JP2949982B2 - Processing method of magnetic gap depth of thin film magnetic head - Google Patents

Processing method of magnetic gap depth of thin film magnetic head

Info

Publication number
JP2949982B2
JP2949982B2 JP32436491A JP32436491A JP2949982B2 JP 2949982 B2 JP2949982 B2 JP 2949982B2 JP 32436491 A JP32436491 A JP 32436491A JP 32436491 A JP32436491 A JP 32436491A JP 2949982 B2 JP2949982 B2 JP 2949982B2
Authority
JP
Japan
Prior art keywords
gap depth
magnetic gap
magnetic
magnetic head
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP32436491A
Other languages
Japanese (ja)
Other versions
JPH05159238A (en
Inventor
実 山森
豊慈 角田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP32436491A priority Critical patent/JP2949982B2/en
Publication of JPH05159238A publication Critical patent/JPH05159238A/en
Application granted granted Critical
Publication of JP2949982B2 publication Critical patent/JP2949982B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は磁気記録再生装置に用い
られる薄膜磁気ヘッドの磁気ギャップ深さの加工方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for processing a magnetic gap depth of a thin film magnetic head used in a magnetic recording / reproducing apparatus.

【0002】[0002]

【従来の技術】磁気ヘッドの記録再生特性は磁気ギャッ
プ深さの影響を強く受けるため、研削・研摩加工におい
て0〜1μmの微小な寸法にまで、この磁気ギャップ深
さを仕上げる必要がある。
2. Description of the Related Art Since the recording / reproducing characteristics of a magnetic head are strongly affected by the magnetic gap depth, it is necessary to finish the magnetic gap depth to a very small size of 0 to 1 μm in grinding and polishing.

【0003】以下に従来の薄膜磁気ヘッドの磁気ギャッ
プ深さの加工方法について説明する。
A method of processing the depth of the magnetic gap of a conventional thin film magnetic head will be described below.

【0004】所定の磁気ギャップ深さで研削・研摩加工
を終了させるために、複数個の薄膜磁気ヘッドを一直線
上に配列した磁気ヘッドブロック1の両端部に図4に示
すような研削・研摩量を割り出すマーカー9を形成して
おき、このマーカー9が研削・研摩加工により除去され
た端面の寸法を光学顕微鏡などを利用して測定しながら
加工を行う方法、あるいは薄膜磁気ヘッド自体または、
それと同一の磁気ギャップ深さを有するマーカーを形成
しておきそれらの断面を光学顕微鏡などを用いて磁気ギ
ャップ深さを測定しながら加工を行う方法、あるいは図
5に示すように磁気ヘッドブロック1の両端部に磁気ギ
ャップ深さモニタ素子4を形成し、これに直流電流を供
給しながら研削・研摩加工を行い、これによって磁気ギ
ャップ深さモニタ素子4の一部が除去されるにしたがっ
て磁気ギャップ深さモニタ4の抵抗値が変化することを
利用して所定の磁気ギャップ深さに加工する方法があ
る。
In order to terminate the grinding / polishing at a predetermined magnetic gap depth, the grinding / polishing amount as shown in FIG. 4 is provided at both ends of a magnetic head block 1 in which a plurality of thin film magnetic heads are arranged in a straight line. A method of performing processing while measuring using an optical microscope or the like the size of the end face from which the marker 9 has been removed by grinding and polishing, or a thin film magnetic head itself or
A method in which markers having the same magnetic gap depth are formed, and their sections are processed while measuring the magnetic gap depth using an optical microscope or the like, or as shown in FIG. A magnetic gap depth monitor element 4 is formed at both ends, and grinding and polishing are performed while supplying a direct current to the magnetic gap depth monitor element 4. As a result, as the magnetic gap depth monitor element 4 is partially removed, the magnetic gap depth monitor element 4 is removed. There is a method of processing to a predetermined magnetic gap depth utilizing the change in the resistance value of the monitor 4.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上記の従
来の方法では、加工途中において磁気ギャップ深さを割
り出すために加工を一時中断しなければならないという
問題点、またその研削・研摩量割り出しマーカー9の寸
法は微小であるため測定に読み取り誤差が生じるという
問題点を有していた。
However, the above-mentioned conventional method has a problem that the processing must be temporarily interrupted in order to determine the magnetic gap depth during the processing, and that the marker 9 for determining the amount of grinding and polishing has to be used. There was a problem that a reading error occurred in the measurement because the dimensions were minute.

【0006】さらに磁気ギャップ深さモニタ素子4に直
流電流を供給する方法は、磁気ギャップ深さモニタ素子
4と電気回路とを接続する接点において抵抗変化が生じ
たり、あるいは研削・研摩加工時に発生する熱や外気温
の変化によって磁気ギャップ深さモニタ素子4の抵抗値
が変動したり、研削・研摩加工時に砥石、または錫など
の金属からなるラップ盤が磁気ギャップ深さモニタ素子
4と接触していることから生ずるノイズの進入があり、
したがって複数個の薄膜磁気ヘッドあるいは複数個の薄
膜磁気ヘッドを一直線上に配列した磁気ヘッドブロック
1を加工する際に、各磁気ヘッドのギャップ深さを所定
の寸法に精度良く加工することは困難であるという問題
点を有していた。
Further, in the method of supplying a direct current to the magnetic gap depth monitor element 4, a resistance change occurs at a contact connecting the magnetic gap depth monitor element 4 and an electric circuit, or it occurs during grinding and polishing. The resistance value of the magnetic gap depth monitor element 4 fluctuates due to a change in heat or outside air temperature, or a lapping machine made of a metal such as a grindstone or tin contacts the magnetic gap depth monitor element 4 during grinding and polishing. There is noise ingress resulting from
Therefore, when processing a plurality of thin-film magnetic heads or a magnetic head block 1 in which a plurality of thin-film magnetic heads are arranged in a straight line, it is difficult to precisely process the gap depth of each magnetic head to a predetermined size. There was a problem that there is.

【0007】本発明は上記従来の問題点を解決するもの
で、薄膜磁気ヘッドまたは磁気ヘッドブロックの磁気ギ
ャップ深さを高精度にかつ効率よく仕上げる薄膜磁気ヘ
ッドの磁気ギャップ深さの加工方法を提供することを目
的とする。
The present invention solves the above-mentioned conventional problems, and provides a method of processing the magnetic gap depth of a thin film magnetic head which can finish the magnetic gap depth of a thin film magnetic head or a magnetic head block with high accuracy and efficiency. The purpose is to do.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に本発明の薄膜磁気ヘッドの磁気ギャップ深さの加工方
法は、研削・研摩加工中に磁気ギャップ深さモニタ素子
に高周波信号を印加しその出力信号から低域周波数を除
去する回路によってノイズを低減し、出力信号が所定の
水準に達した時点で加工を終了させる方法である。
In order to achieve this object, a method of processing the magnetic gap depth of a thin-film magnetic head according to the present invention comprises applying a high-frequency signal to a magnetic gap depth monitor element during grinding and polishing. In this method, noise is reduced by a circuit that removes low-frequency components from the output signal, and processing is terminated when the output signal reaches a predetermined level.

【0009】[0009]

【作用】この方法によって、磁気ギャップ深さモニタ素
子からの出力信号は低域周波数を除去する回路に通すこ
とで不必要なノイズが除去されることとなり、研削・研
摩加工中にこの出力信号を検出することとなる。
According to this method, unnecessary noise is removed from the output signal from the magnetic gap depth monitor element by passing the signal through a circuit for removing low-frequency components. Will be detected.

【0010】[0010]

【実施例】以下、本発明の一実施例について図面を参照
しながら説明する。図1および図2に示すように、所定
の磁気ギャップ深さdより大きい磁気ギャップ深さmを
有する磁気ヘッドが一直線上に並んだ磁気ヘッドブロッ
ク1と、それを固定する磁気ヘッドブロック固定治具2
から構成されており、スライダー加工面3を研削・研摩
加工して磁気ギャップ深さ加工を行う。
An embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 2, a magnetic head block 1 in which magnetic heads having a magnetic gap depth m larger than a predetermined magnetic gap depth d are aligned, and a magnetic head block fixing jig for fixing the magnetic head block 1 2
The slider processing surface 3 is ground and polished to perform magnetic gap depth processing.

【0011】磁気ギャップ深さ加工は所定の磁気ギャッ
プ深さdより大きな磁気ギャップ深さmを有する磁気ヘ
ッドのスライダー加工面3を、研削・研摩加工により寸
法lを除去することで、磁気ヘッドに満足できる磁気特
性を持たせる加工である。
The magnetic gap depth machining is performed on the magnetic head by removing the slider machining surface 3 of the magnetic head having a magnetic gap depth m larger than a predetermined magnetic gap depth d by grinding / polishing. This is a process to give satisfactory magnetic properties.

【0012】磁気ヘッドブロック1の両端部には、磁気
ギャップ深さ加工中に磁気ヘッドと同時に、その一部が
研削・研摩加工により除去される磁気ギャップ深さモニ
タ素子4を形成している。図中の10は磁気ギャップ深
さモニタ素子4に高周波信号を印加するリード線、1
1,12はコア、13はコイル、14,15は絶縁層、
16は保護層である。
At both ends of the magnetic head block 1, there are formed magnetic gap depth monitoring elements 4 whose part is removed by grinding / polishing at the same time as the magnetic head during magnetic gap depth processing. 10 is a lead wire for applying a high-frequency signal to the magnetic gap depth monitoring element 4;
1 and 12 are cores, 13 is a coil, 14 and 15 are insulating layers,
16 is a protective layer.

【0013】図3に示すように、検出装置8は磁気ギャ
ップ深さモニタ素子4と、商用周波数の数倍ないし数十
倍の高周波信号を発生させる交流発振器5と、その高周
波信号を磁気ギャップ深さモニタ素子4に印加し、そこ
からの高周波の出力信号のみを検出するノイズ除去回路
6と、この出力信号によって磁気ギャップ深さ加工の終
了を検知する信号検出器7で構成されている。
As shown in FIG. 3, the detecting device 8 includes a magnetic gap depth monitoring element 4, an AC oscillator 5 for generating a high frequency signal several to several tens times the commercial frequency, and a magnetic gap depth monitoring device. A noise removal circuit 6 is applied to the monitor element 4 and detects only a high-frequency output signal from the monitor element 4, and a signal detector 7 detects the end of the magnetic gap depth processing based on the output signal.

【0014】以下検出装置8と、研削・研摩加工機によ
る加工方法について説明する。交流発信器5からの高周
波信号を磁気ギャップ深さモニタ素子4に印加する。磁
気ギャップ深さモニタ素子4は、磁気ギャップ深さ加工
で行われる研削・研摩加工によりその一部が除去される
ことから、電気抵抗値が上昇し、入力信号に対して出力
信号のレベルが変化する。また同時に、磁気ギャップ深
さモニタ素子4は、砥石あるいは錫などの金属からなる
ラップ盤と常時接触しているために、磁気ギャップ深さ
モニタ素子4からの出力信号には低域周波数のノイズが
混入している。そこで、その出力信号に対して低域周波
数の信号を除去し、有用な高周波信号のみを検出するノ
イズ除去回路6を用いている。さらに、この高周波信号
の出力を検知するホイートストンブリッジで回路を構成
した信号検出器7により、磁気ヘッドの磁気ギャップ深
さ加工中に出力信号の振幅が変化し、所定の水準にまで
振幅が低下した時点で、所定の磁気ギャップ深さである
加工終点を検出することができる。
A processing method using the detecting device 8 and a grinding / polishing machine will be described below. A high frequency signal from the AC transmitter 5 is applied to the magnetic gap depth monitor 4. Since a part of the magnetic gap depth monitor element 4 is removed by the grinding and polishing performed in the magnetic gap depth processing, the electric resistance increases, and the level of the output signal changes with respect to the input signal. I do. At the same time, since the magnetic gap depth monitor element 4 is always in contact with a lapping machine made of a metal such as a grindstone or tin, low frequency noise is included in the output signal from the magnetic gap depth monitor element 4. It is mixed. Therefore, a noise removal circuit 6 that removes low frequency signals from the output signal and detects only useful high frequency signals is used. Further, the amplitude of the output signal changes during processing of the magnetic gap depth of the magnetic head, and the amplitude decreases to a predetermined level by the signal detector 7 configured with a Wheatstone bridge for detecting the output of the high-frequency signal. At this point, a processing end point that is a predetermined magnetic gap depth can be detected.

【0015】これにより加工を終了させれば、所定の磁
気ギャップ深さを有する磁気ヘッドを目標寸法の±0.
5μmにまでも高精度に、かつ歩留り良く製造すること
ができる。
When the processing is completed, a magnetic head having a predetermined magnetic gap depth is set to ± 0.2 of the target size.
It can be manufactured with a high accuracy up to 5 μm and a good yield.

【0016】また、磁気ディスク深さ加工中に磁気ギャ
ップ深さを確認するための加工の一時中断も必要としな
いため加工能力が向上し、工数が削減できる。
Further, since it is not necessary to temporarily suspend the processing for checking the magnetic gap depth during the processing of the magnetic disk depth, the processing capacity is improved and the number of steps can be reduced.

【0017】[0017]

【発明の効果】以上の実施例の説明からも明らかなよう
に、本発明は、研削・研摩加工中に磁気ギャップ深さモ
ニタ素子に高周波信号を印加し、その出力信号から低域
周波数を除去する回路によってノイズを低減し、出力信
号が所定の水準に達した時点で加工を終了させる方法に
より、薄膜磁気ヘッドまたは磁気ヘッドブロックの磁気
ギャップ深さを高精度にかつ効率良く仕上げる優れた薄
膜磁気ヘッドの磁気ギャップ深さ加工方法を実現できる
ものである。
As is clear from the above description of the embodiment, the present invention applies a high frequency signal to the magnetic gap depth monitor element during grinding / polishing and removes a low frequency from the output signal. An excellent thin-film magnetic method that finishes the magnetic gap depth of a thin-film magnetic head or a magnetic head block with high precision and efficiency by reducing noise with a circuit that performs processing and terminating processing when the output signal reaches a predetermined level. It is possible to realize a magnetic gap depth machining method for a head.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の薄膜磁気ヘッドの磁気ギャ
ップ深さの加工方法の固定治具に磁気ヘッドブロックを
固定した状態を示す外観斜視図
FIG. 1 is an external perspective view showing a state in which a magnetic head block is fixed to a fixing jig in a method of processing a magnetic gap depth of a thin film magnetic head according to one embodiment of the present invention.

【図2】薄膜磁気ヘッドの磁気ギャップを構成する要部
の断面略図
FIG. 2 is a schematic cross-sectional view of a main part constituting a magnetic gap of the thin-film magnetic head.

【図3】本発明の一実施例の薄膜磁気ヘッドの磁気ギャ
ップ深さの加工方法の回路図
FIG. 3 is a circuit diagram of a method for processing the magnetic gap depth of the thin-film magnetic head according to one embodiment of the present invention;

【図4】従来の薄膜磁気ヘッドの磁気ギャップ深さの加
工方法の磁気ヘッドブロックの要部を拡大して示した外
観斜視図
FIG. 4 is an external perspective view showing an enlarged main part of a magnetic head block in a conventional method of processing the magnetic gap depth of a thin film magnetic head.

【図5】従来の別の薄膜磁気ヘッドの磁気ギャップ深さ
の加工方法の磁気ヘッドブロックの要部を拡大して示し
た外観斜視図
FIG. 5 is an external perspective view showing an enlarged main part of a magnetic head block in another conventional processing method of the magnetic gap depth of a thin film magnetic head.

【符号の説明】[Explanation of symbols]

1 磁気ヘッドブロック 4 磁気ギャップ深さモニタ素子 5 交流発振器 8 検出装置 DESCRIPTION OF SYMBOLS 1 Magnetic head block 4 Magnetic gap depth monitor element 5 AC oscillator 8 Detector

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 複数個の薄膜磁気ヘッドあるいは複数個
の薄膜磁気ヘッドを一直線上に配列した磁気ヘッドブロ
ックを、所定の磁気ギャップ深さとなるように研削・研
摩する加工方法であって、前記薄膜磁気ヘッドの近傍に
あらかじめ形成した磁気ギャップ深さモニタ素子に高周
波信号を印加し、その出力信号から低域周波数を除去す
る回路によってノイズを低減し、前記出力信号が所定の
水準に達した時点で加工を終了させる薄膜磁気ヘッドの
磁気ギャップ深さの加工方法。
1. A processing method for grinding and polishing a plurality of thin film magnetic heads or a magnetic head block in which a plurality of thin film magnetic heads are arranged in a straight line so as to have a predetermined magnetic gap depth. A high-frequency signal is applied to a magnetic gap depth monitoring element formed in advance near the magnetic head, noise is reduced by a circuit that removes a low frequency from the output signal, and when the output signal reaches a predetermined level, A method of processing the magnetic gap depth of the thin-film magnetic head to finish the processing.
JP32436491A 1991-12-09 1991-12-09 Processing method of magnetic gap depth of thin film magnetic head Expired - Lifetime JP2949982B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32436491A JP2949982B2 (en) 1991-12-09 1991-12-09 Processing method of magnetic gap depth of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32436491A JP2949982B2 (en) 1991-12-09 1991-12-09 Processing method of magnetic gap depth of thin film magnetic head

Publications (2)

Publication Number Publication Date
JPH05159238A JPH05159238A (en) 1993-06-25
JP2949982B2 true JP2949982B2 (en) 1999-09-20

Family

ID=18164965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32436491A Expired - Lifetime JP2949982B2 (en) 1991-12-09 1991-12-09 Processing method of magnetic gap depth of thin film magnetic head

Country Status (1)

Country Link
JP (1) JP2949982B2 (en)

Also Published As

Publication number Publication date
JPH05159238A (en) 1993-06-25

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