JP3091786B2 - Method and apparatus for removing residue from color filter - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process for manufacturing a color filter used in a solid-state image pickup device, a color liquid crystal display device, or the like. The present invention relates to a method and an apparatus for removing a residue of a colored layer forming photosensitive material.

[0002]

2. Description of the Related Art First, an example of a method for manufacturing a color filter will be described with reference to FIG. A black light-shielding layer 2 composed of a striped pattern having a line width of 60 μm and a pitch of about 200 μm is formed on a transparent substrate 1 such as glass (A).
This black light shielding layer may not be provided. Next, a first color, for example, a red water-soluble colored layer forming photosensitive material is applied from above the black light-shielding layer 2, a photomask is arranged and exposed, and then development is performed to form a red pattern layer 3 ( B) For the second and subsequent colors, for example, a green and blue colored layer forming photosensitive material is applied, a photomask is arranged and exposed, and then development is performed to form green and blue pattern layers 4 and 5 ( C, D). Next, physicochemical protection,
A protective film layer 6 is formed on the color pattern layer for the purpose of leveling and flattening the surface (E). Further, a transparent electrode layer 7 is formed on the protective film layer 6 to manufacture a color filter (F).

In the developing step of the above-mentioned color pattern manufacturing process, conventionally, a developing method such as spray development, spin development, dip development, high pressure development, or the like is used to form a photosensitive material for forming a colored layer, which is an unnecessary part of a color pattern. The residue is removed to remove it.

[0004]

However, in the conventional developing method described above, after the development is completed, as shown in FIG. 3A, a residue 8 is left in a portion other than the color pattern layer 3, and the light is transmitted through the color filter. In addition, in the high pressure development, there is a problem that a peeling portion 9 is formed in the color pattern layer 3 as shown in FIG. 3B.

Further, in any of the developing methods, since high-pressure water is sprayed in the developing tank, the residue of the colored layer forming photosensitive material rebounds on the inner wall of the developing tank and adheres again on the color pattern. As a result, when the protective film layer is formed in a subsequent step, a projection is formed at that portion, which hinders the alignment of the liquid crystal in the liquid crystal cell provided on the surface of the color filter and causes an abnormal liquid crystal cell gap. This causes a problem in that an image to be displayed is defective, and a product using a color filter becomes defective.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and a method and an apparatus for removing a residue of a color filter which can surely remove the residue of a photosensitive material for forming a colored layer and prevent reattachment thereof. The purpose is to provide.

[0007]

In order to achieve the above object, a method for removing residue from a color filter according to the present invention is to provide a color filter formed by applying a photosensitive material for forming a colored layer to a substrate, and exposing and developing the same. The high-pressure jet developer and air are jetted into the liquid storage unit 20 disposed at right angles to the transport direction of the substrate 1 to generate bubbles in the liquid storage unit 20, and the air bubbles are generated from the gap between the liquid storage unit 20 and the substrate 1. The method is characterized in that a residue of the colored layer forming photosensitive material remaining on the substrate 1 is removed by flowing out and rupture of bubbles and flow velocity of the liquid.

The apparatus for removing residue from a color filter according to the present invention includes a housing 19 disposed at a right angle to the transport direction of the substrate 1, a liquid storage section 20 formed below the housing 19, High-pressure injection pipe 21 coaxially disposed, a nozzle portion 22 formed below the high-pressure injection pipe 21, a developer supply pipe 23 coaxially disposed within the high-pressure injection pipe 21, and a high-pressure injection pipe And an air supply pipe 25 connected to the air supply pipe 21. The numbers added to the above configuration are for comparison with the drawings for easy understanding, and do not limit the configuration of the present invention at all.

[0009]

In the present invention, for example, as shown in FIG.
The substrate 1 developed in the developing tank 12 is carried into the residue removing tank 13 by the conveyor 11, and when the liquid storage section 20 of the residue removing device 17 is closed by the substrate 1, the pump 27 stores the liquid in the liquid tank 29. Of the developer, the filter 26, the liquid supply pipe 2
The air is supplied from the air supply pipe 25 to the high-pressure injection pipe 21 via 3. The liquid mixed with the air in the high-pressure injection pipe 21 is jetted from the nozzle unit 22 to the liquid storage unit 20 and collides with the liquid, thereby generating bubbles in the liquid storage unit 20. The liquid in the liquid storage unit 20 flows out of the gap between the liquid storage unit 20 and the substrate 1 together with the air bubbles, and at this time, residues remaining on the substrate 1 are removed due to the burst of the air bubbles and the flow velocity of the liquid.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing one embodiment of the residue removing apparatus of the present invention.

A developing tank 12 and a residue removing tank 13 are provided on a conveyor 11 for transporting the substrate 1. Developing tank 1
2 is provided with a low-pressure spray device 16 connected to the water supply pipes 15a, 15b, 15c, and sprays a hot developer from above and below the substrate 1 to remove most of the upper layer of the colored layer forming photosensitive material; It is discharged from the drain pipe 15d.

A residue removing device 17 is provided in the residue removing tank 13. The residue removing device 17 includes a housing 19 provided in a direction perpendicular to the transport direction of the substrate 1, a liquid storage unit 20 formed at a lower portion of the housing 19, and a high-pressure injection pipe 21 coaxially arranged in the housing 19. A nozzle part 22 formed below the high-pressure injection pipe 21, a developer supply pipe 23 coaxially arranged in the high-pressure injection pipe 21,
An air supply pipe 25 connected to the high-pressure injection pipe 21;
The developer supply pipe 23 is connected to a developer tank 29 via a filter 26 and a pump 27.

The operation of the present invention having the above configuration will be described. The substrate 1 developed in the developing tank 12 is a conveyor 1
1 to the residue removal tank 13 and the residue removal device 1
7 is blocked by the substrate 1, the pump 2
By 7, the developer in the liquid tank 29 is supplied to the high-pressure injection pipe 21 via the filter 26 and the developer supply pipe 23, and air is sucked from the air supply pipe 25. The liquid mixed with the air in the high-pressure injection pipe 21 is jetted from the nozzle unit 22 to the liquid storage unit 20 and collides with the liquid, thereby generating bubbles in the liquid storage unit 20. The liquid in the liquid storage unit 20 is bubbled together with the air bubbles in the liquid storage unit 2.
Outflow from a slight gap (about 1 mm) between
At this time, residues remaining on the substrate 1 are removed by the burst of bubbles and the flow rate of the liquid.

The photosensitive material for forming a colored layer to which the present invention is applied is:
It has a property that it is hardly soluble in a developing solution and hardly peeled off by a low-pressure developing solution. Examples of the composition ratio (% by weight) are shown below.

Red: pyrazolone red (red pigment) 10 polyvinyl alcohol / 5% stilbazolium quinolium (photosensitive resin) 5 water 85 green: lionol green 2Y-301 (green pigment) 9 polyvinyl alcohol / 5% stilbazolium Quinolium (photosensitive resin) ... 5 water ... 86 blue: fastogen blue (blue pigment) ... 3 polyvinyl alcohol / 5% stilbazolium quinolium (photosensitive resin) ... 5 water ... 92 In the photosensitive material for forming a colored layer in this example, Although water is used as a developer, when other light-sensitive materials are used, a developer suitable for the light-sensitive material, for example, an alkali developer or various solvents can be used.

Table 1 shows the results of experiments using the conventional spray development and the apparatus for removing residue according to the present invention.

[0017]

[Table 1]

According to the above experimental results, the light transmittance (residual removal rate) was improved as compared with the conventional spray development, and it was found that the effect was particularly effective under the conditions of Example 1.

[0019]

As is apparent from the above description, according to the present invention, in the manufacture of a color filter formed by applying a photosensitive material for forming a colored layer to a substrate, and exposing and developing the same, the transport direction of the substrate is A high-pressure jet developer and air are jetted into a liquid storage section disposed at right angles to the liquid storage section to generate bubbles in the liquid storage section, and this is caused to flow out of a gap between the liquid storage section and the substrate,
Due to the burst of bubbles and the flow rate of the liquid, the residue of the photosensitive material for forming the colored layer remaining on the substrate is removed, so that the residue of the photosensitive material for forming the colored layer can be formed without causing a peeling portion in the color pattern layer. Can be reliably removed and re-adhesion can be prevented.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an embodiment of a color filter residue removing apparatus according to the present invention.

FIG. 2 is an enlarged cross-sectional view for explaining a method of manufacturing a color filter.

FIG. 3 is an enlarged cross-sectional view of a color filter for explaining a problem of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate, 11 ... Conveyor, 12 ... Developing tank, 13 ... Residue removing tank 17 ... Residue removing apparatus, 19 ... Housing, 20 ... Liquid storage part, 21 ... High-pressure injection pipe 22 ... Nozzle part, 23 ... Developer Supply pipe, 25 ... Air supply pipe, 26 ... Filter 27 ... Pump, 29 ... Developer tank

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-118662 (JP, A) JP-A-62-191804 (JP, A) JP-A-4-96002 (JP, A) 20051 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) G02B 5/20 101 G03F 7/30 501

Claims (2)

(57) [Claims] In the manufacture of a color filter formed by applying a photosensitive material for forming a colored layer to a substrate, and exposing and developing the same, a liquid storage section disposed at a right angle to a transport direction of the substrate is provided.
Injects high-pressure jetting developer and air to generate bubbles in the liquid storage section, flows out of the gap between the liquid storage section and the substrate, and forms a colored layer remaining on the substrate due to the burst of bubbles and the flow velocity of the liquid. What is claimed is: 1. A method for removing a residue of a color filter, comprising: removing a residue of a photosensitive material. 2. A housing disposed at a right angle to the substrate transport direction, a liquid storage portion formed at a lower portion of the housing, a high-pressure injection pipe coaxially disposed in the housing, and the high-pressure injection pipe. A color filter, comprising: a nozzle portion formed at a lower portion of the color filter; a developer supply tube coaxially arranged in the high-pressure injection tube; and an air supply tube connected to the high-pressure injection tube. Inspection and removal equipment.