JP3003475B2 - filter - Google Patents
filterInfo
- Publication number
- JP3003475B2 JP3003475B2 JP5263386A JP26338693A JP3003475B2 JP 3003475 B2 JP3003475 B2 JP 3003475B2 JP 5263386 A JP5263386 A JP 5263386A JP 26338693 A JP26338693 A JP 26338693A JP 3003475 B2 JP3003475 B2 JP 3003475B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- fiber
- carbon
- dust
- fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000835 fiber Substances 0.000 claims description 65
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 27
- 239000011247 coating layer Substances 0.000 claims description 19
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 19
- 229910052799 carbon Inorganic materials 0.000 claims description 18
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 16
- 229910002804 graphite Inorganic materials 0.000 claims description 9
- 239000010439 graphite Substances 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 4
- 238000005304 joining Methods 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 41
- 239000007789 gas Substances 0.000 description 31
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 239000004745 nonwoven fabric Substances 0.000 description 5
- 239000003365 glass fiber Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 238000011001 backwashing Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001026 inconel Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000009628 steelmaking Methods 0.000 description 2
- 210000001170 unmyelinated nerve fiber Anatomy 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ゴミ焼却炉の出口排ガ
スやボイラ出口排ガス、製鉄用高炉の炉頂圧タービン流
入ガス又は高炉排ガスなどの高温ガス中のダストを除去
するための除塵用フィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter for removing dust in high-temperature gas such as exhaust gas from a refuse incinerator, exhaust gas from a boiler, gas flowing into a furnace top pressure turbine of a steelmaking blast furnace, or exhaust gas from a blast furnace. About.
【０００２】[0002]
【従来の技術】従来、各種排ガスのダスト除去用フィル
タとしては、ガラス繊維製バッグフィルタ、金属製バッ
グフィルタ、ハニカム構造セラミックフィルタ、セラミ
ックチューブフィルタなどが提供されている。また、化
学蒸着法（ＣＶＤ法）によるセラミック製フィルタも開
発されつつある。2. Description of the Related Art Conventionally, as a filter for removing dust from various kinds of exhaust gas, a bag filter made of glass fiber, a bag filter made of metal, a ceramic filter having a honeycomb structure, a ceramic tube filter and the like have been provided. Further, ceramic filters formed by a chemical vapor deposition method (CVD method) are being developed.
【０００３】ところで、ゴミ焼却炉出口排ガス等の除塵
処理において、該排ガスを冷却することなく高温のまま
除塵を行なえるならば、排ガスを除塵後、熱交換を行な
ってボイラで高温、高圧の蒸気を得、これを発電に用い
ることにより熱エネルギーを電気エネルギーとして有効
に回収することができる。従って、排熱回収・有効利用
の観点からは、排ガスを冷却することなく除塵する必要
があり、このため除塵用フィルタとしては、耐熱温度が
高く、１０００℃以上での使用が可能であることが望ま
れる。[0003] By the way, if it is possible to remove dust at a high temperature without cooling the exhaust gas in the dust removal treatment of the exhaust gas from a garbage incinerator, heat is exchanged after removing the exhaust gas, and high-temperature, high-pressure steam is passed through a boiler. By using this for power generation, heat energy can be effectively recovered as electric energy. Therefore, from the viewpoint of exhaust heat recovery and effective utilization, it is necessary to remove dust without cooling the exhaust gas. Therefore, the dust removal filter has a high heat-resistant temperature and can be used at 1000 ° C. or higher. desired.
【０００４】また、ゴミ焼却炉の排ガス中には腐食性の
ＨＣｌやＣｌ2 が含まれているため、除塵用フィルタと
しては、耐熱温度が高いことに加えて、高温での耐食性
に優れることが望まれる。[0004] Further, since the corrosive HCl and Cl 2 are contained in the exhaust gas of the garbage incinerator, the filter for dust removal is not only high in heat resistance temperature but also excellent in corrosion resistance at high temperature. desired.
【０００５】更に、処理効率の向上、除塵器の小型化の
ためには、圧力損失が小さいこと及びフィルタの厚さが
薄いことなどが望まれる。Further, in order to improve the processing efficiency and reduce the size of the dust remover, it is desired that the pressure loss is small and the thickness of the filter is small.
【０００６】即ち、圧力損失が大きい場合には、圧力損
失を小さくして除塵効率を高めるために排ガスの通過流
速を低くする必要があるが、通過流速を小さくするため
には、除塵器を大型化せざるを得ない。That is, when the pressure loss is large, it is necessary to lower the passage velocity of the exhaust gas in order to reduce the pressure loss and increase the dust removal efficiency. I have to change.
【０００７】また、肉厚のフィルタは、それ自体が嵩高
くなるため、除塵器の大型化につながる。[0007] Further, the thick filter itself becomes bulky, which leads to an increase in the size of the dust remover.
【０００８】[0008]
【発明が解決しようとする課題】従来のフィルタのう
ち、ガラス繊維製バッグフィルタは、最高使用温度が２
５０〜３００℃程度であり、このバッグフィルタを高温
排ガスの除塵に用いるためには、高温排ガスを冷却する
必要があることから、排熱回収・有効利用の面で不利で
ある。Among the conventional filters, the bag filter made of glass fiber has a maximum operating temperature of two.
The temperature is about 50 to 300 ° C., and in order to use this bag filter for dust removal of high-temperature exhaust gas, it is necessary to cool the high-temperature exhaust gas, which is disadvantageous in terms of exhaust heat recovery and effective utilization.
【０００９】金属（インコネル）製バッグフィルタで
は、最高使用温度が８７０℃と、ガラス繊維製バッグフ
ィルタよりも高いものの、耐食性の面で問題があり、腐
食性ガスの除塵には使用し得ないという欠点がある。Although the maximum operating temperature of a metal (Inconel) bag filter is 870 ° C., which is higher than that of a glass fiber bag filter, it has a problem in corrosion resistance and cannot be used for dust removal of corrosive gas. There are drawbacks.
【００１０】ハニカム構造セラミックフィルタでは、最
高使用温度は６００℃とさほど高くない上に、焼結セラ
ミック製であるために、肉厚で、しかも、気孔率が小さ
いために圧力損失が大きいという欠点がある。セラミッ
クチューブフィルタは、最高使用温度が９００〜１００
０℃と高いが、焼結セラミック製であるため、上記と同
様に、肉厚で圧力損失が大きいという欠点がある。[0010] Honeycomb-structured ceramic filters have the drawback that the maximum operating temperature is not so high as 600 ° C, and because they are made of sintered ceramic, they are thick and have a low porosity, so that pressure loss is large. is there. Ceramic tube filters have a maximum operating temperature of 900 to 100
Although it is as high as 0 ° C., since it is made of sintered ceramic, it has the disadvantage that it is thick and has a large pressure loss as described above.
【００１１】しかも、既存のセラミックフィルタはＳｉ
Ｏ2 やＡｌ2 Ｏ3 製とされており、高温で腐食の激しい
排ガスの除塵には対応し得ない。Moreover, the existing ceramic filter is Si
Since it is made of O 2 or Al 2 O 3 , it cannot cope with dust removal of exhaust gas which is highly corrosive at high temperatures.
【００１２】また、現在開発中のＣＶＤ法によるセラミ
ック製フィルタでは、肉厚で、圧力損失が大きく、しか
も高コストであるという欠点がある。Further, the ceramic filter manufactured by the CVD method, which is currently under development, has disadvantages in that it is thick, has a large pressure loss, and is expensive.
【００１３】前述の如く、除塵用フィルタ、特にゴミ焼
却排ガスの除塵用フィルタとしては、 １０００℃以上の高温でも使用できる。 Ｃｌ2 やＨＣｌを含有する腐食性雰囲気において、
かつ、高温において使用できる。 薄肉で、圧力損失が小さく、除塵器の小型化が可能
である。 といった条件が要求されるが、従来、このような条件を
すべて満たすフィルタは提供されていないのが実情であ
る。As described above, a filter for removing dust, particularly a filter for removing exhaust gas from refuse incineration, can be used even at a high temperature of 1000 ° C. or more. In a corrosive atmosphere containing Cl 2 or HCl,
And it can be used at high temperatures. It is thin, has low pressure loss, and can be miniaturized. Such a condition is required, but a filter that satisfies all such conditions has not been provided so far.
【００１４】本発明は上記従来の問題点を解決し、高温
の腐食性雰囲気においても使用可能な高い耐熱性と耐食
性を有し、しかも、圧力損失が小さく薄肉の除塵用フィ
ルタを提供することを目的とする。The present invention solves the above-mentioned conventional problems and provides a thin filter for dust removal which has high heat resistance and corrosion resistance which can be used even in a high-temperature corrosive atmosphere, and has a small pressure loss and a small thickness. Aim.
【００１５】[0015]
【課題を解決するための手段】請求項１のフィルタは、
炭化珪素（ＳｉＣ）、窒化珪素（Ｓｉ３Ｎ４）、アルミ
ナ（Ａｌ２Ｏ３）、アルミナ・シリカ（Ａｌ２Ｏ３・Ｓ
ｉＯ２）及び炭素（Ｃ）よりなる群から選ばれる１種又
は２種以上の繊維で構成される繊維成形体の該繊維表面
に、炭化珪素（ＳｉＣ）、窒化珪素（Ｓｉ３Ｎ４）、ア
ルミナ（Ａｌ２Ｏ３）及び炭素（Ｃ）よりなる群から選
ばれる１種又は２種以上の気相蒸着法によるコーティン
グ層を形成してなるフィルタであって、前記繊維成形体
は、該コーティング層形成に先立ちフィルタ表面側に相
当する面が起毛処理されており、かつ、繊維を炭素又は
黒鉛で接合してなることを特徴とする。According to the first aspect of the present invention, there is provided a filter comprising:
Silicon carbide (SiC), silicon nitride (Si 3 N 4 ), alumina (Al 2 O 3 ), alumina silica (Al 2 O 3 .S)
silicon carbide (SiC), silicon nitride (Si 3 N 4 ), silicon carbide (SiC), silicon nitride (Si 3 N 4 ), on the fiber surface of a fiber molded body composed of one or more fibers selected from the group consisting of iO 2 ) and carbon (C). alumina (Al 2 O 3) and a one or more filter obtained by forming a coating layer by vapor deposition is selected from the group consisting of carbon (C), the fiber molded article, the coating Prior to layer formation, the surface corresponding to the filter surface side is brushed , and the fibers are made of carbon or
It is characterized by being joined by graphite .
【００１６】[0016]
【００１７】請求項２のフィルタは、請求項１のフィル
タにおいて、繊維の体積含有率が１〜１５％、コーティ
ング層の体積含有率が２〜１５％、繊維を接合する炭素
又は黒鉛の体積含有率が２〜２０％、空孔の体積含有率
が５０〜９５％であることを特徴とする。According to a second aspect of the present invention, there is provided the filter according to the first aspect , wherein the volume content of the fiber is 1 to 15%, the volume content of the coating layer is 2 to 15%, and the volume content of the carbon or graphite for bonding the fiber. The ratio is 2 to 20%, and the volume content of pores is 50 to 95%.
【００１８】以下に本発明を、本発明のフィルタの製造
方法に従って詳細に説明する。Hereinafter, the present invention will be described in detail according to the filter manufacturing method of the present invention.
【００１９】本発明のフィルタを製造するには、まず、
ＳｉＣ繊維，Ｓｉ3 Ｎ4 繊維，Ａｌ2 Ｏ3 繊維，Ａｌ2
Ｏ3 ・ＳｉＯ2 繊維又はＣ繊維を用いて繊維成形体を製
造する。To manufacture the filter of the present invention, first,
SiC fiber, Si 3 N 4 fiber, Al 2 O 3 fiber, Al 2
A fiber molded body is manufactured using O 3 · SiO 2 fiber or C fiber.
【００２０】この繊維成形体は、 (i) 長さ０．５ｍｍ以上、好ましくは１〜５ｍｍの単
繊維の不織布状成形体 (ii) 連続単繊維又は単繊維を集束したヤーンの不織布
状成形体 (iii) 上記(i) の短繊維と(ii)の連続単繊維又はヤーン
の混合繊維の不織布状成形体 とすることができる。なお、上記(i) 〜(iii) におい
て、繊維径は５〜２０μｍ程度であることが好ましい。The fibrous molded article is (i) a non-woven fabric formed of a single fiber having a length of 0.5 mm or more, preferably 1 to 5 mm. (Ii) a non-woven fabric formed of a continuous single fiber or a yarn obtained by bundling single fibers. (iii) A nonwoven fabric formed of the short fibers of (i) and the continuous single fibers of (ii) or the mixed fibers of yarns can be provided. In the above (i) to (iii), the fiber diameter is preferably about 5 to 20 μm.
【００２１】このような繊維成形体は、例えば、繊維を
樹脂中に分散させたものを型に流し込み、硬化させた
後、樹脂を炭化（又は黒鉛化）させることにより製造す
ることができる。この場合、樹脂としてはフェノール樹
脂、エポキシ樹脂、ポリビニルアルコール等を用いるこ
とができ、繊維の分散に当っては必要に応じて更に有機
溶媒又は水を用いる。Such a fiber molded article can be produced, for example, by pouring a resin in which fibers are dispersed in a resin, curing the resin, and then carbonizing (or graphitizing) the resin. In this case, a phenol resin, an epoxy resin, polyvinyl alcohol, or the like can be used as the resin, and an organic solvent or water is further used as necessary for dispersion of the fibers.
【００２２】このようにして得られる繊維成形体は、樹
脂の炭化又は黒鉛化により生成した炭素又は黒鉛が繊維
同志の接点を接合してなる不織布状の繊維成形体であ
る。The fiber molded body obtained in this manner is a nonwoven fabric molded body in which carbon or graphite formed by carbonizing or graphitizing a resin is joined to the contacts of the fibers.
【００２３】また、本発明に係る繊維成形体は、繊維の
集合体表面にＣＶＤ法により炭素を析出させることによ
り、析出させた炭素で繊維同志の接点を接合して製造す
ることもできる。The fiber molded article according to the present invention can also be manufactured by depositing carbon on the surface of the aggregate of fibers by a CVD method, and joining the contacts of the fibers with the deposited carbon.
【００２４】本発明に係る繊維成形体の製造方法は何ら
上記方法に限定されるものではないが、本発明では、炭
素又は黒鉛で繊維を接合するため、次工程のＣＶＤコー
ティングに到るまでのハンドリングに十分に耐え、しか
も空孔率の大きい多孔質繊維成形体を容易に製造するこ
とができる。The production method of the present invention to such a fibrous form but not in any way limited to the above method, the present invention, for joining the fibers with carbon or graphite, up to the CVD coating of the next step It is possible to easily produce a porous fiber molded body having sufficient porosity that can withstand handling sufficiently.
【００２５】なお、本発明に係る繊維成形体は、長繊維
の織布であっても良い。The fiber molded article according to the present invention may be a long-fiber woven fabric.
【００２６】本発明のフィルタは、このようにして得ら
れる繊維成形体の繊維表面に、所定割合の空孔が残存す
るようにＳｉＣ，Ｓｉ3 Ｎ4 ，Ａｌ2 Ｏ3 又はＣのＣＶ
Ｄコーティング層を形成してなるものであるが、このＣ
ＶＤコーティング層の形成に先立ち、繊維成形体を起毛
処理することに特徴を有する。The filter according to the present invention has a CV of SiC, Si 3 N 4 , Al 2 O 3 or C such that a predetermined ratio of pores remains on the fiber surface of the fiber molded product thus obtained.
D coating layer is formed.
Prior to the formation of the VD coating layer, it is characterized in that the fiber molded body is raised.
【００２７】この起毛処理の方法には特に制限はない
が、例えば次の（ａ）又は（ｂ）の方法を採用すること
ができる。There is no particular limitation on the method of raising the hair. For example, the following method (a) or (b) can be adopted.
【００２８】（ａ） 前述の繊維分散樹脂液を硬化、炭
化して繊維成形体を製造するに当り、硬化後の硬化体表
面をサンドペーパー、ワイヤブラシ等でこすって擦過さ
せる。(A) When the above-mentioned fiber-dispersed resin solution is cured and carbonized to produce a fiber molded body, the surface of the cured cured body is rubbed and rubbed with a sandpaper, a wire brush or the like.
【００２９】（ｂ） 前述の繊維分散樹脂液を硬化、炭
化して繊維成形体を製造するに当り、炭化後の成形体表
面をサンドペーパー、ワイヤブラシ等でこすって擦過さ
せる。(B) When the fiber-dispersed resin solution is cured and carbonized to produce a fiber molded body, the surface of the carbonized molded body is rubbed and rubbed with sandpaper, a wire brush or the like.
【００３０】なお、起毛処理はフィルタとして除塵処理
に用いる際に除塵処理面となる側、即ち、被処理ガスの
流入側の表面に対して行なう。The brushing process is performed on the side which becomes the dust removing surface when the filter is used in the dust removing process, that is, the surface on the inflow side of the gas to be treated.
【００３１】本発明のフィルタは、このように起毛処理
を施した繊維成形体にＣＶＤコーティング層を形成する
ことにより製造されるが、本発明のフィルタにおいて、
繊維成形体を構成する繊維、この繊維の接合のための炭
素又は黒鉛、上記ＣＶＤコーティング層及び空孔の体積
含有率は、その除塵効率、圧力損失、耐熱性、機械的特
性、耐久性等の面から、下記の範囲であることが好まし
い。The filter of the present invention is produced by forming a CVD coating layer on the fiber molded body subjected to the raising treatment as described above.
The fibers constituting the fiber molded body, the carbon or graphite for bonding the fibers, the volume content of the above-mentioned CVD coating layer and the pores, such as dust removal efficiency, pressure loss, heat resistance, mechanical properties, durability, etc. From the viewpoint, it is preferable to be in the following range.
【００３２】繊維：１〜１５％ 炭素又は黒鉛：２〜２０％ ＣＶＤコーティング層：２〜１５％ 空孔：５０〜９５％ このような本発明のフィルタの形状としては特に制限は
ないが、圧力損失を小さくし、かつ、フィルタの逆洗
（堆積ダストの除去）時の圧力に対する耐久性を高める
ために、次の（Ａ）〜（Ｃ）の形状とするのが好まし
い。Fiber: 1 to 15% Carbon or graphite: 2 to 20% CVD coating layer: 2 to 15% Voids: 50 to 95% The shape of the filter of the present invention is not particularly limited. The following shapes (A) to (C) are preferable in order to reduce the loss and increase the durability against pressure during backwashing (removal of accumulated dust) of the filter.
【００３３】（Ａ） 有底又は無底の円筒形状 （Ｂ） 有底又は無底の角筒形状 （Ｃ） 上記（Ａ）又は（Ｂ）で長さ方向にテーパがつ
いたもの（一端側と他端側で横断面の大きさが異なるも
の） なお、フィルタの肉厚ｔは、圧力損失、耐逆洗圧力の面
から、フィルタの半径Ｒに対して、√（Ｒ／３０）＜ｔ
＜１５ｍｍであることが好ましい。ここで、フィルタの
半径Ｒとは、円筒形フィルタ（Ａ）ではその内半径（真
円でない場合には平均内半径）、角筒形フィルタ（Ｂ）
では内壁の外接円半径、テーパ付フィルタ（Ｃ）では上
記（Ａ），（Ｂ）における半径において、大きい方の半
径をさす。(A) Bottomed or non-bottomed cylindrical shape (B) Bottomed or non-bottomed rectangular cylindrical shape (C) Tapered lengthwise in (A) or (B) above (one end side) And the other end side has a different cross-sectional size). The wall thickness t of the filter is, from the viewpoint of pressure loss and anti-backwash pressure, relative to the radius R of the filter, √ (R / 30) <t
Preferably, it is <15 mm. Here, the radius R of the filter means the inner radius of the cylindrical filter (A) (the average inner radius if it is not a perfect circle), the rectangular cylindrical filter (B)
In this case, the radius of the circumscribed circle of the inner wall and the radius of the tapered filter (C) in (A) and (B) above are the larger ones.
【００３４】なお、本発明のフィルタにおいて、繊維成
形体を構成する繊維材質と、ＣＶＤコーティング層の材
質とは同一であっても異なっていても良いが、両者を同
一材質とした場合には、熱膨張差による応力の発生が防
止され、より高温での使用に有利である。In the filter of the present invention, the fiber material constituting the fiber molded body and the material of the CVD coating layer may be the same or different. The generation of stress due to the difference in thermal expansion is prevented, which is advantageous for use at higher temperatures.
【００３５】本発明のフィルタは、ゴミ焼却炉の出口排
ガスやボイラ出口排ガスのダスト除去、製鉄用高炉の炉
頂圧タービン流入ガスのダスト除去、高炉排ガスのダス
ト除去等、高温、腐食性ガスの除塵に極めて有効に使用
することができる。The filter of the present invention is useful for removing high-temperature, corrosive gases such as dust from exhaust gas from the garbage incinerator and exhaust gas from the boiler, dust from the gas flowing into the furnace top pressure turbine of a blast furnace for steelmaking, and dust from the blast furnace exhaust gas. It can be used very effectively for dust removal.
【００３６】[0036]
【作用】本発明のフィルタは、ＳｉＣ繊維，Ｓｉ3 Ｎ4
繊維，Ａｌ2 Ｏ3 繊維，Ａｌ2Ｏ3 ・ＳｉＯ2 繊維又は
Ｃ繊維の繊維成形体の繊維表面に、ＳｉＣ，Ｓｉ3
Ｎ4，Ａｌ2 Ｏ3 又はＣのＣＶＤコーティング層を形成
してなるものであり、高耐熱性材料のみで構成されるこ
とから、１０００℃以上の高温でも使用可能な優れた耐
熱性を備える。The filter of the present invention is composed of SiC fiber, Si 3 N 4
Fibers, the Al 2 O 3 fibers, Al 2 O 3 · SiO 2 fibers or fiber surface of the fiber molded body of C fibers, SiC, Si 3
It is formed by forming a CVD coating layer of N 4 , Al 2 O 3 or C, and is made of only a high heat-resistant material, so that it has excellent heat resistance that can be used even at a high temperature of 1000 ° C. or more.
【００３７】また、繊維成形体を基体とするため、薄肉
でも十分な機械的強度を備え、空孔率が大きく、圧力損
失の小さいフィルタとすることができる。しかも、この
繊維成形体の表面を起毛処理してあるため、圧力損失を
より一層小さくすることができる。このため、被処理ガ
スの通過速度を大きくして除塵装置の小型化、誘引排風
ファンの小型化（所要動力の低減）を図ることができ
る。Further, since the fibrous formed body is used as the base, a filter having a sufficient mechanical strength even with a small thickness, a large porosity and a small pressure loss can be obtained. In addition, since the surface of the fiber molded body is raised, the pressure loss can be further reduced. For this reason, it is possible to increase the passing speed of the gas to be treated, thereby reducing the size of the dust removing device and the induction exhaust fan (reducing the required power).
【００３８】更に、表面にＣＶＤ法による高純度で高耐
食性、高耐熱性のコーティング層が形成されているた
め、高温におけるＨＣｌ等の腐食性雰囲気においても十
分に使用可能である。Further, since a coating layer having high purity, high corrosion resistance and high heat resistance is formed on the surface by the CVD method, it can be sufficiently used even in a corrosive atmosphere such as HCl at a high temperature.
【００３９】加えて、繊維成形体の繊維が炭素又は黒鉛
で接合されているため、ＣＶＤコーティング層形成工程
におけるハンドリングが容易となる。In addition, the fiber of the fiber molded body is made of carbon or graphite.
, The handling in the CVD coating layer forming step is facilitated.
【００４０】請求項２のフィルタによれば、圧力損失が
小さく、取り扱い性に優れ、しかも逆洗時に加えられる
圧力パルスの繰り返しや、熱や熱衝撃の繰り返しにも十
分に耐え得るフィルタが提供される。According to the filter of the second aspect , there is provided a filter which has a small pressure loss, is excellent in handleability, and can sufficiently withstand the repetition of the pressure pulse applied at the time of backwashing and the repetition of heat and thermal shock. You.
【００４１】[0041]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【００４２】実施例１ 長さ２ｍｍ，直径８．５μｍのＳｉＣ繊維をアセトン：
フェノール樹脂＝２：１（重量比）の混合液中に分散さ
せ、これを型に流し込んでオートクレーブ処理により硬
化させた。この硬化体の表面を＃１２０のサンドペーパ
ーで擦過した後、窒素ガス雰囲気中にて９００℃で加熱
して樹脂を炭化させた。このようにして得られたＳｉＣ
繊維成形体の繊維表面にＣＶＤ法によりＳｉＣコーティ
ング層を形成して、第１図に示す断面形状及び寸法の、
フランジ部１Ａ，円筒部１Ｂ，底面部１Ｃよりなる円筒
形フィルタ１を製造した。Example 1 SiC fiber having a length of 2 mm and a diameter of 8.5 μm was treated with acetone:
It was dispersed in a mixture of phenol resin = 2: 1 (weight ratio), poured into a mold, and cured by autoclaving. After rubbing the surface of the cured product with # 120 sandpaper, the resin was carbonized by heating at 900 ° C. in a nitrogen gas atmosphere. SiC thus obtained
An SiC coating layer is formed on the fiber surface of the fiber molded body by a CVD method, and the cross-sectional shape and dimensions shown in FIG.
A cylindrical filter 1 including a flange portion 1A, a cylindrical portion 1B, and a bottom portion 1C was manufactured.
【００４３】なお、得られたフィルタの各構成要素の体
積含有率は次の通りである。The volume content of each component of the obtained filter is as follows.
【００４４】ＳｉＣ繊維：７％ 炭素：２％ ＳｉＣコーティング層：１０％ 空孔：８１％ 得られたフィルタに第２図に示す熱サイクルと第３図に
示す圧力サイクルとをそれぞれ負荷した後、排ガス（温
度約１５０℃）の処理を行なってダスト負荷の有無に対
する圧力損失を比較測定し、結果を第４図に示した。SiC fiber: 7% Carbon: 2% SiC coating layer: 10% Voids: 81% After the obtained filter was subjected to the heat cycle shown in FIG. 2 and the pressure cycle shown in FIG. 3, respectively, Exhaust gas (temperature of about 150 ° C.) was processed, and pressure loss was compared and measured with respect to the presence or absence of dust load. The results are shown in FIG.
【００４５】比較例１ 市販のガラス繊維製バッグフィルタ（内径１１５ｍｍ，
外径１２０ｍｍ，長さ１０００ｍｍ）について、実施例
１と同様にして圧力損失の比較測定を行ない、結果を第
４図に示した。Comparative Example 1 A commercially available glass fiber bag filter (inner diameter 115 mm,
Comparative measurement of pressure loss was carried out in the same manner as in Example 1 for an outer diameter of 120 mm and a length of 1000 mm), and the results are shown in FIG.
【００４６】比較例２ 起毛処理を施さなかったこと以外は実施例１と同様にし
てフィルタを製造し、同様に圧力損失の比較測定を行な
い、結果を第４図に示した。Comparative Example 2 A filter was manufactured in the same manner as in Example 1 except that the raising treatment was not performed, and a comparative measurement of the pressure loss was similarly performed. The results are shown in FIG.
【００４７】第４図より、本発明のフィルタは、ダスト
負荷が大きい場合であっても、圧力損失が小さく、効率
的な除塵処理を行なえることが明らかである。It is apparent from FIG. 4 that the filter of the present invention has a small pressure loss and can perform an efficient dust removal process even when the dust load is large.
【００４８】実施例２ 直径１１μｍのＳｉＣ連続繊維よりなる不織布を固形分
６重量％のポリビニルアルコール水溶液中に分散させ、
これを型に流し込んで硬化させ、その後、窒素ガス雰囲
気中にて９００℃で加熱してポリビニルアルコールを炭
化させた。このようにして得られたＳｉＣ繊維成形体の
表面をワイヤブラシで起毛処理した後、ＣＶＤ法により
ＳｉＣコーティング層を形成して、第１図に示す断面形
状及び寸法の円筒形フィルタを製造した。Example 2 A nonwoven fabric made of continuous SiC fibers having a diameter of 11 μm was dispersed in an aqueous solution of polyvinyl alcohol having a solid content of 6% by weight.
This was poured into a mold and cured, and then heated at 900 ° C. in a nitrogen gas atmosphere to carbonize the polyvinyl alcohol. The surface of the SiC fiber molded body thus obtained was brushed with a wire brush, and then a SiC coating layer was formed by a CVD method to produce a cylindrical filter having a cross-sectional shape and dimensions shown in FIG.
【００４９】なお、得られたフィルタの各構成要素の体
積含有率は次の通りである。The volume content of each component of the obtained filter is as follows.
【００５０】ＳｉＣ繊維：９％ 炭素：３％ ＳｉＣコーティング層：８％ 空孔：８０％ 得られたフィルタに第２図に示す熱サイクルと第３図に
示す圧力サイクルとをそれぞれ負荷した後、表１に示す
ゴミ焼却物を焼却して発生した排ガスを下記条件で除塵
処理し、そのときの圧力損失の変動と捕集効率の変化を
それぞれ第５図及び第６図に示した。SiC fiber: 9% Carbon: 3% SiC coating layer: 8% Voids: 80% The obtained filter was subjected to a thermal cycle shown in FIG. 2 and a pressure cycle shown in FIG. 3, respectively. Exhaust gas generated by incineration of the incinerated garbage shown in Table 1 was subjected to dust removal treatment under the following conditions, and the change in pressure loss and the change in collection efficiency at that time are shown in FIGS. 5 and 6, respectively.
【００５１】[0051]
【表１】 [Table 1]
【００５２】除塵条件 排ガス量：１２００ｍ3 ／ｈｒ（８２５℃において） 排ガス温度：１０００〜１０５０℃ ダスト種類：ゴミ焼却灰 ダスト濃度：５ｇ／Ｎｍ３ ダスト負荷：約３００ｇ／ｍ２ ・ｈｒ 濾過速度：３．９ｍ／ｍｉｎ（１０２５℃において） フィルタ本数：２８本（濾過面積約５．１ｍ2 ） 再生方法：パルスエア（タイマ制御：約３分間隔） 第５図及び第６図より、本発明のフィルタによれば、長
期にわたり、小さい圧力損失にて、また、高い捕集効率
にて安定に除塵処理できることが明らかである。Exhaust gas amount at dust removal conditions : 1200 m 3 / hr (at 825 ° C.) Exhaust gas temperature: 1000 to 1050 ° C. Dust type: incineration ash Dust concentration: 5 g / Nm 3 Dust load: about 300 g / m 2 · hr Filtration speed: 3.9 m / min (at 1025 ° C.) Number of filters: 28 (filtration area: about 5.1 m 2 ) Reproduction method: pulse air (timer control: about 3 minute intervals) From FIGS. 5 and 6, the filter of the present invention is shown. According to this, it is clear that dust removal can be stably performed over a long period of time with a small pressure loss and a high collection efficiency.
【００５３】実施例３ 実施例１と同様の方法により製造した有底角筒フィルタ
を使用して、外形寸法が３ｍ×４．３ｍ×１．５ｍ高さ
で総濾過面積が１７４ｍ2 の除塵器を製造し、前記表１
に示すゴミ焼却物を焼却して発生した排ガスを下記除塵
条件にて処理した。Example 3 A dust filter having an outer dimension of 3 m × 4.3 m × 1.5 m and a total filtration area of 174 m 2 was prepared using a bottomed rectangular tube filter manufactured in the same manner as in Example 1. And the above Table 1
Exhaust gas generated by incineration of the garbage incineration shown in Table 2 was treated under the following dust removal conditions.
【００５４】その結果、フィルタの捕集効率は処理開始
から半年後においても９９．５％と著しく高く、また、
圧力損失も４ｍ／ｍｉｎの濾過速度で９５ｍｍＡｑと低
く抑えることができ、高効率処理が可能であった。As a result, the collection efficiency of the filter was remarkably high at 99.5% even six months after the start of the treatment.
The pressure loss was as low as 95 mmAq at a filtration speed of 4 m / min, and high-efficiency treatment was possible.
【００５５】除塵条件 排ガス量：９７００Ｎｍ3 ／ｈｒ 処理温度：９００℃ 除塵器出口ダスト濃度：７ｇ／Ｎｍ3 比較例３ 市販のインコネル製バッグフィルタ（外径８．９ｃｍ×
長さ１．０ｍの有底円筒形フィルタ）を用いた除塵器
（外形寸法が外径２．５ｍ×高さ１３ｍ，総濾過面積が
１７４ｍ2 ）で、実施例３と同様に除塵処理を行なっ
た。 Dust removal conditions Exhaust gas amount: 9700 Nm 3 / hr Treatment temperature: 900 ° C. Dust concentration at the outlet of the dust remover: 7 g / Nm 3 Comparative Example 3 Commercially available bag filter made of Inconel (outer diameter 8.9 cm ×
A dust remover (outer diameter 2.5 m × height 13 m, total filtration area 174 m 2 ) using a bottomed cylindrical filter having a length of 1.0 m was subjected to dust removal treatment in the same manner as in Example 3. Was.
【００５６】その結果、圧力損失は濾過速度０．４ｍ／
ｍｉｎで２５０ｍｍＡｑと高い上に、処理開始半年後に
は捕集効率はフィルタの腐食劣化のために７５％にまで
低下した。As a result, the pressure loss was 0.4 m / filtration speed.
The min. efficiency was as high as 250 mmAq, and the collection efficiency was reduced to 75% six months after the start of the treatment due to the corrosion deterioration of the filter.
【００５７】比較例４ 起毛処理を施さなかったこと以外は実施例３と同様にし
てフィルタを製造し、同様に除塵処理を行なったとこ
ろ、フィルタの捕集効率は処理開始から半年後において
も９９．５％と著しく高いものであったが、圧力損失は
４ｍ／ｍｉｎの濾過速度で１２５ｍｍＡｑと実施例３の
ものに比べて若干高かった。Comparative Example 4 A filter was manufactured in the same manner as in Example 3 except that the raising treatment was not performed, and the dust removal treatment was performed in the same manner. The collection efficiency of the filter was 99 months after the start of the treatment. Although it was remarkably high at 0.5%, the pressure loss was 125 mmAq at a filtration speed of 4 m / min, which was slightly higher than that of Example 3.
【００５８】[0058]
【発明の効果】以上詳述した通り、本発明のフィルタに
よれば、耐熱性、高温での耐腐食性、耐久性に優れ、し
かも圧力損失が著しく小さくかつ薄肉化が可能で、ま
た、ＣＶＤコーティング層形成工程におけるハンドリン
グが容易な、高効率処理及び除塵設備の小型化に有効な
フィルタが提供される。As detailed above, according to the present invention, according to the filter of the present invention, heat resistance, corrosion resistance at high temperatures, excellent durability, yet allows the pressure loss is extremely small and thin, or
In addition, handling in a CVD coating layer forming process
A filter that is easy to perform and that is effective for high-efficiency processing and miniaturization of dust removal equipment is provided.
【００５９】[0059]
【００６０】請求項２のフィルタによれば、圧力損失が
小さく、取り扱い性に優れ、しかも逆洗時に加えられる
圧力パルスの繰り返しや、熱や熱衝撃の繰り返しにも十
分に耐え得るフィルタが提供される。According to the filter of the second aspect , there is provided a filter which has a small pressure loss, is excellent in handleability, and can sufficiently withstand the repetition of the pressure pulse applied at the time of backwashing and the repetition of heat and thermal shock. You.
【００６１】本発明のフィルタによれば、高温排ガスを
冷却することなくそのまま除塵処理することにより、熱
エネルギーの回収再利用が可能とされる。According to the filter of the present invention, it is possible to recover and reuse thermal energy by directly removing dust from the high-temperature exhaust gas without cooling it.
【図１】実施例１，２で製造したフィルタを示す断面図
である。FIG. 1 is a sectional view showing a filter manufactured in Examples 1 and 2.
【図２】実施例１，２においてフィルタに負荷した熱サ
イクル条件を示すグラフである。FIG. 2 is a graph showing thermal cycle conditions applied to filters in Examples 1 and 2.
【図３】実施例１，２においてフィルタに負荷した圧力
サイクル条件を示すグラフである。FIG. 3 is a graph showing pressure cycle conditions applied to filters in Examples 1 and 2.
【図４】実施例１及び比較例１，２の結果を示すグラフ
である。FIG. 4 is a graph showing the results of Example 1 and Comparative Examples 1 and 2.
【図５】実施例２における圧力損失の変動を示すグラフ
である。FIG. 5 is a graph showing a change in pressure loss in Example 2.
【図６】実施例２における捕集効率の変化を示すグラフ
である。FIG. 6 is a graph showing a change in trapping efficiency in Example 2.
１ フィルタ １Ａ フランジ部 １Ｂ 円筒部 １Ｃ 底面部 1 Filter 1A Flange 1B Cylindrical 1C Bottom
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B01D 39/00 - 39/20 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) B01D 39/00-39/20
Claims (2)
ナ・シリカ及び炭素よりなる群から選ばれる１種又は２
種以上の繊維で構成される繊維成形体の該繊維表面に、
炭化珪素、窒化珪素、アルミナ及び炭素よりなる群から
選ばれる１種又は２種以上の気相蒸着法によるコーティ
ング層を形成してなるフィルタであって、前記繊維成形
体は、該コーティング層形成に先立ちフィルタ表面側に
相当する面が起毛処理されており、かつ、繊維を炭素又
は黒鉛で接合してなることを特徴とするフィルタ。1. One or two selected from the group consisting of silicon carbide, silicon nitride, alumina, alumina / silica and carbon.
On the fiber surface of a fiber molded body composed of at least one kind of fiber,
Silicon carbide, silicon nitride, a one or filter obtained by forming a coating layer by two or more vapor deposition is selected from the group consisting of alumina and carbon, the fiber preform is in the coating layer formed Previously, the surface corresponding to the filter surface side was brushed , and the fibers were carbon or carbon.
Is a filter characterized by being bonded with graphite .
積含有率が１〜１５％、コーティング層の体積含有率が
２〜１５％、繊維を接合する炭素又は黒鉛の体積含有率
が２〜２０％、空孔の体積含有率が５０〜９５％である
ことを特徴とするフィルタ。2. The filter according to claim 1 , wherein the volume content of the fiber is 1 to 15%, the volume content of the coating layer is 2 to 15%, and the volume content of carbon or graphite joining the fibers is 2 to 20%. %, And the volume content of pores is 50 to 95%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5263386A JP3003475B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5263386A JP3003475B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07116434A JPH07116434A (en) | 1995-05-09 |
| JP3003475B2 true JP3003475B2 (en) | 2000-01-31 |
Family
ID=17388774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5263386A Expired - Fee Related JP3003475B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3003475B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19713068A1 (en) * | 1997-03-27 | 1998-10-01 | Ecm Ingenieur Unternehmen Fuer | Process for the production of hot gas filter elements and the use of the filter for hot gas filtration of flue gases |
-
1993
- 1993-10-21 JP JP5263386A patent/JP3003475B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07116434A (en) | 1995-05-09 |
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