JP2984999B1 - Pressure control mechanism in substrate or sheet surface cleaning and substrate or sheet surface cleaning device provided with this mechanism - Google Patents

Abstract

Kind Code: A1 An adhesive rubber roll absorbs dust adhering to the surface of a substrate or a sheet, and further transfers and removes the dust adsorbed to the adhesive rubber roll by an adhesive tape roll. The pressure between the rubber roll and the substrate or sheet is made variable so that cleaning can be performed efficiently. SOLUTION: Each support shaft (9) of an adhesive rubber roll (4) and an adhesive tape roll (8) which is in close contact therewith is rotatably supported by a slide rotating bearing (10) which can slide in the vertical direction. A pressure rod (14) that drives a pressure receiving rod (11) integrally attached to a slide rotation bearing (10) of a tape roll (8) by a DC motor (15) via gears (16), (17) and (18). ), The pressure between the pressure-sensitive adhesive tape roll, the pressure-sensitive rubber roll, and the substrate or sheet can be optimized by controlling the pressure by the optical sensor (19).
Dust on the surface of the substrate or sheet is efficiently removed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device for adsorbing dust adhered to a surface of a substrate or a sheet in a manufacturing process by an adhesive rubber roll having an adhesive force and transferring and removing the dust to an adhesive tape roll. The present invention relates to a pressure control mechanism for a pressure-sensitive adhesive roll and a pressure-sensitive adhesive tape roll used.

[0002]

2. Description of the Related Art Conventionally, an adhesive rubber roll and an adhesive tape roll used in a cleaning device for adhering and transferring and removing dust adhering to the surface of a substrate or a sheet in a manufacturing process by an adhesive rubber roll having an adhesive force include: In order to increase the adsorption of dust to the adhesive rubber roll by adhering to the substrate or sheet surface with a certain pressure, the dust adsorbed to the adhesive rubber roll is also reliably transferred to the adhesive tape roll. In order to remove the adhesive tape roll, it is necessary to press the adhesive tape roll against the adhesive rubber roll and further press the adhesive rubber roll against the substrate or sheet surface by the pressing force. In order to control the pressure, a pressure control mechanism was built in this cleaning device. And an air cylinder as a power source of compressed air supplied Ri, those that use electromagnetic solenoid valve or a torque motor or the like is generally used.

[0003]

However, as in the above-described conventional apparatus, it is used in a cleaning apparatus for transferring and removing dust adhering to the surface of a substrate or a sheet in a manufacturing process by an adhesive rubber roll having an adhesive force. When using an air cylinder powered by compressed air supplied by an air compressor for the pressure control mechanism of the adhesive rubber roll and adhesive tape roll, the adhesive rubber roll and adhesive used in this cleaning device There is a drawback in that pressure reduction for adjusting pressure to obtain an optimum pressure in each roll such as a tape roll requires a very complicated adjustment work for an operator.

Further, in supplying compressed air which is a power source of the air cylinder, it is necessary to install an air tank in addition to the air compressor, and the installation space required for installing the air compressor and the air tank narrows the working space. In addition, the cost required for the installation increases.

[0005] Further, in the air cylinder for adjusting the pressure of each roll used in the conventional cleaning apparatus,
Due to the characteristic that the cylinder is pushed off by compressed air, it tends to be over-pressurized. Therefore, when passing between the adhesive rubber rolls, the dust adhering to the surface is adsorbed and transferred and removed precisely for LCDs and the like. There is a high possibility that the substrate is damaged, and the adhesive rubber roll itself may be damaged.

On the other hand, an adhesive roll used in a washing apparatus for transferring and removing dust adhering to a surface of a substrate or a sheet in a manufacturing process by an adhesive rubber roll having an adhesive force like the above-mentioned conventional one. In the case of using an electromagnetic solenoid valve or a torque motor for the pressure control mechanism of the adhesive tape roll, when the temperature becomes high, the performance of the electromagnetic solenoid valve or the torque motor, etc. is reduced, and precise pressure control cannot be performed. Therefore, in order to prevent the performance deterioration due to the high temperature, a cooling mechanism for an electromagnetic solenoid valve or a torque motor which is a power source of the pressurization control is required separately.
In order to perform precise pressurization control, it is necessary to precisely control the power generated by these electromagnetic solenoid valves or torque motors. There is also a disadvantage that it becomes necessary and is very disadvantageous in terms of maintenance and associated costs.

Accordingly, the present invention is to improve the above-mentioned drawbacks of the prior art, and to perform precise pressurization control with a simple structure to improve the cleaning ability of the surface cleaning apparatus and to improve the durability of the apparatus. Is also to be raised sufficiently.

[0008]

[MEANS FOR SOLVING THE PROBLEMS] Therefore, a frame
And an adhesive rubber roll that is slidably supported and can adhere directly to the surface of a substrate or sheet, and adheres to and separates from the surface of the adhesive rubber roll, adsorbs and removes dust adhering to the surface. A pressure receiving rod support is integrally attached to a slide rotating bearing that supports the adhesive tape roll so as to be slidable in the vertical direction between the pressure receiving tape support and a pressure spring. the pressure rod is provided through, via a gear mechanism to contact the motor shaft by the driving of the motor
And pressurize with a pressure rod that is movable by transmitting rotation , or force the pressure receiving rod and pressure rod
Adhesive tape roll with connecting rod
By sliding to the adhesive rubber roll side, between the adhesive tape roll and the adhesive rubber roll provided with the initial gap, or, via the adhesive tape roll, between the adhesive rubber roll and the substrate or sheet provided with the initial gap appropriate pressure of
It is made by increasing and decreasing the pressure .

In other words, the substrate or sheet surface cleaning apparatus is rotatably arranged in two upper and lower rows so as to freely transfer and remove dust adhering to the surface of the substrate or sheet passing through the space in the frame. Then, at least one of them is rotated by the drive of the motor, and the substrate or sheet passes therebetween while being in contact with the adhesive rubber roll, and the two adhesive rubber rolls are attracted to the surface of the adhesive rubber roll. In order to further absorb and transfer and remove the dust that is generated, each of the two adhesive tape rolls can be adhered to the upper and lower adhesive rubber rolls and supported rotatably, and the two upper and lower adhesive rubber rolls are used. When the rubber roll and each adhesive tape roll that can be in close contact with each adhesive rubber roll are separately provided, and when the pressing force by the pressure rod described below is released Has a return mechanism to automatically return the adhesive rubber roll and the adhesive tape roll to the position provided at the initial separation, and one or both of the two adhesive rubber rolls arranged side by side above and below The adhesive rubber rolls are slidable in the vertical direction, and the support shafts of the adhesive tape rolls that can be in close contact with each other are integrally supported by slide rotating bearings that can slide in the vertical direction. On one or both bearings , the pressure bearing
A pressure support is integrally provided, and a pressure receiving rod provided on the pressure receiving rod support via a compression spring is driven by a motor through a gear mechanism connected to the motor shaft.
Pressure roller that is movable by transmitting rotation
The pressure receiving rod and the pressure locking rod.
And a rod that is integrally connected to the
To the pressure receiving rod support that is integrated with the ride rotary bearing
A sensor is provided, and a compression spring is attached to the pressure receiving rod support.
Detected to be integrated with the pressure receiving rod provided via
By providing a plate, the pressure rod pushes the pressure receiving rod
The pressure receiving rod generated by the compression of the compression spring
Wherein the difference between the amount of movement and the pressure receiving rod de support sensor
-And the plate to be detected,
Control the pressing force of the pressure rod against the pressure receiving rod.
By Gosuru, slide to the optimum position an adhesive tape roll through the pressure receiving rod support and sliding rotary bearing, the pressure-sensitive adhesive tape roll formed by providing the initial interval adhesive
Contact between the rubber rolls and via the adhesive tape roll
Adhesive rubber roll and substrate or sheet with initial spacing
And a pressurizing control mechanism for appropriately increasing and decreasing the pressure between them.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS By actuating a pressure control mechanism provided in a surface cleaning apparatus according to an embodiment of the present invention, a pressure rod which appears and disappears by driving a motor through gears meshing with each other is positioned by a sensor. By supporting the pressure-sensitive adhesive tape roll by projecting it while performing detection, and pressing or pressing against a pressure-receiving rod provided via a compression spring on a pressure-receiving rod support provided integrally with the slide rotating bearing. The slide rotating bearing that integrally supports the shaft is pressed toward the adhesive rubber roll, and the adhesive tape roll is pressed against the adhesive rubber roll with the pressing force, and the adhesive rubber roll is pressed against the substrate or sheet, respectively. The pressure of the adhesive rubber roll on the surface of the substrate or sheet passing between the two adhesive rubber rolls increases. Dust adhering to the surface of the substrate or sheet passing between these two adhesive rubber rolls can be efficiently adsorbed and transferred and removed, and at the same time, the adhesive shaft of the support shaft of the adhesive tape roll is moved to the adhesive rubber roll side. The slides will also increase the adhesive strength of each adhesive tape roll that will be in close contact with each adhesive rubber roll, so that the dust adsorbed on the adhesive rubber roll can also be efficiently transferred to the adhesive tape roll, always The surface of the adhesive rubber roll that directly adheres to the substrate or sheet can be kept clean.

The pressure applied to the pressure-sensitive adhesive tape roll is
Since it is accurately performed by the pressure control mechanism by the motor, the pressure rod, the pressure receiving rod, etc., it is possible to prevent the adhesive rubber roll from deteriorating due to overpressurization and significantly improve its durability. Since the pressurized state is held by the compression spring supporting the pressure receiving rod, it is possible to further prevent deterioration of the adhesive rubber roll and improve its durability, and also prevent damage to the substrate or the sheet itself. it can.

[0012]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. (1) shown in FIG. 1 is a substrate or sheet surface cleaning apparatus according to an embodiment of the present invention.
In order to adsorb and transfer and remove dust adhering to the surface of the substrate or the sheet (2) passing through the space (5), the two are arranged side by side in the upper and lower directions, and are rotatably supported. The adhesive rubber rolls (4) and (4 ') that allow the substrate or the sheet (2) to pass through by being rotated by the drive of the motor (7) via the motor, and the two adhesive rubber rolls (4) and (4') ) Can be renewed by peeling at any time, so that the dust adsorbed on the surfaces of the adhesive rubber rolls (4) and (4 ′) is further absorbed and transferred and removed, so that they can be in close contact with and separated from each other. It is composed of an adhesive tape roll (8) (8 ') rotatably supported.

In the substrate or sheet surface cleaning apparatus (1), an adhesive rubber roll (4) which is provided in parallel with the upper and lower two in the frame (3) and is rotatably supported.
Of (4 ′), the lower adhesive rubber roll (4 ′) does not slide vertically and is fixed corresponding to the height of a conveyor (not shown) that transports the substrate or sheet (2), Both ends of the upper adhesive rubber roll (4) are supported by slide rotating bearings (10) so that the upper adhesive rubber roll (4 ') can be vertically slidably attached to and detached from the lower adhesive rubber roll (4'), and An adhesive rubber roll spring (27) is set so that a resilient force acts in the detaching direction, and the upper adhesive tape roll (8) which is in close contact with and detachable from the upper adhesive rubber roll (4). Both ends of the support shaft (9) are integrally supported by a slide rotating bearing (10) slidable in a vertical direction, and a worm gear (10) rotated by a DC motor (15) in the slide rotating bearing (10). 6) and so that the mesh with each other via the planetary gear (17) from the rack gear (18)
The pressure receiving rod support (23) integrated with the slide rotary bearing (10) is provided so as to be able to face and abut against the pressure rod (14), which is vertically protruded and retracted by the gear mechanism. The pressure receiving rod (11) supported by the compression spring (13) built in the pressure receiving rod holder (12) is disposed, and is integrated with the slide rotating bearing (10).
An optical sensor (1) is attached to the pressure receiving rod support (23) attached.
9) and compression on the pressure receiving rod support (23).
A pressure receiving rod (11) provided via a spring (13);
By providing the detected plate (20) so as to be integrated,
When the pressure rod (14) urges the pressure receiving rod (11)
A pressure receiving rod generated by compression of the compression spring (13).
(11) Movement of the pressure receiving rod support (23)
The difference between the optical sensor (19) and the plate to be detected (20).
Can be detected by the pressure lock.
(14) reduces the pressing force against the pressure receiving rod (11).
By controlling, the upper adhesive tape roll (8)
Slide bearing (1) that integrally supports the support shaft (9)
0) to the pressure rod (1) via the pressure receiving rod (11).
4)押勢an optimal position by sliding the initially interval
Adhesive tape roll (8) with adhesive rubber roll
Between the tapes (4) and via the adhesive tape roll (8)
An adhesive rubber roll (4) with an initial gap and a substrate or
Is provided with a pressure control mechanism for appropriately increasing and decreasing the pressure between the sheets (2) .

The position detection by the optical sensor (19) is performed by the compression bar on the pressure receiving rod support (23) as described above.
And a pressure receiving rod (11) provided through
By providing the detected plate (20) so as to form a body,
When the pressure rod (14) urges the pressure receiving rod (11)
A pressure receiving rod generated by compression of the compression spring (13).
The amount of movement of itself (11) and the amount of movement of the pressure receiving rod support (23)
The difference between the moving amount and the moving amount is determined by how far the tip of the detection target plate (20) integrally attached to the pressure receiving rod support (23) blocks the light beam emitted by the reflection type optical sensor (19). The optical sensor (19) itself is provided with an optical sensor position adjusting knob (21) so that the initial position of the optical sensor (19) can be adjusted.

In addition, a pressure control mechanism similar to that provided on the upper adhesive tape roll (8) is provided on the lower side of the adhesive tape roll (8 ') with respect to the slide rotary bearing (10). It is installed upside down. Each of the adhesive tape rolls (8) and (8 ') is integrally supported by being fitted to an adhesive tape holder (22) at the tip of a support shaft (9) integrated with the slide rotary bearing (10). Becomes

Since the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention has the above-described configuration, for example, the upper side built in the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention. By operating the pressure control mechanism of (1), the upper adhesive tape roll (8) in the frame (3) constituting the substrate or sheet surface cleaning apparatus (1) initially becomes higher than the upper adhesive rubber roll (4). The slide rotating bearing (10), which is separated but integrally supports the support shaft (9) of the upper adhesive tape roll (8), has a DC motor at the upper part of the slide rotating bearing (10). (15) by be infested than <br/> the gear mechanism consisting of rack gear (18) to be able to mesh with each other via a worm gear (16) and planet gear (17) which rotates in the vertical direction It become pressurized rod (14)
But pressure rod (11) which receives the resilient force of the compression spring (13) in the pressure receiving rod retaining member (12) and being in contact, the pressure-receiving
When the rod (11) is pressed, the pressure receiving rod support (2)
3) a pressure receiving rod provided via a compression spring (13)
A detection plate (20) may be provided so as to be integrated with (11).
The pressure receiving generated by the compression of the compression spring (13)
The movement amount of the rod (11) and the pressure receiving rod support (23)
The difference between the movement amount and the pressure receiving rod support (23) is
The tip of the detection plate (20) attached to the body is a reflection type
To block the rays emitted by the light sensor (19)
By pushing downward while adjusting with
Since it slides correctly downward, the upper adhesive tape roll (8) integrally supported by the slide rotary bearing (10) via the support shaft (9) becomes the upper adhesive rubber roll (4). ), And presses downward in close contact with the upper adhesive rubber roll (4) supported by the slide rotary bearing.
Slides further downward to come into close contact with the lower adhesive rubber roll (4 '). When the substrate or sheet (2) to be cleaned has a large thickness, the upper adhesive rubber roll (4) and the lower adhesive rubber roll (4 ') do not adhere to each other. The optical sensor position adjustment knob (21) may be adjusted so as to maintain an appropriate space.

Then, the upper pressure-sensitive adhesive tape roll (8) and the pressure-sensitive adhesive tape roll (8) are urged downward by a pressure rod (14) against a pressure-receiving rod (11) integrated with the slide rotary bearing (10). 8) The upper adhesive rubber roll (4) that comes into close contact with the upper adhesive rubber roll (4) slides downward, thereby forming two upper and lower adhesive rubber rolls (4).
Since the space (5) between (4 ') is narrowed or adhered, dust passing between the upper and lower two adhesive rubber rolls (4) and (4') and adhering to the surface is adsorbed and transferred and removed. Since the pressure by the pressure-sensitive adhesive rubber rolls (4) and (4 ') on the surface of the substrate or sheet (2) to be processed increases, these two pressure-sensitive adhesive rubber rolls (4)
(4 ') Dust adhering to the surface of the substrate or sheet (2) passing through the space can be efficiently adsorbed and transferred and removed, and the support shaft (9) of the upper adhesive tape roll (8) can be removed. The downward slide is, of course, based on the premise that the upper adhesive tape roll (8) is in close contact with and pressed against the upper adhesive rubber roll (4). Directly adheres, adsorbs dust adhering to the surface thereof, and efficiently adsorbs the dust adsorbed on the upper adhesive rubber roll (4) for transfer removal to the upper adhesive tape roll (8) so that the substrate is always directly in contact with the substrate. Alternatively, the surface of the upper adhesive rubber roll (4) that is in close contact with the sheet (2) can be kept clean, and the adhesive force of the adhesive rubber roll (4) can be maintained for a long time.

In the lower adhesive tape roll (8 '), the same operation as in the upper adhesive tape roll (8) is performed upside down, that is, the lower adhesive tape roll (8'). The slide rotating bearing (10) integrally supporting the support shaft (8) of FIG. 8) has a pressurizing rod (14) which is vertically protruded and retracted by the operation of the DC motor (15). With (11) facing upward, the light beam of the optical sensor (19) is
Integrally mounted on the pressure receiving rod support (23)
The end of the detected plate (20) is a reflection type optical sensor (1).
By pressing while adjusting while controlling how much the light beam emitted in 9) is blocked, it slides accurately upward. Therefore, the slide rotating bearing (10) is connected to the slide rotating bearing (10) via the support shaft (9). The lower pressure-sensitive adhesive tape roll (8 ') integrally supported is pressed and adheres to the lower pressure-sensitive adhesive rubber roll (4'). Thereby, the dust adhering directly to the surface of the substrate or sheet (2), adsorbing the dust adhering to the surface, and efficiently adhering the dust adsorbed to the lower adhesive rubber roll (4 ') to be transferred and removed are efficiently removed. By adsorbing to the lower adhesive tape roll (8 '), the surface of the lower adhesive rubber roll (4') which is always in direct contact with the substrate or sheet (2) can be kept clean, and the adhesive rubber roll (4) can be kept clean. ')
Can be maintained for a long time.

The upper adhesive tape roll (8)
The pressurizing is caused by a gear mechanism including a worm gear (16) rotated by a DC motor (15) and a rack gear (18) meshing with each other via a planetary gear (17) so as to protrude and retract in a vertical direction. Pressure rod (1
4) and a pressure receiving rod that is disposed at a position facing the pressure rod (14) and is integrated with a slide rotation bearing (10) that integrally supports the support shaft (9) of the upper adhesive tape roll (8). Since it is accurately performed by a pressure control mechanism by a pressing force between a pressure receiving rod (11) provided on a support (23) via a compression spring (13), the substrate or sheet (2) is directly ) Prevents the adhesive rubber rolls (4) (4 ′) from deteriorating due to excessive friction and adhesion caused by over-pressurization, Its durability can be significantly improved.

Further, a slide rotary bearing (10) integrally supporting the support shaft (9) of the upper adhesive tape roll (8).
A compression spring (13) is built in a pressure receiving rod holder (12) which constitutes a pressure receiving rod support (23) integrated with the DC motor (1).
When the pressure receiving rod (11) projects downward and presses the pressure receiving rod (11) in accordance with the rotation of 5), the pressure receiving rod (11) rotates the pressure receiving rod support (23) via the compression spring (13) and further slides. Since the bearing (10) is pressed downward, when the control is stopped by the optical sensor (19) and the detection target plate (20), the compression mode of the compression spring (13) should have a margin. As a result, the substrate or sheet (2) passes between the upper and lower adhesive rubber rolls (4) and (4 '), and the upper adhesive rubber roll (4) is moved depending on the thickness of the substrate or sheet (2). When an upward pressing force is applied, the pressing force is received from the upper adhesive rubber roll (4) by the further compression of the compression spring (13) via the upper adhesive tape roll (8), that is, the substrate or Sheet (2) is up Lower adhesive rubber roll (4)
(4 ') When passing through the gap, the upper adhesive rubber roll (4) and the upper adhesive tape roll (8) can be moved slightly upward according to the thickness of the substrate or sheet (2), In addition to preventing damage to the substrate or the sheet (2), the adhesive rubber roll (4) is further improved.
The deterioration of (4 ′) can be prevented, and the durability can be significantly improved.

The adhesive tape roll (8)
In order to release the pressing force on the adhesive rubber rolls (4) and (4 ') by (8'), the DC motor (15) is rotated in the reverse direction, for example, the pressure rod for the upper adhesive tape roll (8) is released. When (14) is returned upward, the upper adhesive tape roll (8) is repelled by the adhesive tape roll spring (28) stretched between the upper adhesive tape roll (8) and the frame (3). , And the upper adhesive rubber roll (4) is also separated from the lower adhesive rubber roll (4 ') by the elastic force of the adhesive rubber roll spring (27). When the pressing force of the pressure rod (14) is released, the lower adhesive tape roll (8 ') is separated from the lower adhesive rubber roll (4') by its own weight.

As shown in FIG. 6, the pressure rod (1
4) and a pressure receiving rod (11) connected and integrated, and a rod (24) is used. When the pressing force of the upper adhesive tape roll (8) against the slide rotary bearing (10) is released, the rod (24) is used. An upper limit optical sensor (25) for detecting a limit of pulling back the upper adhesive tape roll (8) and an upper limit detection plate (26) therefor are installed, and the upper adhesive tape roll (8) is pulled by pulling back the rod (24). It can also be returned to a state where it is detached from the upper adhesive rubber roll (4).

As shown in FIG. 7, a pressure rod (1
As the retracting mechanism of 4), a 1/100 to 1/200 reduction gear head (2) is mounted on the rotating shaft of the DC motor (15).
9), and a deceleration rotation shaft (3
The rotating gear (31) fitted to the leading end of (0) may be engaged with a rack gear (18) provided on the rear end side of the pressure rod (14).

[0024]

As described above, in a surface cleaning apparatus in which dust adhering to the surface of a substrate or a sheet is adsorbed by an adhesive rubber roll and transferred and removed, the dust adheres to the adhesive rubber roll and adheres to the surface of the adhesive rubber roll. A pressure rod that allows the adhesive tape roll that further adsorbs the attached dust to move in and out through a gear that meshes with the driving force of the DC motor, and a slide bearing that supports the support shaft of the adhesive tape roll. By pressing the adhesive tape roll and adhesive rubber roll precisely by the pressing force under the control of the optical sensor between the integrated pressure receiving rod and the pressure, the efficiency is optimized by optimizing the pressure on the substrate or sheet surface. It can remove dust on the surface well and adsorb and remove dust adhering to the adhesive rubber roll and adhering to its surface. Smooth and efficient adsorption of dust to the adhesive tape roll becomes possible, and always keeps the surface of the adhesive rubber roll clean, enabling its adhesive force to be maintained for a long period of time, and furthermore, to the substrate or sheet. Since excessive pressurization can be prevented, inadvertent abrasion and damage of the adhesive rubber roll can be reduced, and the durability thereof can be significantly improved.At the same time, damage to the substrate or the sheet itself can be prevented, and This has an excellent effect that the manufacturing cost and the running cost of the substrate or sheet surface cleaning apparatus can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic view of a substrate or sheet surface cleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a front view showing a pressure control mechanism of the substrate or sheet surface cleaning apparatus according to the embodiment of the present invention.

FIG. 3 is an enlarged front view of a main part of a pressure rod in a pressure control mechanism of the substrate or sheet surface cleaning apparatus according to the embodiment of the present invention.

FIG. 4 is an enlarged front view of a main part of a pressure receiving rod in a pressure control mechanism of a substrate or sheet surface cleaning apparatus according to an embodiment of the present invention.

FIG. 5 is a view showing pressure transmission from the pressure-sensitive adhesive tape roll to the substrate or sheet in the substrate or sheet surface cleaning apparatus according to the embodiment of the present invention.

FIG. 6 is a front view showing a pressure control mechanism of a substrate or sheet surface cleaning apparatus according to another embodiment of the present invention.

FIG. 7 is an enlarged front view of a main part of a pressure rod in a pressure control mechanism of a substrate or sheet surface cleaning apparatus according to another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate or sheet surface cleaning apparatus 2 Substrate or sheet 3 Frame 4, 4 'Adhesive rubber roll 5 Space 6 Belt 7 Motor 8, 8' Adhesive tape roll 9 Support shaft 10 Slide rotation bearing 11 Pressure receiving rod 12 Pressure receiving rod holder 13 Compression Spring 14 Pressure rod 15 DC motor 16 Worm gear 17 Planetary gear 18 Rack gear 19 Optical sensor 20 Detected plate 21 Optical sensor position adjustment knob 22 Adhesive tape holder 23 Pressure receiving rod support 24 Rod 25 Upper limit optical sensor 26 Upper limit cover Detection plate 27 Adhesive rubber roll spring 28 Adhesive tape roll spring 29 Reduction gear head 30 Reduction rotation shaft 31 Rotary gear

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) B08B 11/00 B08B 1/04

Claims (4)

(57) [Claims] 1. A frame slidably supported on a frame.
It is in the adhesive rubber rolls to be directly available in close contact with the surface of the substrate or sheet, adhered to the surface of the adhesive rubber rolls,
The pressure-receiving rod is supported on a slide rotary bearing that supports the adhesive tape roll so that it can slide up and down between the adhesive tape roll and the adhesive tape roll, which is detachable and adsorbs and adheres and removes dust attached to the surface. the body was attached together, the pressure receiving rod provided through the compression spring to the pressure receiving rod support, the motor shaft by the driving of the motor
With pressure rod made as freely <br/> moved by transmitting the rotation through the gear mechanism to contact and押勢, adhesive tape
The paper roll to the adhesive rubber roll side
In, between the adhesive tape roll formed by providing an initial interval adhesive rubber rolls, also through a pressure-sensitive adhesive tape roll, appropriately pressing the <br/> pressure between the adhesive rubber roll and the substrate or sheet formed by providing the initial interval A pressure control mechanism for cleaning the surface of a substrate or sheet under reduced pressure. (2) The pressure receiving rod and the pressure rod are connected and integrated.
The pressure control mechanism according to claim 1, wherein the pressure control mechanism is a rod. 3. A frame which is rotatably arranged side by side in two upper and lower parts so as to adsorb and remove dust adhering to the surface of a substrate or a sheet passing through the space, and at least one of them is motorized. Rotate by the drive of
For the adhesive rubber roll that passes while the substrate or sheet abuts between them, for each of these two adhesive rubber rolls,
In order to further adsorb and transfer and remove dust adsorbed on the surface of the adhesive rubber roll, the adhesive tape roll is constituted by each adhesive tape roll which can be in close contact with the upper and lower two adhesive rubber rolls and is rotatably supported. The upper and lower two adhesive rubber rolls and the respective adhesive tape rolls capable of closely adhering to the respective adhesive rubber rolls are provided separately, and when the pressing force by the pressure rod described later is released, automatically. It has a return mechanism for returning the adhesive rubber roll and the adhesive tape roll to the position provided at the initial separation, and vertically moves one or both of the adhesive rubber rolls arranged in parallel above and below. Slides in which the support shaft of each adhesive tape roll, which can be slidable in the direction Integrally supported by the rolling bearing, in one or both of the slide rotary bearing, and attached integrally to the pressure receiving rod support slide rotary bearing, with respect to the pressure receiving rod is provided through the compression spring to the pressure receiving rod support, Contact this motor shaft by driving the motor
Moveable by transmitting rotation via gear mechanism
Can be freely pressed with the pressure rod
, A pressure receiving rod support integrally attached to the slide rotary bearing
A sensor is provided on the holding body, and a pressure is applied to the pressure receiving rod support.
Be integrated with the pressure receiving rod provided via a compression spring
By providing the plate to be detected, the pressure rod
When the pressure spring is pressed, the pressure
The difference between the movement of the pad and the movement of the pressure receiving rod
The right detection result can be detected by the sensor and the detection plate.
Of the pressure rod against the pressure receiving rod
By controlling the force, by sliding the optimum position an adhesive tape roll through the pressure receiving rod support and sliding rotary bearing, formed by providing an initial interval adhesive tape roll
Between the adhesive rubber roll and the adhesive tape roll
The adhesive rubber roll and the substrate or
A substrate or sheet surface cleaning apparatus in which the pressure between sheets is appropriately increased or decreased. 4. The apparatus for cleaning a surface of a substrate or sheet according to claim 3, further comprising a pressure control mechanism in which the pressure receiving rod and the pressure rod are connected and integrally formed as a rod .