JP3134448U - Transport package for transporting substrate processing racks - Google Patents

Abstract

A transport package for transporting a substrate processing rack that can be used to hold a batch of substrates during manufacture of the substrate to form a display and a semiconductor.
A package has a container with a hard casing. The hard casing 870 can enclose the shell 800 for further protection.
[Selection] Figure 6

Description

Contents of device

[background]
Embodiments of the present invention relate to a transport package for transporting a substrate processing rack.

  The substrate rack can be used to hold batch substrates during the manufacture of the substrate to form the display and semiconductor. For example, a substrate rack, such as a wafer processing boat, has a series of vertically arranged slots that can each hold a semiconductor wafer. A typical substrate rack 10 capable of holding semiconductor wafers in a deposition chamber is shown in FIG. The substrate rack 10 includes a plurality of graphite disks 20 that are separated by spacers 30 and held together by metal rods 40 that pass through the spacers 30 and connect the base plate 50 and the uppermost plate 60. The rack components 20, 30, 40, 50 are made of ceramics such as silicon carbide to protect them from the deposition environment and to prevent contaminants from the substrate rack 10 from entering the substrate processing chamber. Can be coated. The substrate rack 10 can be placed in a deposition chamber, such as a chemical vapor deposition (CVD) chamber, for depositing materials such as polysilicon, amorphous silicon, or silicon dioxide on a stack of substrates. In this process, a silicon-containing gas is introduced into the CVD chamber, the substrate rack 10 is rotated and heated, and plasma is generated. The exemplary substrate rack is used to illustrate such a rack, but other substrate processing apparatus or methods are also used, such as substrate racks used in physical vapor deposition (PVD) chambers, etching chambers, implantation chambers. obtain.

  In use, after several process cycles, the rack 10 is cleaned or repaired to remove accumulated process deposits. For example, in a typical CVD process, the CVD material that is deposited on the substrate is deposited on the substrate rack 10. After many CVD process cycles, a layer of CVD material accumulates on the substrate rack 10. When the deposits are peeled off from the substrate rack, the accumulation layer of the deposits contaminates the CVD chamber and the substrate. Accordingly, the deposited material is periodically removed from the substrate rack 10 to repair and clean the substrate rack for use in subsequent process cycles.

  Typically, substrate racks are packaged and shipped to an off-site cleaning facility for cleaning or repairing the rack 10. However, there are some problems with transporting the rack 10. First, the assembled board rack is heavy, often weighing about 50-100 pounds, and is also fragile and difficult to ship without breakage. In addition, the rack 10 is sensitive to the surrounding environment, and is eroded or corroded when exposed to air. Further, the deposit formed on the rack 10 is toxic and dangerous for the handler. Accordingly, a thin sealing layer, typically comprising undoped silicon, is deposited on the substrate rack 10 prior to shipping to the cleaning site to protect the handler from exposure to deposits on the rack. . The substrate rack 10 is then wrapped with an air cushion “bubble wrap” and placed in a wooden crate for shipping. Since the substrate rack 10 is very fragile, it must be transported in one position, i.e., in the vertical longitudinal axis, otherwise the fragile components of the substrate rack will be missing and damaged. . All of these solutions to the transport problem add to the cost of cleaning and repairing the rack 10.

  In transport to the cleaning site, the wooden box containing the substrate 10 may be subjected to inspection by an immigration officer or law enforcement officer. To conduct the inspection, the enforcement officer typically opens the encoding of the crate and removes the bubble wrap to ensure that the prohibited items are not included in the crate. After the inspection, the substrate rack 10 is repackaged and transported to a cleaning place. The substrate rack is then placed in an acidic bath for several hours to remove the deposited layer of material. Until this time, the substrate rack 10 has been assembled because the deposited material adheres to the components of the substrate rack, and the substrate rack cannot be disassembled without damaging the components. After the first acid bath, the layer is removed and the substrate rack components are “stripped”. Thereafter, the substrate rack 10 is disassembled, washed again, and baked at about 400 ° C. for about 10 hours to be dried. Once dry, the disassembled repair components are packaged and shipped to the customer where the board rack 10 is reassembled and ready for use.

  During the transport repair process, a significant percentage of the substrate rack 10 is damaged beyond repair. For example, if the substrate rack 10 is packaged, i.e. wrapped in bubble wrap, placed in a wooden box, unwrapped or repackaged, e.g., at a customer location, during inspection, at a cleaning location, the substrate The silicon carbide coat on the components of the rack 10 can be easily scraped or disassembled, making the components useless. If the wooden box is tilted or falls during transport, the fragile components will be disassembled or chipped. The substrate rack 10 typically has no experience in reassembling the substrate rack and may be damaged at the customer's site if it is reassembled by an unskilled laboratory technician. In addition to substrate rack damage, handlers and inspectors can expose toxic substances under a thin sealing layer when components are disassembled or scraped.

  Therefore, it is desirable that the substrate rack 10 can be efficiently transported from a clean room to a cleaning facility or an off-site facility for cleaning or repairing. It is also desirable to minimize damage to the substrate rack 10 during the packing process, the unpacking process, and the transport process. Furthermore, it is desirable to efficiently clean the rack 10 without damaging the components. Furthermore, it is desirable to protect the handler from exposure to the deposits on the rack during handling and transport.

[Overview]
A transport fixture for holding a substrate rack includes a top end plate and a bottom end plate. A plurality of posts attach the top end plate to the bottom plate and are spaced apart a sufficient distance to confine the substrate rack between them. Each post has a vertical internal edge. A bumper corresponding to each vertical inner end of the post is coupled. The transport fixture cushions, fixes and protects the substrate rack during transport.

  In other embodiments, the transport fixture includes a top end plate and a bottom end plate that are triangular and pointed. Three posts attach the apex of the top end plate to the apex of the bottom end plate. A corresponding bumper is attached to each post.

  A shell that is at least partially light transmissive can also surround the fixture to protect the substrate rack from the external environment while still allowing the fixture and rack to be viewed without opening the shell. In one variation, the shell includes a first tray having a closed end having a first peripheral edge and an open end, wherein at least a portion of the first tray includes a light transmissive material. The second tray has a closed end having a second peripheral edge and an open end, and at least a portion of the second tray contains a light transmissive material. Since the first peripheral edge and the second peripheral edge are combined, the open ends of the first tray and the second tray face each other to form a cavity therebetween. A sealing gasket may be used between the perimeters to form a seal. The shell can also include an exhaust port and a respective purge gas fitting for evacuating the shell and filling the shell with a non-reactive gas. The shell allows for routine or other visual inspection of fixtures and racks that require opening the shell to see its contents.

  The transfer casing can also be used to enclose the shell for shipping. The transport casing comprises a rigid box with an internal foam block that is contoured to fit the shape of the shell. The casing provides additional mechanical protection during transport.

  These features, aspects, and advantages of the present invention will be better understood with regard to the following description, the appended utility model registration claims, and the following drawings that illustrate examples of the present invention. However, it should be understood that each of the features can generally be used in the present invention and not merely in connection with a particular drawing, and the device includes any combination of these features.

[Explanation]
A transport package comprising transport fixtures can be used to transport the substrate rack 10 shown in FIG. 1 from one chamber to another chamber or from one facility to another. For example, the transport package can be used to transport the rack 10 for cleaning or repair at a suitable facility after the rack is used in the deposition chamber. The shipping package serves as a protective container for the shipping fixture during shipping and handling and can be used for fixtures other than those shown herein. The transport fixture also holds the fragile rack 10 during the repair process, for example during packing or unpacking, in an acid or other cleaning bath or in a drying oven or furnace. Can be used for. The transport fixture can be used to hold the substrate rack 10 in a transport package or to transport the rack 10 to another room in the same building. The shipping package and fixture can be used to transport racks other than the exemplary rack 10 shown herein, with appropriate modifications apparent to those skilled in the art. Accordingly, the scope of the present invention should not be limited to the illustrative embodiments of a single transport package, fixture, and rack described herein.

  An exemplary transport fixture 200 for holding the substrate rack 10 is shown in FIG. In one variation, the substrate rack 10 is surrounded and protected by a transport fixture 200. The transport fixture 200 can be reused and used to return the fully reassembled substrate rack 10 to the customer. The transport fixture 200 includes a top end plate 210 a and a bottom 210 b end plate that are attached to each other by a plurality of posts 220. The end plates 210a, 210b and the post 220 form an enclosure that captures the substrate rack 10 as shown in FIG. End plates 210a, 210b and post 220 may be manufactured from a chemically inert, non-metallic, refractory material, such as polytetrafluoroethylene PTFE (commercially known as Teflon®). As such, the transport fixture 200 can withstand a cleaning or repair process and can be used to return the repaired and reassembled substrate rack 10.

  In one variation, the lower end plate 210b includes a skid plate 230 that prevents the substrate rack 10 from sliding off the fixture 200 during the loading and unloading processes. The end plates 210a, 210b also face the stack 10 to prevent contact between the substrate rack 10 and the end plates 210a, 210b windings when the rack 10 has a protruding end (not shown). There may be raised bumps (not shown) located on the surface 232 and shaped like ribs, islands, mesas or ridges. The raised bumps also help maintain the rack 10 in a vertical position while the substrate rack 10 is loaded or not loaded. The raised bumps can be bonded to the surfaces of the end plates 210a and 210b, or can be formed integrally.

  Each end plate 210a, 210b is provided with a reinforcing structure 240, eg, a block, to increase the rigidity of the end plates 210a, 210b and to provide other functions, eg, means for lifting and holding the transport fixture. A bracket or gusset may be included. For example, the reinforcing structure 240 can include a hole 243 that can serve as a means for attaching a finger hold or grip or other carrying strap. Like the raised portion 230, the reinforcing structure 240 can be coupled to or integrally formed with the end plates 210a, 210b. Further, the end plates 210a, 210b may be provided with openings 250 on the components of the substrate rack 10 that facilitate the flow of cleaning liquid, ie acid.

  The posts 20a-c connecting the end plates 210a, 210b are positioned so that the substrate rack 10 is securely held between the posts 220a-c, as shown in FIG. In one variation, the end plates 210a, 210b are triangular in shape and have a size sufficient to support the substrate rack 10. The triangular shape requires less material and less space to provide the same support, thus allowing more end plates 210a, 210b to be shipped in one container.

  Referring to FIG. 4, if the end plates 210a, 210b are triangular, the end plates 210a, 210b have tips 212a-f, and the posts 220a-c to maximize the space between the posts 220a-c. The triangular end plates 210a and 210b can be coupled to the tip portions 212a-f. The triangular top and bottom end plates 210a, 210b may also have slots 214a-f at the tips 212a-f sized to receive the posts 220a-c. However, in variations where the end plates 210a, 210b are not triangular, the slots 214a-f may be located at corners and / or edges.

  As shown, in this variation, each of the posts 220a, 220b, 220c is made from a pair of joined strips 222a, b, 222c, d, 222e, f, respectively. Each of the strips 222a, c, e has an inner surface 224a, c, e that contacts the inner surface 224b, d, f of the other strip 222b, d, f. Each strip 222a-f also has a longitudinal groove 226a-f along its respective inner edge 228a-f. When the longitudinal grooves 226a-f are aligned with each other, the reinforcing rods 232 are joined to form an internal channel in which they can be placed. In one variation, the reinforcing rod 232 reinforces the post 220 and may be a stainless steel rod. Since the reinforcing rod 232 is at least partially surrounded by the channel, it is protected from the corrosive solution used during the repair process. To ensure this protection, the strips 222 can be joined together by a conventional inert heat resistant sealant, such as a ceramic or epoxy sealant.

  As shown, each strip 222 has a longitudinal inner edge 228a-f facing the interior of the fixture 200, i.e., toward the substrate rack 10. The longitudinal edge 228 may be narrow (as shown) or wide (not shown). In one variation, corresponding bumpers 234a-c are received along longitudinal edges 222b to which longitudinal edges 228a-f are joined. By cupping the longitudinal inner edge 228, the corresponding bumper 234 is securely joined. In one variation, the bumper 234 can be attached by a stainless steel screw that is sealed with a high temperature silicone sealant. Therefore, repair or replacement of the bumper 234 is simplified. In other variations, the longitudinal edge 228 can be substantially straight and the corresponding bumper 234 can be attached to the longitudinal edge 228 with a chemically inert, heat resistant adhesive. In one variation, the corresponding bumper 234 is a polymer tubing, such as a low durometer rubber sealed at the open end, an elastomeric strip, or other chemically inert inert non-absorbent material strip. But you can. In other variations, the bumper 234 can include a ridge or other texture that secures the disk 20. In other variations, the bumper 234 may be an air bladder that holds and cushions the substrate rack 10. A bumper 234 corresponding to the fixture 200 having the post 220 secures, protects, and cushions the substrate rack 10, particularly the graphite disk 20. Once the board rack 10 is fixedly loaded into the transport fixture 200, the corresponding bumpers 234a-c on the posts 220a-c damage the component to the board rack 10 in any position, eg, horizontally. It can be arranged without.

  Referring to FIGS. 2 and 4, the top plate 210 a and the bottom plate 210 b are connected to each other by posts 220. At least one of the end plates 210a, 210b includes a set of hinge blocks 242 disposed around at least one of the slots 214 (FIG. 2). The hinge block 242 can be coupled to the end plates 210a, 210b or can be integrally formed. The set of hinge blocks 242 has facing sidewalls that include openings 241 that align with the holes 221 in the post 220. When aligned, a pin 244 is inserted into the opening 241 and the hole 221 to hold the post 220 to the plate 210a by the hinge block 242 as shown in FIG. In one variation, each pin 244 can be coupled to a handle 246 that allows the pin 244 to be inserted or easily removed and prevents the pin 244 from being inadvertently removed. Furthermore, the handle 246 can be secured to the reinforcement structure 240 by, for example, a reinforcement structure 240 and a nylon tie wrap (not shown) inserted into a hole in the handle 246. Similar to the end plates 210a, 210b and the post 220, the pins 244 and the handle 246 can also be made from a chemically inert heat resistant material, such as PTFE (Teflon). Preferably, the pin 244 is manufactured from Teflon and provides a low friction and low wear hinge shaft as described below.

  In one variation, if pin 244 connecting one end of post 220 to one end plate, eg, bottom end plate 210b, is removed, post 220 connects the other end of post 220 to top end plate 210a. The pin 244 acts as a hinge so that it can rotate around the connecting pin 244. Thereby, it opens up and can easily approach the inside of the fixing tool 200 for conveyance. One or both ends of the post 220 can be rotated in this manner. Further, one or more posts 220 can be rotated and the others are fixedly attached to end plates 210a, 210b.

  Since the transport fixture 200 is preferably made from a non-metallic, chemically inert, clean material, the substrate rack 10 can be placed directly into the transport fixture 200 from the deposition chamber. To facilitate this, simply remove the pins 244 that attach the post 220 to the top end plate 210a, and rotate the post 220 outward to place the substrate rack 10 at the bottom of the transport fixture 200. The ability to lower to end plate 210b allows one of the end plates, eg, the top end plate 210a, to be completely removed. The post 220 can then be closed and reattached to the top end plate 210a.

  In another modification of the transport fixture 200, the end plates 210 a and 210 b are respectively provided at the uppermost support frame 710 a at the top of the substrate rack 10 and at the bottom of the substrate rack 10 as shown in FIG. It is shaped as a bottom support frame 710b. Each support frame 710a, 710b includes a flat central hub 712 and a plurality of flat arms 714 extending radially from the center of the hub 712. The angle that occurs between two adjacent arms 714 depends on the number of flat arms 714. In one variation, three flat arms 714 are equally spaced at 120 ° from each other in a horizontal plane. Each arm 714 includes a slot 716 for receiving and securing a rigid post 220. Although not shown in FIG. 5, each arm 714 may also include the hinge block 242 that attaches the post 220 to the support arms 710a, 710b.

  The transport fixture 200 provides a rigid support so that the substrate rack 10 is not subjected to torsional forces or normal forces that may cause damage when the stack 10 is transported to and from the repair facility. give. Furthermore, since the transport fixture 200 is made of a chemically inert, non-metallic, heat resistant material, the transport fixture 200 can be placed in the cleaning solution along with the substrate rack 10 itself. It can be baked at high temperatures without damaging the acid bath or furnace. Accordingly, the transport fixture 200 can be used to protect the substrate rack 10 during the repair process until the substrate rack 10 is ready to be disassembled. In addition, after the substrate rack 10 components are dried and thoroughly cleaned and reassembled by a skilled technician, a transport fixture 200 is provided to transport the fully repaired and assembled substrate rack 10 to the customer. Can be reused. Since the board rack 10 is assembled and returned, the possibility of a researcher destroying the board rack 10 while attempting to reassemble the components is reduced.

  In one variation, the transport fixture 200 is disposed on the shell 800 to form a transport package 802 that further protects the transport fixture 200 and the substrate rack 10 during transport. In one embodiment, as shown in FIG. 6, the shell 800a comprises a first tray and a second tray 850, 860, in the form of a cylinder, and when assembled together, face each other and face each other between the cavities. Form. The shell 800a shown herein is merely an exemplary embodiment according to the present invention and should not be used to limit the scope of the invention. For example, the tray can take the form of a rectangular box or even a hemispherical dome. The trays 850, 860 are made from a material that is sufficiently rigid to withstand external shocks during transport. The trays 850, 860 can also include reinforcing features, such as ribs, to harden the structure. The trays 850, 860 preferably have smooth, elastic, non-granular surfaces that do not release individual particles when worn against the surface of the transport fixture 200. Preferably, the surfaces of the trays 850, 860 are continuous, unbroken, non-porous, and free of individual particles that may fall off when packing or unpacking the transport fixture 200. In one variation, for example, the smooth and resilient surfaces of trays 850, 860 can have an rms roughness of less than about 10 microinches. The surfaces of trays 850, 860 must also be cleanable so that contaminants can be wiped off before introducing shell 800a into the particle control environment.

  The assembled tray set 850, 860 serves as a free-standing container that surrounds the fixture 200 and substrate rack 10, and has built-in handles (not shown) for transporting the fixture 200 to a repair environment or directly to a clean room. You can even have it. The assembled set of trays 850, 860 can also be stored for some time in a sealed and stable environment clean room, only when the substrate rack 10 is needed for immediate use in the process chamber. Released, thus reducing any contamination of the substrate rack 10 in the trays 850,860.

  The trays 850, 860 can include continuous circumferential lips 852a, b that pass around the circumference of the trays 850,860. A seal gasket (not shown) is placed between the tray lips 852a, b to seal between the assembled trays 850,860 so that the substrate rack 10 and the transport fixture 200 are protected from contaminants. it can. Circumferential lips 852a, b reduce the length of gas seal required to seal the two trays 850,860. The circumferential lips 852a, b also allow the shell to be positioned vertically when lifting the top tray 850 to access the transport fixture 200 and rack 10 in the shell 800a. This variation is advantageous when the fixture 200 and the rack 10 need to be maintained in a vertical orientation when placed in or removed from the shell.

  Preferably, at least a portion of the shell 800a is made from a rigid material that is light transmissive to allow visual inspection of the substrate rack 10 held therein. Light transmissive as used in this description refers to a material that allows at least some wavelength of light to pass through a material, such as a transparent material, a translucent material, a cloudy material, or a partially opaque material. . For example, a suitable light transmissive material can have a visible light transmission percentage of at least about 20%. The shell 800a can also be a polished surface to enhance the clarity of the transmitted light and scene. The shell 800a can be made entirely from a light transmissive material, and only a portion of the shell can be made from a light transmissive material such as a window. The inspector must be able to visually inspect the contents inside the bottle without breaking and opening the seal. For example, in one variation, only one or more of the trays 850, 860 are made from a light transmissive material, but the entire trays 850, 860 can also be made from a light transmissive material. In addition, the shell 800a can include markings that indicate potential hazards associated with the type of contents and the opening through the shell 800a. Such an indication may be indicated on the inner surface of the light transmissive material of the shell 800a.

  Suitable light transmissive rigid materials are high density polyethylene, such as polyethylene terephthalate (PET), glycol modified PET (PETG), directional PET (O-PET), or polyethylene naphthalate (PEN) or their mutual or Heat setting thermoplastic polymers such as polymers based on blends with other resins. Preferably, the light transmissive rigid material softens when heated to form a mold such as polyethylene terephthalate glycol (PETG), eg, PAL-G sheet manufactured from Israel's Palram, Ramat, Yohanan A moldable thermoplastic material. The trays 850, 860 can be molded as a single unitary piece from a single blank sheet of thermoplastic material using conventional plastic molding techniques. Blank sheets can be thermoformed into heat setting thin wall trays using conventional thermoforming methods and equipment such as, for example, vacuum assist, air assist, mechanical plug assist, or a suitable mold. A single mold can also be used to manufacture the tray, the part of the forming tray can be cut off, and the cut tray forms a shell with three or more different parts as shown in FIG. Can be assembled for.

  Advantageously, the shell 800a can visually inspect the internal contents without opening the shell or breaking the seal. When the substrate rack 10 is damaged or chipped, the destruction can be detected immediately without opening the shell 800a at an intermediate transfer point like a warehouse in which parts are distributed and stored. It is desirable to inspect the state of the transport package 802 of the stack 10 contained and packaged prior to shipment without opening the contents of the shell and without contaminating it. Shell 800a is also newer in international transport across borders, without breaking the seal, in a potentially conflicting environment where the customs inspector eventually results in the stack 10 becoming waste at the end of the voyage. The contents can be inspected according to a stricter customs inspection. Shell 800a also allows for safe transport from a clean room to a repair facility, or vice versa, while maintaining good gas tightness from the outside environment.

  The shipping package 802 is used to surround the shell 800a (or any of the other shell variations described herein) upon shipment, for example, as shown in FIGS. 6, 12A and 12B. Hard casing 870 to be included. A casing 870 having a box 874 containing an internal foam block 876 has an internal shape or a notched shape that matches the external shape of the shell 800a as shown in FIG. A contoured interior foam block 876 can be made from individual blocks of clean room foam that are interconnected to form the required cut shape. Clean room foam is a strongly compressed sponge-like polyethylene foam material such as Zotefoam's “Plastazote LD-24” available from FP Technologies, Ventura, California. Clean room foams typically have an open porous structure with pores, for example 10-100 microns in size.

  Typically, the casing 870 is opened outside the clean room, and the shell 800a with the transport fixture 200 containing the packed stack 10 removed from the casing 870 is removed from the casing 870 and cleaned as necessary. Brought into the clean room. The gas trapped in the pores of the foam block 876 vents the clean room environment, the bonding layer between the foam blocks used to create the three-dimensional matrix can vent the gas, Since the contaminated particles can be generated, the transport package is not brought into the clean room as it is.

  Box 874 typically includes a top wall 877, a side wall 878, and a bottom wall 879, all made of a rigid material such as plastic or metal sheet. A suitable rigid plastic comprises, for example, a molded polypropylene casing from Hardigg Indus., South Difield, Massachusetts. The side walls 878, 879, 881 of the box 874 can also be reinforced with a metal end 883, for example edged with aluminum. Box 874 also has a handle 880 and a car 882 that can be adapted to transport the packaged components from the transport vehicle to a wafer manufacturing facility or refurbishment clean room as shown in FIGS. 12A and 12B. Can do.

  Other variations of the shell 800 will now be described. In one variation, the shell 800b includes lips 852a, b having grooves extending parallel to the vertical and horizontal axes as shown in FIG. The lateral lips 852a, b of the trays 850,860 have a plurality of holes 855 into which screws and other fasteners 856 can be inserted to securely hold the trays 850,860 together. The lateral lips 852a, b increase the contact area sealing the peripheral border because the combined length and width of the shell 800b is greater than that of its perimeter. Further, the lateral lips 852a, b can be taken out with the shell placed sideways, and can be handled from the side by the internal fixing device 200 and the rack 10.

  Referring to FIG. 8, another embodiment of the shell 800 c that holds the fixture 200 and the rack 10 includes three interlock trays including an upper tray, an intermediate tray, and a bottom tray that surround the fixture 200. Each of the trays 901-903 includes a lip 910 that couples portions of 901-903 together through fasteners (not shown). In this variation, at least one of the surrounding lips 910 also functions as a handle for lifting and moving the shell 800c along with the internal contents. The double-opened shell 800c is used to open the top and can easily handle only the contents inside the shell. The top may also have raised reinforcing strips that act as legs holding the shell.

  Other variations of the shell 800d shown in FIGS. 9-11 also have three trays 952, 954, 956, which are combined in another manner. Referring to FIG. 9, the top tray 952 has a flat outer lip 958 and is combined with an inner lip 960 of the second tray 954 that slides into the outer lip 958 to form a hermetic seal. Therefore, the upper joint portion of the shell 800d is hidden by the lip extending outward. The second tray 954 and the third tray 956 are joined by lips 962 and 964, which extend outwardly and laterally from the lip of the shell and provide curved edges for holding and moving the shell, respectively. Parts 962a and 964a. The outwardly extending lips 962, 964 allow the shell to be lifted simultaneously by at least three people as required by current OSHA regulations for packages weighing over 75 pounds. Seals are formed at the flat inner portions 962b and 964b of the lips 962, 964, respectively, using, for example, six quarter turn fasteners 951 disposed along the lip at 60 ° intervals. In addition, two reinforcing buckets 953a, b made of the same material as shell 800d can be placed around the top and bottom of shell 800d to provide extra strength in these areas. Further, the trays 952, 954, 956 can all be manufactured from the same mold so as to save manufacturing costs in the part where the lip is cut to form three different shapes as shown.

  In other variations, as shown in FIG. 10B, the shell can also have a concave cup portion 974 that houses a drain port coupling 966. In this variation, the concave cup portion 974 is sized to fit the discharge port 966 such that the top surface 975 of the coupling portion 966 is level with the top surface 976 of the top wall 967. The concave cup portion 974 protects the coupling portion 966 and prevents accidental collision-type damage during transportation of the shell 200. The concave cup portion is made by molding the cup portion simultaneously with the shell in conventional mold assembly. In this modification, a first reinforcing plate 972 having a clamp flange 969 mounted on the bottom surface 977 of the uppermost wall 967 and a second reinforcing plate 973 mounted on the uppermost surface 976 of the upper wall 967 of the uppermost tray 952 are combined. Has been.

  The discharge port coupling portion 966 is located on the uppermost wall 967 of the uppermost tray 952. The exhaust port coupling 966 is large enough to allow the insertion of a conventional Dräger gas extraction tube that can be used, for example, to inspect the gas in the shell to detect toxic gases. However, it is not too large to project far from the top wall 967. FIG. 10a shows (i) assembly of adapter 968, such as NW-25 adapter, (ii) O-ring seal with stainless steel ring, (iii) plate 970 with no surface, (iv) top of assembly. It has a clamp shell 971 that engages like a shell around the top, all of which are available from Nor-Cal products of Eureka, California. The exhaust port coupling 966 can pump air or other gas in the shell by connecting a flange to a typical “house” exhaust cleaning system in wafer manufacturing and retrofit equipment. The clamp flange 969 is attached to the top wall 967 of the top tray 952 internally and is combined with one or more reinforcing plates 972, 973 to be coupled. The internally attached plates 972, 973 may be thick and strong to enhance the bond, for example, a round plate of about 2-20 mm in thickness and the same material as the shell (eg, polyethylene terephthalate glycol). The various components of the exhaust port coupling 966 can be coupled together and can be coupled to the flange 969 to form a gas tight with an adhesive such as McMaster Carr 517A2 PETG adhesive.

  The purge gas coupling 980 is disposed on the side wall 982 of the bottom tray 956. The purge gas coupling unit 980 can inject purge gas into the shell from an outside purge gas source (not shown). A typical purge gas includes a non-reactive gas, such as nitrogen or argon, and serves to provide an inert or non-reactive environment within the shell 200 to protect the rack 10 from exposure to the external environment. FIG. 10 shows (i) an anti-rotation bracket 981 that cannot be easily removed in a normal operation and attached with a screw 983, (ii) a conventional VCR type fitting 984, (iii) a face seal off plate and a gasket 986, (vi ) With nuts 988 to hold the assembly together, all of which are available from Swagelok, Solon, Ohio. The internal gas deflection plate 992 is configured to deflect the purge gas flow downward toward the bottom of the interior of the shell 800d as indicated by the arrow 994 to prevent the purge gas from hitting the fixture 200 or the rack 10 directly. I am doing. A purge gas sprayed directly onto these parts can expel particles and loose fragile coatings. A reinforcing plate 994 attached to the outside is used to enhance the assembly. Various components can be sealed with the aforementioned adhesives.

  Although the present invention has been described with reference to certain preferred forms thereof, other variations are possible. For example, the transport package 802, transport fixture 200 can be used in other types of applications as will be apparent to those skilled in the art, for example, to transport other fragile processing components. Other configurations of the transport fixture 200 can be used to match the shape and size of the processing component. For example, the end plates 210a and 210b may be formed into other shapes such as a square, hexagonal, or round plate or a frame other than a triangular or frame shape. The shell 800 can also be made from other materials and can have a small window of transparent material surrounded by an opaque material. Case 870 can also have other shapes, such as a cylindrical shape, and can be constructed of steel or other materials. Accordingly, the spirit and scope of the appended utility model registration request should not be limited to the description of the preferred variations contained herein.

FIG. 1 (Prior Art) is a perspective view of an embodiment of a substrate rack. FIG. 2 is a perspective view of the embodiment of the substrate rack transport fixture of FIG. 3 is a perspective view of the transport fixture of FIG. 2 surrounding the substrate rack of FIG. 4 is an exploded perspective view of the carrying fixture of FIG. FIG. 5 is a perspective view of an embodiment of a transport fixture according to another modification of the present invention. FIG. 6 is a perspective view showing an embodiment of a shell surrounding a transport fixture and a hard casing having a foam interior that receives the shell. FIG. 7 is a perspective view showing details of a fastener used to join a shell tray with another embodiment of the illustrated shell surrounding a transport fixture. FIG. 8 is a perspective view of yet another embodiment of the illustrated shell surrounding the transport fixture. FIG. 9 is a cross-sectional side view of an embodiment of a shell having an exhaust port and a purge gas port. 10A is a side cross-sectional view of the exhaust port joint of the shell of FIG. FIG. 10B is a side cross-sectional view of another embodiment of an exhaust port joint. 11 is a cross-sectional side view of the purge gas port coupling of the shell of FIG. 12A and 12B are perspective side views of a hard casing suitable for carrying a shell. FIG. 12B is a perspective side view of a hard casing suitable for carrying a shell.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Substrate rack, 20 ... Graphite disk, 30 ... Spacer, 40 ... Metal rod, 50 ... Base plate, 60 ... Top plate, 200 ... Transfer fixture, 210 ... End plate, 212 ... End part, 214 ... Slot, 220 ... strut, 221 ... hole, 222 ... strip, 224 ... inner surface, 226 ... groove, 228 ... edge, 230 ... skid plate, 232 ... reinforcing rod, 234 ... bumper, 240 ... reinforcing structure, 242 ... hinge block, 243 ... Hole, 244 ... Pin, 246 ... Handle, 250 ... Opening, 710 ... Support frame, 712 ... Hub, 714 ... Arm, 716 ... Slot, 800 ... Shell, 802 ... Transport package, 850 ... Tray, 860 ... Tray, 852 ... Lip, 870 ... Casing, 874 ... Box, 8 6 ... Foam block, 877 ... Top wall, 878 ... Side wall, 879 ... Bottom wall, 880 ... Handle, 882 ... Wheel, 883 ... Metal end, 901 ... Top tray, 902 ... Center tray, 903 ... Bottom tray, 907 ... strip, 910 ... lip, 952 ... top tray, 954 ... second tray, 956 ... third tray, 958 ... external lip, 960 ... internal lip, 962 ... lip, 964 ... lip, 966 ... exhaust port joint, 967 ... Top wall, 969 ... Clamp flange, 970 ... Blank off plate, 972 ... Reinforcement plate, 973 ... Reinforcement plate, 974 ... Recessed cup portion, 975 ... Top surface, 977 ... Bottom surface, 980 ... Purge gas joint, 982 ... Side wall 983 ... Screws, 984 ... Fittings, 986 ... Gaskets, 988 ... Nuts, 992 Gas deflection plate, 994 ... reinforcement plate.

Claims (14)

A transport package for transporting a substrate processing rack,
(A) a container comprising a hard casing;
(B) A foam insert inside the container, wherein the foam insert is formed to match the outer shape of a transport shell having a cylindrical shape with outward and lateral lips around it The foam insert comprising a notch having an internal shape; and
Comprising the package.   The package of claim 1, wherein the container comprises a rectangular box.   The package of claim 1, wherein the hard casing comprises plastic or metal.   The package of claim 1, wherein the foam insert has a plurality of foam parts bonded together.   The package of claim 1, wherein the foam insert has pores sized from about 10 microns to about 100 microns.   A transport shell having a pair of opposing trays, each tray having a closed end having a first circumferential lip and an open end, the tray defining a cavity inside the shell. The package according to claim 1, further comprising the transfer shell joined at a peripheral lip.   The package of claim 6, wherein the tray comprises a cylinder.   The package of claim 6, wherein at least a portion of the tray comprises a light transmissive material.   The package of claim 6, wherein a circumferential lip extends laterally outwardly from the shell. A fixture inside the cavity of the shell,
(I) a top end plate and a bottom end plate;
(Ii) a plurality of struts for attaching the top end plate to the bottom end plate, the struts spaced apart to confine the substrate rack therebetween, each strut having a longitudinal inner edge; The struts;
(Iii) a plurality of corresponding bumpers respectively coupled to the longitudinal inner edges of the columns;
The package of claim 6, further comprising the fixture comprising:   The package of claim 10, further comprising a first circumferential lip and a second circumferential lip, forming a seal therebetween.   The package of claim 10, wherein the shell has an exhaust port coupling.   The package of claim 10, wherein the shell has a purge gas coupling.   11. The package of claim 10, wherein the top end plate and the bottom end plate of the fixture are triangular and have a tip, and the strut is coupled to the tip of the triangular plate.

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