JP3096364B2 - Method for producing Johansson type X-ray spectroscopic crystal - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a Johansson-type X-ray crystal used for an X-ray microanalyzer or the like.

[0002]

2. Description of the Related Art A Johansson-type X-ray spectroscopic crystal has a crystal lattice plane having a radius of curvature of 2R and a crystal surface having a cylindrical concave surface having a radius of R. Hereinafter, two methods for producing such an X-ray spectral crystal will be described.

A first manufacturing method will be described with reference to FIG. First, as shown in FIG.
A crystal 1 in the form of a flat plate having a thickness of 1 mm is prepared. Next, an adhesive is applied to a cylindrical concave base 2 having a curvature radius of 2R as shown in FIG. 1B, and the crystal 1 is bent and bonded thereon.
Then, polishing is performed so that the surface of the crystal 1 becomes a cylindrical concave surface having a radius of curvature R (FIG. 1C).

A second manufacturing method will be described with reference to FIG. First, as shown in FIG.
A plate-shaped crystal 3 of mm is prepared. Next, both surfaces of the crystal 3 are polished so as to have a cylindrical surface with a radius of curvature 2R (FIG. 2).
(B)). At this time, polishing is performed so that the thickness of the crystal 3 is about 0.2 mm. Then, an adhesive is applied onto a pedestal 4 having a cylindrical concave surface with a radius of curvature R as shown in FIG. 2C, and the crystal 3 is bent and bonded thereon.

[0005]

In the first manufacturing method, the crystal 1 is bent by bonding the crystal 1 to a pedestal 2 having a cylindrical concave surface with a radius of curvature 2R.
m and it is difficult to bend uniformly over the entire crystal plane. Some types of crystals are broken during the bending process.

In the second manufacturing method, it is difficult and difficult to polish the crystal 3 so that both surfaces of the crystal 3 are cylindrical surfaces having a radius of curvature 2R with high precision and a thickness of about 0.2 mm. Further, even if the crystal is polished for a long time, if the radius of curvature is not correct in the polishing, the crystal 3 is formed with a radius of curvature R
The crystal breaks during the process of bending and bonding on the cylindrical concave base.

The present invention has been made in view of the above points, and an object of the present invention is to provide a method for producing a Johansson type X-ray spectroscopic crystal which can be produced easily and with high precision without damaging the crystal. is there.

[0008]

Means for Solving the Problems The Johansson X-ray spectroscopic crystal of the present invention is obtained by bending a flat crystal to a radius of curvature 2R.
One laminated or glued to another already bent crystal or multiple flat plates
Multiple planar crystals with adhesive
Are bent to a radius of curvature of 2R and laminated and bonded to form a laminate.
The bonded crystal is produced, and the surface of the plurality of stacked and bonded crystals is polished into a concave surface having a radius of curvature R to produce the crystal.

[0009]

Embodiment An embodiment of a method for producing a Johansson type X-ray crystal according to the present invention will be described below with reference to FIGS.

First, as shown in FIG. 3 (a), it is possible to bend easily and with high accuracy of curvature, and to be about 0.2 m
A plurality of thin plate-shaped crystals 5 having a thickness of about m are prepared. And
As shown in FIG. 3 (b), an adhesive 7 is applied on a pedestal 6 having a cylindrical concave surface having a curvature radius of 2R, and one of the thin plate-like crystals 5 is placed thereon, and A crystal surface protection sheet 8 made of Teflon or the like is placed on the crystal 5 '. Then, a pressing member 9 having a cylindrical convex surface with a curvature radius of 2R is placed on the crystal surface protection sheet 8 and pressed in the direction of the pedestal 6 with an appropriate force. As a result, the thin plate-shaped crystal 5 ′ is uniformly curved over the entire crystal surface and adheres to the pedestal 6.

Next, the crystal face protection sheet 8 is removed from the surface of the crystal 5 '. Then, as shown in FIG. 3C, an adhesive 7 is applied to the surface of the crystal 5 'already bonded to the pedestal 6, and one of the thin plate-like crystals 5 is placed thereon, The crystal face protection sheet 8 is placed on the flat crystal 5 ″. Then, the pressing member 9 is placed on the crystal face protection sheet 8 and is pressed in the direction of the pedestal 6 with an appropriate force. As a result, the thin plate-shaped crystal 5 ″ is uniformly curved over the entire crystal face and adheres to the plate-shaped crystal 5 ′.

Hereinafter, the same operation is repeated until the thickness of the crystal becomes an appropriate thickness. FIG. 4 shows the crystals stacked on the pedestal 6 after the operation is completed. Thereafter, when the surface of the crystal 5 is polished so as to have a cylindrical concave surface having a radius of curvature R, a Johansson X-ray spectroscopic crystal having a crystal lattice surface having a radius of curvature of 2R and a crystal surface having a cylindrical concave surface having a radius R is provided. Is completed.

In the above description, the thin plate-shaped crystals 5 are bonded one by one, but a plurality of thin plate-shaped crystals 5 may be bonded simultaneously, as shown in FIG.

Further, by bonding the surfaces of the thin plate-shaped crystal formed by cleaving the thick plate-shaped crystal which faced each other when the cleavage was performed, the stacking curve can be accurately performed.

Further, since it is easy to grind the cleaved plate-shaped crystal into a flat surface, the use of a thin plate-shaped crystal whose both surfaces are polished on a plane allows accurate stacking and bending.

[0016]

According to the Johansson X-ray spectroscopic crystal of the present invention, while bending a flat crystal to a radius of curvature 2R, the other
Glued to the crystal, or glue multiple flat crystals
And a plurality of plate-like crystals are formed with a radius of curvature of 2R.
Bending to form a laminate and bonding the multiple laminated crystals
And the surface of the plurality of stacked and bonded crystals is defined by a radius of curvature R
Since it is manufactured by polishing the concave surface of the crystal, it is possible to prevent the crystal from being damaged in the process of bending the crystal, and since the crystal can be uniformly curved over the entire crystal surface,
A highly accurate Johansson-type X-ray spectral crystal can be manufactured. Furthermore, both sides of the conventional crystal have a radius of curvature of 2
Since an operation requiring skill for polishing the cylindrical surface of R is not required, it is possible to easily produce a high precision Johansson type X-ray spectral crystal with high yield.

[Brief description of the drawings]

FIG. 1 is a view for explaining a conventional method for producing a Johansson X-ray spectroscopic crystal.

FIG. 2 is a view for explaining a conventional method for producing a Johansson type X-ray spectroscopic crystal.

FIG. 3 is a view for explaining a method for producing a Johansson X-ray spectroscopic crystal of the present invention.

FIG. 4 is a view for explaining a method for producing a Johansson X-ray spectroscopic crystal of the present invention.

FIG. 5 is a view for explaining another method for producing a Johansson X-ray spectroscopic crystal of the present invention.

[Explanation of symbols]

 1, 3 flat crystal 2, 4, 6 pedestal 5 thin flat crystal 7 adhesive 8 crystal surface protection sheet 9 pressure member

Claims (2)

(57) [Claims] 1. While bending a tabular crystal to a radius of curvature 2R,
Laminated and bonded to other already bent crystals
Johansson type X in which a plurality of crystals are formed and the surface of the plurality of laminated and bonded crystals is polished to a concave surface having a radius of curvature R.
Method for producing X-ray crystal. 2. A plurality of flat crystals are stacked with an adhesive therebetween.
And accumulate while bending a plurality of tabular crystals to a radius of curvature 2R.
The layers are bonded to form a plurality of laminated and bonded crystals.
Polish the surface of the crystal laminated and bonded to a concave surface with radius of curvature R
A method for producing a Johansson X-ray spectroscopic crystal.