JP3107103B2 - 2D total reflection measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring a total reflection absorption spectrum from a sample surface, and more particularly to an optical system for forming an incident / emission relationship with a sample.

[0002]

2. Description of the Related Art When measuring the total reflection absorption spectrum of a sample surface, a planar prism is brought into contact with the sample surface, light is incident on the sample so as to have a total reflection angle, and the reflected light absorbed by the sample is reflected. Is to be detected. When trying to measure the entire sample surface two-dimensionally using such a device, the prism is retracted from the sample surface each time measurement at one measurement point is completed, and then moved to the next measurement point. This requires work, which not only requires time and labor for analysis, but also makes it difficult to perform measurement as a continuous point. Of course, it is conceivable to move the measurement point while the prism is in contact with the sample, but since the prism is configured in a flat shape as described above, there is great friction between the sample and the sample surface, and There is a problem that the surface and the prism are damaged.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and an object of the present invention is to provide a novel total measurement apparatus capable of two-dimensionally measuring the surface of a sample. An object of the present invention is to provide a reflection measuring device.

[0004]

According to the present invention, a spherical prism is rotatably supported at one end of a holding member and an optical path is formed with the prism. The Cassegrain optical system is arranged at the center.

[0005]

[Function] When the sample and the prism are relatively moved while the prism is in contact with the sample, the spherical prism smoothly moves while maintaining a constant optical path with the sample surface regardless of the rotational position. Moving.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the illustrated embodiments. ＄ FIG. 1 shows an embodiment of the present invention. In the figure, reference numeral 1 denotes a prism which is in contact with a sample S and is formed by molding an optical material having necessary optical characteristics into a spherical shape. The holding member 2 is rotatably supported by one end 2a. 3 is
A Cassegrain mirror, which forms a Cassegrain optical system with the hemispherical mirror 4, receives the incident light L1 from the window 3a on the prism 1, and collects the light from the prism 1 to detect the detection light L of a detector (not shown).
It is arranged to emit as 2.

In this embodiment, the prism 1 is connected to the sample S
The light emitted from the Cassegrain mirror 3 is transmitted through the prism 1 and the sample S
Is irradiated at a critical angle or more, for example, 40 degrees or more with respect to the sample plane. This light absorbs a wavelength component corresponding to the characteristics of the sample, is totally reflected, and enters the prism 1 again.
The light totally reflected by the sample passes through the prism 1, is collected by the Cassegrain mirror 3, and is incident on a photodetector (not shown).

When the prism 1 and the sample S are relatively moved in this state, the prism 1 receives the frictional force from the surface of the sample S and rotates within the one end 2a of the holding member 2 to move the sample. Follow smoothly. Naturally, since the prism 1 is formed in a spherical shape, the relationship between the optical path with the Cassegrain mirror 3 and the sample is maintained in a constant state, so that an error does not occur with the movement.

[0009]

As described above, in the present invention,
The spherically formed prism is rotatably supported on one end of the holding member, and the Cassegrain optical system is arranged so as to form an optical path with the prism. Can be rotated while maintaining the constant, so that the measurement point can be changed while the prism is in contact with the sample, and measurement can be performed by continuously scanning the sample surface.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an apparatus showing one embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 1 spherical prism 2 holding member 3 Cassegrain mirror 4 hemispheric mirror S sample

Claims (1)

(57) [Claims] 1. A two-dimensional total reflection measuring apparatus comprising: a spherically formed prism rotatably supported at one end of a holding member; and a Cassegrain optical system arranged to form an optical path with the prism.