JP3037685B2 - How to use rubber products or rubber members - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of using a rubber product or a rubber member used in a dust-removing environment such as a clean room, and a method of manufacturing an electronic component using the same.

[0002]

2. Description of the Related Art Conventionally, gloves used for handling electronic parts or members for electronic parts in a clean room of an electronic parts manufacturing facility or the like are mainly made of natural rubber-based class 100 or the like. . Even though such rubber gloves are sufficiently cleaned during production to remove dust, handling a substrate or the like before sputter processing using the gloves has a problem in that the yield of the sputter processing is poor. was there. It was considered that the cause was that the substrate was contaminated by the re-adhesion of dust attached to the glove.

[0003]

However, despite the fact that the present inventors have increased the number of times of changing gloves in order to solve the above problems, the situation has hardly improved.
When the garbage in question was analyzed, garbage such as calcium and sulfur emitted from the glove itself was detected. It has also been found that silica and carbon-based dust adhering to rubber gloves when they come into contact with electronic components or the like are re-adhering to the substrate and contaminating it.

[0004] However, in the case of rubber materials such as natural rubber, generation of these dusts is inevitable. In addition, there is a limit to the reduction of dust adhering to gloves when it comes into contact with electronic components and the like, even if measures are taken to improve the working environment. Then, other rubber materials and materials that can be substituted for the rubber material were examined, but no suitable material was found.

On the other hand, the above-mentioned problem is not limited to rubber gloves, but can occur in any rubber product or rubber member used in a dust-free environment. This is a problem that can occur with a rubber member or the like that does not directly contact the object to be handled.

Accordingly, an object of the present invention is to provide a method of using a rubber product or a rubber member capable of preventing generation of dust from a rubber material and preventing reattachment of dust attached later, and an electronic component using the same. It is to provide a manufacturing method.

[0007]

Means for Solving the Problems The inventors of the present invention have made various attempts to modify and treat the surface of a rubber material in order to achieve the above object. It has been found that the above object can be achieved by a simple method, and the present invention has been completed.

That is, in the method of using the rubber product or the rubber member according to the present invention, at least a portion of the surface of the rubber product or the rubber member used in a dust-removing environment, which is in direct contact with a handling object ,
It is characterized in that it is used in a state swollen with a solvent.

According to the present invention, at least the portion of the surface of the rubber product or the rubber member which is in direct contact with the object to be handled is swollen by the solvent. It is possible to prevent generation of dust and prevent reattachment of dust that later adheres. Although the details of the reason are not clear, the swollen rubber material can prevent falling and re-adhesion of dust-generating components by its own adhesive force, and also adheres and adheres dust adhered from outside while adhering by the adhesive force. It is considered that this can prevent re-adhesion to the outside. FIG. 2 shows that the dust 4
Shows a state in which the rubber material adheres and is hard to fall off due to the adhesive force of the swollen rubber material.

In the above, it is preferable that the solvent is supplied to the surface almost regularly. Thus, the dust adhered after the supply of the solvent is welded to the rubber material by the supply of a new solvent, so that the falling-off and re-adhesion can be more reliably prevented.

[0011] Examples of the dust-removing environment include various ones described later, but it is preferable that the dust-removing environment is in an electronic component manufacturing facility. In that case, as described above, in the electronic component manufacturing facility, not only generation of dust from the rubber material, but also reattachment of dust attached to the rubber material from the electronic component or electronic component member to the electronic component or the like becomes a problem. However, the present invention can prevent both of them, so that the present invention is particularly effective. As a result, for example, contamination of a substrate or the like is reduced in a semiconductor manufacturing process or the like, and yield in a subsequent film forming process or the like can be improved.

As the rubber product or the rubber member, there can be mentioned various ones described later.
It is preferably a suction holding member, a transport support member, or a gripping member. All of these are used in a dust-free environment and have a part that comes into direct contact with the object to be kept clean, so that the generation of dust from the rubber material and the reattachment of the dust once attached to the rubber material are reduced. The present invention is particularly effective because it has a particularly large effect.

Further, as the raw rubber for the rubber product or the rubber member, natural rubber (NR), isoprene rubber (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), Nitrile rubber (NBR), butyl rubber (IIR), ethylene propylene rubber (EPM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM), acrylic rubber (ACM, ANM), epichlorohydrin rubber (C
O, ECO) and one or more selected from the group consisting of polysulfide rubbers (T). Since these are all used as crosslinked rubbers, they are moderately swelled by a solvent, exhibit appropriate tackiness, and are less likely to elute rubber components.

On the other hand, the method for manufacturing an electronic component according to the present invention provides a method for manufacturing an electronic component or an electronic component in a dust-removing environment in a state where at least a portion of a surface of a rubber product or a rubber member that is in direct contact with an object to be handled is swollen with a solvent. The electronic component is manufactured by handling the member for use. According to the manufacturing method of the present invention, as described above, since generation of dust from the rubber material and reattachment of dust once attached to the rubber material can be effectively prevented, contamination of electronic components or electronic component members is reduced. Thus, the yield in various processes in the production of electronic components can be improved.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION The rubber product or rubber member of the present invention is used in a dust-removing environment. Related equipment, medical equipment, food manufacturing equipment, chemical manufacturing equipment, pure water manufacturing equipment, and other clean rooms, clean booths, and other various equipments may be used.

Examples of rubber products include various rubber gloves, rubber stoppers, rubber tubes, rubber hoses, and the like. Examples of the rubber member include a seal member, a cushioning member, a vibration-proof member, a vibration-proof member, and the like, in addition to a suction holding member, a transfer supporting member, and a gripping member in various kinds of automation equipment. In addition, these members also include those in which only a surface is covered with a rubber material.

Any method may be used to swell the surface of the rubber product or the like with a solvent. For example, a method of wiping a solvent in a washing bottle, a method of dipping in a container containing a solvent, or a method of spraying the surface with a spray. And the like. If the solvent remains on the surface as droplets, the droplets may adhere to other substances and become contaminated. Therefore, it is preferable that the solvent droplets remaining on the surface be small. This can be achieved by using a volatile solvent, absorbing and removing with a cloth or the like that generates little dust, or forcibly drying the surface of the rubber material with clean air.

The area to be swollen is preferably the entire surface from the viewpoint of preventing dust generation and the like, but it is preferable that at least the part in direct contact with the object to be kept clean is swollen.

As a method of supplying the solvent to the rubber surface almost regularly, an appropriate time interval may be set in consideration of the amount of new dust attached. For example, the solvent may be supplied by the above method every several minutes to several tens of minutes. Further, the interval may be set in consideration of the evaporation rate of the solvent. Further, the solvent may be supplied after a certain amount of work, instead of the time.

Table 1 shows examples of the solvents used in the present invention in correspondence with the raw rubber.

[0021]

[Table 1] Of these, those having low molecular weight (low carbon number) having moderate volatility, such as acetone, methyl ethyl ketone, ethyl acetate, petroleum ether, ethanol, trichlene, benzene, and toluene, hardly remain as droplets on the surface. preferable. In particular, acetone as ketones
It is desirable because it has high volatility and the time to dry is short and the waiting time is short, so that workability can be improved and it is easy to handle. A mixture of a plurality of the above solvents may be used.

On the other hand, the method of manufacturing an electronic component according to the present invention utilizes the method of use of the present invention described above.
In a dust removing environment, an electronic component is manufactured by treating at least a part of the surface of a rubber product or a rubber member with a solvent and then handling the electronic component or the electronic component member. At this time, except for the swelling, any of the conventional methods for manufacturing electronic components and the methods for handling electronic components or members for electronic components can be adopted.

As electronic parts to be manufactured, integrated circuits (ULSI, VLS, etc.) that require a particularly clean environment are used.
I, LSI, IC, etc.), so-called semiconductor components such as optical semiconductor elements and transistors, or various electronic components constituting electronic circuits, and other electronic devices such as printed wiring boards, multilayer wiring boards, and batteries. All of the parts are included. Examples of the electronic component member include various materials, elements, materials, and intermediate products constituting the electronic component.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments and the like showing specific configurations and effects of the present invention will be described below.

Example 1 (Natural rubber gloves) A rubber glove composition of 90% by weight of natural rubber, 6% by weight of zinc white, 3% by weight of sulfur (vulcanizing agent), and 1% by weight of stearic acid (vulcanizing aid) I prepared something. As shown in FIG. 1, acetone 3 was sprayed with a washing bottle 2 on a portion 1 a (mainly a fingertip portion) of the rubber glove 1 which comes into contact with a part to be handled.
It was left in the atmosphere (normal temperature) for several tens of seconds, and it was confirmed that no droplets remained on the surface. Using this glove, the alumina titanium carbide substrate was handled and sputtered in the insulating film manufacturing process as usual. The alumina titanium carbide substrate is used as a substrate or the like for manufacturing a thin-film magnetic head as an electronic component. At the same time, a thin-film magnetic head is formed.

As a result, by the above-mentioned swelling process, the size of about 100 pieces per square centimeter of the substrate was 0.5
The dust of 10 to 10 microns can be reduced to about 5 pieces, and the yield after the sputtering process can be greatly improved (about twice as large as that of Comparative Example 1). In other words, by swelling the surface of the rubber glove, dust may be generated from the glove itself, and even if dust adheres to the substrate during the work, the dust may not contaminate the alumina titanium carbide substrate without leaving the glove. Did not.

Although the treatment of the gloves has a great effect in a process of manufacturing an electronic component using an alumina titanium carbide substrate, it is considered that it can be diverted to any case where a component is manufactured using a rubber material. .

Comparative Example 1 (without swelling) A sputtering process was performed in the same manner as in Example 1 except that the swelling treatment with acetone was not performed. As a result, about 100 dusts were present in one square centimeter of the substrate, and the yield after the sputtering process was about half that of Example 1.

Example 2 (Nitrile rubber glove) Sputtering was carried out in the same manner as in Example 1 except that a nitrile rubber glove having the following composition was used instead of the natural rubber glove, and benzene was used instead of acetone. Processing was performed. As a result, the size is 0.5 to
It was possible to reduce the number of dust particles of 10 microns to about five, and to greatly improve the yield after the sputtering process (about twice as large as that of Comparative Example 1).

(Composition of Nitrile Rubber) Nitrile Rubber 90
Weight%, zinc white 6%, sulfur (vulcanizing agent) 3%,
Stearic acid (vulcanization aid) 1% by weight

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a swelling process in Example 1.

FIG. 2 is an explanatory view of a state of attachment of dust.

[Explanation of symbols]

 1 Rubber gloves 2 Cleaning bottle 3 Acetone (solvent) 4 Garbage

Claims (6)

(57) [Claims] A method of using a rubber product or a rubber member used in a state where at least a portion of the surface of a rubber product or a rubber member used in an environment free of dust is in direct contact with an object to be handled is swollen with a solvent. . 2. The method according to claim 1, wherein the solvent is supplied to the surface almost regularly. 3. The use method according to claim 1, wherein the dust removing environment is in an electronic component manufacturing facility. 4. The method according to claim 1, wherein the rubber product or the rubber member is a rubber glove, a suction holding member, a transport support member, or a gripping member. 5. The raw material rubber for the rubber product or the rubber member is made of natural rubber (NR), isoprene rubber (IR), styrene butadiene rubber (SBR), butadiene rubber (B
R), chloroprene rubber (CR), nitrile rubber (NB
R), butyl rubber (IIR), ethylene propylene rubber (EPM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM), acrylic rubber (AC
M, ANM), epichlorohydrin rubber (CO, EC
O) and 1 selected from the group consisting of polysulfide rubber (T)
The use according to any one of claims 1 to 4, which is at least one species. 6. An electronic component or a member for an electronic component in a state in which at least a portion of a surface of a rubber product or a rubber member that is in direct contact with an object to be handled is swollen with a solvent in a dust removing environment. For manufacturing electronic components.