JP3051603B2 - Titanium compound sintered body - Google Patents

Titanium compound sintered body

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Publication number
JP3051603B2
JP3051603B2 JP5161279A JP16127993A JP3051603B2 JP 3051603 B2 JP3051603 B2 JP 3051603B2 JP 5161279 A JP5161279 A JP 5161279A JP 16127993 A JP16127993 A JP 16127993A JP 3051603 B2 JP3051603 B2 JP 3051603B2
Authority
JP
Japan
Prior art keywords
titanium compound
volume
sintered body
whisker
toughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5161279A
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Japanese (ja)
Other versions
JPH0782048A (en
Inventor
桂 林
達行 中岡
勝伺 坂上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
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Priority to JP5161279A priority Critical patent/JP3051603B2/en
Publication of JPH0782048A publication Critical patent/JPH0782048A/en
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Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、ウイスカー等の繊維状
物質を含有する繊維強化セラミックスに関し、詳細には
高靱性を有し、特に切削工具やその他耐摩耗性部品、装
飾材料に適したチタン化合物焼結体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fiber-reinforced ceramic containing a fibrous substance such as a whisker, and more particularly, to a titanium having high toughness and particularly suitable for cutting tools and other wear-resistant parts and decorative materials. The present invention relates to a compound sintered body.

【0002】[0002]

【従来技術】従来、炭化チタン(TiC)質焼結体は、
サーメット材料の主原料として各種の切削工具や産業機
械用部品に応用されている反面、靱性に劣るという欠点
を有するために利用分野の拡大が阻害されている。そこ
で従来はこれらにニッケル、コバルト等の金属を添加し
て靱性を改善することが行われている。
2. Description of the Related Art Conventionally, titanium carbide (TiC)
Although applied to various cutting tools and industrial machine parts as a main raw material of cermet materials, it has a drawback of poor toughness, which hinders the expansion of application fields. Therefore, conventionally, metals such as nickel and cobalt have been added to improve toughness.

【0003】[0003]

【発明が解決しようとする問題点】しかしながら、ニッ
ケル,コバルト等の金属は硬度が低いので、それらを含
まない材料に比較して摩耗量が多くなる傾向にある。ま
た、装飾品の分野では添加された金属により、皮膚にア
レルギーを生じる原因になる場合がある。
However, since metals such as nickel and cobalt have low hardness, they tend to increase the amount of wear as compared with materials containing no such metals. In addition, in the field of decorative articles, the added metal may cause allergy to the skin.

【0004】さらに、最近に至り、針状の結晶粒子(ウ
イスカー)によって靱性を向上することが試みられてい
る。その代表的なものはSiCウイスカーであり多くの
研究が行われている。チタン化合物ウイスカーによる強
靱化も提案されているが、セラミックスの抗折強度,靱
性,硬度等の特性の点から未だ十分に検討されておら
ず、実用的なレベルに達していないのが現状であった。
Furthermore, recently, attempts have been made to improve toughness by using acicular crystal grains (whiskers). A representative one is a SiC whisker, and much research has been conducted. Titanium compound whiskers have also been proposed for toughening, but have not yet been sufficiently studied in terms of the properties such as flexural strength, toughness, and hardness of ceramics, and at present have not reached a practical level. Was.

【0005】[0005]

【問題点を解決するための手段】本発明者等は、上記チ
タン化合物ウイスカー系セラミックスに対して、詳細に
検討を重ねた結果、この材料と周期律表第4a,5a,
6a族元素の炭化物,窒化物,炭窒化物および酸化物の
少なくとも一種を複合化させることにより、破壊靱性を
はじめとする機械的特性を向上できることを知見し本発
明に至った。
Means for Solving the Problems The present inventors have conducted detailed studies on the above-mentioned whisker-based titanium compound ceramics, and as a result, have found that this material and the periodic table Nos. 4a, 5a,
The present inventors have found that by compounding at least one of carbides, nitrides, carbonitrides, and oxides of Group 6a elements, it is possible to improve mechanical properties such as fracture toughness.

【0006】即ち、本発明のチタン化合物焼結体は、チ
タンの炭化物,窒化物,硼化物及び炭窒化物のうちの少
なくとも1種のチタン化合物ウイスカーと、ウイスカー
以外のチタン化合物とを合計で45〜97体積%含有
し、前記チタン化合物ウイスカーを全量中5〜70体積
%の割合で含有し、さらに、炭化モリブデン、炭化ジル
コニウムのうち少なくとも1種を3〜15体積%の割合
で含有することを特徴とする。
That is, the titanium compound sintered body of the present invention comprises a total of 45% of a titanium compound whisker of at least one of titanium carbide, nitride, boride and carbonitride, and a titanium compound other than the whisker. To 97% by volume, the titanium compound whisker being contained in a proportion of 5 to 70% by volume in the total amount, and further containing at least one of molybdenum carbide and zirconium carbide in a proportion of 3 to 15% by volume. Features.

【0007】本発明で用いられるチタン化合物ウイスカ
ーは、それ自体、単結晶あるいは多結晶質からなるもの
で、その平均直径は3μm以下、特に0.5乃至1μm
であることが好ましい。平均径が3μm以下では、高い
抗折強度を維持できるからであり、平均径が大きく成り
過ぎると均一に分散することも難しくなり、強度,靱性
ともバラツキが生じやすく、また切削工具として用いた
際に逃げ面の境界摩耗が大きくなるためである。尚、切
削工具として使用する場合には、チタン化合物焼結体の
表面に、厚さ0.1〜15μmの単層または2層以上の
周期律表第4a族元素およびAlの炭化物,窒化物,炭
窒化物,酸化物の少なくとも一種からなる表面被覆層を
形成しても良い。
The titanium compound whiskers used in the present invention are themselves made of single crystal or polycrystalline, and have an average diameter of 3 μm or less, especially 0.5 to 1 μm.
It is preferred that When the average diameter is 3 μm or less, high bending strength can be maintained. When the average diameter is too large, it is difficult to uniformly disperse, and the strength and toughness tend to vary, and when used as a cutting tool. This is because the boundary wear of the flank increases. When used as a cutting tool, a single layer or two or more layers of Group 4a elements of the periodic table and Al carbides, nitrides, A surface coating layer made of at least one of carbonitride and oxide may be formed.

【0008】一方、ウイスカーの長径/短径で表される
アスペクト比が小さすぎると繊維強化の効果が小さく高
い靱性が得られにくく、逆に大きすぎると原料としての
取扱が難しく、均一に分散することができないために高
い靱性を得ることが難しくなる。よって、アスペクト比
の平均は3乃至100、特に10乃至30のものが好適
に使用される。
On the other hand, if the aspect ratio expressed by the major axis / minor axis of the whiskers is too small, the effect of fiber reinforcement is small, and high toughness cannot be obtained. Conversely, if the aspect ratio is too large, it is difficult to handle as a raw material and uniformly dispersed. It is difficult to obtain high toughness due to the inability to do so. Therefore, those having an average aspect ratio of 3 to 100, especially 10 to 30 are preferably used.

【0009】このようなチタン化合物ウイスカーは、例
えばCVD法により合成することができるが、どの様な
製法によって作られたものであっても使用できる。
Such a titanium compound whisker can be synthesized, for example, by a CVD method, but any whisker produced by any method can be used.

【0010】このチタン化合物ウイスカーは、全量中5
〜70体積%、特に10〜50体積%、さらに好ましく
は、20〜45体積%分散含有させる。ウイスカーの量
を上記の範囲に設定したのは、ウイスカー量が5体積%
未満では、ウイスカー添加による靱性向上効果が小さ
く、70体積%を越えると系全体の焼結性が低下するか
らである。尚、焼結を容易にし、焼結に要するコストを
削減するためには、TiCウイスカーの添加量は5乃至
45体積%が好ましく、最適には10乃至30体積%が
良い。チタン化合物ウイスカーは、靱性向上のために
は、48〜70体積%含有させることが望ましい。
This titanium compound whisker has a total content of 5%.
7070% by volume, particularly 10 to 50% by volume, more preferably 20 to 45% by volume. The whisker amount was set to the above range because the whisker amount was 5% by volume.
If it is less than 70%, the effect of improving the toughness by adding whiskers is small, and if it exceeds 70% by volume, the sinterability of the entire system is reduced. In order to facilitate sintering and reduce the cost required for sintering, the addition amount of TiC whiskers is preferably 5 to 45% by volume, and most preferably 10 to 30% by volume. It is desirable that the titanium compound whisker be contained in an amount of 48 to 70% by volume in order to improve toughness.

【0011】本発明においては、チタン化合物ウイスカ
ーは、主としてTiCウイスカーであり、ウイスカー以
外のチタン化合物としては、主としてTiNであること
が望ましい。また、チタン化合物ウイスカーであるTi
Cウイスカーを40〜70体積%、チタン化合物である
TiNを2〜15体積%、炭化モリブデン,炭化ジルコ
ニウムのうち少なくとも一種を3〜15体積%含有する
ことが望ましい。
In the present invention, the titanium compound whiskers are preferably TiC whiskers, and the titanium compound other than the whiskers is preferably mainly TiN. In addition, the titanium compound whisker Ti
It is desirable to contain 40 to 70% by volume of C whiskers, 2 to 15% by volume of TiN as a titanium compound, and 3 to 15% by volume of at least one of molybdenum carbide and zirconium carbide.

【0012】本発明によれば、Al23を45体積%以
下含有させても良い。これは、Al23はこの材料を切
削工具として用いた場合に耐摩耗性を向上させる効果が
あるからである。即ち、Al23が45体積%よりも多
いと、焼結体の靱性が低下し、切削工具として用いた場
合にチッピングが生じ易いからである。Al23添加量
は20体積%以上、特に35体積%以上含有することが
望ましい。アルミナを含有する場合には、チタン化合物
であるTiNは、その一部がAl23粒子内部に存在す
ることが望ましい。
According to the present invention, Al 2 O 3 may be contained in an amount of 45% by volume or less. This is because Al 2 O 3 has an effect of improving wear resistance when this material is used as a cutting tool. That is, if the content of Al 2 O 3 is more than 45% by volume, the toughness of the sintered body decreases, and chipping easily occurs when used as a cutting tool. The added amount of Al 2 O 3 is preferably at least 20% by volume, particularly preferably at least 35% by volume. In the case where alumina is contained, it is desirable that a part of the titanium compound, TiN, be present inside the Al 2 O 3 particles.

【0013】また、本発明によれば、Ni,Co及びそ
れらの酸化物,炭化物,窒化物のうち少なくとも一種を
5体積%以下含有させても良い。これは、Ni,Co及
びそれらの酸化物,炭化物はTiCウイスカーとAl2
3を強固に結合させる効果があるからである。また、
Ni,Coの添加は材料の焼結性を改善する。Ni,C
oおよびそれらの酸化物,炭化物,窒化物の添加量は、
特に0.5〜2体積%であることが望ましい。
According to the present invention, Ni and Co and at least one of oxides, carbides and nitrides thereof may be contained at 5% by volume or less. This is because Ni, Co and their oxides and carbides are TiC whiskers and Al 2
This is because there is an effect of firmly binding O 3 . Also,
The addition of Ni and Co improves the sinterability of the material. Ni, C
o and the amount of oxides, carbides and nitrides thereof
In particular, the content is preferably 0.5 to 2% by volume.

【0014】本発明においては、周期律表第4a,5
a,6a族元素の炭化物、窒化物、炭窒化物,酸化物の
うち少なくとも一種を3体積%以上含有するが、特に炭
化モリブデン,炭化ジルコニウムのうち少なくとも1種
を3〜15体積%含有することが硬度及び靱性の向上の
点から好ましい。3%未満では焼結体の破壊靱性および
硬度や強度が低下する傾向にある。
In the present invention, the periodic table 4a, 5
At least one of carbides, nitrides, carbonitrides and oxides of elements a and 6a should be contained in an amount of at least 3% by volume, especially at least one of molybdenum carbide and zirconium carbide should be contained in an amount of 3 to 15% by volume. Is preferred from the viewpoint of improving hardness and toughness. If it is less than 3%, the fracture toughness, hardness and strength of the sintered body tend to decrease.

【0015】またウイスカーを分散するためのマトリッ
クスがAl2 3 を主体とする場合、窒化チタンを混合
するのがよい。窒化チタンは直径1μm以下の粒子であ
って、少なくとも一部がAl2 3 粒子内部に存在する
と、特に破壊靱性及び抗折強度向上という観点から添加
効果が大きい。窒化チタンをAl2 3 粒子内部に存在
させる為には焼結時の昇温速度と窒化チタンの粒子径を
コントロールすることが重要である。例えば、1000
〜1800℃までの昇温速度は窒化チタンの平均粒径が
1μm以下の場合、6℃/分以上、平均粒径が0.5μ
m以下の場合3℃/分以上にすることが特に重要であ
る。
When the matrix for dispersing the whiskers is mainly composed of Al 2 O 3 , it is preferable to mix titanium nitride. Titanium nitride is a particle having a diameter of 1 μm or less, and when at least a part thereof is present in the Al 2 O 3 particle, the effect of adding titanium nitride is large from the viewpoint of improving fracture toughness and bending strength. In order for titanium nitride to be present inside the Al 2 O 3 particles, it is important to control the rate of temperature rise during sintering and the particle size of the titanium nitride. For example, 1000
When the average particle diameter of titanium nitride is 1 μm or less, the temperature rise rate up to 1800 ° C. is 6 ° C./min or more and the average particle diameter is 0.5 μm.
m or less, it is particularly important that the temperature be 3 ° C./min or more.

【0016】酸化アルミニウムを含有させる場合、焼結
助剤として公知の酸化物を添加してもよい。少量の酸化
物を添加することによりマトリックス成分としての焼結
性を高め、特性の向上を図ることができる。しかしこの
助剤量が多すぎると焼結体の靱性が低下する。よってこ
れらの焼結助剤は、全量中0.1乃至5重量%、特に
0.5乃至3重量%の割合で添加するのが良い。尚、こ
こで用いられる酸化物としてはYb,Nd,Er,C
e,Sm,Gd,Dy等の酸化物が挙げられる。
When aluminum oxide is contained, a known oxide may be added as a sintering aid. By adding a small amount of oxide, sinterability as a matrix component can be increased, and characteristics can be improved. However, if the amount of this auxiliary agent is too large, the toughness of the sintered body decreases. Therefore, these sintering aids are preferably added at a ratio of 0.1 to 5% by weight, particularly 0.5 to 3% by weight based on the total amount. The oxide used here is Yb, Nd, Er, C
oxides such as e, Sm, Gd and Dy.

【0017】本発明のチタン化合物焼結体を製造するに
は、まずチタンの炭化物、窒化物及び炭窒化物のチタン
化合物、同じくチタン化合物ウイスカー、周期律表第4
a,5a,6a族元素の炭化物,窒化物,炭窒化物,酸
化物、酸化アルミニウム、Ni,Co,Crの酸化物,
炭化物、必要に応じて焼結助剤を前述した割合で混合、
粉砕後に所望の成形手段、金型プレス、押し出し成形、
射出成形、冷間静水圧成形等によって成形後、焼成す
る。
In order to manufacture the titanium compound sintered body of the present invention, titanium carbide, nitride and carbonitride titanium compound, titanium compound whisker, periodic table 4
a, 5a, 6a group carbide, nitride, carbonitride, oxide, aluminum oxide, Ni, Co, Cr oxide;
Carbide, if necessary, mixing sintering aid in the ratio described above,
After pulverization, desired molding means, mold press, extrusion molding,
After molding by injection molding, cold isostatic pressing or the like, baking is performed.

【0018】焼成は、普通焼成、ホットプレス法、熱間
静水圧焼成法等が適用され、1650℃〜1850℃の
温度でArやHe等の不活性ガスもしくはカーボン等の
存在する還元性雰囲気およびそれらの加圧もしくは減圧
雰囲気中で0.5〜6時間行う。特に高密度の焼結体を
得るためには、普通焼成あるはホットプレス法によって
対理論密度比96%以上の焼結体を作成し、この焼結体
をさらに熱間静水圧焼成すればよい。
For the firing, ordinary firing, hot pressing, hot isostatic pressing, or the like is applied. At a temperature of 1650 ° C. to 1850 ° C., a reducing atmosphere containing an inert gas such as Ar or He or carbon or the like is used. The operation is performed in such a pressurized or reduced pressure atmosphere for 0.5 to 6 hours. In particular, in order to obtain a high-density sintered body, a sintered body having a theoretical density ratio of 96% or more may be prepared by ordinary firing or hot pressing, and the sintered body may be further subjected to hot isostatic firing. .

【0019】[0019]

【作用】本発明においては、チタン化合物ウイスカーの
引き抜き効果を顕著に発揮させるこにより焼結体の靱性
を向上することができる。また、チタン化合物やチタン
化合物ウイスカーを用いることにより、切削工具として
の耐摩耗性や装飾材料としての色調を改善することがで
きる。
In the present invention, the toughness of the sintered body can be improved by remarkably exhibiting the effect of extracting the whisker of the titanium compound. Also, by using a titanium compound or a titanium compound whisker, the wear resistance as a cutting tool and the color tone as a decorative material can be improved.

【0020】以下、本発明を次の例で説明する。Hereinafter, the present invention will be described with reference to the following examples.

【0021】[0021]

【実施例】先ず、出発原料として、チタン化合物粉末
と、周期律表第4a,5a,6a族元素粉末と、平均粒
径1μm以下、純度99.9%以上のAl2 3 粉末
と、その他の粉末を用意し、表1,2に示す割合で秤量
後、回転ミルにて12時間混合粉砕した。この混合粉末
に平均粒径1μm、アスペクト比が10〜30のチタン
化合物ウイスカーを所定量添加し、回転ミルで12時間
混合した。混合後のスラリーを乾燥してホットプレス用
原料とした。
EXAMPLES First, as starting materials, titanium compound powder, powders of elements of Groups 4a, 5a and 6a of the periodic table, Al 2 O 3 powder having an average particle diameter of 1 μm or less and a purity of 99.9% or more, and others were used. Was prepared, weighed at the ratios shown in Tables 1 and 2, and then mixed and pulverized for 12 hours with a rotary mill. A predetermined amount of a titanium compound whisker having an average particle diameter of 1 μm and an aspect ratio of 10 to 30 was added to the mixed powder, and the mixture was mixed by a rotary mill for 12 hours. The slurry after mixing was dried to obtain a raw material for hot pressing.

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【表2】 [Table 2]

【0024】この原料をカーボン型に充填し、1750
℃の温度,500kg/cm2 の圧力でホットプレス焼
成してJIS規格に基づく抗折試験片を作成した。
This raw material is filled in a carbon mold and 1750
Hot press firing was performed at a temperature of 500 ° C. and a pressure of 500 kg / cm 2 to prepare a bending test piece based on JIS standards.

【0025】得られた各試料を研磨して、荷重20kg
によるビッカース硬度、また鏡面にポリッシング加工し
IM法で靱性(K1C) を測定した。また、顕微鏡写真か
ら組織観察し焼結性について評価した。結果を表3,4
に示す。
Each of the obtained samples was polished to a load of 20 kg.
Hardness and the toughness (K 1C ) were measured by the IM method after polishing to a mirror surface. The structure was observed from a micrograph to evaluate the sinterability. Tables 3 and 4 show the results.
Shown in

【0026】[0026]

【表3】 [Table 3]

【0027】[0027]

【表4】 [Table 4]

【0028】表3,4によれば、ウイスカー添加量が多
い場合(試料No.1,7,18)では硬度が低く、ま
た、密度が低いため鏡面仕上げが不可能であるという理
由から靱性が測定できず、ボイドも発生した。また、ウ
イスカーを添加しない場合(試料No.23)では靱性が
極端に小さかった。周期律表第4a,5a,6a族元素
化合物を添加しなかった場合(試料No.7,11,1
9)では硬度が低いことが判る。
According to Tables 3 and 4, when the whisker addition amount is large (samples Nos. 1, 7, 18), the toughness is low because the hardness is low and the mirror finish is impossible due to the low density. Measurement was not possible and voids were generated. When no whisker was added (Sample No. 23), the toughness was extremely low. When no elemental compound of Groups 4a, 5a and 6a of the periodic table was added (Sample Nos. 7, 11, 1)
9) shows that the hardness is low.

【0029】これに対して、本発明に基づき作成した試
料は、いずれも優れた靱性および硬度を有することが判
る。
On the other hand, it can be seen that all the samples prepared according to the present invention have excellent toughness and hardness.

【0030】[0030]

【発明の効果】以上詳述した通り、本発明のチタン化合
物焼結体は、チタン化合物と、チタン化合物ウイスカー
と、炭化モリブデン、炭化ジルコニウムのうち少なくと
も1種を含有するので、チタン化合物ウイスカーのいわ
ゆる引き抜き効果を顕著に発揮させることができ、焼結
体の靱性および硬度を向上することができる。また、チ
タン化合物やチタン化合物ウイスカーを用いることによ
り、切削工具としての耐摩耗性や装飾材料としての色調
を改善することができる。これにより、切削工具やその
他耐摩耗性部品,装飾材料に適したチタン化合物焼結体
を得ることができる。
As described above in detail, the titanium compound sintered body of the present invention contains a titanium compound, a titanium compound whisker, and at least one of molybdenum carbide and zirconium carbide. The drawing effect can be remarkably exhibited, and the toughness and hardness of the sintered body can be improved. Also, by using a titanium compound or a titanium compound whisker, the wear resistance as a cutting tool and the color tone as a decorative material can be improved. Thereby, a titanium compound sintered body suitable for cutting tools, other wear-resistant parts, and decorative materials can be obtained.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI C04B 35/81 C04B 35/56 S T (58)調査した分野(Int.Cl.7,DB名) C04B 35/80 C04B 35/56 - 35/58 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 identification code FI C04B 35/81 C04B 35/56 ST (58) Field surveyed (Int.Cl. 7 , DB name) C04B 35/80 C04B 35 / 56-35/58

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】チタンの炭化物,窒化物,硼化物及び炭窒
化物のうちの少なくとも1種のチタン化合物ウイスカー
と、ウイスカー以外のチタン化合物とを合計で45〜9
7体積%含有し、前記チタン化合物ウイスカーを全量中
5〜70体積%の割合で含有し、さらに、炭化モリブデ
ン、炭化ジルコニウムのうち少なくとも1種を3〜15
体積%の割合で含有することを特徴とするチタン化合物
焼結体。
1. A whisker of at least one titanium compound selected from the group consisting of carbides, nitrides, borides and carbonitrides of titanium, and a titanium compound other than the whiskers of 45 to 9 in total.
7% by volume, the titanium compound whisker is contained at a ratio of 5 to 70% by volume based on the total amount, and further, at least one of molybdenum carbide and zirconium carbide is 3 to 15%.
A sintered body of a titanium compound, characterized in that the sintered body is contained in a ratio of volume%.
JP5161279A 1993-06-30 1993-06-30 Titanium compound sintered body Expired - Fee Related JP3051603B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5161279A JP3051603B2 (en) 1993-06-30 1993-06-30 Titanium compound sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5161279A JP3051603B2 (en) 1993-06-30 1993-06-30 Titanium compound sintered body

Publications (2)

Publication Number Publication Date
JPH0782048A JPH0782048A (en) 1995-03-28
JP3051603B2 true JP3051603B2 (en) 2000-06-12

Family

ID=15732093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5161279A Expired - Fee Related JP3051603B2 (en) 1993-06-30 1993-06-30 Titanium compound sintered body

Country Status (1)

Country Link
JP (1) JP3051603B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3663273A1 (en) * 2018-12-07 2020-06-10 The Swatch Group Research and Development Ltd Ceramic decorative item
EP3974405A1 (en) * 2020-09-25 2022-03-30 The Swatch Group Research and Development Ltd Ceramic decorative item
JP7194306B1 (en) * 2022-07-27 2022-12-21 黒崎播磨株式会社 Alumina sintered body and electrostatic chuck

Also Published As

Publication number Publication date
JPH0782048A (en) 1995-03-28

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