JP3136377B2 - Trap for collecting solids - Google Patents

Trap for collecting solids

Info

Publication number
JP3136377B2
JP3136377B2 JP20303392A JP20303392A JP3136377B2 JP 3136377 B2 JP3136377 B2 JP 3136377B2 JP 20303392 A JP20303392 A JP 20303392A JP 20303392 A JP20303392 A JP 20303392A JP 3136377 B2 JP3136377 B2 JP 3136377B2
Authority
JP
Japan
Prior art keywords
trap
casing
solids
gas
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP20303392A
Other languages
Japanese (ja)
Other versions
JPH0626462A (en
Inventor
恵弘 新村
好男 安藤
政義 廣瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP20303392A priority Critical patent/JP3136377B2/en
Publication of JPH0626462A publication Critical patent/JPH0626462A/en
Application granted granted Critical
Publication of JP3136377B2 publication Critical patent/JP3136377B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/24Preventing accumulation of dirt or other matter in the pipes, e.g. by traps, by strainers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16Filtration; Moisture separation

Abstract

PURPOSE:To provide a trap for solid capture which can precipitate solids in sublimate gas with high efficiency for concentrated capture and facilitate maintenance with a simple structure. CONSTITUTION:This is a trap 1 for solid capture which is installed on the exhaust side of a pump for sublimate gas and captures solids precipitated from the sublimate gas discharged from the pump. This trap 1 is provided with a spiral member 30 stored in the casing 10, in which a spiral passage A is also formed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、昇華性気体を扱うポン
プの排気側に取り付けられる固形分集用トラップに関
するものである。
The present invention relates to relates to a solid capturing collection trap attached to the exhaust side of the pump to handle the sublimable gas.

【0002】[0002]

【従来技術及び発明が解決しようとする課題】昇華性気
体(圧力−温度状態の変化により気体中から固形分を発
生させるもの)をポンプで圧縮して吐出する場合、該昇
華性気体は前記圧縮により高温・高圧状態になる。とこ
ろが昇華性気体は図2に示すように、同一圧力の時は、
温度が下がると固形分が析出してくる性質を有してい
る。このため、前記ポンプから吐出された昇華性気体
は、排気側配管の外気によって冷却されて固形分が析出
し該配管内に付着し、比較的短期間で該配管を閉塞して
しまうという問題点があった。
2. Description of the Related Art When a sublimable gas (that generates a solid content from a gas by a change in pressure-temperature state) is compressed and discharged by a pump, the sublimable gas is compressed. As a result, the temperature becomes high and high. However, as shown in FIG. 2, when the sublimation gas has the same pressure,
It has the property that solids precipitate out when the temperature drops. For this reason, the sublimable gas discharged from the pump is cooled by the outside air of the exhaust-side pipe, solids are deposited, adhere to the pipe, and close the pipe in a relatively short time. was there.

【0003】そして排気側配管を閉塞させないで固形分
集するため、該配管の径を大きくして長さを長くす
る方法も考えられるが、この場合は配管用のスペースが
大きくなってしまいそのメンテナンスも大変となってし
まう。
[0005] To Collection capturing solids exhaust pipe not clog, but also conceivable to increase the length by increasing the diameter of the pipe, in this case becomes large space for piping The maintenance is also difficult.

【0004】一方、配管の所定部分を水等で冷却するこ
とによって、前記固形分を集中的に析出して集する方
法も考えられる。この方法によれば配管用のスペースが
大きくなることはない。しかしながらこの場合は冷却装
置が必要で、構造が複雑となり、そのメンテナンスも必
要になってしまう。
On the other hand, by a predetermined portion of the pipe is cooled with water or the like, a method of collecting capturing intensively precipitated the solids are also contemplated. According to this method, the space for piping does not increase. However, in this case, a cooling device is required, the structure becomes complicated, and its maintenance is also required.

【0005】本発明は上述の点に鑑みてなされたもので
あり、その目的は、前記昇華性気体の固形分を効率良く
析出して集中的に集でき、しかも構造が簡単でメンテ
ナンスも容易な固形分集用トラップを提供することに
ある。
[0005] The present invention has been made in view of the above, an object of the can centrally collection efficiency may precipitated solids sublimation gas, yet easy maintenance structure is simple It is to provide a solid catching collection for the trap.

【0006】[0006]

【課題を解決するための手段】上記問題点を解決するた
め本発明にかかる固形分捕集用トラップは、筒状のケー
シング内部に螺旋状板を具備する螺旋状部材を静止状態
で着脱自在に収納することによりケーシング内に螺旋状
の通路を設け、これを昇華性気体を扱うポンプの排気側
に取り付けて構成した。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a trap for collecting solids according to the present invention has a cylindrical casing.
A spiral member with a spiral plate inside the thing is stationary
A spiral passage is provided in the casing by being detachably accommodated in the casing, and this is attached to the exhaust side of a pump that handles sublimable gas.

【0007】[0007]

【作用】ポンプによって圧縮されて高温・高圧となった
昇華性気体は、この固形分集用トラップ内に導びか
れ、その通路内を旋回しながら移動して吐出される。そ
してこの間に昇華性気体は外気によって冷却され固形分
が析出する。該固形分は気体よりも重く且つ旋回してい
るので該固形分には遠心力が加わり通路断面の全内周面
でなく一方の面のみに付着していく。従って昇華性気体
を筒状の配管のみに通した場合のように、該配管の全内
周面にほぼ均一に固形分が付着してゆくことはなく、同
じ面積の通路断面であっても配管のみの場合に比べて該
通路が固形物の付着によって閉塞される期間を延ばすこ
とができる。また通路は螺旋状なので、配管のみの場合
に比べてその通路の長さを長くでき、固形分の析出する
距離を長くでき、効率良く固形分を析出できる。
[Acting] sublimable gas was compressed with high temperature and high pressure by the pump, he Shirubebi this solid capturing current for the trap are ejected by moving while swirling the passage. During this time, the sublimable gas is cooled by the outside air and solids are precipitated. Since the solid content is heavier and swirling than the gas, a centrifugal force is applied to the solid content, and the solid content adheres to only one surface, not the entire inner peripheral surface of the cross section of the passage. Therefore, unlike the case where the sublimable gas is passed only through the cylindrical pipe, the solid content does not adhere almost uniformly to the entire inner peripheral surface of the pipe. The period in which the passage is closed by the attachment of the solid matter can be extended as compared with the case of only the case. Further, since the passage is helical, the length of the passage can be made longer than in the case of only a pipe, the distance over which solids can be deposited can be increased, and solids can be efficiently deposited.

【0008】[0008]

【実施例】以下、本発明の1実施例を図面に基づいて詳
細に説明する。図1は本発明にかかる固形分集用トラ
ップを示す側断面図である。同図に示すようにこの固形
集用トラップ1は、ケーシング10内に螺旋状部材
30を収納することにより、該ケーシング10内に螺旋
状の通路Aを設けて構成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. Figure 1 is a side sectional view showing a solid capturing collection trap according to the present invention. The solid capturing current trap 1 as shown in the figure, by accommodating the helical member 30 in casing 10, and is configured to provide a helical path A in the casing 10.

【0009】ここでケーシング10は、円筒状に形成さ
れ、その下面は蓋11によって密閉されている。またケ
ーシング10の上面に設けたフランジ13には蓋15が
ネジ17とOリング18によって気密状に固定されてい
る。一方ケーシング10の下方側面には、気体を流入さ
せるための気体流入口19が設けられ、蓋15には気体
を流出するための気体流出口21が設けられている。
Here, the casing 10 is formed in a cylindrical shape, and its lower surface is closed by a lid 11. A lid 15 is hermetically fixed to a flange 13 provided on the upper surface of the casing 10 by screws 17 and O-rings 18. On the other hand, a gas inlet 19 for allowing gas to flow in is provided on the lower side surface of the casing 10, and a gas outlet 21 for discharging gas is provided in the lid 15.

【0010】一方螺旋状部材30は、軸31の周囲に螺
旋状板33を取り付けて構成されている。なお軸31の
上端面にはめねじ35が切ってある。
On the other hand, the spiral member 30 is configured by attaching a spiral plate 33 around a shaft 31. An internal thread 35 is cut on the upper end surface of the shaft 31.

【0011】次にこの固形分集用トラップ1の作用に
ついて説明する。図示しないポンプによって圧縮されて
高温・高圧となった昇華性気体をこの固形分集用トラ
ップ1の気体流入口19から流入させると、該昇華性気
体は通路A内を旋回しながら上昇して行き、気体流出口
21から吐出される。
[0011] Next, a description will be given of the operation of this solid catching collection for the trap 1. When flowing the sublimable gas is compressed by a pump (not shown) heated to a high temperature and high pressure from the gas inlet 19 of the solid capturing current trap 1,該昇Hua gas is increased while swirling the passage A And is discharged from the gas outlet 21.

【0012】そしてこの間に昇華性流体はケーシング1
0の内周面aによって冷却されるため、固形分が析出し
ていく。固形分が多く析出するのは温度の低い内周面a
近傍であり、しかも該固形分は気体よりも重く且つ旋回
しているので該析出した固形分は遠心力によってケーシ
ング10の内周面aに吹き付けられる。このため該固形
分は主としてケーシング10の内周面aに付着して行
く。つまり軸31と螺旋状板33と内周面aの表面によ
って構成される通路A断面において、析出した固形分は
該通路Aの断面全体にではなく主として一方の面aのみ
に付着していく。
During this time, the sublimable fluid is applied to the casing 1
The solid content precipitates because it is cooled by the inner peripheral surface a of 0. A large amount of solids is deposited on the inner peripheral surface a where the temperature is low.
The deposited solid is sprayed onto the inner peripheral surface a of the casing 10 by centrifugal force because the solid is heavier than the gas and is swirling. Therefore, the solid content mainly adheres to the inner peripheral surface a of the casing 10. That is, in the cross section of the passage A constituted by the shaft 31, the spiral plate 33, and the surface of the inner peripheral surface a, the precipitated solid adheres mainly to only one surface a, not to the entire cross section of the passage A.

【0013】従って昇華性気体を筒状の配管のみに通し
た場合のように、固形分が該配管(即ち通路)の断面全
体にほぼ均一に付着してゆくことはなく、同じ大きさの
通路断面であっても配管のみの場合に比べて該通路が固
形物の付着により閉塞する期間を延ばすことができる。
Therefore, unlike the case where the sublimable gas is passed only through the cylindrical pipe, the solid content does not adhere almost uniformly to the entire cross section of the pipe (that is, the path). Even in the case of a cross section, it is possible to extend the period in which the passage is closed due to the adhesion of solid matter, as compared with the case where only the pipe is used.

【0014】また通路Aが螺旋状となっているので、配
管のみの場合に比べてその通路の長さを長くでき、固形
分の析出する距離を長くでき、効率良く固形分を析出で
きる。
Further, since the passage A is helical, the length of the passage can be made longer than in the case of only a pipe, the distance over which solids can be deposited can be increased, and solids can be efficiently deposited.

【0015】ところでケーシング10の内周面aに固形
分が付着し始めたとき、まず該固形分はケーシング10
の内周面aと螺旋状板33の外周の間の隙間bを埋め
る。これによって予め隙間bがあっても、完全に密封さ
れた通路Aが容易に形成できる。言い替えれば、螺旋状
板33の外周をケーシング10の内周面aに密接させて
おかなくてもよいので、ケーシング10からの螺旋状部
材30の着脱が容易となるばかりか、両者を密接させた
場合に生じる両者の熱膨張率の相違による応力等の問題
が全く生じなくなる。
When solids begin to adhere to the inner peripheral surface a of the casing 10, the solids first
The gap b between the inner peripheral surface a of the helical plate 33 and the outer periphery of the spiral plate 33 is filled. Thereby, even if there is a gap b in advance, a completely sealed passage A can be easily formed. In other words, since the outer periphery of the spiral plate 33 does not have to be in close contact with the inner peripheral surface a of the casing 10, not only is the attachment and detachment of the spiral member 30 from the casing 10 easy, but also the two members are in close contact. In this case, there is no problem such as stress caused by the difference between the two coefficients of thermal expansion.

【0016】一方この固形分集用トラップ1を洗浄す
る場合は、まず蓋15を取り外し、次に軸31の上端に
設けためねじ35に、図示しない取り出し治具のおねじ
を螺合し、この螺旋状部材30を回転しながら引き上げ
る。螺旋状部材30の螺旋状板33は該板の形状に沿っ
て回転しながら引き上げられるので、固形分が付着して
いても容易に引き抜ける。そしてケーシング10内部と
螺旋状部材30をそれぞれ洗浄した後、該ケーシング1
0内に螺旋状部材30を収納し、蓋15を被せてネジ1
7で固定すれば、再び元の状態となる。
[0016] On the other hand, when washing the solids capturing current trap 1, remove the lid 15 first, then the female screw 35 provided at the upper end of the shaft 31, screwed the male thread of the take-out jig, not shown, The spiral member 30 is pulled up while rotating. Since the spiral plate 33 of the spiral member 30 is pulled up while rotating along the shape of the plate, it can be easily pulled out even if solids are attached. After cleaning the inside of the casing 10 and the spiral member 30, respectively, the casing 1
0, the spiral member 30 is housed, and the cover 15 is covered.
If it is fixed at 7, it returns to its original state.

【0017】本発明は上記実施例に限定されるものでは
なく、要は筒状のケーシング内に螺旋状の通路を設ける
構造のものであればどのような構造でもよい。
The present invention is not limited to the above-described embodiment, but may be any structure having a structure in which a spiral passage is provided in a cylindrical casing.

【0018】[0018]

【発明の効果】以上詳細に説明したように、本発明にか
かる固形分集用トラップによれば、単なる配管に比べ
て効率良く昇華性気体の固形分を集でき、またその通
路の閉塞に到る時間も長くなる。そのため吐出配管閉塞
によりポンプを停止する頻度も減り、メンテナンスもト
ラップ自体を交換或いは洗浄するだけで済み、作業性も
向上する。さらにその構造も簡単である。
[Effect of the Invention] As described above in detail, according to the solid capturing collection trap according to the present invention, it can collector capturing solids efficiently sublimation gas as compared with a mere pipe and clogging of the passage The time to reach is also longer. Therefore, the frequency of stopping the pump due to the blockage of the discharge pipe is reduced, and the maintenance is only required to replace or clean the trap itself, and the workability is improved. Further, the structure is simple.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明にかかる固形分集用トラップを示す側
断面図である。
1 is a side sectional view of such a solid capturing collection trap to the present invention.

【図2】昇華性気体の圧力−温度特性を示す図である。FIG. 2 is a diagram showing pressure-temperature characteristics of a sublimable gas.

【符号の説明】[Explanation of symbols]

1 固形分集用トラップ 10 ケーシング 30 螺旋状部材 A 通路1 solids capturing converging trap 10 casing 30 helical member A passage

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭48−88074(JP,A) 実開 昭53−53460(JP,U) (58)調査した分野(Int.Cl.7,DB名) F04B 39/16 B01D 8/00 F16L 55/24 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-48-88074 (JP, A) JP-A-53-53460 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) F04B 39/16 B01D 8/00 F16L 55/24

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 昇華性気体を扱うポンプの排気側に取り
付けられ、該ポンプから排気された昇華性気体から析出
する固形分を捕集する固形分捕集用トラップにおいて、前記固形分捕集用トラップは、筒状のケーシング内部に
螺旋状板を具備する螺旋状部材を静止状態で着脱自在に
収納することにより、 ケーシング内部に螺旋状の通路を
設けて構成されていることを特徴とする固形分捕集用ト
ラップ。
1. A solid content trap attached to an exhaust side of a pump that handles a sublimable gas and that collects solid content precipitated from the sublimable gas exhausted from the pump . The trap is placed inside a cylindrical casing
A helical member with a helical plate can be attached and detached in a stationary state
By accommodating, solids collecting trap characterized in that it is formed by providing a helical path inside the casing.
JP20303392A 1992-07-07 1992-07-07 Trap for collecting solids Expired - Fee Related JP3136377B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20303392A JP3136377B2 (en) 1992-07-07 1992-07-07 Trap for collecting solids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20303392A JP3136377B2 (en) 1992-07-07 1992-07-07 Trap for collecting solids

Publications (2)

Publication Number Publication Date
JPH0626462A JPH0626462A (en) 1994-02-01
JP3136377B2 true JP3136377B2 (en) 2001-02-19

Family

ID=16467239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20303392A Expired - Fee Related JP3136377B2 (en) 1992-07-07 1992-07-07 Trap for collecting solids

Country Status (1)

Country Link
JP (1) JP3136377B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008036479A (en) * 2006-08-02 2008-02-21 Asahi Sunac Corp Coating apparatus and cleaning method used for the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW328913B (en) * 1995-08-14 1998-04-01 Ehara Seisakusho Kk Trap for collecting solid, and a vacuum pump therefor
GB0903600D0 (en) 2009-03-03 2009-04-08 Isis Innovation Method and apparatus for the production of carbon-containing materials
CN103047118A (en) * 2012-12-29 2013-04-17 中国科学院沈阳科学仪器股份有限公司 Vacuum pump dust deposition and filter device
CN108020024B (en) * 2017-11-01 2019-10-22 中石化广州工程有限公司 Liquefied natural gas after-condenser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008036479A (en) * 2006-08-02 2008-02-21 Asahi Sunac Corp Coating apparatus and cleaning method used for the same

Also Published As

Publication number Publication date
JPH0626462A (en) 1994-02-01

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