JP3142729B2 - Ceramic wiring board - Google Patents

Ceramic wiring board

Info

Publication number
JP3142729B2
JP3142729B2 JP06286447A JP28644794A JP3142729B2 JP 3142729 B2 JP3142729 B2 JP 3142729B2 JP 06286447 A JP06286447 A JP 06286447A JP 28644794 A JP28644794 A JP 28644794A JP 3142729 B2 JP3142729 B2 JP 3142729B2
Authority
JP
Japan
Prior art keywords
ceramic
wiring board
layer
sio
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP06286447A
Other languages
Japanese (ja)
Other versions
JPH08148778A (en
Inventor
順三 福田
英明 荒木
昌志 深谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal SMI Electronics Device Inc
Original Assignee
Sumitomo Metal SMI Electronics Device Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal SMI Electronics Device Inc filed Critical Sumitomo Metal SMI Electronics Device Inc
Priority to JP06286447A priority Critical patent/JP3142729B2/en
Publication of JPH08148778A publication Critical patent/JPH08148778A/en
Application granted granted Critical
Publication of JP3142729B2 publication Critical patent/JP3142729B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、セラミック配線基板表
裏面の配線パターンの検査に適したセラミック配線基板
に関する。特にCCDカメラを用いた配線パターンの検
査に適したセラミック配線基板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic wiring board suitable for inspecting wiring patterns on the front and back surfaces of a ceramic wiring board. In particular, the present invention relates to a ceramic wiring board suitable for inspecting a wiring pattern using a CCD camera.

【0002】[0002]

【従来の技術】一般にセラミック配線基板には白色系の
ものが使用されており、特に低温焼成基板は通常白色で
あり、その表面及び/又は裏面にAg,Au系の比較的
白い導体を配線パターンとして形成させている。一方、
近年、電子機器は小型化し、それに応じてセラミック配
線基板に対しても小型化のニーズが高まり、配線の微細
化で対応している。このため配線基板の検査工程の重要
性、困難性も増して来ている。セラミック配線基板表裏
面に形成された配線パターンはその形状、断線の有無等
を外観検査されるが、検査のためにはCCDカメラによ
る光学的な自動検査が使用できることが検査精度の向上
には望ましい。ところが、上記のようにセラミック配線
基板と配線パターンがともに白色又は白色に近い薄い色
であると、両者のコントラストが弱く、外観検査が困難
である。特にCCDカメラによるパターン認識が十分で
ないため自動検査機を使用して自動チェックすることが
できないという問題があった。
2. Description of the Related Art In general, a white wiring board is used for a ceramic wiring board. In particular, a low-temperature fired board is usually white, and a relatively white conductor of Ag or Au is printed on the surface and / or the back side of the wiring pattern. It is formed as. on the other hand,
In recent years, electronic devices have been miniaturized, and accordingly, the need for miniaturization of ceramic wiring substrates has increased, and this has been responded to by miniaturization of wiring. For this reason, the importance and difficulty of the inspection process of the wiring board are increasing. The wiring pattern formed on the front and back surfaces of the ceramic wiring board is visually inspected for its shape, presence or absence of disconnection, etc. For the inspection, it is desirable to be able to use an optical automatic inspection with a CCD camera for improving the inspection accuracy. . However, when the ceramic wiring board and the wiring pattern are both white or a light color close to white as described above, the contrast between the two is weak, and the appearance inspection is difficult. In particular, there has been a problem that the pattern cannot be automatically checked using an automatic inspection machine because the pattern recognition by the CCD camera is not sufficient.

【0003】[0003]

【発明が解決しようとする課題】本発明は、白色又は白
色に近い色のセラミック基板に対してコントラストの弱
い白色系の導体を用いる場合にも、配線パターンの検査
が容易で、光学的な自動検査を可能とするセラミック配
線基板を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention makes it easy to inspect a wiring pattern even when a white conductor having a low contrast is used for a ceramic substrate of a white color or a color close to white. It is an object of the present invention to provide a ceramic wiring board that enables inspection.

【0004】[0004]

【課題を解決するための手段】本発明者らは鋭意検討し
た結果、セラミック基板の表面及び/又は裏面のほぼ全
面に着色セラミック層を形成することにより、上記課題
が解決されることを見出し本発明に至った。即ち、本発
明は次の(1)、(2)である。 (1) 一層又は複数層のガラスセラミックス層からな
基板において、その表面又は裏面のほぼ全面にCoO
及び/又はRuO2を含み、その含有量がCoOをX軸
としRuO2をY軸とする座標において、点A(0.
,0),点B(10,0),点C(0,10)及び
(0,0.5)の4点に囲まれた範囲内を含む着色ガ
ラスセラミックス層が形成され、該着色ガラスセラミッ
クス層上に、銀系又は金系導体層が形成されていること
を特徴とするガラスセラミック配線基板。 (2) ガラスセラミック層がCaO−Al23−Si
2−B23系、CaO−Al23−SiO2系、MgO
−Al23−SiO2−B23系及びCaO−MgO−
Al23−SiO2−B23系から選ばれる一種のガラ
ス成分40〜70重量部と残部がアルミナである組成を
有することを特徴とする前記(1)記載のセラミック配
線基板。
Means for Solving the Problems As a result of intensive studies, the present inventors have found that the above-mentioned problems can be solved by forming a colored ceramic layer on substantially the entire surface and / or back surface of a ceramic substrate. Invented the invention. That is, the present invention includes the following (1) and (2). (1) One or more glass ceramic layers
In the substrate that, CoO over substantially the entire front or back surface thereof
And / or RuO 2 , the content of which is represented by a point A (0 .0) at coordinates where CoO is the X axis and RuO 2 is the Y axis.
5 , 0), point B ( 10, 0), point C (0, 10 ) and point
A colored glass-ceramic layer including a range surrounded by four points D (0, 0.5 ) is formed, and a silver-based or gold-based conductor layer is formed on the colored glass-ceramic layer. Glass ceramic wiring board. (2) glass-ceramic layer is CaO-Al 2 O 3 -Si
O 2 -B 2 O 3 system, CaO-Al 2 O 3 -SiO 2 system, MgO
—Al 2 O 3 —SiO 2 —B 2 O 3 system and CaO—MgO—
Al 2 O 3 -SiO 2 -B 2 wherein the O 3 glass component 40 to 70 parts by weight of one selected from the system and the remainder is characterized by having a composition is alumina (1) a ceramic wiring board according.

【0005】本発明に用いられるセラミック基板材料の
色としては、特に限定されない。例えば、低温焼成セラ
ミックが特に好ましいが、これ以外にもアルミナ及びア
ルミナを主成分とする各種セラミック材料も用いること
ができる。低温焼成セラミックとしては、例えば特公平
3−53269号、特公平3−59029号等に記載さ
れている800〜1000℃で焼成可能な低温焼成セラ
ミックが好適に用いられる。特にCaO−Al23−S
iO2−B23、CaO−Al23−SiO2系、MgO
−Al23−SiO2−B23系及びCaO−MgO−
Al23−SiO2−B23系から選ばれる一種のガラ
ス成分40〜70重量部と残部がアルミナである組成を
有するものが本発明に好ましい。導体材料としてはA
g,Au系の他、白色又は白に近い色のものを用いるこ
とができる。又、表・裏面及び内層の導体の形成方法と
してはセラミック体と同時に焼成する方法であっても、
セラミックを焼成した後に表・裏面を形成させる方法の
どちらでも良い。
The color of the ceramic substrate material used in the present invention is not particularly limited. For example, low-temperature fired ceramics are particularly preferred, but alumina and various ceramic materials containing alumina as a main component can also be used. As the low-temperature fired ceramic, for example, a low-temperature fired ceramic that can be fired at 800 to 1000 ° C. described in Japanese Patent Publication Nos. 3-53269 and 3-59029 is preferably used. In particular, CaO-Al 2 O 3 -S
iO 2 —B 2 O 3 , CaO—Al 2 O 3 —SiO 2 system, MgO
—Al 2 O 3 —SiO 2 —B 2 O 3 system and CaO—MgO—
One having a composition in which 40 to 70 parts by weight of a glass component selected from the group consisting of Al 2 O 3 —SiO 2 —B 2 O 3 and the remainder being alumina is preferred for the present invention. A as conductor material
In addition to g- and Au-based materials, those having a white color or a color close to white can be used. Also, even if the method of forming the conductor of the front, back and inner layers is a method of firing simultaneously with the ceramic body,
Either method of forming the front and back surfaces after firing the ceramic may be used.

【0006】着色セラミック層に用いられる着色物質と
しては、電気特性の劣化を防ぐためできるだけ少量で着
色できる物質が選択される。又、セラミック基板及び配
線用導体材料とのなじみが良く、かつ白色又は白色に近
い導体とのコントラストの強いものであれば限定されな
い。例えば濃紺色であるCoO、黒であるRuO2など
の着色酸化物及びこれら両者の混合物が好適であり、他
にAg2O−PdOなどが挙げられる。着色セラミック
層を形成する方法としては着色材料を含有するセラミッ
クペーストを白色セラミック基板の上に印刷する方法の
他着色したグリーンシートを積層する手段を用いてもよ
い。又、着色セラミック層はセラミック層と同時に焼成
して形成するか、セラミック層のみあらかじめ焼成し、
その表面及び/又は裏面に着色セラミックペーストや着
色グリーンシートを形成させ焼成する方法どちらでも良
い。又、焼成中に着色物質に変化するものを層としても
よい。セラミック基板の全面に着色セラミック層を設け
ると検査工程で全ての配線パターンを自動検査できるの
で好ましいが、もし電気特性、蒸着手段等の理由で検査
において重要な基板上のある特定部分のみ着色セラミッ
ク層が設けられる場合も本願発明に含まれる。
As the coloring substance used for the colored ceramic layer, a substance which can be colored in as small an amount as possible in order to prevent deterioration of the electric characteristics is selected. The material is not limited as long as it has good compatibility with the ceramic substrate and the conductor material for wiring and has a strong contrast with a white or nearly white conductor. For example, colored oxides such as dark blue CoO and black RuO 2 , and a mixture of both are preferable, and Ag 2 O—PdO is also included. As a method of forming the colored ceramic layer, a method of printing a ceramic paste containing a coloring material on a white ceramic substrate or a method of laminating colored green sheets may be used. Also, the colored ceramic layer is formed by firing simultaneously with the ceramic layer, or only the ceramic layer is fired in advance,
Either a method in which a colored ceramic paste or a colored green sheet is formed on the front surface and / or the back surface and firing is performed. Further, a layer that changes into a colored substance during firing may be used as the layer. It is preferable to provide a colored ceramic layer on the entire surface of the ceramic substrate because all the wiring patterns can be automatically inspected in the inspection process. However, if a specific portion on the substrate is important in the inspection because of electrical characteristics, vapor deposition means, etc. Is included in the present invention.

【0007】着色物質としてCoOを用いる場合はセラ
ミック材料に対して0.3〜10重量部であり、RuO
2を用いる場合は0.5〜10重量部が好ましい。Co
Oは0.3重量部以下では着色量が少なすぎ、10重量
部以上では絶縁抵抗が劣化する。またRuO2は0.5
重量部以下では着色が少なく、10重量部以上では絶縁
抵抗が劣化してしまう。又、両者を併用する場合を含ん
でCoOをX軸としRuO2をY軸とする座標におい
て、重量部で(0.3,0),(10,0),(0,
0.5)及び(0,10)の4点に囲まれた範囲内であ
ることが好ましい。この範囲を図2に示す。なお、導体
とのコントラストを強くするためには、基板材料に着色
剤としてCoO、RuO2、MnO2、Fe23等の酸化
物を含有させることも考えられるが、このようにセラミ
ック基板内部まで着色剤が入ると、セラミック体の特性
が低下し、特に絶縁抵抗が劣化し、本来所有している低
温焼成セラミックの優秀な電気特性をそこなってしまう
ため、好ましくない。
When CoO is used as the coloring substance, the amount is 0.3 to 10 parts by weight with respect to the ceramic material.
When 2 is used, 0.5 to 10 parts by weight is preferable. Co
If O is less than 0.3 parts by weight, the coloring amount is too small, and if more than 10 parts by weight, the insulation resistance is deteriorated. RuO 2 is 0.5
If the amount is less than 10 parts by weight, the coloring is small, and if the amount is more than 10 parts by weight, the insulation resistance is deteriorated. In addition, including the case where both are used in combination, in the coordinates where CoO is the X axis and RuO 2 is the Y axis, (0.3, 0), (10, 0), (0,
(0.5) and (0, 10). This range is shown in FIG. In order to enhance the contrast with the conductor, it is conceivable to include an oxide such as CoO, RuO 2 , MnO 2 , Fe 2 O 3 as a colorant in the substrate material. If the coloring agent is added up to this point, the characteristics of the ceramic body are deteriorated, particularly, the insulation resistance is deteriorated, and the excellent electric characteristics of the originally-owned low-temperature fired ceramic are undesirably deteriorated.

【0008】本発明のセラミック配線基板は構造、形
態、その製造法は特に限定されない。単層でも多層でも
よく、多層のセラミック配線基板の場合は厚膜多層印刷
法及びグリーンシート多層積層法が挙げられる。又、基
板の片面のみの配線基板でも両面配線基板でもよい。配
線パターンの検査は、CCDカメラによって基板表面の
濃色と配線パターンの白色又は白に近い色とのコントラ
ストを画像処理の方法によって区別し、製品としての欠
陥の有無を判断する。この操作は自動的に行うことがで
き、しかも基板上の全ての配線パターンを短時間で検査
することができる。
The structure, form and manufacturing method of the ceramic wiring board of the present invention are not particularly limited. It may be a single layer or a multilayer. In the case of a multilayer ceramic wiring board, a thick film multilayer printing method and a green sheet multilayer laminating method are mentioned. Further, a wiring board on only one side of the board or a double-sided wiring board may be used. In the inspection of the wiring pattern, the contrast between the dark color of the substrate surface and the white or near-white color of the wiring pattern is distinguished by an image processing method using a CCD camera, and the presence or absence of a defect as a product is determined. This operation can be performed automatically, and all the wiring patterns on the substrate can be inspected in a short time.

【0009】[0009]

【実施例】以下、本発明を実施例を用いて説明する。 実施例1 CaO−Al23−SiO2−B23系ガラス60重量
部とアルミナ40重量部よりなるセラミック粉体と、ア
クリル樹脂とトルエン、エタノールをボールミルにて混
合し、ドクターブレード法にてセラミック層6形成用の
0.3mm厚のグリーンシートとした。ついで同じセラ
ミック粉体を用いCoO重量部とRuO 2 9重量部
添加させた粉体を、エチルセルロースとα−テレピネオ
ールを用い、三本ロールにてペースト化し、着色セラミ
ック層2形成用ペーストAとした。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments. A ceramic powder consisting Example 1 CaO-Al 2 O 3 -SiO 2 -B 2 O 3 based glass 60 parts by weight alumina 40 parts by weight, acrylic resin and toluene, and ethanol were mixed in a ball mill, a doctor blade method To form a 0.3 mm thick green sheet for forming the ceramic layer 6. Then, using the same ceramic powder, a powder obtained by adding 1 part by weight of CoO and 9 parts by weight of RuO 2 was pasted into a paste with three rolls using ethyl cellulose and α-terpineol to form a paste A for forming a colored ceramic layer 2. did.

【0010】上記で得られたグリーンシートを所定寸法
に切断し、その最上、下層となるグリーンシートのみ、
グリーンシート上に着色形成したペーストAをグリーン
シート全面に厚さ約20μmにスクリーン印刷法にて形
成させた。断面図である図1に示されるように、各層間
の電気的導通をとるため、ビアホール4を打ち抜き、そ
の部分にAgペーストを用い、ビアホール4にAgを充
填させた。次に所定の配線5をAgペーストを用い印刷
した。表・裏面となる着色セラミック層2は、A導体
3を印刷法にて形成した。所定枚数加圧、加熱し積層さ
せた後に焼成させ、セラミック多層配線基板1を作製し
た。こうして作られたセラミック配線基板を、CCDカ
メラ付配線パターン検査装置にて最上、下層に形成した
配線パターンの検査をしたところ、配線と基板のコント
ラストが明確であり、断線又はショート部の発見等が容
易であった。
[0010] The green sheet obtained above is cut into a predetermined size, and only the uppermost and lower green sheet are cut out.
The paste A colored on the green sheet was formed on the entire surface of the green sheet to a thickness of about 20 μm by screen printing. As shown in FIG. 1 which is a cross-sectional view, a via hole 4 was punched out, and an Ag paste was used in that portion to fill the via hole 4 with Ag in order to establish electrical conduction between the respective layers. Next, predetermined wiring 5 was printed using Ag paste. The colored ceramic layer 2 serving as the front and back surfaces was formed by printing an Ag conductor 3 by a printing method. A predetermined number of sheets were pressurized, heated, laminated, and fired to produce a ceramic multilayer wiring board 1. When the wiring pattern formed on the uppermost and lower layers of the ceramic wiring board thus manufactured was inspected by a wiring pattern inspection device with a CCD camera, the contrast between the wiring and the board was clear, and a disconnection or short-circuit was found. It was easy.

【0011】実施例2〜 着色物質をかえてペーストB〜を調製し、表面導体を
Ag又はAuとした他は実施例1と同様にセラミック配
線基板を作製し、検査を行った。表1に各成分量と結果
を示す。 比較例 着色物質を用いないペーストを用いて実施例1と同様
の実験を行った。結果を表1に示す。
Examples 2 to 4 A ceramic wiring board was prepared and inspected in the same manner as in Example 1 except that pastes BD were prepared by changing the coloring substance, and the surface conductor was made of Ag or Au. Table 1 shows the amounts of each component and the results. Comparative Example The same experiment as in Example 1 was performed using Paste E without using a coloring substance. Table 1 shows the results.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【発明の効果】上記のとおり、本発明によればセラミッ
ク基板表面及び/又は裏面に着色セラミック層を設ける
ことで導体とのコントラストが強くなり、CCDを用い
た光学的検査装置に適応できた。
As described above, according to the present invention, by providing a colored ceramic layer on the front surface and / or the back surface of the ceramic substrate, the contrast with the conductor is enhanced, and the present invention can be applied to an optical inspection apparatus using a CCD.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のセラミック配線基板の断面図。FIG. 1 is a cross-sectional view of a ceramic wiring board according to the present invention.

【図2】本発明の着色セラミック層中の着色材料含有量
の存在範囲を示すグラフ。
FIG. 2 is a graph showing an existing range of a coloring material content in a coloring ceramic layer of the present invention.

【符号の説明】[Explanation of symbols]

1 セラミック多層配線基板 2 着色セラミック層 3 Au導体 4 ビアホール 5 配線 6 セラミック層 DESCRIPTION OF SYMBOLS 1 Ceramic multilayer wiring board 2 Colored ceramic layer 3 Au conductor 4 Via hole 5 Wiring 6 Ceramic layer

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平5−148065(JP,A) 特公 平3−53269(JP,B2) 特公 平3−59029(JP,B2) (58)調査した分野(Int.Cl.7,DB名) H05K 1/03 610 C04B 33/14 H05K 1/09 H05K 3/00 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-5-148065 (JP, A) JP-B 3-53269 (JP, B2) JP-B 3-59029 (JP, B2) (58) Field (Int.Cl. 7 , DB name) H05K 1/03 610 C04B 33/14 H05K 1/09 H05K 3/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一層又は複数層のガラスセラミックス
からなる基板において、その表面又は裏面のほぼ全面に
CoO及び/又はRuO2を含み、その含有量がCoO
をX軸としRuO2をY軸とする座標において、点A
(0.,0),点B(10,0),点C(0,10
及び点D(0,0.5)の4点に囲まれた範囲内を含む
着色ガラスセラミックス層が形成され、該着色ガラスセ
ラミックス層上に、銀系又は金系導体層が形成されてい
ることを特徴とするガラスセラミック配線基板。
1. One or more layers of glass ceramicslayer
Consists ofOn the substrate, almost all over its front surface or back surface
CoO and / or RuOTwoAnd its content is CoO
Is the X axis and RuOTwoIn the coordinates where is the Y axis,Point A
(0.5, 0),Point B(10,0),Point C(0,10)
as well asPoint D(0,0.5) Includes the area enclosed by the four points
A colored glass ceramic layer is formed, and the colored glass ceramic layer is formed.
A silver or gold conductor layer is formed on the lamix layer.
A glass-ceramic wiring board characterized by the following.
【請求項2】 ガラスセラミック層がCaO−Al23
−SiO2−B23系、CaO−Al23−SiO2系、
MgO−Al23−SiO2−B23系及びCaO−M
gO−Al23−SiO2−B23系から選ばれる一種
のガラス成分40〜70重量部と残部がアルミナである
組成を有することを特徴とする請求項1記載のガラス
ラミック配線基板。
2. The method according to claim 1, wherein the glass ceramic layer is CaO—Al 2 O 3.
—SiO 2 —B 2 O 3 system, CaO—Al 2 O 3 —SiO 2 system,
MgO-Al 2 O 3 -SiO 2 -B 2 O 3 system and CaO-M
gO-Al 2 O 3 -SiO 2 -B 2 O 3 type glass component 40 to 70 parts by weight and the remainder selected from the system is characterized by having a composition is alumina claim 1 glass cell according <br /> Lamic wiring board.
JP06286447A 1994-11-21 1994-11-21 Ceramic wiring board Expired - Lifetime JP3142729B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP06286447A JP3142729B2 (en) 1994-11-21 1994-11-21 Ceramic wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06286447A JP3142729B2 (en) 1994-11-21 1994-11-21 Ceramic wiring board

Publications (2)

Publication Number Publication Date
JPH08148778A JPH08148778A (en) 1996-06-07
JP3142729B2 true JP3142729B2 (en) 2001-03-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP06286447A Expired - Lifetime JP3142729B2 (en) 1994-11-21 1994-11-21 Ceramic wiring board

Country Status (1)

Country Link
JP (1) JP3142729B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5558157B2 (en) * 2010-03-26 2014-07-23 京セラ株式会社 Wiring board

Also Published As

Publication number Publication date
JPH08148778A (en) 1996-06-07

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