JP3035608B2 - Microcapillary array, method for manufacturing the same, and substance injection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microinjection array system used for injecting genes and the like into cells, a microcapillary array used therefor, and a method for producing the same.

[0002]

2. Description of the Related Art In recent years, research and development of so-called biotechnology, which is rapidly progressing on the basis of biology, medicine, pharmacy, biochemistry, genetic engineering, and the like, are progressing at an ever-increasing speed, at the tissue and cell level. Research from DN
Progress is being made to elucidate biological functions at the A level. Above all, genetically modified DNA technology, which is considered to be a core technology in the future of biotechnology application, has evolved from pharmaceutical production targeting the original microorganisms, improving higher animals and plants such as crops and livestock, food materials and A wide variety of research and development is underway, including chemical production, gene therapy, and even animal cloning. In such biotechnology research, there is a high need for the handling of biological macromolecules such as cells, nuclei, chromosomes, DNA, and proteins, and it is necessary to apply the superior functions of living organisms to engineering or industrial applications. Many attempts have been made to do so.

As a method for injecting a substance such as DNA into cells, an electroporation method, a particle gun method, a microinjection method, a membrane fusion method and the like are known. Electroporation is a method in which an electric field pulse is applied to a cell to make the cell temporarily permeable. The particle gun method is a method in which metal particles having a substance such as DNA attached thereto are accelerated and applied to cells, and are driven into cells. The microinjection method is a method in which a microcapillary is inserted into cells to inject a substance such as DNA. The membrane fusion method is a method in which a liposome or the like in which a substance is encapsulated is fused to a cell membrane using a chemical substance such as polyethylene glycol and integrated with cells. Since cells have a micrometer size of several μm to several tens μm, a fine tool suitable for the target is required to handle these fine targets well. The above method is used as a tool for injecting a gene into cells.

[0004]

[0006] In biotechnology research, work is started by injecting a gene into cells, but until now, methods or tools that can efficiently inject a gene into a large number of cells have not been developed. Not developed. The above-described electroporation method is a method of injecting cells by treating the cells as a group rather than individually, and thus has a problem that a large amount of cells are wasted and the efficiency of the gene transfer operation is extremely low. The same applies to the particle gun method. The microinjection method is a method that can surely carry out gene transfer, but has a problem that the efficiency of the gene transfer operation is extremely low because the gene can be transferred only to one cell at a time.

[0005] The present invention has been made in view of the current situation in which operating tools and operating techniques capable of handling cells individually and accurately have not been established, and an object of the present invention is to handle cells individually and accurately. The purpose of the present invention is to provide an operation tool that can perform the operation. Another object of the present invention is to provide a processing method capable of processing a large amount of cells while maintaining the characteristics of individual operation.

[0006]

SUMMARY OF THE INVENTION The present invention provides an array of microcapillaries using microfabrication technology used in the manufacture of semiconductor devices and the like, so that individual cells can be individually manipulated and many cells can be simultaneously processed. The purpose of this study is to develop a micro-injection array system capable of batch processing of gene transfer operations, and to improve the efficiency of gene transfer work.

FIG. 1 is a conceptual diagram of a gene injection method using the microinjection array system of the present invention.
The microinjection array system of the present invention
A micro chamber array 10 and a micro capillary array 15 are provided. Micro chamber array 10
Is provided with a large number of microchambers 11 capable of holding individual cells 13 individually. The microchamber 11 is composed of a pit depressed from the surface and a communication hole 12 communicating with the bottom of the pit.
If it is made slightly smaller than the diameter of, only one cell can be captured. When capturing cells, use microchamber 1
The suspension containing the cells is flowed over 1
When a negative pressure is applied to the pit from behind through the, one cell 13 is fixed to one chamber 11 by negative pressure suction.
By forming microchambers into an array, many cells can be arranged and fixed in an array at once.

The microcapillary array 15 has a large number of microcapillaries 16 each having a tip having an outer diameter of about 2 to 10 μm and arranged in an array in the same arrangement as the arrangement of the microchambers 11. A substance such as DNA is injected into all the cells 13 held in the microchamber 11 at a time. The microcapillary array according to the present invention is characterized in that a plurality of hollow capillaries having an outer diameter of 2 to 10 μm penetrate the substrate and protrude from one surface of the substrate.

The microcapillary array according to the present invention is characterized in that a plurality of hollow capillaries made of a thin film material formed on the substrate surface are provided so as to penetrate the substrate and protrude from one surface of the substrate. I do. The substrate can be a silicon substrate and the thin film material can be silicon oxide or silicon nitride. The distal end of the hollow capillary preferably communicates with the outside at a portion other than the distal end.

[0010] The method for producing a microcapillary according to the present invention comprises a step of forming a fine hole from one surface of a substrate to the inside, a step of forming a thin film on an inner wall of the hole, and a side opposite to the surface on which the hole is formed. And a step of exposing a hollow structure made of a thin film formed on the inner wall of the small hole by etching the substrate from the surface of the thin film, and opening a tip portion of the hollow structure made of the thin film. In the step of opening the distal end, it is preferable to open the distal end of the hollow structure while leaving it open.

The method for producing a microcapillary array according to the present invention also includes a step of processing a plurality of small holes in a predetermined arrangement from one surface of the substrate to the inside, and forming a thin film on the inner wall of the plurality of small holes. And exposing the substrate from the surface opposite to the surface on which the fine hole has been machined to expose a plurality of hollow structures composed of a thin film formed on the inner wall of the fine hole, and a tip of the plurality of hollow structures composed of the thin film Opening the part. In the step of opening the distal end, it is preferable to open the distal end of the hollow structure while leaving it open. The step of processing a plurality of small holes and the step of opening the tip of the hollow structure can be performed by focused ion beam processing or ICP / RIE processing.

The substrate can be a silicon substrate, and the thin film can be formed of silicon oxide or silicon nitride. The thin film may be a metal thin film formed by a method such as vapor deposition. The substance injection device according to the present invention is a microcapillary comprising a cell holding means for holding a plurality of cells in a predetermined pitch arrangement, and a plurality of hollow capillaries having an outer diameter of 2 to 10 μm whose tips project from the substrate in the predetermined pitch arrangement. It is characterized by including an array, means for inhaling or discharging a substance into and from the microcapillary array, and means for relatively driving the cell holding means and the microcapillary array.

Further, in the method for injecting a substance according to the present invention, a step of holding a plurality of cells at a predetermined pitch, a step of sucking a substance into the microcapillary array arranged at the predetermined pitch, The method includes a step of piercing a tip of the capillary array into cells corresponding to each capillary, and a step of injecting a substance in the capillary into the cells.

The method for injecting a substance according to the present invention also includes a step of holding a plurality of cells at a predetermined pitch, and a step of piercing a tip of the microcapillary array arranged at the predetermined pitch into a cell corresponding to each capillary. Aspirating the substance in the cell pierced into the capillary into the capillary, and injecting the substance aspirated into the capillary into other cells. The present invention also relates to a cell to which a substance has been injected by the above-mentioned method and a cell which has been multiplied and proliferated from the cell. The present invention also relates to an adult obtained by dividing and proliferating a cell into which a substance has been injected by the above-mentioned method.

The substance injection apparatus or the substance injection method of the present invention can be used to inject biopolymers such as DNA and protein, fluorescent dyes for labeling, etc. into cells, and artificially improve and breed animals and plants. Can be used for According to the present invention, an array of gene transfer mechanisms enables a gene transfer operation to be performed on many cells, thereby greatly improving work efficiency and DNA transfer efficiency. In addition, since the gene injection method of the present invention is a direct injection method, gene transfer can be performed more reliably than in other methods.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. First, a method for manufacturing a microcapillary array will be described with reference to FIGS.
FIG. 2 shows a processing step of a silicon substrate on which a microcapillary is formed. As shown in FIG.
For example, a silicon substrate 20 having a thickness of about 200 to 400 μm
2 to 10 μm as shown in FIG.
A large number of holes 21 having an outer diameter of about m and a depth of 50 μm or more are formed in a grid pattern. The step of forming the hole 21 is performed, for example, by using a focused ion beam (Focused Io).
n Beam: Processing using FIB or high-density plasma etching (Inductively Coupled Plasma R)
eactive Ion Etching (ICP-RIE).

In the processing by the FIB, the silicon substrate 20 is moved stepwise on a precision stage, and the hole 21 is formed in one step.
Since the holes are opened one by one, it takes a long time to process, but it is possible to form a structure in which the tip of the hole is sharp. as a result,
Through the steps described later, a sharply pointed microcapillary having a tip with a radius of curvature of about 0.1 μm can be manufactured. As a matter of course, it is desirable that the tip of the capillary structure for gene introduction be sharp and sharp.

In the processing by ICP-RIE, a pattern of holes is formed by a photolithography process on a photoresist applied to the surface of a silicon substrate, and the holes are formed by etching with a high-density plasma of reactive ions using the photoresist as a mask. To form. ICP-
According to the RIE method, a large number of holes can be formed at once by a short-time processing, but the tip of the hole cannot be thinned unlike FIB processing.

With respect to the silicon substrate 20 having the holes formed,
Thereafter, a thin film is formed using a method such as thermal oxidation, heavy doping, vapor deposition, or sputtering. For example, FIG.
As shown in (c), the entire surface is oxidized and covered with a silicon oxide (SiO ₂ ) film 22 including the inner wall portion of the hole 21.
The silicon oxide film 22 is formed on the substrate surface and the inner wall of the hole 21 by, for example, heating the silicon substrate at 1150 ° C. in an oxygen atmosphere.
It can be carried out by heating to a degree. An oxide film having a thickness of about 0.2 μm is formed by heating for 1 hour, and an oxide film having a thickness of about 1 μm can be formed by heating for 10 hours. In order to secure the strength of the finally formed microcapillary, the thickness of the silicon oxide film 22 should be 1 μm.
m. When a silicon nitride film is formed instead of a silicon oxide film, a low-pressure vapor deposition method (LP
It can be formed by mixing SiH ₄ and ammonia by CVD and reacting at 800 ° C.

Next, as shown in FIG. 3, the glass substrate is processed. As shown in FIG. 3A, a glass substrate 30 having a thickness of about 0.5 mm is prepared. The glass substrate 30 is etched in fluoric acid using chromium / gold as a resist to form a peripheral portion 31 on one surface as shown in FIG.
The recess 32 is formed leaving a portion, and is processed into a dish shape. Furthermore,
As shown in FIG. 3C, a through hole 33 communicating from the concave portion 32 to the surface on the opposite side of the substrate is formed near the center of the glass substrate 30 by drilling or ultrasonic processing.

Next, as shown in FIG. 4, the silicon substrate 20 produced in the step of FIG. 2 and the glass substrate 30 produced in the step of FIG. 3 are joined and further processed to produce a microcapillary array. . First, as shown in FIG. 4A, the surface of the silicon substrate 20 manufactured in the process of FIG. 2 on the side where the hole 21 is opened and the concave portion 32 of the glass substrate 30 manufactured in the process of FIG. 3 are formed. The surfaces on the side are joined together and anodically bonded. Next, as shown in FIG. 4B, the silicon substrate 20 is largely etched from the surface 24 opposite to the side where the hole 21 is opened, using an organic alkali solution containing TMAH thinly. Since silicon oxide or silicon nitride is not etched, a hollow needle made of silicon oxide or silicon nitride can be projected from the substrate as shown in the figure. However, the silicon oxide or silicon nitride film is also etched little by little.
Requires a protective film. Hole 2 in silicon substrate 20
The glass substrate 30 bonded to the surface on the side where 1 is open,
It plays the role of this protective film. In addition, since the thickness of the silicon substrate 20 becomes very thin after the etching, the glass substrate 30 is necessary from the viewpoint of holding the silicon substrate 20.

In this manner, a plurality of bag-like hollow needles 25 made of silicon oxide or silicon nitride film are formed from the silicon substrate 20.
Is projected. However, at this stage, the bag-shaped hollow needle 25 has a bottom and only the upper surface is open. In addition,
Since the silicon oxide or silicon nitride film 22 gradually becomes thinner while the silicon is being etched, in order to secure a sufficient length of the hollow needle 25, it is necessary to use FIG.
The silicon oxide or silicon nitride film 22 formed in the step must be made sufficiently thick.

The same applies to the case where a thin film other than silicon oxide or silicon nitride is used, and the etching is performed under the condition that the etching rate of silicon is sufficiently higher than the material of the thin film. Thereby, the hollow needle made of a thin film material can be formed so as to protrude from the substrate. Examples of the thin film other than silicon oxide or silicon nitride include a metal thin film formed by vapor deposition. Subsequently, FIG.
As shown in (c), a hole 2 is formed near the tip of the bag-shaped hollow needle 25.
6 is opened to form a capillary 27 communicating in the axial direction.
The punching of the bag-shaped hollow needle 25 will be described below. FIB processing or RIE processing can be used as a method of this drilling processing.

FIG. 5 is an explanatory view of a method of forming a hole in the bag-shaped hollow needle by FIB processing. The FIB processing apparatus scans a sample with a weak ion beam to detect secondary electrons emitted from the sample, and scans the sample with a scanning ion microscope (SI
M) The image can be observed. FI for irradiating at a predetermined position while observing the bag-shaped hollow needle 50 with a SIM image
B51 is strengthened, and a hole 52 is formed near the tip of the bag-shaped hollow needle 25 as shown in FIG. According to this method,
As shown in the figure, a hole 52 can be formed in the side surface by removing the distal end position of the bag-shaped hollow needle 50. Therefore, FIG.
As schematically shown in FIG. 7, the sharpness of the distal end of the hollow needle 50 can be maintained, and the microcapillary 55 that can easily stab cells can be formed.

FIG. 6 is an explanatory view of a method of forming a hole in the bag-shaped hollow needle by RIE processing. In this case, first, as shown in FIG. 6A, the side of the silicon substrate 20 where the bag-shaped hollow needle 25 made of the silicon oxide film 22 protrudes,
The resist 63 is applied until the bag-like hollow needle 25 is filled.
Next, as shown in FIG. 6B, the silicon substrate 20 coated with the resist 63 is disposed between the electrodes 66 and 67,
The resist 65 is etched by RIE. When the tip of the bag-shaped hollow needle 25 comes out, the tip of the bag-shaped hollow needle 25 is etched together with the resist 63. Etching is performed while measuring the thickness of the resist layer 63, and the etching is stopped when a hole is formed at the tip of the bag-shaped hollow needle 25. In this way, as shown in a schematic cross-sectional view in FIG. 6C and a schematic perspective view in FIG. 6D, a hole 62 is opened at the tip to form a microcapillary 65 communicating in the axial direction. it can. According to the RIE process, there is an advantage that a large number of bag-shaped hollow needles 25 can be punched at once.

As described above, a microcapillary array is manufactured. This microcapillary array is used as a pair with a microchamber array. The microchamber array is a fine tool that holds a target cell at a specific location so as not to escape during a gene transfer operation. Hereinafter, a method for manufacturing a microchamber array will be described.

FIG. 7 is a process chart for explaining an example of a method for manufacturing a micro-chamber array. First, FIG.
As shown in FIG. 7, a quartz substrate 70 having a thickness of about 100 μm is prepared, and metal resist layers 71a and 71b are formed on the front and back surfaces. The resist in the circular region having a diameter of about 10 μm is removed from the resist layer 71a on the front surface side by a photolithography process at the same pitch as the arrangement pitch of the microcapillary array. The quartz substrate 70 on which the resist layers 71a and 71b are formed is anisotropically etched with hydrofluoric acid as shown in FIG. After anisotropic etching,
When the resist layers 71a and 71b are removed, as shown in FIG. 7C, a quartz substrate having tapered through holes (microchambers) 72 formed at the same pitch as the arrangement pitch of the microcapillary array is obtained.

Next, as shown in FIG. 7 (d), a concave portion 75 and a penetrating hole 75 formed in the same process as that shown in FIG. A base glass substrate 74 having holes 76 is bonded. afterwards,
As shown in FIG. 7E, a pump connecting member 77 made of glass or a transparent plastic material is bonded to the lower surface of the base glass substrate 74. The pump connecting member 77 is for connecting the through hole 76 of the base glass substrate 74 to a pump (not shown), and a flow path 78 communicating with the through hole 76.
And a plate-shaped member having a connection portion 79 on the side surface connected to the flow path 78. By connecting the connection portion 79 and the pump with the tube 90 and sucking, as shown schematically in FIG. 7E, the cells 91 are placed one by one in the tapered through-hole 72 of the quartz substrate 70. Can be sucked and held. The member 74 and the member 77 may be formed as one integrated member instead of being separated. When the quartz substrate 70 is used as the substrate of the microchamber array, since the quartz substrate is transparent, positioning using an inverted microscope can be performed from the lower surface of the substrate as described later, and there is an advantage that the positioning is facilitated.

FIG. 8 is a process chart for explaining another example of a method for manufacturing a micro-chamber array. In this example, as shown in FIG. 8A, a (100) oriented single crystal silicon substrate 80 is used as the substrate. This silicon substrate 80
The resist layers 81a and 81b are formed on the front surface and the back surface. In the resist layer 81a on the front surface side, the resist in the square region having a diameter of about 20 μm square is removed at the same pitch as the arrangement pitch of the microcapillary array by a photolithography process. The silicon substrate 80 on which the resist layers 81a and 81b are formed is immersed in a KOH solution and anisotropically etched as shown in FIG. After the completion of the anisotropic etching, when the resist layers 81a and 81b are removed, as shown in FIG. 8C, tapered pits 82 are formed at the same pitch as the arrangement pitch of the microcapillary array.
Is obtained on which the silicon substrate 80 is formed.

Next, a resist layer is formed on the back surface side of the silicon substrate 80 having the tapered pits 82 formed on the front surface side, and a portion of the resist layer just below the tapered pits 82 is formed to have a diameter of 2 to 5 μm. Remove to the extent. Then, by processing the resist layer as a mask by IPC-RIE, as shown in FIG. 8D, a substrate through-hole 83 is formed from the back surface of the silicon substrate 80 to the tapered pits 82 on the front surface.

Subsequently, as shown in FIG. 8E, the silicon substrate 80 in which the through-hole 83 is formed has a concave portion 85 and a through-hole 86 manufactured in the same process as that shown in FIG. The base glass substrate 84 is bonded by anodic bonding.
Further, a pump connecting member 87 made of glass or a transparent plastic material is bonded to the lower surface of the base glass substrate 84. The pump connecting member 87 is for connecting the through hole 86 of the base glass substrate 84 to an external pump,
It is a plate-shaped member having a flow passage 88 communicating with the through hole 86 and a connecting portion 89 on the side surface communicating with the flow passage 88.
By connecting the connection portion 89 and the pump with a tube 90 and sucking, as shown schematically in FIG. 8E, the cells 93 are placed one by one into the tapered pits 82 of the silicon substrate 80. Can be held by suction. The member 84 and the member 87 may be formed as one integrated member instead of being separated.

When the silicon substrate 80 is used as the substrate of the microchamber array, the diameter of the through-hole 83 connected to the tapered pit 82 for holding the cell 93 can be reduced, so that even a small cell can be held. There is an advantage.

FIG. 9 is an overall configuration diagram of an example of the microinjection array system according to the present invention. This system mounts a microchamber array 100 composed of a quartz substrate and a DNA container 150 on a transparent XY stage 110 that can move in a two-dimensional direction, and moves the microcapillary array 120 on the XY stage 110 in the vertical direction (Z direction). ) Manipulator 13 that can be moved to
0 is provided. The micro-chamber array 100 is disposed on the piezoelectric actuator 160. A pump 112 is connected to the microchamber array 100 via a tube 111, and a syringe 122 is connected to the microcapillary array 120 via a tube 121. Below the XY stage 110, an inverted microscope 140 for positioning is arranged. FIG.
The operation of injecting DNA into cells using the microinjection array system shown in (1) is performed according to the following procedure.

(1) The cell suspension is flowed on the microchamber array, and a negative pressure is applied by the pump 112 to aspirate and fix the cells 115 one by one into each chamber. Unfixed cells are washed away. (2) Move the XY stage 110 to position the DNA container 150 below the microcapillary array 120. (3) The microcapillary array 120 is moved downward by operating the manipulator 130, and is immersed in the solution of the DNA container 150.

(4) The DNA in the DNA container 150 is stored in the microcapillary array 120 by operating the syringe 122.
Aspirate the solution. DNA solutions are aspirated into individual capillaries. By appropriately adjusting the DNA concentration in the DNA container, DN can be added to all microcapillaries.
It is quite possible for A to be aspirated. (5) The microcapillary array 120 is moved upward by operating the manipulator 130, and the XY stage 110 is moved.
To position the microchamber array 100 below the microcapillary array 120. (6) The XY stage 11 is observed while observing the microchamber array 100 and the microcapillary array 120 from below the XY stage 110 using the inverted microscope 140.
By slightly moving 0, both are accurately aligned.

(7) The manipulator 130 is operated to move the microcapillary array 120 downward, and the tip of the microcapillary array 120 is pierced into the individual cells 115 held in the microchamber array 100. At this time, the piezoelectric actuator 160 on which the microchamber array 100 is mounted is driven to drive the cells 115 adsorbed on the microchamber array 100.
By vibrating, the operation of piercing the microcapillary into the cells becomes easy. (8) Syringe 122 with microcapillary 120 piercing microcapillary 120 into each cell 115 adsorbed to microchamber array 100
To transfer the DNA in the microcapillary to cells 1
Inject into 15.

(9) The manipulator 130 is operated to move the microcapillary array 120 upward, and the XY stage 110 is moved, for example, in the direction indicated by the arrow in FIG. Is located below the microcapillary array 120. (10) Repeat the above operations (6) to (9), and if necessary,
While replenishing the DNA from the NA container 150, the DNA injection operation is performed on all the cells adsorbed on the microchamber array 100. (11) After injecting DNA into all cells, pump 11
By driving 2 in reverse, a positive pressure is applied to the microchamber array to release the cells from suction and fixation, and the cells into which DNA has been injected are collected. By such an operation, DNA can be reliably and individually injected into a large amount of cells.

Further, a microcapillary is pierced into the cells 115 held in the microchamber array 100, and a substance containing a nucleus in the cells is sucked. Then, another cell is held in the microchamber array 110, and the microcapillary is pierced into the capillary. By injecting the substance aspirated therein, a substance containing a nucleus can be transplanted between cells. At that time, one micro-chamber array 1
Although you can work while changing cells at 00,
XY stage 110 instead of DNA container 150 in FIG.
If another micro-chamber array is placed on top and work is performed according to the above procedure, work efficiency can be improved.

In the example shown in FIG. 9, the micro-chamber array 100 and the micro-capillary array 12
The positioning of 0 was performed using the inverted microscope 140 from below the transparent XY stage 110. However, the positioning method of the microchamber array and the microcapillary array is not limited to a method using an inverted microscope. For example, as shown in FIG. 11, an alignment mark 102 is provided for each block 101 of the micro-chamber array 100, and the alignment mark 102 is confirmed by an upright microscope installed on the microcapillary array side. Alignment can also be performed.
Alternatively, by using an XY stage having high feeding accuracy, the alignment of the microchamber array and the microcapillary array can be performed without requiring confirmation by a microscope.

In the system shown in FIG. 9, the number of capillaries in the microcapillary array 120 is set smaller than the number of chambers in the microchamber array 100, and the microchamber array 100 is moved relative to the microcapillary array 120. , DNA was sequentially injected into each block of the microchamber array. However, when the number of capillaries in the microcapillary array and the number of chambers in the microchamber array are set to be equal, all the cells held in the microchamber array can be treated by one operation.
NA can be injected.

In the system shown in FIG. 9, the micro-chamber array 100 is moved in the X and Y directions, and the micro-capillary array 120 is moved in the vertical direction (Z direction).
The micro chamber array 1
00 is fixed, and the microcapillary array 120 can be moved in the X and Y directions together with the vertical direction.
It is, of course, possible to inject DNA into all cells suction-fixed to the microchamber array 100.

In an experiment using poplar protoplasts in a device according to the present invention incorporating a microcapillary array and a microchamber array having a 50 × 50 array at 300 μm intervals, the capture rate of one cell was 30%, and a fluorescent dye was used. In the injection test, the injection rate was 30%. Therefore, the substance could be injected into about 200 cells by one operation. The required time is about 1 minute. In the conventional microinjection method, it is limited that the injection treatment into one cell is performed in substantially the same time. Therefore, the present invention improves the processing efficiency by about 200 times as compared with the conventional method.

[0043]

According to the present invention, it is possible to prepare a microcapillary array for injecting a substance into cells, and by using the microcapillary array, a substance can be individually and reliably applied to a large number of cells. It becomes possible to introduce.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram of a gene injection method using the microinjection array system of the present invention.

FIG. 2 is a diagram showing a processing step of a silicon substrate on which a microcapillary is formed.

FIG. 3 is an explanatory view of a glass substrate processing step.

FIG. 4 is an explanatory diagram of a step of manufacturing a microcapillary array by bonding a silicon substrate and a glass substrate.

FIG. 5 is an explanatory view of a method of making a hole in a hollow needle by FIB processing.

FIG. 6 is an explanatory view of a method of forming a hole in a hollow needle by RIE processing.

FIG. 7 is a process chart illustrating an example of a method for manufacturing a microchamber array.

FIG. 8 is a process chart illustrating another example of a method for manufacturing a microchamber array.

FIG. 9 is a conceptual diagram illustrating a gene injection operation by the microinjection array system of the present invention.

FIG. 10 illustrates a positional relationship between a microcapillary array and a microchamber array.

FIG. 11 illustrates an example of a method for aligning a microcapillary array and a microchamber array.

[Explanation of symbols]

10 microchamber array, 11 microchamber, 12 communication hole, 13 cells, 15 microcapillary array, 16 microcapillary, 20
... Silicon substrate, 21 ... Hole, 22 ... Silicon oxide film, 2
5: hollow hollow needle, 26: hole, 27: capillary, 30
... glass substrate, 31 ... peripheral part, 32 ... concave part, 33 ... through hole, 50 ... bag-shaped hollow needle, 51 ... FIB, 52 ... hole, 55
... microcapillary, 62 ... hole, 63 ... resist,
65: microcapillary, 66, 67: electrode, 70
... quartz substrate, 71a, 71b ... resist layer, 72 ... tapered through-hole, 74 ... base glass substrate, 75 ... recess, 7
6 ... through-hole, 77 ... pump connecting member, 78 ... flow path, 79
... Connection part, 80 ... Single-crystal silicon substrate, 81a, 81b
... Resist layer, 82 ... Tapered pit, 83 ... Through hole, 84 ... Base glass substrate, 85 ... Concave part, 86 ... Through hole, 87 ... Pump connection member, 88 ... Flow path, 89 ... Connection part, 90 ... Tube , 91 ... cells, 93 ... cells, 100
... micro chamber array, 101 ... block, 10
2 ... alignment mark, 110 ... XY stage, 111
... tube, 112 ... pump, 115 ... cell, 120 ...
Microcapillary array, 121 ... tube, 12
2: Syringe, 130: Manipulator, 140: Inverted microscope, 150: DNA container, 160: Piezoelectric actuator

Continuation of the front page (51) Int.Cl. ⁷ Identification code FI C12N 15/00 A (56) References JP-A 1-112976 (JP, A) Edited by Takashi Yokota, Kenichi Arai, Biomanual Series for Experimental Medicine 4 Gene Transfer and Expression / Analysis Methods, Yodosha Co., Ltd., April 20, 1994, p. 36 (58) Field surveyed (Int. Cl. ⁷ , DB name) C12M 1/00 C12N 15/09 BIOSIS (DIALOG) WPI (DIALOG)

Claims (11)

(57) [Claims] A plurality of hollow capillaries made of a thin film material having an outer diameter of 2 to 10 μm are provided in a two-dimensional array so as to penetrate the substrate and protrude from one surface of the substrate. Capillary array. Wherein said substrate is a silicon substrate, a micro capillary array according to claim 1, wherein the thin film material is characterized in that it is a silicon oxide or silicon nitride. Wherein the tip of the hollow capillary claim 1 or 2 microcapillary array according to, characterized in that it communicates with the outside at a portion other than the cutting edge portion. 4. A step of forming a fine hole from one surface of the substrate toward the inside, a step of forming a thin film on an inner wall of the hole, and a step of forming the substrate from a surface opposite to the surface on which the hole is processed. A method for producing a microcapillary, comprising: a step of exposing a hollow structure made of a thin film formed on an inner wall of the small hole by etching; and a step of opening a tip portion of the hollow structure made of the thin film. 5. The method according to claim 4 , wherein, in the step of opening the tip, the tip is opened while leaving the tip of the hollow structure. 6. A step of processing a plurality of small holes in a predetermined arrangement from one surface of the substrate to the inside, a step of forming a thin film on inner walls of the plurality of small holes, and processing the small holes. A step of exposing the plurality of hollow structures made of a thin film formed on the inner wall of the fine hole by etching the substrate from the surface opposite to the surface, and a step of opening the tips of the plurality of hollow structures made of the thin film; A method for producing a microcapillary array, comprising: 7. The method according to claim 6 , wherein, in the step of opening the distal end portion, the opening is made while leaving the tip end of the hollow structure. 8. The method for manufacturing a micro-capillary array according to claim 6 or 7, wherein the step of opening the distal portion of the process and the hollow structure for processing the plurality of small holes is characterized by performing the focused ion beam. 9. A method for manufacturing a micro-capillary array according to claim 6 or 7, wherein the step of opening the distal portion of the process and the hollow structure for processing the plurality of small holes is characterized by performing the ICP · RIE processing. Wherein said substrate is a silicon substrate, a method for manufacturing a micro-capillary array according to any one of claims 4-9 wherein the thin film is characterized by comprising silicon oxide or silicon nitride. 11. A plurality of cells are two-dimensionally arranged in a predetermined pitch arrangement.
And cell holding means for holding an array, or a thin film material having an outer diameter of 2~10μm tip is projected from the substrate
A microcapillary array comprising a plurality of hollow capillaries in a two-dimensional array at the predetermined pitch arrangement; a unit for sucking or discharging a substance into the microcapillary array; the cell holding unit and the microcapillary array; Means for relatively driving the material.