JP3005579B1 - Liquid crystal injection method and liquid crystal injection device for liquid crystal display device - Google Patents

Abstract

An object of the present invention is to provide a liquid crystal injection method and a liquid crystal injection device for a liquid crystal display device which can eliminate a non-uniform cell gap and can manufacture a liquid crystal panel with good display quality. SOLUTION: At the time of drying and cooling of a liquid crystal panel before liquid crystal injection, cooling nitrogen after evacuation at high temperature is sequentially performed using stop valves 15, 17, and 19 having three different flow rates.
It is characterized by suppressing the nonuniformity of the cell gap 30 near the injection hole 26 of the liquid crystal panel, which has conventionally occurred, and has the cooling and exhaust chamber 4 in which three nitrogen supply systems with variable flow rates are installed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel manufacturing technique, and more particularly to a liquid crystal injection method and a liquid crystal injection method for a liquid crystal display device capable of eliminating a non-uniform cell gap and manufacturing a liquid crystal panel with high display quality. Related to the device.

[0002]

9 is a plan view of a general liquid crystal panel 34f, FIG. 10 is a sectional view of a liquid crystal panel 34f (atmospheric pressure P1 = internal pressure P2 of the liquid crystal panel 34f) of FIG. 9, and FIG.
FIG. 12 is a sectional view of the liquid crystal panel 34f (atmospheric pressure P1> internal pressure P2 of the liquid crystal panel 34f).
f (atmospheric pressure P1 <internal pressure P2 of the liquid crystal panel 34f), and FIG. 13 is a detailed view of the cooling and exhaust chamber P4 of the liquid crystal injection device of the first prior art.

A first prior art liquid crystal panel 34 shown in FIG.
f is the cell gap 30 as shown in FIGS.
Substrate 27 for driving the liquid crystal material injected from the injection hole 26 into the substrate and a counter substrate 28 represented by a color filter substrate.
Is a seal 29, which is configured to be adhered as shown in FIG. Since bonding after bonding is performed by a curing reaction of the seal 29 at a high temperature, the TFT substrate 27 and the counter substrate 28 made of glass expand according to their respective linear expansion coefficients. Since the coefficient of linear expansion of the seal 29 is smaller than the coefficient of linear expansion of glass, the glass is cured in a state where the glass is extended and the seal 29 is being extended, and the curing is completed to complete the liquid crystal panel 34f. The cross section at this time has a bulged shape as shown in FIG.

Subsequently, a liquid crystal panel 34f is placed in a first panel drying chamber (not shown) in the liquid crystal injection device shown in FIG.
When the chamber is conveyed in the state shown in FIG. 3 and evacuated to a high temperature, the internal pressure P2 generated when the chamber is evacuated.
As a result, the pressure in the first panel drying chamber (not shown) decreases quickly, and as shown in FIG. 11, the liquid crystal panel 34f further swells. After that, due to the difference in the linear expansion coefficient between the glass forming the liquid crystal panel 34f and the seal 29, the processing in the second panel drying chamber P3 proceeds while the panel shape is not flat (see FIGS. 10 and 11). Conventionally, a panel conveyed to the cooling exhaust chamber P4 is provided with a cooling nitrogen supply system of one system shown in FIG.
N2 (cooling nitrogen) of 00 to 2000 l / min (liter per minute) is supplied. At that time, as shown in FIG. 12, the cooling exhaust chamber P4 first has the atmospheric pressure P1, and the vicinity of the injection hole 26 communicating with the outside of the liquid crystal panel 34f also has the atmospheric pressure P1. However, since the pressure inside the liquid crystal panel 34f is vacuum, the cell gap 30 is reduced by being pushed by the atmospheric pressure P1 of the cooling / exhausting chamber P4.
In the vicinity of 6, an uneven cell gap 30 (an uneven portion 31 in FIG. 9 and an e portion shown in FIG. 12) occurs. Since the portion f shown in FIG. 12 is fixed to the seal 29, the distortion of the unstable portion e (non-uniform portion 31) remains as a non-uniform gap.

On the other hand, as a technique for maintaining the uniformity of the cell gap 30, Japanese Unexamined Patent Publication No.
(Prior art) has been proposed. FIG. 14 is a schematic view of a device for explaining a liquid crystal injection device of a second prior art. FIG. 15 is a graph showing the relationship between the atmospheric pressure recovery time and the non-uniform defect rate when a liquid crystal panel 34f is formed using the liquid crystal injection device of FIG. Referring to FIG. 14, a second conventional technique is such that a liquid crystal 34d and a liquid crystal panel 3 are provided in a vacuum container 34a.
4f, a master panel 34c equivalent to the liquid crystal panel 34f, and a precision displacement meter 34b provided on the surface of the master panel 34f, and a panel expansion due to a pressure difference between the pressure in the vacuum container 34a and the pressure in the liquid crystal panel 34f. Precision displacement meter 3
4b, the measured value is sent to the control box 34p, and the number of rotations of the pump 34n and the electric variable valve 34 for evacuating the vacuum container 34a are controlled by the control box 34p.
The expansion and contraction of the liquid crystal panel 34f is suppressed to a specified value or less by adjusting the evacuation speed by the opening and closing amount of m and, if necessary, by controlling the pressure for filling a small amount of inert gas into the vacuum container 34a. This is a technology to prevent the destruction.

[0006]

However, in the liquid crystal injection method and the injection device of the first prior art, a non-uniform portion 31 of the cell gap 30 is generated near the injection hole 26, and the display quality of the liquid crystal display device is deteriorated. There was a problem that it was.

FIG. 16 is a plan view of the liquid crystal panel 34f. FIG. 17 is a cell gap distribution diagram inside the liquid crystal panel 34f. The second prior art has a problem that the display quality of the liquid crystal display device is degraded because the nonuniform portion 31 of the cell gap as shown in FIG. 16 occurs. A cell gap inside the liquid crystal panel 34f can be measured by a measuring device capable of measuring the birefringence phase difference, for example, a gap measuring device TFM-12.
When measured at 0 (trade name, manufactured by Oak Manufacturing Co., Ltd.), as shown in the cell gap distribution chart of FIG. It turns out that has occurred. Further, as shown in FIG. 13, the injection device of the second prior art has only one cooling nitrogen supply system, and if it is used for extending the pressure recovery time, the cooling time becomes longer. Also, there is a problem that the gap becomes non-uniform.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a liquid crystal display device which can eliminate a non-uniform cell gap and can manufacture a liquid crystal panel having high display quality. It is to provide a liquid crystal injection method and a liquid crystal injection device.

[0009]

The gist of the first aspect of the present invention is a liquid crystal injection method for a liquid crystal display device capable of eliminating a non-uniform cell gap and manufacturing a liquid crystal panel with high display quality. A step of injecting liquid crystal into the liquid crystal panel, and a drying and cooling step of drying and cooling the liquid crystal panel before the liquid crystal injecting step, wherein the drying and cooling step includes a plurality of stop valves having different flow rates. A liquid crystal injection method for a liquid crystal display device, comprising a cooling step of supplying a cooling gas after high-temperature evacuation by controlling opening and closing in a predetermined order. The gist of claim 2 of the present invention is:
What is claimed is: 1. A method for injecting liquid crystal into a liquid crystal panel, comprising the steps of: injecting liquid crystal into the liquid crystal panel; and A drying / cooling step of drying / cooling, wherein the drying / cooling step controls the opening / closing of a plurality of variable flow rate stop valves having different flow rates in a predetermined order to cool gas after evacuation at high temperature. A liquid crystal injection method for a liquid crystal display device, comprising a cooling step of supplying a cooling nitrogen gas. According to a third aspect of the present invention, there is provided a method for injecting liquid crystal into a liquid crystal panel, the method comprising: eliminating a non-uniform cell gap; and manufacturing a liquid crystal panel having high display quality. And drying the liquid crystal panel before the liquid crystal injection step.
A drying / cooling step of cooling, wherein the drying / cooling step controls opening and closing of at least three stop valves having different flow rates in a predetermined order to supply a cooling gas after high-temperature evacuation. A liquid crystal injection method for a liquid crystal display device, comprising a cooling step. Claim 4 of the present invention
The gist of (1) is a method of injecting liquid crystal into a liquid crystal panel, comprising the steps of: injecting liquid crystal into a liquid crystal panel; A drying / cooling step of drying / cooling the liquid crystal panel before the step. A liquid crystal injection method for a liquid crystal display device includes a cooling step of supplying a cooling nitrogen gas as a cooling gas after evacuation. The gist of claim 5 of the present invention is that the drying / cooling step includes a step of transporting the liquid crystal panel evacuated to a high temperature in a panel drying chamber to a cooling / exhausting chamber; Opening a first stop valve, the flow rate of which has been set in advance by the first flow rate control valve in accordance with the time required for returning pressure to the first stop valve, in response to an open operation instruction signal for instructing the valve to open; A step of supplying a cooling gas whose flow rate has been adjusted from a cooling gas source to the cooling exhaust chamber by opening the valve and restoring the pressure in the cooling exhaust chamber from a vacuum state to an atmospheric pressure; A step of detecting an air pressure in the room and outputting an ON signal when the air pressure in the cooling exhaust chamber becomes atmospheric pressure;
Sending a closing operation instruction signal for instructing a closing operation of the valve to the first stop valve, and closing the first stop valve in response thereto;
Sending the opening operation instruction signal to the second stop valve, and opening the second stop valve in response to the signal; Opening the second stop valve for a set time and supplying it to the cooling and exhaust chamber; outputting the closing operation instruction signal to the second stop valve after the set time has elapsed; Closing the second stop valve, outputting the opening operation instruction signal to the third stop valve, and opening the third stop valve in response thereto; and cooling the liquid crystal panel to room temperature at high speed. Setting the cooling gas flow rate necessary for the third flow control valve, opening the third stop valve according to a preset time, and elapsing the time of opening the third stop valve. Later, the third stop valve is instructed to perform the closing operation. Outputs No., the third accordingly
5. The method according to claim 1, further comprising a step of closing the stop valve. According to a sixth aspect of the present invention, there is provided a liquid crystal injection device for a liquid crystal display device which can eliminate non-uniform cell gaps and manufacture a liquid crystal panel having high display quality. Means for drying and cooling the liquid crystal panel before the liquid crystal injecting means.
Cooling means, wherein the drying / cooling means includes means for controlling the opening and closing of a plurality of stop valves having different flow rates in a predetermined order to supply a cooling gas after high-temperature evacuation. The present invention resides in a liquid crystal injection device of a liquid crystal display device. According to another aspect of the present invention, there is provided a liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and manufacturing a liquid crystal panel having high display quality. And a drying / cooling means for drying / cooling the liquid crystal panel before the liquid crystal injecting means, wherein the drying / cooling means opens a plurality of variable flow stop valves having different flow rates in a predetermined order. A liquid crystal injection device for a liquid crystal display device, comprising means for performing a closed control to supply a cooling nitrogen gas as a cooling gas after evacuation at a high temperature; According to another aspect of the present invention, there is provided a liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and manufacturing a liquid crystal panel having high display quality. Means for drying and cooling the liquid crystal panel before the liquid crystal injecting means.
Cooling means, wherein the drying / cooling means opens and closes at least three stop valves having different flow rates in a predetermined order.
There is provided a liquid crystal injection device for a liquid crystal display device, comprising means for performing a closed control to supply a cooling gas after evacuation at a high temperature. According to a ninth aspect of the present invention, there is provided a liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and manufacturing a liquid crystal panel having high display quality. And a drying / cooling means for drying / cooling the liquid crystal panel before the liquid crystal injecting means, wherein the drying / cooling means comprises at least three variable stop valves having different flow rates in a predetermined order. A liquid crystal injection device for a liquid crystal display device comprising means for controlling opening and closing to supply a cooling nitrogen gas as a cooling gas after evacuation at a high temperature. The gist of claim 10 of the present invention is that at least one panel drying chamber for performing high-temperature evacuation of a liquid crystal panel, a cooling and evacuation chamber for performing cooling and high-evacuation of a liquid crystal panel, and a liquid crystal panel having a liquid crystal material. An in-line type having at least one injection chamber for performing an operation of injecting the liquid crystal material by contacting the liquid crystal material and a liquid crystal material defoaming chamber for removing air from the liquid crystal material before contacting the liquid crystal panel; Wherein the cooling and exhausting chamber includes at least three cooling nitrogen supply systems,
Each of the cooling nitrogen supply systems is configured such that the indoor pressure is detected by the pressure detector, and the opening and closing control is performed according to a signal from the pressure detector, and each of the cooling nitrogen supply systems is A stop valve for opening and closing the cooling gas, a flow control valve having a different flow rate set in advance, and a flow meter for measuring a flow rate of the cooling gas flowing into the cooling exhaust chamber are provided. A liquid crystal injection device for a liquid crystal display device according to any one of claims 6 to 9. The gist of claim 11 of the present invention is:
The liquid crystal panel evacuated to a high temperature in the panel drying chamber is conveyed to the cooling / exhausting chamber, and the cooling / exhausting chamber is controlled by the first flow rate control valve in advance according to the time required for returning the pressure from vacuum to atmospheric pressure. Is set in response to an opening operation instruction signal output from the control device to instruct the valve to open, and the opening operation of the first stop valve causes the flow rate from the cooling gas source to increase. The adjusted cooling gas is supplied to the cooling exhaust chamber to restore the pressure in the cooling exhaust chamber from a vacuum state to atmospheric pressure, and the pressure in the cooling exhaust chamber is detected by the pressure detector. When the pressure in the cooling exhaust chamber becomes atmospheric pressure, an ON signal is output from the pressure detector to the control device, and in response to the ON signal from the pressure detector, the control device instructs a valve closing operation. The closing operation instruction signal to Feed in order valve, the first response to this
The stop valve is closed, the opening operation instruction signal is sent to the second stop valve, and the second stop valve is opened in response to the signal, and the second flow control valve is previously set to a flow rate effective for pre-cooling the liquid crystal panel. The set flow rate is supplied to the cooling exhaust chamber, the second stop valve is opened for a time set in the control device, and after the set time elapses, the control device sends the second stop valve to the second stop valve. A closing operation instruction signal is output, the second stop valve is closed accordingly, the control device outputs the opening operation instruction signal to the third stop valve, and the third stop valve is accordingly operated. Opening, setting the flow rate of the cooling gas necessary for rapidly cooling the temperature of the liquid crystal panel to room temperature in the third flow control valve, and opening the third stop valve according to the time set in the control device. After the lapse of the time of the opening operation of the third stop valve, Claim control device outputs the closing command signal to the third stop valve, characterized in that said third stop valve is configured to close in response to this 1
0. The liquid crystal injecting device of the liquid crystal display device described in 0.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The features of each embodiment described below are as follows.
When drying and cooling the liquid crystal panel before injecting liquid crystal, cooling nitrogen after evacuation at high temperature is sequentially performed using three stop valves having different flow rates. And a liquid crystal injection apparatus having a cooling and exhaust chamber in which three nitrogen supply systems with variable flow rates are installed. Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First Embodiment) FIG. 1 is a schematic view of a liquid crystal injection device according to a first embodiment of the present invention, FIG. 2 is a detailed view of a cooling and exhaust chamber 4 of FIG. 1, and FIG. Figure 2
FIG. 4 is a pressure-temperature diagram in the cooling exhaust chamber 4 of FIG. Figure 1
2, the liquid crystal injection device of the present embodiment includes a first panel drying chamber 2 and a second panel drying chamber 3 or a single panel drying chamber for performing high-temperature vacuum evacuation of a liquid crystal panel.
A cooling / exhausting chamber 4 for cooling and evacuation of the liquid crystal panel and a first injection chamber 5 and a second injection chamber 6 for bringing the liquid crystal panel into contact with the liquid crystal material and actually performing an injection operation, or one injection chamber; In an in-line type liquid crystal injection device which has a liquid crystal material defoaming chamber 7 for bleeding air out of the liquid crystal material before coming into contact with the liquid crystal panel and continuously performs each operation, a cooling and exhaust chamber 4 is provided.
At least three cooling nitrogen supply systems # 12,1
5,16｝, {13,17,18}, {14,19,2
0 °, and each system is configured to be controlled to open and close by a control device 22 connected to the pressure detector 11.

In the liquid crystal injection apparatus of the present embodiment, a cassette containing a plurality of liquid crystal panels is loaded on the liquid crystal panel transport plate 1 at the loading standby place 9 and the first panel is dried by a program set in the control panel 10 in advance. Room 2, second
It is conveyed in order to the panel drying chamber 3 and evacuated to a high temperature.
After that, it is transported to the cooling / exhausting chamber 4 and is
In accordance with a program set in the control device 22 in FIG. 0, each of the stop valves 15, 17, and 19 is opened and closed, cooled at atmospheric pressure, evacuated again, and transferred to the first injection chamber 5, where the liquid crystal material is defoamed. At 7, the air comes into contact with the evacuated liquid crystal material, passes through the second injection chamber 6, and is carried out to the takeout standby place 8.

A cooling nitrogen supply system # 1 in the cooling exhaust chamber 4
2,15,16}, {13,17,18}, {14,1
For each of the 9, 20 mm stop valves 15, 17, 19,
Flow control valves 16, 1 in which different flow rates are set in advance
8 and 20 are connected to each other.
2,13,14 is installed, so that it is set and check the flow rate of the cooling nitrogen _{N 2.} The pressure detector 11 is a detector capable of detecting whether or not the inside of the cooling / exhausting chamber 4 is at atmospheric pressure. For example, a vacuum switch (trade name, manufactured by Anelva) is used.

In the control device 22 of the cooling / exhaust chamber 4, the slope of the rising portion of the pressure recovery curve 25 (shown by a solid line in FIG. 3) and the panel temperature transition curve 24 (shown by a broken line in FIG. 3) are shown. Notation) is controlled respectively.

FIG. 4 is a flowchart for explaining a first embodiment of a liquid crystal injection method (operation of the liquid crystal injection device) of the liquid crystal display device according to the present invention. Referring to FIG.
When the liquid crystal panel transport plate 1 on which the liquid crystal panels evacuated and evacuated at high temperature in the panel drying chamber 3 are transported to the cooling and exhaust chamber 4 (step S2), the flow rate is first set in advance by the flow rate control valve 20. Nitrogen supply system for cooling # 14,1
The 9, 20 ° stop valve 19 opens in response to the opening operation instruction signal output from the control device 22 and instructing the valve to open (step S4). At this time, the flow rate set in the flow rate control valve 20 is set so that the time required for the cooling exhaust chamber 4 to return from vacuum to atmospheric pressure is, for example, 18 minutes or more. Stop valve 19
Of the opening operation (step S4), and adjusted for cooling the nitrogen N ₂ flow from the cooling source of nitrogen 21 is supplied to the cooling exhaust chamber 4, pressure recovery from the vacuum state to the atmospheric pressure. When the atmospheric pressure is reached, an ON signal is output from the pressure detector 11 to the control device 22 (atmospheric pressure (ON) in step S6).

The control device 22 receives the ON signal from the pressure detector 11 and sends a stop operation instruction signal to the stop valve 19 to instruct the stop valve 19 to close the stop valve 19 (step S).
8). Subsequently, an opening operation instruction signal is sent to the stop valve 17, the stop valve 17 is opened (step S10), and the flow rate set in advance by the flow rate control valve 18 is supplied into the cooling and exhaust chamber 4. The flow rate set in the flow rate control valve 18 is set to about 100 to 500 l / min (liter per minute), which is effective for cooling the liquid crystal panel. The stop valve 17 performs an opening operation for the time set in the control device 22 (step S12). This time requires at least 10 seconds or more. When the set time has elapsed (YES in step S12), the control device 2
2 outputs a closing operation instruction signal to the stop valve 17, and the stop valve 17 is closed accordingly (step S14).

The control device 22 outputs an opening operation instruction signal to the stop valve 15, and the stop valve 15 opens in response to the signal (step S16). Here, the nitrogen flow rate required to rapidly cool the temperature of the liquid crystal panel to room temperature is 1000 to 20.
00 l / min is set in the flow control valve 16. Stop valve 1
5 performs the opening operation for the time set in the control device 22, and when a predetermined time has elapsed (YES in step S <b> 18), the control device 22 outputs a closing operation instruction signal to the stop valve 15. 15 closes.

A cooling exhaust chamber 4 in which a series of cooling operations has been completed.
Is continuously evacuated, and after a lapse of time set in the control panel 10, the liquid crystal panel is carried out to the first injection chamber 5 (Step S20).

FIG. 5 is a plan view of the liquid crystal panel, FIG. 6 is a sectional view taken along the line aa 'of the liquid crystal panel of FIG. 5, and shows a case where non-uniform portions are not generated. FIG. 3 is a cross-sectional view taken along line aa ′ of the liquid crystal panel, showing a case where an uneven portion is generated near an injection hole. According to the first embodiment, the non-uniform gap portion 31 (see FIG. 7) near the injection hole 26 of the liquid crystal panel shown in FIG. 5 is eliminated, and a uniform finish as shown in FIG. 6 is obtained. The reason will be described below with reference to FIGS. 5 to 7 and FIGS.

The liquid crystal panel of the first prior art shown in FIG.
As shown in FIGS. 10 to 12, a TFT substrate 27 for driving the liquid crystal material injected into the cell gap 30 from the injection hole 26.
And a counter substrate 28 typified by a color filter substrate, which is adhered to a seal 29 as shown in FIG. Bonding after bonding is a seal 29 at high temperature.
The TFT substrate 27 and the counter substrate 28 made of glass expand according to their respective linear expansion coefficients. Since the coefficient of linear expansion of the seal 29 is smaller than the coefficient of linear expansion of glass, the glass is cured while the glass is extended and the seal 29 is being extended, and when the curing is completed and the liquid crystal panel is completed. Has a swollen shape as shown in FIG.

Subsequently, when the liquid crystal panel is conveyed in a state shown in FIG. 10 to a first panel drying chamber (not shown) in the liquid crystal injection device shown in FIG. Since the pressure in the first panel drying chamber (not shown) rapidly decreases due to the generated liquid crystal panel internal pressure P2, FIG.
As shown in FIG. 1, a phenomenon that the liquid crystal panel expands further occurs. After that, the glass and the seal 29 that form the liquid crystal panel
Due to the difference in the coefficient of linear expansion of the second panel drying chamber P3, the shape of the panel is not flat (see FIGS. 10 and 11).
Processing is advanced. Conventionally, it has been transported to the cooling exhaust chamber P4 panel from the cooling nitrogen supply system of one system shown in FIG. 13, the cooling nitrogen _{N 2} of 1000~2000l / min for fast cooling is supplied. At that time, as shown in FIG. 12, the cooling / exhausting chamber P4 first reaches the atmospheric pressure P1, and the vicinity of the injection hole 26 communicating with the outside of the liquid crystal panel follows the atmospheric pressure P1.
It becomes 1. However, since the pressure inside the liquid crystal panel is vacuum, the cell gap 30 is reduced by being pushed by the atmospheric pressure P1 of the cooling / exhausting chamber P4, so that the cell gap 30 is not uniform near the injection hole 26 (see FIG. 9). Non-uniform part 31,
12) shown in FIG. Since the portion f shown in FIG. 12 is fixed to the seal 29, the distortion of the unstable portion e (non-uniform portion 31) remains as a non-uniform gap.

In the present embodiment, the pressure difference between the atmospheric pressure P1 and the liquid crystal panel internal pressure P2 shown in FIG. 12 is minimized by reducing the speed until the atmospheric pressure is restored, and the distortion is minimized by the preliminary cooling. Cooling nitrogen supply systems {12, 15, 16}, {13, 17, 18},
Since {14, 19, 20} is provided, the cell gap difference between the portion e (uneven portion 31) shown in FIG. 12 and other portions can be reduced, and as a result, the uneven cell gap 30 shown in FIG. The part 31 is eliminated, and a liquid crystal panel with good display quality as shown in FIG. 6 can be manufactured.

The liquid crystal injection method and apparatus of the present embodiment are different from the second prior art in which the flatness is maintained by suppressing the expansion of the liquid crystal panel 34f during evacuation. This is to prevent the gap non-uniformity in the vicinity of the injection hole 26 caused by cooling, maintain the flatness, and improve the display quality.

(Second Embodiment) FIG. 8 is a flowchart for explaining a second embodiment of the liquid crystal injection method (operation of the liquid crystal injection device) of the liquid crystal display device according to the present invention. In the first embodiment, the stop valve 19 is changed from “closed” to the stop valve 17.
The control to "open" is performed by the signal of the pressure detector 11, but the present embodiment is characterized in that the control is performed for a time set in the control device 22 (step S36). In addition, the three flow control valves 16, 18, 2 in the first embodiment.
Each set flow rate of 0 is also arbitrary. For example, the best flow rate can be selected from the experimental results shown in FIG. In addition, the liquid crystal panel without gap non-uniformity processed by the liquid crystal injection method and the liquid crystal injection apparatus of the present embodiment becomes flat like the gap measurement value 32 of a good product. The relationship between the occurrence of the gap non-uniformity in the vicinity of the injection hole 26 and the atmospheric pressure decompression time of the cooling and exhaust chamber 4 is derived from actual experimental results. As shown in FIG. It can be seen that almost no occurrence can be seen by shaking.

FIG. 8 is a flowchart for explaining a second embodiment of the liquid crystal injection method (operation of the liquid crystal injection device) of the liquid crystal display device according to the present invention. Referring to FIG.
When the liquid crystal panel transfer plate 1 on which the liquid crystal panels evacuated and evacuated at a high temperature in the panel drying chamber 3 are transferred to the cooling and exhaust chamber 4 (step S32), the flow rate is set in advance by the flow control valve 20 in advance. Nitrogen supply system for cooling # 14,
The 19, 20 ° stop valve 19 opens in response to an opening operation instruction signal output from the control device 22 and instructing the valve to open (step S34). At this time, the flow rate set in the flow rate control valve 20 is set so that the time required for the cooling exhaust chamber 4 to return from vacuum to atmospheric pressure is, for example, 18 minutes or more. The opening operation of the valve 19 (step S34), the adjusted cooling nitrogen N ₂ flow from the cooling source of nitrogen 21 is supplied to the cooling exhaust chamber 4, pressure recovery to atmospheric pressure from the vacuum state.

When the time set in the control device 22 is completed (YES in step S36), the control device 22 stops the stop valve 1
A closing operation instruction signal for instructing the closing operation of the valve is sent to 9 and the stop valve 19 is closed (step S38). Subsequently, an opening operation instruction signal is sent to the stop valve 17, the stop valve 17 is opened (step S40), and the flow rate set in advance by the flow rate control valve 18 is supplied into the cooling and exhaust chamber 4. The flow rate set to the flow rate control valve 18 is a value which is effective for the initial cooling of the liquid crystal panel.
It is about 0 to 500 l / min. The stop valve 17 performs an opening operation for the time set in the control device 22 (step S).
42). This time requires at least 10 seconds or more.
When the set time has elapsed (YE in step S42)
S), the control device 22 outputs a closing operation instruction signal to the stop valve 17, and the stop valve 17 is closed accordingly (step S44).

The control device 22 outputs an opening operation instruction signal to the stop valve 15, and the stop valve 15 opens in response to the signal (step S46). Here, the nitrogen flow rate required to rapidly cool the temperature of the liquid crystal panel to room temperature is 1000 to 20.
00 l / min is set in the flow control valve 16. Stop valve 1
5 performs the opening operation for the time set in the control device 22, and when a predetermined time has elapsed (YES in step S <b> 48), the control device 22 outputs a closing operation instruction signal to the stop valve 15. 15 closes.

The cooling exhaust chamber 4 in which a series of cooling operations has been completed
Is continuously evacuated, and after a lapse of time set in the control panel 10, the liquid crystal panel is carried out to the first injection chamber 5 (step S50).

FIG. 5 is a plan view of the liquid crystal panel, FIG. 6 is a cross-sectional view taken along the line aa 'of the liquid crystal panel of FIG. 5, and shows a case where non-uniform portions are not generated. FIG. 3 is a cross-sectional view taken along line aa ′ of the liquid crystal panel, showing a case where an uneven portion occurs near an injection hole. According to the second embodiment, FIG.
The non-uniform gap portion 31 (see FIG. 7) near the injection hole 26 of the liquid crystal panel shown in FIG. The reason will be described below with reference to FIGS. 5 to 7 and FIGS.

The liquid crystal panel of the first prior art shown in FIG.
As shown in FIGS. 10 to 12, a TFT substrate 27 for driving the liquid crystal material injected into the cell gap 30 from the injection hole 26.
And a counter substrate 28 typified by a color filter substrate, which is adhered to a seal 29 as shown in FIG. Bonding after bonding is a seal 29 at high temperature.
The TFT substrate 27 and the counter substrate 28 made of glass expand according to their respective linear expansion coefficients. Since the coefficient of linear expansion of the seal 29 is smaller than the coefficient of linear expansion of glass, the glass is cured while the glass is extended and the seal 29 is being extended, and when the curing is completed and the liquid crystal panel is completed. Has a swollen shape as shown in FIG.

Subsequently, if the liquid crystal panel is conveyed to the first panel drying chamber (not shown) in the liquid crystal injection device shown in FIG. 13 in the state shown in FIG. Since the pressure in the first panel drying chamber (not shown) rapidly decreases due to the generated liquid crystal panel internal pressure P2, FIG.
As shown in FIG. 1, a phenomenon that the liquid crystal panel expands further occurs. After that, the glass and the seal 29 that form the liquid crystal panel
Due to the difference in the coefficient of linear expansion of the second panel drying chamber P3, the shape of the panel is not flat (see FIGS. 10 and 11).
Processing is advanced. Conventionally, it has been transported to the cooling exhaust chamber P4 panel from the cooling nitrogen supply system of one system shown in FIG. 13, the cooling nitrogen _{N 2} of 1000~2000l / min for fast cooling is supplied. At that time, as shown in FIG. 12, the cooling / exhausting chamber P4 first reaches the atmospheric pressure P1, and the vicinity of the injection hole 26 communicating with the outside of the liquid crystal panel follows the atmospheric pressure P1.
It becomes 1. However, since the pressure inside the liquid crystal panel is vacuum, the cell gap 30 is reduced by being pushed by the atmospheric pressure P1 of the cooling / exhausting chamber P4, so that the cell gap 30 is not uniform near the injection hole 26 (see FIG. 9). Non-uniform part 31,
12) shown in FIG. Since the portion f shown in FIG. 12 is fixed to the seal 29, the distortion of the unstable portion e (non-uniform portion 31) remains as a non-uniform gap.

In the present embodiment, the pressure difference between the atmospheric pressure P1 and the liquid crystal panel internal pressure P2 in FIG. 12 is minimized by reducing the speed until the atmospheric pressure is restored, and the distortion is suppressed to a minimum by progressive cooling. Cooling nitrogen supply systems {12, 15, 16}, {13, 17, 18},
Since {14, 19, 20} is provided, the cell gap difference between the portion e (uneven portion 31) shown in FIG. 12 and other portions can be reduced, and as a result, the uneven cell gap 30 shown in FIG. The part 31 is eliminated, and a liquid crystal panel with good display quality as shown in FIG. 6 can be manufactured.

As described above, according to the second embodiment, three cooling nitrogen supply systems {12, 15, 16}, {13, 17, 1} even when the inside of the cooling exhaust chamber 4 is vacuum.
8}, {14, 19, 20} can be switched. After the cooling exhaust chamber 4 reaches the atmospheric pressure P1, three cooling nitrogen supply systems {12, 15, 16},
When switching between {13, 17, 18} and {14, 19, 20} is performed, the time according to the internal volume of the cooling / exhaust chamber 4 is determined in advance by experiments and set in the first embodiment. The same effect can be obtained.

It should be noted that the present invention is not limited to the above embodiments, and each embodiment can be appropriately modified within the scope of the technical idea of the present invention. Further, the number, position, shape, and the like of the constituent members are not limited to the above-described embodiment,
The number, position, shape, and the like suitable for carrying out the present invention can be obtained. In each drawing, the same components are denoted by the same reference numerals.

[0035]

The present invention minimizes the pressure difference between the atmospheric pressure and the internal pressure of the liquid crystal panel by reducing the speed until the atmospheric pressure is restored, and performs high-speed cooling for minimizing distortion by pre-cooling. Since three cooling nitrogen supply systems are provided, the cell gap difference between the non-uniform part and the other part can be reduced, and as a result, the non-uniform cell gap is eliminated.
It is possible to manufacture a liquid crystal panel having good display quality as shown in FIG.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a liquid crystal injection device according to a first embodiment of the present invention.

FIG. 2 is a detailed view of a cooling exhaust chamber of FIG. 1;

FIG. 3 is a pressure-temperature diagram in the cooling exhaust chamber of FIG. 2;

FIG. 4 is a flowchart for explaining a first embodiment of a liquid crystal injection method (operation of the liquid crystal injection device) of the liquid crystal display device according to the present invention.

FIG. 5 is a plan view of the liquid crystal panel.

6 is a cross-sectional view of the liquid crystal panel taken along the line aa ′ of FIG. 5, showing a case where non-uniform portions are not generated.

7 is a cross-sectional view taken along the line aa 'of the liquid crystal panel of FIG. 5, showing a case where an uneven portion occurs near an injection hole.

FIG. 8 is a flowchart for explaining a second embodiment of the liquid crystal injection method (operation of the liquid crystal injection device) of the liquid crystal display device according to the present invention.

FIG. 9 is a plan view of a general liquid crystal panel.

FIG. 10 is a cross-sectional view of the liquid crystal panel (atmospheric pressure = pressure inside the liquid crystal panel) of FIG. 9;

11 is a cross-sectional view of the liquid crystal panel of FIG. 9 (atmospheric pressure> pressure inside the liquid crystal panel).

12 is a cross-sectional view of the liquid crystal panel of FIG. 9 (atmospheric pressure <liquid crystal panel internal pressure).

FIG. 13 is a detailed view of a cooling and exhaust chamber of the liquid crystal injection device of the first prior art.

FIG. 14 is an apparatus schematic diagram for explaining a liquid crystal injection apparatus according to a second prior art.

15 is a characteristic diagram of the atmospheric pressure recovery time versus the non-uniform defect rate when a liquid crystal panel is manufactured using the liquid crystal injection device of FIG.

FIG. 16 is a plan view of a liquid crystal panel.

FIG. 17 is a diagram showing a cell gap distribution inside a liquid crystal panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Liquid crystal panel conveyance board 2 ... 1st panel drying room 3 ... 2nd panel drying room 4 ... Cooling exhaust room 5 ... 1st injection room 6 ... 2nd injection room 7 ... Liquid crystal material defoaming room 8 ... Unloading standby place 9 ... Stand-by place for charging 10... Control panel 11. Stop valve) 18 Flow control valve (second flow control valve) 19 Stop valve (first stop valve) 20 Flow control valve (first flow control valve) 21 Nitrogen source for cooling 22 Control device 23 N2 Injection nozzle 24 ... Panel temperature transition curve 25 ... Pressure recovery curve 26 ... Injection hole 27 ... TFT substrate 28 ... Counter substrate 29 ... Seal 30 ... Cell gap 31 ... Uneven portion 32 ... Good gap measurement value 33 ... Defective product Gap measurement value 34a ... Vacuum container 34b Precision displacement needle 34c ... liquid crystal material 34f ... liquid crystal panel 34m ... electric variable valve 34n ... pump 34p ... control box

Claims (11)

(57) [Claims] 1. A method for injecting liquid crystal into a liquid crystal panel, comprising: a step of injecting liquid crystal into a liquid crystal panel; and a step of injecting liquid crystal into the liquid crystal panel. A drying / cooling step of drying / cooling the liquid crystal panel before, wherein the drying / cooling step controls the opening / closing of a plurality of stop valves having different flow rates in a predetermined order, and cooling after high-temperature evacuation. A liquid crystal injection method for a liquid crystal display device, comprising a cooling step of supplying a supply gas. 2. A method for injecting liquid crystal into a liquid crystal panel, comprising: a step of injecting liquid crystal into a liquid crystal panel; and a step of injecting liquid crystal into the liquid crystal panel. Previously comprising a drying / cooling step of drying / cooling the liquid crystal panel, wherein the drying / cooling step controls the opening and closing of a plurality of variable flow rate stop valves having different flow rates in a predetermined order, thereby evacuation of high temperature. A liquid crystal injection method for a liquid crystal display device, comprising: a cooling step of supplying a cooling nitrogen gas as a cooling gas later. 3. A method for injecting liquid crystal into a liquid crystal panel, comprising: a step of injecting liquid crystal into a liquid crystal panel; and a step of injecting liquid crystal into the liquid crystal panel. A drying / cooling step of drying / cooling the liquid crystal panel before, wherein the drying / cooling step controls the opening and closing of at least three stop valves, each having a different flow rate, in a predetermined order, and after evacuation at a high temperature. A liquid crystal injection method for a liquid crystal display device, comprising a cooling step of supplying a cooling gas. 4. A method for injecting liquid crystal into a liquid crystal panel, comprising: a step of injecting liquid crystal into a liquid crystal panel; and a step of injecting liquid crystal into the liquid crystal panel. A drying / cooling step of drying / cooling the liquid crystal panel before, wherein the drying / cooling step controls the opening / closing of at least three variable flow rate stop valves having different flow rates in a predetermined order in a high-temperature vacuum. A liquid crystal injection method for a liquid crystal display device, comprising: a cooling step of supplying a cooling nitrogen gas, which is a cooling gas after exhausting. 5. The drying and cooling step includes a step of transporting the liquid crystal panel evacuated to a high temperature in a panel drying chamber to a cooling and exhaust chamber, and a time required for the cooling and exhaust chamber to return from vacuum to atmospheric pressure. Opening a first stop valve, the flow rate of which has been previously set by the first flow control valve in response to an opening operation instruction signal for instructing the valve to open, and opening the first stop valve for cooling by the opening operation of the first stop valve. A step of supplying a cooling gas whose flow rate has been adjusted from a gas source to the cooling exhaust chamber and restoring the pressure in the cooling exhaust chamber from a vacuum state to atmospheric pressure, and detecting the air pressure in the cooling exhaust chamber, Outputting an ON signal when the pressure in the cooling / exhaust chamber becomes the atmospheric pressure; and receiving the ON signal, sending a closing operation instruction signal for instructing a closing operation of the valve to the first stop valve. Depending on the first
A step of closing the stop valve, a step of sending the opening operation instruction signal to the second stop valve, and a step of opening the second stop valve in response thereto;
A step of opening the second stop valve for a preset time to supply the flow rate set by the flow rate control valve to the cooling and exhaust chamber, and closing the second stop valve after the lapse of the set time. Outputting an instruction signal and closing the second stop valve in response thereto; outputting the opening operation instruction signal to a third stop valve and opening the third stop valve in response thereto; and a liquid crystal panel. Setting a flow rate of a cooling gas necessary for rapidly cooling the temperature to room temperature to a third flow control valve; opening the third stop valve according to a preset time; A step of outputting the closing operation instruction signal to the third stop valve after a lapse of a time of the opening operation of the third stop valve, and closing the third stop valve in response thereto. 4. The liquid crystal display device according to any one of the items 4. The liquid crystal injection method of. 6. A liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and capable of manufacturing a liquid crystal panel having high display quality, comprising: means for injecting liquid crystal into the liquid crystal panel; Drying / cooling means for drying / cooling the liquid crystal panel before, wherein the drying / cooling means controls opening / closing of a plurality of stop valves having different flow rates in a predetermined order to cool after evacuation at a high temperature. A liquid crystal injection device for a liquid crystal display device, comprising: means for supplying a supply gas. 7. A liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and producing a liquid crystal panel with high display quality, comprising: means for injecting liquid crystal into a liquid crystal panel; Drying / cooling means for drying / cooling the liquid crystal panel before, wherein the drying / cooling means controls the opening / closing of a plurality of variable flow rate stop valves having different flow rates in a predetermined order to perform high-temperature evacuation. A liquid crystal injection device for a liquid crystal display device, comprising: means for supplying a cooling nitrogen gas, which is a later cooling gas. 8. A liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and capable of manufacturing a liquid crystal panel having good display quality, comprising: means for injecting liquid crystal into the liquid crystal panel; Drying / cooling means for drying / cooling the liquid crystal panel before, wherein the drying / cooling means controls opening / closing of at least three stop valves having different flow rates in a predetermined order, and after evacuation at a high temperature. A liquid crystal injection device for a liquid crystal display device, comprising: means for supplying a cooling gas. 9. A liquid crystal injection device for a liquid crystal display device capable of eliminating a non-uniform cell gap and producing a liquid crystal panel with high display quality, comprising: means for injecting liquid crystal into a liquid crystal panel; Drying / cooling means for drying / cooling the liquid crystal panel in advance, wherein the drying / cooling means controls at least three variable stop valves having different flow rates, respectively, to open and close in a predetermined order to perform high-temperature vacuum. A liquid crystal injection device for a liquid crystal display device, comprising: means for supplying a cooling nitrogen gas which is a cooling gas after exhaust. 10. An at least one panel drying chamber for evacuating a liquid crystal panel at a high temperature, a cooling / evacuating chamber for cooling and evacuation of the liquid crystal panel, and an operation of injecting the liquid crystal material by bringing the liquid crystal panel into contact with the liquid crystal material. An in-line type liquid crystal injection device having at least one injection chamber for performing the following operations and a liquid crystal material defoaming chamber for evacuating the liquid crystal material before contacting the liquid crystal panel, and performing each operation continuously, The cooling exhaust chamber includes at least three cooling nitrogen supply systems, and each of the cooling nitrogen supply systems is controlled to open and close in accordance with a signal from the pressure detector, while a pressure detector detects a room pressure. Each of the cooling nitrogen supply systems includes a stop valve that opens and closes a cooling gas, a flow control valve that is set to a different flow rate in advance, and a flow through the cooling exhaust chamber. Claim, characterized in that it comprises a flow meter for measuring the flow rate of the uncooled gas 6-9
The liquid crystal injection device for a liquid crystal display device according to any one of the above. 11. A liquid crystal panel which has been evacuated to a high temperature in the panel drying chamber is conveyed to the cooling / exhausting chamber, and the cooling / exhausting chamber is first set in advance in accordance with a time required for returning the pressure from vacuum to atmospheric pressure. The first stop valve, the flow rate of which is set by the flow control valve, opens in response to an open operation instruction signal output from the control device and instructs an open operation of the valve. A cooling gas whose flow rate is adjusted from a supply gas source is supplied to the cooling / exhausting chamber, and the pressure in the cooling / exhausting chamber is restored from a vacuum state to atmospheric pressure.The pressure in the cooling / exhausting chamber is measured by the pressure detector. Detecting and outputting an ON signal from the pressure detector to the control device when the pressure in the cooling / exhaust chamber becomes the atmospheric pressure, and upon receiving the ON signal from the pressure detector, the control device Action to instruct the closing action of The first stop valve is sent to the first stop valve, the first stop valve is closed in response thereto, the open operation instruction signal is sent to the second stop valve, and the second stop valve is opened in response thereto, Preliminarily set the effective flow rate for cooling the liquid crystal panel
Supplying the flow rate set by the flow rate control valve into the cooling / exhaust chamber; opening the second stop valve for a time set in the control device; 2
The second stop valve is closed in response to the closing operation instruction signal, and the control device outputs the opening operation instruction signal to the third stop valve. The three-stop valve is opened, and the flow rate of the cooling gas required to rapidly cool the temperature of the liquid crystal panel to room temperature is set in the third flow rate control valve, and the third flow rate control valve is set in accordance with the time set in the control device. The control valve outputs the closing operation instruction signal to the third stop valve after a lapse of a time of the opening operation of the third stop valve, and the third stop valve is closed accordingly. The liquid crystal injection device for a liquid crystal display device according to claim 10, wherein the liquid crystal injection device is configured.