JP3135035B2 - Contact combustion type gas sensor and method of manufacturing the same - Google Patents
Contact combustion type gas sensor and method of manufacturing the sameInfo
- Publication number
- JP3135035B2 JP3135035B2 JP07156478A JP15647895A JP3135035B2 JP 3135035 B2 JP3135035 B2 JP 3135035B2 JP 07156478 A JP07156478 A JP 07156478A JP 15647895 A JP15647895 A JP 15647895A JP 3135035 B2 JP3135035 B2 JP 3135035B2
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- gas sensor
- combustion type
- type gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims 3
- 238000002485 combustion reaction Methods 0.000 title description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 39
- 230000000052 comparative effect Effects 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 16
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 14
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 14
- 239000011247 coating layer Substances 0.000 claims description 13
- 238000007084 catalytic combustion reaction Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000003054 catalyst Substances 0.000 claims description 8
- 238000005524 ceramic coating Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 44
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 31
- 229910002092 carbon dioxide Inorganic materials 0.000 description 15
- 239000001569 carbon dioxide Substances 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- 230000003197 catalytic effect Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 230000006399 behavior Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910001593 boehmite Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は環境中の一酸化炭素、或
いは、メタンガス等の燃焼性気体の検知を行うための接
触燃焼性ガスセンサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a catalytic combustible gas sensor for detecting a combustible gas such as carbon monoxide or methane gas in the environment.
【０００２】[0002]
【従来の技術】接触燃焼性ガスセンサは、通常、燃焼性
気体の濃度を測定するための検知素子と、温度補償を行
うための比較素子の２つの素子を有する。ここで検知素
子の例を図１を用いて説明する。図１は検知素子３のセ
ラミック坦体２の一部を除去した状態を示す図である。
図中符号１は白金等からなる金属線で、２は測定目的の
可燃性気体を接触燃焼させるためのロジウム、パラジウ
ム、白金等の触媒を坦持したアルミナ等のセラミック坦
体である。2. Description of the Related Art A catalytic combustible gas sensor usually has two elements, a sensing element for measuring the concentration of a combustible gas and a comparison element for performing temperature compensation. Here, an example of the sensing element will be described with reference to FIG. FIG. 1 is a view showing a state where a part of the ceramic carrier 2 of the detection element 3 is removed.
In the figure, reference numeral 1 denotes a metal wire made of platinum or the like, and 2 denotes a ceramic carrier such as alumina carrying a catalyst such as rhodium, palladium, platinum or the like for catalytically combusting a combustible gas to be measured.
【０００３】なお、比較素子は、セラミック被覆層に触
媒が含有されていない以外はまったく上記検知素子と同
じ構成をもつ。これら検知素子Ａと比較素子Ｂは、図２
に示すように、互いに同じ抵抗値を持つ電気抵抗Ｒ、電
気抵抗Ｒ’とともにブリッジ回路を形成し、電源Ｄとと
もに接触燃焼式ガスセンサを構成する。なお、図２中ｔ
は端子であって、メーター等の表示手段に接続される。[0003] The comparative element has exactly the same structure as the above-mentioned detecting element except that the ceramic coating layer does not contain a catalyst. The detection element A and the comparison element B are shown in FIG.
As shown in (1), a bridge circuit is formed with the electric resistances R and R 'having the same resistance value, and a contact combustion type gas sensor is constituted with the power supply D. Note that t in FIG.
Is a terminal, which is connected to display means such as a meter.
【０００４】従来接触燃焼式センサにおいて、セラミッ
ク坦体として、γ−アルミナが用いられてきた。ところ
が、γ−アルミナ自体の持つ触媒活性のため、比較素子
でも燃焼性ガスの燃焼熱が生じ、その結果感度が低下す
る。この欠点を解消するため、比較素子に熱処理を行っ
て、γ−アルミナを触媒活性を持たないα−アルミナに
変換することが行われたが、これにより感度の低下を防
止できることが判った。Conventionally, in a contact combustion type sensor, γ-alumina has been used as a ceramic carrier. However, due to the catalytic activity of γ-alumina itself, combustion heat of the combustible gas is generated even in the comparative element, and as a result, the sensitivity is reduced. In order to solve this defect, the comparative element was subjected to a heat treatment to convert γ-alumina into α-alumina having no catalytic activity. However, it was found that this could prevent a decrease in sensitivity.
【０００５】ところが、このα−アルミナ層を有する比
較素子と、触媒坦持γ−アルミナ層を有する検知素子か
らなる接触燃焼式ガスセンサは、炭酸ガスのような不燃
性成分を含有する気体に対しても感度を有する。そのた
め、このような不燃性成分の濃度が高く、目的の可燃性
気体の濃度が低い場合に、測定が困難となってしまう。However, a contact combustion type gas sensor comprising a comparative element having an α-alumina layer and a detection element having a catalyst-supported γ-alumina layer is not suitable for a gas containing a nonflammable component such as carbon dioxide. Also have sensitivity. Therefore, when the concentration of such nonflammable components is high and the concentration of the target combustible gas is low, measurement becomes difficult.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、二酸化炭素
等の不燃性成分を有する気体における低濃度可燃ガスの
濃度測定にも対応できる接触燃焼式ガスセンサを提供す
ることを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a contact combustion type gas sensor capable of measuring the concentration of a low-concentration combustible gas in a gas having a nonflammable component such as carbon dioxide.
【０００７】[0007]
【課題を解決するための手段】上述のように触媒坦持γ
−アルミナ層を有する検知素子とα−アルミナ層を有す
る比較素子とからなる接触ガスセンサは、炭酸ガスのよ
うな不燃性成分に対しても感度を有する。その原因につ
いて種々調査をおこなったところ、次のようなことが判
った。SUMMARY OF THE INVENTION As described above, catalyst loading γ
A contact gas sensor comprising a sensing element having an alumina layer and a comparative element having an α-alumina layer is sensitive to non-combustible components such as carbon dioxide. Various investigations into the cause revealed the following.
【０００８】検知素子及び比較素子の被覆層が共にγ−
アルミナからなる場合、両者の熱挙動を等しくし、温度
の測定値への影響をなくすため、これらの被覆層は互い
に同じ形状・大きさに形成されていた。これら検知素子
及び比較素子のそれぞれの大きさ・形状の関係は、比較
素子の被覆層がα−アルミナによって形成されるように
なっても継承されていたが、調査の結果、これが二酸化
炭素などの不燃性気体によるノイズの原因となることが
判ったThe coating layers of the sensing element and the comparative element are both γ-
When made of alumina, these coating layers were formed in the same shape and size as each other in order to equalize the thermal behavior of both and eliminate the influence on the measured value of temperature. The relationship between the size and shape of each of these detection element and comparison element was inherited even when the coating layer of the comparison element was formed of α-alumina. It has been found that non-flammable gas causes noise
【０００９】すなわち、α−アルミナ被覆を有する検知
素子とγ−アルミナ被覆を有する比較素子とが同じ大き
さの場合、これらの二酸化炭素等の不燃性気体濃度変化
に対する挙動が異なることが判った。That is, it has been found that when the sensing element having the α-alumina coating and the comparative element having the γ-alumina coating have the same size, their behaviors with respect to changes in the concentration of nonflammable gas such as carbon dioxide are different.
【００１０】本発明はこれら素子の二酸化炭素等の不燃
性気体の濃度変化に対する挙動を等しくすることにより
上記問題を解決するものである。すなわち、本発明の接
触燃焼式ガスセンサは、検知素子が触媒を坦持したγ−
アルミナを金属線の周囲に配してなるものであり、ま
た、比較素子がα−アルミナを金属線の周囲に配してな
るものであって、検知素子におけるγ−アルミナの質量
を１００としたときの比較素子における触媒を坦持した
α−アルミナの質量が７０以上１３０以下である構成を
有する。The present invention solves the above problem by equalizing the behavior of these elements with respect to the change in the concentration of nonflammable gas such as carbon dioxide. That is, in the catalytic combustion type gas sensor of the present invention, the detection element has a γ-
Alumina is arranged around the metal wire, and the comparative element is formed by arranging α-alumina around the metal wire, and the mass of γ-alumina in the sensing element is set to 100. The comparative element has a configuration in which the mass of α-alumina supporting the catalyst in the comparative element is 70 or more and 130 or less.
【００１１】ここでα−アルミナ被覆層を有する検知素
子は、公知の方法で得ることができる。例えば、γ−ア
ルミナを１１００℃以上で焼成して得たα−アルミナの
被覆層を金属線の周囲に成形して得られる。Here, the sensing element having the α-alumina coating layer can be obtained by a known method. For example, it is obtained by forming a coating layer of α-alumina obtained by firing γ-alumina at 1100 ° C. or more around a metal wire.
【００１２】本発明において、検知素子におけるγ−ア
ルミナの質量を１００としたときの比較素子における触
媒を坦持したα−アルミナの質量が７０以上１３０以下
であることが必要である。なお上記α−アルミナの質量
が７０未満或いは１３０超であると、測定対象ガス中の
二酸化炭素等の不燃性ガスの影響によるノイズが大きく
なり、測定目的気体である燃焼性気体の測定値の信頼性
に劣る。In the present invention, when the mass of γ-alumina in the sensing element is set to 100, the mass of α-alumina supporting the catalyst in the comparative element needs to be 70 or more and 130 or less. If the mass of the α-alumina is less than 70 or more than 130, noise due to the influence of non-flammable gas such as carbon dioxide in the gas to be measured becomes large, and the reliability of the measured value of the combustible gas as the measurement target gas is increased. Poor sex.
【００１３】なお、測定目的気体である燃焼性気体が、
有毒な一酸化炭素である場合、低濃度における厳密な測
定値が必要であり、そのため、上記α−アルミナの質量
が、検知素子におけるγ−アルミナの質量を１００とし
たときに８５以上１１５以下であると、このような厳密
な測定値に充分な対応が可能となるので望ましい。Note that the combustible gas which is the measurement target gas is
In the case of toxic carbon monoxide, a strict measurement value at a low concentration is required. Therefore, when the mass of the α-alumina is set to 100 and the mass of γ-alumina in the sensing element is 85 or more and 115 or less. This is desirable because such strict measurement values can be sufficiently handled.
【００１４】ここで、一酸化炭素のＭＣＡ（許容濃度：
中程度労働で８時間、毒物に暴露しても中毒を起こさな
い最高濃度）は１００ｐｐｍであると云われており、こ
の濃度以下における厳密な測定が必要とされている。一
方、二酸化炭素は５％程度の濃度の場合には人体に悪影
響がないとされている。Here, the MCA of carbon monoxide (allowable concentration:
It is said that the highest concentration that does not cause poisoning even when exposed to a toxic substance for 8 hours under moderate labor is 100 ppm, and a strict measurement at a concentration below this concentration is required. On the other hand, it is said that when the concentration of carbon dioxide is about 5%, there is no adverse effect on the human body.
【００１５】[0015]
【作用】本発明の接触燃焼式ガスセンサにおける比較素
子がα−アルミナを金属線の周囲に配してなるものであ
るため一酸化炭素等の燃焼性気体に対する感度を有しな
いので、触媒坦持γ−アルミナを金属線の周囲に配して
なる検知素子の燃焼性ガスに対する感度を充分に活用す
ることが可能である。Since the comparison element in the catalytic combustion type gas sensor of the present invention is formed by arranging α-alumina around the metal wire, it has no sensitivity to a combustible gas such as carbon monoxide. -It is possible to make full use of the sensitivity to a combustible gas of a sensing element in which alumina is arranged around a metal wire.
【００１６】また、検知素子におけるγ−アルミナの質
量を１００としたときの比較素子におけるα−アルミナ
の質量が７０以上１３０以下であるため、測定対象気体
中における二酸化炭素等の不燃性気体の影響が少ない。
なお、この二酸化炭素等の不燃性気体が素子に影響を及
ぼす要因としては、これら素子と不燃性気体との間の熱
伝導の違いによるものと考えられ、上記のようにこれら
素子のそれぞれの被覆層の質量を調整する本発明の構成
により、これら素子の熱容量の違いが調整されるものと
考えられる。Since the mass of α-alumina in the comparative device is 70 or more and 130 or less when the mass of γ-alumina in the sensing device is 100, the influence of non-flammable gas such as carbon dioxide in the gas to be measured. Less is.
The factor that the non-flammable gas such as carbon dioxide affects the elements is considered to be due to the difference in heat conduction between these elements and the non-flammable gas. It is considered that the difference in heat capacity between these devices is adjusted by the configuration of the present invention in which the mass of the layer is adjusted.
【００１７】[0017]
【実施例】まず直径２５μｍの白金線をコイル径１ｍ
ｍ、巻き数１６ターンのコイルを作成した。次いでベー
マイトを７００℃で焼成したγ−アルミナを粒径が１〜
１０μｍになるように粉砕し、これに金属ロジウムを坦
持させた後、アルミナ系バインダーを１０重量％添加し
て、適度な粘度を有する程度水を加えた後ペースト状に
混練した。DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a platinum wire having a diameter of 25 .mu.m was coiled with a coil diameter of 1 m
m, a coil having 16 turns was prepared. Next, γ-alumina obtained by calcining boehmite at 700 ° C.
After pulverizing so as to have a thickness of 10 μm and supporting metal rhodium thereon, an alumina-based binder was added at 10% by weight, water was added to a degree having an appropriate viscosity, and then kneaded into a paste.
【００１８】このアルミナペーストを前記白金コイル上
に球状に成形したのち７００℃で焼成し、これを検知素
子Ｔとした。まず、この検知素子Ｔの一酸化炭素に対す
る感度を調べた。すなわち、検知素子Ｔの抵抗値の変化
を電圧に変換する手段を用いたときのその電圧（素子出
力）と空気中の一酸化炭素濃度との関係を調べた。結果
を図３に示す。This alumina paste was formed into a spherical shape on the platinum coil, and then fired at 700 ° C. to obtain a sensing element T. First, the sensitivity of the sensing element T to carbon monoxide was examined. That is, the relationship between the voltage (element output) and the concentration of carbon monoxide in the air when a means for converting a change in the resistance value of the sensing element T into a voltage was used was examined. The results are shown in FIG.
【００１９】図３より炭酸ガス１００ｐｐｍあたりのこ
の検知素子Ｔの出力は０．３ｍＶに該当することが判
る。なお、以下において、素子出力を電圧で示した場合
にはここで用いたのと同じ抵抗値−電圧変換手段を用い
た。FIG. 3 shows that the output of the detecting element T per 100 ppm of carbon dioxide gas corresponds to 0.3 mV. In the following, when the element output is indicated by voltage, the same resistance value-voltage conversion means as used here was used.
【００２０】次に比較素子を作製した。ベーマイトを１
１００℃で焼成して得たα−アルミナを粒径が１〜１０
μｍになるように粉砕し、アルミナ系バインダーを１０
重量％添加して、適度な粘度を有する程度水を加えた後
ペースト状に混練し、上記検知素子Ｔで用いたのと同じ
白金製コイルに球状に成形したのち７００℃で焼成し、
比較素子ａ、ｂ、ｃ、ｄ、ｅ及びｆを得た。これらの被
覆層の粒径及び質量を調べた結果を表１に示す。Next, a comparative device was manufactured. 1 boehmite
Α-alumina obtained by firing at 100 ° C. has a particle size of 1 to 10
pulverized to a particle size of 10 μm.
% By weight, adding water having a suitable viscosity, kneading the mixture into a paste, forming the same platinum coil as used in the detection element T into a spherical shape, and firing at 700 ° C.
Comparative elements a, b, c, d, e and f were obtained. Table 1 shows the results of examining the particle size and mass of these coating layers.
【００２１】[0021]
【表１】 [Table 1]
【００２２】これら検知素子Ｔ及び比較素子ａ〜ｆにつ
いて、窒素中５％或いは１０％の二酸化炭素に接触さ
せ、その出力を電圧として得た。このときの検知素子Ｔ
の出力と検知素子ａ〜ｆそれぞれの出力との差を図４に
示す。図３より、従来例である比較素子ａを用いた場合
に比べ、本発明に係る実施例１〜実施例５である比較素
子ｂ、ｃ、ｄ、ｅ及びｆを用いた場合においては、二酸
化炭素の濃度変化による影響が少ないことが判る。The sensing element T and the comparative elements a to f were brought into contact with 5% or 10% carbon dioxide in nitrogen, and the output was obtained as a voltage. The sensing element T at this time
FIG. 4 shows the difference between the output of the detection element a and the output of each of the detection elements a to f. FIG. 3 shows that the comparative elements b, c, d, e, and f according to the first to fifth embodiments according to the present invention have a lower CO2 emission than the comparative element a according to the related art. It can be seen that the influence of the carbon concentration change is small.
【００２３】また、上記検知素子Ｔと比較素子ｄとを用
い、これらを用い図２に示すのと同じ回路を形成して接
触燃焼式ガスセンサーＩを作製し、このガスセンサＩの
空気中の一酸化炭素濃度に対する感度を調べ、またその
ときの温度の影響を１０〜４０℃の範囲で調べた。その
結果を従来の技術による接触燃焼式ガスセンサ、すなわ
ち検知素子Ｔと比較素子ａを用いて形成したガスセンサ
IIでの結果と比較したところ、空気中における一酸化炭
素に対する感度及び温度の影響に関しては、従来技術に
よるガスセンサIIと同等の性能を有することが判った。Further, using the sensing element T and the comparison element d, the same circuit as that shown in FIG. 2 is formed by using them to produce a contact combustion type gas sensor I. The sensitivity to the carbon oxide concentration was examined, and the effect of temperature at that time was examined in the range of 10 to 40 ° C. The result is a catalytic combustion type gas sensor according to the prior art, that is, a gas sensor formed by using a detection element T and a comparison element a.
As compared with the result of II, it was found that the sensitivity to carbon monoxide in air and the influence of temperature were equivalent to those of the gas sensor II according to the prior art.
【００２４】また、これらガスセンサＩ及びIIについ
て、５％の二酸化炭素及び１００ｐｐｍの一酸化炭素を
含有させた空気（２０℃）中の一酸化炭素濃度を測定し
たところ、ガスセンサＩでは二酸化炭素がない場合での
１００ｐｐｍの一酸化炭素に対するのと同じ出力が得ら
れたが、ガスセンサIIでは二酸化炭素がない場合での３
８０ｐｐｍの濃度の一酸化炭素に対応する出力となり、
正確な値が得られなかった。When the concentration of carbon monoxide in air (20 ° C.) containing 5% of carbon dioxide and 100 ppm of carbon monoxide was measured for these gas sensors I and II, the gas sensor I showed no carbon dioxide. The same output as for 100 ppm carbon monoxide in the case was obtained, but the gas sensor II showed 3
The output corresponds to a carbon monoxide concentration of 80 ppm,
The exact value could not be obtained.
【００２５】[0025]
【発明の効果】以上のように、本発明に係る接触燃焼式
ガスセンサは、従来のガスセンサと同等の一酸化炭素濃
度を有しながらも、測定対象気体中の二酸化炭素などの
非燃焼性ガス濃度の影響が少ない優れたものである。As described above, the catalytic combustion type gas sensor according to the present invention has the same concentration of carbon monoxide as the conventional gas sensor, but also has the concentration of non-combustible gas such as carbon dioxide in the gas to be measured. It is an excellent thing with little influence of the.
【図１】接触燃焼ガスセンサの検知素子の例における構
造を示す図である。FIG. 1 is a diagram showing a structure of an example of a detection element of a contact combustion gas sensor.
【図２】接触燃焼ガスセンサの回路を示す図である。FIG. 2 is a diagram showing a circuit of a contact combustion gas sensor.
【図３】検知素子の一酸化炭素濃度に対する感度を示す
図である。FIG. 3 is a diagram showing sensitivity to carbon monoxide concentration of a sensing element.
【図４】実施例及び比較例における検知素子と各比較素
子間の素子出力の差を示した図である。FIG. 4 is a diagram showing a difference in element output between a sensing element and each comparative element in an example and a comparative example.
【符号の説明】 １ 金属線 ２ 触媒坦持セラミック坦体 ３ 検知素子 ４ 比較素子 Ｄ 電源 Ｒ、Ｒ’ 電気抵抗 ｔ 出力端子[Description of Signs] 1 metal wire 2 ceramic carrier carrying catalyst 3 detection element 4 comparison element D power supply R, R 'electric resistance t output terminal
───────────────────────────────────────────────────── フロントページの続き (72)発明者 安形 和俊 静岡県天竜市二俣町南鹿島23 矢崎計器 株式会社内 (72)発明者 榎本 正徳 神奈川県大和市深見台３−４ 株式会社 ガスター内 (72)発明者 木村 新悟 神奈川県大和市深見台３−４ 株式会社 ガスター内 (72)発明者 重岡 卓二 神奈川県大和市深見台３−４ 株式会社 ガスター内 審査官 郡山 順 (56)参考文献 矢崎技術リポート、13号、119−123 頁、1988年 (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 27/16 G01N 25/30 ＪＩＣＳＴファイル（ＪＯＩＳ)────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Kazutoshi Agata 23 Minami Kashima, Futamata-cho, Tenryu-shi, Shizuoka Prefecture Yazaki Keiki Co., Ltd. (72) Inventor Masanori Enomoto 3-4 Fukamidai, Yamato-shi, Kanagawa Prefecture Gaster Co., Ltd. (72 Inventor Shingo Kimura 3-4 Fukamidai, Yamato-shi, Kanagawa Prefecture Inside Gaster Co., Ltd. (72) Inventor Takuji Shigeoka 3-4 Fukamidai, Yamato-shi, Kanagawa Prefecture Inside Gaster Co., Ltd.Examiner Jun Koriyama (56) Reference Yazaki Technology Report, No. 13, pp. 119-123, 1988 (58) Fields investigated (Int. Cl. 7 , DB name) G01N 27/16 G01N 25/30 JICST file (JOIS)
Claims (5)
焼式ガスセンサにおいて、検知素子が触媒を坦持したγ
−アルミナを金属線の周囲に配してなるものであり、ま
た、比較素子がα−アルミナを金属線の周囲に配してな
るものであって、検知素子におけるγ−アルミナの質量
を１００としたときの比較素子におけるα−アルミナの
質量が７０以上１３０以下であることを特徴とする接触
燃焼式ガスセンサ。1. A catalytic combustion type gas sensor comprising a detection element and a comparison element, wherein the detection element has a catalyst-carrying γ.
-Alumina is arranged around the metal wire, and the comparative element is arranged with α-alumina around the metal wire, and the mass of γ-alumina in the sensing element is 100 and The mass of α-alumina in the comparative element at the time of performing is not less than 70 and not more than 130, a catalytic combustion type gas sensor.
を１００としたときの比較素子におけるα−アルミナの
質量が８５以上１１５以下であることを特徴とする請求
項１に記載の接触燃焼式ガスセンサ。2. The catalytic combustion type gas sensor according to claim 1, wherein the mass of α-alumina in the comparison element is 85 or more and 115 or less when the mass of γ-alumina in the detection element is 100.
を特徴とする請求項１または請求項２に記載の接触燃焼
式ガスセンサ。3. The catalytic combustion type gas sensor according to claim 1, wherein the gas to be detected is carbon monoxide.
する検知素子とセラミック被覆層を有する比較素子とを
備える接触燃焼式ガスセンサの製造方法において、検知
素子と比較素子とそれぞれの被覆層の質量比を、測定対
象気体中の不燃性ガス濃度がセンサ出力に影響が及ばな
い範囲に調整することを特徴とする接触燃焼式ガスセン
サの製造方法。4. A method for producing a catalytic combustion type gas sensor comprising a sensing element having a ceramic coating layer carrying a catalyst and a comparison element having a ceramic coating layer, wherein the mass ratio of the detection element, the comparison element and the respective coating layers is provided. Is adjusted to a range where the concentration of nonflammable gas in the gas to be measured does not affect the sensor output.
する検知素子とセラミック被覆層を有する比較素子とを
備える接触燃焼式ガスセンサの製造方法において、検知
素子と比較素子とそれぞれの被覆層の熱容量比を、測定
対象気体中の不燃性ガス濃度がセンサ出力に影響が及ば
ない範囲に調整することを特徴とする接触燃焼式ガスセ
ンサの製造方法。5. A method for manufacturing a catalytic combustion type gas sensor comprising a sensing element having a ceramic coating layer carrying a catalyst and a comparison element having a ceramic coating layer, wherein a heat capacity ratio between the detection element, the comparison element and each coating layer is provided. Is adjusted to a range where the concentration of nonflammable gas in the gas to be measured does not affect the sensor output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07156478A JP3135035B2 (en) | 1995-06-22 | 1995-06-22 | Contact combustion type gas sensor and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07156478A JP3135035B2 (en) | 1995-06-22 | 1995-06-22 | Contact combustion type gas sensor and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH095282A JPH095282A (en) | 1997-01-10 |
| JP3135035B2 true JP3135035B2 (en) | 2001-02-13 |
Family
ID=15628641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07156478A Expired - Lifetime JP3135035B2 (en) | 1995-06-22 | 1995-06-22 | Contact combustion type gas sensor and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3135035B2 (en) |
-
1995
- 1995-06-22 JP JP07156478A patent/JP3135035B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| 矢崎技術リポート、１３号、１１９−１２３頁、１９８８年 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH095282A (en) | 1997-01-10 |
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