JP3044443B2 - Lead frame and manufacturing method thereof - Google Patents

Lead frame and manufacturing method thereof

Info

Publication number
JP3044443B2
JP3044443B2 JP9138795A JP9138795A JP3044443B2 JP 3044443 B2 JP3044443 B2 JP 3044443B2 JP 9138795 A JP9138795 A JP 9138795A JP 9138795 A JP9138795 A JP 9138795A JP 3044443 B2 JP3044443 B2 JP 3044443B2
Authority
JP
Japan
Prior art keywords
inner lead
tape
support bar
lead
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9138795A
Other languages
Japanese (ja)
Other versions
JPH08264699A (en
Inventor
道明 北
靖之 兵藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui High Tech Inc
Original Assignee
Mitsui High Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui High Tech Inc filed Critical Mitsui High Tech Inc
Priority to JP9138795A priority Critical patent/JP3044443B2/en
Publication of JPH08264699A publication Critical patent/JPH08264699A/en
Application granted granted Critical
Publication of JP3044443B2 publication Critical patent/JP3044443B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はインナーリードの先端部
をテ−プで支持固定したリードフレーム及びその製造方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lead frame in which the tip of an inner lead is supported and fixed by a tape, and a method of manufacturing the same.

【0002】[0002]

【従来の技術】リードフレームは、半導体装置の多機能
化及び小型化等により多ピンとなり、リ−ドの幅とピッ
チがともに微細になっている。特にインナーリードは微
細化され変形しやすくなっている。インナーリードの変
形、例えば反り、浮き上がり、垂れ、リ−ド寄り等は、
ワイヤ−ボンディングに悪影響を及ぼす。また変形が酷
いときはリ−ドが短絡する。
2. Description of the Related Art A lead frame has a large number of pins due to multifunctionality and miniaturization of a semiconductor device, and both a lead width and a pitch are fine. In particular, the inner leads are miniaturized and easily deformed. Deformation of the inner lead, for example, warping, rising, drooping, lead leaning, etc.
Affects wire-bonding. When the deformation is severe, the lead is short-circuited.

【0003】インナーリードの変形防止のために、例え
ば特開平4−171859、特公昭5−79174のよ
うに絶縁性のテ−プを当該インナーリードに貼着し固定
している。前記テ−プは短冊状に切断されるとともに角
がカットされ、前記のように貼着されるが、これでは多
工程を要し作業性が劣る。
[0003] In order to prevent deformation of the inner lead, an insulating tape is attached to the inner lead and fixed, as disclosed in, for example, Japanese Patent Application Laid-Open No. Hei 4-171859 and Japanese Patent Publication No. 5-79174. The tape is cut into strips, the corners are cut, and the tape is attached as described above. However, this requires many steps and is inferior in workability.

【0004】この他に、枠状に打抜きしたテ−プをイン
ナーリードからサポ−トバ−にかけて連続して貼着する
ものがある。これではテ−プ貼着作業が一度にでき作業
性を改善できるが、しかし、サポ−トバ−に近いインナ
ーリードが前記サポ−トバ−側に変位することがあり、
ワイヤ−ボンディングに不都合となる。
[0004] In addition, there is a type in which a tape punched in a frame shape is continuously attached from an inner lead to a support bar. In this case, the tape sticking operation can be performed at one time and the workability can be improved, but the inner lead close to the support bar may be displaced to the support bar side.
This is inconvenient for wire bonding.

【0005】[0005]

【この発明が解決しようとする課題】最近の多ピン化し
たリードフレームへのテ−プの貼着は、インナーリ−ド
の確実な変形防止、ワイヤ−ボンディング性確保等か
ら、インナーリード先端部を含んで施される。また、テ
−プ貼着時に変形しないようにインナーリード先端は連
結片やパッドに接続されていて、その後、電気的独立の
ためにインナーリード先端を個々に切り離すために打抜
きされる。この際、インナーリード先端とテ−プは同時
に打抜きされるが、比較的間隔のある端部インナーリー
ドとサポ−トバ−の間のテ−プは打抜き方向に引き込ま
れインナーリードが変形する。即ち、前記端部インナー
リードはサポ−トバ−側に無理にシフトし、中間部のイ
ンナーリードは反り等の形状不良となる。
In recent years, a tape is stuck to a lead frame having a large number of pins to prevent deformation of the inner lead and secure the wire bonding property. It is applied including. The tips of the inner leads are connected to connecting pieces and pads so as not to be deformed when the tape is stuck, and then punched to separate the tips of the inner leads individually for electrical independence. At this time, the tip of the inner lead and the tape are punched at the same time, but the tape between the end inner lead and the support bar, which are relatively spaced apart, is drawn in the punching direction and the inner lead is deformed. That is, the end inner lead is forcibly shifted to the support bar side, and the inner lead in the middle portion has a shape defect such as warpage.

【0006】本発明はインナーリード先端部を含んで当
該インナーリードからサポ−トバ−にかけ貼着したテ−
プを、インナーリード先端と同時に打抜きカットする
際、インナーリードに変形を与えずにでき、形状精度の
すぐれたリードフレームを得ることを目的とする、
According to the present invention, there is provided a tape including an end portion of an inner lead, which is attached to a support bar from the inner lead.
When the punch is punched and cut at the same time as the tip of the inner lead, the purpose is to obtain a lead frame with excellent shape accuracy which can be done without deforming the inner lead.

【0007】[0007]

【課題を解決するための手段】本発明の要旨は、インナ
ーリード先端部を含み当該インナーリードからパッドを
支持するサポ−トバ−に連続してテ−プを貼着したリー
ドフレームにおいて、端部インナーリードの外側からサ
ポ−トバ−に貼着のテ−プがパッド側を一部切欠きされ
ているリードフレームにある。他の要旨は、サポ−トバ
−に支持されたパッドの外周にインナーリードを形成
し、インナーリード先端部を含み当該インナーリードか
らサポ−トバ−に連続してテ−プを貼着し、インナーリ
ード先端を打抜き形成するリードフレームの製造方法に
おいて、端部インナーリードの外側からサポ−トバ−に
かけて一部切欠いたテ−プを貼着してインナーリードと
サポ−トバ−を連続して固定し、インナーリードとパッ
ドの間またはインナーリード先端をテ−プと同時に打抜
くリードフレームの製造方法にある。
SUMMARY OF THE INVENTION The gist of the present invention is to provide a lead frame including a tip portion of an inner lead and a tape continuously attached to a support bar for supporting a pad from the inner lead. The tape attached to the support bar from the outside of the inner lead is on a lead frame in which a part of the pad is cut away. Another gist is that an inner lead is formed on the outer periphery of a pad supported by a support bar, and a tape including the tip of the inner lead is attached to the support bar continuously from the inner lead to form an inner lead. In a method of manufacturing a lead frame in which a lead tip is formed by punching, a partially cut tape is attached from the outside of the end inner lead to the support bar to continuously fix the inner lead and the support bar. And a method for manufacturing a lead frame in which a space between an inner lead and a pad or a tip of an inner lead is punched simultaneously with a tape.

【0008】[0008]

【作用】本発明は、端部インナーリードからサポ−トバ
−にかけて貼着するテ−プをパッド側を一部切欠いてい
るので、インナーリード先端とテ−プを同時に打抜きす
る際、端部インナーリードとサポ−トバ−の間は他より
間隔が広いが打抜きパンチに係合せず引き込まれない。
而してインナーリードは変形せず形状精度がすぐれる。
According to the present invention, the tape to be attached from the end inner lead to the support bar is partially cut off on the pad side, so that when the tip of the inner lead and the tape are simultaneously punched, the end inner lead is used. Although the distance between the lead and the support bar is wider than the others, it does not engage with the punch and cannot be pulled in.
Thus, the inner leads do not deform and have excellent shape accuracy.

【0009】[0009]

【実施例】次に本発明について1実施例に基ずき図面を
参照して説明する。図面において、1は半導体チップを
搭載するパッドで、サポ−トバ−2に支持されている。
パッド1の周りのサポ−トバ−2間にインナーリード3
が多数形成されている。4はアウターリードで前記イン
ナーリード3に連続して形成されている。5はタイバ−
である。これらリードパターンはプレス法あるいはエッ
チング法にて形成できる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described based on one embodiment with reference to the drawings. In the drawing, reference numeral 1 denotes a pad for mounting a semiconductor chip, which is supported by a support bar-2.
Inner lead 3 between support bar 2 around pad 1
Are formed in large numbers. Reference numeral 4 denotes an outer lead formed continuously with the inner lead 3. 5 is a tie bar
It is. These lead patterns can be formed by a press method or an etching method.

【0010】インナーリード3の先端部は特に微細で変
形し易いので、絶縁性のテープ6が当該インナーリード
3の先端部を通りサポ−トバ−2にかけて連続して貼着
している。
Since the tip of the inner lead 3 is particularly fine and easily deformed, the insulating tape 6 is continuously adhered to the support bar 2 through the tip of the inner lead 3.

【0011】テ−プ6を貼着されたインナーリード3は
所定長さにするため、あるいはパッドなどの連結部から
切り離すために打抜きされる。該打抜きはテ−プ6と同
時に行うが、インナーリード3を変形させることがこれ
まであったから、本発明では、端部インナーリード3a
からサポ−トバ−2にかけて貼着のテ−プ6は、パッド
側が一部切欠き6aかかれている。
The inner lead 3 to which the tape 6 is adhered is punched to have a predetermined length or to separate it from a connecting portion such as a pad. The punching is performed at the same time as the tape 6. However, since the inner lead 3 has been deformed so far, in the present invention, the end inner lead 3a is formed.
The tape 6 to be stuck is partially cut out 6a on the pad side from to the support bar-2.

【0012】一部切欠6aの形状はこの実施例の反楕円
に限らず、半円、U字状、V字状などにしてもよい。
The shape of the partial cutout 6a is not limited to the anti-ellipse of this embodiment, but may be a semicircle, U-shape, V-shape or the like.

【0013】テ−プ6を貼着して所望のリードフレーム
製造工程が終わると、インナーリード3の先端を形成す
るための打抜きがなされる。該打抜きは前述のようにテ
−プ6と同時なされる。この際、他より間隔が広い端部
インナーリード3とサポ−トバ−2の間に貼着されたテ
−プ6はパッド側が一部切欠き6aされているので、打
抜きパンチ(図示しない)が端部インナーリード3aの
外側ではテ−プ6と係合せず、引き込みすることがな
い。而して端部インナーリード3aは変形せず、またパ
ッドの辺中間部に対向しているインナーリード3も反り
や浮き上がり等がなく、形状がすぐれる。
When the tape 6 is attached and the desired lead frame manufacturing process is completed, punching for forming the tip of the inner lead 3 is performed. The punching is performed simultaneously with the tape 6 as described above. At this time, since the tape 6 attached between the end inner lead 3 and the support bar 2 which is wider than the others is partially notched 6a on the pad side, a punch (not shown) can be used. The outer side of the end inner lead 3a does not engage with the tape 6 and does not retract. Thus, the end inner lead 3a is not deformed, and the inner lead 3 facing the middle part of the side of the pad is not warped or lifted, and has a good shape.

【0014】[0014]

【発明の効果】本発明は前述のようであるので、インナ
ーリードに変形や変位のない形状精度のすぐれたリード
フレームが得られる。
As described above, according to the present invention, it is possible to obtain a lead frame having excellent shape accuracy without deformation or displacement of the inner leads.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の1実施例におけるリードフレームを示
す図。
FIG. 1 is a view showing a lead frame according to an embodiment of the present invention.

【図2】本発明の1実施例においてインナーリードから
サポ−トバ−にかけてのテ−プ貼着を示す図。
FIG. 2 is a view showing tape attachment from an inner lead to a support bar in one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 パッド 2 サポ−トバ− 3 インナーリード 4 アウターリード 5 タイバ− 6 テ−プ 7 リードフレーム DESCRIPTION OF SYMBOLS 1 Pad 2 Support bar 3 Inner lead 4 Outer lead 5 Tie bar 6 Tape 7 Lead frame

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 23/50 ──────────────────────────────────────────────────の Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H01L 23/50

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 インナーリード先端部を含み当該インナ
ーリードからパッドを支持したサポ−トバ−に連続して
テ−プを貼着したリードフレームにおいて、端部インナ
ーリードの外側からサポ−トバ−に貼着のテ−プがパッ
ド側を一部切欠きされていることを特徴とするリードフ
レーム。
In a lead frame including a tip of an inner lead and a tape continuously attached to a support bar supporting a pad from the inner lead, the support bar is attached to the support bar from outside the end inner lead. A lead frame, wherein a part of a tape to be attached is cut off on a pad side.
【請求項2】 サポ−トバ−に支持されたパッドの外周
にインナーリードを形成し、インナーリード先端部を含
み当該インナーリードからサポ−トバ−に連続してテ−
プを貼着し、インナーリード先端を打抜き形成するリー
ドフレームの製造方法において、端部インナーリードの
外側からサポ−トバ−にかけて一部切欠いたテ−プを貼
着してインナーリードとサポ−トバ−を固定し、インナ
ーリード先端をテ−プと同時に打抜くことを特徴とする
リードフレームの製造方法。
2. An inner lead is formed on an outer periphery of a pad supported by a support bar, and a tip end portion of the inner lead is included in the pad from the inner lead to the support bar.
In a method for manufacturing a lead frame in which a tape is attached and a tip of an inner lead is formed by punching, a partially cut tape is attached from the outside of the end inner lead to the support bar to attach the inner lead and the support bar. A method for manufacturing a lead frame, characterized in that the tip of the inner lead is punched out simultaneously with the tape while fixing the inner lead.
JP9138795A 1995-03-23 1995-03-23 Lead frame and manufacturing method thereof Expired - Lifetime JP3044443B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9138795A JP3044443B2 (en) 1995-03-23 1995-03-23 Lead frame and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9138795A JP3044443B2 (en) 1995-03-23 1995-03-23 Lead frame and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH08264699A JPH08264699A (en) 1996-10-11
JP3044443B2 true JP3044443B2 (en) 2000-05-22

Family

ID=14024973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9138795A Expired - Lifetime JP3044443B2 (en) 1995-03-23 1995-03-23 Lead frame and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP3044443B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980067079A (en) * 1997-01-31 1998-10-15 이대원 Manufacturing Method of Lead Frame for Transistor

Also Published As

Publication number Publication date
JPH08264699A (en) 1996-10-11

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