JP2959951B2 - Liquid circulation thermostat - Google Patents
Liquid circulation thermostatInfo
- Publication number
- JP2959951B2 JP2959951B2 JP7827494A JP7827494A JP2959951B2 JP 2959951 B2 JP2959951 B2 JP 2959951B2 JP 7827494 A JP7827494 A JP 7827494A JP 7827494 A JP7827494 A JP 7827494A JP 2959951 B2 JP2959951 B2 JP 2959951B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- tank
- circulating
- pipe
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Devices For Use In Laboratory Experiments (AREA)
- Control Of Temperature (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体製造装置の冷却
等に使用する非密閉構造の循環液タンクを備えた液循環
式恒温装置の改良に関するものであり、循環液タンクか
らの循環液の蒸発損失をほぼ完全に防止できるようにし
た液循環式恒温装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a liquid circulating constant temperature apparatus having a non-closed circulating liquid tank used for cooling semiconductor manufacturing equipment and the like. The present invention relates to a liquid circulation type constant temperature apparatus capable of almost completely preventing evaporation loss.
【０００２】[0002]
【従来の技術】半導体製造装置や化学機械装置等に於い
ては、冷却や加熱用の熱媒体の供給に液循環式の恒温装
置が広く利用されている。これ等の液循環式恒温装置は
通常図５に示す如く、非密閉型の循環液タンク１内に所
定量の純水やフロリナート等の循環液２を充填し、ヒー
タ３による加熱と冷却コイル４による冷却を交又に制御
することにより、循環液ポンプ５から冷却対象６へ設定
温度の液２を所定流量で循環流動させるように構成され
ている。尚、図５に於いて、７は温度センサー、８は液
面センサー、９は液面計、１０は液返り管、１１は冷却
水入口、１２は冷却水出口、１３は液補給口、１４は液
排出口、１５は断熱材、１６は通気孔である。2. Description of the Related Art In a semiconductor manufacturing apparatus, a chemical mechanical apparatus and the like, a liquid circulation type constant temperature apparatus is widely used for supplying a heat medium for cooling and heating. As shown in FIG. 5, these liquid circulation type thermostats usually fill a non-sealed circulating liquid tank 1 with a predetermined amount of a circulating liquid 2 such as pure water or florinate, and heat and cool a heater 3 with a cooling coil 4. Is controlled so that the liquid 2 at a set temperature is circulated at a predetermined flow rate from the circulating liquid pump 5 to the object 6 to be cooled. In FIG. 5, 7 is a temperature sensor, 8 is a liquid level sensor, 9 is a liquid level gauge, 10 is a liquid return pipe, 11 is a cooling water inlet, 12 is a cooling water outlet, 13 is a liquid supply port, 14 Is a liquid outlet, 15 is a heat insulating material, and 16 is a vent.
【０００３】而して、前記循環液タンク１はその外周面
が断熱材１５によって断熱されており、また、タンク内
部の上方空間部１ａは通気孔１６を通して外部と連通さ
れている。そのため、タンク１内の循環液２の設定温度
が比較的高温の場合には、タンク空間部１ａに滞留する
液蒸気が通気孔１６を通して外部へ漏洩することなり、
様々な問題を生ずることになる。The circulating liquid tank 1 is insulated on its outer peripheral surface by a heat insulating material 15, and an upper space 1a inside the tank is communicated with the outside through a vent hole 16. Therefore, when the set temperature of the circulating liquid 2 in the tank 1 is relatively high, the liquid vapor retained in the tank space 1a leaks outside through the vent hole 16,
Various problems will arise.
【０００４】例えば、循環液２がフロリナート（弗素系
冷媒液）であって、設定液温度が８０℃、タンク容量が
１６ｌ、タンク内の最少液充填量が１０ｌ、液循環流量
が５ｌ／ｍｉｎの場合には、循環液２は約１ｌ／日の割
合で外部へ蒸発漏洩することが判っている。ところで、
循環液２が蒸発漏洩することにより減量すれば、当然に
不足量だけの液の補充を必要とするが、上記の例の如き
場合には３〜４日に一回の割合で循環液の補充を行なわ
ねばならず、手数が掛り過ぎると云う問題がある。For example, when the circulating liquid 2 is florinate (fluorinated refrigerant liquid), the set liquid temperature is 80 ° C., the tank capacity is 16 l, the minimum liquid filling amount in the tank is 10 l, and the liquid circulation flow rate is 5 l / min. In this case, it has been found that the circulating liquid 2 evaporates and leaks to the outside at a rate of about 1 l / day. by the way,
If the amount of the circulating fluid 2 is reduced due to evaporation and leakage, it is necessary to replenish only a deficient amount of the circulating fluid, but in the case of the above example, the circulating fluid is replenished once every three to four days. Must be performed, and there is a problem that it takes too much time.
【０００５】また、循環液２が純水等の場合には補充に
要する費用も比較的少なくてよい。しかし、循環液２が
フロリナートやガルデン等の弗素系の高価な液の場合に
は、１回の補充に数万円の費用を要することになり、恒
温装置のランニングコストが大幅に高騰することにな
る。When the circulating fluid 2 is pure water or the like, the cost required for replenishment may be relatively small. However, if the circulating fluid 2 is an expensive fluorine-based fluid such as Fluorinert or Galden, the cost of tens of thousands of yen is required for one replenishment, and the running cost of the thermostat increases significantly. Become.
【０００６】更に、半導体製造プラント等に於いては、
当該液循環式恒温装置をクリーンルーム内（若しくはそ
れに隣接した準クリーンルーム内）に設置しなければな
らない場合があり、大量の循環液蒸気が通気孔１６を通
してタンク外へ漏洩すると、漏洩した蒸気の排出設備の
容量が大きくなり、設備費が高騰することになる。Further, in a semiconductor manufacturing plant or the like,
In some cases, the liquid circulation type thermostat must be installed in a clean room (or in a quasi-clean room adjacent thereto), and when a large amount of circulating liquid vapor leaks out of the tank through the ventilation hole 16, the leaked vapor discharge equipment Capacity increases, and equipment costs rise.
【０００７】[0007]
【発明が解決しようとする課題】本発明は従前の液循環
式恒温装置に於ける上述の如き問題、即ち循環液の設
定温度が高温の場合には、液の蒸発損失が増加し、その
補充に手数がかかると共に装置のランニングコストが上
昇すること、循環液蒸気の放散により環境汚損を生ず
ること等の問題を解決せんとするものであり、極く簡単
な構造の蒸発液回収器を循環液タンクに付加することに
より、循環液の蒸発損失を大幅に減少できるようにした
液循環式恒温装置を提供するものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem in the conventional liquid circulation type thermostatic apparatus. That is, when the set temperature of the circulating liquid is high, the evaporation loss of the liquid increases and the replenishment of the liquid increases. It is necessary to solve the problems of increasing the running cost of the apparatus, increasing the running cost of the apparatus, and causing environmental pollution due to the emission of the circulating liquid vapor. It is an object of the present invention to provide a liquid circulation type constant temperature apparatus which can significantly reduce the evaporation loss of the circulating liquid by adding the apparatus to a tank.
【０００８】[0008]
【課題を解決するための手段】本発明は、循環液タンク
の内部空間と外気との連通管を比較的長い金属管とし、
内部を流通する循環液蒸気を冷却することにより凝縮さ
せ、液化回収することを基本とするものである。即ち、
請求項１に記載の本願発明は、非密閉構造の循環液タン
クを備えた液循環式恒温装置に於いて、前記循環液タン
クに、液蒸気連通管と冷却水管とを熱伝導性セメントに
より一体化して成る管体を、前記液蒸気連通管の基端部
をタンク内部空間と連通せしめて取付けると共に、前記
冷却水管内へ冷却水を流通せしめるようにしたことを発
明の基本構成とするものである。According to the present invention, the communication pipe between the internal space of the circulating liquid tank and the outside air is a relatively long metal pipe,
It is based on the fact that circulating liquid vapor flowing through the inside is condensed by cooling, and liquefied and recovered. That is,
According to a first aspect of the present invention, there is provided a liquid circulation type thermostatic apparatus having a circulating liquid tank having an unsealed structure, wherein a liquid vapor communication pipe and a cooling water pipe are integrated with the circulating liquid tank by heat conductive cement. The basic structure of the present invention is to attach a pipe formed by connecting the base end of the liquid vapor communication pipe with the tank internal space and to allow the cooling water to flow into the cooling water pipe. is there.
【０００９】[0009]
【作用】循環液タンクの上方空間部に滞留する循環液蒸
気は、液蒸気連通管を通して外気側へ流出して行く。一
方、連通管の外壁は水冷により冷却されており、その結
果内部を流通する循環液蒸気は冷却によって凝縮され、
凝縮した液は管内壁面に沿って下方へ降下し、循環液タ
ンク内に回収される。The circulating liquid vapor retained in the space above the circulating liquid tank flows out to the outside air through the liquid vapor communication pipe. On the other hand, the outer wall of the communication pipe is cooled by water cooling, so that the circulating liquid vapor flowing inside is condensed by cooling,
The condensed liquid descends along the inner wall surface of the pipe and is collected in the circulating liquid tank.
【００１０】[0010]
【実施例】以下、図面に基づいて本発明の実施例を説明
する。図１は本発明に係る液循環式恒温装置の要部を示
す系統図であり、前記図５の場合と同一部材には同じ参
照番号が使用されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a system diagram showing a main part of a liquid circulation type constant temperature apparatus according to the present invention, and the same reference numerals are used for the same members as those in FIG.
【００１１】図１に於いて、１は循環液タンク、２は循
環液、３はヒータ、４はタンク冷却用コイル、５は液循
環ポンプ、７は温度センサー、８は液面センサー、９は
液面計、１０は液返り管、１１は冷却水入口、１２は冷
却水出口、１３は液補給口、１４は液排出口、１７はポ
ンプ冷却用コイル、１８は液補給通路冷却用コイル、１
９はエアー抜きバルブ、２０はフロースイッチ、２１は
温度制御用弁、２２はキャピラリーチューブ、２３は流
量計、２４は流量調整弁、２５は循環液返り口、２６は
循環液送り口、２８は蒸発液回収器である。In FIG. 1, 1 is a circulating liquid tank, 2 is a circulating liquid, 3 is a heater, 4 is a tank cooling coil, 5 is a liquid circulating pump, 7 is a temperature sensor, 8 is a liquid level sensor, and 9 is a liquid level sensor. Liquid level gauge, 10 is a liquid return pipe, 11 is a cooling water inlet, 12 is a cooling water outlet, 13 is a liquid supply port, 14 is a liquid discharge port, 17 is a pump cooling coil, 18 is a liquid supply passage cooling coil, 1
9 is an air release valve, 20 is a flow switch, 21 is a temperature control valve, 22 is a capillary tube, 23 is a flow meter, 24 is a flow rate regulating valve, 25 is a circulating fluid return port, 26 is a circulating fluid sending port, and 28 is It is an evaporant recovery device.
【００１２】前記循環液タンク１はステンレス鋼により
製作されており、タンク容量は１６ｌに選定されてい
る。当該タンク１内には循環液２として少なくとも９．
７５ｌ（最低値）の純水が貯留されており、また、タン
ク１内には３相２００Ｖ、４０００Ｗのヒータ３が配設
されている。更に、タンク１の外周面には、タンク冷却
用コイル４として外径９．５３φの銅管が所定のピッチ
で巻付固着されている。The circulating fluid tank 1 is made of stainless steel, and the tank capacity is selected to be 16 liters. In the tank 1, at least 9.
75 l (minimum value) of pure water is stored, and a three-phase 200 V, 4000 W heater 3 is provided in the tank 1. Further, a copper pipe having an outer diameter of 9.53 φ is wound and fixed at a predetermined pitch on the outer peripheral surface of the tank 1 as a tank cooling coil 4.
【００１３】前記タンク１内の循環液２は、設定温度の
８０℃を保持するように制御されており、温度センサー
７の検出値が８０．２℃を越えると、電磁弁２１がｏｎ
−ｏｆｆされて冷却水がタンク冷却用コイル４へ流通さ
れ、ＰＩＤ制御により循環液２が冷却される。また、温
度センサー７の検出値が７９．８℃より下ると、ヒータ
３がｏｎ−ｏｆｆ作動され、所謂ＰＩＤ制御により循環
液２が加熱される。The circulating fluid 2 in the tank 1 is controlled so as to maintain a set temperature of 80 ° C. When the detected value of the temperature sensor 7 exceeds 80.2 ° C., the solenoid valve 21 is turned on.
The cooling water is circulated to the tank cooling coil 4 after being turned off, and the circulating fluid 2 is cooled by PID control. When the detection value of the temperature sensor 7 falls below 79.8 ° C., the heater 3 is turned on and off, and the circulating fluid 2 is heated by so-called PID control.
【００１４】タンク１内の循環液２は、液循環ポンプ
（マグネット式ポンプ、３φ２００Ｖ、４００Ｗ、流量
６ｌ／ｍｉｎ、揚程２０〜２５ｍ）５によって液送り口
２６から送出され、被冷却対象（図示省略）を経て液送
り口２５から液返り管１０を通して、タンク１内へ還流
される。尚、本実施例では、液循環系の管径は１２．７
φに選定されている。The circulating liquid 2 in the tank 1 is sent from a liquid sending port 26 by a liquid circulating pump (magnet pump, 3φ200 V, 400 W, flow rate 6 l / min, head 20-25 m) 5 and is cooled (not shown). ), The liquid is returned into the tank 1 from the liquid feed port 25 through the liquid return pipe 10. In this embodiment, the pipe diameter of the liquid circulation system is 12.7.
φ has been selected.
【００１５】一方、本発明の要部を形成する蒸発液回収
器２８は、内管２９と外管３０を組み合せた二重管構造
に形成されており、内管２９には外径９．５３φのステ
ンレス鋼管が、また外管３０には外径１５．９φの銅管
が夫々使用されている。また、前記内管２９の下端開口
はタンク１の上方空間部１ａ内へ連通されており、且つ
その上端開口は大気中へ開放されている。更に、外管３
０の上・下端部は内管２９へ溶接されており、これによ
って内管２９と外管３０の間に冷却水通路３１が形成さ
れている。On the other hand, the evaporating liquid recovering device 28 forming the main part of the present invention is formed in a double tube structure in which an inner tube 29 and an outer tube 30 are combined, and the inner tube 29 has an outer diameter of 9.53φ. And the outer tube 30 is a copper tube having an outer diameter of 15.9φ. The lower end opening of the inner pipe 29 communicates with the upper space 1a of the tank 1, and the upper end opening is open to the atmosphere. Furthermore, the outer tube 3
The upper and lower ends of the tube 0 are welded to the inner tube 29, thereby forming a cooling water passage 31 between the inner tube 29 and the outer tube 30.
【００１６】前記蒸発液回収器２８の全長は約２０００
ｍｍに選定されており、コイル状に巻き取りしたうえ厚
さ約１２０ｍｍのタンク断熱材（図示省略）中に配設さ
れている。尚、蒸発液回収器２８の全長は、液２の温度
やタンクの容量によって適宣に選定されるものであり、
通常は１０００ｍｍ〜３０００ｍｍの間に、また、望ま
しくは１５００ｍｍ〜２５００ｍｍの間に選定される。The total length of the evaporant recovery unit 28 is about 2,000.
mm, which is wound in a coil shape and disposed in a tank heat insulating material (not shown) having a thickness of about 120 mm. The total length of the evaporating liquid recovery unit 28 is appropriately selected depending on the temperature of the liquid 2 and the capacity of the tank.
Usually, it is selected between 1000 mm and 3000 mm, and preferably between 1500 mm and 2500 mm.
【００１７】タンク１の内部空間１ａ内に滞留した液蒸
気は、前記蒸発液回収器２８の内管２９内を通って外気
側へ流通して行く。一方、回収器２８の外管３０と内管
２９の間へは、冷却水入口１１からの冷却水（２０〜３
０℃、４〜８ｌ／ｍｉｎ、１．３〜４ｋｇ／ｃｍ2 ）の
一部が管路３１ａを通して供給されており、当該冷却水
が循環ポンプ冷却用コイル１７を通して流通することに
より、内管２９が冷却される。その結果、内管２９内を
上昇する液蒸気が冷却・凝縮され、液化された循環液２
は内管２９の内壁面に沿って下方へ流下して行く。The liquid vapor retained in the internal space 1a of the tank 1 flows through the inner pipe 29 of the evaporant recovery unit 28 to the outside air. On the other hand, cooling water (20 to 3) from the cooling water inlet 11 is provided between the outer pipe 30 and the inner pipe 29 of the collector 28.
0 ° C., 4 to 8 l / min, 1.3 to 4 kg / cm 2 ) is supplied through the conduit 31 a, and the cooling water flows through the circulating pump cooling coil 17, whereby the inner pipe 29 is cooled. Is cooled. As a result, the liquid vapor rising in the inner pipe 29 is cooled and condensed, and the liquefied circulating liquid 2 is liquefied.
Flows downward along the inner wall surface of the inner pipe 29.
【００１８】図１の液循環式恒温装置を用いた試験結果
によれば、タンク内液温度８０℃、液循環量５ｌ／ｍｉ
ｎ、タンク容量１６ｌ、タンク内最低液量９．７５ｌ、
冷却水温度２３℃、冷却水量１．５ｌ／ｍｉｎ、蒸発液
回収器の全長２０００ｍｍとした場合、循環液（純水）
の蒸発損はほぼ無視できる程度まで減少する。尚、上記
試験に於いては、循環液２を純水としているが、これが
弗素系のフロリナートやガルデン、シリコンオイル等で
あっても、ほぼ同等の蒸発損失の防止効果が発揮され
る。According to the test results using the liquid circulation type thermostat shown in FIG . 1 , the liquid temperature in the tank is 80 ° C., and the liquid circulation amount is 5 l / mi.
n, tank capacity 16 l, minimum liquid volume in the tank 9.75 l,
When the cooling water temperature is 23 ° C., the cooling water amount is 1.5 l / min, and the total length of the evaporating liquid collector is 2000 mm, the circulating liquid (pure water)
Evaporation loss is reduced to almost negligible level. In the above test, the circulating fluid 2 is pure water. However, even if the circulating fluid 2 is fluorine-based florinate, galden, silicon oil, or the like, almost the same effect of preventing evaporation loss is exhibited.
【００１９】図２は本発明で使用する蒸発液回収器の他
の例を示すものである。図２に於いては、外径約９．５
３ｍｍφのステンレス管約２０００ｍｍによって蒸発液
回収器２８が形成されており、基端部をタンク１の内部
空間１ａ内へ連通させると共に、巻取りした銅管（液蒸
気連通管３２）を断熱材（図示省略）の外方へ露出させ
ることにより、空気冷却方式で液蒸気を冷却するよう構
成されている。尚、当該図２の蒸発液回収器を用いた試
験結果によれば、蒸発液回収器以外の条件を第１実施例
の試験の場合と同一にした場合、１日当りの蒸発液の損
失量を、回収器２８を設けない場合の約１／１０（２４
時間連続運転に於いて液損失量約１００ｃｃ／日）に減
少させることができる。FIG. 2 shows another example of the evaporant recovery device used in the present invention.
This is an example . In FIG. 2 , the outer diameter is about 9.5.
An evaporating liquid recovery unit 28 is formed by a stainless steel tube of about 3 mmφ having a diameter of about 2,000 mm. The evaporating liquid recovery unit 28 communicates the base end into the internal space 1 a of the tank 1, and also uses a heat insulating material ( By exposing outside (not shown), the liquid vapor is cooled by an air cooling system. According to the test results using the evaporant recovery device of FIG. 2, when the conditions other than the evaporant recovery device were the same as those in the test of the first embodiment, the amount of evaporant loss per day was reduced. , About 1/10 (24
In continuous operation over time, the liquid loss can be reduced to about 100 cc / day).
【００２０】図３及び図４は本発明で使用する蒸発液回
収器２８を示すものである。図３及び図４に於いては、
蒸発液回収器２８が、液蒸気連通管を形成する外径約
９．５３ｍｍのステンレス鋼管３３と冷却水通路を形成
する銅製の冷却水管３４とを、熱伝導性セメント３５に
よって一体化した管体を用いて形成されている。即ち、
蒸発液回収器２８を形成する管３３，３４の長さは約２
０００ｍｍに選定されており、液蒸気が通るステンレス
鋼管３３の基端開口はタンク１の内部空間１ａ内へ、ま
たその他端開口は大気中へ連通されている。FIGS. 3 and 4 show the evaporator used in the present invention.
It shows a collector 28 . In FIGS. 3 and 4,
A pipe body in which an evaporating liquid recovery unit 28 is formed by integrating a stainless steel pipe 33 having an outer diameter of about 9.53 mm forming a liquid vapor communication pipe and a copper cooling water pipe 34 forming a cooling water passage with a heat conductive cement 35. It is formed using. That is,
The lengths of the tubes 33 and 34 forming the evaporant recovery device 28 are about 2
The base opening of the stainless steel pipe 33 through which the liquid vapor passes is communicated with the interior space 1a of the tank 1, and the other end opening is communicated with the atmosphere.
【００２１】当該蒸発液回収器を用いた試験結果によれ
ば、蒸発液回収器以外の条件を前記第１実施例の試験の
場合の条件と同一とした場合、循環液の蒸発損失はほと
んど無視できる程度にまで減少し、前記図１の場合とほ
ぼ同等の蒸発損失の防止効果が発揮される。According to the test results using the evaporator liquid recovery device, if the conditions other than the evaporator liquid recovery equipment was the same as condition in the case of the test of the first embodiment, almost negligible evaporation loss of circulating fluid reduced to the extent possible, the effect of preventing substantially the same evaporation loss as in FIG 1 is exerted.
【００２２】[0022]
【発明の効果】本発明に係る液循環式恒温装置に於いて
は、液蒸気連通管と冷却水管とを熱伝導性セメントによ
り固着した構造の蒸発液回収器を配設し、液蒸気連通管
の基端部をタンクの内部空間と連通せしめると共にその
先端開口を大気中へ開放し、更に、冷却水管内に冷却水
を流通させて液蒸気を強制冷却する構成としている。そ
の結果、蒸発液の損失をほぼ零近くまで減少させること
ができ、循環液の補充作業が不要になると共に蒸発液回
収器も比較的安価に製造することができる。本発明は上
述の通り、極めて簡単な構成にも拘わらず優れた実用的
効用を奏するものである。Is In the liquid circulation type thermostatic device according to the present invention, the the liquid vapor communication pipe and the cooling pipe is disposed evaporated liquid collector structure which is fixed by a thermally conductive cement, liquid vapor communication pipe
And the base end of the tank communicates with the internal space of the tank.
The tip opening is opened to the atmosphere, and the cooling water is circulated through the cooling water pipe to forcibly cool the liquid vapor. As a result, the loss of the evaporating liquid can be reduced to almost zero, the operation of replenishing the circulating liquid becomes unnecessary, and the evaporating liquid recovery device can be manufactured relatively inexpensively. As described above, the present invention has excellent practical utility despite its extremely simple configuration.
【図１】本発明に係る液循環式恒温装置の全体構成の概
要を示す系統図である。FIG. 1 is an outline of the overall configuration of a liquid circulation type thermostatic apparatus according to the present invention.
It is a system diagram showing a principal.
【図２】本発明で使用する蒸発液回収器の他の例を示す
説明図である。FIG. 2 is an explanatory view showing another example of an evaporating liquid recovery device used in the present invention.
【図３】本発明で使用する蒸発液回収器を示す説明図で
ある。FIG. 3 is an explanatory view showing an evaporating liquid recovery device used in the present invention .
【図４】図３のＡ−Ａ視断面図である。FIG. 4 is a sectional view taken along line AA of FIG. 3;
【図５】従前の液循環式恒温装置の構成系統図である。FIG. 5 is a configuration system diagram of a conventional liquid circulation type thermostat.
１は循環液タンク、２は循環液、３はヒータ、４はタン
ク冷却用コイル、５は液循環ポンプ、７は温度センサ
ー、８は液面センサー、９は液面計、１０は液返り管、
１１は冷却水入口、１２は冷却水出口、１３は液補給
口、１４は液排出口、１７はポンプ冷却用コイル、１８
は液補給通路冷却用コイル、１９はエアー抜きバルブ、
２０はフロースイッチ、２１は温度制御用弁、２２はキ
ャピラリーチューブ、２３は流量計、２４は流量調整
弁、２５は循環液返り口、２６は循環液送り口、２８は
蒸発液回収器、２９は内管、３０は外管、３１ａは管
路、３１は冷却水通路、３２，３３は液蒸気連通管、３
４は冷却水管、３５はサーモセメント。1 is a circulating liquid tank, 2 is a circulating liquid, 3 is a heater, 4 is a tank cooling coil, 5 is a liquid circulation pump, 7 is a temperature sensor, 8 is a liquid level sensor, 9 is a liquid level gauge, and 10 is a liquid return pipe. ,
11 is a cooling water inlet, 12 is a cooling water outlet, 13 is a liquid supply port, 14 is a liquid discharge port, 17 is a pump cooling coil, 18
Is a liquid supply passage cooling coil, 19 is an air release valve,
Reference numeral 20 denotes a flow switch, 21 denotes a temperature control valve, 22 denotes a capillary tube, 23 denotes a flow meter, 24 denotes a flow control valve, 25 denotes a circulating liquid return port, 26 denotes a circulating liquid outlet, 28 denotes an evaporating liquid collector, 29 Is an inner pipe, 30 is an outer pipe, 31a is a pipeline, 31 is a cooling water passage, 32 and 33 are liquid vapor communication pipes, 3
4 is a cooling water pipe, 35 is a thermocement.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平３−95473（ＪＰ，Ａ) 特開 昭60−138382（ＪＰ，Ａ) 特開 昭62−266375（ＪＰ，Ａ) 特開 昭62−153678（ＪＰ，Ａ) 特開 平４−151477（ＪＰ，Ａ) 実開 平６−3481（ＪＰ，Ｕ) 実開 昭62−189580（ＪＰ，Ｕ) 実公 平２−18424（ＪＰ，Ｙ２) (58)調査した分野(Int.Cl.6，ＤＢ名) G05D 23/00 B01L 11/02 G01N 30/54 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-95473 (JP, A) JP-A-60-138382 (JP, A) JP-A-62-266375 (JP, A) JP-A-62-266375 153678 (JP, A) JP-A-4-15177 (JP, A) JP-A-6-3481 (JP, U) JP-A-62-189580 (JP, U) JP-A-2-18424 (JP, Y2) (58) Field surveyed (Int. Cl. 6 , DB name) G05D 23/00 B01L 11/02 G01N 30/54
Claims (1)
環式恒温装置に於いて、前記循環液タンクに、液蒸気連
通管と冷却水管とを熱伝導性セメントにより一体化して
成る管体を、前記液蒸気連通管の基端部をタンク内部空
間と連通せしめて取付けると共に、前記冷却水管内へ冷
却水を流通させるようにしたことを特徴とする液循環式
恒温装置。1. A liquid circulation type constant temperature apparatus having a circulating liquid tank having a non-closed structure, wherein a liquid vapor communication pipe and a cooling water pipe are integrated with the circulating liquid tank by heat conductive cement. A liquid circulation type thermostat, wherein a base end of the liquid vapor communication pipe is communicated with a tank internal space, and cooling water is circulated into the cooling water pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7827494A JP2959951B2 (en) | 1994-04-18 | 1994-04-18 | Liquid circulation thermostat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7827494A JP2959951B2 (en) | 1994-04-18 | 1994-04-18 | Liquid circulation thermostat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07284675A JPH07284675A (en) | 1995-10-31 |
| JP2959951B2 true JP2959951B2 (en) | 1999-10-06 |
Family
ID=13657405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7827494A Expired - Fee Related JP2959951B2 (en) | 1994-04-18 | 1994-04-18 | Liquid circulation thermostat |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2959951B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19653888C1 (en) * | 1996-12-21 | 1998-05-20 | Julabo Labortechnik Gmbh | Laboratory low temp. thermostat |
| JP4421158B2 (en) | 1999-07-02 | 2010-02-24 | 東京エレクトロン株式会社 | Cooling equipment |
| KR100603096B1 (en) | 1999-07-02 | 2006-07-20 | 동경 엘렉트론 주식회사 | Semiconductor manufacturing equipment |
| CN112058332B (en) * | 2019-06-10 | 2022-02-11 | 上海微电子装备（集团）股份有限公司 | Constant-temperature liquid tank |
-
1994
- 1994-04-18 JP JP7827494A patent/JP2959951B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07284675A (en) | 1995-10-31 |
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