JP3127074B2 - Magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head incorporated in a magnetic recording device such as a VTR or a computer for recording and reproducing information, a soft magnetic thin film, a method of introducing perpendicular magnetic anisotropy to the soft magnetic thin film, and a stripe. The present invention relates to a method of forming a magnetic domain.

[0002]

2. Description of the Related Art In recent years, in the field of magnetic recording, a high-performance magnetic head capable of coping with the recording medium has been developed while increasing the coercive force of the recording medium in order to further increase the recording density. In order to increase the magnetic recording density, it is preferable to reduce the track width and gap length of the magnetic head as much as possible, and to reduce the coercive force while increasing the saturation magnetic flux density and the magnetic permeability. From such a viewpoint, a metal-in-gap type (MIG) having a structure in which a metal magnetic film is disposed near a magnetic gap of a magnetic core formed of ferrite or the like.
Type) magnetic heads have been put to practical use.

In order to reduce the track width and increase the specific resistance to reduce the eddy current loss and to improve the magnetic characteristics in a high frequency band, a magnetic head called a laminated magnetic head has been developed. The laminated magnetic head is configured such that a soft magnetic thin film is formed on a substrate by a film forming method such as sputtering or vapor deposition, and then the substrate is adhered to the soft magnetic thin film again and the magnetic core is sandwiched between the substrates. Thus, the thickness of the formed soft magnetic thin film directly becomes the track width. Therefore, it is easy to narrow the track, and it is possible to improve the recording density and prevent interference with an adjacent track. Further, since the magnetic circuit forming portion is a soft magnetic thin film having a thickness of several μm, eddy current loss can be reduced, and the performance of the magnetic head in a high frequency band can be improved.

The present inventors have proposed a soft magnetic thin film suitable for use in the above-mentioned MIG-type magnetic head or laminated magnetic head, as a soft magnetic thin film having a composition of T ₁₀₀ -abcd X _a M _b Z _c Q _d . We have developed a thin film and have applied for a patent before. In this composition formula, T is one or two of Fe and Co, X is one or two of Si and Al, and M is Ti, Zr, Hf, V, Nb, Ta, Mo, and W. 1
Species or two or more, Z is one or two of C and N,
Q is Cr, Re, Ru, Rh, Ni, Pd, Pt, Au
One or two or more of these, and the composition ratios a, b, c,
d is atomic%, 0 ≦ a ≦ 25, 1 ≦ b ≦ 15, 0.5 ≦ c
≦ 20 and 0 ≦ d ≦ 10.
Further, the present inventors, as a soft magnetic thin film that can be used for similar _{purposes, T 100-bcdef Si e Al} f M b Z c Q d
We have developed a soft magnetic alloy with the following composition and filed a patent application first. In this composition formula, T is one or two of Fe and Co, and M is Ti, Zr, Hf, V, Nb, Ta,
One or more of Mo and W, Z is one or two of N, and Q is Cr, Re, Ru, Rh, Ni,
One or more of Pd, Pt, and Au are shown, and the composition ratios b, c, d, e, and f are atomic%, and 8 ≦ e ≦ 15;
0.5 ≦ f ≦ 10, 1 ≦ b ≦ 7, 0.5 ≦ c ≦ 10, 0 ≦
It is assumed that the relationship d ≦ 10 is satisfied.

[0005] Soft magnetic thin films of these compositions are formed by a film forming method such as sputtering to be in an amorphous state, and are subjected to a heat treatment to form fine crystal grains of Fe on the order of several nm to several tens nm. The deposited material shows higher saturation magnetic flux density and superior permeability than conventional soft magnetic thin films such as Sendust, and has a low coercive force, so it has excellent soft magnetic properties and is extremely excellent for magnetic heads. It was.

[0006]

FIG. 20 shows an example of the configuration of a laminated magnetic head to which the soft magnetic thin film is applied. The magnetic head H of this example is configured by joining magnetic core halves 3 and 4 sandwiching a soft magnetic thin film 2 between substrates 1 and 1. A magnetic gap G is formed between the soft magnetic thin films 2 of the magnetic core half 4. However, as a result of the study of the present inventors, the case where the soft magnetic thin film having the above composition is applied to the magnetic head H having the configuration shown in FIG.
It became clear that macro induced magnetic anisotropy is likely to occur as a soft magnetic thin film, which causes a problem that the magnetic characteristics of the magnetic head vary. The soft magnetic thin film on which the fine crystals are deposited has a uniaxial anisotropy partially in a small region (part of the magnetic path) of the magnetic head core without intentionally giving anisotropy by a method such as annealing in a magnetic field. It turned out that it was often attached. According to this, when the easy axis of magnetization of a certain region is substantially perpendicular to the direction of the magnetic path in the soft magnetic thin film, the magnetic permeability of that portion increases,
When they are substantially parallel, the magnetic permeability becomes extremely low.

That is, the soft magnetic characteristics of the magnetic head vary. This state will be described with reference to the drawings.
When the easy axis of magnetization is oriented in the left and right direction of the magnetic head H in the state shown in FIG. 20B, a portion having a low magnetic permeability is generated in a hatched portion in FIG. 20A, and the magnetic state in the state shown in FIG. When the easy axis of magnetization is oriented in the vertical direction of the head H ′, FIG.
A portion having a low magnetic permeability is generated in a portion indicated by oblique lines of 0 (b). Generally, in a magnetic head, when a portion having a low magnetic permeability is generated in a part of a magnetic path, the magnetic permeability of the entire magnetic head is reduced by the portion having a low magnetic permeability. In a magnetic head having a thin film, there is a problem that the soft magnetic thin film exhibits only soft magnetic characteristics lower than the inherent soft magnetic characteristics.

The present inventors have analyzed the magnetic domain structure of the soft magnetic thin film in order to investigate the cause of the decrease in the magnetic permeability of the magnetic head, and have obtained the following knowledge.
First, as described above, a soft magnetic thin film in which the magnetic permeability in the easy axis direction is extremely low has a spontaneous magnetization in the film parallel to the film surface and mainly has a 180 ° domain wall as shown in FIG. It has a large magnetic domain structure as shown in FIG. When two magnetic domains are formed in the soft magnetic thin film 6 formed on the base member 5 by the magnetic domain walls 7 parallel to the easy axis direction, when a small AC magnetic field is applied in the easy axis direction to be excited, When the frequency is low, the domain wall 7 moves (vibrates) to cause a change in the magnetization in the excitation direction and the magnetic permeability increases. However, if the magnetic field is to be excited at a high frequency of several MHz used in an actual magnetic head, Domain wall movement is less likely to occur due to abnormal eddy current loss and the like, resulting in a decrease in magnetic permeability. On the other hand, in the direction of the hard axis perpendicular to the easy axis, the spontaneous magnetization inside the magnetic domain rotates by a small angle, so that it shows high permeability even at a high frequency.

As described above, when a magnetic head is formed by using a soft magnetic thin film having fine crystals, a portion of a magnetic circuit is transparent regardless of which direction the easy axis of magnetization of the soft magnetic thin film is formed. There is a possibility that a portion having a low magnetic susceptibility is generated, and thereby the magnetic permeability of the entire magnetic head is reduced. Also, even if an attempt is made to manufacture a magnetic head by controlling the direction of the axis of easy magnetization to avoid a decrease in magnetic permeability,
When a magnetic head is manufactured by using this kind of soft magnetic thin film, the magnetic core halves are bonded to each other with a welding glass.
Since the soft magnetic thin film is heated to (00 ° C.), the direction of the easy axis of magnetization of the soft magnetic thin film may vary due to the heating, and the magnetic permeability may be reduced due to the influence.

The present invention has been made in view of the above circumstances, and is directed to a magnetic head including a soft magnetic thin film having a fine crystalline phase or an amorphous phase and having a uniaxial anisotropy in a film plane. To provide a high-frequency magnetic permeability in all directions with good reproducibility, and also provide a magnetic head and a soft magnetic thin film having a high saturation magnetic flux density, and a method of introducing perpendicular magnetic anisotropy of the soft magnetic thin film and stripes. It is an object of the present invention to provide a method for forming a magnetic domain.

[0011]

According to a first aspect of the present invention, there is provided a semiconductor device comprising one of Fe and Co or
Fine crystal grains comprising two kinds and having an average crystal grain size of 40 nm or less, and Ti, Zr, H having an average crystal grain size of 10 nm or less.
one or two of f, V, Nb, Ta, Mo, W
Mainly carbide, nitride or boride of the above elements
A magnetic head having a structure in which a soft magnetic thin film is formed and the soft magnetic thin film is sandwiched between substrates, wherein the soft magnetic thin film has a stripe magnetic domain structure, and the stripe magnetic domain structure is perpendicular to a film surface. such Ri Na are formed in stripes by a set of magnetic domains having a spontaneous magnetization which is inclined along the direction, the magnetic field in the film plane of the soft magnetic thin film
Is applied to the magnetization hysteresis curve with a magnetic field near the coercive force.
The rise curve shows a sharp change in the magnetization of
Approximately constant inclination angle up to near the magnetization saturation point following the curve
And the transition curve is included in the magnetization history curve.
The decay curve from the magnetization saturation point to the remanent magnetization is the slope curve.
The decay curve and the slope curve are formed with almost the same slope as the line.
Are partially matched, and the soft magnetic thin film is perpendicular to the film surface.
Magnetic anisotropic magnetic energy of 50 to 1000 J / m ³
The range is characterized by.

According to a second aspect of the present invention, there is provided a fine crystal grain comprising one or two of Fe and Co and having an average crystal grain size of 40 nm or less;
Ti, Zr, Hf, V, Nb, T having a particle size of 10 nm or less
Carbonization of one or more of a, Mo and W
Magnetic thin film mainly composed of nitride, nitride or boride
A magnetic head having a structure in which the soft magnetic thin film is sandwiched between substrates, wherein the soft magnetic thin film has a stripe magnetic domain structure, and the stripe magnetic domain structure extends along a direction perpendicular to the film surface. The soft magnetic thin film is formed in a stripe shape by a set of magnetic domains having a tilted spontaneous magnetization. The magnetization hysteresis curve when a magnetic field is applied to the surface of the soft magnetic thin film shows a sharp change in magnetization at a magnetic field near the coercive force. such a rise curve, Ri name contains an inclined curve transition at a substantially constant inclination angle to the vicinity magnetization saturation point following this rising curve, from the magnetization saturation point of magnetization hysteresis loop
The attenuation curve leading to the remanent magnetization has almost the same slope as the slope curve.
The attenuation curve and the slope curve partially match.
From the surface of the spontaneous magnetization in the soft magnetic thin film
Has an average rising angle in the range of 10 to 70 [deg .].

According to a third aspect of the present invention, in order to solve the above problem, the structure of the soft magnetic thin film is oriented in a direction in which the soft magnetic thin film stands on the film surface.
And a columnar structure extending in the direction.

According to a fourth aspect of the present invention, in order to solve the above-mentioned problem, the internal stress of the soft magnetic thin film is a compressive stress,
And perpendicular magnetic anisotropy is introduced by making magnetostriction positive
It is characterized by being done.

According to a fifth aspect of the present invention, in order to solve the above problem, the internal stress of the soft magnetic thin film is set to a tensile stress,
And perpendicular magnetic anisotropy is introduced by making the magnetostriction negative.
It is characterized by being done.

According to a sixth aspect of the present invention, in order to solve the above-mentioned problem, the invention comprises one or two of Fe and Co.
A fine crystal grain having a crystal grain size of 40 nm or less;
Ti, Zr, Hf, V, Nb, T having a particle size of 10 nm or less
Carbonization of one or more of a, Mo and W
Magnetic thin film mainly composed of nitride, nitride or boride
And a magnetic head having a structure in which the soft magnetic thin film is sandwiched between substrates.
Wherein the soft magnetic thin film has a stripe magnetic domain structure.
The stripe magnetic domain structure is tilted along the direction perpendicular to the film surface.
Formed by a set of magnetic domains with spontaneous magnetization
When a magnetic field is applied in the plane of the soft magnetic thin film.
The magnetization hysteresis curve shows a sharp change in magnetization at a magnetic field near the coercive force.
A steep rise curve and a magnetic
Transition with almost constant inclination angle near the saturation point
From the magnetization saturation point of the magnetization hysteresis curve.
The decay curve leading to the magnetization magnetization has almost the same slope as the above-mentioned slope curve.
And the decay curve and the slope curve partially coincide with each other.
And a magnetic anisotropic magnetic field perpendicular to the film surface of the soft magnetic thin film.
Energy is in the range of 50 to 1000 J / m ³ ,
The soft magnetic thin film has a composition represented by the following formula:
Magnetic head. T _100-abcd X _a M _b Z _c Q _d (where T is one or two of Fe and Co, and X is S
i, one or two of Al, M is Ti, Zr, H
one or more of f, V, Nb, Ta, Mo, W
Above, Z is one or two of C and N, Q is Cr, R
e, Ru, Rh, Ni, Pd, Pt, Au
Or two or more kinds, and the composition ratios a, b, c, and d are in atomic%.
0 ≦ a ≦ 25, 1 ≦ b ≦ 15, 0.5 ≦ c ≦ 20, 0 ≦
It is assumed that the relationship d ≦ 10 is satisfied. )

According to a seventh aspect of the present invention, in order to solve the above-mentioned problems, an average of one or two of Fe and Co is used.
A fine crystal grain having a crystal grain size of 40 nm or less;
Ti, Zr, Hf, V, Nb, T having a particle size of 10 nm or less
Carbonization of one or more of a, Mo and W
Magnetic thin film mainly composed of nitride, nitride or boride
And a magnetic head having a structure in which the soft magnetic thin film is sandwiched between substrates.
Wherein the soft magnetic thin film has a stripe magnetic domain structure.
The stripe magnetic domain structure is tilted along the direction perpendicular to the film surface.
Formed by a set of magnetic domains with spontaneous magnetization
When a magnetic field is applied in the plane of the soft magnetic thin film.
The magnetization hysteresis curve shows a sharp change in magnetization at a magnetic field near the coercive force.
A steep rise curve and a magnetic
Transition with almost constant inclination angle near the saturation point
From the magnetization saturation point of the magnetization hysteresis curve.
The decay curve leading to the magnetization magnetization has almost the same slope as the above-mentioned slope curve.
And the decay curve and the slope curve partially coincide with each other.
And a magnetic anisotropic magnetic field perpendicular to the film surface of the soft magnetic thin film.
Energy is in the range of 50 to 1000 J / m ³ ,
The soft magnetic thin film has a composition represented by the following formula:
Magnetic head. _{T 100-bcdef Si e Al f} M b Z c Q d ( where, T is Fe, 1 kind or two kinds of Co, M is T
one of i, Zr, Hf, V, Nb, Ta, Mo, W
Or two or more, Z is one or two of C and N, Q
Of Cr, Re, Ru, Rh, Ni, Pd, Pt, Au
One or more of them are shown, and the composition ratios b, c, d,
e and f are in atomic%, 8 ≦ e ≦ 15, 0.5 ≦ f ≦ 10, 1
≦ b ≦ 7, 0.5 ≦ c ≦ 10, 0 ≦ d ≦ 10
Be satisfied.

According to an eighth aspect of the present invention, in order to solve the above-mentioned problems, the structure of the soft magnetic thin film is oriented in a direction in which the soft magnetic thin film stands on the film surface.
And a columnar structure extending in the direction.

According to a ninth aspect of the present invention, in order to solve the above problem, the internal stress of the soft magnetic thin film is set to a compressive stress,
And perpendicular magnetic anisotropy is introduced by making magnetostriction positive
It is characterized by being done .

According to a tenth aspect of the present invention, in order to solve the above problem, the internal stress of the soft magnetic thin film is set to a tensile stress.
And by setting the magnetostriction to be negative, the perpendicular magnetic anisotropy is reduced.
It is characterized by being introduced .

[0021]

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[0043]

The present inventors have applied a soft magnetic thin film having an amorphous or fine crystal, which was previously applied for a patent, to magnetic heads of various configurations, and as a result of repeated studies, have found that the soft magnetic thin film has a stripe magnetic domain structure. Thus, it has been found that an effect of improving the magnetic permeability can be obtained even with a magnetic head using a soft magnetic thin film in which uniaxial anisotropy is easily induced.

The stripe magnetic domain structure is such that magnetic domains exhibiting spontaneous magnetization in a direction rising to some extent from a direction parallel to the film surface and magnetic domains exhibiting spontaneous magnetization in a direction falling to some extent from a direction parallel to the film surface alternately. If this magnetic domain structure is adopted, a small AC magnetic field is applied in the direction of the easy axis of magnetization (the direction parallel to the spontaneous magnetization, for example, the EA direction in FIG. 3A). Even if it does, the spontaneous magnetization of each magnetic domain oscillates in the vertical direction (for example, in the direction perpendicular to the film surface), thereby exhibiting high magnetic permeability. On the other hand, in the hard axis direction perpendicular to the above-mentioned direction (direction perpendicular to the spontaneous magnetization, for example, the HA direction in FIG. 3A), the spontaneous magnetization in the magnetic domain is rotated by a small angle, so that it is high even in a high frequency range. Indicates the magnetic permeability.

In the striped magnetic domain structure, if the perpendicular anisotropy of the spontaneous magnetization of each magnetic domain is too large, the coercive force becomes large, which may cause magnetization of the magnetic head or the like. Is preferred. Therefore, the perpendicular anisotropy energy is set in the range of 50 to 1000 J / m ³ ,
It is preferable that the rising angle of spontaneous magnetization be 10 to 70 °. Further, in order to obtain such a stripe magnetic domain structure,
It is preferable to have a columnar structure in which columnar bodies that extend in a direction erecting on the film surface by promoting tissue growth in a direction erecting with respect to the film surface, for example, in a vertical direction, for example, a vertical direction.
A structure in which pillars are gathered as a structure of the soft magnetic thin film, and for example, O, N, H, C,
By using a structure in which an impurity element such as S or B, or a carbide, nitride or boride is interposed, magnetic anisotropy in a direction perpendicular to the film surface can be easily imparted. When the soft magnetic thin film is mainly composed of amorphous, the columnar body is composed of an amorphous phase. In addition, perpendicular magnetic anisotropy can be imparted by making the internal stress of the soft magnetic thin film a compressive stress and making the magnetostriction positive, and perpendicular magnetic anisotropy by making the internal stress a tensile stress and making the magnetostriction negative. Can be granted.

Hereinafter, the present invention will be described in more detail. FIG. 1 shows an example of a structure in which a magnetic head according to the present invention is applied to a magnetic head for a hard disk drive. FIG.
The magnetic head 10 shown in FIG. 1 is roughly composed of a slider 14 on which flying rails 16 and 16 are formed, a core portion 18 formed at one end of one of the flying rails 16, and a magnetic core 20. Assuming that the base 14 and the core 18 are bases, the magnetic core 20 is interposed between these bases.

FIG. 2 shows an enlargement of the portion A in FIG. A soft magnetic thin film 20 ′ is sandwiched between a base 14 ′ and a base 14 ″ which is also a part of the slider 14, and a soft magnetic thin film 20 ′ is also sandwiched between a base 18 ′ and a base 18 ″ which is also a part of the core 18. The magnetic core 20 is formed by a soft magnetic alloy film 20 ′ and a soft magnetic thin film 20 ″. A non-magnetic layer is interposed between the slider 14 and the core part 18, and the magnetic core 20 is A gap 22 is formed.Furthermore, between one surface of the magnetic core 20 and the bases 14 ″ and 18 ″,
A laminated glass 24 for joining the magnetic core 20 and the bases 14 ″, 18 ″ is interposed. Furthermore, although not shown, a coil is wound around the core portion 18 to form a magnetic head.

In the magnetic head 10, the soft magnetic thin films 20 ′ and 20 ″ have a body-centered cubic structure containing Fe or Co as a main component and have an average crystal grain size of 40 nm or less. Ti, Zr deposited at the grain boundaries of the crystal,
A structure comprising carbide, nitride or boride of one or more of Hf, V, Nb, Ta, Mo and W, or a mixture of this structure and an amorphous phase It consists of a configuration.

It is preferable to use the soft magnetic thin film having the following composition formula. T _100-abcd X _a M _b Z _c Q _d where T is one or two of Fe and Co, and X is S
i, one or two of Al, M is Ti, Zr, H
one or more of f, V, Nb, Ta, Mo, W, Z is one or two of C and N, Q is Cr, R
e, Ru, Rh, Ni, Pd, Pt, and Au, which represent one or more of them, and the composition ratios a, b, c, and d are atomic%.
Where 0 ≦ a ≦ 25, 1 ≦ b ≦ 15, 0.5 ≦ c ≦ 20,
It is assumed that the relationship 0 ≦ d ≦ 10 is satisfied. Further, the soft magnetic alloy thin film having the following composition formula can also be used. _{T 100-bcdef Si e Al f} M
_b Z _c Q _d where T is one or two of Fe and Co, and M is T
one or more of i, Zr, Hf, V, Nb, Ta, Mo, W; Z is one or two of C and N;
Represents one or more of Cr, Re, Ru, Rh, Ni, Pd, Pt, and Au, and has a composition ratio b, c, d,
e and f are atomic%, 8 ≦ e ≦ 15, 0.5 ≦ f ≦ 10,
It is assumed that the following relationships are satisfied: 1 ≦ b ≦ 7, 0.5 ≦ c ≦ 10, and 0 ≦ d ≦ 10.

In the soft magnetic thin film having the above composition, Fe and C
o is a main component and is an element which bears magnetism. The nonmagnetic particles made of the carbide, nitride or boride of the element M are F
This has the effect of suppressing the growth and coarsening of crystals containing e or Co as a main component and improving the heat resistance of soft magnetic characteristics. Further, it has an effect of making it easy to become amorphous at the time of film formation such as sputtering. In order to obtain these effects, the addition amount is 1 atomic%.
It is desirable that the content be more than 15 atomic%, but it is not preferable because the saturation magnetic flux density Bs is remarkably reduced.

C or N combines with the element M to form carbide or nitride. Similarly, it has the effect of making it easy to become amorphous during sputtering. It is preferable that the soft magnetic thin film is amorphous after the sputtering, because a uniform fine crystal can be easily obtained at a later heat treatment. In order to obtain these effects, the addition amount is preferably 0.5 atomic% or more. However, if it exceeds 20 atomic%, the saturation magnetic flux density Bs is remarkably reduced, and the soft magnetic properties are undesirably reduced.

The addition of Al in the element X has the effect of improving _Al : environmental resistance. _Al : Dissolves in the crystal of Fe and has the effect of increasing the specific resistance. _Al : has the effect of slowing the growth of crystal grains, reducing the magnetocrystalline anisotropy energy, maintaining excellent soft magnetic properties up to high temperatures, and raising the heat resistant temperature. The added amount of _Al is preferably at least 0.5 atomic% in order to exert the effect of _Al . However, if larger than 10 atomic%, only the magnetostriction lambda _s is increased, and because also it decreases the saturation magnetic flux density Bs undesirably.

In the element X, Si has the effect of reducing the magnetostriction λ _s that increases due to the addition of _Si : Si . _Si : has the effect of making the soft magnetic thin film amorphous during sputtering. Therefore, in order to make the soft magnetic thin film amorphous easily, conventionally, a large amount of carbide or nitride was contained.However, the content of carbide or nitride can be reduced, and the saturation by carbide or nitride can be reduced. A decrease in magnetic flux density can be suppressed. _Si : Si is dissolved in the Fe crystal and has the effect of increasing the specific resistance. _Si : has the effect of slowing down the growth of crystal grains, lowering the magnetocrystalline anisotropic energy and raising the heat resistant temperature of soft magnetic properties.

The addition amount of _Si is preferably 0.5 atomic% or more in order to exert the above-mentioned effects of _Si to _Si . However, if it exceeds 15 atomic%, the saturation magnetic flux density Bs decreases, which is not preferable. Also, when Si and Al are simultaneously added in combination, the magnetostriction λs is reduced to 0.
+ 3.0 × 10 ⁻⁶ , and at the same time, the environmental resistance can be improved.

In addition, unavoidable impurities such as H, O, and S can be regarded as having the same composition as the soft magnetic alloy of the present invention even if they are contained to such an extent that desired characteristics are not deteriorated. is there.

Next, as shown in FIG. 3, the soft magnetic thin film 20 'is composed of a set of many elongated magnetic domains adjacent to each other via substantially parallel magnetic domain walls 20a. It has a spontaneous magnetization parallel to the domain wall 20a and oriented in a predetermined direction, and a plurality of other magnetic domains are aligned.
It has a spontaneous magnetization parallel to a and in a direction opposite to the above direction, and keeps the magnetostatic energy as a whole low.
Further, in a plurality of magnetic domains in which the directions of spontaneous magnetization are aligned, the difference between the direction of spontaneous magnetization for each adjacent magnetic domain is upward or downward along a plane perpendicular to the film surface. Have. The directions of spontaneous magnetization in adjacent magnetic domains are as shown in FIGS. 3 (b) and 3 (c).
As shown in FIG. 3C, magnetic domains having spontaneous magnetization directed obliquely upward are indicated by solid arrows, and magnetic domains having easy axes of magnetization directed obliquely downward are indicated by chain-line arrows.

With such a striped magnetic domain structure, of course, excellent magnetic permeability is exhibited in the hard axis direction (HA direction in FIG. 3A), but in the easy axis direction (FIG. 3A). EA direction)
However, it shows high magnetic permeability. This is because when a magnetic domain having spontaneous magnetization rising obliquely upward as shown in FIG. 4 is excited by applying a small AC magnetic field in a direction parallel to the stripes in the film plane (the direction of the easy axis of magnetization), This is due to the fact that the magnetization that rises upward swings in the vertical direction, whereby a sufficient change in the magnetization in the excitation direction is obtained, and as a result, a high magnetic permeability is obtained. On the other hand, in the direction of the hard axis perpendicular to this, the magnetization inside the magnetic domain rotates by a small angle, so that it shows high magnetic permeability even at a high frequency as in the conventional case. Therefore, high magnetic permeability can be obtained in any direction along the film surface.

By the way, the spontaneous magnetization having an upward direction and the downward spontaneous magnetization alternately appear between adjacent magnetic domains because, as shown in FIG. Since the free magnetic pole 20b is generated on the surface of the magnetic thin film 20 'and the magnetostatic energy becomes high and becomes unstable, it has an upward spontaneous magnetization and a downward spontaneous magnetization as shown in FIG. This is because the structure of the striped magnetic domains, in which the magnetic domains are alternately arranged in a striped pattern, becomes natural.

FIG. 6 shows another example of the stripe magnetic domain structure according to the present invention. In this structure, spontaneous magnetization alternately turns in the opposite direction in each adjacent magnetic domain of the stripe magnetic domain. Have been. In this structure, the domain walls 20 forming the stripe magnetic domains are formed.
This structure is realized when the interval of a ... is wide, that is, when the width of one magnetic domain is large. In the structure of this example, the same effect as in the striped magnetic domain structure of the previous example can be obtained.

Next, the rising angle of spontaneous magnetization in each magnetic domain will be described. The mechanism in which the spontaneous magnetization that rises inclining with respect to the film surface provides a sufficient magnetization change in the excitation direction and increases the magnetic permeability has been described earlier with reference to FIG. 7, the situation is similar to the case of the in-plane magnetic film described above with reference to FIG. 20, and the magnetic permeability in the easy axis direction decreases. This will be described below with reference to FIG. In FIG. 7, even if a small alternating magnetic field is applied in the direction of the easy magnetization axis and the magnetization vector fluctuates by the same angle Δθ as in FIG. 4, the amount of magnetization change in the in-plane direction is as shown in FIG. It is much smaller than it is. Therefore, the magnetic permeability decreases. If the rise angle of spontaneous magnetization is smaller than 10 °, a sufficiently high magnetic permeability cannot be exhibited in the easy magnetization axis direction as compared with the in-plane magnetization film. On the other hand, if the rising angle of the spontaneous magnetization is too large, the magnetostatic coupling between the adjacent magnetic domains becomes too strong and the magnetization vector becomes difficult to move. For this reason, the coercive force increases and the magnetic permeability also decreases. That is, the deflection angle Δθ of the magnetization vector decreases. Therefore, the rise angle of spontaneous magnetization is 7
When the angle exceeds 0 °, the reproduction characteristics of the magnetic head are undesirably deteriorated.

FIG. 8 (a) schematically shows a magnetization hysteresis curve (hysteresis loop) measured by applying a magnetic field to the surface of the soft magnetic thin film in the magnetic head having the above composition and employing a soft magnetic thin film employing a stripe magnetic domain structure. ). The average rise angle ψ of the spontaneous magnetization in this case can be roughly calculated from the calculation formula ψ = Cos ⁻¹ (Mr ′ / Ms) as shown in FIG. 8B. Here, Mr ′ is the value shown in FIG.
Ms is assumed to be the saturation magnetization, and Ms is the provisional residual magnetization obtained by extrapolating the slope portion of the magnetization history curve defined in (a). From this equation and the magnetization history curve shown in FIG.
It can be understood that the smaller the is, the larger the rising angle of spontaneous magnetization is. Also, from the magnetization history curve shown in FIG.
It can be seen that the soft magnetic thin film according to the present invention shows characteristics that are hard to be saturated after the magnetization rises sharply in response to the change in the magnetic field or after the magnetization rises.

The rise angle ψ is also related to the saturation magnetization of the soft magnetic thin film, but it generally increases as the perpendicular anisotropy energy E⊥ increases. Therefore, the allowable range can be defined by the value of the perpendicular anisotropy energy. If E⊥ is less than 50 J / m ³ , the magnetic permeability in the easy axis direction is reduced, and a magnetic head having good characteristics cannot be obtained. When E⊥ exceeds 1000 J / m ³ , the coercive force increases, the magnetic permeability decreases in all directions, and a magnetic head having good characteristics cannot be obtained. Note that the perpendicular anisotropy energy E⊥ can be roughly estimated as the area of the shaded portion of the first quadrant surrounded by the magnetization history curve and the x-axis and the y-axis in FIG.

On the other hand, the axis of easy magnetization changes depending on the sign of the magnetostriction λs and the stress state. When the magnetostriction is positive, when a tensile stress acts on the soft magnetic thin film, the direction of the stress becomes the easy axis of magnetization, and when a compressive stress acts on the soft magnetic thin film, the direction perpendicular to the stress direction becomes the easy axis of magnetization. When the magnetostriction is negative, when a tensile stress acts on the soft magnetic thin film, the direction perpendicular to the stress direction becomes the axis of easy magnetization, and conversely, when compressive stress acts, the direction of action of the stress becomes the axis of easy magnetization. The magnetic anisotropy can be introduced by utilizing such properties of this kind of soft magnetic thin film.

Further, in the case of an amorphous state or a mixed state of the amorphous state and the fine crystal, the shape of the columnar body is increased by forming an aggregated structure of the columnar body extending in a direction rising to the film surface. Perpendicular magnetic anisotropy can be imparted to the soft magnetic thin film by the shape anisotropy. In this structure, each of the columnar bodies may be an amorphous phase instead of a crystal, but an impurity is interposed between adjacent columnar bodies. The inclination angle of the columnar body is preferably 90 °, but may be slightly inclined.

In order to manufacture the magnetic head having the structure shown in FIG. 1, first, as shown in FIG. 9, a soft magnetic alloy film 20 is formed on one side surface of a block-shaped base 26. Next, a laminated glass 24 is formed on the soft magnetic alloy film 20,
It is bonded to the other substrate 26 ', heated, pressed and welded. At this time, the laminated glass 24 is formed on the bonding surface of the base 26 'as necessary. Then, after cooling to room temperature to solidify the laminated glass 24, the block is cut, and various processes such as cutting and polishing are performed to form a plurality of sliders and a core portion having a predetermined shape, respectively. Further, the soft magnetic alloy film is subjected to a heat treatment by utilizing the heat of the glass welding step, and a part or the whole of the as-formed amorphous phase is changed to a crystalline phase by the heat treatment to obtain a desired soft magnetic characteristic. The soft magnetic alloy film shown in FIG. Note that in order to change the amorphous phase into a crystalline phase, it is not necessary to use heat at the time of glass welding, and a special heat treatment step may be separately performed.

Next, the slider and the core formed separately are aligned so that the soft magnetic alloy film sandwiched therebetween is continuous, and the non-magnetic welding glass 21 is placed above the winding hole. Fill to join the magnetic gap. Thus, the magnetic head 10 shown in FIG. 1 can be manufactured.

When a soft magnetic alloy film is formed on a base, a plurality of soft magnetic alloy films and insulating layers such as SiO ₂ are alternately laminated to form a pair of bases as shown in FIG. 2
Plural soft magnetic alloy films 32, 32 sandwiched between 8, 28
And a magnetic core 33 composed of the insulating layers 34, 34. In FIG. 10, reference numeral 24 denotes a laminated glass for bonding the magnetic core 33 and the base 28, and reference numeral 30 denotes a magnetic gap. Also in the structure of this example, the magnetic permeability in a high frequency range can be improved by forming a stripe magnetic domain structure as in the magnetic head having the structure described above.

The present invention relates to a laminated magnetic head having a magnetic core sandwiched between substrates, such as a magnetic head for a hard disk device of a computer or a magnetic head for a VTR as described above, and a magnetic thin film in the vicinity of a magnetic gap. The present invention can be applied to a magnetic head for performing various magnetic recording and reproduction, such as a metal-in-gap type magnetic head having an arranged structure. For example, the present invention can be applied to the magnetic head 36 shown in FIG. 11 in addition to the magnetic head 10 described in FIG.

The magnetic head 36 of this embodiment has a metal-in structure in which a pair of magnetic core halves 38, 38 each having a soft magnetic thin film 44 formed on a Mn—Zn ferrite substrate are joined so as to form a magnetic gap 42. Gap type (MIG type)
Magnetic head. The winding hole 52 has a coil 46.
Is wound and a magnetic core half 3 on which a soft magnetic thin film is formed
Reference numerals 8 and 38 are welded with gap glass existing in the gap 42 and the track width regulating groove 48. Also in the structure of this example, the magnetic permeability in a high frequency range can be improved by forming a stripe magnetic domain structure as in the magnetic head having the structure described above.

[0070]

EXAMPLE A 6 μm thick thin film of Fe ₇₆ Si ₁₂ Al ₅ Hf ₃ C _{4 having} a composition of 6 μm was formed on a substrate made of NiO—TiO ₂ —CaO by a high frequency bipolar sputtering apparatus in an argon gas atmosphere. This thin film was in an amorphous state immediately after the film formation, but was subjected to a heat treatment at 720 ° C. for 20 minutes to precipitate fine crystals containing Fe as a main component, and became a fine crystalline state having an average particle size of about 20 nm. In this soft magnetic thin film, F
It was confirmed by an electron microscope that hafnium carbide crystals having a cubic structure with a particle size of about 5 nm or less were dispersed in the grain boundaries of the fine crystals containing e as a main component. Further, it was confirmed by optical lever method that the saturation magnetostriction of this soft magnetic thin film was + 1.3 × 10 ⁻⁶ . The results of observing the magnetic domain structure of this soft magnetic thin film with a Kerr effect microscope are shown in FIGS.

In the sample having the magnetic domain structure shown in FIGS. 12A and 12B, the manufacturing conditions were changed.
In the sample having the structure shown in FIG. 2A, high-frequency power was set to 1000 W and argon gas pressure was set to 5 m during sputtering film formation.
In the sample having the structure shown in FIG. 12B, the high-frequency power is set to 500 W and the argon gas pressure is set to 7 mTorr. The internal stress of the soft magnetic thin film measured by the X-ray diffraction method is 150 MPa compressive stress for the sample having the structure shown in FIG.
The sample having the structure shown in FIG. 1 had a tensile stress of 100 MPa. As described above, in each of these samples, the magnetostriction was positive in all the samples, but the signs of the stresses were opposite.
In the sample having the structure shown in FIG. 12A, perpendicular magnetic anisotropy is introduced, and in the sample having the structure shown in FIG. As a result, FIG.
In the sample having the structure shown in FIG.
In the sample having the structure shown in FIG. 2B, large magnetic domains unique to the in-plane magnetic film having uniaxial anisotropy are formed. FIG.
In (a) and (b), the left-right direction indicates the easy axis direction.

The sample having the magnetic domain structure shown in FIG.
The magnetization history curve of the sample having the magnetic domain structure shown in FIG.
13 (a) and FIG. 13 (b). The demagnetizing field in the excitation direction has been corrected. From the results shown in FIG. 13A, in the magnetization hysteresis curve of the magnetic head using the soft magnetic thin film according to the present invention, a rising curve K in which the change in magnetization in a magnetic field near the coercive force is steep, Following the rise curve K, a slope curve L that transitions at a substantially constant slope angle near the magnetization saturation point is included. Further, the attenuation curve G from the magnetization saturation point to the remanent magnetization of the magnetization hysteresis curve is formed with substantially the same gradient as the slope curve L, and the curve obtained by partially matching the attenuation curve G with the slope curve L is obtained. It became clear to show. Further, the falling curve present at a position symmetrical to the rising curve shows a similar history. The magnetic head showing such a magnetization hysteresis curve has a characteristic that the magnetization changes sharply in a magnetic field near the coercive force, and the magnetization in a magnetic field higher than that is hard to be saturated. The rise angle of spontaneous magnetization estimated from this magnetization history curve was 50 °, and the perpendicular magnetic anisotropy energy was 150 J / m ³ . From the above results, it is considered that perpendicular magnetic anisotropy is introduced into the sample of this example by the inverse magnetostriction effect due to the internal stress.

Next, the right and left (horizontal axis) directions (easy magnetization axis direction) and the vertical (longitudinal) directions (hard magnetization axis) of each sample of the sample showing the magnetic domain structure shown in FIGS. 12 (a) and 12 (b) are shown. Direction) 1M
The results of measuring the magnetic permeability in Hz are shown in Table 1 below. The measurement of the magnetic permeability was performed by the figure eight coil method, and the excitation magnetic field was 5 mOe.

[0074]

[Table 1]

As is clear from the results shown in Table 1, the sample of the present invention has a high magnetic permeability in any direction, whereas the sample of the comparative example has a large difference in magnetic permeability depending on the direction. . Therefore, when the magnetic head is configured using the soft magnetic thin film of the comparative example, the soft magnetic characteristics of the magnetic head greatly vary depending on which of the easy axes is the axis of magnetization, whereas the soft magnetic thin film of the sample of the present invention is used. When a magnetic head is configured, high magnetic permeability is exhibited in all directions, so that a magnetic head with high magnetic permeability can be obtained.

An amorphous soft magnetic thin film having a composition of Co _81.3 Nb _14.0 Zr _4.7 manufactured by applying a method equivalent to the method manufactured in the previous example was formed by changing the argon gas pressure during sputtering. FIG. 14 shows the respective magnetization hysteresis curves in each case. In FIG. 14, FIG. 14 (a) shows a magnetization hysteresis curve of a sample prepared at an argon gas pressure of 10 mTorr, and FIG. 14 (b) shows an argon gas pressure of 5 mTorr.
rr shows a magnetization hysteresis curve of a sample manufactured as r. FIG.
The sample showing the magnetization hysteresis curve of (a) showed perpendicular magnetic anisotropy, and as a result of magnetic domain observation, it showed a striped magnetic domain structure similar to that of the sample showing the magnetization hysteresis curve shown in FIG. . On the other hand, the sample showing the magnetization hysteresis curve shown in FIG. 14B did not show perpendicular magnetic anisotropy. Each of the soft magnetic thin films of these samples is almost zero (about ± 1 × 10
^-7 ) It had magnetostriction. Therefore, in the soft magnetic thin film of this example, the perpendicular magnetic anisotropy caused by the inverse magnetostriction effect due to the internal stress as in the case of the soft magnetic thin film of the previous example seems to be extremely small, but the perpendicular magnetic anisotropy is introduced. ing.

FIG. 15 shows a scanning electron microscope photograph of a cross section (fracture surface) of each soft magnetic thin film of this example. FIG.
The structure shown in FIG. 14A is that of the sample showing the magnetization hysteresis curve shown in FIG. 14A, and the structure shown in FIG.
4 (b) is a sample showing a magnetization hysteresis curve.
The sample having the structure shown in FIG. 15A has an aggregated structure of columnar bodies extending substantially perpendicular to the film surface, whereas the sample shown in FIG. 15B has such a structure. Not. In the structure shown in FIG. 15A, each column is not a crystal but an amorphous phase, but it is considered that there is segregation of impurities between adjacent columns. With such a film structure, perpendicular magnetic anisotropy can be introduced by the shape anisotropy resulting from the shape of the columnar body.

Next, the Fe produced by the same method as in the above example was used.
_Using an alloy film having a composition of _76.3 Si _12.0 Al _2.1 Hf _3.6 C _6.0 as an example, the X-ray diffraction patterns before and after the heat treatment were measured. The heat treatment was performed at 680 ° C. for 20 minutes. The X-ray diffraction pattern was measured using a Co-Kα radiation source. FIG. 16 shows the X-ray diffraction pattern after the heat treatment, and FIG. 17 shows the X-ray diffraction pattern before the heat treatment. From the results shown in FIG. 17, a broad halo pattern is shown, and it is understood that the film is amorphous before the heat treatment.

On the other hand, from the results shown in FIG. 16, after the heat treatment, the presence of α-Fe (crystals having a body-centered cubic structure mainly composed of Fe) and HfC (crystals of Hf carbide) were confirmed. . In addition, it can be seen from the position of the α-Fe diffraction peak that Si and Al are in a solid solution in the α-Fe crystal. The half-widths of the X-ray diffraction peaks of α-Fe and HfC indicate that the crystal grain size of α-Fe is 19 nm and that of HfC is 3.4 nm.

The magnetic head for a hard disk shown in FIG. 1 was manufactured using an apparatus and method equivalent to the apparatus and method used in the above-described example, and the rising angle of spontaneous magnetization of the soft magnetic thin film and the perpendicular magnetic field were used. Isotropic energy E⊥
And the solitary wave reproduction output of the magnetic head was measured. The soft magnetic thin film used was Fe74-78S formed by the same method as described above.
i _11-12 Al _2-6 Hf _2-3 C _4-5 , and the substrate used was a NiO-TiO ₂ -CaO-based or MnO-NiO-based ceramic substrate. The magnetic head used for the test had a track width of 5.5 μm and a gap depth of 2 μm, the coercive force Hc of the hard disk used for the measurement was 1600 Oe, the peripheral speed was 8.84 m / s, and the magnetic head floated. The amount was measured at 80 nm.

The magnetostriction of each of the soft magnetic thin films is a positive value, and the magnetostriction is increased by changing the Al concentration of the soft magnetic thin films.
At the same time 1 to 2 × can be varied in the range of 10 ^-6, the internal stress of the soft magnetic thin film is changed by changing the sputtering conditions (argon gas pressure and RF power), various spontaneous magnetization rise angle ψ perpendicular different A soft magnetic film having isotropic energy was formed, a magnetic head was formed using each, and used for measurement. FIG. 18 shows the relationship between the solitary wave reproduction output (relative value) and the rise angle 自 of spontaneous magnetization of a large number of obtained magnetic heads.
FIG. 19 shows the relationship of ⊥.

From the results shown in FIGS. 18 and 19, when the rising angle of the spontaneous magnetization and the perpendicular magnetic anisotropy energy are too small, the average value of the output decreases, and the rising angle of the spontaneous magnetization and the perpendicular magnetic anisotropy increase. It can be seen that if the energy is too large, the variation in characteristics will be small, but the average value of the output will be low. From this, it became clear that the rise angle of spontaneous magnetization is preferably in the range of 10 to 70 °, and the perpendicular anisotropy energy is preferably in the range of 50 to 1000 J / m ³ .

Using the same soft magnetic thin film and substrate as those of the above example, the video magnetic head for a VTR shown in FIG. 11 was manufactured, and the same test as in the previous example was performed. was gotten.

[0084]

As described above, according to the present invention, an amorphous or mixed structure of amorphous and fine crystal grains is provided.
Equipped with a soft magnetic thin film with a stripe magnetic domain structure, since the spontaneous magnetization in the stripe magnetic domain structure is inclined along the direction perpendicular to the film surface, so that it is excited in a direction parallel to the stripes of the stripe magnetic domain structure. As a result, the spontaneous magnetization inside the magnetic domain rising out of the film surface oscillates vertically, resulting in high permeability even at high frequencies, and when excited in a direction perpendicular to the stripes of the stripe magnetic domain structure, Due to the rotation of the spontaneous magnetization by a small angle, a high magnetic permeability is exhibited even at a high frequency. Thus, a portion having low magnetic permeability does not occur in the magnetic circuit in accordance with the direction of the axis of easy magnetization, and a magnetic head having high magnetic permeability in all directions can be obtained. According to the present invention,
Even if the magnetic head is heated to a high temperature by performing glass welding in the manufacturing process of the magnetic head, and the soft magnetic thin film is imparted with partially different non-uniform magnetic anisotropy, high magnetic permeability in all directions is obtained. Accordingly, it is possible to provide a magnetic head whose soft magnetic characteristics are not deteriorated by the heat treatment in the glass welding step.

In the magnetic head employing the striped magnetic domain structure of the present invention, the change in magnetization in the magnetic field near the coercive force is sharp, and the magnetization in the magnetic field near the magnetization saturation point is substantially constant in the subsequent magnetic field. Since a magnetization hysteresis curve in which a change transitions is shown, when a magnetic field is applied, a unique soft magnetic characteristic is obtained in which the magnetization changes sharply in the initial state with respect to the magnetic field, and thereafter, the magnetization hardly saturates.

As the soft magnetic thin film used for the magnetic head, Fe
And Co are mainly composed of fine crystals, and Ti, Zr,
One or two of Hf, V, Nb, Ta, Mo, W
Those obtained by depositing carbides, nitrides or borides of more than one element show a higher saturation magnetic flux density than Sendust, and show excellent magnetic permeability which does not decrease depending on the orientation. Further, as a soft magnetic thin film provided for the magnetic head, T
_{100-abcd X a M b Z} c Q d a composition formula or T
_100-b-c-d- e-f Si e Al f M b Z c Q
_By setting the specific composition of the composition represented by the composition formula _d and limiting the amount of each additive element, a composition exhibiting a particularly high saturation magnetic flux density and exhibiting a particularly high magnetic permeability can be obtained.

The rise angle of spontaneous magnetization in each magnetic domain of the striped magnetic domain is determined by setting the magnetic anisotropy energy to 50 to 1000 J / m ^3.
By adjusting the angle within the range, the angle can be adjusted to a desired angle, whereby an excellent magnetic permeability can be exhibited. Also,
If the rising angle of the spontaneous magnetization is in the range of 10 to 70 °, the vertical oscillation and the left-right rotation oscillation of the spontaneous magnetization in the magnetic domain can be smoothly performed, so that a high transparency is obtained regardless of the direction of the excitation. Magnetic susceptibility can be obtained. Furthermore, by making the structure of the soft magnetic thin film a texture of columnar bodies rising up with respect to the film surface, the spontaneous magnetization can be easily raised or lowered with respect to the film surface, thereby increasing the magnetic permeability in all directions. The effect of improvement can be exhibited. Furthermore, in order to cause the spontaneous magnetization to rise as a stripe magnetic domain structure, a compressive stress is applied to the soft magnetic thin film and the magnetostriction is made positive, or a tensile stress is applied to the soft magnetic thin film and the magnetostriction is made negative. Is preferred. As a result, a soft magnetic thin film having excellent magnetic permeability and its isotropy can be obtained, and a high-performance magnetic head can be provided.

As the soft magnetic thin film used here, Fe and C
and fine crystal grains of one or two of Ti, Ti, Zr, Hf, V, Nb, and T having an average particle diameter of 10 nm or less.
Of a, Mo and W, those composed mainly of carbide, nitride or boride of one or more elements are preferred. _{Further, T 100-abcd X a M} b Z c Q d a composition formula or _{T 100-bcdef Si e Al f} M b Z
It is preferable to use the one represented by the composition formula of _c Q _d and specifying the amount of the added element. With these compositions,
A soft magnetic thin film having high permeability and excellent saturation magnetic flux density can be obtained, and a high-performance magnetic head can be obtained.

Further, by introducing perpendicular magnetic anisotropy into the soft magnetic thin film by the above-described method, the soft magnetic thin film can have a stripe magnetic domain structure, and a soft magnetic thin film having excellent magnetic permeability isotropic property can be obtained. As a result, a high-performance magnetic head can be obtained. Further, by using a soft magnetic thin film having the above composition in addition to the above method, a soft magnetic thin film or a magnetic head having a high saturation magnetic flux density in addition to the magnetic permeability can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view of a magnetic head for a hard disk drive.

FIG. 2 is an enlarged view of a portion A in FIG.

3 (a) is a plan view, FIG. 3 (b) is a partially enlarged plan view of FIG. 3 (a), and FIG. 3 (c) shows an example of a striped magnetic domain structure of a soft magnetic thin film. () Is a sectional view showing a rising state of spontaneous magnetization.

FIG. 4 is an explanatory diagram showing a swing oscillation of spontaneous magnetization and a change in magnetization in an in-plane direction when a small alternating magnetic field is applied to a soft magnetic thin film having a stripe magnetic domain structure.

FIG. 5 is a sectional view showing a rising state of spontaneous magnetization in a magnetic domain.

FIG. 6 is a view showing another example of the stripe magnetic domain structure, and FIG.
6A is a plan view, and FIG. 6B is a sectional view.

FIG. 7 is an explanatory diagram showing swing oscillation of spontaneous magnetization having a small rising angle.

8A is a diagram showing a magnetization hysteresis curve of a soft magnetic thin film having a stripe magnetic domain structure, and FIG. 8B is a diagram showing a relationship between a rise angle, provisional residual magnetization, and saturation magnetization. .

FIG. 9 is a process chart showing a manufacturing process of the magnetic head, and FIG.
FIG. 9A shows a state before the block-shaped substrate is joined, and FIG.
(B) shows the state after bonding.

FIG. 10 is an enlarged view of a portion around a magnetic gap of the laminated magnetic head.

FIG. 11 is a perspective view of a video magnetic head for a VTR.

FIG. 12A is a Kerr microscope photograph of a striped magnetic domain structure of a soft magnetic thin film according to the present invention, and FIG. 12B is a Kerr microscope photograph of a conventional soft magnetic thin film of a magnetic domain structure. FIG.

13A is a diagram showing a magnetization history curve of a soft magnetic thin film according to the present invention, and FIG. 13B is a diagram showing a magnetization history curve of a soft magnetic thin film having a conventional magnetic domain structure.

14A is a diagram showing a magnetization history curve of a soft magnetic thin film according to the present invention, and FIG. 14B is a diagram showing a magnetization history curve of a soft magnetic thin film having a conventional magnetic domain structure.

FIG. 15 (a) is a view showing a micrograph of a cross section of a soft magnetic thin film having a striped magnetic domain structure according to the present invention, and FIG.
(B) is a diagram showing a structure photograph of a cross section of a conventional soft magnetic thin film having a magnetic domain structure.

FIG. 16 is an X-ray diffraction pattern of the soft magnetic alloy of this example after heat treatment.

FIG. 17 is an X-ray diffraction pattern of the soft magnetic alloy of this example before heat treatment.

FIG. 18 is a diagram showing a relationship between a rising angle of spontaneous magnetization and a solitary wave reproduction output in a magnetic head including a soft magnetic thin film having a striped magnetic domain structure according to the present invention.

FIG. 19 is a diagram showing a relationship between perpendicular anisotropy energy and solitary wave reproduction output in a magnetic head including a soft magnetic thin film having a stripe magnetic domain structure according to the present invention.

FIG. 20 is a diagram for explaining a variation in magnetic permeability of a magnetic head having a conventional structure depending on a magnetic path direction.
20A is a plan view, FIG. 20B is a side view of the magnetic head when the easy axis of magnetization is in the left-right direction, and FIG. 20C is a side view of the magnetic head when the easy axis of magnetization is in the vertical direction. It is.

FIG. 21 shows a conventional magnetic domain structure.
Is a cross-sectional view showing the direction of spontaneous magnetization in the soft magnetic thin film, and FIG. 21B is a plan view showing the direction of spontaneous magnetization.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Magnetic head 20 Magnetic core 20 ', 20' 'Soft magnetic thin film 22 Magnetic gap 24 Laminated glass 26, 28 Base 30 Magnetic gap 32 Soft magnetic thin film 36 Magnetic head 38 Magnetic core half body (base) 42 Magnetic gap 44 Soft magnetic thin film

Continuation of front page (56) References JP-A-4-12508 (JP, A) JP-A-3-242911 (JP, A) JP-A-7-50006 (JP, A) (58) Fields investigated (Int) .Cl. ⁷ , DB name) H01F 10/14 C23C 14/06 G11B 5/127 G11B 5/23 H01F 41/14

Claims (10)

(57) [Claims] 1. A method comprising one or two of Fe and Co.
And fine crystal grains with an average crystal grain diameter is 40nm or less Ri, Rights
Ti, Zr, Hf, V, N having an average crystal grain size of 10 nm or less
one or more of b, Ta, Mo, and W elements
Soft magnetic thin film mainly composed of carbide, nitride or boride
A magnetic head having a structure in which the soft magnetic thin film is sandwiched between substrates, wherein the soft magnetic thin film has a striped magnetic domain structure, and the striped magnetic domain structure is in a direction perpendicular to the film surface. Ri Na by a set of magnetic domains having a spontaneous magnetization inclined along are formed in stripes, the soft magnetic
Hysteresis curve when a magnetic field is applied in the plane of a conductive thin film
In addition, a steep rise in the change in magnetization in a magnetic field near the coercive force
Curve and the rising curve followed by the magnetization saturation point
Up to an almost constant inclination angle
From the magnetization saturation point of the magnetization history curve to the remanent magnetization
A decay curve is formed with substantially the same slope as the slope curve,
The decay curve and the slope curve partially match, and the magnetic anisotropic magnetic energy perpendicular to the film surface of the soft magnetic thin film
Is in the range of 50 to 1000 J / m ³ . 2. A method comprising one or two of Fe and Co.
And fine crystal grains with an average crystal grain diameter is 40nm or less Ri, Rights
Ti, Zr, Hf, V, N having an average crystal grain size of 10 nm or less
one or more of b, Ta, Mo, and W elements
Soft magnetic thin film mainly composed of carbide, nitride or boride
A magnetic head having a structure in which the soft magnetic thin film is sandwiched between substrates, wherein the soft magnetic thin film has a stripe magnetic domain structure, and the stripe magnetic domain structure is arranged in a direction perpendicular to the film surface. A magnetic hysteresis curve formed when a magnetic field is applied in the film plane of the soft magnetic thin film is formed in a stripe shape by a set of magnetic domains having spontaneous magnetization inclined along, and a change in magnetization in a magnetic field near a coercive force. leading to and a rising curve steep, Ri name contains an inclined curve transition at a substantially constant inclination angle to the vicinity magnetization saturation point following this rising curve, the residual magnetization of a magnetizable saturation point of magnetization hysteresis loop
A decay curve is formed with substantially the same slope as the slope curve,
The decay curve and the slope curve partially match, and the average rise of spontaneous magnetization from the film surface in the soft magnetic thin film is obtained.
A magnetic head having a rising angle in a range of 10 to 70 degrees . 3. The structure of the soft magnetic thin film stands on the film surface.
A columnar structure extending in a direction
Item 3. The magnetic head according to item 1 or 2 . 4. The soft magnetic thin film according to claim 1, wherein the internal stress is equal to a compressive stress.
Perpendicular magnetic anisotropy
Is introduced, The claim 1, 2 or characterized by the above-mentioned.
3. The magnetic head according to item 3 . 5. The soft magnetic thin film according to claim 1, wherein the internal stress is equal to the tensile stress.
Perpendicular anisotropy by making the magnetostriction negative
Is introduced, The claim 1, 2 or characterized by the above-mentioned.
3. The magnetic head according to item 3 . 6. A method comprising one or two of Fe and Co.
Fine crystal grains whose average crystal grain size is 40 nm or less;
Ti, Zr, Hf, V, N having an average crystal grain size of 10 nm or less
one or more of b, Ta, Mo, and W elements
Soft magnetic thin film mainly composed of carbide, nitride or boride
Is constituted, and the soft magnetic thin film is sandwiched between substrates.
A magnetic head, wherein the soft magnetic thin film has a striped magnetic domain structure.
Has spontaneous magnetization that tilts in a direction perpendicular to the film surface
Formed in a stripe pattern by a set of magnetic domains.
The magnetization history curve when a magnetic field is applied in the plane of the thin film
Rising curve with a sharp change in magnetization in a magnetic field near the coercive force
Line and following this rise curve to the vicinity of the magnetization saturation point
Includes a slope curve that transitions at a nearly constant slope angle.
Decay from the magnetization saturation point to the remanent magnetization of the magnetization hysteresis curve
The curve is formed with substantially the same slope as the slope curve,
The decay curve and the slope curve are partially matched, and the magnetic anisotropy magnetic energy perpendicular to the film surface of the soft magnetic thin film is obtained.
Is in the range of 50 to 1000 J / m ³ , and the soft magnetic thin film has a composition represented by the following formula.
Magnetic head. T _100-abcd X _a M _b Z _c Q _d (where T is one or two of Fe and Co, and X is S
i, one or two of Al, M is Ti, Zr, H
one or more of f, V, Nb, Ta, Mo, W
Above, Z is one or two of C and N, Q is Cr, R
e, Ru, Rh, Ni, Pd, Pt, Au
Or two or more kinds, and the composition ratios a, b, c, and d are in atomic%.
0 ≦ a ≦ 25, 1 ≦ b ≦ 15, 0.5 ≦ c ≦ 20, 0 ≦
It is assumed that the relationship d ≦ 10 is satisfied. ) 7. One or two of Fe and Co.
Fine crystal grains whose average crystal grain size is 40 nm or less;
Ti, Zr, Hf, V, N having an average crystal grain size of 10 nm or less
one or more of b, Ta, Mo, and W elements
Soft magnetic thin film mainly composed of carbide, nitride or boride
Is constituted, and the soft magnetic thin film is sandwiched between substrates.
A magnetic head, wherein the soft magnetic thin film has a striped magnetic domain structure.
Has spontaneous magnetization that tilts in a direction perpendicular to the film surface
Formed in a stripe pattern by a set of magnetic domains.
The magnetization history curve when a magnetic field is applied in the plane of the thin film
Rising curve with a sharp change in magnetization in a magnetic field near the coercive force
Line and following this rise curve to the vicinity of the magnetization saturation point
Includes a slope curve that transitions at a nearly constant slope angle.
Decay from the magnetization saturation point to the remanent magnetization of the magnetization hysteresis curve
The curve is formed with substantially the same slope as the slope curve,
The decay curve and the slope curve are partially matched, and the magnetic anisotropy magnetic energy perpendicular to the film surface of the soft magnetic thin film is obtained.
Is in the range of 50 to 1000 J / m ³ , and the soft magnetic thin film has a composition represented by the following formula.
Magnetic head. _{T 100-bcdef Si e Al f} M b Z c Q d ( where, T is Fe, 1 kind or two kinds of Co, M is T
one of i, Zr, Hf, V, Nb, Ta, Mo, W
Or two or more, Z is one or two of C and N, Q
Of Cr, Re, Ru, Rh, Ni, Pd, Pt, Au
One or more of them are shown, and the composition ratios b, c, d,
e and f are in atomic%, 8 ≦ e ≦ 15, 0.5 ≦ f ≦ 10, 1
≦ b ≦ 7, 0.5 ≦ c ≦ 10, 0 ≦ d ≦ 10
Be satisfied. 8. The structure of the soft magnetic thin film stands on the film surface.
A columnar structure extending in a direction
Item 8. The magnetic head according to Item 6 or 7 . 9. An internal stress of the soft magnetic thin film is defined as a compressive stress.
Perpendicular magnetic anisotropy
6. The method according to claim 6, wherein
8. The magnetic head according to item 8 . 10. The internal stress of the soft magnetic thin film is a tensile stress.
And by making the magnetostriction negative, the perpendicular magnetic anisotropy
6. The method according to claim 6, wherein a characteristic is introduced.
Is the magnetic head described in 8 .