JP3105975B2 - Glossy chemical polishing treatment liquid for hardened steel members and chemical polishing treatment method for the material - Google Patents

Glossy chemical polishing treatment liquid for hardened steel members and chemical polishing treatment method for the material

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Publication number
JP3105975B2
JP3105975B2 JP03339904A JP33990491A JP3105975B2 JP 3105975 B2 JP3105975 B2 JP 3105975B2 JP 03339904 A JP03339904 A JP 03339904A JP 33990491 A JP33990491 A JP 33990491A JP 3105975 B2 JP3105975 B2 JP 3105975B2
Authority
JP
Japan
Prior art keywords
chemical polishing
polishing
concentration
hydrogen peroxide
hydrofluoric acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03339904A
Other languages
Japanese (ja)
Other versions
JPH0525664A (en
Inventor
憲一 鈴木
正樹 梶野
峯雄 荻野
秀雄 相原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Toyota Central R&D Labs Inc
Original Assignee
Toyota Motor Corp
Toyota Central R&D Labs Inc
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Filing date
Publication date
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Publication of JPH0525664A publication Critical patent/JPH0525664A/en
Application granted granted Critical
Publication of JP3105975B2 publication Critical patent/JP3105975B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00Brightening metals by chemical means
    • C23F3/04Heavy metals
    • C23F3/06Heavy metals with acidic solutions

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、硬化鋼部材用の光沢化
学研磨処理液および該材の化学研磨処理方法に関するも
ので、さらに詳しくは、トランスミッションやデファレ
ンシャルにおいて用いられる浸炭歯車等の複雑形状を有
する焼入れ鋼材等の硬化鋼部材の光沢研磨処理に適した
光沢化学研磨処理液および該材の化学研磨処理方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glossy chemical polishing solution for hardened steel members and a method for chemical polishing of the material. More specifically, the present invention relates to a method for forming complicated shapes such as carburized gears used in transmissions and differentials. The present invention relates to a glossy chemical polishing treatment liquid suitable for glossy polishing of a hardened steel member such as a quenched steel material, and a chemical polishing treatment method for the material.

【0002】[0002]

【従来の技術】従来より、自動車のトランスミッション
歯車のように高強度が要求される鋼部材においては、焼
入れ処理、特に浸炭焼入れ処理等の熱処理が施されて実
用に供されている。
2. Description of the Related Art Conventionally, steel members requiring high strength, such as transmission gears of automobiles, have been subjected to a heat treatment such as a quenching treatment, particularly a carburizing quenching treatment, and have been put to practical use.

【0003】このように浸炭焼入れされた鋼部材には、
表面から5〜50μmにわたって異常層と呼ばれる不完
全焼入れ層が存在する。この異常層は、その直下に存在
する正規の焼入れ層に較べて硬さが低く、最表面部の圧
縮残留応力を低下させる作用が働くため、疲労強度を引
き下げる原因となっている。また、このような異常層が
存在しない焼入れ鋼材においても、表面粗さが大きい場
合にはやはり疲労強度が低下する原因となっている。
[0003] Such carburized and hardened steel members include:
An incompletely quenched layer called an abnormal layer exists over 5 to 50 μm from the surface. This abnormal layer has a lower hardness than the normal quenched layer existing immediately below it, and acts to reduce the compressive residual stress at the outermost surface, thus causing a reduction in fatigue strength. Further, even in a hardened steel material in which such an abnormal layer does not exist, if the surface roughness is large, this also causes a reduction in fatigue strength.

【0004】これら従来技術の問題点を解決する方法と
して、表面硬化処理を行った後ショットピーニングを行
い立方晶窒化ホウ素ホイールで研削して仕上歯切を行う
「高強度歯車の製造方法」(特開平1−264727号
公報)等の機械的研磨法が提案されている。
[0004] As a method of solving these problems of the prior art, as a method of manufacturing a high-strength gear, a surface hardening treatment is performed, then shot peening is performed, and a finish cutting is performed by grinding with a cubic boron nitride wheel. A mechanical polishing method such as that disclosed in Japanese Unexamined Patent Publication No. Hei 1-264727) has been proposed.

【0005】また、上記以外の方法として、研磨すべき
歯車の歯底に向かって電解研磨液を噴射して歯底部分を
エッチングする「歯車の電解研磨法」(特開昭62−2
4000号公報:他に特開平2−129421号公報、
特開平2−129422号公報等)などの電解研磨法が
試みられている。
[0005] As another method other than the above, an "electrolytic polishing method for gears" in which an electropolishing liquid is sprayed toward the tooth bottom of a gear to be polished and the tooth bottom is etched (Japanese Patent Laid-Open No. Sho 62-2).
No. 4000: Japanese Unexamined Patent Publication No. 2-129421,
An electrolytic polishing method such as disclosed in JP-A-2-129422 has been attempted.

【0006】また、鋼材の化学研磨法としては、「鉄、
亜鉛、またはそれら合金の化学光沢処理法」(米国特許
第3369914号)がある。この方法は、処理液とし
て過酸化水素とフッ酸のモル比が3〜7の水溶液を用い
ることが特徴であり、1分間程度の浸漬処理により光沢
表面が得られる旨の記述がなされている。
[0006] As a chemical polishing method for steel, "iron,
Chemical gloss treatment of zinc or their alloys "(US Pat. No. 3,369,914). This method is characterized in that an aqueous solution having a molar ratio of hydrogen peroxide to hydrofluoric acid of 3 to 7 is used as a treatment liquid, and it is described that a glossy surface can be obtained by immersion treatment for about 1 minute.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、特開平
1−264727号公報に開示されている機械的研磨法
では、焼入れ鋼材の硬さが硬いため加工効率が低く、特
に歯車等の形状が複雑な部品の場合には、疲労強度向上
が問題となる歯底付近を精度よく研磨しようとすると加
工効率が著しく低下するという問題を有している。
However, in the mechanical polishing method disclosed in Japanese Patent Application Laid-Open No. 1-264727, the working efficiency is low because the hardness of the hardened steel material is high, and especially the shape of gears and the like is complicated. In the case of a part, there is a problem that if the vicinity of the tooth bottom where improvement in fatigue strength is a problem is to be precisely polished, the processing efficiency is significantly reduced.

【0008】また、特開昭62−24000号公報など
で提案されている電解研磨法では、実際の機械部品にこ
の方法を適用する場合、加工精度を確保するためには対
極の配置等を部品毎に細かく変える必要があり、非常に
複雑な装置を必要するという問題点を有している。
In the electropolishing method proposed in Japanese Patent Application Laid-Open No. 62-24000, if this method is applied to actual machine parts, in order to ensure processing accuracy, the arrangement of the counter electrode and the like must be changed. It needs to be finely changed every time, and there is a problem that a very complicated device is required.

【0009】また、米国特許第3369914号に開示
されている化学光沢処理法は、研磨速度あるいは研磨量
を問題としないめっき下地用処理、または耐蝕性向上、
あるいは光沢処理の用途には適用可能である。しかしな
がら、この方法を焼入れ歯車等の厳密な寸法精度を要求
される部品の精密研磨処理等の研磨処理に適用しようと
した場合、研磨処理への適用方法および必要な諸条件が
開示されておらず、当業者が、この従来の化学研磨処理
法を部品の加工、取り分け研磨方法に適用することがで
きない。また、研磨液の組成が、フッ酸に対して過酸化
水素のモル比が3〜7と大きいため、液の放置時に過酸
化水素の分解が起こりやすく、その結果高価な過酸化水
素を浪費するばかりでなく、研磨液の安定性の観点から
工業的規模での研磨処理には難しいという問題があっ
た。
In addition, the chemical gloss treatment disclosed in US Pat. No. 3,369,914 is a method for plating undercoating that does not matter the polishing rate or polishing amount, or an improvement in corrosion resistance.
Alternatively, the present invention can be applied to the use of gloss processing. However, when this method is applied to a polishing process such as a precision polishing process for a part requiring strict dimensional accuracy such as a hardened gear, a method of applying the polishing process and necessary conditions are not disclosed. However, those skilled in the art cannot apply the conventional chemical polishing method to the processing of parts, especially the polishing method. Further, since the composition of the polishing liquid has a large molar ratio of hydrogen peroxide to hydrofluoric acid of 3 to 7, decomposition of hydrogen peroxide is apt to occur when the liquid is left, and as a result, expensive hydrogen peroxide is wasted. In addition, there is a problem that it is difficult to perform polishing on an industrial scale from the viewpoint of the stability of the polishing liquid.

【0010】そこで、本発明者らは、上述の如き従来技
術の問題点を解決すべく鋭意研究し、各種の系統的実験
を重ねた結果、本発明を成すに至ったものである。
The inventors of the present invention have conducted intensive studies to solve the above-mentioned problems of the prior art, and have conducted various systematic experiments. As a result, the present invention has been accomplished.

【0011】(発明の目的)本発明の目的は、複雑形状
を有する焼入れ鋼材などの硬化鋼部材の光沢研磨処理に
適した光沢化学研磨処理液を提供するにある。また、本
発明の他の目的は、特殊な装置を必要とせず、簡便で高
精度かつ高能率の加工ができる硬化鋼部材の光沢化学研
磨処理液を提供するにある。
(Object of the Invention) An object of the present invention is to provide a glossy chemical polishing solution suitable for glossy polishing of a hardened steel member such as a hardened steel having a complicated shape. Another object of the present invention is to provide a glossy chemical polishing solution for hardened steel members that can be processed simply, with high precision and with high efficiency without requiring special equipment.

【0012】本発明の目的は、複雑形状を有する焼入れ
鋼材を、特殊な装置を必要とせず、簡便で高精度かつ高
能率の加工をすることができる硬化鋼部材の光沢化学研
磨処理方法を提供するにある。
An object of the present invention is to provide a method for glossy chemical polishing of a hardened steel member capable of performing simple, high-precision and high-efficiency processing of a hardened steel material having a complicated shape without requiring special equipment. To be.

【0013】本発明者らは、上述の従来技術の問題に関
し、以下のことに着眼した。すなわち、先ず、上記従来
技術である機械的研磨法や電解研磨法の前記問題点を克
服する手段として化学研磨処理液に着目した。
The present inventors have focused on the following with respect to the above-mentioned problems of the prior art. That is, first, attention was paid to a chemical polishing treatment solution as a means for overcoming the above-mentioned problems of the mechanical polishing method and the electrolytic polishing method, which are the conventional techniques.

【0014】そこで、複雑形状を有する焼入れ鋼材表面
を、特殊組成からなる化学研磨液の強力な化学的溶解作
用および平滑化作用を利用して、該特殊組成の化学研磨
液への浸漬処理のみで高精度の研磨処理を可能にすると
ともに、装置の簡易化、加工効率の向上および研磨品質
の向上を実現した。
Therefore, the surface of a hardened steel material having a complicated shape is formed only by immersing the surface of the special composition in the chemical polishing liquid by utilizing the strong chemical dissolving action and the smoothing action of the chemical polishing liquid having the special composition. Along with enabling high-precision polishing processing, simplification of equipment, improvement of processing efficiency and improvement of polishing quality were realized.

【0015】[0015]

【課題を解決するための手段】[Means for Solving the Problems]

【0016】(第1発明)本第1発明の硬化鋼部材用光
沢化学研磨処理液は、硬化鋼部材用の光沢化学研磨処理
液であって、濃度が0.2〜2 mol/lのフッ酸と濃度が
0.4〜4 mol/lの過酸化水素とを含んでなり、該フッ
酸と過酸化水素の濃度の比率がモル比で1:1.5〜2.8
であることを特徴とする。
(First Invention) The glossy chemical polishing solution for hardened steel members of the first invention is a glossy chemical polishing solution for hardened steel members having a concentration of 0.2 to 2 mol / l. Acid and concentration
0.4 to 4 mol / l of hydrogen peroxide, and the molar ratio of the hydrofluoric acid to the hydrogen peroxide is 1: 1.5 to 2.8.
It is characterized by being.

【0017】(第2発明)本第2発明の硬化鋼部材の光
沢化学研磨処理方法は、鋼部材を硬化する工程と、濃度
が0.2〜2 mol/lのフッ酸と濃度が0.4〜4 mol/l
の過酸化水素とを含んでなり,該フッ酸と過酸化水素の
濃度の比率がモル比で1:1.5〜2.8 である光沢化学研
磨処理液中で前記硬化鋼部材を化学研磨する工程と、か
らなることを特徴とする。
(Second Invention) The glossy chemical polishing treatment method for a hardened steel member according to the second invention comprises a step of hardening the steel member, a hydrofluoric acid having a concentration of 0.2 to 2 mol / l and a concentration of 0.2 mol / l. 4-4 mol / l
Chemically polishing the hardened steel member in a bright chemical polishing treatment solution comprising a hydrofluoric acid and a hydrogen peroxide at a molar ratio of 1: 1.5 to 2.8. And characterized by the following.

【0018】[0018]

【作用】[Action]

【0019】第1発明の硬化鋼部材用光沢化学研磨処理
液および第2発明の硬化鋼部材の光沢化学研磨処理方法
が優れた効果を発揮するメカニズムについては、未だ必
ずしも明らかではないが、次のように考えられる。
The mechanism by which the glossy chemical polishing treatment liquid for hardened steel members of the first invention and the method for glossy chemical polishing treatment of the hardened steel members of the second invention exhibit excellent effects is not necessarily clear yet, but is as follows. It is thought to be.

【0020】(第1発明の作用)本発明の硬化鋼部材用
光沢化学研磨処理液は、濃度が0.2〜2 mol/lのフッ
酸と濃度が0.4〜4 mol/lの過酸化水素とからなり、
かつ該フッ酸と過酸化水素の濃度の比率がモル比で1:
1.5〜2.8 である。金属が酸に溶解する際の電気化学モ
デルによると、過酸化水素が共存するフッ酸溶液中で
は、被処理材との接触面で過酸化水素が接触分解反応を
起こし、生じた発生期の酸素は強い酸化力を発揮し、前
記処理面では所謂過不動態溶解が進行すると考えられ
る。この過不動態溶解では、処理面の金属組織等に基づ
く不均一な溶解は防止され、光沢面が出現する。このと
き、過不動態の形成は、フッ酸の溶解力と過酸化水素の
酸化力に強く依存し、フッ酸と過酸化水素水のモル比が
1:1.5〜2.8 の領域では、安定な過不動態が維持され
るので、前記光沢面が得られるものと考えられる。この
ように、上記構成の化学研磨処理液が有する化学的な溶
解作用のため、該研磨処理液と接する焼入れ鋼材等の硬
化鋼部材からなる被処理材の表面では形状によらず均一
な研磨が進行する。また、化学研磨処理液中の過酸化水
素が適度な濃度を有し、かつフッ酸と過酸化水素のモル
比が適度であるので、被処理材の表面に安定的に光沢面
を得ることができるとともに、被処理材の硬さには無関
係に実用速度で硬質の焼入れ鋼材の研磨を行うことがで
きる。さらに、化学研磨処理液中のフッ酸の濃度が適度
な濃度を有しているので、研磨速度を必要な速度に制御
ができる。
(Function of the First Invention) The bright chemical polishing solution for hardened steel members of the present invention has a hydrofluoric acid concentration of 0.2 to 2 mol / l and a hydrofluoric acid concentration of 0.4 to 4 mol / l. Consisting of hydrogen oxide,
And the ratio of the concentration of the hydrofluoric acid to the hydrogen peroxide is 1: 1:
1.5 to 2.8. According to the electrochemical model when the metal dissolves in the acid, in a hydrofluoric acid solution in which hydrogen peroxide coexists, hydrogen peroxide causes a catalytic decomposition reaction at the contact surface with the material to be treated, and the generated nascent oxygen Exerts a strong oxidizing power, and it is considered that so-called transpassive dissolution proceeds on the treated surface. In this overpassive dissolution, uneven dissolution based on the metal structure and the like on the treated surface is prevented, and a glossy surface appears. At this time, the formation of perpassivation strongly depends on the dissolving power of hydrofluoric acid and the oxidizing power of hydrogen peroxide, and is stable in a range of the molar ratio of hydrofluoric acid to aqueous hydrogen peroxide of 1: 1.5 to 2.8. It is considered that the above-mentioned glossy surface can be obtained because the excessive passivation is maintained. As described above, due to the chemical dissolving action of the chemical polishing solution having the above-described configuration, uniform polishing can be performed regardless of the shape on the surface of the material to be processed, which is made of a hardened steel member such as a quenched steel material, in contact with the polishing solution. proceed. Also, since the hydrogen peroxide in the chemical polishing treatment solution has an appropriate concentration and the molar ratio of hydrofluoric acid to hydrogen peroxide is appropriate, it is possible to obtain a stable glossy surface on the surface of the material to be processed. Besides, the hardened steel material can be polished at a practical speed regardless of the hardness of the material to be processed. Furthermore, since the concentration of hydrofluoric acid in the chemical polishing treatment liquid has an appropriate concentration, the polishing rate can be controlled to a required rate.

【0021】ここで、フッ酸および過酸化水素水の濃
度、フッ酸と過酸化水素の濃度の比率の数値限定理由に
ついて説明する。
The reasons for limiting the numerical values of the concentrations of hydrofluoric acid and hydrogen peroxide and the ratio of the concentrations of hydrofluoric acid and hydrogen peroxide will now be described.

【0022】フッ酸の濃度は、0.2〜2 mol/lであ
る。このフッ酸の濃度は、浴温とともに研磨速度に影響
を及ぼす。処理液温度が一定の場合は、フッ酸が高濃度
ほど研磨速度が大きくなるが、同時に反応熱による浴温
の上昇が激しくなるためさらに研磨速度は上昇し、2 m
ol/lを超える場合は、研磨速度の維持・制御が困難に
なる。一方、0.2 mol/l未満では、1μm/分以下の
研磨速度となり、能率が悪い。工業的には、研磨速度が
1〜100μm/分であることが望ましく、この研磨速
度を達成するフッ酸の濃度として、0.2〜2 mol/lが
選択される。
The concentration of hydrofluoric acid is 0.2 to 2 mol / l. The concentration of hydrofluoric acid affects the polishing rate together with the bath temperature. When the temperature of the processing solution is constant, the polishing rate increases as the concentration of hydrofluoric acid increases, but at the same time, the polishing temperature increases sharply due to the heat of reaction, and the polishing rate further increases.
If it exceeds ol / l, it becomes difficult to maintain and control the polishing rate. On the other hand, if it is less than 0.2 mol / l, the polishing rate is 1 μm / min or less, and the efficiency is poor. Industrially, the polishing rate is desirably 1 to 100 μm / min, and 0.2 to 2 mol / l is selected as the concentration of hydrofluoric acid that achieves this polishing rate.

【0023】過酸化水素の濃度は、0.4〜4 mol/lで
ある。これは、該濃度が0.4 mol/l未満の場合には光
沢が低下し、また該濃度が4 mol/lを越える場合には
反応熱による分解作用が激しくなり処理液の制御が難し
くなる。該濃度を0.4〜4 mol/lすることにより、安
定的に光沢面を得ることができる。なお、該濃度は、前
記範囲内で前記フッ酸の濃度との関係で主に決定され
る。
The concentration of hydrogen peroxide is 0.4 to 4 mol / l. This is because when the concentration is less than 0.4 mol / l, the gloss is reduced, and when the concentration is more than 4 mol / l, the decomposition action due to the heat of reaction becomes severe and the control of the treatment liquid becomes difficult. . By adjusting the concentration to 0.4 to 4 mol / l, a glossy surface can be stably obtained. Note that the concentration is mainly determined in the above range in relation to the concentration of the hydrofluoric acid.

【0024】フッ酸と過酸化水素の濃度の比率は、モル
比で1:1.5〜2.8である。該モル比が1.5未満の場合
は、被処理材の処理面の光沢が欠如、すなわち微視的平
滑化が不十分となる。また、該モル比が2.8を超える場
合は、光沢が低下することはないが、本領域における優
位性はなく、高価な過酸化水素を浪費し、かつ浴組成の
変動が起こり易くなる。該モル比を1:1.5〜2.8とす
ることにより、実用速度で光沢研磨処理を行うことがで
きる。
The ratio of the concentration of hydrofluoric acid to the concentration of hydrogen peroxide is 1: 1.5 to 2.8 in molar ratio. If the molar ratio is less than 1.5, the treated surface of the material to be treated lacks gloss, that is, microscopic smoothing becomes insufficient. If the molar ratio exceeds 2.8, the gloss does not decrease, but there is no advantage in this region, expensive hydrogen peroxide is wasted, and the bath composition tends to fluctuate. By setting the molar ratio to 1: 1.5 to 2.8, gloss polishing can be performed at a practical speed.

【0025】(第2発明の作用)本発明の硬化鋼部材の
光沢化学研磨処理方法は、焼入れ処理等の硬化処理を施
した鋼材を、特定濃度のフッ酸と特定濃度の過酸化水素
を特定モル比に調製した化学研磨処理液に浸漬して化学
研磨処理を行う方法である。これより、特殊構成の化学
研磨処理液が有する化学的な溶解作用のため、該研磨処
理液と接する前記鋼材からなる被処理材の表面では形状
によらず均一な研磨が進行する。また、化学研磨処理液
中の過酸化水素が適度な濃度を有し、かつフッ酸と過酸
化水素のモル比が適度であるので、被処理材の表面に安
定的に光沢面を得ることができるとともに、被処理材の
硬さには無関係に実用速度で硬質の焼入れ鋼材等の硬化
鋼部材の研磨を行うことができる。さらに、本発明方法
は、化学研磨処理液中のフッ酸の濃度が適度な濃度を有
しているので、研磨速度を必要な速度に制御ができる。
以上により、焼入れ鋼材等の硬質の硬化鋼部材の研磨効
率を向上することができる。なお、化学研磨処理液のフ
ッ酸および過酸化水素の濃度、フッ酸と過酸化水素の濃
度の比率の数値限定理由については前記第1発明の作用
の説明で述べた通りである。
(Function of the Second Invention) The glossy chemical polishing treatment method for a hardened steel member of the present invention specifies a specific concentration of hydrofluoric acid and a specific concentration of hydrogen peroxide in a steel material subjected to a hardening treatment such as quenching. This is a method in which a chemical polishing treatment is performed by immersion in a chemical polishing treatment solution adjusted to a molar ratio. As a result, due to the chemical dissolving action of the specially configured chemical polishing solution, uniform polishing proceeds irrespective of the shape on the surface of the material to be processed made of the steel in contact with the polishing solution. In addition, since the hydrogen peroxide in the chemical polishing treatment solution has an appropriate concentration and the molar ratio between hydrofluoric acid and hydrogen peroxide is appropriate, it is possible to stably obtain a glossy surface on the surface of the workpiece. Besides, it is possible to polish a hardened steel member such as a hardened steel material at a practical speed irrespective of the hardness of the material to be processed. Further, in the method of the present invention, since the concentration of hydrofluoric acid in the chemical polishing treatment liquid has an appropriate concentration, the polishing rate can be controlled to a required rate.
As described above, the polishing efficiency of a hard hardened steel member such as a hardened steel material can be improved. The reasons for limiting the numerical values of the concentration of hydrofluoric acid and hydrogen peroxide and the ratio of the concentration of hydrofluoric acid to hydrogen peroxide in the chemical polishing treatment liquid are as described in the description of the operation of the first invention.

【0026】[0026]

【発明の効果】【The invention's effect】

(第1発明の効果)本第1発明の硬化鋼部材用光沢化学
研磨処理液は、焼入れ鋼材等の硬化鋼部材の接触面に安
定的に光沢面を形成することができるとともに、該被処
理物の硬さには無関係に実用速度で硬質の焼入れ鋼材の
研磨を行うことができる。また、被処理材の形状によら
ず均一な研磨をすることができる。
(Effect of the First Invention) The glossy chemical polishing solution for hardened steel members of the first invention can stably form a glossy surface on the contact surface of a hardened steel member such as a quenched steel material, and can perform the treatment. The hardened steel material can be polished at a practical speed regardless of the hardness of the object. In addition, uniform polishing can be performed regardless of the shape of the material to be processed.

【0027】(第2発明の効果)本第2発明の硬化鋼部
材の光沢化学研磨処理方法により、複雑形状を有する焼
入れ鋼材を、特殊な装置を必要とせず、簡便で高精度か
つ高能率の加工をすることができる。その結果、浸炭焼
入れ歯車等においては、浸炭異常層が除去され、また表
面粗さが減少し、疲労強度を大幅に向上させることがで
きる。さらに、表面は光沢仕上げとなるため、外観上の
商品価値が向上するとともに、表面の電気化学的な不均
一性が緩和される結果、錆発生に対する抵抗力が向上す
るという効果も有する。
(Effect of the Second Invention) The glossy chemical polishing method for hardened steel members according to the second invention enables simple, high-precision and high-efficiency hardening of a hardened steel material having a complicated shape without the need for a special device. Can be processed. As a result, in a carburized and quenched gear or the like, the abnormal carburized layer is removed, the surface roughness is reduced, and the fatigue strength can be significantly improved. Furthermore, since the surface has a gloss finish, the commercial value of the appearance is improved, and the electrochemical non-uniformity of the surface is reduced, so that the resistance to rust generation is improved.

【0028】[0028]

【実施例】以下に、前記第1発明および第2発明をさら
に具体的にした具体例(第2発明について説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The first and second aspects of the present invention will be described below in more detail with reference to specific examples (the second aspect will be described.

【0029】まず、本第1発明の具体例(第1具体例)
の硬化鋼部材用光沢化学研磨処理液について、以下に説
明する。
First, a specific example of the first invention (first specific example)
The glossy chemical polishing solution for hardened steel members is described below.

【0030】本第1具体例の硬化鋼部材用光沢化学研磨
処理液において、フッ酸は、まず通常の酸としての働き
により、鋼材表面を化学的に溶解除去させる役割を果た
すものである。一般に、化学研磨液は酸+酸化剤とから
構成される。本発明において、酸としてフッ酸を採用し
たのは、研磨により溶出するFeイオンがFeF6 3-
の錯イオンとして浴中で安定化するためである。この結
果、過酸化水素がFeイオンの触媒作用により自然分解
することが抑制され、工業規模での処理が可能となる。
In the glossy chemical polishing solution for hardened steel members of the first specific example, hydrofluoric acid plays a role of chemically dissolving and removing the surface of the steel material by first acting as a normal acid. Generally, the chemical polishing liquid is composed of an acid and an oxidizing agent. In the present invention, hydrofluoric acid is used as the acid because Fe ions eluted by polishing are stabilized in the bath as complex ions such as FeF 6 3- . As a result, spontaneous decomposition of hydrogen peroxide due to the catalytic action of Fe ions is suppressed, and treatment on an industrial scale becomes possible.

【0031】本第1具体例において用いるフッ酸は、具
体的には、無水フッ酸(99%以上)、希フッ酸の何れ
でもよいが、処理液調整時の取扱い性や工業薬品として
の入手の容易性等の観点より、濃度50%前後の希フッ
酸が好ましい。前記第1発明において用いるフッ酸の濃
度は、0.2〜2 mol/lである。なお、本具体例におい
て、該フッ酸の濃度は、 0.3 mol/l〜 1.5 mol/lで
あることが好ましい。該範囲内とすることにより、処理
温度によっても異なるが、研磨速度が2〜50μm/分
程度と十分な研磨速度が得られるとともに、研磨速度の
維持・制御がよりし易くなる。
The hydrofluoric acid used in the first specific example may be either hydrofluoric anhydride (99% or more) or dilute hydrofluoric acid. From the viewpoint of easiness of the treatment, dilute hydrofluoric acid having a concentration of about 50% is preferable. The concentration of hydrofluoric acid used in the first invention is 0.2 to 2 mol / l. In this specific example, the concentration of the hydrofluoric acid is preferably from 0.3 mol / l to 1.5 mol / l. By setting the content within the above range, a sufficient polishing rate of about 2 to 50 μm / min is obtained, though it varies depending on the processing temperature, and the polishing rate can be easily maintained and controlled.

【0032】過酸化水素は、Feの溶解を促進するとと
もに、化学研磨面の光沢化、すなわち微視的平滑化を奏
する酸化剤である。本第1具体例において、酸化剤とし
て過酸化水素を用いたのは、その強い酸化力に加え、処
理後の生成物が水(H2O)と酸素ガス(O2 )となる
ためである。この結果、生成物の妨害効果がなく長時間
の処理を行い易く、また、廃液処理等においても極めて
好都合である。この過酸化水素は、その種類は特に限定
されるものではないが、通常工業薬品として入手可能な
30〜60%濃度の過酸化水素水が好適である。
Hydrogen peroxide is an oxidizing agent that promotes the dissolution of Fe and also makes the chemically polished surface glossy, that is, microscopically smooth. In the first specific example, the reason why hydrogen peroxide was used as the oxidizing agent is that, in addition to its strong oxidizing power, products after the treatment are water (H 2 O) and oxygen gas (O 2 ). . As a result, it is easy to perform the treatment for a long time without the obstructive effect of the product, and it is very convenient also in the treatment of the waste liquid. The type of the hydrogen peroxide is not particularly limited, but 30 to 60% aqueous hydrogen peroxide which is generally available as an industrial chemical is preferable.

【0033】また、該過酸化水素水の濃度は、0.6〜
3.0 mol/lであることが好ましい。これは、該濃度が
0.6 mol/l以上の場合には、安定的に十分な光沢面を
得ることができるので好ましい。また、該濃度が3.0 m
ol/l以下の場合には、反応熱による分解が起こりにく
いので好ましい。該濃度範囲を、0.6〜3.0 mol/l内
とすることにより、特に、連続処理により長時間使用す
る場合には、より安定的に用いることができるという特
有の効果を奏することができる。
The concentration of the aqueous hydrogen peroxide is 0.6 to 0.6.
Preferably it is 3.0 mol / l. This means that the concentration
When the amount is 0.6 mol / l or more, a sufficient glossy surface can be stably obtained, which is preferable. The concentration is 3.0 m
When the amount is not more than ol / l, it is preferable because decomposition by reaction heat hardly occurs. By setting the concentration range to be within the range of 0.6 to 3.0 mol / l, a particular effect can be exhibited in that the compound can be used more stably, particularly when used for a long time by continuous treatment. it can.

【0034】本具体例の光沢化学研磨処理液は、酸とし
ての前記フッ酸および酸化剤としての前記過酸化水素、
さらに必要に応じて水や添加剤の適切な組合せによりな
り、実用速度での光沢研磨を可能にするものである。
The glossy chemical polishing solution of the present embodiment comprises the hydrofluoric acid as an acid, the hydrogen peroxide as an oxidizing agent,
Further, it is made of an appropriate combination of water and additives as required, and enables gloss polishing at a practical speed.

【0035】ここで、フッ酸と過酸化水素の濃度の比率
は、モル比で1:1.6〜2.4であることが好ましい。該
モル比が1.6以上の場合は、よりきれいな光沢面が得ら
れる。また、連続処理をする場合、消耗物を補給した時
に濃度の変動が起こっても、十分な光沢面が得られる。
また、該モル比が2.4以下の場合は、処理液の組成変動
をより抑えられ、また、高価な過酸化水素の浪費も防止
できる。
Here, the ratio of the concentration of hydrofluoric acid to the concentration of hydrogen peroxide is preferably from 1: 1.6 to 2.4 in molar ratio. When the molar ratio is 1.6 or more, a clearer glossy surface can be obtained. In the case of continuous processing, a sufficient glossy surface can be obtained even if the density fluctuates when replenishing consumables.
When the molar ratio is 2.4 or less, the composition fluctuation of the processing solution can be further suppressed, and waste of expensive hydrogen peroxide can be prevented.

【0036】次に、本第2発明の具体例(第2具体例)
の硬化鋼部材の光沢化学研磨処理方法について、以下に
説明する。
Next, a specific example of the second invention (second specific example)
The glossy chemical polishing treatment method for the hardened steel member will be described below.

【0037】第2発明および本第2具体例は、前記第1
発明または第1具体例の硬化鋼部材用光沢化学研磨処理
液を用いた鋼部材の光沢化学研磨処理方法に関する発明
である。
The second invention and the second specific example correspond to the first embodiment.
The present invention relates to a method for performing a gloss chemical polishing treatment of a steel member using the gloss chemical polishing treatment solution for hardened steel members of the invention or the first specific example.

【0038】本第2具体例の硬化鋼部材の光沢化学研磨
処理方法において、先ず、鋼部材を硬化する(鋼部材硬
化処理工程)。この工程では、被処理材としての鋼部材
を、浸炭焼入れ、高周波焼入れ、炎焼入れ等の方法によ
り硬化処理を施す。なお、予め硬化処理を施したものを
用いてもよく、また焼入れ処理等の処理の後に通常の焼
戻し処理が施されたものでもよい。ただし、金属組織的
には、生地の大部分が所謂マルテンサイト組織となって
いるものが好ましい。
In the gloss chemical polishing method for a hardened steel member according to the second embodiment, first, a steel member is hardened (a steel member hardening process). In this step, a steel member as a material to be treated is subjected to a hardening treatment by a method such as carburizing and quenching, induction quenching, and flame quenching. Note that a material that has been subjected to a curing treatment in advance may be used, or a material that has been subjected to a normal tempering treatment after a treatment such as a quenching treatment may be used. However, in terms of metallographic structure, it is preferable that most of the fabric has a so-called martensite structure.

【0039】該鋼部材の鋼種としては、炭素鋼、クロム
鋼、ニッケル−クロム−モリブデン鋼等、酸に対して容
易に溶解するものであれば何れの鋼種でも適用可能であ
る。但し、ステンレス鋼のように酸に対する抵抗力が極
めて大きい一部の鋼種については、化学的溶解が事実上
進行しないため本発明の適用は難しい。また、生地中に
酸に対して安定な各種の炭化物等の析出粒子が存在する
鋼材では、析出粒子径が小さいものであることが好まし
い。
As the steel type of the steel member, any steel type, such as carbon steel, chromium steel and nickel-chromium-molybdenum steel, can be used as long as it can be easily dissolved in an acid. However, the application of the present invention is difficult for some steel types, such as stainless steel, which have extremely high acid resistance, since chemical dissolution does not substantially proceed. Further, in a steel material in which precipitated particles such as various carbides stable to an acid are present in the dough, it is preferable that the precipitated particle diameter is small.

【0040】該鋼材の形状は、如何なるものでもよい
が、本具体例の研磨処理液中に浸漬された場合に研磨所
望部が液と十分に接触し、かつ液の攪拌作用を受けるこ
とができる形状・構造であることが望ましい。従って、
研磨所望部が極端に狭い隙間あるいは袋部でない構造で
あることが好ましい。なお、鋼材がこのような好適な形
状・構造でない場合には、研磨液の噴流を研磨所望部に
供給するなど、処理雰囲気が活性状態となるようにする
ことが好ましい。
The shape of the steel material may be any shape, but when immersed in the polishing treatment liquid of the present embodiment, the desired portion to be polished comes into sufficient contact with the liquid and can be subjected to the stirring action of the liquid. It is desirable that the shape and structure be used. Therefore,
It is preferable that the portion to be polished does not have an extremely narrow gap or a bag portion. When the steel material does not have such a suitable shape and structure, it is preferable that the processing atmosphere be in an active state, for example, by supplying a jet of a polishing liquid to a desired polishing portion.

【0041】次いで、光沢化学研磨処理液中で前記硬化
鋼部材を化学研磨する(化学研磨処理工程)。ここで、
光沢化学研磨処理液は、第1発明または第1具体例で説
明した処理液を用いる。すなわち、濃度が0.2〜2 mol
/lのフッ酸と濃度が0.4〜4 mol/lの過酸化水素と
からなり、かつ該フッ酸と過酸化水素の濃度の比率がモ
ル比で1:1.5〜2.8 からなる処理液である。または、
濃度が0.3〜1.5 mol/lのフッ酸と濃度が0.6〜3 m
ol/lの過酸化水素とからなり、かつ該フッ酸と過酸化
水素の濃度の比率がモル比で1:1.6〜2.4からなる処
理液であることが好ましい。なお、フッ酸、過酸化水
素、それらの濃度、および濃度の比率は、前記第1発明
または第1具体例で説明した通りである。
Next, the hardened steel member is chemically polished in a glossy chemical polishing solution (chemical polishing process). here,
As the gloss chemical polishing treatment liquid, the treatment liquid described in the first invention or the first embodiment is used. That is, the concentration is 0.2 to 2 mol
/ L hydrofluoric acid and a concentration of 0.4 to 4 mol / l hydrogen peroxide and a molar ratio of the hydrofluoric acid to the hydrogen peroxide of 1: 1.5 to 2.8. Liquid. Or
Hydrofluoric acid with a concentration of 0.3 to 1.5 mol / l and a concentration of 0.6 to 3 m
ol / l of hydrogen peroxide, and a treatment liquid having a molar ratio of the hydrofluoric acid to the hydrogen peroxide of 1: 1.6 to 2.4 is preferable. The hydrofluoric acid, hydrogen peroxide, their concentrations, and the ratio of the concentrations are as described in the first invention or the first specific example.

【0042】次に、本具体例の硬化鋼部材の光沢研磨処
理方法について、その具体的一例を簡単に説明すると以
下のようである。すなわち、先ず、本方法で用いる光沢
研磨処理液を用意する。該研磨処理液は、フッ酸および
過酸化水素を所定のモル濃度で含有する水溶液として調
整される。該調整法としては、特に限定されるものでは
ないが、通常最も容易な方法としては、工業薬品として
の希フッ酸および過酸化水素水を重量法若しくは容量法
で所定の量計量した後、両者を混合し、さらにこれに不
足分の水を添加して所定の濃度の水溶液とするものであ
る。使用する薬品および希釈用の水は、特に不純物が多
くなければ処理に支障をきたすことはないが、薬品は試
薬1級以上、水はイオン交換水を用いることが好まし
い。
Next, a specific example of the gloss polishing treatment method for the hardened steel member of this embodiment will be briefly described as follows. That is, first, a gloss polishing treatment liquid used in the present method is prepared. The polishing liquid is prepared as an aqueous solution containing hydrofluoric acid and hydrogen peroxide at a predetermined molar concentration. The adjusting method is not particularly limited, but usually the easiest method is to measure a predetermined amount of dilute hydrofluoric acid and hydrogen peroxide solution as industrial chemicals by a gravimetric method or a volumetric method, Are mixed, and further, insufficient water is added thereto to obtain an aqueous solution having a predetermined concentration. The chemical used and the water for dilution do not hinder the treatment unless the impurities are particularly large. However, it is preferable to use the first-grade reagent or more and the ion-exchanged water as the chemical.

【0043】なお、本第2具体例の光沢化学研磨処理方
法において、硬化処理された鋼部材が清浄な状態である
場合には直ちに化学研磨処理を施してもよいが、通常の
焼入れ鋼材等の硬化鋼部材では油分等の汚れが付着して
おり、このような場合には、本化学研磨処理に入る前に
それらの汚れを除去する清浄化処理を施すことが好まし
い。該清浄化処理としては、有機溶剤あるいはアルカリ
性の洗浄液などにより清浄化を施すなど、通常の清浄化
処理で用いられる方法を適用することができる。また、
表面に酸化スケール等が存在する焼入れ鋼材の場合は、
該酸化スケールが極端に厚い皮膜でなければ、特に除去
する必要がないが、厚く、かつ極端に強固に付着してい
る場合には、ショットブラスト等の機械的強制剥離法あ
るいは酸エッチング等の方法により除去しておくことが
好ましい。
In the gloss chemical polishing method of the second embodiment, if the hardened steel member is in a clean state, it may be subjected to chemical polishing immediately. Dirt such as oil is attached to the hardened steel member, and in such a case, it is preferable to perform a cleaning process for removing the dirt before starting the chemical polishing process. As the cleaning treatment, a method used in ordinary cleaning treatment, such as cleaning with an organic solvent or an alkaline cleaning liquid, can be applied. Also,
In the case of quenched steel with oxide scale etc. on the surface,
It is not necessary to remove the oxide scale unless it is an extremely thick film. However, if the oxide scale is thick and extremely strongly adhered, a method such as a mechanical forced peeling method such as shot blasting or an acid etching method is used. It is preferable to remove them.

【0044】前記のように必要により前処理が施された
焼入れ鋼材などの硬化鋼部材は、所定の濃度に調整され
た前記第1発明または第1具体例にかかる処理液に浸漬
される。該処理は、酸素ガスの発生を伴って進行するの
で、発生ガスによる自然攪拌効果が大きく、特に攪拌手
段を付加する必要はない。また、処理の進行に伴う反応
熱により、浴温が上昇傾向となるが、浴温の上昇は研磨
速度の上昇を伴うため処理精度を確保するためには、で
きるだけ浴温を一定に保つことが好ましい。このように
して所定の時間、すなわち所望の研磨量が得られるまで
浸漬処理された後、引上げ、洗浄、乾燥処理を行う。こ
の時、処理面が錆色に変色し、使用目的によっては不都
合となる場合があるが、この時は洗浄工程の前に薄い
酸、具体的には2〜3%程度の塩酸等による後酸洗工
程、さらにアルカリ中和工程を付加することにより解消
される。
The hardened steel member, such as a quenched steel material, which has been subjected to pretreatment as required, is immersed in the treatment liquid according to the first invention or the first embodiment adjusted to a predetermined concentration. Since this process proceeds with the generation of oxygen gas, the natural stirring effect of the generated gas is large, and it is not necessary to add a stirring means. The bath temperature tends to increase due to the heat of reaction accompanying the progress of the process, but the increase in the bath temperature is accompanied by an increase in the polishing rate. preferable. After being immersed in this manner for a predetermined time, that is, until a desired polishing amount is obtained, pulling, washing, and drying are performed. At this time, the treated surface may be discolored to a rust color, which may be inconvenient depending on the purpose of use. In this case, before the washing step, post-acid washing with a thin acid, specifically, about 2 to 3% hydrochloric acid or the like is performed. The problem can be solved by adding a step and further an alkali neutralization step.

【0045】本具体例の光沢化学研磨処理方法は、一般
の焼入れ鋼部品等の硬化鋼部材の研磨等に広く適用可能
であるが、特に従来の機械的研磨法、あるいは電解研磨
法の適用が難しい複雑形状の部品の研磨に威力を発揮
し、例えば、自動車関連部品では各種歯車類、ベアリン
グ類、スプリング類、等の疲労強度の向上あるいは摩擦
摩耗特性の向上等の用途に効果的に使用することができ
る。
The glossy chemical polishing method of this embodiment can be widely applied to polishing of hardened steel members such as general hardened steel parts, and particularly, the conventional mechanical polishing method or electrolytic polishing method can be applied. Demonstrates its power in polishing difficult parts with complicated shapes.For example, in automotive-related parts, it is effectively used for applications such as improvement of fatigue strength of various gears, bearings, springs, etc. or improvement of friction and wear characteristics. be able to.

【0046】なお、本具体例の硬化鋼部材の光沢化学研
磨処理方法において、特に連続的に、及び/又は大量に
化学研磨処理を施す場合により好適な方法について、以
下に説明する。
The gloss chemical polishing method for the hardened steel member of the present embodiment, which is particularly preferable when the chemical polishing processing is performed continuously and / or in large quantities, will be described below.

【0047】すなわち、化学研磨工程において、濃度の
比較的濃い(高い)化学研磨処理液で被処理材の光沢化
学研磨を行った後、さらに、濃度の比較的薄い(低い)
化学研磨処理液で処理する硬化鋼部材の光沢化学研磨処
理方法である。
That is, in the chemical polishing step, after the material to be processed is subjected to gloss chemical polishing with a chemical polishing treatment liquid having a relatively high concentration (high), the concentration is further reduced (low).
This is a glossy chemical polishing treatment method for a hardened steel member treated with a chemical polishing treatment liquid.

【0048】高濃度の化学研磨処理液で処理したあと、
所定時間経過後に水洗をすると、被処理材表面に付着し
た高濃度処理液により反応が進行し、光沢が低下するこ
とがある。このように二段化学研磨処理することによ
り、すなわち、低濃度処理液で再処理することにより、
前記反応の進行により低下した光沢を回復することがで
きる。また、処理後、水洗までの保持の間、被処理材表
面の付着処理液による反応が余り進まないので、より優
れた光沢面を発現することができる。従って、この方法
は、連続的に、及び/又は大量に化学研磨処理を施す場
合には、特に好適である。
After being treated with a high concentration chemical polishing treatment solution,
If water is washed after a lapse of a predetermined time, the reaction may proceed due to the high-concentration processing liquid adhering to the surface of the material to be processed, and the gloss may decrease. By performing the two-stage chemical polishing process in this way, that is, by reprocessing with a low-concentration processing solution,
The gloss reduced by the progress of the reaction can be recovered. Further, after the treatment, the reaction of the surface of the material to be treated with the adhesion treatment liquid does not proceed so much during the holding until the washing with water, so that a more excellent glossy surface can be exhibited. Therefore, this method is particularly suitable when a chemical polishing treatment is performed continuously and / or in a large amount.

【0049】該方法は、さらに、鋼部材を硬化する工程
と、モル濃度が 0.8〜1.5mol/lのフッ酸と,モル濃度
が 1.6〜 3.0mol/lの過酸化水素とからなり,前記フ
ッ酸と前記過酸化水素とのモル比が1: 1.6〜 2.4の高
い濃度の化学研磨処理液で前記硬化鋼部材を化学研磨処
理する第1化学研磨処理工程と、モル濃度が 0.2〜0.8m
ol/lのフッ酸と,モル濃度が 0.4〜 1.6 mol/lの過
酸化水素とからなり,前記フッ酸と前記過酸化水素との
モル比が1:1.5〜 2.8の低い濃度の化学研磨処理液で
前記一次化学研磨処理した硬化鋼部材を化学研磨処理す
る第2化学研磨処理工程と、からなることを特徴とする
硬化鋼部材の光沢化学研磨処理方法であることが好適で
ある。
The method further comprises a step of hardening the steel member, hydrofluoric acid having a molar concentration of 0.8 to 1.5 mol / l, and hydrogen peroxide having a molar concentration of 1.6 to 3.0 mol / l. A first chemical polishing treatment step of chemically polishing the hardened steel member with a chemical polishing treatment liquid having a high molar ratio of an acid to the hydrogen peroxide of 1: 1.6 to 2.4, and a molar concentration of 0.2 to 0.8 m
ol / l hydrofluoric acid and a hydrogen peroxide having a molar concentration of 0.4 to 1.6 mol / l, and a chemical polishing treatment with a low concentration of the hydrofluoric acid and the hydrogen peroxide of 1: 1.5 to 2.8. It is preferable that the method comprises a second chemical polishing treatment step of chemically polishing the hardened steel member subjected to the primary chemical polishing treatment with a liquid.

【0050】以下に、本発明の実施例を説明する。An embodiment of the present invention will be described below.

【0051】第1実施例 JIS SCr 420H クロム鋼からなる被処理材(大きさ:15
mm×10mm×50mm)を準備した。表面は切削加工により3
〜4μRz 仕上げとした。次に、この被処理材を、表1
に示す条件で浸炭焼入れを行い、研磨試料とした。
First Embodiment Material to be treated made of JIS SCr 420H chrome steel (size: 15
mm × 10 mm × 50 mm). The surface is 3 by cutting
It was ~4μR z finish. Next, this material to be treated is shown in Table 1.
Carburizing and quenching were performed under the conditions shown in Table 1 to obtain polished samples.

【0052】[0052]

【表1】 [Table 1]

【0053】次に、市販の試薬47%フッ化水素酸、3
0%過酸化水素水およびイオン交換水を用い、表2に示
す組成となるように混合し、各500mlの化学研磨処
理液を調製した。
Next, a commercially available reagent 47% hydrofluoric acid, 3%
Using 0% hydrogen peroxide solution and ion-exchanged water, the components were mixed to have the composition shown in Table 2 to prepare 500 ml of a chemical polishing solution.

【0054】[0054]

【表2】 [Table 2]

【0055】次いで、用意した研磨試料をアルカリ脱脂
液で脱脂した後、第2表に示す温度に保持された各研磨
処理液中に浸漬し、2分間の処理を施した。続いて、洗
浄、水切り、乾燥を行い、表面光沢の有無および研磨深
さの測定を行い、研磨速度を算出した。その結果を、表
2に示す。
Next, the prepared polishing sample was degreased with an alkaline degreasing solution, immersed in each polishing solution maintained at the temperature shown in Table 2, and subjected to a treatment for 2 minutes. Subsequently, washing, draining, and drying were performed, the presence or absence of surface gloss and the polishing depth were measured, and the polishing rate was calculated. Table 2 shows the results.

【0056】なお、比較のために、処理液の組成が異な
るほかは、本実施例と同様の条件により化学研磨処理を
施し、同様の性能評価を行った(試料番号C1〜C
6)。その結果を、表3に併せて示す。
For comparison, chemical polishing was performed under the same conditions as in this example except that the composition of the processing solution was different, and the same performance evaluation was performed (sample numbers C1 to C).
6). The results are shown in Table 3.

【0057】[0057]

【表3】 [Table 3]

【0058】表2および表3より明らかの如く、フッ酸
濃度0.2 〜2mol/l、過酸化水素濃度0.4〜4 mol/
l、およびフッ酸と過酸化水素のモル比が1:1.5〜
2.8の組成を有する処理液で研磨された試料番号1〜1
0の本実施例の場合は、いずれも表面は光沢を有し、か
つ研磨速度は1.2〜98.5μm/分の値を有していた。
これに対して、比較用試料C1では表面光沢がなく、試
料番号C2と共に研磨速度は1μm/分以下と遅かっ
た。また、試料番号C3では研磨速度が著しく大きくな
り、研磨処理の制御不能となった。また、試料番号C4
およびC5では、表面の光沢のない梨地状であった。さ
らに、試料番号C6では、研磨速度および表面光沢とも
に本実施例と同様の値が得られているが、処理液の分解
が激しく、それに伴い研磨速度が大きく低下した。
As is clear from Tables 2 and 3, the concentration of hydrofluoric acid is 0.2 to 2 mol / l and the concentration of hydrogen peroxide is 0.4 to 4 mol / l.
l, and the molar ratio of hydrofluoric acid to hydrogen peroxide is 1: 1.5 to
Sample Nos. 1 to 1 polished with a processing solution having a composition of 2.8
In the case of this example of 0, the surface was glossy in all cases, and the polishing rate had a value of 1.2 to 98.5 μm / min.
On the other hand, the comparative sample C1 had no surface gloss, and together with the sample number C2, the polishing rate was as low as 1 μm / min or less. In sample C3, the polishing rate was extremely high, and the polishing process could not be controlled. In addition, sample number C4
And C5, the surface was matte with no gloss. Further, in sample No. C6, the same values were obtained for both the polishing rate and the surface gloss as in this example, but the treatment liquid was severely decomposed, and the polishing rate was significantly reduced accordingly.

【0059】第2実施例 Second Embodiment

【0060】JIS SCM420H クロム・モリブデン鋼(試料
番号11)および SNCM420H ニッケル・クロム・モリブ
デン鋼(試料番号12)の丸棒(15mmφ、長さ 100mm)
を用意し、前記第1実施例と同様に第1表に示す条件に
て浸炭焼入れを施した。また、同様寸法の JIS S55C 炭
素鋼材(試料番号13)を用意し、周波数150KHZ
にて有効硬化深さ1〜2mmの高周波焼入れ処理を行っ
た。次に、この三種類の焼入れ鋼材を表面粗さが4μR
z 程度となるように研削加工し、研磨試料とした。
Round bars (15 mmφ, length 100 mm) of JIS SCM420H chromium-molybdenum steel (sample No. 11) and SNCM420H nickel-chromium-molybdenum steel (sample No. 12)
And carburized and quenched under the conditions shown in Table 1 in the same manner as in the first embodiment. Also, providing a similar dimension JIS S55C carbon steel (Sample No. 13), the frequency 150KH Z
, An induction hardening treatment with an effective hardening depth of 1 to 2 mm was performed. Next, these three types of quenched steels have a surface roughness of 4 μR.
Grinding processing was performed to about z to obtain a polished sample.

【0061】次に、フッ酸1 mol/l、過酸化水素2 m
ol/l、フッ酸と過酸化水素のモル比が1:2.0の化学
研磨処理液を調製した。
Next, hydrofluoric acid 1 mol / l, hydrogen peroxide 2 m
ol / l, a chemical polishing treatment liquid having a molar ratio of hydrofluoric acid to hydrogen peroxide of 1: 2.0 was prepared.

【0062】次いで、研磨試料をアルカリ脱脂したの
ち、40℃に保持した上記化学研磨処理液に浸漬し、3
分間の研磨処理を施した。
Next, the polished sample was degreased with alkali, and then immersed in the above-mentioned chemical polishing treatment liquid kept at 40 ° C.
For a minute.

【0063】得られた研磨試料の表面は、何れも鏡面状
の光沢を有していた。次いで、この研磨試料について、
研磨深さ、研磨速度および表面粗さの測定を行った。そ
の結果を、表4に示す。
The surface of each of the obtained polished samples had a mirror-like gloss. Then, for this polishing sample,
The polishing depth, polishing rate and surface roughness were measured. Table 4 shows the results.

【0064】[0064]

【表4】 [Table 4]

【0065】第4表より明らかの如く、表面粗さは3分
間の化学研磨処理により大幅に向上しており、また研磨
深さ、すなわち研磨速度は、試料の種類によらずほとん
ど同一の値を有しており、高能率の加工であることが確
認された。
As is evident from Table 4, the surface roughness was significantly improved by the chemical polishing treatment for 3 minutes, and the polishing depth, that is, the polishing rate, was almost the same regardless of the type of the sample. It was confirmed that the processing was highly efficient.

【0066】第3実施例 Third Embodiment

【0067】JIS SCr420H クロム鋼製歯車(モジュー
ル:2.75、ピッチ円半径:85mm、歯数28)を用意
し、前記第1実施例と同様に表1に示す条件にて浸炭焼
入れを施した。次に、前記第2実施例で用いたものと同
様の化学研磨処理液を用意し、処理温度40℃にて前記
歯車を浸漬し、2分30秒の研磨処理を施した。これに
より、研磨部は、光輝仕上げとなった。次いで、歯車の
寸法の変化、すなわち研磨深さを、歯元、歯中央、歯先
部の各部において測定を行った。得られた結果を、表5
に示す。
A JIS SCr420H chrome steel gear (module: 2.75, pitch circle radius: 85 mm, number of teeth: 28) was prepared and carburized and quenched under the conditions shown in Table 1 in the same manner as in the first embodiment. . Next, a chemical polishing treatment liquid similar to that used in the second embodiment was prepared, the gear was immersed at a treatment temperature of 40 ° C., and a polishing treatment was performed for 2 minutes and 30 seconds. As a result, the polished portion had a bright finish. Next, the change in the dimension of the gear, that is, the polishing depth, was measured at each of the tooth root, the tooth center, and the tooth tip. Table 5 shows the obtained results.
Shown in

【0068】[0068]

【表5】 [Table 5]

【0069】表5より明らかの如く、歯元、歯中央、歯
先部のそれぞれの研磨深さはほぼ一致しており、このよ
うな複雑形状を有する焼入れ鋼材においても高精度の研
磨加工が可能であることが確認された。
As is clear from Table 5, the polishing depths of the root, the center of the tooth, and the tooth tip are almost the same, and high precision polishing can be performed even on a hardened steel material having such a complicated shape. Was confirmed.

【0070】第4実施例 Fourth Embodiment

【0071】前記第1実施例と同様の被処理材を用い、
同様に浸炭焼入れを行い、研磨試料とした(試料番号1
5〜19)。
Using the same material to be processed as in the first embodiment,
Similarly, carburizing and quenching were performed to obtain a polished sample (sample No. 1).
5-19).

【0072】次に、市販の試薬47%のフッ化水素酸、
30%過酸化水素水およびイオン交換水を用い、表6に
示す組成となるように混合し、各500mlの化学研磨処
理液を調整した。
Next, a commercially available reagent of 47% hydrofluoric acid,
Using a 30% hydrogen peroxide solution and ion-exchanged water, mixing was performed so as to obtain the composition shown in Table 6, and 500 ml of each chemical polishing treatment solution was prepared.

【0073】次いで、用意した研磨試料をアルカリ脱脂
した後、表6に示す温度に保持された各研磨処理液中に
浸漬し、2分間の処理を施した。続いて、前記第1実施
例と同様にして、洗浄、水切り、乾燥を行い、表面光沢
の有無および研磨深さの測定を行い、研磨速度を算出し
た。その結果を、表6に示す。
Next, the prepared polishing sample was degreased with an alkali, immersed in each polishing solution maintained at the temperature shown in Table 6, and treated for 2 minutes. Subsequently, washing, draining, and drying were performed in the same manner as in the first example, the presence or absence of surface gloss and the polishing depth were measured, and the polishing rate was calculated. Table 6 shows the results.

【0074】[0074]

【表6】 [Table 6]

【0075】第5実施例 Fifth Embodiment

【0076】前記第1実施例と同様の被処理材を用い、
同様に浸炭焼入れを行い、研磨試料とした。
Using the same material to be processed as in the first embodiment,
Similarly, carburizing and quenching were performed to obtain a polished sample.

【0077】次に、前記第1実施例の試料番号2と同組
成の処理液(高濃度処理液)、および同実施例の試料番
号1と同組成の処理液(低濃度処理液)を用意した。
Next, a processing solution having the same composition as the sample No. 2 of the first embodiment (a high-concentration processing solution) and a processing solution having the same composition as the sample No. 1 of the same embodiment (a low-concentration processing solution) were prepared. did.

【0078】次いで、該高濃度処理液に前記研磨試料を
3分間浸漬し化学研磨処理した後、研磨試料を引上げ、
約20秒間保持した。その後、さらに、前記低濃度処理
液に10秒間浸漬し、研磨試料を引上げ、約20秒間保
持した。
Next, the polishing sample was immersed in the high-concentration processing solution for 3 minutes to perform a chemical polishing treatment.
Hold for about 20 seconds. Thereafter, the polishing sample was further dipped in the low-concentration processing solution for 10 seconds, pulled up, and held for about 20 seconds.

【0079】次に、前記第1実施例と同様にして、洗
浄、水切り、乾燥を行った。その結果、表面光沢のより
優れたものが得られた。
Next, washing, draining and drying were performed in the same manner as in the first embodiment. As a result, a product having more excellent surface gloss was obtained.

【0080】比較のために、本実施例と同様にして高濃
度処理液で化学研磨処理したのち、研磨試料を引上げ約
20秒間保持し、低濃度処理液で処理せずに、洗浄、水
切り、乾燥を行った。その結果、化学研磨処理により光
沢が得られているものの、水洗処理の前の保持時間が長
いため反応がより進んだせいか、ややくすんだ状態であ
った。
For comparison, after a chemical polishing treatment with a high-concentration processing solution was performed in the same manner as in the present embodiment, the polishing sample was pulled up and held for about 20 seconds, washed, drained, and treated without a low-concentration processing solution. Drying was performed. As a result, although gloss was obtained by the chemical polishing treatment, the retention time before the water washing treatment was long, so that the reaction proceeded more or less because the reaction proceeded further.

フロントページの続き (72)発明者 相原 秀雄 愛知県豊田市トヨタ町1番地 トヨタ自 動車株式会社内 審査官 鈴木 毅 (56)参考文献 特開 昭59−173279(JP,A) 特公 昭52−6691(JP,B2) 国際公開91/5079(WO,A1) (58)調査した分野(Int.Cl.7,DB名) C23F 3/06 Continuation of the front page (72) Inventor Hideo Aihara 1st Toyota Town, Toyota City, Aichi Prefecture Examiner, Toyota Motor Corporation Investigator Takeshi Suzuki (56) References JP-A-59-173279 (JP, A) 6691 (JP, B2) International Publication No. 91/5079 (WO, A1) (58) Fields investigated (Int. Cl. 7 , DB name) C23F 3/06

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 硬化鋼部材用の光沢化学研磨処理液であ
って、 濃度が0.2〜2 mol/lのフッ酸と濃度が0.4〜4 mol
/lの過酸化水素とを含んでなり、該フッ酸と過酸化水
素の濃度の比率がモル比で1:1.5〜2.8 であることを
特徴とする硬化鋼部材用光沢化学研磨処理液。
Claims: 1. A glossy chemical polishing treatment liquid for hardened steel members, comprising hydrofluoric acid having a concentration of 0.2 to 2 mol / l and a concentration of 0.4 to 4 mol.
/ 1 hydrogen peroxide, wherein the molar ratio of the hydrofluoric acid to the hydrogen peroxide is 1: 1.5-2.8. .
【請求項2】 鋼部材を硬化する工程と、 濃度が0.2〜2 mol/lのフッ酸と濃度が0.4〜4 mol
/lの過酸化水素とを含んでなり、該フッ酸と過酸化水
素の濃度の比率がモル比で1:1.5〜2.8 である光沢化
学研磨処理液中で前記硬化鋼部材を化学研磨する工程
と、からなることを特徴とする硬化鋼部材の光沢化学研
磨処理方法。
2. A step of hardening a steel member, a hydrofluoric acid having a concentration of 0.2 to 2 mol / l and a concentration of 0.4 to 4 mol.
/ L of hydrogen peroxide, and the hardened steel member is chemically polished in a bright chemical polishing solution having a molar ratio of the hydrofluoric acid to the hydrogen peroxide of 1: 1.5 to 2.8. A polishing chemical polishing treatment method for a hardened steel member.
【請求項3】 鋼部材を硬化する工程と、 モル濃度が 0.8〜1.5mol/lのフッ酸と、モル濃度が
1.6〜 3.0 mol/lの過酸化水素とからなり、前記フッ
酸と前記過酸化水素とのモル比が1: 1.6〜 2.4の高い
濃度の化学研磨処理液で前記硬化鋼部材を化学研磨処理
する第1化学研磨処理工程と、 モル濃度が 0.2〜0.8mol/lのフッ酸と、モル濃度が
0.4〜 1.6 mol/lの過酸化水素とからなり、前記フッ
酸と前記過酸化水素とのモル比が1: 1.5〜 2.8の低い
濃度の化学研磨処理液で前記一次化学研磨処理した硬化
鋼部材を化学研磨処理する第2化学研磨処理工程と、か
らなることを特徴とする硬化鋼部材の光沢化学研磨処理
方法。
3. A step of hardening a steel member; a hydrofluoric acid having a molar concentration of 0.8 to 1.5 mol / l;
The hardened steel member is chemically polished with a chemical polishing solution having a high concentration of 1.6 to 3.0 mol / l of hydrogen peroxide, wherein the molar ratio of the hydrofluoric acid to the hydrogen peroxide is 1: 1.6 to 2.4. A first chemical polishing treatment step; hydrofluoric acid having a molar concentration of 0.2 to 0.8 mol / l;
A hardened steel member composed of 0.4 to 1.6 mol / l of hydrogen peroxide, and having been subjected to the primary chemical polishing treatment with a chemical polishing treatment liquid having a low molar ratio of the hydrofluoric acid to the hydrogen peroxide of 1: 1.5 to 2.8. A chemical polishing process for chemically hardening the hardened steel member.
JP03339904A 1990-11-28 1991-11-27 Glossy chemical polishing treatment liquid for hardened steel members and chemical polishing treatment method for the material Expired - Fee Related JP3105975B2 (en)

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JP2-331257 1990-11-28
JP33125790 1990-11-28

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Cited By (1)

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US8816467B2 (en) 2004-11-08 2014-08-26 Robert Bosch Gmbh Semiconductor device and method for manufacturing same

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JP5499678B2 (en) * 2009-12-15 2014-05-21 三菱瓦斯化学株式会社 Surface treatment method for chromium molybdenum steel
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8816467B2 (en) 2004-11-08 2014-08-26 Robert Bosch Gmbh Semiconductor device and method for manufacturing same

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