0043]

As is clear from the above description, according to the present invention, the cutting fluid scattered in the cutting portion hardly stains the entire apparatus and its surroundings, and the cutting fluid contaminated in the cutting portion is again removed from the cutting portion. A dicing apparatus in which the adverse effects caused by the supply of the blades are reduced is realized, and the dicing apparatus in which the adaptability of the blade to pure water is improved and good cutting can be performed is realized.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of an embodiment of the present invention.

FIG. 2 is a perspective view showing a shape of a flow restricting plate for preventing scattering of cutting fluid in an embodiment.

3A and 3B are a top view and a side view showing the shape and arrangement of a cutting fluid scattering prevention flow control plate of FIG.

FIG. 4 is a diagram showing a blade-side portion of a cutting fluid scattering prevention flow control plate in an embodiment.

FIG. 5 is a diagram showing a modification in which injection nozzles are provided at a plurality of locations.

FIG. 6 is a view showing a mounting structure of a conventional blade breakage detection sensor.

FIG. 7 is a view showing a non-detection state in the mounting structure of the blade damage detection sensor of FIG. 6;

FIG. 8 is a diagram illustrating a mounting structure of a blade damage detection sensor according to the embodiment.

FIG. 9 is a view showing a conventional example in which cutting water is injected in a tangential direction of a blade.

FIG. 10 is a view showing a conventional example in which cutting water is injected in a direction perpendicular to a tangential direction of a blade.

FIG. 11 is a diagram showing a positional relationship for injecting cutting water to a blade in the example.

FIG. 12 is a perspective view showing a conventional dicing apparatus.

FIG. 13 is a view showing an arrangement of a conventional cutting fluid supply pipe.

FIG. 14 is a view showing the shape of a conventional cutting fluid scattering prevention plate.

FIG. 15 is a view showing another example of the shape of a conventional cutting fluid scattering prevention plate.

16 is a diagram showing a problem of the cutting fluid scattering prevention plate of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Whetstone blade (blade) 2 ... Flange cover 3 ... Cutting fluid supply pipe 4 ... Cutting fluid splash prevention plate 5 ... Injection nozzle 6 ... Whetstone blade damage detection sensor 7 ... Second ejection nozzle

Continuation of the front page (56) References JP-A 56-121527 (JP, U) JP-A 3-15064 (JP, U) JP-A 60-123210 (JP, U) JP-A 4-22206 (JP , U) Shokai Sho 57-170925 (JP, U) Shoko 38-15994 (JP, Y1) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/301 B23D 47/00

Claims (10)

(57) [Claims] 1. A dicing apparatus in which a grinding wheel (1) is rotated at a high speed to perform thin grooving and a cutting fluid is supplied to a cutting portion at the time of machining. Blade (1)
A dicing apparatus comprising: a cutting fluid scattering prevention flow control plate (4) having a width equal to or less than the diameter of the cutting fluid and having a horizontal or inclination such that the side of the grinding stone blade (1) is lowered. 2. A position where an extension surface of the cutting fluid scattering prevention flow control plate (4) intersects with the grinding wheel blade (1) is a position higher than a rotation center of the grinding wheel blade (1). The dicing apparatus according to claim 1, wherein 3. The cutting fluid scattering prevention flow control plate (4) has an end opposite to the whetstone blade (1) which is curved in a downward direction. The dicing apparatus according to claim 2. 4. The flow control plate (4) for preventing scattering of cutting fluid,
The whetstone blade (1) provided around the whetstone blade (1)
The dicing apparatus according to any one of claims 1 to 3, wherein the dicing apparatus is attached to a flange cover (2) that can move together with the grinding wheel, and moves according to the movement of the whetstone blade (1). 5. A workpiece (100) behind the cutting fluid scattering prevention plate (4) on the side opposite to the grinding wheel blade (1).
The dicing device according to any one of claims 1 to 4, further comprising a fixed shielding member (8) having a substantially vertical portion at a position farther from an end of a movement range of the processing stage for holding the dicing. apparatus. 6. The flow control plate (4) for preventing cutting fluid scattering,
It is attached to a flange cover (2) provided around the grinding wheel blade (1) so that the distance between the blade edge of the grinding wheel blade (1) and the cutting edge of the grinding wheel blade (1) is constant. The distance between 4) and the cutting edge of the grinding wheel blade (1) is smaller than the distance between the flange cover (2) and the cutting edge of the grinding wheel blade (1). The dicing apparatus according to claim 1. 7. The grinding wheel blade (1) immediately after the extending surface of the cutting fluid scattering prevention flow control plate (4) intersects with the grinding wheel blade (1) in the rotation direction of the grinding wheel blade (1). 7. A jet nozzle (5) for jetting the cutting fluid or a liquid similar to the cutting fluid.
The dicing apparatus according to claim 1. 8. A dicing apparatus for rotating a grindstone blade (1) at a high speed to perform thin groove machining, wherein a distance between the grindstone blade (1) and a cutting edge of the grindstone blade (1) is constant. Cover (2) provided as described above and the whetstone blade (1)
And a detector (6) for detecting the state of ( 2 ). The detector (6) includes two protruding tip portions,
In a dicing device for detecting a state of the grinding wheel blade (1) at a position where two tip portions are disposed on both sides of a blade edge of the grinding wheel blade (1), the flange cover (2) is provided with a Each of the two parts divided by the plane of the cutting edge , excluding on the plane of the cutting edge that includes the cutting edge and is orthogonal to the axis of the grinding wheel (1).
And two holes (24) provided therein, wherein the detector
The dicing apparatus according to (6), wherein the two tip portions are inserted into the two holes (24) . 9. The whetstone blade (1), wherein the detector (6) is
It is composed of light emitting means and light receiving means arranged on both sides of the
Dicing apparatus according to claim 8, wherein the breakage detector der Turkey for detecting breakage of the grinding wheel blade which is adjusted to a detectable position upon detection (1). 10. The dicing apparatus according to claim 9, wherein the damage detector is an optical fiber connected to a light source and a light receiver, respectively.