JP3122159B2 - Ventilation control system for clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room blowing control system for controlling the blowing state of clean air in a positional and temporal manner in accordance with an object to be processed.

[0002]

[Prior art]

A clean system in a clean room includes a laminar flow system using a large blower (usually an axial fan) and a bay type (also called a tunnel type) using a small distributed fan unit or a fan filter unit. 2) method is the mainstream.

In the former case, the air is normally blown uniformly throughout the clean room, and the blowing is generally controlled. 500 ~
Intended for 1000 m ² about large room, by dividing the cleanroom whole into several blocks, fan units control or air volume control in blocks case of performing (rotational speed, according to the pitch angle or the like in the axial fan) is However, it is a control in block units in a large room, and if the air volume is set corresponding to the production line, the posture is maintained unless there is a change in the production line, and the production status of the production line In addition, there is no possibility that the air volume of each part is finely controlled.

In the latter case, the ON state of the unit
-OFF control or fan rotation speed control is considered, but in any case, the air volume control as a zone in block units or 100% operation, which is very suitable for the production line after setting, as long as that the posture is maintained as it is no change in the production line
In this case, it is difficult to finely control the air volume in each part according to the production status of the production line.

[0005] Therefore, in both cases, a part of the production line that is being hermetically sealed with closed-type manufacturing equipment, a part of an open-type manufacturing equipment where a workpiece is not currently located, and the like, are always used. Excessive airflow at a constant intensity is maintained, and this involves a lot of energy loss. In particular, in the case of the former, the circulation path is long and requires more static pressure than the latter method, so the blowing power is required to be two to three times that of the latter,
The energy loss is enormous.

[0006] As means for reducing such loss,
First, follow the workpiece moving in the clean room.
The air volume at the position of the object to be processed
It is conceivable that the amount increases. For example, Shokai 63
-99140 is for workers in a clean room.
Sources such as trucks and trucks are detected by sensors mounted on the ceiling.
To increase the air volume around the dust source
And apply it to the workpiece as it is.
Then, it seems that the above-mentioned problem is solved.

However, unlike a worker or the like,
The material passes through the closed manufacturing equipment while
In many cases, the sensor is transported inside the
It is difficult to continuously capture the position of the workpiece
You. For example, the object to be processed from the closed-type manufacturing equipment to the carrier
When the object is passed, the object is detected by the sensor
Therefore, increasing the air volume of the fan requires
The fan blows from the point when it is discharged from the closed manufacturing equipment.
There is a gap by the time it reaches the workpiece, during which time
There is a possibility that dust may adhere to the object to be processed. In particular,
From one of the sealed Manufacturing equipment to the carrier, from the carrier
Repeat to other closed manufacturing equipment in a short time
If handed over, these manufacturing equipment must be
In the meantime, the amount of air blown to the workpiece becomes insufficient,
The quality may deteriorate due to the adhesion of dust to the processed material.
You .

Accordingly, the present invention is directed to a clean room.
Carrier and energy
And the processing equipment
Position and time the air flow according to the physical situation
Ventilation system in a clean room provided to increase the amount individually
In the control system, in particular, the
In the delivery time of the processed material and the grace time before and after
To increase the amount of air blown to the delivery location.
The purpose is to provide what has been .

[0009]

The first means is a clean one.
Multiple fan / filter units are installed on the ceiling of the room.
To provide clean air supply means,
The air volume of the filter unit is
Lower limit air volume required in order to ensure the required cleanliness and vinegar so that the total
Make adjustments physically and uniformly, and move inside the clean room.
Positionally and timely increased in response to moving workpieces
Air flow control system in a clean room
In the above-mentioned clean room, closed-type manufacturing equipment
And hermetic transporting means, and
Set the time for the workpiece to be delivered to and from the closed transfer means.
Means for recognizing, and the object to be processed is
At the transfer time and the grace time before and after
Automatically controlled so that the airflow at the
You.

[0010] The second means comprises the first means.
At the same time, in the clean room,
Equipment, and the open type manufacturing machine and the closed type
Recognize the time when the workpiece is delivered to and from the transport
Means and the position of the object to be processed in the open type manufacturing equipment.
Means for detecting the open type manufacturing equipment and the
When transferring the object to and from the conveyance means,
When an object to be processed is transferred between manufacturing equipment and transport means
At the delivery position during and before and after
In addition to increasing the air flow,
So that the air volume in the area where the processing object moves gradually increases
It consists of being provided.

[0011]

[Effect] The above structure is adopted.
Maintain the minimum required air flow with the fan / filter unit.
To maintain the required reduced cleanliness, and
Therefore, between the closed type conveyance means and the closed type manufacturing equipment,
At the place where the object is transferred between these two,
In addition, between the closed type conveyance means and the open type manufacturing equipment,
And the open-type manufacturing equipment
In the area of the workpiece moving in the
Increased air flow keeps processed objects sufficiently clean
Energy consumption can be rationalized. or,
A processing target is provided between the closed-type transfer means and each of the manufacturing devices.
Grace time before and after not only during the physical delivery time
In Since the air blowing amount was large, the object to be treated is passed
Before the delivery place can be cleaned,
The cleanliness of the object can be further increased.

[0012]

FIG. 1 is a plan view showing the construction of an embodiment of a clean room according to the present invention.
A left-half two-line manufacturing line in which a single manufacturing device 1 is arranged;
The right half of the manufacturing line by the integrated manufacturing equipment 2 and the corresponding carrier moving line 3 are arranged .
Further, as a clean air supply unit, distribution Then co multiple controllers with fan filter unit 4 in an airtight manner to the ceiling
To, above these controllers with fan filter unit 4, FIG. 2, as shown in FIG. 3, to form a ceiling chamber 5 for air supply. The transfer of the object to be processed A to each single-unit manufacturing device 1 and each of the general manufacturing devices 2 in each of the manufacturing lines is performed by means of an automatically controlled hermetic type shown in FIGS. ) Carrier 6 is used. The carrier is controlled by a zone controller described later.
It operates automatically according to the signal and the processing status of each production line.

The unitary manufacturing device 1 is of a closed type,
During processing, the object is closed and the object to be processed is not exposed. In addition, as shown in FIG. 4, the production line using the single-manufacturing equipment is configured such that each single-manufacturing equipment 1 is controlled by the zone controller 8 and each manufacturing-equipment control panel 9 based on a program set by the production control master 7. It is automatically controlled one after another electrically. The integrated manufacturing equipment 2 is of an open type, and performs various processings one after another in an exposed state, and sends the processed objects downstream. As shown in FIG. 5, the integrated manufacturing equipment 2 is also electrically and automatically controlled via the zone controller 8 and the manufacturing equipment control panel 10 based on a program set by the production control master 7. The zone controller 8 and the manufacturing equipment control panels 9 and 10
As described later, each of the manufacturing equipments 1 and 2 and the carrier 6
As a means for recognizing the delivery time of the workpiece A between
That Yusuke.

Fan / filter unit 4 with controller
Shall be able to electrically control the air flow,
It is adjusted in advance so that the blowing air volume of the clean air becomes the lower limit of the predetermined air volume. In other words, the entire clean room is maintained at the required minimum cleanliness.

[0015] In Thus, as shown in FIG. 4, in the production line by a single manufacturing apparatus 1 of the closed type, the controller with fan filter unit 4 corresponding to the delivery point of each single manufacturing apparatus 1, the single The air volume is controlled so as to increase during the delivery time of the workpiece A between the manufacturing equipment 1 and the carrier 6 or during the grace period before and after the delivery time.

As shown in FIG. 5, in the production line using the open type integrated manufacturing equipment 2, all the fan / filter units 4 with controllers corresponding to the integrated manufacturing equipment 2 are provided.
Is electrically controlled by the detection signals of the processing object position detecting sensors 11 arranged at various parts of the integrated manufacturing equipment so that the air volume increases sequentially along the flow of the processing object A. . Also, the open-type integrated manufacturing equipment 2 and the carrier
As shown in FIG.
The time when the object is delivered and the time before and after
So that the air volume at the transfer position increases
Is controlled .

[0017] In the production line of the above two production equipments 1 and 2,
Therefore, the control of the air volume is performed by setting the delivery time of the object to be processed in advance.
Recognized by the zone controller 8 and the manufacturing equipment control panels 9 and 10
By transmitting a predetermined control signal from these devices.
Done. That is, the object to be processed A is manufactured from the carrier
Fig. 2 shows the delivery time when the product is delivered to manufacturing equipment 1 and 2.
As the carrier approaches the manufacturing equipment,
Since it can be seen, the zone system that controls the carrier
The controller 8 recognizes, and receives a signal from the device.
Can increase the air volume at the delivery site in advance.
It works. Also, the workpiece is received from each manufacturing equipment to the carrier.
The delivery time in the case of delivery depends on various products in the manufacturing equipment.
Control the device because it can be foreseen from the progress of the manufacturing process.
The manufacturing equipment control panels 9 and 10 can recognize the control panel
Issues an air volume increase command.

With this configuration, the inside of the clean room can be maintained at a constant low cleanliness level as a whole, and the position and time can be adjusted in accordance with the moving object A and in accordance with the exposure condition of the object. A high degree of cleanliness can be assuredly and extremely .

The fan / filter unit 4 with all the controllers may be integrally controlled by a fan control panel.
The control system may be configured as shown in the flowchart of FIG. In addition, in the case of this control system, if each manufacturing device has its own control panel, each control panel is partially provided with one of the two regions surrounded by dotted lines in FIG. Then, the control of the fan / filter unit with a controller related to itself may be entrusted.

[0020]

According to the first aspect of the present invention, the following effects are provided.
To play . ○ According to the blowing method of the cream room according to the present invention,
Ventilation of multiple fans and filter units arranged on the ceiling
Air volume ensures required cleanliness throughout the clean room
Adjusted overall and uniformly to the minimum airflow required for
As well as objects moving in the clean room.
To increase the position and time in response
As a result, a large amount of energy can be obtained by eliminating unnecessary excessive air blowing. ○ In addition, the clean room further includes closed manufacturing equipment.
And hermetic transporting means, and
Set the time for the workpiece to be delivered to and from the closed transfer means.
And means for recognizing, and
At this time, the air volume at the transfer position should be individually increased.
The processing target is the closed type manufacturing equipment
Air is blown while it is stored inside
There is no need to increase the amount, but the material to be treated is
When it is passed between the building equipment and the closed carrier
Since it is only necessary to increase the flow rate of the wind, the above-mentioned actual opening 63-991
As in No. 40, simply purify objects to be cleaned, such as people and trucks.
Compared to those that constantly blow strong wind around it,
In addition, energy consumption can be reduced . ○ In addition, the clean room and the closed manufacturing equipment
The time when the object to be processed is delivered to and from the transfer means is recognized.
Means during the delivery time of the object.
And the amount of air blown to the delivery location even before and after the grace period
Is provided to increase the number of
Can remove dust from the air, for example, closed type
Delivery of the workpiece from the manufacturing equipment to the carrier
As in the case of increasing the airflow by sensing with a sensor
There is a gap between the time when
The inconvenience that dust adheres to an object to be processed can be avoided .

According to the second aspect of the present invention, the clip
In the lean room, open-type manufacturing equipment is further installed,
And, between the open-type manufacturing equipment and the closed-type transfer means
Means for recognizing the time at which the workpiece is delivered between
Hand that detects the position of the workpiece in open-type manufacturing equipment
Forming a step, the open-type manufacturing equipment and the conveying means,
When transferring workpieces between
Time before and after the object is delivered to and from the sending means
In a later grace period, the air volume at the
And the workpiece moves within the open-type manufacturing equipment.
Was controlled to increase the air volume in the area where
Et al., Also in the work process by the open-type manufacturing equipment,
Streamline ventilation while ensuring sufficient cleanliness of the workpiece
Can be

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of a clean room according to an embodiment of the present invention.

FIG. 2 is a cutaway side view of the essential components of the embodiment.

FIG. 3 is a cutaway side view of the configuration of another main part of the embodiment.

FIG. 4 is a control circuit block diagram according to a main part of the embodiment.

FIG. 5 is a control circuit block diagram according to another main part of the embodiment.

FIG. 6 is a flowchart showing another embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Single-unit manufacturing equipment 2 Comprehensive manufacturing equipment 3 Carrier moving line 4 Fan / filter unit with controller 5 Above-the-chamber 6 Carrier 7 Production control master 8 Zone controller 9 Manufacturing equipment control panel 10 Manufacturing equipment control panel 11 Processing object position Detection sensor A Workpiece

Claims (2)

(57) [Claims] A plurality of fans are provided on a ceiling of a clean room.
・ By providing a filter unit, a clean air supply
Steps are provided, and the air volume of the fan / filter unit is
Required to ensure required cleanliness throughout the lean room
If the overall and uniform adjustments are made so that
To accommodate the objects moving in the clean room
A chest, configured to increase both locationally and over time
In the ventilation control system for a clean room , the clean room includes a closed type manufacturing device and a closed type
Conveying means, these closed type manufacturing equipment and closed type
Means for recognizing the time when an object is delivered to and from the step
And the time when the object is delivered and the
In the grace time before and after
Automatically controlled to increase the amount individually
Control system for clean room . 2. The room is further opened in the clean room.
Mold manufacturing equipment, and the open mold manufacturing machine
Set the time for the workpiece to be delivered to and from the closed transfer means.
Means for recognizing and an object to be processed in the open type manufacturing equipment
Means for detecting the position of the object to be processed between the open-type manufacturing equipment and the transfer means.
Delivery between these manufacturing equipment and transport means.
The time when the object is delivered and the grace time before and after
And increase the air volume at the delivery position.
The wind in the area where the workpiece moves in open manufacturing equipment
2. The method according to claim 1 , wherein the amount is gradually increased .