JP3113302U - Special optics - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable observation using a bright field observation optical system with emphasis on minute defects, unevenness and distortion of an observation sample.
An optical instrument having a lens barrel capable of taking an observation image captured by an objective lens into an eyepiece or a camera is inserted with a knife edge that can be finely adjusted with respect to the collected light beam of the objective lens to cut the collected light beam. Accordingly, it is possible to provide a special optical system that can capture an observation image by emphasizing minute defects, unevenness and distortion of the observation sample.
[Selection] FIG. 1 and FIG.

Description

  The present invention emphasizes minute defects, irregularities and distortions in the observation sample using an optical instrument having a lens barrel that can capture an observation image captured by an objective lens (finite system / infinity system) into an eyepiece or a camera. Special optical systems that can be captured as observation images, in particular, special optical systems configured to cut the collected light flux by inserting a fine-adjustable knife edge with respect to the collected light flux of the objective lens (finite system / infinity system) It is.

  In the conventional optical system, a bright field observation image obtained by irradiating a sample with a coaxial incident light by an objective lens (finite distance system / infinity system) and specular reflection by the objective lens is observed with an eyepiece or a camera. In general, it is widely used as an optical device.

  A bright field observation image obtained by irradiating a specimen with coaxial incident light using the conventional objective lens (finite distance system and infinity system) described above and captured by regular reflection by the objective lens is observed with a eyepiece or a camera. In the method, fine observations and irregularities / distortions of the sample cannot be observed, and effective observation results and analysis results cannot always be obtained.

  The present invention is intended to solve the problems of such a conventional configuration, and the object of the present invention can be grasped by the bright field observation using a bright field observation optical instrument. It is an object of the present invention to provide a special optical system capable of observing and accurately analyzing the sample by capturing minute defects, unevenness and distortion of the sample that have not been present.

  In order to achieve the above object, the special optical system according to the present invention is configured as follows.

  That is, according to the first aspect of the present invention, coaxial epi-illumination is possible with respect to an objective lens (finite distance system / infinite distance system) that is composed of several lenses in a cylindrical shape and has an angle of view. An optical apparatus having a lens barrel that captures an observation image captured by the objective lens into an eyepiece or a camera is configured such that a half mirror (or a beam splitter) is formed on the image side of the objective lens in order to allow illumination to enter. On the other hand, a special optical system characterized in that a knife edge is inserted into the collected light beam of the objective lens between the objective lens and the half mirror (or beam splitter) to cut the collected light beam.

  A device according to claim 2 of the present invention is the device of the special optical system according to claim 1, wherein a lead screw is attached to the knife edge so that the amount of the knife edge that cuts the collected light beam can be finely adjusted. A knife edge fine movement adjustment mechanism that can be moved back and forth finely, and a knife edge fine movement that has a rotation mechanism that can be rotated so that the knife edge can be cut from any direction around the collected light beam in the knife edge fine movement adjustment mechanism It is a special optical system characterized by incorporating an adjusting rotation mechanism.

  As described above, the operation according to the first aspect of the present invention maintains the conventional bright field observation function by cutting the collected light beam of the objective lens in the optical apparatus with a knife edge. However, it can capture minute defects, irregularities and distortions of samples that could not be observed until now, and enables accurate and advanced observation and analysis.

  In addition, the operation of the invention according to claim 2 has a mechanism capable of moving back and forth and rotating on the knife edge in the optical instrument, so that it is possible to adjust the edge strength of fine defects, unevenness and distortion on various samples. , Enabling more accurate and advanced observation and analysis.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to FIGS.

  FIG. 1 is an explanatory diagram schematically showing the outline of a special optical system to which an embodiment of the present invention is applied. FIG. 2 is a mechanism explanatory view schematically showing a knife edge fine adjustment rotating mechanism to which one embodiment of the present invention is applied.

  That is, in the configuration of the embodiment shown in FIG. 1 and the special optical system, the luminous flux A12a from the lamp light source 11 is uniformly incident on the objective internal lens A10a of the objective lens 10 so that the luminous flux A12a having higher brightness than the lamp light source 11 is incident. A half mirror 14 on the image side of the objective lens 10 with respect to the optical axis 26 of the objective lens 10 so that the luminous flux A12a enters the objective lens 10 vertically. And the converging light beam 15 is arranged between the objective lens 10 and the half mirror 14, and the light beam A12a is provided in the objective lens 10 with the objective internal lens A10a and the objective internal lens. B10b, guided from the objective internal lens C10c, produces a luminous flux B12 of coaxial incident illumination light.

  A sample 17 to be observed with the special optical system is placed on the object side of the objective lens 10, and the sample 17 is irradiated with a light beam B12 from the objective lens 10 and reflected and returned. An observation image 18a is created by the objective internal lens C10c, the objective internal lens B10b, and the objective internal lens A10a, and the observation image 18a is formed on the CCD image pickup device 20 in the CCD camera 21. An imaging lens 19 is installed between the half mirror 14 and the CCD image pickup device 20.

  The observation image 18a is captured from the CCD image pickup device 20, and the observation image 18a is photoelectrically converted inside the CCD camera 21, and transmitted as a CCD camera video signal 23 from the CCD camera 21 to the CCD camera cable 22 to be converted into the CCD. The camera image signal 23 is output to the TV monitor 25, and the observed image 18a is reproduced on the TV monitor display screen 24.

  Further, in order to capture an edge-enhanced image, a knife edge fine adjustment unit 16 that vertically cuts the light flux A12a and the collected light flux 15 between the objective lens 10 and the half mirror 14 is installed, and the light flux A12a and By finely adjusting the amount and direction of the collected light beam 15 cut by the knife edge fine adjustment unit 16, it is possible to catch minute defects, irregularities and distortions in the sample 17 that have not been captured so far. A special optical system is made possible by the above embodiment.

  The configuration of the special optical system in FIG. 1 is a configuration explanatory view schematically showing the specification of the objective lens 10 as an infinite system optical system.

  In contrast to the configuration of the special optical system in FIG. 1, when the specification of the objective lens 10 is a finite distance optical system, if the imaging lens 19 is removed, the fineness in the sample 17 that has not been captured so far can be obtained. Special optical system characterized by capturing various defects, irregularities and distortions.

  The special optical system configuration shown in FIG. 1 enables a special optical system that captures fine defects, irregularities and distortions of the sample 17 while taking advantage of the conventional bright field observation function, and enables defect observation simultaneously with more accurate image processing. It becomes possible to provide a special optical system that has never been possible before.

  That is, in the embodiment shown in FIG. 2, the knife edge fine movement adjusting and rotating mechanism, the knife edge fine movement adjusting unit 16 rotates the knife edge fine movement adjusting knob 29 having a male lead screw in accordance with the purpose of the sample 17 to adjust the female lead screw. A certain knife edge fine adjustment mechanism 28 and knife edge 27 slightly move back and forth perpendicularly to the collected light beam 15 to cut off the light beam A12a and the collected light beam 15, thereby enabling the special optical system.

  Further, the knife edge fine adjustment unit slider 30 is fixed to the knife edge fine adjustment unit rotating mechanism 16b so that the edge strength of the observation image 18a can be changed according to the purpose of observation of the special optical system, and the optical axis 26 is The knife edge fine movement adjustment unit rotation mechanism 16b with a female groove is fitted to the knife edge fine movement adjustment unit rotation mechanism fixing part 16a with a male groove so that the knife edge fine movement adjustment unit rotation mechanism 16b can be rotated at the center. The knife edge fine adjustment unit 16 can be rotated about the optical axis 26, and adjustment according to the purpose of the sample 17 can be performed according to the degree and direction in which the light beam A12a and the collected light beam 15 are cut by the knife edge 27 from any direction. It becomes possible, and various observations are possible That.

  Further, the installation of the knife edge fine adjustment unit slider 30 enables the knife edge fine adjustment unit 16 to be attached / detached according to the observation contents and purpose of the sample 17 and enables the installation of a knife edge 27 of any shape.

  If the conditions for observing the sample 17 are the same, the shape of the knife edge 27, the adjustment mechanism of the knife edge fine adjustment unit 16 and the specification of the knife edge fine adjustment unit rotation mechanism 16b are set to be fixed. It doesn't matter.

  BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram schematically showing an outline of an optical apparatus: special optical system to which an embodiment of the present invention is applied.   It is mechanism explanatory drawing which shows typically the outline | summary of the mechanism part to which one Example of this invention is applied: Knife edge fine movement adjustment rotation mechanism.

Explanation of symbols

10 Objective lens (infinity lens)
10a Objective internal lens A
10b Objective internal lens B
10c Objective internal lens C
11 Lamp light source 12 Light flux B (Coaxial epi-illumination light)
12a Luminous flux A
13 Illumination lens 14 Half mirror (or beam splitter)
15 Collected light beam 16 Knife edge fine movement adjustment unit 16a Knife edge fine movement adjustment unit rotation mechanism fixing part 16b Knife edge fine movement adjustment unit rotation mechanism 17 Sample 18 Light beam C
18a Observation image 19 Imaging lens 20 CCD image pickup device 21 CCD camera 22 CCD camera cable 23 CCD camera image signal 24 TV monitor display screen 25 TV monitor 26 Optical axis 27 Knife edge 28 Knife edge fine adjustment mechanism 29 Knife edge fine adjustment knob 30 Knife edge fine adjustment unit slider

Claims (2)

  An image of the objective lens in order to make the illumination incident so that coaxial incident illumination is possible for an objective lens (finite distance system / infinity system) that is composed of several lenses in a cylindrical shape and has an angle of view. The objective lens and the half mirror (or beam splitter) with respect to an optical apparatus having a half mirror (or beam splitter) on the side and having a lens barrel capable of capturing an observation image captured by the objective lens into an eyepiece or a camera A special optical system characterized in that a knife edge is inserted into the collected light beam of the objective lens between them to cut the collected light beam.   A knife edge fine adjustment mechanism capable of finely moving back and forth by attaching a lead screw to the knife edge so that the amount of the knife edge that cuts the collected light beam of the objective lens can be finely adjusted; 2. The special optical system according to claim 1, further comprising a knife edge fine movement adjusting and rotating mechanism having a rotating mechanism that can be rotated so as to be cut by the knife edge from any direction around the collected light beam.

Images