JP3003476B2 - filter - Google Patents
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- Publication number
- JP3003476B2 JP3003476B2 JP5263387A JP26338793A JP3003476B2 JP 3003476 B2 JP3003476 B2 JP 3003476B2 JP 5263387 A JP5263387 A JP 5263387A JP 26338793 A JP26338793 A JP 26338793A JP 3003476 B2 JP3003476 B2 JP 3003476B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- fiber
- filter
- fibers
- volume content
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000835 fiber Substances 0.000 claims description 126
- 239000010410 layer Substances 0.000 claims description 69
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 34
- 239000011247 coating layer Substances 0.000 claims description 25
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 23
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 229910002804 graphite Inorganic materials 0.000 claims description 12
- 239000010439 graphite Substances 0.000 claims description 12
- 239000002344 surface layer Substances 0.000 claims description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 6
- 239000002759 woven fabric Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 238000005304 joining Methods 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000004745 nonwoven fabric Substances 0.000 claims description 4
- 230000001680 brushing effect Effects 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 42
- 239000007789 gas Substances 0.000 description 31
- 239000011347 resin Substances 0.000 description 18
- 229920005989 resin Polymers 0.000 description 18
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000001914 filtration Methods 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000011001 backwashing Methods 0.000 description 4
- 239000003365 glass fiber Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 210000001170 unmyelinated nerve fiber Anatomy 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001026 inconel Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000009628 steelmaking Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000005087 graphitization Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000007666 vacuum forming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Filtering Materials (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ゴミ焼却炉の出口排ガ
スやボイラ出口排ガス、製鉄用高炉の炉頂圧タービン流
入ガス又は高炉排ガスなどの高温ガス中のダストを除去
するための除塵用フィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter for removing dust in high-temperature gas such as exhaust gas from a refuse incinerator, exhaust gas from a boiler, gas flowing into a furnace top pressure turbine of a steelmaking blast furnace, or exhaust gas from a blast furnace. About.
【０００２】[0002]
【従来の技術】従来、各種排ガスのダスト除去用フィル
タとしては、ガラス繊維製バッグフィルタ、金属製バッ
グフィルタ、ハニカム構造セラミックフィルタ、セラミ
ックチューブフィルタなどが提供されている。また、化
学蒸着法（ＣＶＤ法）によるセラミック製フィルタも開
発されつつある。2. Description of the Related Art Conventionally, as a filter for removing dust from various kinds of exhaust gas, a bag filter made of glass fiber, a bag filter made of metal, a ceramic filter having a honeycomb structure, a ceramic tube filter and the like have been provided. Further, ceramic filters formed by a chemical vapor deposition method (CVD method) are being developed.
【０００３】ところで、ゴミ焼却炉出口排ガス等の除塵
処理において、該排ガスを冷却することなく高温のまま
除塵を行なえるならば、排ガスを除塵後、熱交換を行な
ってボイラで高温、高圧の蒸気を得、これを発電に用い
ることにより熱エネルギーを電気エネルギーとして有効
に回収することができる。従って、排熱回収・有効利用
の観点からは、排ガスを冷却することなく除塵する必要
があり、このため除塵用フィルタとしては、耐熱温度が
高く、１０００℃以上での使用が可能であることが望ま
れる。[0003] By the way, if it is possible to remove dust at a high temperature without cooling the exhaust gas in the dust removal treatment of the exhaust gas from a garbage incinerator, heat is exchanged after removing the exhaust gas, and high-temperature, high-pressure steam is passed through a boiler. By using this for power generation, heat energy can be effectively recovered as electric energy. Therefore, from the viewpoint of exhaust heat recovery and effective utilization, it is necessary to remove dust without cooling the exhaust gas. Therefore, the dust removal filter has a high heat-resistant temperature and can be used at 1000 ° C. or higher. desired.
【０００４】また、ゴミ焼却炉の排ガス中には腐食性の
ＨＣｌやＣｌ2 が含まれているため、除塵用フィルタと
しては、耐熱温度が高いことに加えて、高温での耐食性
に優れることが望まれる。[0004] Further, since the corrosive HCl and Cl 2 are contained in the exhaust gas of the garbage incinerator, the filter for dust removal is not only high in heat resistance temperature but also excellent in corrosion resistance at high temperature. desired.
【０００５】更に、処理効率の向上、除塵器の小型化の
ためには、圧力損失が小さいこと及びフィルタの厚さが
薄いことなどが望まれる。Further, in order to improve the processing efficiency and reduce the size of the dust remover, it is desired that the pressure loss is small and the thickness of the filter is small.
【０００６】即ち、圧力損失が大きい場合には、圧力損
失を小さくして除塵効率を高めるために排ガスの通過流
速を低くする必要があるが、通過流速を小さくするため
には、除塵器を大型化せざるを得ない。That is, when the pressure loss is large, it is necessary to lower the passage velocity of the exhaust gas in order to reduce the pressure loss and increase the dust removal efficiency. I have to change.
【０００７】また、肉厚のフィルタは、それ自体が嵩高
くなるため、除塵器の大型化につながる。[0007] Further, the thick filter itself becomes bulky, which leads to an increase in the size of the dust remover.
【０００８】[0008]
【発明が解決しようとする課題】従来のフィルタのう
ち、ガラス繊維製バッグフィルタは、最高使用温度が２
５０〜３００℃程度であり、このバッグフィルタを高温
排ガスの除塵に用いるためには、高温排ガスを冷却する
必要があることから、排熱回収・有効利用の面で不利で
ある。Among the conventional filters, the bag filter made of glass fiber has a maximum operating temperature of two.
The temperature is about 50 to 300 ° C., and in order to use this bag filter for dust removal of high-temperature exhaust gas, it is necessary to cool the high-temperature exhaust gas, which is disadvantageous in terms of exhaust heat recovery and effective utilization.
【０００９】金属（インコネル）製バッグフィルタで
は、最高使用温度が８７０℃と、ガラス繊維製バッグフ
ィルタよりも高いものの、耐食性の面で問題があり、腐
食性ガスの除塵には使用し得ないという欠点がある。Although the maximum operating temperature of a metal (Inconel) bag filter is 870 ° C., which is higher than that of a glass fiber bag filter, it has a problem in corrosion resistance and cannot be used for dust removal of corrosive gas. There are drawbacks.
【００１０】ハニカム構造セラミックフィルタでは、最
高使用温度は６００℃とさほど高くない上に、焼結セラ
ミック製であるために、肉厚で、しかも、気孔率が小さ
いために圧力損失が大きいという欠点がある。[0010] Honeycomb-structured ceramic filters have the drawback that the maximum operating temperature is not so high as 600 ° C, and because they are made of sintered ceramic, they are thick and have a low porosity, so that pressure loss is large. is there.
【００１１】セラミックチューブフィルタは、最高使用
温度が９００〜１０００℃と高いが、焼結セラミック製
であるため、上記と同様に、肉厚で圧力損失が大きいと
いう欠点がある。[0011] The ceramic tube filter has a high maximum operating temperature of 900 to 1000 ° C. However, since it is made of a sintered ceramic, it has the same drawback that it has a large wall thickness and a large pressure loss.
【００１２】しかも、既存のセラミックフィルタはＳｉ
Ｏ2 やＡｌ2 Ｏ3 製とされており、高温で腐食の激しい
排ガスの除塵には対応し得ない。Moreover, the existing ceramic filter is Si
Since it is made of O 2 or Al 2 O 3 , it cannot cope with dust removal of exhaust gas which is highly corrosive at high temperatures.
【００１３】また、現在開発中のＣＶＤ法によるセラミ
ック製フィルタでは、肉厚で、圧力損失が大きく、しか
も高コストであるという欠点がある。Further, the ceramic filter manufactured by the CVD method, which is currently under development, has disadvantages in that it is thick, has a large pressure loss, and is expensive.
【００１４】前述の如く、除塵用フィルタ、特にゴミ焼
却排ガスの除塵用フィルタとしては、 １０００℃以上の高温でも使用できる。 Ｃｌ2 やＨＣｌを含有する腐食性雰囲気において、
かつ、高温において使用できる。 薄肉で、圧力損失が小さく、除塵器の小型化が可能
である。 といった条件が要求されるが、従来、このような条件を
すべて満たすフィルタは提供されていないのが実情であ
る。As described above, a filter for removing dust, particularly a filter for removing incineration exhaust gas, can be used at a high temperature of 1000 ° C. or more. In a corrosive atmosphere containing Cl 2 or HCl,
And it can be used at high temperatures. It is thin, has low pressure loss, and can be miniaturized. Such a condition is required, but a filter that satisfies all such conditions has not been provided so far.
【００１５】本発明は上記従来の問題点を解決し、高温
の腐食性雰囲気においても使用可能な高い耐熱性と耐食
性を有し、しかも、圧力損失が小さく薄肉の除塵用フィ
ルタを提供することを目的とする。The present invention has been made to solve the above-mentioned conventional problems, and to provide a thin filter for dust removal which has high heat resistance and corrosion resistance which can be used even in a high-temperature corrosive atmosphere, and has a small pressure loss. Aim.
【００１６】[0016]
【課題を解決するための手段】請求項１のフィルタは、
炭化珪素（ＳｉＣ）、窒化珪素（Ｓｉ３Ｎ４）、アルミ
ナ（Ａｌ２Ｏ３）、アルミナ・シリカ（Ａｌ２Ｏ３・Ｓ
ｉＯ２）及び炭素（Ｃ）よりなる群から選ばれる１種又
は２種以上の繊維で構成される繊維成形体の該繊維表面
に、炭化珪素（ＳｉＣ）、窒化珪素（Ｓｉ３Ｎ４）、ア
ルミナ（Ａｌ２Ｏ３）及び炭素（Ｃ）よりなる群から選
ばれる１種又は２種以上の気相蒸着法によるコーティン
グ層を形成してなるフィルタであって、前記繊維成形体
は、フィルタの表面側を構成する第１繊維層と、該第１
繊維層の裏面側に設けられた第２繊維層とを備える積層
体であって、該第１繊維層は繊維が不織布状に集合した
層であり、かつ、第２繊維層は繊維の織布の層又はチョ
ップドヤーンの集合層であり、前記繊維成形体は、前記
コーティング層形成に先立ちフィルタ表面側に相当する
面が起毛処理されており、かつ、繊維を炭素又は黒鉛で
接合してなることを特徴とする。According to the first aspect of the present invention, there is provided a filter comprising:
Silicon carbide (SiC), silicon nitride (Si 3 N 4 ), alumina (Al 2 O 3 ), alumina silica (Al 2 O 3 .S)
silicon carbide (SiC), silicon nitride (Si 3 N 4 ), silicon carbide (SiC), silicon nitride (Si 3 N 4 ), on the fiber surface of a fiber molded body composed of one or more fibers selected from the group consisting of iO 2 ) and carbon (C). A filter formed by forming one or two or more coating layers formed by a vapor deposition method selected from the group consisting of alumina (Al 2 O 3 ) and carbon (C). A first fiber layer constituting a surface side;
A laminate comprising a second fiber layer provided on the back side of the fiber layer, wherein the first fiber layer is a layer in which fibers are gathered in a nonwoven fabric, and the second fiber layer is a woven fabric of fibers. Layer or an aggregated layer of chopped yarns, wherein the fiber molded body has a surface corresponding to the filter surface side raised prior to the coating layer formation , and the fibers are made of carbon or graphite.
It is characterized by being joined .
【００１７】[0017]
【００１８】請求項２のフィルタは、請求項１のフィル
タにおいて、第１繊維層で構成される表面層の繊維の体
積含有率が１〜１０％、コーティング層の体積含有率が
２〜２０％、繊維を接合する炭素又は黒鉛の体積含有率
が１〜２０％、空孔の体積含有率が５０〜９６％であ
り、第２繊維層で構成される基層の繊維の体積含有率が
５〜２０％、コーティング層の体積含有率が５〜２０
％、繊維を接合する炭素又は黒鉛の体積含有率が１〜２
０％、空孔の体積含有率が４０〜８９％であることを特
徴とする。The filter of claim 2 is the filter according to claim 1, 1-10% volume content of fibers in the formed surface layer with a first fiber layer, the volume content of the coating layer is 2-20% The volume content of carbon or graphite joining fibers is 1 to 20%, the volume content of pores is 50 to 96%, and the volume content of fibers of the base layer composed of the second fiber layer is 5 to 5%. 20%, the volume content of the coating layer is 5 to 20
%, The volume content of carbon or graphite joining the fibers is 1 to 2
0% and the volume content of pores is 40 to 89%.
【００１９】以下に本発明を、本発明のフィルタの製造
方法に従って詳細に説明する。Hereinafter, the present invention will be described in detail according to the method for manufacturing a filter of the present invention.
【００２０】本発明のフィルタを製造するには、まず、
ＳｉＣ繊維，Ｓｉ3 Ｎ4 繊維，Ａｌ2 Ｏ3 繊維，Ａｌ2
Ｏ3 ・ＳｉＯ2 繊維又はＣ繊維を用いて繊維成形体を製
造する。To manufacture the filter of the present invention, first,
SiC fiber, Si 3 N 4 fiber, Al 2 O 3 fiber, Al 2
A fiber molded body is manufactured using O 3 · SiO 2 fiber or C fiber.
【００２１】この繊維成形体は、下記第１繊維層と第２
繊維層とで構成される積層構造となっている。The fibrous formed body has the following first fiber layer and second fiber layer.
It has a laminated structure composed of a fiber layer.
【００２２】第１繊維層 (i) 長さ０．５ｍｍ以上、好ましくは１〜５ｍｍの単
繊維の短繊維の不織布状の集合層 (ii) 連続単繊維又は単繊維を集束したヤーンの不織布
状の集合層 又は (iii) 上記(i) の短繊維と(ii)の連続単繊維又はヤーン
の混合繊維の不織布状の集合層第２繊維層 （ａ） 繊維の織布を複数枚積層した層 又は （ｂ） 長さ１ｍｍ以上、好ましくは５〜２５ｍｍのチ
ョップドヤーンの集合層 なお、上記(i) 〜(iii) ，（ａ）〜（ｂ）において、単
繊維径は５〜２０μｍ程度であることが好ましい。ま
た、（ｂ）において、チョップドヤーンはこのような単
繊維を５００〜２０００本程度収束したものが好まし
い。 The first fibrous layer (i) a nonwoven fabric-like aggregate of single fiber short fibers having a length of 0.5 mm or more, preferably 1 to 5 mm (ii) a nonwoven fabric of continuous single fibers or a yarn bundled with single fibers Or (iii) a nonwoven fabric-like aggregate layer of the above-mentioned (i) short fibers and (ii) continuous monofilaments or yarn-mixed fibers (a) a layer in which a plurality of woven fabrics of fibers are laminated Or (b) an aggregated layer of chopped yarn having a length of 1 mm or more, preferably 5 to 25 mm. In the above (i) to (iii) and (a) to (b), the single fiber diameter is about 5 to 20 μm. Is preferred. In (b), the chopped yarn preferably has about 500 to 2,000 such single fibers converged.
【００２３】このような繊維成形体は、例えば、繊維の
織布を積層して樹脂を含浸させたものの一方の面に、短
繊維を樹脂とともにスプレーアップ法により吹き付けて
２層構造の布状体とし、この布状体を型に巻き付けた
後、真空成形する。その後、硬化させた後、樹脂を炭化
（又は黒鉛化）させることにより製造することができ
る。Such a fiber molded article is, for example, a two-layered cloth-like article obtained by spraying short fibers together with a resin on one surface of a layer obtained by laminating a woven fabric of fibers and impregnating with a resin. After winding the cloth body around a mold, vacuum forming is performed. Then, after hardening, it can be manufactured by carbonizing (or graphitizing) the resin.
【００２４】また、チョップドヤーンの集合体に樹脂を
含浸させたものを型に巻き付けた後、表面に樹脂を含浸
させた連続繊維の不織布を巻き付け、その後、硬化させ
た後、樹脂を炭化（又は黒鉛化）させることにより製造
することができる。[0024] Further, after the assembly of the chopped yarns impregnated with the resin is wound around a mold, a continuous fiber non-woven fabric impregnated with the resin is wound around the surface, and after curing, the resin is carbonized (or carbonized). (Graphitization).
【００２５】この場合、樹脂としてはフェノール樹脂、
エポキシ樹脂、ポリビニルアルコール等を用いることが
でき、用いる樹脂は第１繊維層と第２繊維層とで同一で
あっても異なっていても良い。なお、樹脂の使用に当っ
ては必要に応じて更に有機溶媒又は水を用いる。In this case, the resin is a phenol resin,
Epoxy resin, polyvinyl alcohol, or the like can be used, and the resin used may be the same or different between the first fiber layer and the second fiber layer. In using the resin, an organic solvent or water is further used as necessary.
【００２６】このようにして得られる繊維成形体は、樹
脂の炭化又は黒鉛化により生成した炭素又は黒鉛が繊維
同志の接点を接合してなる繊維成形体である。The fiber molded body obtained in this way is a fiber molded body in which carbon or graphite produced by carbonizing or graphitizing a resin is joined to the contacts of fibers.
【００２７】また、本発明に係る繊維成形体は、第１繊
維層及び第２繊維層の積層体表面にＣＶＤ法により炭素
を析出させることにより、析出させた炭素で繊維同志の
接点を接合して製造することもできる。Further, in the fiber molded article according to the present invention, by depositing carbon on the surface of the laminate of the first fiber layer and the second fiber layer by the CVD method, the contacts of the fibers are joined by the deposited carbon. It can also be manufactured.
【００２８】本発明に係る繊維成形体の製造方法は何ら
上記方法に限定されるものではないが、本発明では、炭
素又は黒鉛で繊維を接合するため、次工程のＣＶＤコー
ティングに到るまでのハンドリングに十分に耐え、しか
も空孔率の大きい多孔質繊維成形体を容易に製造するこ
とができる。The production method of the present invention to such a fibrous form but not in any way limited to the above method, the present invention, for joining the fibers with carbon or graphite, up to the CVD coating of the next step It is possible to easily produce a porous fiber molded body having sufficient porosity that can withstand handling sufficiently.
【００２９】なお、繊維成形体を構成する第１繊維層の
繊維と第２繊維層の繊維とは同一材質のものであっても
異なる材質のものであっても良いが、同一材質の繊維を
用いることにより、熱膨張差による応力の発生が防止さ
れ、より高温での使用に有利である。The fibers of the first fiber layer and the fibers of the second fiber layer constituting the fiber molded body may be of the same material or of different materials. By using this, generation of stress due to a difference in thermal expansion is prevented, which is advantageous for use at higher temperatures.
【００３０】本発明のフィルタは、このようにして得ら
れる繊維成形体の繊維表面に、所定割合の空孔が残存す
るようにＳｉＣ，Ｓｉ3 Ｎ4 ，Ａｌ2 Ｏ3 又はＣのＣＶ
Ｄコーティング層を形成してなるものであるが、このＣ
ＶＤコーティング層の形成に先立ち、繊維成形体を起毛
処理することに特徴を有する。The filter of the present invention has a CV of SiC, Si 3 N 4 , Al 2 O 3 or C such that a predetermined ratio of pores remains on the fiber surface of the fiber molded product thus obtained.
D coating layer is formed.
Prior to the formation of the VD coating layer, it is characterized in that the fiber molded body is raised.
【００３１】この起毛処理の方法には特に制限はない
が、例えば次の（ａ）又は（ｂ）の方法を採用すること
ができる。There is no particular limitation on the method of raising the hair. For example, the following method (a) or (b) can be employed.
【００３２】（ａ） 前述の方法で繊維成形体を製造す
るに当り、硬化後、炭化前の硬化体表面をサンドペーパ
ー、ワイヤブラシ等でこすって擦過させる。(A) In producing a fiber molded body by the above-described method, after curing, the surface of the cured body before carbonization is rubbed with a sandpaper, a wire brush, or the like.
【００３３】（ｂ） 前述の方法で繊維成形体を製造す
るに当り、炭化後の成形体表面をサンドペーパー、ワイ
ヤブラシ等でこすって擦過させる。(B) In producing a fiber molded article by the above-described method, the surface of the carbonized molded article is rubbed and rubbed with a sandpaper, a wire brush or the like.
【００３４】また、前述の方法で第１繊維層をスプレー
アップ法で形成するに当り、第２繊維層を予め型に巻き
付けておき、この型に巻き付けられた第２繊維層の表面
に向けてスプレーアップ法で短繊維を樹脂液と共に吹き
付けた場合には、その表面は毛羽立った状態となり、別
途起毛のための処理を施す必要がなく、起毛処理面を得
ることができる。In forming the first fiber layer by the spray-up method according to the above-described method, the second fiber layer is wound around a mold in advance, and is directed toward the surface of the second fiber layer wound around the mold. When the short fibers are sprayed together with the resin liquid by the spray-up method, the surface thereof becomes fluffy, and it is not necessary to separately perform a treatment for raising the brush, so that a raised surface can be obtained.
【００３５】更に、予め型面上に適当な方法で形成した
第２繊維層を硬化させた後、この第２繊維層を形成した
型を回転させながら、第１繊維層形成用の短繊維を樹脂
液と共に、この型面の第２繊維層上へ向けて上方から落
下させることによっても、表面が起毛した第１繊維層を
形成することができる。Further, after the second fiber layer previously formed on the mold surface by an appropriate method is cured, the short fibers for forming the first fiber layer are formed while rotating the mold on which the second fiber layer is formed. The first fiber layer whose surface is raised can also be formed by dropping the mold surface from above onto the second fiber layer on the mold surface together with the resin liquid.
【００３６】なお、起毛処理はフィルタとして除塵処理
に用いる際に除塵処理面となる第１繊維層の表面側、即
ち、被処理ガスの流入側の表面に対して行なう。The brushing treatment is performed on the surface side of the first fiber layer which becomes the dust removal processing surface when the filter is used in the dust removal processing, that is, the surface on the inflow side of the gas to be treated.
【００３７】本発明のフィルタは、このように起毛処理
を施した繊維成形体にＣＶＤコーティング層を形成する
ことにより製造されるが、本発明のフィルタにおいて、
繊維成形体を構成する繊維、この繊維の接合のための炭
素又は黒鉛、上記ＣＶＤコーティング層及び空孔の体積
含有率は、その除塵効率、圧力損失、耐熱性、機械的特
性、耐久性等の面から、第１繊維層に対応する表面層及
び第２繊維層に対応する基層について、それぞれ下記の
範囲であることが好ましい。The filter of the present invention is manufactured by forming a CVD coating layer on the fiber molded body subjected to the raising treatment as described above.
The fibers constituting the fiber molded body, the carbon or graphite for bonding the fibers, the volume content of the above-mentioned CVD coating layer and the pores, such as dust removal efficiency, pressure loss, heat resistance, mechanical properties, durability, etc. From the viewpoint, the surface layer corresponding to the first fiber layer and the base layer corresponding to the second fiber layer preferably have the following ranges, respectively.
【００３８】表面層 繊維：１〜１０％ 炭素又は黒鉛：１〜２０％ ＣＶＤコーティング層：２〜２０％ 空孔：５０〜９６％基層 繊維：５〜２０％ 炭素又は黒鉛：１〜２０％ ＣＶＤコーティング層：５〜２０％ 空孔：４０〜８９％ なお、表面層及び基層の各々の厚さは、表面層０．５〜
５ｍｍ、基層１〜１０ｍｍとするのが好ましい。 Surface layer fiber: 1 to 10% Carbon or graphite: 1 to 20% CVD coating layer: 2 to 20% Void: 50 to 96% Base layer fiber: 5 to 20% Carbon or graphite: 1 to 20% CVD Coating layer: 5 to 20% Void: 40 to 89% The thickness of each of the surface layer and the base layer is 0.5 to
It is preferably 5 mm and the base layer 1 to 10 mm.
【００３９】このような本発明のフィルタの形状として
は特に制限はないが、圧力損失を小さくし、かつ、フィ
ルタの逆洗（堆積ダストの除去）時の圧力に対する耐久
性を高めるために、次の（Ａ）〜（Ｃ）の形状とするの
が好ましい。The shape of the filter of the present invention is not particularly limited. However, in order to reduce the pressure loss and to increase the durability against pressure during back washing (removal of the accumulated dust) of the filter, the following shape is used. (A) to (C).
【００４０】（Ａ） 有底又は無底の円筒形状 （Ｂ） 有底又は無底の角筒形状 （Ｃ） 上記（Ａ）又は（Ｂ）で長さ方向にテーパがつ
いたもの（一端側と他端側で横断面の大きさが異なるも
の） なお、フィルタの肉厚ｔは、圧力損失、耐逆洗圧力の面
から、フィルタの半径Ｒに対して、√（Ｒ／３０）＜ｔ
＜１５ｍｍであることが好ましい。ここで、フィルタの
半径Ｒとは、円筒形フィルタ（Ａ）ではその内半径（真
円でない場合には平均内半径）、角筒形フィルタ（Ｂ）
では内壁の外接円半径、テーパ付フィルタ（Ｃ）では上
記（Ａ），（Ｂ）における半径において、大きい方の半
径をさす。(A) Cylindrical shape with or without a bottom (B) Rectangular cylindrical shape with or without a bottom (C) Tapered in the longitudinal direction in (A) or (B) above (one end side) And the other end side has a different cross-sectional size). The wall thickness t of the filter is, from the viewpoint of pressure loss and anti-backwash pressure, relative to the radius R of the filter, √ (R / 30) <t
Preferably, it is <15 mm. Here, the radius R of the filter means the inner radius of the cylindrical filter (A) (the average inner radius if it is not a perfect circle), the rectangular cylindrical filter (B)
In this case, the radius of the circumscribed circle of the inner wall and the radius of the tapered filter (C) in (A) and (B) above are the larger ones.
【００４１】なお、本発明のフィルタにおいて、繊維成
形体を構成する繊維材質と、ＣＶＤコーティング層の材
質とは同一であっても異なっていても良いが、両者を同
一材質とした場合には、熱膨張差による応力の発生が防
止され、より高温での使用に有利である。In the filter of the present invention, the fiber material constituting the fiber molded body and the material of the CVD coating layer may be the same or different. The generation of stress due to the difference in thermal expansion is prevented, which is advantageous for use at higher temperatures.
【００４２】本発明のフィルタは、ゴミ焼却炉の出口排
ガスやボイラ出口排ガスのダスト除去、製鉄用高炉の炉
頂圧タービン流入ガスのダスト除去、高炉排ガスのダス
ト除去等、高温、腐食性ガスの除塵に極めて有効に使用
することができる。The filter of the present invention is useful for removing high-temperature, corrosive gases such as dust from the exhaust gas from the refuse incinerator and the exhaust gas from the boiler, dust from the gas flowing into the furnace top pressure turbine of the blast furnace for steelmaking, and dust from the blast furnace exhaust gas. It can be used very effectively for dust removal.
【００４３】[0043]
【作用】本発明のフィルタは、ＳｉＣ繊維，Ｓｉ3 Ｎ4
繊維，Ａｌ2 Ｏ3 繊維，Ａｌ2Ｏ3 ・ＳｉＯ2 繊維又は
Ｃ繊維の繊維成形体の繊維表面に、ＳｉＣ，Ｓｉ3
Ｎ4，Ａｌ2 Ｏ3 又はＣのＣＶＤコーティング層を形成
してなるものであり、高耐熱性材料のみで構成されるこ
とから、１０００℃以上の高温でも使用可能な優れた耐
熱性を備える。The filter of the present invention is composed of SiC fiber, Si 3 N 4
Fibers, the Al 2 O 3 fibers, Al 2 O 3 · SiO 2 fibers or fiber surface of the fiber molded body of C fibers, SiC, Si 3
It is formed by forming a CVD coating layer of N 4 , Al 2 O 3 or C, and is made of only a high heat-resistant material, so that it has excellent heat resistance that can be used even at a high temperature of 1000 ° C. or more.
【００４４】また、繊維成形体を基体とするため、薄肉
でも十分な機械的強度を備え、空孔率が大きく、圧力損
失の小さいフィルタとすることができる。しかも、繊維
成形体は第１繊維層と第２繊維層との積層構造であるた
め、次のような作用効果が得られる。即ち、第１繊維層
の繊維の不織布状集合層により、フィルタ除塵側の表面
層は小さい圧力損失にて効率的に除塵処理することがで
きる。一方、第２繊維層の繊維の織布又はチョップドヤ
ーンの集合体により、フィルタの基層は表面層の補強層
として有効に作用し、ハンドリング性に優れ、逆洗時に
加えられる圧力パルスや熱応力の繰り返しにも十分に耐
える、高強度フィルタが提供される。しかも、チョップ
ドヤーンや織布であれば、気孔率を大きくしても機械的
強度が十分に高い層を形成することができ、圧力損失の
低減にも有効である。Further, since the fibrous formed body is used as a base, a filter having a sufficient mechanical strength even with a small thickness, a large porosity and a small pressure loss can be obtained. Moreover, since the fiber molded body has a laminated structure of the first fiber layer and the second fiber layer, the following operation and effect can be obtained. That is, the surface layer on the filter dust removal side can be efficiently removed with a small pressure loss by the nonwoven fabric-like aggregate layer of the fibers of the first fiber layer. On the other hand, the woven fabric of fibers of the second fiber layer or the aggregate of chopped yarns enables the base layer of the filter to effectively function as a reinforcing layer of the surface layer, has excellent handling properties, and is capable of reducing pressure pulses and thermal stress applied during backwashing. A high-strength filter that is sufficiently resistant to repetition is provided. In addition, a chopped yarn or a woven fabric can form a layer having sufficiently high mechanical strength even if the porosity is increased, and is effective in reducing pressure loss.
【００４５】また、このような第１繊維層及び第２繊維
層よりなる繊維成形体の表面を起毛処理してあるため、
圧力損失をより一層小さくすることができる。このた
め、被処理ガスの通過速度を大きくして除塵装置の小型
化、誘引排風ファンの小型化（所要動力の低減）を図る
ことができる。Further, since the surface of the fibrous formed body composed of the first fiber layer and the second fiber layer is subjected to a raising treatment,
Pressure loss can be further reduced. For this reason, it is possible to increase the passing speed of the gas to be treated, thereby reducing the size of the dust removing device and the induction exhaust fan (reducing the required power).
【００４６】更に、表面にＣＶＤ法による高純度で高耐
食性、高耐熱性のコーティング層が形成されているた
め、高温におけるＨＣｌ等の腐食性雰囲気においても十
分に使用可能である。Further, since a coating layer having high purity, high corrosion resistance and high heat resistance is formed on the surface by the CVD method, it can be sufficiently used even in a corrosive atmosphere such as HCl at a high temperature.
【００４７】加えて、繊維成形体の繊維が炭素又は黒鉛
で接合されているため、ＣＶＤコーティング層形成工程
におけるハンドリングが容易となる。In addition, the fiber of the fiber molded body is made of carbon or graphite.
, The handling in the CVD coating layer forming step is facilitated.
【００４８】請求項２のフィルタによれば、圧力損失が
小さく、取り扱い性に優れ、しかも逆洗時に加えられる
圧力パルスの繰り返しや、熱や熱衝撃の繰り返しにも十
分に耐え得るフィルタが提供される。According to the filter of the second aspect , there is provided a filter which has a small pressure loss, is excellent in handleability, and can sufficiently withstand the repetition of the pressure pulse applied during the backwashing and the repetition of heat and thermal shock. You.
【００４９】[0049]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【００５０】実施例１ 直径１１μｍのＳｉＣ繊維の平織布を８枚積層した積層
体（厚さ２ｍｍ）にアセトン：フェノール樹脂＝２：１
（重量比）の樹脂液を含浸させた。この樹脂含浸積層体
の一方の面に、長さ２ｍｍ、直径８．５μｍのＳｉＣ繊
維を、スプレーアップ法により、上記と同様の樹脂液と
共に吹き付けた後、型に巻き付け、真空バッグ法で成形
（圧力２００ｔｏｒｒ）した。その後、オートクレーブ
中で硬化させた。この硬化体の表面を＃１２０のサンド
ペーパーで起毛処理した後、窒素ガス雰囲気中にて９０
０℃で加熱して樹脂を炭化させた。このようにして得ら
れたＳｉＣ繊維成形体の繊維表面にＣＶＤ法によりＳｉ
Ｃコーティング層を形成して、第１図に示す断面形状及
び寸法の、フランジ部１Ａ，円筒部１Ｂ，底面部１Ｃよ
りなり、表面層１ａ及び基層１ｂの積層構造を有する円
筒形フィルタ１を製造した。Example 1 A laminate of 8 plain woven cloths of SiC fibers having a diameter of 11 μm (thickness: 2 mm) was acetone: phenol resin = 2: 1.
(Weight ratio) of the resin solution. On one surface of the resin-impregnated laminate, SiC fibers having a length of 2 mm and a diameter of 8.5 μm are sprayed together with the same resin liquid as described above by a spray-up method, then wound around a mold, and formed by a vacuum bag method ( The pressure was 200 torr). Thereafter, it was cured in an autoclave. After the surface of the cured product is raised with a # 120 sandpaper, the surface is cured in a nitrogen gas atmosphere.
Heating at 0 ° C. carbonized the resin. The surface of the fiber of the SiC fiber molded body thus obtained was coated with Si by CVD.
Forming the C coating layer, the cylindrical filter 1 having the cross-sectional shape and dimensions shown in FIG. did.
【００５１】なお、得られたフィルタの各層の構成要素
の体積含有率は次の通りである。The volume content of the components of each layer of the obtained filter is as follows.
【００５２】表面層 ＳｉＣ繊維：５％ 炭素：２％ ＳｉＣコーティング層：１０％ 空孔：８３％基層 ＳｉＣ繊維：１５％ 炭素：５％ ＳｉＣコーティング層：１５％ 空孔：６５％ また、表面層１ａの厚さは１ｍｍ、基層１ｂの厚さは
１．５ｍｍであった。 Surface layer SiC fiber: 5% Carbon: 2% SiC coating layer: 10% Vacancies: 83% Base layer SiC fiber: 15% Carbon: 5% SiC coating layer: 15% Vacancies: 65% The thickness of 1a was 1 mm, and the thickness of base layer 1b was 1.5 mm.
【００５３】得られたフィルタに第２図に示す熱サイク
ルと第３図に示す圧力サイクルとをそれぞれ負荷した
後、排ガス（温度約１５０℃）の処理を行なってダスト
負荷の有無に対する圧力損失を比較測定し、結果を第４
図に示した。After loading the obtained filter with the heat cycle shown in FIG. 2 and the pressure cycle shown in FIG. 3, respectively, the exhaust gas (at a temperature of about 150 ° C.) is processed to reduce the pressure loss with respect to the presence or absence of dust load. Compare and measure the results
Shown in the figure.
【００５４】比較例１ 市販のガラス繊維製バッグフィルタ（内径１１５ｍｍ，
外径１２０ｍｍ，長さ１０００ｍｍ）について、実施例
１と同様にして圧力損失の比較測定を行ない、結果を第
４図に示した。Comparative Example 1 A commercially available glass fiber bag filter (inner diameter 115 mm,
Comparative measurement of pressure loss was carried out in the same manner as in Example 1 for an outer diameter of 120 mm and a length of 1000 mm), and the results are shown in FIG.
【００５５】比較例２ 起毛処理を施さなかったこと以外は実施例１と同様にし
てフィルタを製造し、同様に圧力損失の比較測定を行な
い、結果を第４図に示した。Comparative Example 2 A filter was manufactured in the same manner as in Example 1 except that the raising treatment was not performed, and a comparative measurement of pressure loss was similarly performed. The results are shown in FIG.
【００５６】第４図より、本発明のフィルタは、ダスト
負荷が大きい場合であっても、圧力損失が小さく、効率
的な除塵処理を行なえることが明らかである。It is apparent from FIG. 4 that the filter of the present invention has a small pressure loss and can perform an efficient dust removal process even when the dust load is large.
【００５７】実施例２ 固形分８重量％のポリビニルアルコール水溶液を含浸さ
せた厚さ３ｍｍのチョップドヤーン成形体（直径１１μ
ｍのＳｉＣ繊維を８００本収束したヤーンを長さ１２ｍ
ｍに切断したチョップドヤーンをＳＭＣ法により成形し
てなるもの）を型に巻き付け、４０℃，３００ｔｏｒｒ
にて真空乾燥した後、表面にアセトン：フェノール＝
２：１（重量比）の樹脂液を含浸させた厚さ３ｍｍのフ
ェルト（直径１１μｍのＳｉＣ繊維の連続繊維よりなる
フェルト）を１層巻き付けた。その後、オートクレーブ
中で硬化させた後、窒素ガス雰囲気中にて９００℃で加
熱して樹脂を炭化させた。このようにして得られたＳｉ
Ｃ繊維成形体の表面をワイヤブラシで起毛処理した後、
ＣＶＤ法によりＳｉＣコーティング層を形成して、第１
図に示す断面形状及び寸法の、フランジ部１Ａ，円筒部
１Ｂ，底面部１Ｃよりなり、表面層１ａ及び基層１ｂの
積層構造を有する円筒形フィルタを製造した。Example 2 A 3 mm thick chopped yarn molded product (diameter: 11 μm) impregnated with an aqueous solution of polyvinyl alcohol having a solid content of 8% by weight.
12m long yarn with 800 m of SiC fibers converged
m is formed by shaping the chopped yarn cut into pieces by the SMC method) into a mold at 40 ° C., 300 torr.
After drying in vacuum, acetone: phenol =
One layer of 3 mm thick felt (felt made of continuous fiber of 11 μm diameter SiC fibers) impregnated with a 2: 1 (weight ratio) resin liquid was wound. Then, after hardening in an autoclave, the resin was heated at 900 ° C. in a nitrogen gas atmosphere to carbonize the resin. The Si thus obtained
After brushing the surface of the C fiber molded body with a wire brush,
After forming a SiC coating layer by the CVD method, the first
A cylindrical filter having a cross-sectional shape and dimensions shown in the figure, including a flange portion 1A, a cylindrical portion 1B, and a bottom portion 1C, and having a laminated structure of a surface layer 1a and a base layer 1b was manufactured.
【００５８】なお、得られたフィルタの各層の構成要素
の体積含有率は次の通りである。The volume content of the components of each layer of the obtained filter is as follows.
【００５９】表面層 ＳｉＣ繊維：３％ 炭素：２％ ＳｉＣコーティング層：８％ 空孔：８６％基層 ＳｉＣ繊維：１５％ 炭素：５％ ＳｉＣコーティング層：６％ 空孔：７４％ また、表面層１ａの厚さは１．５ｍｍ、基層１ｂの厚さ
は２．５ｍｍであった。 Surface layer SiC fiber: 3% Carbon: 2% SiC coating layer: 8% Vacancies: 86% Base layer SiC fiber: 15% Carbon: 5% SiC coating layer: 6% Vacancies: 74% The thickness of 1a was 1.5 mm, and the thickness of base layer 1b was 2.5 mm.
【００６０】得られたフィルタに第２図に示す熱サイク
ルと第３図に示す圧力サイクルとをそれぞれ負荷した
後、表１に示すゴミ焼却物を焼却して発生した排ガスを
下記条件で除塵処理し、そのときの圧力損失の変動と捕
集効率の変化をそれぞれ第５図及び第６図に示した。After applying the heat cycle shown in FIG. 2 and the pressure cycle shown in FIG. 3 to the obtained filter, respectively, the exhaust gas generated by incinerating the refuse incineration shown in Table 1 is subjected to dust removal treatment under the following conditions. The change in pressure loss and the change in collection efficiency at that time are shown in FIGS. 5 and 6, respectively.
【００６１】[0061]
【表１】 [Table 1]
【００６２】除塵条件 排ガス量：１２００ｍ3 ／ｈｒ（８２５℃において） 排ガス温度：１０００〜１０５０℃ ダスト種類：ゴミ焼却灰 ダスト濃度：５ｇ／Ｎｍ3 ダスト負荷：約３００ｇ／ｍ2 ・ｈｒ 濾過速度：３．９ｍ／ｍｉｎ（１０２５℃において） フィルタ本数：２８本（濾過面積約５．１ｍ2 ） 再生方法：パルスエア（タイマ制御：約３分間隔） 第５図及び第６図より、本発明のフィルタによれば、長
期にわたり、小さい圧力損失にて、また、高い捕集効率
にて安定に除塵処理できることが明らかである。 Dust removal conditions Exhaust gas amount: 1200 m 3 / hr (at 825 ° C.) Exhaust gas temperature: 1000 to 1050 ° C. Dust type: incineration ash Dust concentration: 5 g / Nm 3 Dust load: about 300 g / m 2 · hr Filtration speed: 3.9 m / min (at 1025 ° C.) Number of filters: 28 (filtration area: about 5.1 m 2 ) Reproduction method: pulse air (timer control: about 3 minute intervals) From FIGS. 5 and 6, the filter of the present invention is shown. According to the results, it is clear that dust can be stably removed over a long period of time with a small pressure loss and a high collection efficiency.
【００６３】実施例３ 実施例１と同様の方法により製造した有底筒形フィルタ
を使用して、外形寸法が３ｍ×４．３ｍ×１．５ｍ高さ
で総濾過面積が１７４ｍ2 の除塵器を製造し、前記表１
に示すゴミ焼却物を焼却して発生した排ガスを下記除塵
条件にて処理した。Example 3 A dust remover having an outer dimension of 3 m × 4.3 m × 1.5 m and a total filtration area of 174 m 2 was prepared using a bottomed cylindrical filter manufactured in the same manner as in Example 1. And the above Table 1
Exhaust gas generated by incineration of the garbage incineration shown in Table 2 was treated under the following dust removal conditions.
【００６４】その結果、フィルタの捕集効率は処理開始
から半年後においても９９．５％と著しく高く、また、
圧力損失も４ｍ／ｍｉｎの濾過速度で８０ｍｍＡｑと低
く抑えることができ、高効率処理が可能であった。As a result, the collection efficiency of the filter was remarkably high at 99.5% even six months after the start of the treatment.
The pressure loss was as low as 80 mmAq at a filtration speed of 4 m / min, and high-efficiency treatment was possible.
【００６５】除塵条件 排ガス量：９７００Ｎｍ3 ／ｈｒ 処理温度：９００℃ 除塵器出口ダスト濃度：７ｇ／Ｎｍ3 比較例３ 市販のインコネル製バッグフィルタ（外径８．９ｃｍ×
長さ１．０ｍの有底円筒形フィルタ）を用いた除塵器
（外形寸法が外径２．５ｍ×高さ１３ｍ，総濾過面積が
１７４ｍ2 ）で、実施例３と同様に除塵処理を行なっ
た。 Dust removal conditions Exhaust gas amount: 9700 Nm 3 / hr Treatment temperature: 900 ° C. Dust concentration at the outlet of the dust remover: 7 g / Nm 3 Comparative Example 3 A commercially available bag filter made of Inconel (outer diameter: 8.9 cm ×
A dust remover (outer diameter 2.5 m × height 13 m, total filtration area 174 m 2 ) using a bottomed cylindrical filter having a length of 1.0 m was subjected to dust removal treatment in the same manner as in Example 3. Was.
【００６６】その結果、圧力損失は濾過速度０．４ｍ／
ｍｉｎで２５０ｍｍＡｑと高い上に、処理開始半年後に
は捕集効率はフィルタの腐食劣化のために７５％にまで
低下した。As a result, the pressure loss was 0.4 m / filtration speed.
The min. efficiency was as high as 250 mmAq, and the collection efficiency was reduced to 75% six months after the start of the treatment due to the corrosion deterioration of the filter.
【００６７】比較例４ 起毛処理を施さなかったこと以外は実施例３と同様にし
てフィルタを製造し、同様に除塵処理を行なったとこ
ろ、フィルタの捕集効率は処理開始から半年後において
も９９．５％と著しく高いものであったが、圧力損失は
４ｍ／ｍｉｎの濾過速度で１０５ｍｍＡｑと実施例３の
ものに比べて若干高かった。Comparative Example 4 A filter was manufactured in the same manner as in Example 3 except that the raising treatment was not performed, and the dust removal processing was performed in the same manner. The collection efficiency of the filter was 99 months after the start of the processing. Although it was remarkably high at 0.5%, the pressure loss was 105 mmAq at a filtration speed of 4 m / min, which was slightly higher than that of Example 3.
【００６８】[0068]
【発明の効果】以上詳述した通り、本発明のフィルタに
よれば、耐熱性、高温での耐腐食性、耐久性に優れ、し
かも圧力損失が小さくかつ薄肉化が可能で、また、ＣＶ
Ｄコーティング層形成工程におけるハンドリングが容易
な高効率処理及び除塵設備の小型化に有効なフィルタが
提供される。As described above in detail, according to the filter of the present invention, heat resistance, corrosion resistance at high temperatures, excellent durability, yet allows the pressure loss is small and thin, also, CV
Easy handling in D coating layer formation process
The present invention provides a filter which is effective for highly efficient processing and miniaturization of dust removing equipment.
【００６９】[0069]
【００７０】請求項２のフィルタによれば、圧力損失が
小さく、取り扱い性に優れ、しかも逆洗時に加えられる
圧力パルスの繰り返しや、熱衝撃の繰り返しにも十分に
耐え得るフィルタが提供される。According to the filter of the second aspect , there is provided a filter which has a small pressure loss, is excellent in handleability, and can sufficiently withstand the repetition of the pressure pulse applied during the backwashing and the repetition of the thermal shock.
【００７１】本発明のフィルタによれば、高温排ガスを
冷却することなくそのまま除塵処理することにより、熱
エネルギーの回収再利用が可能とされる。According to the filter of the present invention, it is possible to recover and reuse thermal energy by directly removing dust from the high-temperature exhaust gas without cooling it.
【図１】実施例１，２で製造したフィルタを示す断面図
である。FIG. 1 is a sectional view showing a filter manufactured in Examples 1 and 2.
【図２】実施例１，２においてフィルタに負荷した熱サ
イクル条件を示すグラフである。FIG. 2 is a graph showing thermal cycle conditions applied to filters in Examples 1 and 2.
【図３】実施例１，２においてフィルタに負荷した圧力
サイクル条件を示すグラフである。FIG. 3 is a graph showing pressure cycle conditions applied to filters in Examples 1 and 2.
【図４】実施例１及び比較例１，２の結果を示すグラフ
である。FIG. 4 is a graph showing the results of Example 1 and Comparative Examples 1 and 2.
【図５】実施例２における圧力損失の変動を示すグラフ
である。FIG. 5 is a graph showing a change in pressure loss in Example 2.
【図６】実施例２における捕集効率の変化を示すグラフ
である。FIG. 6 is a graph showing a change in trapping efficiency in Example 2.
１ フィルタ １Ａ フランジ部 １Ｂ 円筒部 １Ｃ 底面部 １ａ 表面層 １ｂ 基層 DESCRIPTION OF SYMBOLS 1 Filter 1A Flange part 1B Cylindrical part 1C Bottom part 1a Surface layer 1b Base layer
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−28415（ＪＰ，Ａ) 実開 昭48−43269（ＪＰ，Ｕ) 実公 平４−25207（ＪＰ，Ｙ２) 実公 昭44−5019（ＪＰ，Ｙ１) (58)調査した分野(Int.Cl.7，ＤＢ名) B01D 39/00 - 39/20 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-28415 (JP, A) JP-A-48-43269 (JP, U) JP-A-4-25207 (JP, Y2) JP-A-44-207 5019 (JP, Y1) (58) Field surveyed (Int. Cl. 7 , DB name) B01D 39/00-39/20
Claims (2)
ナ・シリカ及び炭素よりなる群から選ばれる１種又は２
種以上の繊維で構成される繊維成形体の該繊維表面に、
炭化珪素、窒化珪素、アルミナ及び炭素よりなる群から
選ばれる１種又は２種以上の気相蒸着法によるコーティ
ング層を形成してなるフィルタであって、 前記繊維成形体は、フィルタの表面側を構成する第１繊
維層と、該第１繊維層の裏面側に設けられた第２繊維層
とを備える積層体であって、 該第１繊維層は繊維が不織布状に集合した層であり、か
つ、第２繊維層は繊維の織布の層又はチョップドヤーン
の集合層であり、 前記繊維成形体は、前記コーティング層形成に先立ちフ
ィルタ表面側に相当する面が起毛処理されており、か
つ、繊維を炭素又は黒鉛で接合してなることを特徴とす
るフィルタ。1. One or two selected from the group consisting of silicon carbide, silicon nitride, alumina, alumina / silica and carbon.
On the fiber surface of a fiber molded body composed of at least one kind of fiber,
A filter formed by forming one or two or more kinds of coating layers formed by a vapor deposition method selected from the group consisting of silicon carbide, silicon nitride, alumina, and carbon, wherein the fiber molded body has a surface side of the filter. A laminate comprising a first fiber layer to be configured and a second fiber layer provided on the back surface side of the first fiber layer, wherein the first fiber layer is a layer in which fibers are gathered in a nonwoven fabric shape, The second fiber layer is a layer of a woven fabric of fibers or an aggregated layer of chopped yarn, and the fiber molded body has a surface corresponding to the filter surface side subjected to a brushing treatment prior to the formation of the coating layer .
A filter comprising fibers bonded with carbon or graphite .
層で構成される表面層の繊維の体積含有率が１〜１０
％、コーティング層の体積含有率が２〜２０％、繊維を
接合する炭素又は黒鉛の体積含有率が１〜２０％、空孔
の体積含有率が５０〜９６％であり、第２繊維層で構成
される基層の繊維の体積含有率が５〜２０％、コーティ
ング層の体積含有率が５〜２０％、繊維を接合する炭素
又は黒鉛の体積含有率が１〜２０％、空孔の体積含有率
が４０〜８９％であることを特徴とするフィルタ。2. The filter according to claim 1 , wherein the volume content of the fibers in the surface layer composed of the first fiber layer is 1 to 10.
%, The volume content of the coating layer is 2 to 20%, the volume content of the carbon or graphite joining the fibers is 1 to 20%, and the volume content of the pores is 50 to 96%. The volume content of the fibers in the base layer to be composed is 5 to 20%, the volume content of the coating layer is 5 to 20%, the volume content of the carbon or graphite joining the fibers is 1 to 20%, and the volume content of the pores A filter having a ratio of 40 to 89%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5263387A JP3003476B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5263387A JP3003476B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07116435A JPH07116435A (en) | 1995-05-09 |
| JP3003476B2 true JP3003476B2 (en) | 2000-01-31 |
Family
ID=17388788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5263387A Expired - Fee Related JP3003476B2 (en) | 1993-10-21 | 1993-10-21 | filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3003476B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102380259A (en) * | 2010-08-25 | 2012-03-21 | 东丽纤维研究所（中国）有限公司 | Filter material and purpose thereof |
| KR101426523B1 (en) * | 2007-01-12 | 2014-08-06 | 주식회사 칸세라 | Honeycomb Ceramic Filter of Excellent Adhesive Strength |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5097139B2 (en) * | 2009-01-16 | 2012-12-12 | パナソニック株式会社 | Production method of bag-like separation membrane and bag-like separation membrane |
-
1993
- 1993-10-21 JP JP5263387A patent/JP3003476B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101426523B1 (en) * | 2007-01-12 | 2014-08-06 | 주식회사 칸세라 | Honeycomb Ceramic Filter of Excellent Adhesive Strength |
| CN102380259A (en) * | 2010-08-25 | 2012-03-21 | 东丽纤维研究所（中国）有限公司 | Filter material and purpose thereof |
| CN102380259B (en) * | 2010-08-25 | 2015-04-08 | 东丽纤维研究所（中国）有限公司 | Filter material and purpose thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07116435A (en) | 1995-05-09 |
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