JP3008665B2 - Free particle spraying machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for processing free fine particles, and more particularly to a free fine particle in which a solid-gas two-phase flow of free fine particles and a gas is injected onto a workpiece by a nozzle to form a hole. The present invention relates to an injection processing device.

[0002]

2. Description of the Related Art For example, S having an average particle size of 0.1 to 30 .mu.m
Surface processing and drilling can be performed by spraying free fine particles of iC or the like together with air or nitrogen gas as a solid-gas two-phase flow onto the workpiece and processing. FIG. 8 shows a state in which drilling is performed by such an apparatus. A workpiece 3 provided with a mask 2 is mounted on a mounting table 1 and pressed from above by a holding metal 4 and bolts 5. A solid-gas two-phase flow of free fine particles and gas was injected. Through such processing, a hole corresponding to the opening of the mask 2 is formed in the workpiece 3.

[0003]

A stage made of a metal such as stainless steel, copper, brass, or iron is used as a mounting table 1 on which a workpiece 3 is to be mounted, and a mask 2 is mounted thereon. The applied workpiece 3 is fixed. As shown in FIG. 7, metal is relatively difficult to process in plastic-ceramics and glass in the injection processing by solid-gas two-phase flow of free fine particles and gas. Thus, there is an advantage that the durability is increased.

However, when the workpiece 3 provided with the mask 2 is mounted on the mounting table 1 made of such a metal and subjected to injection processing to form a through hole, the processing depth of the hole is limited to the mounting table. When the surface of the workpiece 1 is reached, the progress of the processing is temporarily stopped here, whereby the edge portion of the hole formed on the workpiece 3 becomes a slope,
This causes a problem that the hole becomes tapered.
That is, there is a drawback that it is difficult to form a hole having an accurate shape with a vertical edge portion of the hole.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has been made in consideration of the above problem. It is an object of the present invention to provide an apparatus for jetting free fine particles capable of processing so that an edge is vertical.

[0006]

According to a first aspect of the present invention, there is provided an apparatus in which a solid-gas two-phase flow of free fine particles and a gas is jetted onto a workpiece by a nozzle to form a hole. Free particles, wherein a mask corresponding to the shape of the hole is provided on the workpiece, and a sheet made of a material which is easier to process than the workpiece is joined to the lower side of the workpiece. The present invention relates to an injection processing device.
Here, the hole processing includes the groove processing.

According to a second aspect of the present invention, in the first aspect, the sheet is made of a plastic material and has a thickness of 1 to 100 times the thickness of the workpiece. The present invention relates to a featured free particle spraying apparatus.

[0008]

According to the first aspect of the invention, after a hole penetrating the workpiece is formed by a solid-gas two-phase flow of free fine particles and gas, the lower sheet can be processed according to the shape of the mask. As a result, the processing is prevented from stagnating at the stage when the workpiece has been penetrated.

According to the second aspect of the present invention, after penetrating the workpiece, the lower side is made of a plastic material, and the processing is further performed on a sheet having a thickness of 1 to 100 times the thickness of the workpiece. Become like

[0010]

FIG. 2 is a schematic view showing the entire structure of a processing apparatus for jetting free fine particles according to an embodiment of the present invention. The discharge side of the compressor 10 is connected to the air supply pipe 11.
A pressure adjusting valve 12, an electronic valve 13, and a pressure adjusting valve 14 are sequentially connected to the air supply pipe 11 from the upstream side to the downstream side. The downstream side of the pressure regulating valve 14 is connected to the ejector 15.

A distal end of a fine particle delivery pipe 18 is connected to the ejector 15 so as to branch laterally. The upstream side of the particle delivery pipe 18 is connected to a particle tank 19, and the delivery pipe 18 is connected to a particle delivery adjustment valve 20 in the middle thereof. The fine particle tank 19 is connected to the lower side of the cyclone 21.

The cyclone 21 is connected to a reduction pipe 24, and is connected to a processing chamber 25 via the reduction pipe 24. The workpiece 26 is arranged in the processing chamber 25 so as to face the tip of the nozzle 27. The cyclone 21 has an exhaust pipe 2
8 are connected. This exhaust pipe 28
Is connected to an exhaust fan 29.

Next, the workpiece 2 disposed in the processing chamber 25
Explaining the attachment of 6, the workpiece 26 is provided with a mask 34 thereon as shown in FIG. An underlay sheet 35 is joined to a lower side of the workpiece 26. The workpiece 26 is arranged on a mount 36. And this work 26
Is held down from both sides by a holding jig 37. A bolt 39 that passes through a through hole 38 formed in the holding jig 37 is screwed into a screw hole 40 of the mounting base 36, thereby fixing the workpiece 26.

In the above configuration, compressed air or nitrogen gas is supplied from the compressor 10 shown in FIG. 2, and the supply of this gas is controlled by the solenoid valve 13. . The pressure of the gas is controlled by pressure regulating valves 12 and 14.

The ejector 15 sucks free SiC fine particles from a fine particle tank 19 through a fine particle delivery pipe 18 by a gas supplied through the air supply pipe 11. The supply amount of the free fine particles is adjusted by the adjustment valve 20. Then, a solid-gas two-phase flow of gas and free fine particles is jetted from the tip side of the nozzle 27 toward the surface of the workpiece 26. By such a solid-gas two-phase flow of the free fine particles and the gas, predetermined processing, for example, hole processing or groove processing is performed on the workpiece 26.

The gas-solid two-phase flow is scattered in the processing chamber 25 and returned to the cyclone 21 by the reduction pipe 24, whereby the gas and free fine particles are separated. The free fine particles are returned to the fine particle tank 19 connected to the lower side of the cyclone 21. On the other hand, the separated gas is collected by the exhaust pipe 28 and the exhaust fan 29.

FIG. 1 is an enlarged view showing a state in which the workpiece 26 is processed in the processing chamber 25. In particular, an underlay sheet 35 made of a material having a higher processing speed than the sample, for example, a plastic material, is adhered to the lower side of the workpiece 26 so as to be bonded thereto. The underlay sheet 35 is processed together with the workpiece 26 and is replaced every time processing is performed.

FIGS. 3 to 6 show the progress of processing in the case where the underlay sheet 35 is attached. For example, consider the case of drilling and grooving. The workpiece 26 is processed according to the pattern of the mask 34, and the processed cross section has a shape in which an edge portion is inclined as shown in FIGS. Immediately after penetrating the workpiece 26, the inclination of the edge remains unchanged as shown in FIG.

However, as shown in FIG. 6, when the processing further proceeds, the underlay sheet 35 is processed at a stretch. For this reason, the tapered portion of the processing hole of the workpiece 26 is eliminated, and a straight edge is formed as shown in FIG.

FIG. 7 shows silicon carbide (Si) having an average particle size of 3 μm.
C) shows the processing speed of various materials when blasting with fine particles. As shown in FIG. 7, a plastic material such as acrylic is the fastest, followed by glass, ceramics (ferrite, altic, alumina), and metal (aluminum). Therefore, as apparent from this result, plastic such as acrylic resin, epoxy resin, and nylon resin can be said to be the most effective as the underlay sheet 35.

The thickness of the underlay sheet 35 when forming a hole penetrating the workpiece 26 in this manner differs depending on the thickness of the workpiece 26 and the size of the processing hole. The thickness must be equal to or greater than the thickness of The upper limit of the thickness is preferably 100 times or more the thickness of the workpiece 26 in order to prevent the possibility that the underlay sheet 35 will penetrate further.

As described above, the apparatus for jetting free fine particles according to the present embodiment employs a solid-gas two-phase jet of air or nitrogen gas containing free fine particles of ceramic such as SiC having an average particle size of 0.1 to 30 μm. It is about. An underlay sheet 35 made of a material that is easier to process than the workpiece 26 is joined to a lower side of the workpiece 26 to be processed. Note that plastic is used as the material of the underlay sheet 35. The lower surface of the workpiece 26 and the underlay sheet 35 are used in close contact with each other by pressure bonding or adhesion. The thickness of the underlay sheet 35 is 1 to 100 times the thickness of the workpiece.

Therefore, as shown in the enlarged cross-sectional view of FIG. 6, the processing can be performed so that the edge portion is in a vertical state when a hole (including a groove) or the like is formed by penetrating the workpiece 26. Become. Further, the time from when the processing hole of the workpiece starts to penetrate to when the processing is completed is reduced. The underlay sheet 35 can be easily replaced, and the cost is low because it is made of a plastic material.

[0024]

According to a first aspect of the present invention, a mask corresponding to the shape of a hole to be processed is provided on a workpiece, and a sheet made of a material which is easier to process than the workpiece is provided below the workpiece. It is intended to be joined. Therefore, the progress of the processing does not stop and stagnate at the stage of penetrating the workpiece, and the lower sheet is continuously processed, whereby the edge portion of the processed cross section is vertically set. Processing becomes possible, and precise processing becomes possible.

According to the second aspect of the present invention, the sheet is made of a plastic material, and has a thickness of 1 to 100 times the thickness of the workpiece. Therefore, subsequent to the processing of the workpiece, the processing into the sheet made of plastic is continued, whereby the edge portion of the hole of the workpiece can be processed vertically. Moreover, the thickness is 1 to 1 of the thickness of the workpiece.
Since the thickness is 00 times, the surface of the mounting table is not damaged. The use of a sheet made of a plastic material is also advantageous in terms of cost.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a main part of a free particle spraying apparatus.

FIG. 2 is a piping diagram illustrating an overall configuration of a processing apparatus.

FIG. 3 is a sectional view of a main part in a state before processing.

FIG. 4 is a cross-sectional view of a main part in a state where processing has progressed to a front surface side of a workpiece.

FIG. 5 is a cross-sectional view of a main part in a state where processing has progressed so as to penetrate a workpiece;

FIG. 6 is a cross-sectional view of a main part in a state where processing is completed.

FIG. 7 is a graph showing a relationship between a workpiece and a processing speed.

FIG. 8 is a longitudinal sectional view of a main part of a conventional free particle spraying apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Compressor 11 Air supply pipe 12 Pressure control valve 13 Solenoid valve 14 Pressure control valve 15 Ejector 18 Particle sending pipe 19 Particle tank 20 Particle sending adjusting valve 21 Cyclone 24 Reduction pipe 25 Processing chamber 26 Workpiece 27 Nozzle 28 Exhaust pipe 29 Discharge Air blower 34 Mask 35 Underlay sheet 36 Mounting stand 37 Holding jig 38 Through hole 39 Bolt 40 Screw hole

Claims (2)

(57) [Claims] 1. An apparatus in which a gas-solid two-phase flow of free fine particles and a gas is jetted onto a workpiece by a nozzle to perform drilling, wherein a mask corresponding to the shape of the drilled hole is covered with the mask. A free-particle blasting apparatus characterized in that a sheet made of a material which is easier to process than the workpiece and which is applied on the workpiece is joined to a lower side of the workpiece. 2. The method according to claim 1, wherein the sheet is made of a plastic material, and the thickness thereof is 1 to 10 times the thickness of the workpiece.
The free particle spraying apparatus according to claim 1, wherein the apparatus has a thickness of 0 times.