JP3109624U - Robot hand for transfer - Google Patents

Abstract

To reduce a deflection caused by a load and its own weight on a fork member of a substrate carrying robot hand and adjust a deflection amount so that a substrate can be held and conveyed horizontally.
A fork member is provided by attaching a tension member 2 and a tension adjusting mechanism 4 made of a high-strength member such as para-aramid fiber, PBO fiber, steel cord and the like above the neutral neutral surface of the fork member 3 and adjusting the tension. A plurality of forks with different load conditions are made to have the same deflection by canceling the tensile stress generated above the bending neutral plane and adjusting the amount of deflection generated.
[Selection] Figure 2

Description

  The present invention relates to an improvement of a robot hand that conveys a thin plate-like product such as a glass substrate in a manufacturing process of a liquid crystal display device or a plasma display device.

  In a manufacturing process of a liquid crystal display device, a plasma display device or the like, a glass substrate is transported by a robot between glass substrate processing apparatuses.

FIG. 1 is a plan view showing a transfer robot hand. A fork unit 3 for holding a glass substrate is operated in a cantilevered manner with a robot wrist 5 as a fixed side, and the glass substrate is stabilized on the upper surface of the fork unit. A vacuum suction device and a support member are attached to hold it.
Although the weight of the transfer work is 3 to 6 kg, it is not so heavy, but because it is wide and wide, the fork portion that holds it becomes longer and is bent, which adversely affects the transfer. For this reason, the fork portion is made of a composite material such as a carbon fiber reinforced plastic that is lightweight and has a large elastic modulus, and is formed into a pipe shape having a large secondary moment.

  In addition, in order to minimize the adverse effects of the generated deflection, a method is used in which a shim is attached to the robot in advance to lift the tip of the robot hand, and an adjustment is made to offset the deflection of the tip of the robot hand being transferred. ing.

  However, in the case of a large glass substrate, even with these methods, excessive deflection occurs, and if the tip of the robot hand is lifted and attached, there is a problem that the glass substrate cannot be kept horizontal and cannot be conveyed at high speed.

Regarding the manufacturing method of carbon fiber reinforced plastic with higher rigidity, pre-strained shape memory alloy wire is embedded in a matrix such as carbon fiber reinforced plastic, and the shape memory alloy is overheated after molding to form the memory shape. Methods have been proposed for restoring and increasing the stiffness of the material. (Japanese Patent Laid-Open Nos. 9-317821 and 2002-356757)
However, the materials manufactured by these methods cannot partially cut the shape memory alloy that increases the rigidity, and it is necessary to process grooves and holes for attaching the vacuum suction device and the support member on the upper surface. It is not suitable as a robot hand material for transport.

In addition, with a fork-type robot hand, the load weight in charge differs between the fork at the end and the fork at the end, so the deflection differs for each fork, and shim adjustment to lift the tip of the robot hand is performed for each fork to balance it. There was a need.
Japanese Patent Laid-Open No. 9-317821 JP 2002-356757 A

  As described above, the conventional transfer robot hand has a large deflection, so that the glass substrate cannot be held horizontally and cannot be transferred stably at a high speed.

  This invention uses a high tension member such as para-aramid fiber, PBO fiber, steel cord, etc. as a tension member above the bending neutral plane of the robot hand fork member for conveyance, and a mechanism that can adjust the tension of the tension member is installed. In addition, the bending stress generated in the fork member due to its own weight cancels the tensile stress above the bending neutral plane by the tension of the tension member, thereby reducing the amount of deflection.

   The robot hand of the present invention can not only reduce the deflection by the tension member, but also adjust the amount of deflection, so even if the same member is used in a fork type hand with different load conditions for each member, The same deflection can be achieved, enabling stable conveyance.

  Since the deflection of the robot hand can be reduced, glass fiber reinforced plastic, aluminum alloy, etc., which have a smaller elastic coefficient than carbon fiber reinforced plastic but are cheaper than the carbon fiber reinforced plastic, can be used, so an inexpensive robot hand can be supplied.

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 2A is a horizontal sectional view of the robot hand fork portion according to the first embodiment of the present invention.
(B) shows the cross section of the AA line of FIG. 2 (a).

The fork 3 is fixed to the wrist portion 5 of the robot, the tension member 2 is fixed to the upper end of the fork by the fixing bracket 1, and the opposite end is connected to the upper end of the fork fixing end by the tension adjusting mechanism 4. As shown in FIG. 2B, the tension member is preferably installed on the upper side as far as possible from the bending center plane of the fork member.

  The vacuum suction device 7 is installed between the tension members.

FIG. 3A shows a horizontal cross section of the robot hand fork portion according to the second embodiment of the present invention, and is an example in which the pulley 6 is used and the tension member is increased toward the fixed end. FIG. 3 (b) shows a cross section taken along line BB of FIG. 3 (a).

The fork 3 is fixed to the wrist portion 5 of the robot, and the tension member 2 is fixed to the upper end of the fork by the fixing bracket 1, and the tension is adjusted through a pulley installed on the upper end of the fork and the upper center of the fork. It is connected to the upper side of the fork fixed end by mechanism 4. As shown in FIG. 3B, the tension member is preferably installed at a position as far as possible from the bending center plane of the fork member.

  By arranging the tension member in this way, the tension of the tension member can be kept constant, and at the same time, the tension is reduced at the tip of the fork where the bending stress is small and high tension is applied to the fixed portion where the bending stress is large. The tension member tension can be used effectively.

FIG. 4A shows a horizontal cross section of a robot hand fork portion according to a third embodiment of the present invention, and is an example in which tension adjusting mechanisms 4 are arranged on both sides of the fork member. FIG. 4B shows a cross section taken along the line CC in FIG.

The fork 3 is fixed to the wrist portion 5 of the robot, and the tension member 2 is fixed to the upper side of both ends of the fork by the fixing bracket 1 and is pulled to the left and right by the tension adjusting mechanism 4 arranged on the side of the fork to generate tension. To do.

  By arranging the tension member in this way, not only the bending of the fork member is reduced, but also the rigidity against torsion can be increased, which is advantageous for a large fork member.

It is a figure which shows the conventional robot hand for conveyance. (A) is explanatory drawing of the robot hand fork part which concerns on 1st Embodiment of this invention. (B) is sectional drawing in the AA of FIG. 2 (a). (A) is explanatory drawing of the robot hand fork part which concerns on 2nd Embodiment of this invention. (B) is sectional drawing in the BB line of Fig.3 (a). (A) is explanatory drawing of the robot hand fork part which concerns on 3rd Embodiment of this invention. (B) is sectional drawing in the CC line of Fig.4 (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fixing bracket 2 Tension member 3 Fork member 4 Tension adjustment mechanism 5 Robot wrist 6 Pulley 7 Vacuum adsorption mechanism

Claims (1)

  A robot hand for transport having a mechanism in which a tension member is arranged above the neutral bending surface of the transport robot hand fork and the tension of the tension member can be adjusted.

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