JP3016481B1 - Reciprocating machine tools - Google Patents

Abstract

A reciprocating machine tool that can be driven at high speed, and in particular, provides a machine tool for cutting high-hardness brittle materials that has high processing efficiency and high processing accuracy. SOLUTION: A floating member 10 for fixing a tool is arranged at at least two positions separated in the axial direction in line symmetry with a floating member therebetween, and is connected to a spring member 20 such as a beam spring fixed to a support 30. The floating body is suspended from both sides, and the exciter excites the floating body in the axial direction so that the floating body reciprocates at substantially the resonance frequency to cause the tool to act on the workpiece.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a new reciprocating machine tool for driving a machining tool according to a new principle.
In particular, the present invention relates to a reciprocating machine tool of a new principle which can be used as a multi-blade saw to efficiently cut a thin piece from a large-diameter high-hardness brittle material.

[0002]

2. Description of the Related Art A machine tool for mechanically removing a material, such as cutting, grinding, and lapping, contacts a workpiece by moving a tool such as an abrasive grain or a blade relative to the workpiece. The basic processing principle is to eliminate the material of the part.

[0003] The most common method for performing relative movement between a workpiece and a tool is by rotational movement.
It is used for most machine tools such as lathes, milling machines, boring machines, and flat lapping machines. Such a relative movement method includes a method using a linear reciprocating motion in addition to a rotational motion, and is used for a saw, a planar, or a multi-blade saw used for cutting a brittle material. Here, a machine tool that performs processing by linear reciprocating motion is referred to as a reciprocating motion type machine tool, and a machine tool that performs rotary motion is referred to as a rotary motion type machine tool.

[0004] Although reciprocating machine tools have many advantages, they are less popular than rotary machine tools, and are rather being eliminated. The efficiency is low. Comparing a reciprocating machine tool and a rotary machine tool with similar applications, for example, as in the case of a saw and a milling machine,
The difference in machining efficiency is evident, mainly due to the difference in the average relative movement speed between the workpiece and the tool.

The amount of processing in the mechanical material removal processing is as follows:
It is proportional to the product of the cut between the workpiece and the tool and the relative movement speed. The relative movement speed is usually several hundred meters to several thousand meters per minute for a rotary motion type machine tool, and as high as 10,000 m per minute for a recently developed high-speed grinding system, whereas it is relatively large for a reciprocating type machine tool. At high speed, the average speed is several tens of meters per minute, and at low speed, it is only several meters per minute.

[0006] In a conventional reciprocating machine tool, a moving body including a tool and a mounting part is forcibly reciprocated by a crank mechanism or the like while linearly guiding the moving body in a required moving direction. In such a mechanism, the relative speed of the moving body is limited by the stroke and the mass of the moving body. In conventional practical-level reciprocating machine tools, increasing the size of the moving body to meet the demand for higher speeds increases inertia,
In order to mitigate the effects of inertia, the fuselage has a sturdy structure that does not lose inertia, the power source is large enough to overcome inertia, and a large flywheel is installed to ensure smooth movement, and countermeasures such as countermeasures Have been stacked.

[0007] The upper limit relative moving speed obtained as a result of these many countermeasures is approximately 50 m / min, and this value is a practical reciprocating machine tool having an economically useful price and size. It was difficult to exceed and tended to be replaced by more productive rotary motion machine tools.

As an object to which the machine tool for mechanically removing a material as described above is applied, there is cutting of a high hardness brittle material. The use of high-hardness brittle materials has been increasing mainly in the electronics industry, and there has been an increasing demand for precision cutting technology to process large-diameter raw materials in order to improve productivity. Abrasive processing techniques such as an outer peripheral blade cutting machine, an inner peripheral blade cutting machine, and a multi-wire saw have been developed as applicable to these precision cutting.

The outer peripheral blade cutting machine is a generally used precision grinding and cutting means, and uses a disk-shaped blade called an outer peripheral blade (OD blade) which is rotated at a high speed. And the cutting efficiency is high. However, in addition to using a thin blade to reduce the cutting allowance, the processed portion is a free end, so that the rigidity is substantially low because the processed portion is a free end, so that the processed surface may undulate or the cutting track may be bent.

[0010] The inner peripheral blade cutting machine is an inner peripheral blade (ID blade).
The blade is made of a thin doughnut-shaped stainless steel plate called tension, and is used by applying tension to the outer periphery. Therefore, the blade has a higher rigidity than an outer peripheral blade cutter using an outer peripheral blade.
Therefore, the blade thickness can be reduced, and the cutting accuracy is high. However, cutting performance is not high because multi-cut cannot be performed. Furthermore, when cutting large-diameter workpieces, the blade width must be increased, which inevitably increases the diameter of the blade, and the outer peripheral speed of the blade becomes extremely large to maintain the inner peripheral speed. However, an increase in the size of the apparatus is inevitable.

Conventionally, an inner peripheral blade cutting machine is generally used for precision cutting of a high hardness brittle material, and as the diameter of the material increases, the size of the apparatus has been increased. However, when the diameter of the workpiece increases, the cutting resistance of the inner peripheral blade cutting machine becomes too large, and it becomes difficult to obtain a wide thin plate, which is a raw material of the inner peripheral blade, when the crystal diameter exceeds 200 mm. Despite the high cost, multi-wire saws have come to be used.

The multi-wire saw is a lapping cutting method for cutting a crystal through loose abrasive grains continuously fed while reciprocating a wire pressed against a material. The multi-wire saw has a diameter of 150 μm wound many times between multi-groove rollers. A method is employed in which a slurry containing abrasive grains is cut while running a piano wire of a degree on a driving drum. The running direction of the wire is switched by periodically inverting the driving drum.
During the actual processing, the wire moves in one direction, so the groove spacing in the multi-groove roller can be reduced, and the cutting accuracy is excellent,
Car floss is also small. On the other hand, running costs tend to increase due to wear of the grooves of the multi-groove roller, intrusion of the abrasive into the rotating portion, consumption of abrasive grains, disconnection of the wire, and the like. Also,
Undulation due to meandering of the wire occurs, and flatness becomes a problem.

[0013]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a reciprocating machine tool which can be driven at a high speed, and in particular, for cutting a high-hardness brittle material having a high processing efficiency and a high processing accuracy. To provide a machine tool.

[0014]

In order to solve the above-mentioned problems, a reciprocating machine tool according to the present invention is characterized in that a floating body for fixing a tool is line-symmetrical with respect to a floating body at at least two locations separated in an axial direction. It is connected with each of the spring members fixed to the support, and is suspended from both sides.The exciter excites the floating body in the axial direction, and reciprocates the floating body at substantially the resonance frequency, thereby moving the tool. It is characterized in that it acts on a workpiece.

In the reciprocating machine tool of the present invention, the floating body becomes a vibrating moving body having a resonance point and is excited near the resonance frequency of the floating body. Do exercise. Further, since the floating body is symmetrically suspended from both sides by the spring members, the moving axis position of the floating body does not change and always linearly moves in the axial direction. An appropriate movement speed can be set by appropriately designing the resonance frequency of the idler portion, and the tool fixed to the idler acts with a sufficiently large relative movement speed to the workpiece, so that the high speed is achieved. Processing efficiency can be achieved.

The reciprocating machine tool of the present invention achieves a high relative speed, which cannot be reached by a conventional reciprocating machine tool, while replenishing vibration damping and power equivalent to machining work. Operation is possible. According to the present invention, a relatively small reciprocating machine tool with high power efficiency can be provided.

The beam spring may be used as a spring member to fix the center of the beam spring to the support. When the end of the beam spring is connected to the floating body, the floating body can be largely displaced even if the tip of the beam spring causes a slight displacement, and the tool fixed to the floating body can easily reciprocate with a large amplitude. Exercise can be performed. For example, when the distance between the beam spring and the floating body is 500 mm, the floating body can be displaced 63 mm in the axial direction only by displacing the tip of the beam spring by 4 mm.

Further, it is preferable to use a plurality of thin metal strips in order to connect the beam spring and the floating body so as to give an appropriate curvature to a portion where the beam spring and the metal strip of the floating body abut. Since the multilayer metal strip has a high tensile strength, a high flexibility in the thickness direction and a high rigidity in the width direction, it is effective for moving the floating body in the axial direction while pulling in the direction of the beam spring. In addition, the life of the metal strip can be extended by giving a curvature to a portion where the metal strip hits.

As a spring member, a bent end J is used.
It may be formed in a character shape, and the bent portion may be gradually thinned toward the leading end, and the leading end of the bent portion may be connected to the movable body. By employing such a structure, a small and compact machine tool can be configured. With this configuration, it is difficult to increase the stroke length of the tool, but it is easy to increase the frequency because the substantial spring coefficient is large, and the effective relative moving speed of the tool can be sufficiently increased.

It is preferable that the frequency of the reciprocating motion be set within a resonance region and at a position slightly lower than the resonance frequency.
While achieving motion with an appropriate amplitude in the resonance region,
When performing the vibration control, it is possible to prevent a loss of synchronism caused by dropping into a region exceeding the resonance vibration, thereby ensuring a stable operation. For example, the amplitude of a floating body is monitored by a sensor,
When the amplitude becomes excessive, reduce the frequency of the exciter,
By configuring an automatic control system that increases the frequency when the amplitude decreases, stable operation can be easily performed.

Further, it is possible to use an exciter equipped with a reciprocating actuator, so that the exciting force of the actuator is transmitted to the floating body via the exciting spring. By transmitting mechanically generated reciprocating motion as reciprocating motion of the floating body via a spring, the tool can be driven with a simpler mechanism. Since the stroke of the actuator and the moving length of the floating body are different, it is preferable to use a spring whose length changes as a medium that mediates both.

In particular, when an exciter which is constituted by a crank mechanism which is rotated by a rotary motor and whose stroke length can be adjusted by changing the crank radius is used, for example, at startup, the crank radius is reduced to shorten the stroke length. By doing so, the engine is started against a large starting torque, and when performing resonant operation, instead of increasing the crank radius and suppressing the exciting force, the stroke length is increased and the reciprocating motion of the floating body is maintained and promoted. You can do so.

The vibrator may be constituted by an electromagnet and the vibrating force may be transmitted to the moving body by electromagnetic force. If an electromagnetic exciter is used, the excitation frequency of the electromagnet can be easily adjusted, and the electromagnetic force can be transmitted in a non-contact manner, thereby facilitating the design and operation of the mechanical device.

The reciprocating machine tool of the present invention can be used as a multi-blade saw by arranging a large number of electrodeposited diamond whetstones in which diamond grains are electrodeposited on a metal strip plate at equal intervals. The reciprocating machine tool of the present invention configured as a multi-blade saw,
The metal strip can be stretched by applying sufficient tension to give it a high rigidity close to the inner peripheral blade of the inner peripheral blade cutting machine. can do. Moreover, since it acts on the workpiece by reciprocating motion with a sufficient relative movement speed,
Processing with high cutting efficiency can be achieved.

Further, the reciprocating machine tool of the present invention can be used not only for a multi-blade saw but also for various kinds of machines by selecting a tool to be applied. It can also be used.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A reciprocating machine tool according to the present invention
As shown in the operation principle explanatory diagram of FIG. 1, a floating body 1 on which a tool is fixed is supported by an elastic body 2 so as to vibrate on a straight line along a linear guide 3, so that the floating body 1 vibrates near a resonance point. By applying a vibrating force 4 having a number to cause a resonant motion, the relative movement speed between the tool and the workpiece is increased to improve the machining efficiency. In the reciprocating machine tool of the present invention, since the tool portion performs a continuous vibration movement, it is only necessary to apply a small amount of power to replenish the energy equivalent to the machining work and the energy consumed by the damping of the vibration system. Can drive.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. FIG. 2 is a partially cutaway perspective view showing a basic structure of a reciprocating machine tool according to a first embodiment of the present invention, FIG. 3 is a schematic view showing a vibration state of a floating body, and FIG.
Is a graph showing the frequency response characteristics of the floating body, FIG. 5 is a partial cross-sectional view showing a method of fixing the metal strip used in the present embodiment, FIG. 6 is a partially cutaway perspective view showing the second embodiment, FIG. 7 is a partial sectional view showing a part of the exciter used in the second embodiment,
FIG. 8 is a gear configuration diagram of an exciter used in the second embodiment, and FIG.
FIG. 9 is a partially cutaway perspective view showing a basic structure in a third embodiment.

[0028]

Embodiment 1 In a reciprocating machine tool of this embodiment, a floating body 10 to which a tool is fixed is disposed at a central portion, and a pair of beams are arranged in parallel with a symmetrical position with respect to a movement axis of the floating body 10. A spring 20 is provided. The beam spring 20 has substantially the same length as the length of the floating body 10, and is fixed to the fixed portion 31 at substantially the center thereof, and the fixed portion 31 is fixed to the intermediate frame 30. The end of the beam spring 20 and the end of the floating body 10 are connected by a thin metal strip 21 and are substantially rectangular as a whole. In order to apply tension to the metal strip 21, the fixing portion 31 is pulled outward to give an appropriate displacement to the beam spring 20 and then fixed.

The movable body 10 has a vibrator 40 connected to the end thereof via a vibrating spring 41, and reciprocates at an intermediate position between the two beam springs 20. Since the floating body 10 is supported by a pair of beam springs 20 at symmetrical positions by the metal strips 21 having the same length, the floating body 10 is always straight along the central axis without deviating from the intermediate position of the beam spring 20. Do exercise.

When the floating body 10 is displaced in the axial direction, as shown in FIG. 3, the beam spring 20 is bent inward in the form of being pulled by the metal strip 21 in accordance with the distance deviating from the equilibrium position, and exhibits a spring action. , A force that attempts to return the floating body 10 to an equilibrium state is generated. Therefore, by solving the equation of motion using the mass of the floating body 10 and the spring coefficient of the beam spring 20, the specifications of the motion such as the resonance frequency and the motion speed can be easily obtained. FIG. 4 is a graph showing the amount of displacement for each frequency for the floating body 10 selected so that the resonance frequency is 14.2 Hz.

The actual operation is performed by automatic control such as adjusting the excitation frequency so as to maintain a predetermined amplitude. In such an automatic control system, the operation is performed in a frequency range slightly lower than the resonance frequency, for example, in the vicinity of 15 Hz in the case of FIG. It is needless to say that the operation at a frequency higher than the resonance frequency can be performed by appropriately selecting the operation index such as measuring the frequency of the floating body and feeding back the signal. In the reciprocating machine tool according to the present embodiment, the tool travels at high speed in accordance with the reciprocating motion of the floating body 10, so that efficient machining can be performed by contacting the workpiece with the tool.

In this beam spring mechanism, the movable body 10 is largely displaced by slightly displacing the tip of the beam spring 20, so that the amplitude of the vibration motion of the movable body 10 can be made sufficiently large. For example, if the length L of the metal strip 21 is 50
If 0 mm, the axial displacement d2 of the floating body 10 is 63 m
m, the displacement d1 of the tip of the beam spring 20 is only 4.0 mm.

Since the metal strip 21 bends in the thickness direction as the floating body 10 moves, the bending stress repeatedly applied to the member having a sharp angle near the fixed end. May be damaged beyond the limit. Therefore, as shown in FIG. 5, a portion 22 of the tip end of the beam spring 20 where the metal band plate 21 abuts and the surfaces 11 and 12 of the floating body 10 where the metal band plate 21 abuts are finished into a smooth curved surface. Even if it vibrates, it does not come into contact with the sharp ridgeline to avoid stress concentration and make it hard to break.

If the tensile stress of the metal strip 21 is large and the cross-sectional area needs to be increased, the metal strip 2
It is preferable to use a plurality of strips in an overlapping manner in order to alleviate the bending stress. The metal strip 21 is fixed to the beam spring 20 by a fixing member 23 and is fixed to the floating body 10 by a fixing mechanism (not shown). At the fixed positions of these metal strips 21, the influence of the vibration of the floating body 10 is reduced, so that the stress does not easily change.

When the floating body 10 is configured to perform a reciprocating motion having an appropriate resonance frequency and is excited by the vibrator 40 at a frequency close to the resonance frequency, the floating body 10 has a large resonance state close to the resonance state. A linear reciprocating motion having an amplitude distance and a high frequency can be performed. Therefore, the tool fixed to the floating body 10 acts on the workpiece with a sufficiently large relative moving speed, so that high machining efficiency can be achieved.

The floating body 10 which vibrates while holding the tool
In the case of having a rather complicated structure, if the frequency of the reciprocating motion is too high, resonance may occur inside and the normal operation may be difficult. Therefore, in order to suppress the vibration frequency during operation to around 14 Hz, the amplitude of the floating body 10 must be set to 1 to make the average relative speed about 200 m / min.
It is necessary to be about 30 mm. At this time, assuming that the mass of the floating body 10 is, for example, 60 kg, the required spring constant is considerably large at 48 kg / mm from the resonance condition.

Therefore, if an attempt is made to secure such a large spring constant and a large amplitude by using an ordinary coil spring, the size and weight of the spring cannot be inevitably increased. Because of the connection, it is not easy to obtain a realistic device. Further, if the fixed portion is suspended by a leaf spring, in addition to the difficulty due to the enlargement of the spring, there is a drawback that the working depth of the tool changes due to the seesaw movement of the floating body, so that precision machining cannot be performed. In this embodiment,
As described above, since a beam spring is used as the spring structure, a strong spring constant and a large-amplitude motion can be realized with a simple and lightweight structure.

[0038]

Embodiment 2 The reciprocating machine tool of this embodiment has the structure of the first embodiment, and uses a multi-blade as a tool to precisely cut a large-diameter piece of high-hardness brittle material. High efficiency cutting machine Hereinafter, the reciprocating machine tool of this embodiment will be described with reference to FIG. In the figure, elements having the same functions as those already described are given the same reference numerals to avoid duplication of description.

The floating body 10 includes a blade portion 13, lever devices 14 and 15 for applying necessary tension to the blade, a tension rod 16, and a metal tube body 17 for supporting the whole mainly by compressive stress. Excited by a vibrator 40 via a vibrating spring 41 connected to the lever device 14, and moves along the linear guide 18. Blade 13
Is a multi-blade using, for example, 60 steel plates having a thickness of 100 μm and a width of 25 mm and electrodeposited with diamond abrasive grains.
6 and supported between the lever devices 14 and 15. The lever devices 14 and 15 are supported by a metal tube 17.

The weight of the floating body 10 is substantially 60 kg by adding the influence of the vibrating spring 20 and the like. The effective length of the blade 13 was 930 mm, so that a workpiece having a diameter of 300 mm could be cut. Since the effective length of the blade is longer than the diameter of the workpiece, in addition to the vibration stroke of the blade, the workpiece can be reciprocated slowly by the width of the workpiece with respect to the blade to discharge grinding debris. , There is a little more room.

The beam spring 20 has a width of 280 mm and a thickness of 76 mm.
A spring having a beam length of 600 mm from the fixed portion 31 and a spring stress not so large was selected. In addition, metal strip 2
In No. 1, five plates having a width of 280 mm and a thickness of 0.3 mm were used in layers, the length between the beam spring 20 and the floating body 10 was 500 mm, and the stroke of the floating body 10 was 130.6 mm. Assuming that the frequency during operation is 14.2 Hz, the average moving speed of the multi-blade 13 is 223 m / min,
The maximum moving speed is 350 m / min.

Referring further to FIGS. 7 and 8, the vibrator 4
An arm 44 is attached to the eccentric rotating plate 43 via a crank pin 45 at an eccentric position. The rotation of the rotating disk 43 causes the block 42 to move in the piston direction in the axial direction of the idler 10, and the movement is controlled by a coil. The vibration is transmitted to the floating body 10 via the vibrating spring 41.

The amplitude of the reciprocating motion of the block 42 and the floating body 10
Are not coincident with each other, the vibration spring 41 absorbs the difference to allow the floating body 10 to resonate. Specifically, the piston 4 in the crank mechanism
Since the change in the bending of the vibration spring 41 determined by the position 2 and the position of the end of the movable body 10 is applied to the movable body 10 as a vibrating force, the movable body 10 vibrates.

The rotating disk 43 is rotated by a spur gear 51 provided on a rotating shaft of a vibrating motor 50. The applied vibration force motor 50 is a motor that applies an applied vibration force, and a servomotor is used mainly because the rotation speed needs to be adjusted near the resonance point. When starting a machine tool, a large starting torque is required, so the required torque is reduced by reducing the crank radius. During steady operation, a predetermined relative speed is required in relation to the cutting speed, so the crank radius is increased, and the effect of the tool is increased. Increase speed.

It is necessary to change the crank radius while the machine tool is operating. The crank radius adjustment in the present embodiment is performed by using a differential reduction gear.
The flanges 53 of the differential reducer are rotated together with the turntable 43 by the spur gears 51 and 52 attached to the shafts. The flange 53 rotates the bevel gear 47 at the same speed as the turntable 43 via a planetary gear 57 supported by a casing 56.
The arm 44 reciprocates the block 42 with a stroke based on the rotation radius of the crank pin 45.

Gears are cut around the outer periphery of a casing 56 of the differential reduction gear so that a spur gear 55 fixed to a rotating shaft of the crank radius adjusting motor 54 is engaged.
When the crank radius adjusting motor 54 is driven, the casing 5
6 rotates and the planetary gear 57 rotates, so that the bevel gear 47 is rotated.
And the rotation speed of the turntable 43, the feed screw 48 rotates. When the feed screw 48 rotates around the axis, the crank pin 45 moves in the radial direction, and the crank radius changes.

In this way, even while the exciting force is being applied to the floating body 10, the crank radius can be adjusted to continuously change the exciting stroke and thus the exciting force. The feed screw 48 is threaded in the opposite direction with respect to the midpoint, and the mass balance 46 is engaged at a position substantially symmetrical with respect to the crankpin 45, so that the crank radius is adjusted. When the feed screw 48 is rotated, the load is automatically balanced and the eccentric force can be reduced.

The reciprocating machine tool of this embodiment has a stationary frame 32, and the intermediate frame 30 to which the beam spring 20 and the vibration device 40 are fixed is suspended from the stationary frame 32 via a leaf spring 33. The vibration of the whole apparatus was suppressed. In addition, a base on which the workpiece is placed is disposed below the blade 13 and the blade 13 is raised at a substantially constant speed so that a cut required for processing is provided. Instead of such a fixed size cut, a constant pressure cut in which a constant pressure is applied may be performed. Although not shown, a supply system of a grinding fluid such as a coolant is attached.

Also, if necessary, in order to enable precision grinding while suppressing vibration of the machine tool, a structure in which a pair of floating bodies are provided and two floating bodies are driven in opposite directions is used. The forces may be offset. In this case, as a method of synchronizing the two units, there are a method of mechanically connecting the two units, a method of electrically synchronizing the power source with a servomotor, and the like. Is an easy device.

In the reciprocating machine tool of this embodiment, a large number of electrodeposited diamond wheels are stretched in parallel with a high tension and cut at a high relative speed. In addition to cutting high-speed flakes, precise and highly efficient processing can be performed with little undulation on the processing surface and little kerf loss.

[0051]

Third Embodiment As shown in FIG. 9, the reciprocating machine tool according to the third embodiment uses the operating principle of the first embodiment to simplify the structure by changing the structure of an elastic body for supporting a floating body. A smaller machine tool designed for use at slightly higher frequencies,
As a specific example, it is shown as a reciprocating grinder in which a grindstone is attached to the lower surface of a floating body. In the description of the present embodiment, elements having the same functions as those of the components already described are denoted by the same reference numerals, to avoid duplication of description.

The floating body 10 having the grindstone fixed to the lower surface is connected at both ends to the distal end 26 of a leaf spring 25 symmetrically arranged with the floating body 10 interposed therebetween, and is supported so as to perform a linear reciprocating motion. . The leaf spring 25 is formed in a J-shape with a bent tip, and the bent portion gradually becomes thinner as it goes to the tip and easily bends. The body 10 moves linearly along the central axis. The leaf springs 25 are gripped by the fixing portions 31 fixed to the intermediate frame 30 and pull the floating bodies 10 outward to exert a spring action on the motion system.

With such a leaf spring structure, the vibration stroke of the floating body 10 is difficult to increase, but the spring constant can be made larger than that of the beam spring structure used in the first embodiment. Therefore, by maintaining the amount of material removed per unit time by vibrating the floating body 10 at a high frequency, a small and compact machine tool can be configured. For example, if the floating body 10 is configured to have a frequency of 100 Hz or more, even if the stroke length is about 10 mm, it can sufficiently withstand practical use. Such a configuration is preferable because the machine tool becomes more compact.

By attaching a grindstone to the lower surface of the floating body 10 of FIG. 9, a reciprocating grinding machine used for surface grinding can be constructed. Since this grinding machine can feed a workpiece in a direction perpendicular to the vibration direction of the tool, it is possible to use the grinding machine differently from a rotary motion type machine tool. For example, using a long tool of several hundred mm,
The surface of a mm workpiece can be finished in one degree. Note that a plurality of small tools may be used side by side.

In each of the above embodiments, a guide wall having a depression inside is formed at both ends of the region acting on the workpiece, and a band-like grindstone reciprocating is sandwiched between the guide walls one by one. By supplying a pressurized grinding fluid to form a static pressure linear bearing that maintains the static pressure between the wall surface and the band-shaped grindstone, the band-shaped grindstone smoothly reciprocates during processing and does not move in the thickness direction In this way, highly accurate grinding can be performed. When using a multi-blade in which a large number of band-shaped grindstones are connected, a guide wall having guide grooves formed by the number of blades is used.

[0056]

As described above, according to the present invention, various reciprocating motion type machine tools which can be driven at a high speed can be formed. In particular, a machine tool for cutting a high hardness brittle material having a high processing efficiency and a high processing accuracy can be provided. Can be provided.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing the operation principle of a reciprocating machine tool according to the present invention.

FIG. 2 is a partially cutaway perspective view showing a basic structure of a reciprocating machine tool according to an embodiment of the present invention.

FIG. 3 is a schematic diagram showing a vibration state of a floating body in the present embodiment.

FIG. 4 is a graph showing frequency response characteristics of a floating body in the present embodiment.

FIG. 5 is a partial cross-sectional view showing a method of fixing a metal strip used in the present embodiment.

FIG. 6 is a partially cutaway perspective view showing a second embodiment of the reciprocating machine tool of the present invention.

FIG. 7 is a partial sectional view showing a part of an exciter used in a second embodiment.

FIG. 8 is a gear configuration diagram of an exciter used in the second embodiment.

FIG. 9 is a partially cutaway perspective view showing a basic structure of a reciprocating machine tool according to a third embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Floating body 2 Elastic body 3 Linear guide 4 Exciting force 10 Floating body 11, 12 Contact surface 13 Cutting tool 14, 15 Lever device 16 Tension rod 17 Metal tube 18 Linear guide 20 Beam spring 21 Metal strip plate 22 Contact surface Reference Signs List 23 Fixture 25 Leaf spring 26 Spring tip 30 Intermediate frame 31 Fixed part 32 Fixed frame 33 Leaf spring 40 Vibrator 41 Vibration spring 42 Block 43 Rotating disk 44 Arm 45 Crank pin 46 Mass balance 47 Bevel gear 48 Feed screw 50 Vibration force motor 51, 52, 55 Spur gear 53 Flange 54 Crank radius adjusting motor 56 Casing 57 Planetary gear

Claims (10)

(57) [Claims] 1. A moving body for fixing a tool, a predetermined number of spring members, a supporting body, and an exciter, and are arranged symmetrically with respect to the moving body at least at two locations separated in the axial direction of the moving body. The spring member is fixed to the support, suspends the floating body from both sides, and the exciter excites the floating body in the axial direction, thereby A reciprocating machine tool wherein the body is reciprocated at a substantially resonant frequency to cause the tool to act on the workpiece. 2. The reciprocating machine tool according to claim 1, wherein said spring member is a beam spring having a central portion fixed to said support. 3. A thin metal strip is used to connect the beam spring and the floating body, and a portion of the beam spring and the floating body where the metal strip comes into contact has a proper curvature. 3. The reciprocating machine tool according to claim 2, wherein: 4. The reciprocating motion type according to claim 1, wherein said spring member is formed in a J-shape in which a bent portion is gradually thinned, and a tip of the bent portion is connected to said movable body. Machine Tools. 5. The reciprocating machine tool according to claim 1, wherein a frequency of the reciprocating motion is set at a position slightly lower than a resonance frequency in a resonance region. 6. The apparatus according to claim 1, wherein the exciter includes an actuator that reciprocates, and a vibration force of the actuator is transmitted to the floating body via a vibration spring. 2. A reciprocating machine tool according to claim 1. 7. The apparatus according to claim 6, wherein the vibrator comprises a rotary motor and a crank mechanism rotated by the rotary motor, and a stroke length can be adjusted by changing a crank radius. A reciprocating machine tool as described. 8. The reciprocating machine tool according to claim 1, wherein said vibrator is constituted by an electromagnet, and a vibrating force is transmitted to said floating body by electromagnetic force. 9. The tool according to claim 1, wherein the tool is a blade using an electrodeposited diamond grindstone in which diamond grains are electrodeposited on a metal strip and used as a multi-blade saw. Reciprocating machine tool. 10. The reciprocating machine tool according to claim 1, wherein the tool is a grindstone and performs surface grinding.