JP2928618B2 - Optical fiber preform manufacturing equipment - Google Patents

Optical fiber preform manufacturing equipment

Info

Publication number
JP2928618B2
JP2928618B2 JP28330090A JP28330090A JP2928618B2 JP 2928618 B2 JP2928618 B2 JP 2928618B2 JP 28330090 A JP28330090 A JP 28330090A JP 28330090 A JP28330090 A JP 28330090A JP 2928618 B2 JP2928618 B2 JP 2928618B2
Authority
JP
Japan
Prior art keywords
target member
soot
optical fiber
fiber preform
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28330090A
Other languages
Japanese (ja)
Other versions
JPH04160028A (en
Inventor
俊勝 笹川
幸洋 中山
光一 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP28330090A priority Critical patent/JP2928618B2/en
Publication of JPH04160028A publication Critical patent/JPH04160028A/en
Application granted granted Critical
Publication of JP2928618B2 publication Critical patent/JP2928618B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/62—Distance
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/64—Angle

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、棒状のターゲット部材の軸方向に沿って
移動しながらその外周面にスートを吹付け堆積させ、こ
れによって光ファイバ母材を形成する光ファイバ母材の
製造装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] In the present invention, soot is sprayed and deposited on the outer peripheral surface of a rod-shaped target member while moving along the axial direction, thereby forming an optical fiber preform. The present invention relates to an optical fiber preform manufacturing apparatus.

〔従来の技術〕 例えば、外付法としてつぎのような光ファイバ母材の
製造方法が知られている。即ち第３図において、ターゲ
ット部材100の両端をガラス旋盤などで保持しながら回
転させるとともに、その周囲にスート（ガラス微粒子）
を付着させるためにスート合成用燃焼バーナ101を用い
てターゲット部材100の周囲を燃焼し、これによってそ
のバーナ101の火炎中で生成されたスート（ガラス微粒
子）を付着・堆積させる。つまり、これは、ガラス原料
を燃焼ガス及び助燃ガスとともにバーナ101の火炎102中
に導入することにより、火炎102中で加水分解反応等を
生じさせ、このとき生成したSiO2等のスート（ガラス微
粒子）をターゲット部材100の周囲に堆積させるのであ
る。そして、通常このようなスートの堆積は、所定の装
置（以下これを光ファイバ母材の製造装置とよぶ）を用
いて行うようになっており、つまりバーナ102をターゲ
ット部材100の軸方向に多数回トラバースさせ、そのト
ラバースごとに１層ずつスート（ガラス微粒子）の堆積
層103を形成するものである。[Prior Art] For example, the following manufacturing method of an optical fiber preform is known as an external method. That is, in FIG. 3, both ends of the target member 100 are rotated while being held by a glass lathe or the like, and soot (glass fine particles)
The soot synthesis combustion burner 101 is used to burn the surroundings of the target member 100 so that soot (glass fine particles) generated in the flame of the burner 101 is attached and deposited. That is, by introducing the glass material into the flame 102 of the burner 101 together with the combustion gas and the auxiliary gas, a hydrolysis reaction or the like occurs in the flame 102, and soot such as SiO 2 (glass fine particles) generated at this time. Is deposited around the target member 100. Usually, such soot deposition is performed using a predetermined apparatus (hereinafter, referred to as an optical fiber preform manufacturing apparatus). That is, a large number of burners 102 are arranged in the axial direction of the target member 100. The soot (glass fine particles) is deposited one layer at a time for each traverse.

〔解決しようとする課題〕[Problem to be solved]

ところで、通常このような製造装置にあっては、１個
のバーナを用い、これを何度も往復移動させるようにな
っているので、堆積効率が悪く、その作業に比較的長時
間を要している。By the way, such a manufacturing apparatus usually uses one burner and reciprocates the burner many times, so that the deposition efficiency is poor and the work requires a relatively long time. ing.

そこで、この発明は、上記した従来の欠点に鑑み、光
ファイバ母材を作業効率よく、短時間に行うことができ
るとともにスートの堆積状態に偏りが発生するのを防止
した高品質の光ファイバ母材を製造可能であり、しかも
小型化に好適な光ファイバ母材の製造装置を提供するこ
とを目的とするものである。In view of the above-mentioned drawbacks of the related art, the present invention provides a high-quality optical fiber preform that can perform an optical fiber preform with high working efficiency and in a short time and that prevents a soot deposition state from being biased. It is an object of the present invention to provide an apparatus for manufacturing an optical fiber preform capable of manufacturing a material and suitable for downsizing.

〔課題を解決するための手段〕[Means for solving the problem]

即ち、この発明は、棒状のターゲット部材の軸方向に
沿って移動する走行体と、この走行体上に設けられた前
記ターゲット部材の半径方向に向けて進退自在のバーナ
とを有するスート吹付機構を備え、前記バーナによって
ターゲット部材にスートを付着・滞積させて光ファイバ
母材を製造する光ファイバ母材の製造装置であって、前
記スート吹付機構を少なくとも２系統以上設け、前記各
スート吹付機構のバーナをターゲット部材に向けて夫々
異なる角度に取付けるとともにこれらのバーナの中心が
ターゲット部材の中心と一致するように設け、前記走行
体によるターゲット部材の一端から他端までの往動作よ
りも一端まで戻る復動作の方を高速で行うように構成
し、滞積するスートに合わせて徐々に後退するとともに
復動作中には往動作中のバーナとの衝突を避けるように
走行体上のバーナをターゲット部材に対して所定位置ま
で後退させるように構成したものである。That is, the present invention provides a soot spraying mechanism having a traveling body that moves along the axial direction of a rod-shaped target member, and a burner that is provided on the traveling body and that can move forward and backward in the radial direction of the target member. An apparatus for manufacturing an optical fiber preform for producing an optical fiber preform by attaching and accumulating soot on a target member by the burner, wherein the soot spraying mechanism is provided with at least two or more systems, and each of the soot spraying mechanisms is provided. Are mounted at different angles toward the target member and provided so that the centers of these burners coincide with the center of the target member, and from the one end to the other end of the traveling member from the one end to the other end of the target member. It is configured so that the returning operation is performed at a higher speed, gradually retreating according to the soot that is accumulated, and during the returning operation during the forward operation The burner on the running body so as to avoid collision with the burner is obtained by configured to retract to the predetermined position relative to the target member.

〔作用〕[Action]

この発明の光ファイバ母材の製造装置では、バーナを
有するスート吹付機構を２系統以上設け、けれらを順次
交互に往復動作させることにより、極めて効率よくスー
トを吹付けて短時間に光ファイバ母材の製造を行うこと
ができる。In the apparatus for manufacturing an optical fiber preform according to the present invention, two or more soot spraying mechanisms having burners are provided, and the soots are alternately and reciprocally moved so that the soot can be sprayed very efficiently and the optical fiber base can be shortened in a short time. The production of materials can be performed.

また、この発明の光ファイバ母材の製造装置では、往
復移動するスート吹付機構が、往動作よりも復動作の方
を速く移動することにより、作業時間の大幅な削減を図
ることができる。Also, in the optical fiber preform manufacturing apparatus of the present invention, the reciprocating soot blowing mechanism moves faster in the return operation than in the forward operation, thereby enabling a significant reduction in working time.

〔実施例〕〔Example〕

以下この発明の一実施例について添付図面を参照しな
がら説明する。An embodiment of the present invention will be described below with reference to the accompanying drawings.

第１図はこの発明に係る光ファイバ母材の製造装置を
示すものであり、この製造装置は、ターゲット部材１に
対して軸方向に移動しながらスートを吹付け堆積させて
いく２系統の吹付機構、即ち第１スート吹付機構２及び
第２スート吹付機構３を備えている。FIG. 1 shows an apparatus for producing an optical fiber preform according to the present invention. This apparatus comprises two systems of spraying soot while moving axially on a target member 1 to deposit soot. A mechanism, that is, a first soot blowing mechanism 2 and a second soot blowing mechanism 3 is provided.

ターゲット部材１は、全体に亙り均一径寸法を有する
ガラス棒が用いられており、両端部を回転支持部材４に
よって支持されモータ５によって回転するようになって
いる。As the target member 1, a glass rod having a uniform diameter is used throughout, and both ends are supported by a rotation support member 4 and rotated by a motor 5.

第１スート吹付機構２は、ターゲット部材１の外周面
にスートを吹付け堆積させていくものであり、走行体６
と、基台７と、移動体８と、一対のバーナ９とを備えて
いる。走行体６は、ターゲット部材１から一定距離離間
した状態でそのターゲット部材１の軸方向（Ｘ方向）に
沿って往復移動するようになっており、この実施例では
主駆動用モータ10により回転するスクリュシャフト11に
螺合しながらガイドシャフト（図略）に案内されて走行
するようになっている。そして、この走行体６は、ター
ゲット部材１の始端から終端までスートを付着させる動
作時（以下これを往動作とよぶ）にはその作業に適した
走行速度（v1）で、またこのようにして終端まで達した
のち次の往動作に備えて始端に戻るまでの動作時（以下
これを復動作とよぶ）には往動作時の走行速度（v1）よ
りも大幅に速度（v2）を高め、これによってスート付着
作業の能率化を図るようになっている。基台７は、走行
体６に起立状態で取付けられており、上部のガイド板7a
が第２図に示すようにターゲット部材１に向けて一定角
度θに傾斜しており、これによって第２スート吹付機構
３とのすれ違いの際にバーナ９等が衝突しないようにな
っている。移動体８は、基台７のガイド板7a上面におい
てターゲット部材１から徐々に後退する方向に移動して
いくようになっており、これによってターゲット部材１
に堆積するスートの成長に合わせ、つまり徐々に増大す
るターゲット部材１の外径寸法に合わせ、これとバーナ
９との間の距離を常時一定に保持するのである。このた
めこの実施例の移動体８は、副駆動用モータ12と、この
モータ12により回転するピニオン（図略）とにより、つ
まりガイド板7a上面に固着したラック13にピニオンが噛
合回転しながら移動するようになっている。バーナ９
は、移動体８の上面において、ノズルの中心がターゲッ
ト部材１の中心と一致するような状態に取付けられてお
り、燃焼ガス及び助燃ガスとともにガラス材料をノズル
から吹出しながら燃焼させ、このとき発生する加水分解
反応等によってスート（ガラス微粒子）をターゲット部
材１の周囲に付着・堆積させるようになっている。な
お、このバーナ９は復動作中移動体８を最後部位置迄後
退させておくことにより他のバーナ17とのすれ違い時に
衝突を避けることができるようになっている。The first soot spraying mechanism 2 sprays and deposits soot on the outer peripheral surface of the target member 1.
, A base 7, a moving body 8, and a pair of burners 9. The traveling body 6 reciprocates along the axial direction (X direction) of the target member 1 while being separated from the target member 1 by a certain distance. In this embodiment, the traveling body 6 is rotated by the main drive motor 10. While being screwed to the screw shaft 11, the vehicle runs while being guided by a guide shaft (not shown). The traveling body 6 has a traveling speed (v 1 ) suitable for the work during the operation of adhering soot from the start end to the end of the target member 1 (hereinafter, this operation is referred to as forward operation). After reaching the end, the operation speed (v 2 ) is much faster than the traveling speed (v 1 ) in the forward operation during the operation before returning to the start end in preparation for the next forward operation (hereinafter referred to as the return operation). , Thereby improving the efficiency of the soot adhering work. The base 7 is mounted on the traveling body 6 in an upright state, and has an upper guide plate 7a.
Are inclined at a constant angle θ toward the target member 1 as shown in FIG. 2, so that the burner 9 and the like do not collide with each other when passing through the second soot blowing mechanism 3. The moving body 8 is configured to move in a direction of gradually retreating from the target member 1 on the upper surface of the guide plate 7a of the base 7, whereby the target member 1
In accordance with the growth of soot deposited on the target member 1, that is, in accordance with the gradually increasing outer diameter of the target member 1, the distance between the target member 1 and the burner 9 is always kept constant. Therefore, the moving body 8 of this embodiment is moved by the auxiliary drive motor 12 and the pinion (not shown) rotated by the motor 12, that is, the pinion moves while meshing with the rack 13 fixed to the upper surface of the guide plate 7a. It is supposed to. Burner 9
Is mounted on the upper surface of the moving body 8 such that the center of the nozzle coincides with the center of the target member 1. The glass material is burned while being blown out from the nozzle together with the combustion gas and the auxiliary gas. Soot (glass fine particles) is attached and deposited around the target member 1 by a hydrolysis reaction or the like. The burner 9 is configured to retreat the moving body 8 to the rearmost position during the return operation so that a collision can be avoided when the burner 9 passes another burner 17.

第２スート吹付機構３は、第１スート吹付機構２と同
様のものから構成されており、つまり走行体14と、基台
15と、移動体16と、一対のバーナ17とを備えている。走
行体14は、ターゲット部材１に対し、走行体６よりも一
定距離後方側を軸方向（Ｘ方向）に沿って往復移動する
ようになっており、総抗体６と同様に往動作時の走行を
往動作時よりも高速で行うようになっている。また、こ
の走行体14は、毎回走行体６を追いかけるようにして、
或は走行体６に先立って往復動作しながら、ターゲット
部材１にスートを効率よく付着・堆積させていくように
なっている。基台15は、第２図に示すように上部のガイ
ド板15aが基台７のガイド板7aとは異なる角度、つまり
この実施例ではＹ方向に平行な水平状態で取付けられて
おり、このガイド板15aにバーナ17が同じく水平状態で
固着されている。なお、移動体16も移動体８と同様にガ
イド板15上面においてターゲット部材１に対して徐々に
後退していくことができるよう、副駆動用モータ18と、
ラック19及びピニオン（図略）等を有している。The second soot spraying mechanism 3 is constituted by the same one as the first soot spraying mechanism 2, that is, the traveling body 14 and the base
15, a moving body 16, and a pair of burners 17. The traveling body 14 is configured to reciprocate along the axial direction (X direction) on the rear side of the traveling body 6 with respect to the target member 1 by a fixed distance from the target body 1. Is performed at a higher speed than during the forward operation. Also, the running body 14 follows the running body 6 every time,
Alternatively, the soot is efficiently attached to and deposited on the target member 1 while reciprocating before the traveling body 6. As shown in FIG. 2, the base 15 is mounted so that the upper guide plate 15a is at an angle different from that of the guide plate 7a of the base 7, that is, in this embodiment, in a horizontal state parallel to the Y direction. A burner 17 is also fixed to the plate 15a in a horizontal state. The sub-drive motor 18 and the sub-drive motor 18 are also provided so that the moving body 16 can gradually retreat with respect to the target member 1 on the upper surface of the guide plate 15 similarly to the moving body 8.
It has a rack 19 and a pinion (not shown).

なお、この実施例ではバーナを有するスート吹付機構
を２系統設けたが特にこれに限定されるものではなく、
例えば互いにバーナを異なる角度に傾斜させて３列３系
統設け、ターゲット部材に対して各系統のバーナを順次
往復移動させながら効率よくスートを付着・堆積させる
ようにしてもよい。In this embodiment, two soot spraying mechanisms having a burner are provided. However, the present invention is not limited to this.
For example, three lines and three systems may be provided by inclining the burners at different angles, and soot may be efficiently attached and deposited while sequentially reciprocating the burners of each system with respect to the target member.

〔効果〕〔effect〕

以上説明してきたように、この発明に係る光ファイバ
母材の製造装置によれば、バーナを有するスート吹付機
構を２系統以上設け、これらを順次交互に往復移動させ
ることにより、効率的にスートを吹付け、短時間のうち
に光ファイバ母材を製造することができる効果がある。As described above, according to the apparatus for manufacturing an optical fiber preform according to the present invention, two or more soot spraying mechanisms having burners are provided, and these are sequentially and reciprocally moved so that the soot can be efficiently sowed. Spraying has the effect that an optical fiber preform can be manufactured in a short time.

また、この発明に係る光ファイバ母材の製造装置によ
れば、往復移動する各スート吹付機構が、復動作時に高
速走行するように構成しているので、製造時間の大幅な
削減を図ることができる。Further, according to the optical fiber preform manufacturing apparatus according to the present invention, since each reciprocating soot spraying mechanism is configured to run at a high speed during the return operation, it is possible to significantly reduce the manufacturing time. it can.

しかも、この発明によれば、バーナの中心がターゲッ
ト部材の中心と一致しているから、ターゲット部材の半
径方向に対してスートを常時均一に堆積させることがで
きるようになり、ひいては高品質の光ファイバ母材が製
造可能となる。Moreover, according to the present invention, since the center of the burner coincides with the center of the target member, the soot can always be uniformly deposited in the radial direction of the target member, and as a result, high-quality light A fiber preform can be manufactured.

さらに、この発明によれば、堆積するスートに合わせ
て徐々に後退するとともに復動作中には往動作中のバー
ナとの衝突を避けるようにバーナをターゲット部材に対
して所定位置まで後退させるように構成したから、バー
ナどうしの衝突を防止しつつ、（往動作中には）外径太
りしてくる外表面部分からバーナの先端部分までの距離
を常時一定に保持したままでガラス原料（原料ガス）を
吹き付けることができるようになるので、常時最良の位
置からガラス原料を吹き付けることができ、さらに高い
品質の光ファイバ母材が提供できる。Furthermore, according to the present invention, the burner is retracted to a predetermined position with respect to the target member so as to gradually retreat in accordance with the soot to be deposited and to avoid collision with the burner during the forward operation during the return operation. With this configuration, the glass raw material (raw material gas) is kept at a constant distance from the outer surface where the outer diameter increases to the tip of the burner (during forward operation) while preventing collision between the burners. ) Can be sprayed, so that the glass material can be sprayed from the best position at all times, and a higher quality optical fiber preform can be provided.

【図面の簡単な説明】[Brief description of the drawings]

第１図はこの発明に係る光ファイバ母材の製造装置を示
す斜視図、第２図は第１図に示す光ファイバ母材の製造
装置を示す側面図、第３図は従来の光ファイバ母材の製
造装置を示す説明図である。 １……ターゲット部材、 ４……モータ、 6,14……走行体、 9,17……バーナ、 2,3……スート吹付機構。1 is a perspective view showing an apparatus for manufacturing an optical fiber preform according to the present invention, FIG. 2 is a side view showing an apparatus for manufacturing an optical fiber preform shown in FIG. 1, and FIG. 3 is a conventional optical fiber preform. It is explanatory drawing which shows the manufacturing apparatus of a material. 1 ... target member, 4 ... motor, 6,14 ... traveling body, 9,17 ... burner, 2,3 ... soot spraying mechanism.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) C03B 37/00 - 37/16 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 6 , DB name) C03B 37/00-37/16

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】棒状のターゲット部材（１）の軸方向に沿
って移動する走行体（６・14）と、この走行体（６・1
4）上に設けられた前記ターゲット部材（１）の半径方
向に向けて進退自在のバーナ（９・17）とを有するスー
ト吹付機構（２・３）を備え、前記バーナ（９・17）に
よってターゲット部材（１）にスートを付着・堆積させ
て光ファイバ母材を製造する光ファイバ母材の製造装置
であって、 前記スート吹付機構（２・３）を少なくとも２系統以上
設け、 前記各スート吹付機構（２・３）のバーナ（９・17）を
ターゲット部材（１）に向けて夫々異なる角度に取付け
るとともにこれらのバーナ（９・17）の中心がターゲッ
ト部材（１）の中心と一致するように設け、 前記走行体（６・14）によるターゲット部材（１）の一
端から他端まで往動作よりも一端まで戻る復動作の方を
高速で行うように構成し、 堆積するスートに合わせて徐々に後退するとともに復動
作中には往動作中のバーナ（９・17）との衝突を避ける
ように走行体（６・14）上のバーナ（９・17）をターゲ
ット部材（１）に対して所定位置まで後退させるように
構成したことを特徴とする光ファイバ母材の製造装置。1. A traveling body (6.14) moving along the axial direction of a rod-shaped target member (1), and the traveling body (6.1)
4) a soot spraying mechanism (2.3) having a burner (9.17) that can move forward and backward in the radial direction of the target member (1) provided thereon, and is provided with a soot spraying mechanism (9.17). An optical fiber preform manufacturing apparatus for manufacturing an optical fiber preform by attaching and depositing soot on a target member (1), wherein at least two or more systems of the soot spraying mechanism (2.3) are provided, and each of the soots is provided. The burners (9, 17) of the spray mechanism (2, 3) are mounted at different angles toward the target member (1), and the centers of these burners (9, 17) coincide with the centers of the target members (1). The return operation from one end to the other end of the target member (1) from the one end to the other end of the target member (1) is performed at a higher speed than the forward operation by the traveling body (6 ・ 14). Gradually retreat In both cases, the burner (9.17) on the traveling body (6.14) is moved to a predetermined position with respect to the target member (1) so as to avoid a collision with the burner (9.17) during the returning operation so as to avoid collision. An apparatus for manufacturing an optical fiber preform, wherein the apparatus is configured to be retracted.
JP28330090A 1990-10-23 1990-10-23 Optical fiber preform manufacturing equipment Expired - Lifetime JP2928618B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28330090A JP2928618B2 (en) 1990-10-23 1990-10-23 Optical fiber preform manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28330090A JP2928618B2 (en) 1990-10-23 1990-10-23 Optical fiber preform manufacturing equipment

Publications (2)

Publication Number Publication Date
JPH04160028A JPH04160028A (en) 1992-06-03
JP2928618B2 true JP2928618B2 (en) 1999-08-03

Family

ID=17663669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28330090A Expired - Lifetime JP2928618B2 (en) 1990-10-23 1990-10-23 Optical fiber preform manufacturing equipment

Country Status (1)

Country Link
JP (1) JP2928618B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0692670A (en) * 1992-09-11 1994-04-05 Fujikura Ltd Apparatus for producing glass preform
JP3131162B2 (en) * 1996-11-27 2001-01-31 信越化学工業株式会社 Manufacturing method of optical fiber preform
FR2790753B1 (en) 1999-03-08 2001-06-08 Cit Alcatel METHOD FOR MANUFACTURING A FIBER OPTIC PREFORM WITH AN EXTERNAL DEPOSITION OF POTENTIALLY DOPED SILICA
US7574875B2 (en) * 1999-09-29 2009-08-18 Fibre Ottiche Sud - F.O.S. S.P.A. Method for vapour deposition on an elongated substrate
US10464838B2 (en) 2015-01-13 2019-11-05 Asi/Silica Machinery, Llc Enhanced particle deposition system and method

Also Published As

Publication number Publication date
JPH04160028A (en) 1992-06-03

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