JP3059821B2 - Piezoelectric element - Google Patents
Piezoelectric elementInfo
- Publication number
- JP3059821B2 JP3059821B2 JP4121477A JP12147792A JP3059821B2 JP 3059821 B2 JP3059821 B2 JP 3059821B2 JP 4121477 A JP4121477 A JP 4121477A JP 12147792 A JP12147792 A JP 12147792A JP 3059821 B2 JP3059821 B2 JP 3059821B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode layer
- piezoelectric element
- laminated
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 14
- 229910052709 silver Inorganic materials 0.000 description 14
- 239000004332 silver Substances 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 10
- 230000003746 surface roughness Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000010946 fine silver Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、積層型圧電アクチュエ
ータに好適に用いることのできる圧電素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric element which can be suitably used for a laminated piezoelectric actuator.
【０００２】[0002]
【従来の技術】近年、各種の機械的駆動素子として、電
磁力を利用したアクチュエータに代わって、チタン酸ジ
ルコン酸鉛（ＰＺＴ）磁器などのセラミックスの圧電効
果を利用した積層型圧電アクチュエータが多用されてい
る。積層型圧電アクチュエ−タに用いる圧電素子は、通
常以下のように製造される。例えばＰｂ、Ｚｒ、Ｔｉの
それぞれの酸化物を主成分とした原料粉末を、プレス成
形などにより円板状等に成形し、その後１２００〜１３
００℃で焼結してＰＺＴ系圧電板とする。そして、両面
研磨などの機械加工により平滑にした圧電板の表裏面
に、例えば銀粒子、有機バインダー、溶剤などからなる
ペースト状の銀インクをスクリーン印刷法などにより塗
布し、さらに乾燥、焼成を行って厚さ２〜１０μｍの電
極層をそれぞれ形成する。この後、５０〜１００℃、１
〜３ｋＶ／ｍｍの直流電圧を５〜３０分印加して分極処
理を行い、圧電素子とされる。2. Description of the Related Art In recent years, instead of actuators utilizing electromagnetic force, multilayer piezoelectric actuators utilizing the piezoelectric effect of ceramics such as lead zirconate titanate (PZT) have been widely used as various mechanical drive elements. ing. A piezoelectric element used for a laminated piezoelectric actuator is usually manufactured as follows. For example, a raw material powder mainly composed of each oxide of Pb, Zr, and Ti is formed into a disk shape or the like by press molding or the like, and then formed into a shape of 1200-13.
Sintered at 00 ° C to obtain a PZT-based piezoelectric plate. Then, on the front and back surfaces of the piezoelectric plate smoothed by mechanical processing such as double-side polishing, for example, paste silver ink composed of silver particles, an organic binder, a solvent, and the like is applied by a screen printing method or the like, and further dried and fired. To form electrode layers each having a thickness of 2 to 10 μm. After this, 50-100 ° C, 1
A DC voltage of ３3 kV / mm is applied for 5 to 30 minutes to perform a polarization process, thereby obtaining a piezoelectric element.
【０００３】この圧電素子における圧電効果による機械
的変位は本質的に極めて小さい。このため、電気的に並
列になるように、かつ電圧の印加により厚さ方向の伸び
方向が一致するように、数１０枚から１００枚程度の圧
電素子と電極板とを交互に積層し、その変位量が増大さ
れた積層型圧電アクチュエータとして供される。このよ
うな積層型圧電アクチュエータは発熱が少なく、また小
型で高速駆動が可能であり、しかも高精度な電圧−変位
特性を発揮する。例えば、積層型圧電アクチュエータに
１０００〜１５００Ｖ／ｍｍの電圧を印加すると、圧電
素子１枚当たり約１μｍ変位し、圧電素子を５０枚積層
したアクチュエータでは約５０μｍ変位する。またその
発生力は、数１００ｋｇ／ｃｍ2 と非常に大きく、さら
には数１０〜数１００μｓｅｃオーダーの高速応答性が
得られる。このため、積層型圧電アクチュエータは、油
圧切替え弁、高速プリンターなど各種の機械的駆動素子
への応用が期待されている。The mechanical displacement due to the piezoelectric effect in this piezoelectric element is essentially extremely small. For this reason, several tens to about 100 piezoelectric elements and electrode plates are alternately stacked such that the direction of extension in the thickness direction coincides with the electrical direction in parallel with the application of a voltage. It is provided as a laminated piezoelectric actuator with an increased displacement. Such a laminated piezoelectric actuator generates little heat, is small in size, can be driven at high speed, and exhibits highly accurate voltage-displacement characteristics. For example, when a voltage of 1000 to 1500 V / mm is applied to the laminated piezoelectric actuator, the displacement is about 1 μm per piezoelectric element, and about 50 μm for an actuator in which 50 piezoelectric elements are laminated. Further, the generated force is as large as several hundred kg / cm 2, and a high-speed response on the order of several tens to several hundred μsec is obtained. For this reason, the multilayer piezoelectric actuator is expected to be applied to various mechanical drive elements such as a hydraulic switching valve and a high-speed printer.
【０００４】[0004]
【発明が解決しようとする課題】上記積層型圧電アクチ
ュエ−タはその高発生力のために、高荷重下で、高変位
駆動を要求される場合が多い。このため、圧電板にクラ
ックが発生して破壊されることが多く、耐久性に大きな
問題点が有る。上記圧電素子のクラック発生は、本発明
者等の鋭意検討により、圧電板に形成された電極層表面
の平滑性に一因があることがわかった。すなわち、上記
のように銀ペーストを塗布した後に焼き付けて形成した
銀電極層の表面粗さは通常Ｒｚ２μｍより大きく、この
電極層の表面凹凸は積層した上下の圧電板に不均一な荷
重をかけることとなるので、応力集中により圧電板にク
ラックが発生すると考えられる。The above-mentioned laminated piezoelectric actuator often requires high displacement driving under high load due to its high generating force. For this reason, cracks often occur in the piezoelectric plate and the piezoelectric plate is broken, which has a serious problem in durability. The inventors of the present invention have conducted intensive studies and found that the crack generation in the piezoelectric element is partly due to the smoothness of the surface of the electrode layer formed on the piezoelectric plate. That is, the surface roughness of the silver electrode layer formed by applying the silver paste and baking as described above is usually larger than Rz2 μm, and the unevenness of the surface of this electrode layer is to apply an uneven load to the laminated upper and lower piezoelectric plates. Therefore, it is considered that cracks occur in the piezoelectric plate due to stress concentration.
【０００５】なお、上記銀電極層表面の平滑性が低下す
るのは、ペースト中に存在する数１０μｍ程度の粗大銀
粒子が電極層表面に突起を形成するからである。また２
〜３μｍの細かい銀粒子のみを銀ペーストに用いても、
ペースト製造時あるいはスクリーン印刷時に凝集が発生
して粗大銀粒子を形成する。このため、上記突起の原因
になる粗大粒子を完全に除去することは極めて困難であ
る。さらに、銀ペースト印刷時に発生するパターン端部
の肩状の突起によっても、電極層表面の平滑性が低下し
ている。この印刷時に発生する突起は、銀ペーストの粘
度を低下させることによりある程度無くすことができる
が、この肩状の突起をなくしてもクラック発生の大幅な
改善にはならない。[0005] The reason why the surface smoothness of the silver electrode layer is reduced is that coarse silver particles having a size of about several tens of micrometers existing in the paste form projections on the surface of the electrode layer. Also 2
Even if only fine silver particles of ~ 3 μm are used for the silver paste,
Aggregation occurs during paste production or screen printing to form coarse silver particles. For this reason, it is extremely difficult to completely remove the coarse particles that cause the protrusion. Furthermore, the smoothness of the surface of the electrode layer is also reduced by shoulder-shaped protrusions at the pattern edges generated during silver paste printing. The projections generated during printing can be eliminated to some extent by lowering the viscosity of the silver paste, but the elimination of the shoulder-shaped projections does not significantly improve the occurrence of cracks.
【０００６】本発明は上記実情に鑑みてなされたもので
あり、圧電板の表面に形成された電極層表面の平滑性を
向上して、クラック発生が大幅に低減された圧電素子を
提供することを目的とする。The present invention has been made in view of the above circumstances, and provides a piezoelectric element in which cracks are greatly reduced by improving the smoothness of the surface of an electrode layer formed on the surface of a piezoelectric plate. With the goal.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決する本発
明の圧電素子は、圧電板と、該圧電板の表面に形成され
た電極層とよりなる圧電素子において、前記電極層の表
面が研磨により平滑にされていることを特徴とする。According to the present invention, there is provided a piezoelectric element comprising a piezoelectric plate and an electrode layer formed on the surface of the piezoelectric plate, wherein the surface of the electrode layer is polished. Is characterized by being smoothed.
【０００８】[0008]
【作用】本発明の圧電素子は、その表面に形成された電
極層の表面が研磨により平滑にされている。このため本
発明の圧電素子を用いた積層型圧電アクチュエータを高
荷重下、高電界下で駆動させても、電極層の表面凹凸に
より積層した上下の圧電板に不均一な荷重がかかること
がなく、応力集中による圧電板のクラック発生を効果的
に防止することができる。In the piezoelectric element of the present invention, the surface of the electrode layer formed on the surface is smoothed by polishing. Therefore, even when the laminated piezoelectric actuator using the piezoelectric element of the present invention is driven under a high load and a high electric field, an uneven load is not applied to the upper and lower piezoelectric plates laminated due to the surface unevenness of the electrode layer. In addition, cracks in the piezoelectric plate due to stress concentration can be effectively prevented.
【０００９】また、従来の圧電素子のように電極層表面
に突起があると、荷重をかけることによって、初期段階
にこの突起が潰れるため、剛性が低くなり、変位量も小
さくなる。しかし、本発明の圧電素子は電極層の表面が
平滑にされているので、これを積層して積層型圧電アク
チュエータとした時、電極層の接触面剛性が高くなり、
そのため積層型圧電アクチュエ−タとしての剛性も向上
して高荷重下での変位が向上する。以上の効果はＲｚ２
μｍ以下の場合に特に顕著である。Further, if there is a projection on the surface of the electrode layer as in a conventional piezoelectric element, the projection is crushed in an initial stage by applying a load, so that the rigidity is reduced and the displacement is reduced. However, since the surface of the electrode layer of the piezoelectric element of the present invention is smoothed, when laminated to form a laminated piezoelectric actuator, the contact surface rigidity of the electrode layer increases,
Therefore, the rigidity of the stacked piezoelectric actuator is improved, and the displacement under a high load is improved. The above effect is due to Rz2
This is particularly remarkable in the case of μm or less.
【００１０】[0010]
【実施例】以下、実施例により本発明を具体的に説明す
る。 （実施例１）ＰＺＴ（ＰｂＺｒＯ3 ・ＰｂＴｉＯ3 ）系
セラミックスよりなり、直径１７ｍｍ、厚さ０．５ｍｍ
の圧電板１を準備した。なお、この圧電板１の圧電定数
（ｄ 33）は６１０ｐＣ／Ｎであった。The present invention will be described below in detail with reference to examples.
You. (Example 1) PZT (PbZrOThree・ PbTiOThree)system
Made of ceramics, diameter 17mm, thickness 0.5mm
Was prepared. The piezoelectric constant of the piezoelectric plate 1
(D 33) Was 610 pC / N.
【００１１】上記圧電板１の表裏面の中央部分に銀ペー
スト（昭栄化学製、Ｈ４５６３、粘度５００ｃｐｓ、２
５℃）をスクリーン印刷により塗布し、乾燥後６００℃
で焼き付け、直径１５ｍｍ、厚さ５μｍの電極層２、２
をそれぞれ形成した。そして、各電極層２の表面を、セ
リウム系の遊離砥粒（平均粒径１．６μｍ）を用いて、
両面ラップ盤により研磨した。研磨後の電極層２の表面
形状を表面粗さ計（東京精密サーフコム４７０Ａ）によ
って測定した線図を図５に示す。なお、研磨後の電極層
２の表面粗さはＲｚ０．４１μｍであった。A silver paste (manufactured by Shoei Chemical Co., H4563, viscosity 500 cps, 2
5 ° C) by screen printing, and after drying 600 ° C
Electrode layers 2, 2 having a diameter of 15 mm and a thickness of 5 μm.
Was formed respectively. Then, the surface of each electrode layer 2 is formed using cerium-based free abrasive grains (average particle size 1.6 μm).
Polished with a double-sided lapping machine. FIG. 5 shows a diagram in which the surface shape of the electrode layer 2 after polishing is measured by a surface roughness meter (Tokyo Seimitsu Surfcom 470A). The surface roughness of the polished electrode layer 2 was Rz 0.41 μm.
【００１２】この後、１００℃で、３ｋＶ／ｍｍの直流
電圧を３０分印加して分極処理を行い、さらに荷重５０
ｋｇを加えながら電圧−１００〜＋３００Ｖ、１００Ｈ
ｚパルス波（デューティ比１）の条件で６０分間処理す
ることによりエージングを行い、圧電素子３とした。ま
た、厚さ３０μｍのステンレス箔から電極板４を形成し
た。この電極板４は、図３に示すように、直径１５ｍｍ
の円形状で、外部に電極を取り出すための幅１．５ｍ
ｍ、長さ３ｍｍの突片４ａ、４ａがそれぞれ１８０度離
れて形成されている。Thereafter, a polarization process is performed at 100 ° C. by applying a DC voltage of 3 kV / mm for 30 minutes, and a load of 50
-100 to + 300V, 100H while adding kg
Aging was performed by processing for 60 minutes under the condition of a z pulse wave (duty ratio 1) to obtain a piezoelectric element 3. The electrode plate 4 was formed from a stainless steel foil having a thickness of 30 μm. This electrode plate 4 has a diameter of 15 mm as shown in FIG.
1.5m width for taking out the electrode outside
The protrusions 4a, 4a having a length of m and a length of 3 mm are formed 180 degrees apart from each other.
【００１３】そして、電極板４を９０度ずつずらしなが
ら、５０枚の圧電素子３と５１枚の電極板４とを交互に
積層し、各電極板４の各突片４ａを一層おきに金属製リ
ボン６に接続するとともに、この金属リボンにリード線
７、８を接続して、図４に示す積層型圧電アクチュエー
タ５とした。この積層型圧電アクチュエータ５に荷重３
００ｋｇを加えながら、耐久テストとして、電圧−２０
０〜＋６００Ｖ、１００Ｈｚのパルス波（デューティ比
１）を２７．７時間（駆動回数として、１×１０7 回）
印加した。このとき周囲に３５℃のシリコンオイルを循
環させ冷却した。表１に圧電板１のクラックの発生量を
示す。またこの時の変位量を表２に示す。Then, while the electrode plates 4 are shifted by 90 degrees, 50 piezoelectric elements 3 and 51 electrode plates 4 are alternately laminated, and each protruding piece 4a of each electrode plate 4 is made of metal. Connected to the ribbon 6 and lead wires 7 and 8 were connected to the metal ribbon to obtain a laminated piezoelectric actuator 5 shown in FIG. A load 3 is applied to the laminated piezoelectric actuator 5.
While adding 00 kg, as a durability test,
A pulse wave of 0 to +600 V, 100 Hz (duty ratio 1) is applied for 27.7 hours (1 × 10 7 times as the number of times of driving)
Applied. At this time, a silicone oil at 35 ° C. was circulated around the periphery to cool it. Table 1 shows the amount of cracks generated in the piezoelectric plate 1. Table 2 shows the displacement at this time.
【００１４】（比較例１）電極層２の表面を研磨しない
こと以外は、上記実施例１と同様にして積層型圧電アク
チュエータを製造し、実施例１と同様の耐久テストを行
った。この結果を表１及び表２に併せて示す。また、研
磨していない電極層の表面形状を示す線図を図６に示
す。この研磨していない電極層の表面粗さはＲｚ２．３
０μｍだった。なお、圧電素子の分極処理後に行うエー
ジング処理の処理時間は１８０分とした。Comparative Example 1 A laminated piezoelectric actuator was manufactured in the same manner as in Example 1 except that the surface of the electrode layer 2 was not polished, and the same durability test as in Example 1 was performed. The results are shown in Tables 1 and 2. FIG. 6 is a diagram showing the surface shape of the unpolished electrode layer. The surface roughness of the unpolished electrode layer is Rz 2.3.
It was 0 μm. The processing time of the aging treatment performed after the polarization treatment of the piezoelectric element was set to 180 minutes.
【００１５】（比較例２）銀ペースト印刷時に発生する
パターン端部の肩状の突起を無くすために、粘度が１０
０ｃｐｓ（２５℃）と低い銀ペーストを用いること以外
は、上記実施例１と同様にして積層型圧電アクチュエー
タを製造し、実施例１と同様の耐久テストを行った。こ
の結果を表１及び表２に併せて示す。また、粘度の低い
銀ペーストを用いて形成した電極層の表面形状を示す線
図を図７に示す。この電極層の表面粗さはＲｚ２．３０
μｍだった。なお、圧電素子の分極処理後に行うエージ
ング処理の処理時間は１８０分とした。(Comparative Example 2) In order to eliminate shoulder-like projections at the end of a pattern generated during silver paste printing, a viscosity of 10 was used.
A laminated piezoelectric actuator was manufactured in the same manner as in Example 1 except that a silver paste as low as 0 cps (25 ° C.) was used, and the same durability test as in Example 1 was performed. The results are shown in Tables 1 and 2. FIG. 7 is a diagram showing the surface shape of an electrode layer formed using a low-viscosity silver paste. The surface roughness of this electrode layer is Rz 2.30.
μm. The processing time of the aging treatment performed after the polarization treatment of the piezoelectric element was set to 180 minutes.
【００１６】[0016]
【表１】 [Table 1]
【００１７】[0017]
【表２】 上記表１からも明らかなように、本実施例に係る積層型
圧電アクチュエータは、圧電板１のクラック発生量が大
幅に減少し、耐久性が極めて向上した。[Table 2] As is clear from Table 1 above, in the multilayer piezoelectric actuator according to the present example, the amount of cracks generated in the piezoelectric plate 1 was significantly reduced, and the durability was extremely improved.
【００１８】また上記表２からも明らかなように、本実
施例に係る積層型圧電アクチュエータの変位量も比較例
のものと比べて向上した。さらに、本実施例に係る圧電
素子は、電極層２の表面が研磨されており、接触電気抵
抗にバラツキがなくなるのでアクチュエータのバラツキ
が少なくなり制御上好都合である。また、電極の突起が
ないためすぐになじむためエージング時間を１／３に短
縮できる。Further, as is apparent from Table 2, the displacement of the multilayer piezoelectric actuator according to the present embodiment is also improved as compared with that of the comparative example. Further, in the piezoelectric element according to the present embodiment, the surface of the electrode layer 2 is polished, and the variation in the contact electric resistance is eliminated. Therefore, the variation in the actuator is reduced, which is convenient for control. In addition, since there is no projection of the electrodes, the aging time can be shortened to 1/3 since the electrodes are easily adjusted.
【００１９】なお、電極層の表面を研磨する方法は、上
記実施例の遊離砥粒によるものに限られず、その他固定
砥粒による研磨など一般的な機械的研磨法を採用するこ
とが可能である。また、本発明で使用される圧電板は薄
板状で有れば良く、円形、楕円形、正方形、長方形、そ
の他の多角形等、用途に応じて様々な形状を採用し得
る。また圧電板の表面に形成する電極層は、圧電板の側
面部以外の表面全面に形成しても同様の効果を得ること
ができる。The method of polishing the surface of the electrode layer is not limited to the method using the free abrasive grains of the above embodiment, and other general mechanical polishing methods such as polishing using fixed abrasive grains can be employed. . Further, the piezoelectric plate used in the present invention only needs to have a thin plate shape, and various shapes such as a circle, an ellipse, a square, a rectangle, and other polygons can be adopted according to the application. The same effect can be obtained even if the electrode layer formed on the surface of the piezoelectric plate is formed on the entire surface other than the side surface of the piezoelectric plate.
【００２０】[0020]
【発明の効果】以上詳述したように本発明の圧電素子を
用いた積層型圧電アクチュエータを高荷重下、高電界下
で駆動させても、圧電板のクラック発生が効果的に防止
され、耐久性が向上する。また、積層型圧電アクチュエ
ータとしての剛性も向上して高荷重下での変位が向上す
る。As described in detail above, even when the laminated piezoelectric actuator using the piezoelectric element of the present invention is driven under a high load and a high electric field, cracks in the piezoelectric plate are effectively prevented, and the durability is improved. The performance is improved. In addition, the rigidity of the laminated piezoelectric actuator is improved, and the displacement under a high load is improved.
【図１】本実施例に係る圧電素子の平面図である。FIG. 1 is a plan view of a piezoelectric element according to the present embodiment.
【図２】本実施例に係る圧電素子の側面図である。FIG. 2 is a side view of the piezoelectric element according to the embodiment.
【図３】本実施例に係る電極板の平面図である。FIG. 3 is a plan view of the electrode plate according to the embodiment.
【図４】本実施例に係る積層型圧電アクチュエータの側
面図である。FIG. 4 is a side view of the multilayer piezoelectric actuator according to the embodiment.
【図５】本実施例に係る圧電素子の電極表面の形状を表
面粗さ計を用いて測定した線図を示す。FIG. 5 is a diagram illustrating a shape of an electrode surface of the piezoelectric element according to the present example measured using a surface roughness meter.
【図６】比較例１に係る圧電素子の電極表面の形状を表
面粗さ計を用いて測定した線図を示す。FIG. 6 is a diagram illustrating a shape of an electrode surface of a piezoelectric element according to Comparative Example 1 measured using a surface roughness meter.
【図７】比較例２に係る圧電素子の電極表面の形状を表
面粗さ計を用いて測定した線図を示す。FIG. 7 is a diagram illustrating a shape of an electrode surface of a piezoelectric element according to Comparative Example 2 measured using a surface roughness meter.
１は圧電板、２は電極層、３は圧電素子である。 1 is a piezoelectric plate, 2 is an electrode layer, and 3 is a piezoelectric element.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 早坂 民雄 愛知県豊田市トヨタ町１番地 トヨタ自 動車株式会社内 (72)発明者 千田 幸雄 神奈川県横浜市緑区鴨志田町1000番地 三菱化成株式会社総合研究所内 (72)発明者 相原 仁志 神奈川県小田原市成田1060番地 化成オ プトニクス株式会社内 (72)発明者 佐藤 順次 神奈川県小田原市成田1060番地 化成オ プトニクス株式会社内 (72)発明者 朝倉 栄男 神奈川県小田原市成田1060番地 化成オ プトニクス株式会社内 (72)発明者 市原 高史 神奈川県小田原市成田1060番地 化成オ プトニクス株式会社内 (56)参考文献 特開 昭62−291187（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 41/083 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tamio Hayasaka 1 Toyota Town, Toyota City, Aichi Prefecture Inside Toyota Motor Corporation (72) Inventor Yukio Senda 1000 Kamoshidacho Midori-ku, Yokohama-shi, Kanagawa Prefecture Mitsubishi Chemical Corporation Inside the research institute (72) Inventor Hitoshi Aihara 1060 Narita, Odawara City, Kanagawa Prefecture Inside Kasei Optonics Co., Ltd. No. 1060 Narita, Odawara-shi, Japan Kasei Optonics Co., Ltd. (72) Inventor Takashi Ichihara 1060 Narita, Odawara-shi, Kanagawa Pref. Kasei Optonics Co., Ltd. (56) ) Surveyed field (Int.Cl. 7 , DB name) H01L 41/083
Claims (1)
極層とよりなる圧電素子において、 前記電極層の表面が研磨により平滑にされていることを
特徴とする圧電素子。1. A piezoelectric element comprising a piezoelectric plate and an electrode layer formed on the surface of the piezoelectric plate, wherein the surface of the electrode layer is smoothed by polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4121477A JP3059821B2 (en) | 1992-05-14 | 1992-05-14 | Piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4121477A JP3059821B2 (en) | 1992-05-14 | 1992-05-14 | Piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05315664A JPH05315664A (en) | 1993-11-26 |
| JP3059821B2 true JP3059821B2 (en) | 2000-07-04 |
Family
ID=14812127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4121477A Expired - Lifetime JP3059821B2 (en) | 1992-05-14 | 1992-05-14 | Piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3059821B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008277855A (en) * | 2001-11-22 | 2008-11-13 | Denso Corp | Laminated piezoelectric element, manufacturing method therefor, and injector |
-
1992
- 1992-05-14 JP JP4121477A patent/JP3059821B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05315664A (en) | 1993-11-26 |
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