JP3150552B2 - Surface inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

This invention relates to iron, aluminum,
The present invention relates to a surface inspection apparatus that continuously and photoelectrically inspects a surface defect of a sheet material in a plant for manufacturing a long sheet material such as paper and film.

[0002]

2. Description of the Related Art FIG. 4 shows the basic configuration of a surface inspection apparatus. The long sheet material 2 to be inspected is continuously fed in the direction of the arrow. The scanner 1 and the receiver 3 are arranged so as to face one surface of the sheet material 2 in a non-contact state. The laser beam emitted from the scanner 1 is applied to the sheet 2
Is scanned in the width direction, and the light reflected and diffracted on the surface of the sheet object 2 is received by the receiver 3. From the receiver 3, an electric signal corresponding to the reflection level of a portion along the scanning line on the surface of the sheet 2 is obtained, and the presence or absence of a surface defect is discriminated from this signal.

[0003] An inspection head is a unit in which the scanner 1 and the receiver 3 are integrated, and it is necessary to periodically verify the accuracy of optical equipment including the light projecting optical system and the light receiving optical system of the inspection head. That is, in place of the sheet, measurement is performed on a sample plate on which a known defect is intentionally created, and the characteristics of the inspection head are checked. This test is called a calibration test.

A specific surface inspection apparatus is configured as shown in FIGS. 5 and 6, and a calibration test is performed as follows. The inspection head 5 is attached to a truck 9 traveling along the track.
Is mounted, and the inspection head 5 is moved by the cart 9,
The online inspection position where the inspection head 5 is opposed to the inspection target sheet object 2 and the inspection head 5
Can be set to the off-line calibration position separated in the width direction of the sheet material 2.

At the off-line calibration position, a calibration table 6 separate from the carriage 9 is installed. There, the operator brings the sample plate 4 and attaches the sample plate 4 to the calibration table 6. Then, the inspection head 5 set at the calibration position faces the sample plate 4. While the measurement of the sample plate 4 is performed by the inspection head 5, the interval between the inspection head 5 and the sample plate 4 is changed, or the angle of the sample plate 4 with respect to the inspection head 5 is changed. Is checked, and it is determined whether it is within the normal range.

[0006]

In the conventional surface inspection apparatus shown in FIGS. 5 and 6, the sample plate 4 set on the calibration table 6 is displaced to change the interval and angle with respect to the inspection head 5. Pin 7 provided on the movable part of the table 6
Adjustment and fixing must be repeated,
The problem that the work time for that would be long,
There is a problem that it is difficult to ensure the accuracy of the interval and angle of the sample plate 4 with respect to the inspection head 5. Also,
It is desirable to perform the calibration test by moving the sample plate 4 in the plane direction as in the case of the inspection target sheet object 2. However, conventionally, to perform this test, another calibration device with a transport mechanism must be used. Did not.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has as its object to easily and accurately adjust the distance and angle between a sample plate and an inspection head and to adjust the direction of the sample plate in the plane direction. It is another object of the present invention to provide a surface inspection apparatus which can easily carry the wafer.

[0008]

Therefore, according to the present invention, an inspection head is mounted on a truck traveling along a track, and the inspection head is moved by the truck to make the inspection head face an object to be inspected. In a surface inspection apparatus for setting an inspection head at an off-line calibration position separated from an inspection object, a calibration table attached to the carriage via a movable support mechanism, and for mounting a calibration sample plate, A first drive mechanism that drives a movable support mechanism to set a measurement position at which the calibration table faces the front of the inspection head and a retracted position that is retracted from the front of the inspection head; A displacement machine interposed between the calibration table and the displacement table for displacing the calibration table set at the measurement position to change an interval and an angle with respect to the inspection head. If, it provided a second drive mechanism for driving the displacement mechanism. Further, a transfer mechanism for moving the sample plate mounted on the calibration table along the surface of the calibration table is provided.

[0009]

The inspection head is mounted not only on the trolley but also on the trolley via the movable support mechanism and the displacement mechanism. Therefore, the accuracy of the positional relationship between the inspection head and the calibration table is sufficiently higher than that in the conventional case where the calibration table is provided completely separately from the carriage.

To perform the calibration test, first, the carriage is moved to the off-line calibration position, then the calibration table is moved to the measurement position by the first drive mechanism, the sample plate is set on the calibration table, and the second plate is set. The measurement is performed while displacing the sample plate by the drive mechanism. The measurement is performed while the sample plate is conveyed in the plane direction by operating the conveyance mechanism as needed.

[0011]

1 to 3 show a schematic configuration of an embodiment of the present invention. The point that the inspection head 5 is mounted on the truck 9 traveling along the track is the same as the conventional one, and as shown in FIG. 5 showing the conventional configuration, the truck 9 moves to change the online inspection position and the offline configuration position. Take. One of the features of the present invention is that the calibration table 6 is attached to the carriage 9 via the rotating arm 10.
Is attached.

The base of the rotating arm 10 is rotatably mounted on the side surface of the casing of the inspection head 5, and an arm drive motor 11 for reciprocatingly rotating the arm 10 as shown by an arrow a is provided at this portion. . This rotating arm 1
The calibration table 6 is attached to the front end of the “0”. Normally, the rotary arm 10 is at the retracted position where the counterclockwise rotation is performed. At this time, the calibration table 6 is located above the inspection head 5 and is far away from the front of the head (the right side surface in FIG. 6). When the carriage 9 moves to the online inspection position in this state, the inspection target sheet object 2 faces the front of the head (see FIG. 5).

When the carriage 9 is moved to the off-line calibration position and the rotating arm 10 is rotated clockwise by the arm drive motor 11 and set at the measurement position, the calibration table 6 at the tip of the arm faces the front of the inspection head 5. A calibration test is performed in this state.

The calibration table 6 is not fixedly attached to the tip of the arm, but is displaceably attached in the longitudinal direction of the arm 10 (arrow b) by a screw feed mechanism driven by a motor 12. It is attached so as to be rotatable in the direction of arrow c by a rotating mechanism driven by a motor 13. The sample plate 4 is set on the calibration table 6 at the measurement position, and the sample plate 4 is opposed to the inspection head 5. If the screw feed mechanism is appropriately driven by the motor 12 in this state, the distance between the sample plate 4 and the inspection head 5 changes. When the rotation mechanism is appropriately driven by the motor 13, the angle of the sample plate 4 with respect to the inspection head 5 changes.

A transfer mechanism comprising a belt conveyor 14 and guide rollers 15 is provided on the mounting surface of the calibration table 6 on which the sample plate 4 is mounted. Here sample plate 4
Is set and the belt conveyor 14 is driven, the sample plate 4 can be moved up and down in the surface direction, and the calibration test can be performed while moving.

[0016]

According to the present invention, the calibration table is mounted on the carriage together with the inspection head, and the calibration table can be moved to the measurement position and the retracted position by the movable support mechanism. And the positional relationship between the sample and the sample plate becomes extremely high. Therefore, the calibration test using the sample plate can be performed with high accuracy. In addition, since the operation of the movable support mechanism and the operation of the displacement mechanism for adjusting the distance and angle of the calibration table at the time of the calibration test are performed by a motor or the like, the operation that the staff must perform during the calibration test is almost automated,
Test time can be reduced. Furthermore, if the calibration table is provided with a transport mechanism such as a belt conveyor so that the calibration test can be performed while moving the sample plate in the plane direction, the efficiency of the test is further improved.

[Brief description of the drawings]

FIG. 1 is a front view of a surface inspection apparatus including a calibration device according to an embodiment of the present invention.

FIG. 2 is an extraction diagram of a main part of the apparatus of the embodiment.

FIG. 3 is a detailed view of a calibration table in the apparatus of the embodiment.

FIG. 4 is a schematic diagram showing a basic configuration of a surface inspection apparatus.

FIG. 5 is a plan view of a conventional surface inspection apparatus.

FIG. 6 is a front view of the conventional apparatus in a calibration test state.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Scanner, 2 ... Sheet object to be inspected, 3 ... Receiver,
4 ... Sample plate, 5 ... Inspection head, 6 ... Calibration table, 7 ... Pin, 9 ... Carriage, 10 ... Rotating arm (movable support mechanism), 1
DESCRIPTION OF SYMBOLS 1 ... Arm drive motor (1st drive mechanism), 12 ... Distance change motor (2nd drive mechanism), 13 ... Angle change motor (2nd drive mechanism), 14 ... Belt conveyor (conveyance mechanism) 15 Guide roller.

Claims (2)

(57) [Claims] 1. An inspection head is mounted on a truck traveling along a track, and the inspection head is moved by the truck, and an online inspection position where the inspection head is opposed to the inspection object, and the inspection head is moved from the inspection object. In the surface inspection apparatus to be set to the separated off-line calibration position, the calibration table is attached to the carriage via a movable support mechanism, and a calibration table for mounting a sample plate for calibration, and the movable support mechanism is driven to perform the calibration. A first drive mechanism for setting a table at a measurement position facing the front of the inspection head and a retracted position retracted from the front of the inspection head, interposed between the movable support mechanism and the calibration table; A displacement mechanism for displacing the calibration table set at the measurement position to change an interval and an angle with respect to the inspection head, and a second drive for driving the displacement mechanism A surface inspection device comprising a moving mechanism. 2. The surface inspection apparatus according to claim 1, wherein the calibration table includes a transport mechanism for moving the sample plate mounted on the calibration table along the surface of the calibration table.