JP3068405U - Dissolved ozone decomposer - Google Patents

Abstract

(57) [Summary] The present invention provides a dissolved ozone decomposer for decomposing dissolved ozone in an acidic solution such as a hydrofluoric acid aqueous solution which erodes quartz. An ultraviolet lamp (2) is used, and a flow pipe (1) through which ozone water flows is provided in close proximity to the ultraviolet lamp (2). Are provided in a case (4), and the channel tube is made of a sapphire material that can withstand an acidic solution such as hydrofluoric acid and has a high ultraviolet transmittance. A dissolved ozonolysis device compatible with an acidic solution can be provided.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a dissolved ozone decomposer used for decomposing high-concentration ozone water used in a semiconductor manufacturing process or a liquid crystal substrate manufacturing process when a waste liquid is discharged.

[0002]

[Prior art]

 There was a water sterilizer using an ultraviolet lamp. Light having a wavelength of about 253.7 nm emitted from an ultraviolet lamp is called a germicidal line and can be used for ozonolysis. A quartz tube having a high ultraviolet transmittance is used as a protective tube for preventing the ultraviolet lamp from coming into contact with liquid. Some were used.

[0003]

[Problems to be solved by the invention]

 The ones described in the prior art have the following disadvantages. (A) Ozone water used in the semiconductor and liquid crystal manufacturing processes has a high concentration of 10 ppm or more, and the concentration is becoming increasingly higher. Therefore, it is necessary to decompose and waste liquid. However, it often mixes with other chemicals at the time of waste liquid, and when mixed with hydrofluoric acid aqueous solution that erodes quartz, the conventional quartz tube type could not cope. In order to solve the above-mentioned drawbacks, the present invention aims to provide an ozone water decomposer which can withstand a liquid which erodes quartz and can decompose ozone efficiently.

[0004]

[Means for Solving the Problems]

 To achieve the above object, the dissolved ozone decomposing apparatus according to the present invention uses an ultraviolet lamp for ozone decomposition and provides a flow pipe through which ozone water passes beside the lamp so that the lamp does not come into contact with ozone water. . 253. Make the ultraviolet lamp and the channel tube as close as possible. More ozone water in the flow path tube is irradiated with light having a wavelength of around 7 nm. The lamp and the flow pipe are housed in a case, and are surrounded by a reflective sheet or the like so that ultraviolet light can be used efficiently. Use sapphire that can withstand acidic solutions for the flow pipe. Select an ultraviolet lamp with the appropriate number and ultraviolet intensity for the amount and concentration of ozone water. Sapphire is a material that has a high ultraviolet transmittance and is durable in acidic solutions. By selecting this as the material for the flow pipe (1), a device for decomposing ozone in acidic solutions such as hydrofluoric acid can be provided. it can.

[0005]

[Embodiment of the invention]

 Embodiments will be described with reference to the drawings. (1) is a channel pipe through which ozone water passes. An ultraviolet lamp (2) is provided outside the flow tube. The joint (3) is a joint for connecting the flow pipe (1) and an external pipe. The channel tube (1) and the ultraviolet lamp (2) are housed in a case (4). (5) is a stabilized power supply for an ultraviolet lamp. The arrows in the figure indicate the flow direction of the ozone water.

In the above configuration, the ozone water flows into the flow pipe (1) in the direction of the arrow, and a wave of about 253.7 nm emitted from the outside from the ultraviolet lamp (2) in the flow pipe (1). Absorbs long light to dissolve dissolved ozone.

[0007] The dissolved ozone decomposing apparatus according to the present invention is not limited to the above embodiment. For example, as shown in FIG. 2, an ultraviolet lamp (2) may be installed inside the flow pipe (1), and a structure in which ozone water passes between the flow pipe (1) and the case (4) is also possible. In this case, the case (4) may be made of a material having high chemical resistance, and the transmittance of ultraviolet rays may be irrelevant.

[0008]

[Effect of the invention]

 As described above, the dissolved ozone decomposer of the present invention uses sapphire in the flow pipe to decompose ozone dissolved in an acidic solution that could not withstand quartz using ultraviolet light. It becomes possible.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of a dissolved ozone decomposing apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view showing another embodiment of the dissolved ozone decomposing apparatus according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Flow pipe 2 UV lamp 3 Joint 4 Case 5 Stabilized power supply

Claims (1)

[Utility model registration claims] An apparatus for dissolving dissolved ozone utilizing ultraviolet light, which is used for decomposing dissolved ozone in ozone water, wherein a material of a channel pipe (1) through which ozone water passes is sapphire (Al ₂ O _3). ).