JP3499717B2 - Synthetic corundum joining method and synthetic corundum cell manufacturing method - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method for joining synthetic corundum and a method for producing a synthetic corundum cell using this joining method.

[0002]

2. Description of the Related Art Hexagonal synthetic corundum (synthetic sapphire) is used, for example, as a flow cell or the like incorporated in a fine particle meter because of its excellent hardness, translucency and chemical resistance.

In order to manufacture a product made of the above synthetic corundum, synthetic corundum pieces cut out to a predetermined size are joined, but in the case of a single crystal body such as a synthetic corundum piece, it depends on the crystal direction. Since the coefficients of thermal expansion are different, peeling easily occurs simply by joining.

Therefore, in Japanese Patent Publication No. 5-79640, the surfaces to be joined of the synthetic corundum pieces to be joined to each other are polished to λ / 8 of the wavelength of red light, and then the synthetic corundum pieces are joined together by using an assembling jig. Are made to coincide with each other on the same plane of the crystal, on the same edge, on the same axis, and on the same angle, and in this state, a small pressure is applied to completely eliminate the interference fringes on the boundary surface (bonding surface) of the synthetic corundum pieces bonded to each other. After this, 120
It has been proposed that the contents be heated at 0 ° C. to be integrated.

[0005]

In the above-mentioned method, the surface to which the synthetic corundum is joined is set to λ / of the red light wavelength.
Polished up to 8 and using synthetic jigs, put the synthetic corundum pieces together on the same plane of the crystal, on the same ridge, on the same axis, and on the same angle, and superimpose them. Although the existing interference fringes are erased, in reality, depending on the shape of the synthetic corundum piece, λ /
It is difficult to polish up to 8, and the interference fringes cannot be completely erased only by applying a small pressure, and some interference fringes remain. Then, it is extremely difficult to perfectly match the synthetic corundum pieces with the same crystal plane, the same edge, the same axis, and the same angle.

[0006]

[Means for Solving the Problems] In order to solve the above problems,
The joining method of the synthetic corundum according to the present invention, after polishing a predetermined surface of the synthetic corundum pieces to be joined to each other, the crystallographic plane, the same edge, the coaxial, the polished surface without completely matching the coaxial angle By pressing one end side of the synthetic corundum, one end side of the contact surface between the synthetic corundum pieces is brought into an optical contact state, and interference fringes are generated in the remaining part of the contact surface. Then, the entire contact surface between the synthetic corundum pieces was brought into an optical contact state.

The method of manufacturing a synthetic corundum cell according to the present invention comprises the following first to sixth steps. First Step: A spacer and a transparent plate are cut out from a crystal block of synthetic corundum. In the second step, at least the upper and lower surfaces and one side surface of the cut spacers are polished, and at least the upper and lower surfaces of the transparent plate are polished. The third step is to set a pair of spacers on the polished upper surface of the light-transmitting plate with a space therebetween, and press one end of the pair of spacers against the light-transmitting plate from above so that one end of the spacer and the upper surface of the light-transmitting plate. And are in an optical contact state, and interference fringes are generated on the contact surface between the remaining portion of the spacer and the upper surface of the transparent plate. Fourth Step The laminated body obtained in the third step is heated at a temperature equal to or lower than the melting point of the synthetic corundum to bring the entire contact surface between the spacer and the transparent plate into an optical contact state. Fifth step Another transparent plate is set on the pair of spacers of the laminated body obtained in the fourth step, and one end portion of the other transparent plate is pressed against the spacer to thereby separate the transparent plate. And one end of the spacer and the upper surface of the spacer are in an optical contact state, and interference fringes are generated on the contact surface between the remaining portion of the other transparent plate and the upper surface of the spacer. Sixth Step The laminated body obtained in the fifth step is heated at a temperature equal to or lower than the melting point of the synthetic corundum to bring the entire contact surface between the spacer and the transparent plate into an optical contact state.

The first method of manufacturing the synthetic corundum cell
In the step, the crystal block of the synthetic corundum has a columnar shape, and a disk for a spacer and a disk for a light-transmitting plate are cut out from the crystal block of the columnar shape, and the disk for the spacer and the light-transmitting plate are used. It is possible to cut out the spacer and the transparent plate from the disc.

A second method of manufacturing the synthetic corundum cell
In the step, the polishing accuracy is preferably about λ / 4 (λ is the wavelength of red light).

A fifth method of manufacturing the synthetic corundum cell
In the step, after the upper surfaces of the pair of spacers are polished to adjust the thickness of the spacers, another transparent plate may be set on the spacers.

In the third step and the fifth step of the method for manufacturing the synthetic corundum cell, when the spacer and the light transmitting plate are stacked, the crystal axis, the ridgeline and the axis angle are deviated by 5 °.
It is preferably within the range.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. The production of synthetic corundum cells will be described as an example. First, as shown in FIG. 1, a columnar synthetic corundum crystal block 1 is cut in a direction orthogonal to an axis, and the spacer disc 2 and the spacer disc 2 have different thicknesses. The disc 3 for the light plate is cut out.

Next, as shown in FIG. 2, the spacer 4 is cut out from the spacer disc 2 and the translucent plate 5 is cut out from the translucent disc 3.

Thereafter, as shown in FIG. 3, the upper and lower surfaces 4a and 4b of the spacer 4 and the side surface 4 forming the holes of the flow cell.
c is polished to have a smoothness of λ / 4. Where λ
Is the wavelength of red light, and λ / 4 is about 1.27 μm. Since the upper surface 4a of the spacer 4 is polished to adjust the thickness of the spacer 4 later, it is not necessary to polish it at this stage.

The transparent plate 5 has upper and lower surfaces 5a,
5b is polished to have a smoothness of λ / 4. And
As shown in FIG. 4, a pair of spacers 4 and 4 are placed on the upper surface of the translucent plate 5 at intervals to form a laminated body 6.

Thereafter, as shown in FIG. 5, the laminate 6 is abutted against the positioning blocks 8 and 9 which are orthogonal to each other on the jig base 7, and one end side of the pair of spacers 4 and 4 is further pressed.
Press at 0.

By this operation, as shown in FIG. 6 which is a side view, the lower surfaces of the spacers 4 and 4 on one end side and the upper surface of the light transmitting plate 5 are brought into close contact with each other, and the lower surface on the other end side of the spacers 4 and 4 and the light transmitting surface are transmitted. Board 5
There is a slight gap g from the upper surface of the. Here, in FIG. 6, the gap g is exaggerated for easy understanding of the description.
Actually, it is difficult to visually recognize the gap g.

FIG. 7 is a plan view of the above-mentioned laminated body 6, in which the spacer 4 is pressed by the pressing jig 10.
The lower surface at one end of 4 and the upper surface of the translucent plate 5 are in an optical contact state 11, and in other portions, an air layer is interposed between the lower surfaces of the spacers 4 and 4 and the upper surface of the translucent plate 5. Interference fringes 12 are formed.

As described above, when the spacers 4, 4 and the translucent plate 5 are partly in the optical contact state, they are physically adsorbed at the part, and the laminate 6 can maintain its shape. Therefore, the laminated body 6 is put in a furnace and the temperature lower than the melting point 2030 ° C. of the synthetic corundum, for example, 1
Heat at 300 ° C. Then, as the solvent existing between the lower surface of the spacer 4 and the upper surface of the translucent plate 5 is volatilized, the interference fringes 12 disappear, and the entire contact surface between the spacer 4 and the translucent plate 5 is in an optical contact state. .

After this, the laminate 6 was taken out of the furnace, and as shown in FIG.
As shown in, the upper surfaces of the spacers 4 and 4 are polished to have a smoothness of λ / 4, and the thickness of the spacers 4 and 4 is adjusted.

Then, as shown in FIG. 9, another transparent plate 13 is placed on the spacers 4 and 4 whose thickness has been adjusted to form a cylindrical body 14. After that, one end of the transparent plate 13 is pressed by the holding jig 10 in the same manner as described above, and the spacers 4, 4 are pressed.
One of the contact surfaces of the upper surface of the transparent plate 13 and the lower surface of the transparent plate 13 is in an optical contact state, and interference fringes are generated on the remaining contact surfaces.

After that, the cylindrical body 14 is put into a furnace and heated in the same manner as described above, so that the upper surfaces of the spacers 4 and 4 and the lower surface of the transparent plate 13 are brought into an optical contact state.

Then, the cylindrical body 14 is taken out of the furnace, and as shown in FIG.
As shown in (a) and (b), the target synthetic corundum-made flow cell is obtained by tapering both end surfaces of the tubular body 14.

In the embodiment, the heat bonding of the lower surface of the spacer 4 and the upper surface of the light transmitting plate 5 and the heat bonding of the upper surface of the spacer 4 and the lower surface of the light transmitting plate 13 are performed in separate steps. However, it is possible to do them at the same time.

Furthermore, as an example, an example in which the method for joining synthetic corundum according to the present invention was applied to a method for producing a synthetic corundum cell was shown, but the present invention is also applicable to the case where a product other than the synthetic corundum cell is produced. Of course, such a synthetic corundum joining method can be applied.

[0026]

As described above, according to the method for joining synthetic corundum according to the present invention, when joining synthetic corundum pieces to be joined together, only one end side of the joined portion is pressed. , The one end side is in the optical contact state, and the interference fringes are generated in the remaining part of the contact surface, and the entire contact surface is brought into the optical contact state by heating at a temperature below the melting point of the synthetic corundum in this state. be able to.

Further, according to the method for producing a synthetic corundum cell according to the present invention utilizing the above-mentioned method for joining synthetic corundum, a cell having no interference fringes on the joining surface can be obtained, and moreover,
In manufacturing this synthetic corundum cell,
Even if the axis and the axis angle do not coincide with each other and deviate by about 5 °, a cell having no optical problem can be obtained.

[Brief description of drawings]

FIG. 1 is a diagram showing a state in which a disk for a spacer and a disk for a translucent plate are cut out from a crystal block of synthetic corundum.

FIG. 2 is a view showing a state in which a spacer and a transparent plate are respectively cut out from the spacer disk and the transparent plate.

FIG. 3 is a view showing a state in which a spacer and a transparent plate are polished.

FIG. 4 is a perspective view of a laminated body in which a spacer is set on a transparent plate.

FIG. 5 is a perspective view showing a state where one end side of the laminated body in which the spacer is set on the transparent plate is pressed on the jig base.

FIG. 6 is an exaggerated view of a gap on the other end side of the laminated body in which one end side is pressed.

FIG. 7 is a plan view of a laminated body in which one end side is pressed.

FIG. 8 is a diagram showing a state in which the spacer upper surface of the laminated body after the heat treatment is polished.

FIG. 9 is a view showing a state in which another transparent plate is stacked on the spacer of the laminated body shown in FIG.

10A is a sectional view of a synthetic corundum cell manufactured by the method of the present invention, and FIG. 10B is an end view of the synthetic corundum cell.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Crystal block of synthetic corundum, 2 ... Disk for spacer, 3 ... Disk for translucent plate, 4 ... Spacer, 4a, 4b
... spacer upper and lower surfaces, 4c ... spacer side surfaces, 5 ... translucent plate, 5a, 5b ... translucent plate upper and lower surfaces, 6 ... laminated body, 7 ... jig base, 8, 9 ... positioning block, 10 ... presser foot Jig, 1
DESCRIPTION OF SYMBOLS 1 ... Optical contact state part, 12 ... Interference fringes, 13 ... Another transparent plate, 14 ... Cylindrical body.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP 62-71214 (JP, A) JP 3-69600 (JP, A) JP 3-115200 (JP, A) JP 5- 255000 (JP, A) JP 60-47336 (JP, B1) JP 5-79640 (JP, B2) (58) Fields surveyed (Int.Cl. ⁷ , DB name) C30B 1/00-35 / 00

Claims (6)

(57) [Claims] 1. A method of joining synthetic corundum pieces cut out from a crystal block of synthetic corundum, which comprises polishing predetermined surfaces of synthetic corundum pieces to be joined to each other, and then bonding the polished surfaces together. By pressing one end side, one end side of the contact surface between the synthetic corundum pieces is brought into an optical contact state, and interference fringes occur in the remaining part of the contact surface, and in this state, at a temperature below the melting point of the synthetic corundum. A method for joining synthetic corundum, which comprises heating to bring the entire contact surface between the synthetic corundum pieces into an optical contact state. 2. A method for producing a synthetic corundum cell, which comprises the following steps. First Step: A spacer and a transparent plate are cut out from a crystal block of synthetic corundum. In the second step, at least the upper and lower surfaces and one side surface of the cut spacers are polished, and at least the upper and lower surfaces of the transparent plate are polished. The third step is to set a pair of spacers on the polished upper surface of the light-transmitting plate with a space therebetween, and press one end of the pair of spacers against the light-transmitting plate from above so that one end of the spacer and the upper surface of the light-transmitting plate. And are in an optical contact state, and interference fringes are generated on the contact surface between the remaining portion of the spacer and the upper surface of the transparent plate. Fourth Step The laminated body obtained in the third step is heated at a temperature equal to or lower than the melting point of the synthetic corundum to bring the entire contact surface between the spacer and the transparent plate into an optical contact state. Fifth step Another transparent plate is set on the pair of spacers of the laminated body obtained in the fourth step, and one end portion of the other transparent plate is pressed against the spacer to thereby separate the transparent plate. And one end of the spacer and the upper surface of the spacer are in an optical contact state, and interference fringes are generated on the contact surface between the remaining portion of the other transparent plate and the upper surface of the spacer. Sixth Step The laminated body obtained in the fifth step is heated at a temperature equal to or lower than the melting point of the synthetic corundum to bring the entire contact surface between the spacer and the transparent plate into an optical contact state. 3. The method for manufacturing a synthetic corundum cell according to claim 2, wherein in the first step, the crystal block of the synthetic corundum has a columnar shape, and the disk for spacer and the transparent plate are formed from the columnar crystal block. A method for producing a synthetic corundum cell, characterized in that a disc for an optical plate and a disc for a spacer and a disc for a translucent plate are cut out. 4. The method of manufacturing a synthetic corundum cell according to claim 2, wherein the polishing accuracy in the second step is
A method of manufacturing a synthetic corundum cell, wherein the wavelength is about λ / 4 (λ is the wavelength of red light). 5. The method of manufacturing a synthetic corundum cell according to claim 2, wherein in the fifth step, the upper surfaces of the pair of spacers are polished to adjust the thickness of the spacers, and then another light-transmitting light is formed on the spacers. A method for producing a synthetic corundum cell, characterized in that plates are set. 6. The method of manufacturing a synthetic corundum cell according to claim 2, wherein, in stacking the spacer and the light-transmitting plate in the third step and the fifth step, a shift of a crystal axis, a ridgeline, and a shaft angle is performed. Is within 5 °, a method for producing a synthetic corundum cell.