JP3094702B2 - Silicon oxide-based deposited film and method for producing the same - Google Patents
Silicon oxide-based deposited film and method for producing the sameInfo
- Publication number
- JP3094702B2 JP3094702B2 JP04333653A JP33365392A JP3094702B2 JP 3094702 B2 JP3094702 B2 JP 3094702B2 JP 04333653 A JP04333653 A JP 04333653A JP 33365392 A JP33365392 A JP 33365392A JP 3094702 B2 JP3094702 B2 JP 3094702B2
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- silicon oxide
- film
- deposited
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Physical Vapour Deposition (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、酸素ガス、二酸化炭素
ガスのガスバリア性、水蒸気バリア性、耐水性および耐
薬品性にすぐれ、種々の厳しい環境下におかれてもその
性能が安定しており、飲食品、医薬品などの包装材料分
野、電気絶縁材料ないし導電材料などの電子分野、ある
いは医療材料分野などの分野において、ほとんど無色透
明性を必要とする用途に有用な蒸着フィルムに関する。The present invention is excellent in gas barrier properties of oxygen gas and carbon dioxide gas, water vapor barrier properties, water resistance and chemical resistance, and has stable performance even under various severe environments. In addition, the present invention relates to a vapor-deposited film useful in applications requiring almost colorless transparency in the field of packaging materials such as food and drink, pharmaceuticals, the field of electronics such as electric insulating or conductive materials, and the field of medical materials.
【0002】[0002]
【従来の技術】従来、プラスチックフィルムにアルミニ
ウムを蒸着したフィルムは、食品包装などの材料として
広く用いられている。これらのアルミニウム蒸着フィル
ムは、可撓性、ガスバリア性、水蒸気バリア性にすぐれ
るものの、耐酸性、耐アルカリ性などの耐薬品性、耐水
性、透明性などに劣るため、煮沸殺菌処理したり、酸、
アルカリなどに接触すると、蒸着層の一部が剥離し、ガ
スバリア性や水蒸気バリア性がかなり低下するという欠
点があった。2. Description of the Related Art Conventionally, a film obtained by depositing aluminum on a plastic film has been widely used as a material for food packaging. These aluminum deposited films are excellent in flexibility, gas barrier properties and water vapor barrier properties, but are inferior in acid resistance, chemical resistance such as alkali resistance, water resistance, transparency, etc. ,
When it comes into contact with an alkali or the like, a part of the vapor-deposited layer is peeled off, and the gas barrier property and the water vapor barrier property are considerably reduced.
【0003】一方、特開昭49-41469号公報に開示されて
いる、プラスチックフィルムに SixOy (x=1,2,y=1,2,3)
なる組成の蒸着薄膜層を設けた蒸着フィルムは、耐薬品
性は高いものの、若干黄色味を呈しており、特に蒸着面
側に直接印刷した場合は黄色味を呈していることが大き
な弊害となり、デザイン上または用途上、例えばエレク
トルミネッセンスの構成材料等においては性能上大きな
障害となっていた。また、黄色味を少なくするために蒸
着膜の膜厚を薄くする方法もとられているが、その分、
酸素ガスバリア性、水蒸気バリア性が劣るという弊害も
おきている。なお、Siおよびその他の元素を含む蒸着薄
膜を設けてなるフィルムも知られているが、特に透明化
に有効な手段はほとんど知られていない。On the other hand, a plastic film disclosed in JP-A-49-41469 has SixOy (x = 1,2, y = 1,2,3).
A deposited film provided with a deposited thin film layer having a composition of, although having high chemical resistance, exhibits a slight yellow tint, and particularly when directly printed on the deposition surface side, a large adverse effect is exhibited by the yellow tint, In terms of design or use, for example, electroluminescent constituent materials have been a major obstacle to performance. In addition, a method of reducing the thickness of a vapor-deposited film to reduce yellow tint has been proposed,
There is also an adverse effect that the oxygen gas barrier property and the water vapor barrier property are inferior. In addition, a film provided with a vapor-deposited thin film containing Si and other elements is also known, but a particularly effective means for making the film transparent is almost unknown.
【0004】[0004]
【発明が解決しようとする課題】本発明者らは、上記欠
点を解決すべく鋭意検討を行った結果、蒸着面上に有機
金属化合物をコーティングしてガラス質被膜を形成して
なる蒸着フィルムが、ガスバリア性、水蒸気バリア性、
耐薬品性、及び耐水性にすぐれるのみならず、黄色味を
低減するために蒸着膜の膜厚を薄くする必要がなく、煮
沸殺菌処理を施しても剥離や亀裂を生じることがなく、
また、ガスバリア性や水蒸気バリア性も低下することが
なく、ほとんど無色透明であることを見出し、本発明に
至った。The inventors of the present invention have conducted intensive studies to solve the above-mentioned drawbacks. As a result, a vapor-deposited film formed by coating an organic metal compound on a vapor-deposited surface to form a vitreous film is obtained. , Gas barrier properties, water vapor barrier properties,
Not only excellent in chemical resistance and water resistance, it is not necessary to reduce the thickness of the deposited film to reduce the yellow tint, without peeling or cracking even when subjected to boiling sterilization treatment,
Further, they have found that they are almost colorless and transparent without deteriorating the gas barrier properties and water vapor barrier properties, and have reached the present invention.
【0005】[0005]
【課題を解決するための手段】すなわち、本発明は、プ
ラスチックフィルムの少なくとも片面に、珪素酸化物ま
たは珪素酸化物を主成分とした蒸着薄膜層と、有機金属
化合物の1種または2種以上を加水分解し部分縮合させ
たゾル溶液から形成されたガラス質被膜とを順次積層し
てなる蒸着フィルムを提供する。また、本発明は、プラ
スチックフィルムの少なくとも片面に、珪素酸化物また
は珪素酸化物を主成分とした蒸着薄膜層を形成したの
ち、該蒸着薄膜層の上に、有機金属化合物の1種または
2種以上を混合した溶液または該混合溶液をアルコール
などの有機溶媒に溶かして加水分解し部分縮合させたゾ
ル溶液をコーティングし、熱処理を施すことでガラス質
被膜を形成する蒸着フィルムの製造方法を提供する。That is, the present invention provides a plastic film comprising, on at least one side of a plastic film, a silicon oxide or a vapor-deposited thin film layer containing a silicon oxide as a main component, and one or more kinds of organometallic compounds. Provided is a vapor-deposited film formed by sequentially laminating a glassy coating formed from a sol solution that has been hydrolyzed and partially condensed. The present invention also provides a method for forming one or two types of organometallic compounds on at least one surface of a plastic film after forming a silicon oxide or a deposited thin film layer containing silicon oxide as a main component on the deposited thin film layer. Provided is a method for producing a vapor-deposited film that forms a vitreous film by coating a sol solution obtained by dissolving a solution obtained by mixing the above or a mixed solution in an organic solvent such as alcohol and hydrolyzing and partially condensing the solution, and performing a heat treatment. .
【0006】プラスチックフィルムとしては特に制限は
なく、ポリエチレンテレフタレート、ポリブチレンテレ
フタレートなどのポリエステル、ポリアミド、ポリ塩化
ビニル、ポリアクリロニトリル、ポリカーボネート、ポ
リスチレン、ポリプロピレン、エチレン−酢酸ビニル共
重合体けん化物、芳香族ポリアミド、フッ素樹脂などを
素材とするフィルム、あるいはこれらの2種以上を積層
したフィルムが用いられ、その表面に印刷やシランカッ
プリング剤、プライマーなどの塗布、コロナ放電処理、
低温プラズマ処理などの表面処理が施されたもの、一軸
延伸や二軸延伸されたものであってもよい。また、一般
包装用途では光沢、強度の面から二軸延伸ポリプロピレ
ンフィルム、ポリエステルフィルムなどが好んで用いら
れる。[0006] The plastic film is not particularly limited. Polyester such as polyethylene terephthalate and polybutylene terephthalate, polyamide, polyvinyl chloride, polyacrylonitrile, polycarbonate, polystyrene, polypropylene, saponified ethylene-vinyl acetate copolymer, aromatic polyamide , A film made of a fluororesin or the like, or a film obtained by laminating two or more of these materials is used, and printing, silane coupling agent, application of a primer, etc., corona discharge treatment,
It may have been subjected to surface treatment such as low-temperature plasma treatment, or may be uniaxially stretched or biaxially stretched. For general packaging applications, biaxially stretched polypropylene films, polyester films and the like are preferably used in terms of gloss and strength.
【0007】蒸着層は、これらのプラスチックフィルム
の片面または両面に設けられ、珪素酸化物 SiOx(x=1,2)
の薄膜、または珪素酸化物を主成分としマグネシウム、
アルミニウム、ジルコニウム、チタニウム、鉄、カルシ
ウム、ホウ素、ニッケル、クロムでなる群から選ばれる
少なくとも1種の元素を含む化合物を少なくとも1種含
有する薄膜を示す。A vapor deposition layer is provided on one or both sides of these plastic films, and a silicon oxide SiOx (x = 1,2)
Thin film, or magnesium with silicon oxide as a main component,
1 shows a thin film containing at least one compound containing at least one element selected from the group consisting of aluminum, zirconium, titanium, iron, calcium, boron, nickel, and chromium.
【0008】上記蒸着面には、分子中に2個以上の炭素
数1〜4のアルコキシル基を有し、Si,Ti,Al,B,Zr,W,Ta
から選ばれる1種の金属元素を含む有機金属化合物を、
1種または2種以上混合した溶液、または該混合溶液を
エタノール等のアルコールに溶かし、必要に応じて塩
酸、水を加え加水分解し部分縮合させたゾル溶液をコー
ティングし、熱処理を施すことでガラス質被膜を形成す
る。[0008] The above-mentioned deposition surface has two or more alkoxyl groups having 1 to 4 carbon atoms in the molecule, and is composed of Si, Ti, Al, B, Zr, W, and Ta.
An organometallic compound containing one kind of metal element selected from
A solution obtained by dissolving one or two or more kinds of mixed solutions, or a mixed solution thereof in an alcohol such as ethanol, and adding a hydrochloric acid and water as needed, hydrolyzing and partially condensing a sol solution, and performing a heat treatment on the glass. A porous coating is formed.
【0009】有機金属化合物としては、例えばシリコン
テトラメトキシド、シリコンテトラプロポキシド、チタ
ンテトラエトキシド、チタンテトラブトキシド、アルミ
ニウムトリメトキシド、アルミニウムトリエトキシド、
タンタルペンタプロポキシド、タンタルペンタブトキシ
ド、ボロントリメトキシド、ボロントリブトキシド、ジ
ルコニウムテトラエトキシド、ジルコニウムテトラプロ
ポキシド、タングステンヘキサメトキシド、タングステ
ンヘキサエトキシド、シリコンジエトキシド、シリコン
トリエトキシド、シリコンフェニルトリメトキシド、シ
リコンジエトキシジメチル、シリコン3-アミノプロピル
トリエトキシド、シリコンベンジルトリエトキシド、シ
リコン3-クロロプロピルジメトキシド、シリコンジエト
キシジクロライド、チタンジメトキシド、チタンジエト
キシジメチル、チタンジエトキシジフェニル、チタンジ
クロロジエトキシド、アルミニウムジメトキシド、アル
ミニウムジエトキシエチル、アルミニウムジエトキシフ
ェニル、タンタルトリエトキシド、タンタルジエトキシ
トリメチル、ボロンジメトキシド、ボロンジエトキシメ
チル、ボロンクロロジエトキシド、ジルコニウムジエト
キシド、ジルコニウムトリエトキシド、ジルコニウムフ
ェニルトリメトキシド、ジルコニウムジエトキシジメチ
ル、ジルコニウムジエトキシジクロライド、タングステ
ントリメトキシド、タングステントリエトキシトリメチ
ル、タングステンジクロロテトラエトキシド、タングス
テンジフェニルテトラエトキシド等が挙げられる。As the organometallic compound, for example, silicon tetramethoxide, silicon tetrapropoxide, titanium tetraethoxide, titanium tetrabutoxide, aluminum trimethoxide, aluminum triethoxide,
Tantalum pentapropoxide, tantalum pentabutoxide, boron trimethoxide, boron tributoxide, zirconium tetraethoxide, zirconium tetrapropoxide, tungsten hexamethoxide, tungsten hexaethoxide, silicon diethoxide, silicon triethoxide, silicon phenyl Trimethoxide, silicon diethoxydimethyl, silicon 3-aminopropyl triethoxide, silicon benzyl triethoxide, silicon 3-chloropropyl dimethoxide, silicon diethoxy dichloride, titanium dimethoxide, titanium diethoxydimethyl, titanium diethoxy diphenyl , Titanium dichlorodiethoxide, aluminum dimethoxide, aluminum diethoxyethyl, aluminum diethoxyphenyl, tantalum Liethoxide, tantalum diethoxy trimethyl, boron dimethoxide, boron diethoxymethyl, boron chlorodiethoxide, zirconium diethoxide, zirconium triethoxide, zirconium phenyl trimethoxide, zirconium diethoxydimethyl, zirconium diethoxy dichloride, tungsten trimethoxy , Tungsten triethoxytrimethyl, tungsten dichlorotetraethoxide, tungsten diphenyltetraethoxide and the like.
【0010】上記混合溶液は、溶媒 100重量部に対して
有機金属化合物 0.5〜30重量部、好ましくは 1〜10重量
部を溶かしたものである。有機金属化合物の混合溶液
は、バーコーティング、グラビアコーティングなどによ
り均一に蒸着面に塗布し、その後加熱乾燥させてガラス
質被膜とする。この際の膜厚は 0.1〜3 μmが適当であ
り、好ましくは 0.1〜0.5 μmである。膜厚が 0.1μm
未満では蒸着フィルムを高透明化にするには不十分であ
り、3μmを越えると被膜の剥離を生じてしまう。本発
明により得られる蒸着面にガラス質被膜を形成した蒸着
フィルムには、必要に応じて、さらに印刷やコーティン
グを施したり、接着剤やラミネート接着剤を用いてまた
は用いずにプラスチックフィルムを積層してもよい。そ
して、フィルムのまま、あるいは袋やチューブなどの形
に加工して飲食品、医薬品、医療、電子材料などの分野
で包装材料、ガス遮断材料、電気絶縁材料ないし導電材
料などとして広く用いることができる。The above mixed solution is obtained by dissolving 0.5 to 30 parts by weight, preferably 1 to 10 parts by weight of an organometallic compound in 100 parts by weight of a solvent. The mixed solution of the organometallic compound is uniformly applied to the deposition surface by bar coating, gravure coating, or the like, and then heated and dried to form a vitreous film. The film thickness at this time is suitably from 0.1 to 3 μm, and preferably from 0.1 to 0.5 μm. Thickness 0.1μm
If it is less than 3 μm, it is not enough to make the deposited film highly transparent, and if it exceeds 3 μm, the coating will peel off. The vapor-deposited film obtained by forming a glassy film on the vapor-deposited surface obtained according to the present invention, if necessary, is further subjected to printing or coating, or a plastic film laminated with or without an adhesive or a laminating adhesive. You may. And it can be widely used as a packaging material, a gas barrier material, an electrical insulating material or a conductive material in the fields of food and drink, pharmaceuticals, medical care, electronic materials, etc. as a film or processed into a shape such as a bag or a tube. .
【0011】[0011]
【実施例】以下、実施例により本発明をさらに詳細に説
明する。例中、OPは同圧法で測定した酸素ガス透過率
であり、その単位は ml/m2・24時間・1気圧・25℃・ 1
00%RHである。WVTは赤外線吸収法で測定した透湿
度であり、その単位は ml/m2・24時間・40℃・90%RH
である。T%は分光光度計による 400nmにおける透過率
である。なお、それらの単位の表示は、例中すべて省略
した。The present invention will be described in more detail with reference to the following examples. In the examples, OP is the oxygen gas permeability measured by the same pressure method, and its unit is ml / m 2 · 24 hours · 1 atm · 25 ° C · 1
00% RH. WVT is the moisture permeability measured by the infrared absorption method, and its unit is ml / m 2 · 24 hours · 40 ° C · 90% RH
It is. T% is the transmittance at 400 nm by a spectrophotometer. In addition, the display of those units was all omitted in the example.
【0012】〔実施例1〕エタノール 100部、テトラエ
トキシシラン 4部、トリメトキシボラン 1部、水5部、
塩酸 0.3部よりなる混合液を24時間放置し塗液を得た。
珪素酸化物蒸着フィルム(東洋インキ製造社製 GT1000
N )の蒸着面に、バーコーター#20 を用いて上記塗液を
塗布し、60℃で1時間乾燥させ、得られた蒸着フィルム
のT%を測定して透明性を評価した。結果を表1に示
す。次いで、ラミネート用ポリウレタン系接着剤(東洋
モートン社製 アドコート#810)を用いて、常法によ
り、塗膜処理した蒸着フィルムと厚さ50μmの未延伸ポ
リプロピレンフィルムを接着した。OPおよびWTRを
それぞれ10点測定し、測定値の平均値を算出した。結果
を表1に示す。Example 1 100 parts of ethanol, 4 parts of tetraethoxysilane, 1 part of trimethoxyborane, 5 parts of water,
A mixed solution comprising 0.3 parts of hydrochloric acid was left for 24 hours to obtain a coating solution.
Silicon oxide vapor deposition film (GT1000 manufactured by Toyo Ink Mfg. Co., Ltd.)
The above coating solution was applied to the deposition surface of N) using a bar coater # 20, dried at 60 ° C. for 1 hour, and T% of the obtained deposition film was measured to evaluate the transparency. Table 1 shows the results. Then, using a polyurethane-based adhesive for lamination (Adcoat # 810, manufactured by Toyo Morton Co., Ltd.), the coated film-deposited film and an unstretched polypropylene film having a thickness of 50 μm were bonded by a conventional method. OP and WTR were measured at 10 points each, and the average of the measured values was calculated. Table 1 shows the results.
【0013】〔比較例1〕未処理の珪素酸化物蒸着フィ
ルム(東洋インキ製造社製 GT1000N )のT%、OPお
よびWTRを実施例1と同様にして測定した結果を表1
に示す。 〔実施例2〕エタノール 100部、テトラエトキシシラン
5部、水10部、塩酸 0.3部よりなる混合液を24時間放置
し塗液を得た。珪素酸化物蒸着フィルム(東洋インキ製
造社製 GT1000N )の蒸着面に、バーコーター#20 を用
いて上記塗液を塗布し、60℃で1時間乾燥させた。塗膜
処理した蒸着フィルムに、50μmの未延伸ポリプロピレ
ンを接着した。得られた積層体を 100℃の水蒸気に3時
間暴露させた。暴露前および暴露後のT%、OPおよび
WVTを測定した。結果を表1に示す。[Comparative Example 1] T%, OP, and WTR of an untreated silicon oxide vapor-deposited film (GT1000N manufactured by Toyo Ink Mfg. Co., Ltd.) were measured in the same manner as in Example 1, and the results are shown in Table 1.
Shown in [Example 2] 100 parts of ethanol, tetraethoxysilane
A mixture of 5 parts, 10 parts of water and 0.3 parts of hydrochloric acid was left for 24 hours to obtain a coating liquid. The above coating solution was applied to a deposition surface of a silicon oxide deposition film (GT1000N manufactured by Toyo Ink Mfg. Co., Ltd.) using a bar coater # 20, and dried at 60 ° C. for 1 hour. Unstretched polypropylene of 50 μm was adhered to the deposited film subjected to the coating treatment. The obtained laminate was exposed to steam at 100 ° C. for 3 hours. T%, OP and WVT before and after exposure were measured. Table 1 shows the results.
【0014】[0014]
【表1】 [Table 1]
【0015】[0015]
【発明の効果】本発明により、ガスバリア性、水蒸気バ
リア性、耐薬品性および耐水性にすぐれるのみならず、
煮沸殺菌処理を施しても剥離や亀裂を生じることがな
く、また、ガスバリア性、水蒸気バリア性も低下するこ
とがなく、ほとんど無色透明なフィルムが得られるよう
になった。According to the present invention, not only gas barrier properties, water vapor barrier properties, chemical resistance and water resistance are excellent, but also
Even when subjected to boiling sterilization treatment, peeling and cracking did not occur, and gas barrier properties and water vapor barrier properties did not decrease, so that almost colorless and transparent films could be obtained.
フロントページの続き (58)調査した分野(Int.Cl.7,DB名) C23C 14/00 - 14/58 B32B 1/00 - 35/00 Continuation of front page (58) Field surveyed (Int. Cl. 7 , DB name) C23C 14/00-14/58 B32B 1/00-35/00
Claims (3)
に、珪素酸化物または珪素酸化物を主成分とした蒸着薄
膜層と、有機金属化合物の1種または2種以上を加水分
解し部分縮合させたゾル溶液を用いて形成されたガラス
質被膜とを順次積層してなる蒸着フィルム。A sol solution obtained by hydrolyzing and partially condensing one or more kinds of organometallic compounds with silicon oxide or a vapor-deposited thin film layer containing silicon oxide as a main component on at least one surface of a plastic film. A vapor-deposited film obtained by sequentially laminating a vitreous coating formed by using the method.
素数1〜4のアルコキシル基を有し、Si,Ti,Al,B,Zr,W,
Taから選ばれる1種の金属元素を含む化合物である請求
項1記載の蒸着フィルム。2. An organometallic compound having at least two alkoxyl groups having 1 to 4 carbon atoms in a molecule thereof, wherein Si, Ti, Al, B, Zr, W,
The vapor-deposited film according to claim 1, which is a compound containing one kind of metal element selected from Ta.
に、珪素酸化物または珪素酸化物を主成分とした蒸着薄
膜層を形成したのち、該蒸着薄膜層の上に、有機金属化
合物の1種または2種以上を混合した溶液または該混合
溶液をアルコールなどの有機溶媒に溶かして加水分解し
部分縮合させたゾル溶液をコーティングし、熱処理を施
すことでガラス質被膜を形成する蒸着フィルムの製造方
法。3. A method according to claim 1, wherein at least one surface of the plastic film is formed with silicon oxide or a vapor-deposited thin film layer containing silicon oxide as a main component, and one or two or more organometallic compounds are formed on the vapor-deposited thin film layer. Or a solution obtained by dissolving this mixed solution in an organic solvent such as alcohol and coating it with a sol solution that has been hydrolyzed and partially condensed, followed by heat treatment to form a glassy film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04333653A JP3094702B2 (en) | 1992-11-19 | 1992-11-19 | Silicon oxide-based deposited film and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04333653A JP3094702B2 (en) | 1992-11-19 | 1992-11-19 | Silicon oxide-based deposited film and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06158280A JPH06158280A (en) | 1994-06-07 |
JP3094702B2 true JP3094702B2 (en) | 2000-10-03 |
Family
ID=18268471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP04333653A Expired - Lifetime JP3094702B2 (en) | 1992-11-19 | 1992-11-19 | Silicon oxide-based deposited film and method for producing the same |
Country Status (1)
Country | Link |
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JP (1) | JP3094702B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3319164B2 (en) * | 1994-08-01 | 2002-08-26 | 凸版印刷株式会社 | Transparent gas barrier material |
WO2007123006A1 (en) * | 2006-04-21 | 2007-11-01 | Konica Minolta Holdings, Inc. | Gas barrier film, resin base for organic electroluminescent device, organic electroluminescent device using the same, and method for producing gas barrier film |
-
1992
- 1992-11-19 JP JP04333653A patent/JP3094702B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
作花「ニューガラス」(昭和62年11月27日)日刊工業新聞、p.209−215 |
Also Published As
Publication number | Publication date |
---|---|
JPH06158280A (en) | 1994-06-07 |
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