JP2958382B2 - Gas supply device with cylinder - Google Patents
Gas supply device with cylinderInfo
- Publication number
- JP2958382B2 JP2958382B2 JP9411190A JP9411190A JP2958382B2 JP 2958382 B2 JP2958382 B2 JP 2958382B2 JP 9411190 A JP9411190 A JP 9411190A JP 9411190 A JP9411190 A JP 9411190A JP 2958382 B2 JP2958382 B2 JP 2958382B2
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- line
- cylinder
- gas
- vent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はボンベ付ガス供給装置、特に安全装置を有す
るボンベ付ガス供給装置に関するものである。Description: TECHNICAL FIELD The present invention relates to a gas supply device with a cylinder, and more particularly to a gas supply device with a cylinder having a safety device.
（従来の技術） 第２図は従来のボンベ付半導体材料ガス供給装置を示
し、1a,1bは夫々シラン，ホスフィン等の半導体材料ガ
スのボンベ、２はガス供給口、3a,3bは夫々上記ボンベ1
a,1bとガス供給口２間を連通するガス供給ライン、4a,4
b及び5a,5bは夫々上記ガス供給ライン3a,3bに介挿した
ボンベ側高圧開閉弁及びガス供給口側低圧開閉弁、６は
パージ用N2ガス源、7a,7bは夫々このN2ガス源６と上記
ガス供給ライン3a,3bのボンベ接続部分間を連通するパ
ージライン、8a,8bは夫々上記パージライン7a,7bに介挿
された開閉弁、９はベント口、10a,10bは夫々このベン
ト口９と上記ガス供給ライン3a,3b内の高圧開閉弁4a,4b
のボンベ側開口間を連通するベントライン、11a,11bは
夫々上記ベントライン10a,10bに介挿された開閉弁、12
は上記ベント口９に真空を作用せしめるためのエゼクタ
ー、13はこのエゼクター12にエゼクター作用を生ぜしめ
るために流す高圧N2ガスのガス源、14はその供給ライン
である。(Prior Art) FIG. 2 shows a conventional semiconductor material gas supply apparatus with a cylinder, wherein 1a and 1b are cylinders of a semiconductor material gas such as silane and phosphine, 2 is a gas supply port, and 3a and 3b are the above cylinders, respectively. 1
gas supply lines communicating between a, 1b and the gas supply port 2, 4a, 4
b and 5a, 5b are respectively the gas supply line 3a, the cylinder-side pressure off valves interposed in 3b and the gas supply port side low pressure off valve, the N 2 gas source for purging 6, 7a, 7b are respectively the N 2 gas A purge line communicating between the source 6 and the cylinder connection portion of the gas supply lines 3a and 3b, 8a and 8b are on-off valves inserted in the purge lines 7a and 7b, respectively, 9 is a vent port, and 10a and 10b are respectively This vent port 9 and the high-pressure on-off valves 4a, 4b in the gas supply lines 3a, 3b
Vent lines communicating between the cylinder side openings, 11a and 11b are on-off valves inserted into the vent lines 10a and 10b, respectively, and 12
Ejector for exerting a vacuum on the vent 9, 13 gas source of the high-pressure N 2 gas flow for causing a ejector acting on the ejector 12, 14 is its supply line.
このような従来のボンベ付ガス供給装置においては、
例えばボンベ1a内のガスが消耗したとき、これを検知し
て自動的にガス供給ラインを3aから3bに切り替えてボン
ベ1bを使用するようにし、ボンベ1bを使用している間に
ボンベ1aを新しいボンベに交換するようにしている。In such a conventional gas supply device with a cylinder,
For example, when the gas in the cylinder 1a is exhausted, this is detected and the gas supply line is automatically switched from 3a to 3b to use the cylinder 1b, and while the cylinder 1b is being used, the cylinder 1a is renewed. I am trying to replace it with a cylinder.
このボンベ1aの交換に際してはガス供給ライン3a内に
残存する有害な又は危険性のあるガスが外部に漏れるの
を防ぐためボンベ1a切り離しに先立ってガス供給ライン
3a内の高圧及び低圧開閉弁4a,5aを閉じ、パージライン7
a内の開閉弁8a及びベントライン10a内の開閉弁11aを開
いてパージ用N2ガス源６からパージ用N2ガスをパージラ
イン7a、ボンベ側のガス供給ライン3a及びベントライン
10aを介してベント口９から排出せしめ、この際エゼク
ター12による真空排気作用が上記排気を促進し、ボンベ
側のガス供給ライン3a内から有害又は危険性のあるガス
が完全にベントガス処理機構（図示せず）内に排出処理
されるようにしている。When replacing the cylinder 1a, remove the gas supply line before disconnecting the cylinder 1a to prevent the harmful or dangerous gas remaining in the gas supply line 3a from leaking outside.
Close the high-pressure and low-pressure on-off valves 4a and 5a in 3a, and
off valve 8a and the on-off valve 11a and open the purge N 2 gas source for the 6 purging N 2 gas purge line 7a in the vent line 10a in a, gas cylinder side supply line 3a and the vent line
The gas is exhausted from the vent port 9 through the vent port 10a. At this time, the evacuation by the ejector 12 promotes the evacuation. (Not shown).
然しながら上記のような従来のボンベ付ガス供給装置
においては、例えばガス供給ライン3a内の高圧開閉弁4a
に閉状態でリークがあった場合、高圧及び低圧開閉弁4
a,5a間のガス供給ライン3a内に残留している有害ガスが
ボンベ1a交換の際上記高圧開閉弁4aからリークして外部
に漏れるおそれがあった。However, in the conventional gas supply device with a cylinder as described above, for example, the high-pressure on-off valve 4a in the gas supply line 3a
If there is a leak in the closed state, the high and low pressure
The harmful gas remaining in the gas supply line 3a between a and 5a may leak from the high-pressure on-off valve 4a and leak outside when the cylinder 1a is replaced.
このような欠点を除くため第３図に示すようにガス供
給ライン3a,3bにおける上記高圧及び低圧開閉弁4a,5a間
及び4b,5b間のラインに夫々圧力検知機構15a,15bを接続
すると共に、この各ラインと上記ベント口９間を夫々安
全ライン16a,16bによって連通し、この各ライン16a,16b
に夫々開閉弁17a,17bを介挿せしめ、例えばボンベ1aを
交換する際には上述のようにパージ用N2ガスによってボ
ンベ1a側のガス供給ライン3a内のガスの排出を行った後
パージライン7a内の開閉弁8a及びベントライン10a内の
開閉弁11aを閉じ、上記安全ライン16a内の開閉弁17aを
開くことが提案されている。In order to eliminate such drawbacks, as shown in FIG. 3, pressure detection mechanisms 15a and 15b are connected to the lines between the high-pressure and low-pressure on-off valves 4a and 5a and the lines between 4b and 5b in the gas supply lines 3a and 3b, respectively. The safety lines 16a, 16b communicate between the lines and the vent port 9, respectively.
Purge line after each opening and closing valve 17a, tighten allowed via 17b, for example, by purging N 2 gas as described above when replacing the cylinder 1a of the exhaust gas in the gas supply line 3a of the cylinder 1a side It has been proposed to close the on-off valve 8a in 7a and the on-off valve 11a in the vent line 10a and open the on-off valve 17a in the safety line 16a.
このようにすればエゼクター12による真空が安全ライ
ン16aを介して上記高圧及び低圧開閉弁4a,5a間のガス供
給ライン3aに作用し、このライン内に残存するガスがベ
ント口９を介して排出され、例えガス供給ライン3aの高
圧開閉弁4aにリークがあってもボンベ1aの交換の際有害
ガスが外部に漏れ出るおそれが無い。In this way, the vacuum generated by the ejector 12 acts on the gas supply line 3a between the high-pressure and low-pressure on-off valves 4a and 5a via the safety line 16a, and the gas remaining in this line is discharged through the vent port 9. Therefore, even if there is a leak in the high-pressure on-off valve 4a of the gas supply line 3a, there is no possibility that the harmful gas leaks outside when the cylinder 1a is replaced.
尚上記ガス供給ライン3a内が減圧排出されているか否
かは上記圧力検知機構15aによって確認することが出来
る。Whether or not the inside of the gas supply line 3a is discharged under reduced pressure can be confirmed by the pressure detection mechanism 15a.
（発明が解決しようとする課題） 然しながら上記のような構成としてもベントライン10
a,10b及び安全ライン16a,16bに夫々介挿されている開閉
弁11a,11bや17a,17bにリークがあれば、ガス供給中に有
害なガスが上記開閉弁11a,11bや17a,17bを介してこれに
関連するベントライン10a,10b及び安全ライン16a,16b内
に漏れ、ベント口の先に接続される除害装置等の寿命を
予定外に短縮したり、最悪の場合、ベント系で爆発する
危険性もあった。(Problems to be Solved by the Invention) However, even with the above configuration, the vent line 10
If there is a leak in the on-off valves 11a, 11b and 17a, 17b inserted in the a, 10b and the safety lines 16a, 16b, respectively, the harmful gas during the gas supply may cause the on-off valves 11a, 11b, 17a, 17b to leak. Leaks into the associated vent lines 10a and 10b and the safety lines 16a and 16b, and shortens the service life of the abatement system connected to the end of the vent port unexpectedly. There was also a risk of explosion.
本発明は上記の欠点を除くようにしたものである。 The present invention has been made to eliminate the above disadvantages.
（課題を解決するための手段） 本発明のボンベ付ガス供給装置は共通のガス供給口と
複数のボンベ間を夫々切替可能なガス供給ラインによっ
て連通し、ボンベ交換に際しこれに関連するガス供給ラ
イン内のガスをパージ用ガスによってベントライン及び
安全ラインを介して排気するようにしたボンベ付ガス供
給装置において、ガス供給時これに関連するガス供給ラ
インのためのベントライン及び安全ラインを減圧状態に
維持せしめることを特徴とする。(Means for Solving the Problems) The gas supply device with a cylinder according to the present invention communicates between a common gas supply port and a plurality of cylinders by gas supply lines that can be switched respectively, and a gas supply line related to the gas exchange when replacing cylinders. In a gas supply device with a cylinder in which gas in the gas is exhausted through a vent line and a safety line by a purge gas, the vent line and the safety line for the gas supply line related to the gas supply during the gas supply are reduced in pressure. It is characterized by being maintained.
（作 用） 本発明のボンベ付ガス供給装置においてはベントライ
ンや安全ラインの開閉弁に漏れがあった場合、この漏れ
ガスが直ちにベント口に排気されず、一旦ベントライン
10a及び安全ライン16a部に貯積され、且つ、それに伴っ
て上昇するベントライン10a及び安全ライン16aの圧力変
化を圧力検知機械19aで検知することにより、漏れ異常
を警報として出力出来るので、ベント系が知らぬ間に危
険状態に陷ることがない。(Operation) In the gas supply device with a cylinder according to the present invention, when there is a leak in the on-off valve of the vent line or the safety line, the leaked gas is not immediately exhausted to the vent port, but is temporarily discharged to the vent line.
By detecting pressure changes in the vent line 10a and the safety line 16a, which are stored in the safety line 10a and the safety line 16a and rising with the pressure detection machine 19a, a leak abnormality can be output as an alarm, so that the vent system Never go into danger without your knowledge.
（実 施 例） 以下図面によって本発明の実施例を説明する。(Embodiment) An embodiment of the present invention will be described below with reference to the drawings.
本発明のボンベ付ガス供給装置においては第１図に示
すようにベント口９と一方のベントライン10a及び安全
ライン16aの接合部間、及びベント口９と他方のベント
ライン10b及び安全ライン16bの接合部間に夫々真空導入
用開閉弁18a,18bを介挿せしめると共に、上記夫々の接
続部に圧力検知機構19a,19bを接続し、例えばボンベ1a
を用いてガス供給を行う場合、これに関連する真空導入
用開閉弁18aを開いてこれに関連するベントライン10a及
び安全ライン16a内をエゼクター12により減圧せしめ、
その後上記真空導入用開閉弁18aを閉じて上記ベントラ
イン10a及び安全ライン16a内を減圧状態に維持せしめ
る。In the gas supply apparatus with a cylinder according to the present invention, as shown in FIG. 1, between the joint between the vent port 9 and one of the vent line 10a and the safety line 16a, and between the vent port 9 and the other vent line 10b and the safety line 16b. A vacuum introduction opening / closing valve 18a, 18b is inserted between the joints, and a pressure detecting mechanism 19a, 19b is connected to each of the connection parts, for example, a cylinder 1a.
In the case of performing gas supply by using, the associated vacuum line opening / closing valve 18a is opened and the associated vent line 10a and safety line 16a are depressurized by the ejector 12,
Then, the vacuum introduction on-off valve 18a is closed to maintain the inside of the vent line 10a and the safety line 16a in a reduced pressure state.
本発明のボンベ付ガス供給装置は上記のような構成で
あるから、例えばボンベ1aを用してガス供給を行ってい
る際に、これに関連するベントライン10aや安全ライン1
6a内の開閉弁11a,17aにリークがあって夫々ベントライ
ン10aや安全ライン16a内にガスが漏れた場合でもこのラ
イン減圧状態であるため、漏れガスがみだりに外部に漏
出することなく、又上記漏れが圧力検知機構19aによっ
て直ちに検知されるようになる。Since the gas supply device with a cylinder of the present invention has the above-described configuration, for example, when gas is supplied using the cylinder 1a, the vent line 10a and the safety line 1
Even if there is a leak in the on-off valves 11a and 17a in 6a and gas leaks in the vent line 10a and the safety line 16a, respectively, since this line is in a depressurized state, the leaked gas does not leak to the outside without being leaked. Leakage is immediately detected by the pressure detection mechanism 19a.
（発明の効果） 上記のように本発明のボンベ付ガス供給装置によれ
ば、例え開閉弁にリークが生じていても直ちにベント系
に放出されず、且つ、そのリークも検知出来るのでベン
ト系内の爆発の危険性を未然に防ぐことが出来る大きな
利益がある。(Effect of the Invention) As described above, according to the gas supply apparatus with a cylinder of the present invention, even if a leak is generated in the on-off valve, the gas is not immediately discharged to the vent system, and the leak can be detected. There is a great benefit that can prevent the danger of explosion.
第１図は本発明のボンベ付ガス供給装置の構成図、第２
図，第３図は夫々従来のボンベ付ガス供給装置の構成図
である。 1a,1b……ボンベ、２……ガス供給口、3a,3b,14……ガ
ス供給ライン、4a,4b……高圧開閉弁、5a,5b……低圧開
閉弁、6,13……N2ガス源、7a,7b……パージライン、8a,
8b,11a,11b,17a,17b,18a,18b……開閉弁、９……ベント
口、10a,10b……ベントライン、12……エゼクター、15
a,15b,19a,19b……圧力検知機構、16a,16b……安全ライ
ン。FIG. 1 is a block diagram of a gas supply device with a cylinder according to the present invention.
FIG. 3 and FIG. 3 are configuration diagrams of a conventional gas supply device with a cylinder. 1a, 1b ...... bomb 2 ...... gas supply port, 3a, 3b, 14 ...... gas supply lines, 4a, 4b ...... pressure off valve, 5a, 5b ...... low pressure off valve, 6, 13 ...... N 2 Gas source, 7a, 7b …… Purge line, 8a,
8b, 11a, 11b, 17a, 17b, 18a, 18b ... On-off valve, 9 ... Vent port, 10a, 10b ... Vent line, 12 ... Ejector, 15
a, 15b, 19a, 19b …… Pressure detection mechanism, 16a, 16b …… Safety line.
Claims (2)
切替可能なガス供給ラインによって連通し、ボンベ交換
に際しこれに関連するガス供給ライン内のガスをパージ
用ガスによってベントライン及び安全ラインを介して排
気するようにしたボンベ付ガス供給装置において、ガス
供給時これに関連するガス供給ラインのためのベントラ
イン及び安全ラインを減圧状態に維持せしめることを特
徴とするボンベ付ガス供給装置。A common gas supply port and a plurality of cylinders communicate with each other by a switchable gas supply line, and when a cylinder is replaced, a gas in a gas supply line related to the gas supply line is vented by a purge gas and a safety line. A gas supply device with a cylinder, wherein a vent line and a safety line for a gas supply line related to the gas supply device are maintained in a reduced pressure state during gas supply.
る圧力検知機構を有する請求項１記載のボンベ付ガス供
給装置。2. The gas supply device with a cylinder according to claim 1, further comprising a pressure detecting mechanism for detecting a reduced pressure state of the reduced pressure line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9411190A JP2958382B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9411190A JP2958382B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03292498A JPH03292498A (en) | 1991-12-24 |
| JP2958382B2 true JP2958382B2 (en) | 1999-10-06 |
Family
ID=14101325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9411190A Expired - Fee Related JP2958382B2 (en) | 1990-04-11 | 1990-04-11 | Gas supply device with cylinder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2958382B2 (en) |
-
1990
- 1990-04-11 JP JP9411190A patent/JP2958382B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03292498A (en) | 1991-12-24 |
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