JP2980157B2 - microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope, and more particularly to an infinity microscope capable of observing a sample surface to be inspected at a very low magnification in a wide field of view.

[0002]

2. Description of the Related Art Usually, an interchangeable objective lens to be mounted on a revolver of a microscope must be designed so that its entire length is within a parfocal distance. Note that the parfocal length is a distance along the optical axis between the body-mounted surface when the objective lens is mounted on the revolver and the stage surface on which the sample is mounted.

[0003]

Therefore, for example, when designing an extremely low magnification objective lens having a magnification of 1 or less, the required focal length becomes large, and it is difficult to keep the entire length within the same focal length. It is. As a result, the conventional microscope did not have an extremely low magnification objective lens of 1 × or less.

Therefore, when observing or photographing a wider image on the sample surface to be inspected, a microscope cannot meet the demand. There was only. Therefore, when observing or photographing the details of the sample, a microscope must be used, and when observing or photographing the entire sample, a stereomicroscope or a macro photographic device must be used. As a result, many complicated operations such as positioning of the sample every time the apparatus is changed, and the working efficiency was extremely poor.

The present invention has been made in view of the above-mentioned problems, and has as its object to provide a microscope capable of observing or photographing a sample at various magnifications from high magnification to extremely low magnification.

[0006]

According to the present invention, there is provided a revolver for switching a plurality of first objective lenses with respect to an optical path, and a second objective lens fixed in the optical path. A microscope that forms an observation image of an object via a predetermined first objective lens selected from the plurality of first objective lenses and the second objective lens, wherein the plurality of first objective lenses are One is an ultra-low magnification objective lens, and an ultra-low magnification auxiliary lens that can be inserted into and removed from an optical path is provided between the predetermined first objective lens and the second objective lens. An ultra-low magnification first objective lens is formed by the extra-low magnification objective lens and the extra-low magnification auxiliary lens, and an extra-low magnification first objective lens and the second objective lens are interposed therebetween. A microscope characterized by forming a low-magnification observation image To provide a mirror.

According to a preferred aspect of the present invention, the extremely low magnification objective lens includes, in order from the object side, a front group having a positive refractive power and a rear group having a negative refractive power. The low-magnification auxiliary lens has a positive refractive power as a whole. Further, it is preferable that the extra low magnification auxiliary lens is inserted into an optical path in conjunction with selection of the extra low magnification objective lens from the plurality of first objective lenses.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, an ultra-low magnification objective lens is provided as one of a plurality of interchangeable first objective lenses mounted on a revolver of a microscope. Also, the first objective lens mounted on the revolver and the second objective lens
An extra-low magnification auxiliary lens is provided that can be inserted into and removed from the optical path between the objective lens. When the sample is observed at an extremely low magnification, the revolver is rotated to position the extremely low magnification objective lens in the optical path, and the extra low magnification auxiliary lens is inserted into the optical path.

As described above, in the present invention, the very low magnification first objective lens is constituted by the very low magnification objective lens mounted on the revolver and the very low magnification auxiliary lens fixed in the optical path. Therefore, the total length of the very low magnification objective lens is designed to be within the parfocal distance, and the actual total length of the first objective lens is long including the auxiliary lens, and the first very low magnification first objective lens is used. Large synthetic focal length can be secured. As a result, the first for extremely low magnification with a large synthetic focal length
Through the objective lens and the second objective lens, it is possible to form an extremely low-magnification observation image of, for example, 1 or less.

On the other hand, when observing the sample at a normal magnification instead of a very low magnification, the revolver is turned to select a predetermined first objective lens corresponding to a desired magnification and to use an extra low magnification auxiliary lens. Retreat from the light path. As a result, an observation image with a desired magnification can be formed via the predetermined first objective lens and second predetermined objective lens. As described above, the microscope of the present invention can observe or photograph a sample at each magnification ranging from high magnification to extremely low magnification.

The first ultra-low magnification objective lens composed of the ultra-low magnification objective lens and the ultra-low magnification auxiliary lens has, in order from the object side, three groups of positive, negative and positive. Is desirable. Hereinafter, the reason will be described. At an extremely low magnification, the beam from the object surface has a large diameter because the field of view is wide. Since it is necessary to reduce this large-diameter light beam to within the screw diameter of the revolver, a lens group having a positive refractive power is first arranged.
The next negative / positive lens group focuses a parallel light beam on the object surface when the first objective lens for extremely low magnification is viewed from the opposite side.
Therefore, the negative and positive lens groups are arranged so as to have a so-called telephoto type configuration in which the positive and negative lens groups are arranged apart from each other when viewed from the opposite side. Further, by interlocking the selection of the ultra-low magnification objective lens and the insertion of the ultra-low magnification auxiliary lens into the optical path, the operation can be performed in the same manner as a general microscope, and the operability is improved, which is preferable. .

An embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram schematically showing a configuration of a microscope according to a first embodiment of the present invention. In the first embodiment,
0.5 × objective lens 6 and 0.5 × auxiliary lens 7
Indicates a state arranged in the optical path.

In the microscope shown in FIG.
The light enters the 5 × objective lens 6. The 0.5 × objective lens 6 includes, in order from the object side (sample side), a front group 3 having a positive refractive power as a whole and a rear group 4 having a negative refractive power as a whole. The 0.5 × objective lens 6 is mounted on a revolver (not shown) together with a plurality of other first objective lenses for magnification. Note that the distance along the optical axis AX between the body-attached surface 9 when the other plurality of first objective lenses and the 0.5 × objective lens 6 are mounted on the revolver and the stage surface on which the sample 8 is mounted. Is the so-called parfocal distance. Therefore,
The 0.5 × objective lens 6 is designed to be within this parfocal distance.

Light from the sample 8 through the 0.5 × objective lens 6 is incident on the 0.5 × auxiliary lens 7 having a positive refracting power as a whole. Note that the auxiliary lens 7 for 0.5 magnification is used.
Is configured to be insertable into and removable from the optical path, and to be inserted into the optical path in conjunction with selection of the 0.5 × objective lens 6 by rotation of the revolver. The light that has passed through the 0.5-times auxiliary lens 7 is converted into parallel light by the light condensing action, and enters the second objective lens 2. in this way,
The 0.5 × objective lens 6 and the 0.5 × auxiliary lens 7 form the 0.5 × first objective lens 1 (composite focal length of 40).
0 mm).

Thus, the first objective lens 1 for 0.5 ×
The light from the sample 8 through the second objective lens 2 forms an observation intermediate image 10 at a magnification of 0.5. Observation intermediate image 1
0 is observed by the naked eye through an eyepiece (not shown) or photographed through a photographing system such as a camera.

In the first embodiment, the 0.5-times objective lens 6 mounted on the revolver and the 0.5-times auxiliary lens 7 arranged in the optical path constitute the first 0.5-times objective lens 1. Is composed. Therefore, it is possible to secure a large combined focal length of the first 0.5 × objective lens 1 while designing the 0.5 × objective lens 6 to be within the parfocal distance. As a result, an observation image 10 having a magnification of 0.5 can be formed via the very low magnification first objective lens 1 having a combined focal length of 400 mm and the second objective lens 2 having a focal length of 200 mm.

As described above, FIG. 1 shows a state in which the sample 8 is observed at a magnification of 0.5. However,
When observing the sample 8 at a normal magnification, the revolver is turned to select a predetermined first objective lens corresponding to a desired magnification, and the 0.5-times auxiliary lens 7 is retracted from the optical path. Thus, an observation image with a desired magnification can be formed via the selected first objective lens and second objective lens 2 selected. Thus, in the first embodiment, it is possible to observe or photograph a sample at each magnification ranging from high magnification to extremely low magnification.

FIG. 2 is a diagram schematically showing a configuration of a microscope according to a second embodiment of the present invention. The second embodiment has a configuration similar to that of the first embodiment. However,
In the first embodiment, the 0.5 × objective lens 6 and the 0.5 × auxiliary lens 7 are arranged in the optical path, but in the second embodiment, the 1 × objective lens 16 and the 1 × auxiliary lens 1 are arranged.
The only difference from the first embodiment is that 7 is arranged in the optical path. Therefore, in FIG. 2, components having the same functions as in the first embodiment are denoted by the same reference numerals as in FIG.

Also in the second embodiment, the 1 × objective lens 16 and the 1 × auxiliary lens 17 which are composed of a front group 13 having a positive refractive power and a rear group 14 having a negative refractive power in this order from the object side.
1x 1st objective lens 11 (combined focal length 200 mm)
Is composed. Therefore, after designing the 1 × objective lens 16 to be within the parfocal distance, the first 1 ×
A large combined focal length of the objective lens 11 can be secured. As a result, a 1x observation image 10 can be formed via the very low magnification first objective lens 11 having a combined focal length of 200 mm and the second objective lens 2 having a focal length of 200 mm.

It should be noted that the lens configuration of the 0.5 × auxiliary lens 7 in the first embodiment is different from that of the 1 × auxiliary lens 17 in the second embodiment. However, if the auxiliary lenses are commonly configured without depending on magnification, the configuration can be further simplified.

[0021]

As described above, in the microscope according to the present invention, since the very low magnification objective lens and the very low magnification auxiliary lens constitute the very low magnification first objective lens, the very low magnification objective lens is used. After the lens is designed to be within the parfocal distance, the total length of the first objective lens can be increased in effect, and a large combined focal length of the first objective lens for extremely low magnification can be secured. . Thus, an extremely low magnification observation image can be formed through the first and second objective lenses for very low magnification. As a result, with the microscope of the present invention, it is possible to observe or photograph the sample at each magnification ranging from high magnification to extremely low magnification.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a microscope according to a first embodiment of the present invention.

FIG. 2 is a diagram schematically showing a configuration of a microscope according to a second embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 1 First objective lens for 0.5 magnification 2 Second objective lens 6 Objective lens for 0.5 magnification 7 Auxiliary lens for 0.5 magnification 8 Sample 9 Body-mounted surface 10 Observation image 11 First objective lens for 1X magnification 16 1 Magnification objective lens 17 1x magnification auxiliary lens

Claims (4)

(57) [Claims] 1. A revolver means for switching a plurality of first objective lenses with respect to an optical path, and a second objective lens fixed in the optical path, wherein a predetermined one selected from the plurality of first objective lenses is provided. In a microscope that forms an observation image of an object via a first objective lens and the second objective lens, one of the plurality of first objective lenses is an extremely low magnification objective lens, and An extra-low magnification auxiliary lens that can be inserted into and removed from the optical path is provided between the first objective lens and the second objective lens, and the extra-low magnification objective lens and the extra-low magnification auxiliary lens are provided. constitute a first objective lens for very low magnification by 1 via the very low magnification first objective lens and the second objective lens more than double
A microscope, which forms an extremely low magnification observation image below . 2. The ultra-low magnification objective lens includes, in order from the object side, a front group having a positive refractive power and a rear group having a negative refractive power. The microscope according to claim 1, wherein the microscope has a positive refractive power as a whole. 3. The ultra-low magnification auxiliary lens is inserted into an optical path in conjunction with selection of the ultra-low magnification objective lens from the plurality of first objective lenses.
Or the microscope according to 2. 4. The revolver means is configured such that the ultra-low magnification objective lens and another ultra-low magnification objective lens different from the ultra-low magnification objective lens can be attached to the revolver means. The microscope according to any one of claims 1 to 3, wherein the low-magnification auxiliary lens is common to the ultra-low magnification objective lens and the another ultra-low magnification objective lens.