JPH095282A - Contact-buring type gas sensor and its manufacture - Google Patents

Contact-buring type gas sensor and its manufacture

Info

Publication number
JPH095282A
JPH095282A JP15647895A JP15647895A JPH095282A JP H095282 A JPH095282 A JP H095282A JP 15647895 A JP15647895 A JP 15647895A JP 15647895 A JP15647895 A JP 15647895A JP H095282 A JPH095282 A JP H095282A
Authority
JP
Japan
Prior art keywords
alumina
gas sensor
catalytic combustion
detection element
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15647895A
Other languages
Japanese (ja)
Other versions
JP3135035B2 (en
Inventor
Kaoru Ogino
薫 荻野
Kazuhiro Oishi
和広 大石
Kazutoshi Yasugata
和俊 安形
Masanori Enomoto
正徳 榎本
Shingo Kimura
新悟 木村
Takuji Shigeoka
卓二 重岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Corp
Gastar Co Ltd
Original Assignee
Yazaki Corp
Gastar Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Corp, Gastar Co Ltd filed Critical Yazaki Corp
Priority to JP07156478A priority Critical patent/JP3135035B2/en
Publication of JPH095282A publication Critical patent/JPH095282A/en
Application granted granted Critical
Publication of JP3135035B2 publication Critical patent/JP3135035B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To provide a contact-burning type gas sensor by which the concentration of a low-concentration combustible gas in a gas including incombustible gas elements such as carbon dioxide, etc., can be measured accurately. CONSTITUTION: A contact-burning type gas sensor is provided with a detection element and a comparison element, and the detection element is formed by arranging a γ-alumina depositing a catalyst around a metallic wire, while the comparison element is formed by arranging an α-alumina around the metallic wire. When assuming that the mass of the γ-alumina is the detection element is 100, that of the α-alumina in the comparison element is more than 70 and less than 130.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は環境中の一酸化炭素、或
いは、メタンガス等の燃焼性気体の検知を行うための接
触燃焼性ガスセンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a catalytic combustible gas sensor for detecting carbon monoxide in the environment or combustible gas such as methane gas.

【0002】[0002]

【従来の技術】接触燃焼性ガスセンサは、通常、燃焼性
気体の濃度を測定するための検知素子と、温度補償を行
うための比較素子の2つの素子を有する。ここで検知素
子の例を図1を用いて説明する。図1は検知素子3のセ
ラミック坦体2の一部を除去した状態を示す図である。
図中符号1は白金等からなる金属線で、2は測定目的の
可燃性気体を接触燃焼させるためのロジウム、パラジウ
ム、白金等の触媒を坦持したアルミナ等のセラミック坦
体である。
2. Description of the Related Art A catalytic combustible gas sensor usually has two elements, a sensing element for measuring the concentration of combustible gas and a comparison element for performing temperature compensation. Here, an example of the sensing element will be described with reference to FIG. FIG. 1 is a diagram showing a state in which a part of the ceramic carrier 2 of the detection element 3 is removed.
In the figure, reference numeral 1 is a metal wire made of platinum or the like, and 2 is a ceramic carrier such as alumina carrying a catalyst such as rhodium, palladium or platinum for catalytically burning a combustible gas for measurement.

【0003】なお、比較素子は、セラミック被覆層に触
媒が含有されていない以外はまったく上記検知素子と同
じ構成をもつ。これら検知素子Aと比較素子Bは、図2
に示すように、互いに同じ抵抗値を持つ電気抵抗R、電
気抵抗R’とともにブリッジ回路を形成し、電源Dとと
もに接触燃焼式ガスセンサを構成する。なお、図2中t
は端子であって、メーター等の表示手段に接続される。
The comparison element has the same structure as the above-mentioned detection element except that the ceramic coating layer does not contain a catalyst. The detection element A and the comparison element B are shown in FIG.
As shown in (1), a bridge circuit is formed with the electric resistance R and the electric resistance R ′ having the same resistance value, and the contact combustion gas sensor is formed with the power source D. In addition, t in FIG.
Is a terminal and is connected to display means such as a meter.

【0004】従来接触燃焼式センサにおいて、セラミッ
ク坦体として、γ−アルミナが用いられてきた。ところ
が、γ−アルミナ自体の持つ触媒活性のため、比較素子
でも燃焼性ガスの燃焼熱が生じ、その結果感度が低下す
る。この欠点を解消するため、比較素子に熱処理を行っ
て、γ−アルミナを触媒活性を持たないα−アルミナに
変換することが行われたが、これにより感度の低下を防
止できることが判った。
In the conventional catalytic combustion type sensor, γ-alumina has been used as a ceramic carrier. However, due to the catalytic activity of γ-alumina itself, combustion heat of the combustible gas is generated even in the comparative element, and as a result, the sensitivity is lowered. In order to solve this drawback, the comparative element was subjected to heat treatment to convert γ-alumina into α-alumina having no catalytic activity, but it was found that this can prevent a decrease in sensitivity.

【0005】ところが、このα−アルミナ層を有する比
較素子と、触媒坦持γ−アルミナ層を有する検知素子か
らなる接触燃焼式ガスセンサは、炭酸ガスのような不燃
性成分を含有する気体に対しても感度を有する。そのた
め、このような不燃性成分の濃度が高く、目的の可燃性
気体の濃度が低い場合に、測定が困難となってしまう。
However, the catalytic combustion type gas sensor comprising the comparison element having the α-alumina layer and the detection element having the catalyst-supporting γ-alumina layer is suitable for a gas containing a non-combustible component such as carbon dioxide gas. Also has sensitivity. Therefore, when the concentration of such an incombustible component is high and the concentration of the target combustible gas is low, the measurement becomes difficult.

【0006】[0006]

【発明が解決しようとする課題】本発明は、二酸化炭素
等の不燃性成分を有する気体における低濃度可燃ガスの
濃度測定にも対応できる接触燃焼式ガスセンサを提供す
ることを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a catalytic combustion type gas sensor which can also measure the concentration of a low concentration combustible gas in a gas having a non-combustible component such as carbon dioxide.

【0007】[0007]

【課題を解決するための手段】上述のように触媒坦持γ
−アルミナ層を有する検知素子とα−アルミナ層を有す
る比較素子とからなる接触ガスセンサは、炭酸ガスのよ
うな不燃性成分に対しても感度を有する。その原因につ
いて種々調査をおこなったところ、次のようなことが判
った。
[Means for Solving the Problems] As described above, catalyst-supporting γ
A contact gas sensor consisting of a sensing element with an alumina layer and a comparative element with an α-alumina layer is sensitive to non-combustible components such as carbon dioxide. As a result of various investigations on the cause, the following was found.

【0008】検知素子及び比較素子の被覆層が共にγ−
アルミナからなる場合、両者の熱挙動を等しくし、温度
の測定値への影響をなくすため、これらの被覆層は互い
に同じ形状・大きさに形成されていた。これら検知素子
及び比較素子のそれぞれの大きさ・形状の関係は、比較
素子の被覆層がα−アルミナによって形成されるように
なっても継承されていたが、調査の結果、これが二酸化
炭素などの不燃性気体によるノイズの原因となることが
判った
The coating layers of the sensing element and the comparison element are both γ-
In the case of using alumina, these coating layers were formed in the same shape and size in order to equalize the thermal behaviors of both and eliminate the influence on the measured value of temperature. The relationship between the size and the shape of each of the detection element and the comparison element was inherited even when the coating layer of the comparison element was formed by α-alumina, but as a result of the investigation, it was found that this was the case. It was found to cause noise due to non-combustible gas

【0009】すなわち、α−アルミナ被覆を有する検知
素子とγ−アルミナ被覆を有する比較素子とが同じ大き
さの場合、これらの二酸化炭素等の不燃性気体濃度変化
に対する挙動が異なることが判った。
That is, it has been found that, when the sensing element having the α-alumina coating and the comparative element having the γ-alumina coating have the same size, their behaviors with respect to changes in the concentration of nonflammable gas such as carbon dioxide are different.

【0010】本発明はこれら素子の二酸化炭素等の不燃
性気体の濃度変化に対する挙動を等しくすることにより
上記問題を解決するものである。すなわち、本発明の接
触燃焼式ガスセンサは、検知素子が触媒を坦持したγ−
アルミナを金属線の周囲に配してなるものであり、ま
た、比較素子がα−アルミナを金属線の周囲に配してな
るものであって、検知素子におけるγ−アルミナの質量
を100としたときの比較素子における触媒を坦持した
α−アルミナの質量が70以上130以下である構成を
有する。
The present invention solves the above problems by making the behaviors of these elements even with respect to changes in the concentration of non-combustible gas such as carbon dioxide. That is, in the catalytic combustion gas sensor of the present invention, the detection element is a γ-
Alumina is arranged around the metal wire, and the comparison element is formed by arranging α-alumina around the metal wire, and the mass of γ-alumina in the detection element is 100. The mass of the α-alumina supporting the catalyst in the comparative element at that time is 70 or more and 130 or less.

【0011】ここでα−アルミナ被覆層を有する検知素
子は、公知の方法で得ることができる。例えば、γ−ア
ルミナを1100℃以上で焼成して得たα−アルミナの
被覆層を金属線の周囲に成形して得られる。
Here, the sensing element having the α-alumina coating layer can be obtained by a known method. For example, it can be obtained by molding a coating layer of α-alumina obtained by firing γ-alumina at 1100 ° C. or higher around a metal wire.

【0012】本発明において、検知素子におけるγ−ア
ルミナの質量を100としたときの比較素子における触
媒を坦持したα−アルミナの質量が70以上130以下
であることが必要である。なお上記α−アルミナの質量
が70未満或いは130超であると、測定対象ガス中の
二酸化炭素等の不燃性ガスの影響によるノイズが大きく
なり、測定目的気体である燃焼性気体の測定値の信頼性
に劣る。
In the present invention, it is necessary that the mass of α-alumina supporting the catalyst in the comparative element is 70 to 130 when the mass of γ-alumina in the detecting element is 100. If the mass of α-alumina is less than 70 or more than 130, noise due to the influence of non-combustible gas such as carbon dioxide in the gas to be measured becomes large, and the reliability of the measured value of the combustible gas as the measurement target gas is high. Inferior in sex.

【0013】なお、測定目的気体である燃焼性気体が、
有毒な一酸化炭素である場合、低濃度における厳密な測
定値が必要であり、そのため、上記α−アルミナの質量
が、検知素子におけるγ−アルミナの質量を100とし
たときに85以上115以下であると、このような厳密
な測定値に充分な対応が可能となるので望ましい。
The combustible gas which is the measuring gas is
In the case of toxic carbon monoxide, a strict measurement value at a low concentration is required, so that the mass of α-alumina is 85 or more and 115 or less when the mass of γ-alumina in the sensing element is 100. It is desirable to have such a strict measurement value because it is possible to sufficiently deal with such a measurement value.

【0014】ここで、一酸化炭素のMCA(許容濃度:
中程度労働で8時間、毒物に暴露しても中毒を起こさな
い最高濃度)は100ppmであると云われており、こ
の濃度以下における厳密な測定が必要とされている。一
方、二酸化炭素は5%程度の濃度の場合には人体に悪影
響がないとされている。
Here, MCA of carbon monoxide (allowable concentration:
It is said that the maximum concentration at which poisoning does not occur even if exposed to poisonous substances for 8 hours in moderate labor) is 100 ppm, and strict measurement below this concentration is required. On the other hand, carbon dioxide is said to have no adverse effect on the human body when the concentration is about 5%.

【0015】[0015]

【作用】本発明の接触燃焼式ガスセンサにおける比較素
子がα−アルミナを金属線の周囲に配してなるものであ
るため一酸化炭素等の燃焼性気体に対する感度を有しな
いので、触媒坦持γ−アルミナを金属線の周囲に配して
なる検知素子の燃焼性ガスに対する感度を充分に活用す
ることが可能である。
Since the comparative element in the catalytic combustion type gas sensor of the present invention has α-alumina arranged around the metal wire, it has no sensitivity to combustible gases such as carbon monoxide, so that the catalyst supported γ -It is possible to make full use of the sensitivity of the sensing element formed by arranging alumina around the metal wire to combustible gas.

【0016】また、検知素子におけるγ−アルミナの質
量を100としたときの比較素子におけるα−アルミナ
の質量が70以上130以下であるため、測定対象気体
中における二酸化炭素等の不燃性気体の影響が少ない。
なお、この二酸化炭素等の不燃性気体が素子に影響を及
ぼす要因としては、これら素子と不燃性気体との間の熱
伝導の違いによるものと考えられ、上記のようにこれら
素子のそれぞれの被覆層の質量を調整する本発明の構成
により、これら素子の熱容量の違いが調整されるものと
考えられる。
Further, since the mass of α-alumina in the comparative element is 70 or more and 130 or less when the mass of γ-alumina in the detecting element is 100, the influence of noncombustible gas such as carbon dioxide in the gas to be measured. Less is.
The factor that the non-combustible gas such as carbon dioxide affects the element is considered to be due to the difference in heat conduction between these elements and the non-combustible gas. It is believed that the configuration of the present invention that adjusts the layer mass adjusts for the difference in heat capacities of these devices.

【0017】[0017]

【実施例】まず直径25μmの白金線をコイル径1m
m、巻き数16ターンのコイルを作成した。次いでベー
マイトを700℃で焼成したγ−アルミナを粒径が1〜
10μmになるように粉砕し、これに金属ロジウムを坦
持させた後、アルミナ系バインダーを10重量%添加し
て、適度な粘度を有する程度水を加えた後ペースト状に
混練した。
[Example] First, a platinum wire having a diameter of 25 μm was used and a coil diameter was 1 m.
A coil with m and 16 turns was created. Next, γ-alumina obtained by firing boehmite at 700 ° C. has a particle size of 1 to
After crushing to 10 μm and supporting metal rhodium on this, 10% by weight of an alumina-based binder was added, and water was added to the extent that it had an appropriate viscosity, followed by kneading into a paste.

【0018】このアルミナペーストを前記白金コイル上
に球状に成形したのち700℃で焼成し、これを検知素
子Tとした。まず、この検知素子Tの一酸化炭素に対す
る感度を調べた。すなわち、検知素子Tの抵抗値の変化
を電圧に変換する手段を用いたときのその電圧(素子出
力)と空気中の一酸化炭素濃度との関係を調べた。結果
を図3に示す。
This alumina paste was formed into a spherical shape on the platinum coil and then fired at 700 ° C. to obtain a sensing element T. First, the sensitivity of the sensing element T to carbon monoxide was examined. That is, the relationship between the voltage (element output) and the concentration of carbon monoxide in the air when the means for converting the change in the resistance value of the detection element T into a voltage was used was investigated. The results are shown in FIG.

【0019】図3より炭酸ガス100ppmあたりのこ
の検知素子Tの出力は0.3mVに該当することが判
る。なお、以下において、素子出力を電圧で示した場合
にはここで用いたのと同じ抵抗値−電圧変換手段を用い
た。
From FIG. 3, it can be seen that the output of the detection element T per 100 ppm of carbon dioxide corresponds to 0.3 mV. In the following, when the element output is expressed by voltage, the same resistance value-voltage conversion means as used here was used.

【0020】次に比較素子を作製した。ベーマイトを1
100℃で焼成して得たα−アルミナを粒径が1〜10
μmになるように粉砕し、アルミナ系バインダーを10
重量%添加して、適度な粘度を有する程度水を加えた後
ペースト状に混練し、上記検知素子Tで用いたのと同じ
白金製コイルに球状に成形したのち700℃で焼成し、
比較素子a、b、c、d、e及びfを得た。これらの被
覆層の粒径及び質量を調べた結果を表1に示す。
Next, a comparative element was produced. 1 boehmite
The particle size of α-alumina obtained by firing at 100 ° C. is 1 to 10
It is pulverized to have a particle size of
% By weight, and after adding water to an extent that it has an appropriate viscosity, kneading into a paste, forming the same platinum coil used in the sensing element T into a spherical shape, and then firing at 700 ° C.,
Comparative devices a, b, c, d, e and f were obtained. The results of examining the particle size and mass of these coating layers are shown in Table 1.

【0021】[0021]

【表1】 [Table 1]

【0022】これら検知素子T及び比較素子a〜fにつ
いて、窒素中5%或いは10%の二酸化炭素に接触さ
せ、その出力を電圧として得た。このときの検知素子T
の出力と検知素子a〜fそれぞれの出力との差を図4に
示す。図3より、従来例である比較素子aを用いた場合
に比べ、本発明に係る実施例1〜実施例5である比較素
子b、c、d、e及びfを用いた場合においては、二酸
化炭素の濃度変化による影響が少ないことが判る。
The sensing element T and the comparative elements a to f were brought into contact with 5% or 10% carbon dioxide in nitrogen, and the output was obtained as a voltage. Detection element T at this time
FIG. 4 shows the difference between the output of each of the detection elements a to f and the output of each of the detection elements a to f. From FIG. 3, as compared with the case where the comparative element a which is a conventional example is used, in the case where the comparative elements b, c, d, e and f which are Examples 1 to 5 according to the present invention are used, It can be seen that the influence of the change in carbon concentration is small.

【0023】また、上記検知素子Tと比較素子dとを用
い、これらを用い図2に示すのと同じ回路を形成して接
触燃焼式ガスセンサーIを作製し、このガスセンサIの
空気中の一酸化炭素濃度に対する感度を調べ、またその
ときの温度の影響を10〜40℃の範囲で調べた。その
結果を従来の技術による接触燃焼式ガスセンサ、すなわ
ち検知素子Tと比較素子aを用いて形成したガスセンサ
IIでの結果と比較したところ、空気中における一酸化炭
素に対する感度及び温度の影響に関しては、従来技術に
よるガスセンサIIと同等の性能を有することが判った。
Further, using the sensing element T and the comparison element d, the same circuit as shown in FIG. 2 is formed by using them, and a catalytic combustion type gas sensor I is manufactured. The sensitivity to the carbon oxide concentration was examined, and the influence of temperature at that time was examined in the range of 10 to 40 ° C. The result is a catalytic combustion type gas sensor according to a conventional technique, that is, a gas sensor formed by using a detection element T and a comparison element a.
Comparing with the results of II, it was found that the gas sensor II according to the related art has the same performance in terms of sensitivity to carbon monoxide in air and influence of temperature.

【0024】また、これらガスセンサI及びIIについ
て、5%の二酸化炭素及び100ppmの一酸化炭素を
含有させた空気(20℃)中の一酸化炭素濃度を測定し
たところ、ガスセンサIでは二酸化炭素がない場合での
100ppmの一酸化炭素に対するのと同じ出力が得ら
れたが、ガスセンサIIでは二酸化炭素がない場合での3
80ppmの濃度の一酸化炭素に対応する出力となり、
正確な値が得られなかった。
Further, when the concentration of carbon monoxide in air (20 ° C.) containing 5% carbon dioxide and 100 ppm of carbon monoxide was measured for these gas sensors I and II, the gas sensor I showed no carbon dioxide. The same output as in the case of 100 ppm of carbon monoxide was obtained, but with the gas sensor II, it was 3
The output corresponds to carbon monoxide at a concentration of 80 ppm,
The exact value was not obtained.

【0025】[0025]

【発明の効果】以上のように、本発明に係る接触燃焼式
ガスセンサは、従来のガスセンサと同等の一酸化炭素濃
度を有しながらも、測定対象気体中の二酸化炭素などの
非燃焼性ガス濃度の影響が少ない優れたものである。
As described above, the catalytic combustion gas sensor according to the present invention has a carbon monoxide concentration equivalent to that of the conventional gas sensor, but has a non-combustible gas concentration such as carbon dioxide in the gas to be measured. It is an excellent one with little effect.

【図面の簡単な説明】[Brief description of drawings]

【図1】接触燃焼ガスセンサの検知素子の例における構
造を示す図である。
FIG. 1 is a diagram showing a structure in an example of a detection element of a contact combustion gas sensor.

【図2】接触燃焼ガスセンサの回路を示す図である。FIG. 2 is a diagram showing a circuit of a catalytic combustion gas sensor.

【図3】検知素子の一酸化炭素濃度に対する感度を示す
図である。
FIG. 3 is a diagram showing the sensitivity of the sensing element to the carbon monoxide concentration.

【図4】実施例及び比較例における検知素子と各比較素
子間の素子出力の差を示した図である。
FIG. 4 is a diagram showing a difference in element output between a sensing element and each comparative element in Examples and Comparative Examples.

【符号の説明】[Explanation of symbols]

1 金属線 2 触媒坦持セラミック坦体 3 検知素子 4 比較素子 D 電源 R、R’ 電気抵抗 t 出力端子 DESCRIPTION OF SYMBOLS 1 Metal wire 2 Catalyst carrying ceramic carrier 3 Detection element 4 Comparison element D Power supply R, R'Electrical resistance t Output terminal

フロントページの続き (72)発明者 安形 和俊 静岡県天竜市二俣町南鹿島23 矢崎計器株 式会社内 (72)発明者 榎本 正徳 神奈川県大和市深見台3−4 株式会社ガ スター内 (72)発明者 木村 新悟 神奈川県大和市深見台3−4 株式会社ガ スター内 (72)発明者 重岡 卓二 神奈川県大和市深見台3−4 株式会社ガ スター内Front page continuation (72) Inventor Kazutoshi Agata 23 Kashima, Minamata-cho, Tenryu City, Shizuoka Prefecture Yazaki Keiki Co., Ltd. (72) Inventor Masanori Enomoto 3-4 Fukamidai, Yamato-shi, Kanagawa Prefecture (72) Inventor Shingo Kimura 3-4, Fukamidai, Yamato-shi, Kanagawa Prefecture, inside Gaster Co., Ltd. (72) Takuji Shigeoka, 3-4, Fukamidai, Yamato-shi, Kanagawa Inside Gaster Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 検知素子と比較素子とを備える接触燃
焼式ガスセンサにおいて、検知素子が触媒を坦持したγ
−アルミナを金属線の周囲に配してなるものであり、ま
た、比較素子がα−アルミナを金属線の周囲に配してな
るものであって、検知素子におけるγ−アルミナの質量
を100としたときの比較素子におけるα−アルミナの
質量が70以上130以下であることを特徴とする接触
燃焼式ガスセンサ。
1. A catalytic combustion gas sensor comprising a detection element and a comparison element, wherein the detection element carries a catalyst γ
-Alumina is arranged around the metal wire, and the comparison element is formed by arranging α-alumina around the metal wire, and the mass of γ-alumina in the detection element is 100. The catalytic combustion gas sensor, wherein the mass of α-alumina in the comparative element is 70 or more and 130 or less.
【請求項2】 検知素子におけるγ−アルミナの質量
を100としたときの比較素子におけるα−アルミナの
質量が85以上115以下であることを特徴とする請求
項1に記載の接触燃焼式ガスセンサ。
2. The catalytic combustion type gas sensor according to claim 1, wherein the mass of α-alumina in the comparative element is 85 or more and 115 or less when the mass of γ-alumina in the detecting element is 100.
【請求項3】 検知対象ガスが一酸化炭素であること
を特徴とする請求項1または請求項2に記載の接触燃焼
式ガスセンサ。
3. The catalytic combustion gas sensor according to claim 1, wherein the gas to be detected is carbon monoxide.
【請求項4】 触媒を坦持したセラミック被覆層を有
する検知素子とセラミック被覆層を有する比較素子とを
備える接触燃焼式ガスセンサの製造方法において、検知
素子と比較素子とそれぞれの被覆層の質量比を、測定対
象気体中の不燃性ガス濃度がセンサ出力に影響が及ばな
い範囲に調整することを特徴とする接触燃焼式ガスセン
サの製造方法。
4. A method for manufacturing a catalytic combustion gas sensor, which comprises a detection element having a ceramic coating layer supporting a catalyst and a comparison element having a ceramic coating layer, and a mass ratio of the detection element, the comparison element and each coating layer. Is adjusted to a range in which the concentration of the noncombustible gas in the gas to be measured does not affect the sensor output, and a method for manufacturing a catalytic combustion gas sensor.
【請求項5】 触媒を坦持したセラミック被覆層を有
する検知素子とセラミック被覆層を有する比較素子とを
備える接触燃焼式ガスセンサの製造方法において、検知
素子と比較素子とそれぞれの被覆層の熱容量比を、測定
対象気体中の不燃性ガス濃度がセンサ出力に影響が及ば
ない範囲に調整することを特徴とする接触燃焼式ガスセ
ンサの製造方法。
5. A method of manufacturing a catalytic combustion gas sensor comprising a detection element having a ceramic coating layer supporting a catalyst and a comparison element having a ceramic coating layer, wherein a heat capacity ratio between the detection element, the comparison element and each coating layer. Is adjusted to a range in which the concentration of the noncombustible gas in the gas to be measured does not affect the sensor output, and a method for manufacturing a catalytic combustion gas sensor.
JP07156478A 1995-06-22 1995-06-22 Contact combustion type gas sensor and method of manufacturing the same Expired - Lifetime JP3135035B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07156478A JP3135035B2 (en) 1995-06-22 1995-06-22 Contact combustion type gas sensor and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07156478A JP3135035B2 (en) 1995-06-22 1995-06-22 Contact combustion type gas sensor and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH095282A true JPH095282A (en) 1997-01-10
JP3135035B2 JP3135035B2 (en) 2001-02-13

Family

ID=15628641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07156478A Expired - Lifetime JP3135035B2 (en) 1995-06-22 1995-06-22 Contact combustion type gas sensor and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3135035B2 (en)

Also Published As

Publication number Publication date
JP3135035B2 (en) 2001-02-13

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