JP3102309B2 - Silicon processing wastewater treatment method - Google Patents
Silicon processing wastewater treatment methodInfo
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- JP3102309B2 JP3102309B2 JP18909895A JP18909895A JP3102309B2 JP 3102309 B2 JP3102309 B2 JP 3102309B2 JP 18909895 A JP18909895 A JP 18909895A JP 18909895 A JP18909895 A JP 18909895A JP 3102309 B2 JP3102309 B2 JP 3102309B2
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- wastewater
- silicon
- filtration
- flocculant
- ppm
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は廃水の処理方法に関
するものであり、特に半導体製造工程において発生する
シリコン加工廃水の処理方法に関するものである。The present invention relates to a method for treating wastewater, and more particularly to a method for treating silicon processing wastewater generated in a semiconductor manufacturing process.
【０００２】[0002]
【従来の技術】現在、各種の基板材料からなる半導体が
製品化されているが、集積回路など大部分の半導体基板
はシリコンの単体から製造されている。その製造に際し
ては、例えばシリコン単結晶のインゴットの切断工程に
おいて、粒径０．１〜１００μｍのシリコンの切削粉を
含む冷却加工廃水が発生する。同様に、シリコン基板の
研磨工程、素子形成後のダイシング工程においてもシリ
コンの微粒粉を含む廃水が発生する。この大量の廃水の
処理には、従来から珪藻土濾過法、または凝集沈澱法が
用いられてきた。珪藻土濾過法は、濾布に珪藻土をプレ
コートしたフィルターに廃水を通し、シリコンを吸着さ
せ、脱水して汚泥として廃棄する方法である。凝集沈澱
法は、ポリ塩化アルミニウムや硫酸アルミニウム等の無
機凝集剤を廃水に添加し必要に応じて中和剤で中和した
後、高分子凝集剤を添加してシリコンを凝集沈澱させ上
澄みを放流する一方、凝集した沈殿は脱水して汚泥とし
て廃棄する方法である。2. Description of the Related Art At present, semiconductors made of various substrate materials are commercialized, but most semiconductor substrates such as integrated circuits are manufactured from silicon alone. During the production, for example, in a step of cutting a silicon single crystal ingot, cooling wastewater containing silicon cutting powder having a particle size of 0.1 to 100 μm is generated. Similarly, wastewater containing fine silicon powder is also generated in the polishing step of the silicon substrate and the dicing step after element formation. For the treatment of this large amount of wastewater, a diatomaceous earth filtration method or a coagulation precipitation method has been conventionally used. The diatomaceous earth filtration method is a method in which wastewater is passed through a filter in which diatomaceous earth is precoated on a filter cloth, silicon is adsorbed, dehydrated, and discarded as sludge. In the coagulation sedimentation method, an inorganic coagulant such as polyaluminum chloride or aluminum sulfate is added to wastewater, neutralized with a neutralizing agent as necessary, and then a polymer coagulant is added to coagulate and precipitate silicon, and the supernatant is discharged. On the other hand, the coagulated sediment is a method of dehydrating and discarding as sludge.
【０００３】[0003]
【発明が解決しようとする課題】しかし上記珪藻土濾過
法は、粒径０．５μｍ以下のシリコン粒子は素通りする
ため清澄な濾過水が得られないうえ、濾布が目詰まりし
やすく濾過能力が低いという難点がある。一方、凝集沈
澱法では、充分に凝集を行うためには多量の凝集剤及び
中和剤を廃水に加える必要があり、例えば廃水に対しポ
リ塩化アルミニウム０．１重量％、水酸化ナトリウムは
０．０１重量％、及び高分子凝集剤５ｐｐｍ程度の添加
を要する。However, in the above diatomaceous earth filtration method, clear filtration water cannot be obtained because silicon particles having a particle diameter of 0.5 μm or less pass through, and the filter cloth is easily clogged and has low filtration ability. There is a disadvantage. On the other hand, in the coagulation sedimentation method, it is necessary to add a large amount of a coagulant and a neutralizing agent to wastewater in order to perform sufficient coagulation. For example, 0.1% by weight of polyaluminum chloride and sodium hydroxide in 0.1% by weight of wastewater. It is necessary to add about 01% by weight and about 5 ppm of a polymer flocculant.
【０００４】さらに、両方法とも濾別または凝集により
生じる汚泥量が著しく多く、この大量の汚泥を廃棄する
には相応の場所や経費を要する。汚泥の大部分は珪藻土
や凝集剤であり、少量含有しているシリコンをこれから
分離して再利用することは極めて困難である。また廃水
から汚泥を分離した後の上ずみ液も珪藻土の微粒子や残
存凝集剤・生成塩類が大量に溶存するため再利用でき
ず、放流している。これら多量の廃棄物は、地球環境保
全上も問題がある。また両方法とも、設備費、動力費が
高額である。[0004] Further, in both methods, the amount of sludge generated by filtration or coagulation is extremely large, and disposal of this large amount of sludge requires a corresponding place and cost. Most of the sludge is diatomaceous earth and a flocculant, and it is extremely difficult to separate and reuse a small amount of silicon contained therein. In addition, the supernatant liquid after separation of sludge from wastewater cannot be reused because a large amount of diatomaceous earth fine particles, residual coagulant and generated salts are dissolved, and is discharged. These large amounts of waste also pose a problem in global environmental conservation. In both cases, the equipment cost and the power cost are high.
【０００５】[0005]
【課題を解決するための手段】そこで本発明者は以上の
問題に鑑み鋭意検討を重ねた結果、シリコン加工廃水に
有機カチオンを添加して、シリコン粒子のゼータ電位を
低下させることに着目し、本発明に至った。すなわち本
発明は、シリコンウェーハの製造加工工程で発生するシ
リコン粉を含む廃水を上澄み液と沈殿とに分離するシリ
コン加工廃水の処理方法において、該廃水に有機カチオ
ン凝集剤を添加し、更に高分子凝集剤を添加することに
よりシリコンを凝集沈殿・分離させることを特徴とする
シリコン加工廃水の処理方法を要旨とするものである。
以下にこれをさらに詳述する。Means for Solving the Problems In view of the above problems, the present inventors have conducted intensive studies and, as a result, have noticed that organic cations are added to silicon processing wastewater to lower the zeta potential of silicon particles. The present invention has been reached. That is, the present invention relates to a method of treating wastewater containing silicon powder generated in a silicon wafer production processing step, which separates wastewater containing silicon powder into a supernatant and a precipitate, wherein an organic cationic coagulant is added to the wastewater, The gist of the present invention is a method for treating silicon processing wastewater, which comprises coagulating, sedimenting and separating silicon by adding a coagulant.
This is described in more detail below.
【０００６】図１は本発明による処理方法の工程の一例
を示す概略図である。シリコンを含む廃水を調整タンク
１から、攪拌混合槽２へ導入し、これへ有機カチオン凝
集剤４を添加してゼータ電位を低下させる。該廃水を凝
集槽６に導入し、さらに高分子凝集剤８を添加する。凝
集した沈殿を含む廃水をフィルタープレス１０で濾過
し、ケーキと濾過水１１とに分離する。FIG. 1 is a schematic diagram showing an example of the steps of the processing method according to the present invention. Waste water containing silicon is introduced from the adjusting tank 1 into the stirring and mixing tank 2, and the organic cation flocculant 4 is added thereto to lower the zeta potential. The wastewater is introduced into the flocculation tank 6, and a polymer flocculant 8 is further added. The wastewater containing the coagulated sediment is filtered by a filter press 10 and separated into cake and filtered water 11.
【０００７】本発明に用いる有機カチオン凝集剤４は、
廃水中で、マイナスに帯電し互いに反発し合っているシ
リコン粒子のゼ−タ電位を低下させ、シリコンの凝集し
た小フロックを形成するものである。具体的な成分とし
てはポリアミン、ジシアンジアミド、ポリアクリルアミ
ド、ポリメタクリル酸エステル、ポリアミンサルホン等
が例示される。添加量は廃水に対し０．１〜１００ｐｐ
ｍが必要である。０．１ｐｐｍより少ない添加量では、
ゼータ電位の低下が不十分となる。また１００ｐｐｍの
添加で前記ゼータ電位の低下は十分であり、１００ｐｐ
ｍより大きな添加量は無駄となる。The organic cation flocculant 4 used in the present invention comprises:
In wastewater, the zeta potential of silicon particles negatively charged and repelling each other is reduced, and small flocs of silicon are formed. Specific examples of the component include polyamine, dicyandiamide, polyacrylamide, polymethacrylate, and polyamine sulfone. The addition amount is 0.1 to 100 pp with respect to the wastewater.
m is required. At additions less than 0.1 ppm,
The decrease in zeta potential is insufficient. Further, the addition of 100 ppm sufficiently reduces the zeta potential, and the addition of 100 ppm
An addition amount larger than m is wasted.
【０００８】高分子凝集剤８は廃水中のシリコンの小フ
ロックを凝集、沈降させるもので、例えば非イオン凝集
剤、または弱アニオン凝集剤が用いられる。添加量は廃
水に対し０．１〜１００ｐｐｍが必要である。０．１ｐ
ｐｍより少ない添加量では、シリコンのフロックの形成
が不十分となる。また前記フロックは１００ｐｐｍで十
分形成され、１００ｐｐｍより大きな添加量は無駄とな
る。The polymer flocculant 8 flocculates and precipitates small flocs of silicon in the wastewater. For example, a nonionic flocculant or a weak anionic flocculant is used. The addition amount is required to be 0.1 to 100 ppm based on the wastewater. 0.1p
If the amount is less than pm, formation of silicon flocs becomes insufficient. Further, the floc is sufficiently formed at 100 ppm, and the added amount exceeding 100 ppm is wasted.
【０００９】濾別された凝集物は従来方法よりも少量で
あり、シリコンの含有率が高いことから、濾別されたケ
ーキからシリコン粉を分離・回収して再利用することが
容易となる。分離方法としてはフィルタープレス、ベル
トプレス、真空濾過器等が例示される。[0009] Since the amount of the aggregate separated by filtration is smaller than that of the conventional method, and the content of silicon is high, it is easy to separate and recover the silicon powder from the filtered cake and reuse it. Examples of the separation method include a filter press, a belt press, and a vacuum filter.
【００１０】また濾過水１１中の有機カチオン凝集剤溶
存は平均０．５ppm 、高分子凝集剤溶存は平均０．２pp
m であり、従来の溶存量平均５ppm に比べて極めて少な
いため、そのままで、または小規模な後処理を経て、工
業用水として再利用することができる。再利用先は、シ
リコン切断・研磨工程でも良い。In the filtered water 11, the dissolved organic cation flocculant is 0.5 ppm on average, and the dissolved polymer is 0.2 pp on average.
m, which is extremely low as compared with the conventional average dissolved amount of 5 ppm, so that it can be reused as it is or after small-scale post-treatment as industrial water. The reuse destination may be a silicon cutting / polishing process.
【００１１】本発明の処理方法は、図１の工程に限定さ
れないことは言うまでもない。また本発明によれば、廃
水を溜めたタンク中で行うバッチ式処理だけではなく、
ウェーハ製造工程作動中連続的に発生する廃水を、溜め
置きせずにそのまま連続的に処理することも可能であ
る。It goes without saying that the processing method of the present invention is not limited to the step shown in FIG. Further, according to the present invention, not only the batch-type treatment performed in the tank storing the wastewater,
It is also possible to continuously treat wastewater that is continuously generated during the operation of the wafer manufacturing process without storing the wastewater.
【００１２】上記のように、本発明によれば、シリコン
ウェーハの製造加工工程で発生するシリコン粉を含む廃
水に、有機カチオン凝集剤を添加することにより、廃水
中のシリコン粒子のゼ−タ電位が低下する。この廃水
に、さらに高分子凝集剤を添加することにより、容易に
凝集・沈降が進行する。これを濾過すると、再利用可能
な濾過水、およびシリコン粉の回収可能な少量のケーキ
となる。As described above, according to the present invention, the zeta potential of silicon particles in wastewater is added by adding an organic cationic coagulant to wastewater containing silicon powder generated in a silicon wafer manufacturing process. Decrease. By further adding a polymer flocculant to the wastewater, flocculation / sedimentation easily proceeds. Filtration of this results in reusable filtered water and a small amount of cake from which silicon powder can be recovered.
【００１３】[0013]
【発明の実施の形態】次に、図１にそって、本発明の実
施の形態を実施例、比較例を挙げて説明する。 実施例１ シリコン単結晶のインゴットの切断工程において発生し
た切断加工水の廃水（シリコン粉は平均５００ｍｇ／リ
ットル含まれている）を調整タンク１（容量５００リッ
トル）から攪拌混合槽２（容量３０リットル）へ、１０
リットル／分の速度でポンプ１２により導入する。この
攪拌混合槽２へは０．１重量％のポリアクリルアミド系
有機カチオン凝集剤４が添加量５０ミリリットル／分で
薬注ポンプ５により添加され、該槽内は攪拌機３で攪拌
される。ゼータ電位の低下した廃水は凝集槽６（容量９
０リットル）に導入される。凝集槽６へは０．１重量％
の弱アニオン高分子凝集剤８が添加量５０ミリリットル
／分で添加され、攪拌機７で攪拌される。凝集した沈殿
を含む廃水をダイヤフラムポンプ９で、濾布Ｐ−２６−
１（ポリプロピレン製、通気度８０ミリリットル／ｍｉ
ｎ・ｃｍ２）を装着したフィルタープレス１０（日本濾
過装置社製、Ｆｓ−２ｃ−２０）に注入し、ケーキと濾
過水１１とに濾別する。なお、フィルタープレスＦｓ−
２ｃ−２０は濾過面積２ｍ２であり、濾過圧力は４ｋｇ
／ｃｍ２に設定した。以上の装置を２時間連続運転した
後、フィルタープレスの濾過速度・濾過圧力を測定し、
また、図１のＡ〜Ｄ点の廃水を採取し、粒度分布、ゼー
タ電位、濁度を測定した。２時間連続運転ごとの廃水の
測定結果を表１に示す。また、連続運転時間の経過によ
る、濾過速度・濾過圧力の変動を図２に示す。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the present invention will be described with reference to FIG. Example 1 Wastewater of cutting water generated in the step of cutting an ingot of silicon single crystal (silicon powder is contained in an average of 500 mg / liter) was stirred from a regulating tank 1 (capacity: 500 liters) to a stirring and mixing tank 2 (capacity: 30 liters). To) 10
Introduced by pump 12 at a rate of 1 / min. 0.1% by weight of a polyacrylamide-based organic cation coagulant 4 is added to the stirring / mixing tank 2 by an injection pump 5 at an addition amount of 50 ml / min, and the inside of the tank is stirred by a stirrer 3. Waste water having a reduced zeta potential is supplied to the coagulation tank 6 (capacity 9).
0 liters). 0.1% by weight to coagulation tank 6
Weak anion polymer coagulant 8 is added at an addition of 50 ml / min, are stirred with a stirrer 7. The wastewater containing the coagulated sediment is filtered by a diaphragm pump 9 into a filter cloth P-26.
1 (made of polypropylene, air permeability 80 ml / mi
n.cm 2 ), and the mixture is poured into a filter press 10 (manufactured by Nippon Filtration Equipment Co., Ltd., Fs-2c-20), and filtered into a cake and filtered water 11. The filter press Fs-
2c-20 has a filtration area of 2 m 2 and a filtration pressure of 4 kg.
/ Cm 2 . After continuous operation of the above device for 2 hours, the filtration speed and filtration pressure of the filter press were measured,
In addition, wastewater at points A to D in FIG. 1 was collected, and the particle size distribution, zeta potential, and turbidity were measured. Table 1 shows the measurement results of the wastewater for each two-hour continuous operation. FIG. 2 shows the fluctuation of the filtration speed and the filtration pressure over the continuous operation time.
【００１４】[0014]
【表１】 [Table 1]
【００１５】実施例２ フィルタープレスの濾布をP-866 （通気度280 ミリリッ
トル/min・cm2）とした以外は、実施例１と同じ条件で行
った。２時間連続運転ごとの測定結果を表２に示す。ま
た、連続運転時間の経過による、濾過速度・濾過圧力の
変動を図３に示す。Example 2 The same procedure as in Example 1 was carried out except that the filter cloth of the filter press was changed to P-866 (air permeability: 280 ml / min · cm 2 ). Table 2 shows the measurement results for each two-hour continuous operation. FIG. 3 shows fluctuations in the filtration speed and the filtration pressure over the continuous operation time.
【００１６】[0016]
【表２】 [Table 2]
【００１７】実施例３ Ｓｂドープシリコンインゴットの切断工程から発生した
廃水をタンクへ５０ｍ３揚水し、０．１％重量のポリア
クリルアミド系有機カチオン凝集剤（前出）を０．８容
量％添加し、１分間攪拌した。さらに、０．１重量％の
弱アニオン高分子凝集剤（前出）を０．３容量％添加
し、１分間攪拌した後、１２時間静置した。静置後の廃
水をポンプで、濾布Ｐ−２６−１を装着したフィルター
プレスＦｓ−２ｃ−２０（前出）に注入し、濾過圧力は
４ｋｇ／ｃｍ２に設定して、ケーキと濾過水とに濾別し
た。以上を２バッチ行った結果、濾過速度は８リットル
／分、最終濾過圧力は４ｋｇ／ｃｍ２、また濾過水の透
視度は３０ｃｍ以上、ＴＯＣは６．２ｐｐｍであった。
濾別して得られたケーキ量は２．５ｋｇであり、これを
乾燥処理することにより、１ｋｇのシリコン粉を回収し
た。[0017] 50 m 3 and pumping the wastewater generated from the cutting process of Example 3 Sb doped silicon ingot to the tank, adding 0.1% by weight of the polyacrylamide-based organic cation coagulant (supra) 0.8% by volume And stirred for 1 minute. Further, 0.3% by volume of 0.1% by weight of a weak anionic polymer flocculant (described above) was added, and the mixture was stirred for 1 minute, and then allowed to stand for 12 hours. The waste water after standing still is pumped into a filter press Fs-2c-20 (described above) equipped with a filter cloth P-26-1, and the filtration pressure is set to 4 kg / cm 2. And filtered. As a result of performing the above two batches, the filtration rate was 8 liters / minute, the final filtration pressure was 4 kg / cm 2 , the visibility of the filtered water was 30 cm or more, and the TOC was 6.2 ppm.
The cake amount obtained by filtration was 2.5 kg, and 1 kg of silicon powder was recovered by drying the cake.
【００１８】比較例 凝集沈殿法で、ポリ塩化アルミニウム０．０８重量％、
１０％水酸化ナトリウム０．０１重量％を添加する以外
は実施例３と同様に行った。２バッチ行った結果、濾過
速度は１０リットル／分、最終濾過圧力は４kg/cm2、ま
た濾過水の透視度は３０cm以上、ＴＯＣは２０ppm 、濾
別して得られたケーキ量は２０ｋｇであった。このケー
キからのシリコン粉の回収はシリコン粉の含有率が低い
ため不可能であった。COMPARATIVE EXAMPLE 0.08% by weight of polyaluminum chloride by coagulation precipitation
The procedure was performed in the same manner as in Example 3 except that 0.01% by weight of 10% sodium hydroxide was added. As a result of performing two batches, the filtration rate was 10 liters / minute, the final filtration pressure was 4 kg / cm 2 , the transparency of the filtered water was 30 cm or more, the TOC was 20 ppm, and the cake amount obtained by filtration was 20 kg. Recovery of silicon powder from this cake was not possible due to the low content of silicon powder.
【００１９】比較例と実施例３との結果より、本発明に
よる処理方法は従来法よりも少ない薬剤の添加で、濾過
水の透視度は従来法と同等またはそれ以上の結果が得ら
れることがわかった。また濾別して得られたケーキ量は
従来法の８分の１に減少した。From the results of Comparative Example and Example 3, it can be seen that the treatment method according to the present invention can obtain the same or higher results in the transparency of filtered water as in the conventional method with the addition of less chemical than in the conventional method. all right. The amount of cake obtained by filtration was reduced to one eighth of the conventional method.
【００２０】表１、表２より、本発明による処理が進む
につれ、廃水のゼータ電位が低下したこと、沈殿が凝集
して大径化したことがわかり、また濾過水の濁度は処理
前の廃水に比べて大幅に低減したことがわかった。また
これらの特質は、１８時間連続処理を行っても殆ど劣化
しないことがわかった。From Tables 1 and 2, it can be seen that as the treatment according to the present invention proceeds, the zeta potential of the wastewater decreases, the sediment aggregates and the diameter increases, and the turbidity of the filtered water before the treatment increases. It was found that it was significantly reduced compared to wastewater. Further, it was found that these characteristics hardly deteriorated even after continuous processing for 18 hours.
【００２１】図２、図３より本発明による処理方法は、
６時間〜２０時間連続運転までは充分にフィルタープレ
スの濾過特性（濾過速度・濾過圧力）を維持できること
がわかった。2 and 3, the processing method according to the present invention is as follows.
It was found that the filtration characteristics (filtration speed / filtration pressure) of the filter press can be sufficiently maintained until the continuous operation for 6 hours to 20 hours.
【００２２】[0022]
【発明の効果】本発明によれば、濾別されたケーキに含
まれるシリコン粉の回収・再利用が可能であり、濾別さ
れた濾過水も再利用できる。また、処理に要する薬剤費
・設備費、シリコン以外の凝集物を廃棄する経費が低減
され、さらに、大量の廃棄物による環境汚染を防止する
ことができる。According to the present invention, the silicon powder contained in the cake filtered can be recovered and reused, and the filtered water can be reused. In addition, the cost of chemicals and equipment required for processing and the cost of discarding aggregates other than silicon can be reduced, and environmental pollution due to a large amount of waste can be prevented.
【図１】本発明による処理方法の工程の一例を示す概略
図である。FIG. 1 is a schematic view showing an example of steps of a processing method according to the present invention.
【図２】本発明による一実施例の、連続運転時間の経過
による、濾過速度・濾過圧力の変動を示すグラフであ
る。FIG. 2 is a graph showing a change in filtration speed and filtration pressure over a continuous operation time according to an embodiment of the present invention.
【図３】本発明による別の実施例の、連続運転時間の経
過による、濾過速度・濾過圧力の変動を示すグラフであ
る。FIG. 3 is a graph showing a change in filtration speed / filtration pressure over a continuous operation time in another embodiment according to the present invention.
１ 調整タンク ２ 攪拌混合槽 ３ 攪拌機 ４ 有機カチオン凝
集剤 ５ 薬注ポンプ ６ 凝集槽 ７ 攪拌機 ８ 高分子凝集剤 ９ ダイヤフラムポンプ １０ フィルタープレ
ス １１ 濾過水 １２ ポンプREFERENCE SIGNS LIST 1 adjustment tank 2 stirring and mixing tank 3 stirrer 4 organic cation flocculant 5 chemical injection pump 6 flocculation tank 7 stirrer 8 polymer flocculant 9 diaphragm pump 10 filter press 11 filtered water 12 pump
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C02F 1/56 B01D 21/01 108 B01D 21/01 110 B01D 21/01 111 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) C02F 1/56 B01D 21/01 108 B01D 21/01 110 B01D 21/01 111
Claims (8)
するシリコン粉を含む廃水を上澄み液と沈殿とに分離す
るシリコン加工廃水の処理方法において、該廃水に有機
カチオン凝集剤を添加し、更に高分子凝集剤を添加する
ことによりシリコンを凝集沈殿・分離させることを特徴
とするシリコン加工廃水の処理方法。1. A method for treating wastewater containing silicon powder, which is generated in a process for producing a silicon wafer and containing silicon powder, into a supernatant liquid and a sediment, comprising the steps of: A method for treating silicon processing wastewater, comprising coagulating, sedimenting and separating silicon by adding a coagulant.
凝集剤としてポリアミン、ジシアンジアミド、ポリアク
リルアミド、ポリメタクリル酸エステル、ポリアミンサ
ルホンを用いるシリコン加工廃水の処理方法。2. The method according to claim 1, wherein a polyamine, dicyandiamide, polyacrylamide, polymethacrylate, or polyamine sulfone is used as the organic cationic coagulant.
として非イオン凝集剤または弱アニオン凝集剤を用いる
シリコン加工廃水の処理方法。3. The method according to claim 1, wherein a nonionic flocculant or a weak anionic flocculant is used as the polymer flocculant.
し、有機カチオン凝集剤を０．１〜１００ｐｐｍ添加す
るシリコン加工廃水の処理方法。4. The method according to claim 2, wherein 0.1 to 100 ppm of an organic cationic coagulant is added to the wastewater.
し、高分子凝集剤を０．１〜１００ｐｐｍ添加するシリ
コン加工廃水の処理方法。5. The method according to claim 3, wherein 0.1 to 100 ppm of a polymer flocculant is added to the wastewater.
廃水の処理を行うシリコン加工廃水の処理方法。6. The method of treating silicon processing wastewater according to claim 1, wherein the wastewater is treated continuously.
分離してなる上澄み液を工業用水として再利用するシリ
コン加工廃水の処理方法。7. The method according to claim 1, wherein a supernatant obtained by separating the wastewater is reused as industrial water.
分離してなる沈殿からシリコンを分離回収し、シリコン
粉として再利用するシリコン加工廃水の処理方法。8. The method for treating silicon processing wastewater according to claim 1, wherein silicon is separated and recovered from a precipitate formed by separating said wastewater and reused as silicon powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18909895A JP3102309B2 (en) | 1995-07-25 | 1995-07-25 | Silicon processing wastewater treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18909895A JP3102309B2 (en) | 1995-07-25 | 1995-07-25 | Silicon processing wastewater treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0929263A JPH0929263A (en) | 1997-02-04 |
| JP3102309B2 true JP3102309B2 (en) | 2000-10-23 |
Family
ID=16235323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18909895A Expired - Fee Related JP3102309B2 (en) | 1995-07-25 | 1995-07-25 | Silicon processing wastewater treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3102309B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2802117B1 (en) * | 1999-12-09 | 2002-02-22 | Degremont | IMPROVEMENTS IN MEMBRANE FILTRATION |
| JP4526078B2 (en) * | 2004-08-11 | 2010-08-18 | 日本碍子株式会社 | Method for treating wastewater containing inorganic suspended particles |
| JP4522297B2 (en) * | 2005-03-24 | 2010-08-11 | 日本碍子株式会社 | Method and apparatus for treating wastewater containing inorganic suspended particles |
| JP5245076B2 (en) * | 2008-09-30 | 2013-07-24 | 大同化学工業株式会社 | Waste liquid treatment method |
| JP5722601B2 (en) * | 2010-11-30 | 2015-05-20 | サンワバイオテック株式会社 | Silicon cutting waste treatment method |
| JP2015139861A (en) * | 2014-01-30 | 2015-08-03 | 株式会社クラレ | Coolant recycling method and recycled coolant intermediate product |
| CN104370391A (en) * | 2014-11-20 | 2015-02-25 | 济南银丰硅制品有限责任公司 | Method for treating wastewater generated during production of silica sol through hydrolyzing silica powder |
-
1995
- 1995-07-25 JP JP18909895A patent/JP3102309B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0929263A (en) | 1997-02-04 |
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