JP3089721U - Illumination light source device used for precision inspection equipment - Google Patents
Illumination light source device used for precision inspection equipmentInfo
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- JP3089721U JP3089721U JP2002002534U JP2002002534U JP3089721U JP 3089721 U JP3089721 U JP 3089721U JP 2002002534 U JP2002002534 U JP 2002002534U JP 2002002534 U JP2002002534 U JP 2002002534U JP 3089721 U JP3089721 U JP 3089721U
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- light source
- illumination light
- light
- illumination
- inspected
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Abstract
(57)【要約】
【課題】本考案は、任意の色スペクトラム、光量分布を
有する照明光を被検査体に照射することが可能な照明光
源装置を提供する。
【解決手段】本考案の照明光源装置は、被検査体である
液晶板５０に照射される照明光を透過させ、該液晶板５
０に対向配置した撮像素子を用いた検出部６により透過
照明光を検出して液晶板５０の精密検査を行う精密検査
装置に用いられる照明光源装置１であって、照明光を発
する複数の光源２と、各光源２からの照明光を各々導光
し液晶板５０に向けて照射する照明光の波長領域全体に
亙って均一の光透過特性をもった複数の光ファイバ３を
用いた照射ユニット４と、各光源２と各光ファイバ３と
の間に配置した複数の色フィルタ５と、前記各光源２の
個別の出力調整を行う光源調整部１０とを有し、光源調
整部１０による各光源２の出力調整と、前記各色フィル
タ５のフィルタ作用により、前記波長領域において任意
の色スペクトラム、光量分布を有する照明光を液晶板５
０に照射可能としたものである。
(57) [Summary] The present invention provides an illumination light source device capable of irradiating an object to be inspected with illumination light having an arbitrary color spectrum and light quantity distribution. An illumination light source device according to the present invention transmits illumination light applied to a liquid crystal plate (50) to be inspected and transmits the liquid crystal plate (5).
An illumination light source device 1 used in a precision inspection device that performs a precision inspection of a liquid crystal plate 50 by detecting transmitted illumination light by a detection unit 6 using an image sensor arranged opposite to a light source, and includes a plurality of light sources that emit illumination light. 2 and illumination using a plurality of optical fibers 3 having uniform light transmission characteristics over the entire wavelength range of the illumination light to be guided and illuminated toward the liquid crystal panel 50 from each light source 2. The light source adjusting unit 10 includes a unit 4, a plurality of color filters 5 disposed between each light source 2 and each optical fiber 3, and a light source adjusting unit 10 for individually adjusting the output of each light source 2. By adjusting the output of each light source 2 and the filtering effect of each color filter 5, the illumination light having an arbitrary color spectrum and light amount distribution in the wavelength region is supplied to the liquid crystal plate 5.
It can be irradiated to 0.
Description
本考案は、液晶板等のような被検査体の検査を行う精密検査装置に用いられる 照明光源装置に関するものである。 The present invention relates to an illumination light source device used for a precision inspection device for inspecting an object to be inspected such as a liquid crystal plate.
従来におけるこの種の精密検査装置について、図４乃至図６を参照して説明す る。 図４は、従来の精密検査装置の概略構成を示すものであり、光源部５１から被 検査体である液晶板５０の一方の面に照明光を照射し、液晶板５０を透過（又は 反射）した光を、液晶板５０に対向配置した撮像素子を用いた検出部５２により 検出し、撮像して、図示しない画像処理部で画像処理することで、前記液晶板５ ０の面状態等の精密検査を行うものである。 このような従来の精密検査装置の場合、前記光源部５１には可視光領域（波長 約４００乃至７７０ｎｍ程度）の照明光を発する光源５３が複数個用いられる。 A conventional precision inspection apparatus of this type will be described with reference to FIGS. FIG. 4 shows a schematic configuration of a conventional precision inspection apparatus. Illumination light is emitted from a light source unit 51 to one surface of a liquid crystal plate 50 to be inspected, and transmitted (or reflected) through the liquid crystal plate 50. The detected light is detected by a detection unit 52 using an image sensor arranged opposite to the liquid crystal plate 50, imaged, and subjected to image processing by an image processing unit (not shown), so that the state of the surface of the liquid crystal plate 50 and the like can be precisely determined. An inspection is performed. In the case of such a conventional precision inspection apparatus, a plurality of light sources 53 that emit illumination light in a visible light region (wavelength of about 400 to 770 nm) are used as the light source unit 51.
しかしながら、上述した従来装置の場合、光源５３からの照明光の色スペクト ラムが可視光領域全体で不均一性を有することから、液晶板５０を透過（又は反 射）した光の赤色（Ｒ）、緑色（Ｇ）、青色（Ｂ）成分別の光量分布は、例えば 図５に示すようになる。 すなわち、前記液晶板５０を透過（又は反射）した光の各色別の光量分布は緑 色（Ｇ）成分が大きく、赤色（Ｒ）成分が中位で、青色（Ｂ）成分が最小となる 。 この結果、液晶板５０の面に異物が有ったり、ピンホールが有ったりした場合 、液晶板５０を透過（又は反射）した光に含まれるピンホール成分（図５の符号 ６１）、異物成分（図５の符号６２）の画像を正確に把握する事が困難になり、 精密検査装置の検査精度が低下してしまうという問題があった。 また、上述した従来装置における場合、液晶板５０を透過（又は反射）した光 の透過や反射の光量は、液晶板５０の製造ロット、製造タイプ毎に変化し、この ため、製造ロット、製造タイプ毎に検出感度、検出精度が異なってしまうという 問題もあった。 このような従来装置の問題点に鑑み、光源５３からの照明光の色スペクトラム を改良すべく色フィルタを光源に付加して色スペクトラムを調整し、光量分布の 均一化を図る試みもなされている。 すなわち、図６上欄に示すような可視光領域の色スペクトラム、各色別の光量 分布を有する光源５３からの照明光に対して、色フィルタを付加することで、図 ６下欄に示すような可視光領域の色スペクトラム、赤色（Ｒ）、緑色（Ｇ）、青 色（Ｂ）各色別の均一な光量分布を有する照明光を生成して液晶板５０に照射し ようとするものである。 しかし、このような場合においても、付加する色フィルタの種類を製造ロット 、製造タイプ毎に変更する必要が有り、色フィルタの選定の困難性、装置価格の 上昇、微調整が効かない等の種々の問題を包含していた。 本考案は上記事情に鑑みてなされたものであり、照明光の波長領域において任 意の色スペクトラム、光量分布を有する照明光を生成し、被検査体に照射するこ とが可能な精密検査装置用に用いられる照明光源装置を提供することを目的とす るものである。 However, in the case of the above-described conventional device, since the color spectrum of the illumination light from the light source 53 has non-uniformity in the entire visible light region, the red (R) of the light transmitted (or reflected) through the liquid crystal plate 50 is used. , Green (G) and blue (B) components are as shown in FIG. 5, for example. That is, the light amount distribution of the light transmitted (or reflected) through the liquid crystal plate 50 for each color has a large green (G) component, a middle red (R) component, and a minimum blue (B) component. As a result, when there is a foreign substance or a pinhole on the surface of the liquid crystal plate 50, a pinhole component (reference numeral 61 in FIG. 5) contained in the light transmitted (or reflected) through the liquid crystal panel 50 is removed. There is a problem that it is difficult to accurately grasp the image of the component (reference numeral 62 in FIG. 5), and the inspection accuracy of the precision inspection device is reduced. In the case of the above-described conventional device, the amount of transmission or reflection of light transmitted (or reflected) through the liquid crystal panel 50 varies depending on the production lot and production type of the liquid crystal panel 50. There was also a problem that the detection sensitivity and detection accuracy differed for each. In view of such problems of the conventional apparatus, attempts have been made to improve the color spectrum of the illumination light from the light source 53 by adding a color filter to the light source to adjust the color spectrum and to make the light amount distribution uniform. . In other words, by adding a color filter to the color spectrum in the visible light region as shown in the upper column of FIG. 6 and the illumination light from the light source 53 having the light amount distribution for each color, as shown in the lower column of FIG. This is to generate illumination light having a uniform light amount distribution for each color of the visible light region, red (R), green (G), and blue (B), and to irradiate the liquid crystal plate 50 with the generated light. However, even in such a case, it is necessary to change the type of the color filter to be added for each production lot and each production type, and there are various problems such as difficulty in selecting the color filter, increase in apparatus price, and ineffectiveness of fine adjustment. The problem was embraced. The present invention has been made in view of the above circumstances, and is a precision inspection apparatus capable of generating illumination light having an arbitrary color spectrum and light amount distribution in the wavelength region of illumination light and irradiating the object to be inspected. It is an object of the present invention to provide an illumination light source device used for the purpose.
上記課題を解決するために、請求項１記載の考案は、被検査体に照明光を照射 し、被検査体に対向配置した撮像素子を用いた検出部により被検査体からの光束 を検出して前記被検査体の精密検査を行う精密検査装置に用いられる照明光源装 置であって、前記照明光を発する複数の光源と、各光源からの照明光を各々導光 し被検査体に向けて照射する照明光の波長領域全体に亙って均一の光透過特性を もった複数の光ファイバを用いた照射ユニットと、各各光源と各光ファイバとの 間に配置した複数の色フィルタと、前記各光源の個別の出力調整を行う光源調整 部とを有し、前記光源調整部による各光源の出力調整と、前記各色フィルタのフ ィルタ作用により、前記波長領域において任意の色スペクトラム、光量分布を有 する照明光を被検査体に照射可能としたことを特徴とするものである。 この考案によれば、光源調整部による各光源の出力調整と、前記各色フィルタ のフィルタ作用により、照明光の波長領域において任意の色スペクトラム、光量 分布を有する照明光を生成し、被検査体に照射することが可能であり、光反射型 の精密検査装置に用いて好適な照明光源装置を提供することができる。 請求項２記載の考案は、被検査体に照射される照明光を透過させ、該被検査体 に対向配置した撮像素子を用いた検出部により透過照明光を検出して前記被検査 体の精密検査を行う精密検査装置に用いられる照明光源装置であって、前記照明 光を発する複数の光源と、各光源からの照明光を各々導光し被検査体に向けて照 射する照明光の波長領域全体に亙って均一の光透過特性をもった複数の光ファイ バを用いた照射ユニットと、各光源と各光ファイバとの間に配置した複数の色フ ィルタと、前記各光源の個別の出力調整を行う光源調整部とを有し、前記光源調 整部による各光源の出力調整と、前記各色フィルタのフィルタ作用により、前記 波長領域において任意の色スペクトラム、光量分布を有する照明光を被検査体に 照射可能としたことを特徴とするものである。 この考案によれば、請求項１記載の考案と同様、前記光源調整部による各光源 の出力調整と、前記各色フィルタのフィルタ作用により、照明光の波長領域にお いて任意の色スペクトラム、光量分布を有する照明光を生成し、被検査体に照射 することが可能であり、光透過型の精密検査装置に用いて好適な照明光源装置を 提供することができる。 請求項３記載の考案は、請求項１又は２記載の精密検査装置に用いられる照明 光源装置において、前記各光源と各光ファイバとの間に配置した複数の色フィル タは、赤色、緑色、青色の各色成分のフィルタ作用を有するものであることを特 徴とするものである。 この考案によれば、可視光領域で任意の色スペクトラムを有する照明光を生成 し、被検査体に照射することが可能な照明光源装置を提供することができる。 請求項４記載の考案は、請求項１乃至３のいずれかに記載の精密検査装置に用 いられる照明光源装置において、前記各光源、各光ファイバ、各色フィルタはラ イン状に又はマトリックス状に配置されることを特徴とするものである。 この考案によれば、上記作用を発揮するライン状照明光源装置又は面状照明光 源装置を提供することができる。 In order to solve the above problem, the invention according to claim 1 irradiates an object to be inspected with illumination light, and detects a light beam from the object to be inspected by a detection unit using an image sensor arranged opposite to the object to be inspected. An illumination light source device used in a precision inspection device for performing a precision inspection of the object to be inspected, wherein the plurality of light sources emitting the illumination light, and the illumination light from each light source are respectively guided to the object to be inspected. An irradiation unit using a plurality of optical fibers having uniform light transmission characteristics over the entire wavelength range of the illumination light to be irradiated, and a plurality of color filters arranged between each light source and each optical fiber. A light source adjustment unit for individually adjusting the output of each of the light sources, and by controlling the output of each light source by the light source adjustment unit and the filtering action of each color filter, an arbitrary color spectrum and light amount in the wavelength region. Illumination light with a distribution It is characterized in that which is capable irradiated to 査体. According to this invention, by adjusting the output of each light source by the light source adjustment unit and the filtering action of each color filter, illumination light having an arbitrary color spectrum and light amount distribution in the wavelength region of the illumination light is generated, and the inspection object is produced. Irradiation is possible, and an illumination light source device suitable for use in a light reflection type precision inspection device can be provided. According to a second aspect of the present invention, the illumination light applied to the object to be inspected is transmitted, and the transmitted illumination light is detected by a detection unit using an image pickup device arranged to face the object to be inspected, thereby enabling precise inspection of the object to be inspected. An illumination light source device used in a precision inspection device for performing inspection, comprising: a plurality of light sources that emit the illumination light; and a wavelength of the illumination light that guides the illumination light from each light source and irradiates the illumination light toward an object to be inspected. An irradiation unit using a plurality of optical fibers having uniform light transmission characteristics over the entire area; a plurality of color filters disposed between each light source and each optical fiber; A light source adjustment unit for adjusting the output of each light source. The illumination light having an arbitrary color spectrum and light amount distribution in the wavelength region is provided by the output adjustment of each light source by the light source adjustment unit and the filtering action of each color filter. Irradiation to the inspected object And it is characterized in and. According to the invention, as in the invention according to claim 1, the output of each light source by the light source adjustment unit and the filtering action of each color filter allow an arbitrary color spectrum and light amount distribution in the wavelength region of the illumination light. It is possible to generate illumination light having the following characteristics and irradiate the object to be inspected, and to provide an illumination light source device suitable for use in a light transmission type precision inspection device. According to a third aspect of the present invention, in the illumination light source device used in the precision inspection apparatus according to the first or second aspect, the plurality of color filters disposed between each light source and each optical fiber are red, green, It is characterized by having a filter action for each blue color component. According to the present invention, it is possible to provide an illumination light source device capable of generating illumination light having an arbitrary color spectrum in a visible light region and irradiating the object to be inspected. According to a fourth aspect of the present invention, in the illumination light source device used in the precision inspection device according to any one of the first to third aspects, each of the light sources, each of the optical fibers, and each of the color filters are arranged in a line or in a matrix. It is characterized by being arranged. According to the present invention, it is possible to provide a linear illumination light source device or a planar illumination light source device exhibiting the above-described effects.
【考案の実施の形態】 以下に本考案の実施の形態について詳細に説明する。 図１は本考案の実施の形態の照明光源装置１を含む光透過型に構成した精密検 査装置２０を示すものであり、精密検査装置２０は、照明光源装置１からの可視 光領域の照明光を、被検査体である液晶板５０に照射し透過させ、該液晶板５０ に対向配置したＣＣＤ等の撮像素子を用いた検出部６により透過照明光を検出し 撮像して、更に図示しない画像処理部で画像処理し、前記液晶板５０の面等の精 密検査を行うように構成している。 前記照明光源装置１は、前記照明光を発する複数の光源２と、各光源２からの 照明光を各々導光し液晶板５０に向けて照射する照明光の波長領域（波長約４０ ０乃至７７０ｎｍ程度）全体に亙って均一の光透過特性をもった複数の光ファイ バ３を用いた照射ユニット４と、各光源２と各光ファイバ３の入射端との間に各 々配置した赤色（Ｒ）フィルタ５ａ、緑色（Ｇ）フィルタ５ｂ、青色（Ｂ）フィ ルタ５ｃを組み合わせた複数個の色フィルタ５と、前記各光源２の個別の出力調 整を行う光源調整部１０とを有している。 図２上欄は、複数の光ファイバ３を用いた照射ユニット４のみの光源２を一灯 点灯した場合の出射光の光量分布、図２下欄は同じく光源２を二点灯した場合の 出射光の光量分布を示すものであり、いずれの場合も前記照射ユニット４の出射 領域全体に亙って均一な光量分布を得ることができる。 本実施の形態の照明光源装置１によれば、前記照射ユニット４を使用し、且つ 、前記光源調整部１０による各光源２の個別の出力調整と、前記赤色（Ｒ）フィ ルタ５ａ、緑色（Ｇ）フィルタ５ｂ、青色（Ｂ）フィルタ５ｃの組み合わせから なる各色フィルタ５の色別のフィルタ作用により、前記波長領域において任意の 色スペクトラム（赤色（Ｒ）成分を強調、青色（Ｂ）成分を強調等）、任意の光 量分布（各色成分で均一光量等）を有する照明光を生成して液晶板５０に照射す ることが可能となる。 図３は、前記照射ユニット４の出射領域全体に亙る照明光の光量分布を、赤色 （Ｒ）、緑色（Ｇ）、青色（Ｂ）各色成分で均一となるように調整した例を示す ものである。 なお、上述した実施の形態では、前記各光源２、各光ファイバ３、各色フィル タ５を、ライン状に配置し、ライン状の照明光源装置１とした構成について説明 したが、これらを縦横マトリックス状に配置し、二次元構成の照明光源装置とす ることができることは言うまでもない。 また、上述した実施の形態では、光透過型に構成した精密検査装置２０につい て説明したが、照明光源装置１から液晶板５０に照明光を照射し、液晶板５０か らの反射光束を検出部６により受光するように構成した光反射型の精密検査装置 についても本考案は適用可能である。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 shows a light inspection type precision inspection device 20 including an illumination light source device 1 according to an embodiment of the present invention. The precision inspection device 20 illuminates a visible light region from the illumination light source device 1. The light is radiated to the liquid crystal plate 50 as an object to be inspected and transmitted, and the transmitted illumination light is detected and imaged by the detecting unit 6 using an image pickup device such as a CCD arranged opposite to the liquid crystal plate 50, and further not shown. The image processing unit performs image processing and performs a detailed inspection of the surface of the liquid crystal plate 50 and the like. The illumination light source device 1 includes a plurality of light sources 2 that emit the illumination light, and a wavelength region (wavelength of about 400 to 770 nm) of the illumination light for guiding the illumination light from each light source 2 and irradiating the illumination light toward the liquid crystal panel 50. Irradiation unit 4 using a plurality of optical fibers 3 having uniform light transmission characteristics over the whole, and red ( It has a plurality of color filters 5 in which an R) filter 5a, a green (G) filter 5b, and a blue (B) filter 5c are combined, and a light source adjustment unit 10 for individually adjusting the output of each light source 2. ing. The upper part of FIG. 2 shows the light quantity distribution of the emitted light when one light source 2 of only the irradiation unit 4 using a plurality of optical fibers 3 is turned on, and the lower part of FIG. In each case, a uniform light amount distribution can be obtained over the entire emission area of the irradiation unit 4. According to the illumination light source device 1 of the present embodiment, the illumination unit 4 is used, the output of each light source 2 is individually adjusted by the light source adjustment unit 10, and the red (R) filter 5a and the green ( G) By a filter function for each color of each color filter 5 composed of a combination of a filter 5b and a blue (B) filter 5c, an arbitrary color spectrum (red (R) component is emphasized and blue (B) component is enhanced in the wavelength region). Etc.), it is possible to generate illumination light having an arbitrary light amount distribution (e.g., uniform light amount for each color component) and irradiate the liquid crystal plate 50 with the generated light. FIG. 3 shows an example in which the light quantity distribution of the illumination light over the entire emission area of the irradiation unit 4 is adjusted to be uniform for each of the red (R), green (G), and blue (B) color components. is there. In the above-described embodiment, the configuration in which the light sources 2, the optical fibers 3, and the color filters 5 are arranged in a line to form the linear illumination light source device 1 has been described. It is needless to say that the illumination light source device can be arranged in a two-dimensional configuration to form a two-dimensional illumination light source device. Further, in the above-described embodiment, the precision inspection device 20 configured as a light transmission type has been described. However, the illumination light source device 1 irradiates the liquid crystal plate 50 with illumination light and detects the reflected light flux from the liquid crystal plate 50. The present invention is also applicable to a light reflection type precision inspection device configured to receive light by the unit 6.
本考案によれば、照明光の波長領域において任意の色スペクトラム、光量分布 を有する照明光を生成し、被検査体に照射することが可能であり、光反射型の精 密検査装置に用いて好適な照明光源装置を提供することができる。また、本考案 によれば、光源調整部による各光源の出力調整と、赤色、緑色、青色の各色成分 のフィルタ作用を有する複数の色フィルタを用いて上記効果を奏するライン状照 明光源装置又は面状照明光源装置を提供することができる。 According to the present invention, it is possible to generate illumination light having an arbitrary color spectrum and light quantity distribution in the wavelength region of the illumination light, and irradiate the object to be inspected. A suitable illumination light source device can be provided. Further, according to the present invention, a linear illuminating light source device or a linear illuminating light source device which achieves the above effect by using a plurality of color filters having a filter action of each of red, green and blue color components by adjusting the output of each light source by the light source adjusting unit. A planar illumination light source device can be provided.
【図１】本考案の実施の形態の照明光源装置を含む精密
検査装置の概略構成を示す断面図である。FIG. 1 is a sectional view showing a schematic configuration of a precision inspection device including an illumination light source device according to an embodiment of the present invention.
【図２】本実施の形態における照射ユニットのみの１灯
点灯、２灯点灯の場合の光量分布を示す説明図である。FIG. 2 is an explanatory diagram illustrating a light amount distribution in a case where only one irradiation unit is turned on and two lamps are turned on in the present embodiment.
【図３】本実施の形態の赤色、緑色、青色均一な光量分
布を有する照明光の一例を示す説明図である。FIG. 3 is an explanatory diagram illustrating an example of illumination light having a uniform light amount distribution of red, green, and blue according to the present embodiment.
【図４】従来の精密検査装置の概略構成を示す断面図で
ある。FIG. 4 is a cross-sectional view showing a schematic configuration of a conventional precision inspection device.
【図５】従来の精密検査装置における被検査体透過光の
赤色、緑色、青色別の光量分布の状態を示す説明図であ
る。FIG. 5 is an explanatory diagram showing a state of a light quantity distribution of red, green, and blue of transmitted light of a test object in a conventional precision inspection apparatus.
【図６】従来の照明光の色スペクトラム、色フィルタ使
用時の照明光の色スペクトラム及びこれらの照明光の赤
色、緑色、青色別の光量分布の状態を示す説明図であ
る。FIG. 6 is an explanatory diagram showing a conventional color spectrum of illumination light, a color spectrum of illumination light when a color filter is used, and a state of light quantity distribution of these illumination lights for red, green, and blue.
１ 照明光源装置 ２ 光源 ３ 光ファイバ ４ 照射ユニット ５ 色フィルタ ５ａ 色フィルタ ５ｂ 色フィルタ ５ｃ 色フィルタ ６ 検出部 １０ 光源調整部 ２０ 精密検査装置 ５０ 液晶板 Reference Signs List 1 illumination light source device 2 light source 3 optical fiber 4 irradiation unit 5 color filter 5a color filter 5b color filter 5c color filter 6 detection unit 10 light source adjustment unit 20 precision inspection device 50 liquid crystal plate
Claims (4)
向配置した撮像素子を用いた検出部により被検査体から
の光束を検出して前記被検査体の精密検査を行う精密検
査装置に用いられる照明光源装置であって、 前記照明光を発する複数の光源と、 各光源からの照明光を各々導光し被検査体に向けて照射
する照明光の波長領域全体に亙って均一の光透過特性を
もった複数の光ファイバを用いた照射ユニットと、 各光源と各光ファイバとの間に配置した複数の色フィル
タと、 前記各光源の個別の出力調整を行う光源調整部とを有
し、 前記光源調整部による各光源の出力調整と、前記各色フ
ィルタのフィルタ作用により、前記波長領域において任
意の色スペクトラム、光量分布を有する照明光を被検査
体に照射可能としたことを特徴とする精密検査装置に用
いられる照明光源装置。1. A precision device for irradiating an object to be inspected with illumination light, detecting a light beam from the object to be inspected by a detector using an image pickup device arranged opposite to the object to be inspected, and performing a precise inspection of the object to be inspected. An illumination light source device used for an inspection apparatus, comprising: a plurality of light sources that emit the illumination light; and an illumination light source that guides the illumination light from each of the light sources and irradiates the illumination light toward an object to be inspected. Irradiation unit using a plurality of optical fibers having uniform light transmission characteristics, a plurality of color filters arranged between each light source and each optical fiber, and a light source adjustment for individually adjusting the output of each light source The output adjustment of each light source by the light source adjustment unit, and the filter action of each color filter, it is possible to irradiate the inspection object with any color spectrum in the wavelength region, illumination light having a light amount distribution Essence characterized by Illumination light source device used in the inspection apparatus.
該被検査体に対向配置した撮像素子を用いた検出部によ
り透過照明光を検出して前記被検査体の精密検査を行う
精密検査装置に用いられる照明光源装置であって、 前記照明光を発する複数の光源と、 各光源からの照明光を各々導光し被検査体に向けて照射
する照明光の波長領域全体に亙って均一の光透過特性を
もった複数の光ファイバを用いた照射ユニットと、 各光源と各光ファイバとの間に配置した複数の色フィル
タと、前記各光源の個別の出力調整を行う光源調整部と
を有し、 前記光源調整部による各光源の出力調整と、前記各色フ
ィルタのフィルタ作用により、前記波長領域において任
意の色スペクトラム、光量分布を有する照明光を被検査
体に照射可能としたことを特徴とする精密検査装置に用
いられる照明光源装置。2. An illumination light applied to an object to be inspected is transmitted,
An illumination light source device used in a precision inspection device that performs a precision inspection of the inspection object by detecting a transmitted illumination light by a detection unit using an imaging device arranged to face the inspection object, and emits the illumination light. Irradiation using a plurality of light sources and a plurality of optical fibers each having a uniform light transmission characteristic over the entire wavelength region of the illumination light for guiding the illumination light from each light source and irradiating the illumination light to the test object. A unit, comprising a plurality of color filters arranged between each light source and each optical fiber, and a light source adjustment unit for individually adjusting the output of each light source, and adjusting the output of each light source by the light source adjustment unit. An illumination light source device for use in a precision inspection device, wherein illumination light having an arbitrary color spectrum and light amount distribution in the wavelength region can be irradiated to the inspection object by a filter action of each color filter.
た複数の色フィルタは、赤色、緑色、青色の各色成分の
フィルタ作用を有するものであることを特徴とする請求
項１又は２記載の精密検査装置に用いられる照明光源装
置。3. The color filter according to claim 1, wherein the plurality of color filters disposed between each light source and each optical fiber have a function of filtering red, green, and blue color components. An illumination light source device used for the precision inspection device described in the above.
は、ライン状に又はマトリックス状に配置されることを
特徴とする請求項１乃至３のいずれかに記載の精密検査
装置に用いられる照明光源装置。4. The illumination used in the precision inspection apparatus according to claim 1, wherein the light sources, the optical fibers, and the color filters are arranged in a line or in a matrix. Light source device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002002534U JP3089721U (en) | 2002-05-02 | 2002-05-02 | Illumination light source device used for precision inspection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002002534U JP3089721U (en) | 2002-05-02 | 2002-05-02 | Illumination light source device used for precision inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3089721U true JP3089721U (en) | 2002-11-08 |
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ID=43240970
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002002534U Expired - Fee Related JP3089721U (en) | 2002-05-02 | 2002-05-02 | Illumination light source device used for precision inspection equipment |
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| Country | Link |
|---|---|
| JP (1) | JP3089721U (en) |
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2002
- 2002-05-02 JP JP2002002534U patent/JP3089721U/en not_active Expired - Fee Related
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