JP2918587B2 - Conductive organic thin film - Google Patents

Conductive organic thin film

Info

Publication number
JP2918587B2
JP2918587B2 JP1304484A JP30448489A JP2918587B2 JP 2918587 B2 JP2918587 B2 JP 2918587B2 JP 1304484 A JP1304484 A JP 1304484A JP 30448489 A JP30448489 A JP 30448489A JP 2918587 B2 JP2918587 B2 JP 2918587B2
Authority
JP
Japan
Prior art keywords
film
thin film
conductivity
organic thin
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1304484A
Other languages
Japanese (ja)
Other versions
JPH03165834A (en
Inventor
秀明 田中
孝寿 赤塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MEKUTORON KK
Original Assignee
NIPPON MEKUTORON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MEKUTORON KK filed Critical NIPPON MEKUTORON KK
Priority to JP1304484A priority Critical patent/JP2918587B2/en
Publication of JPH03165834A publication Critical patent/JPH03165834A/en
Application granted granted Critical
Publication of JP2918587B2 publication Critical patent/JP2918587B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/701Langmuir Blodgett films

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は新規な導電性有機薄膜、特に累積多層膜とし
て固体基板上に積層された導電性有機薄膜に関する。
Description: TECHNICAL FIELD The present invention relates to a novel conductive organic thin film, particularly to a conductive organic thin film laminated on a solid substrate as a cumulative multilayer film.

〔従来の技術〕[Conventional technology]

一つの分子内に親水基と疎水基を持つ両親媒性有機物
質をクロロホルムなどの有機溶媒に溶かし水面上に展開
すると、その溶媒が蒸発し、有機物質の膜ができる。有
機膜が形成されている水面の面積を枠(バリアー)で狭
めると、ある面積で両親媒性分子が水面上で親水基部分
を水側に、疎水基部分を空気側に向けて、規則的配列配
向した一分子の厚さの膜、すなわち、単分子膜を形成す
る。
When an amphiphilic organic substance having a hydrophilic group and a hydrophobic group in one molecule is dissolved in an organic solvent such as chloroform and spread on a water surface, the solvent evaporates to form a film of the organic substance. When the area of the water surface on which the organic film is formed is narrowed by a frame (barrier), the amphiphilic molecule regularly turns the hydrophilic group part toward the water side and the hydrophobic group part toward the air side on the water surface in a certain area. A film having a thickness of one molecule aligned and oriented, that is, a monomolecular film is formed.

単分子膜を水面から固体基板に繰返して転移させて得
たものを、累積多層膜(ラングミュア・ブロジェット
膜、LB膜)と呼ぶ。またこのようにして累積多層膜を製
造する方法は一般にLB法と呼ばれる。この累積多層膜が
固体基板に積層された積層体は、各種センサ、機能素
子、表示素子、記憶,記録媒体、コーティング材料、液
晶配向膜、非線形光学素子、超微細パターン用レジス
ト,スイッチング素子、選択的透過膜などの用途に適用
させ得る。
A film obtained by repeatedly transferring a monomolecular film from the water surface to a solid substrate is called a cumulative multilayer film (Langmuir-Blodgett film, LB film). The method of manufacturing a cumulative multilayer film in this manner is generally called an LB method. The laminate in which the accumulated multilayer film is laminated on the solid substrate includes various sensors, functional elements, display elements, storage and recording media, coating materials, liquid crystal alignment films, nonlinear optical elements, resists for ultra-fine patterns, switching elements, It can be applied to applications such as a target permeable membrane.

この方法によりえられた従来の薄膜又は超薄膜は機械
的特性、電気的特性等単独の機能では良好な特性を有す
るものの、総合的には不十分で、実用化されている例は
極めて少ない。
Conventional thin films or ultrathin films obtained by this method have good characteristics such as mechanical characteristics and electric characteristics by themselves, but are generally insufficient and few examples have been put to practical use.

導電性LB膜については、導電性を付与するためにいろ
いろな試みがなされており、例えば、「ケミストリーレ
ターズ(Chemistry Letters)」1667〜1670頁(1970)
(文献1)によれば、親水基に電荷移動錯体を用いて導
電率1s/cmのLB膜がえられており、又「テトラヘドロン
レターズ(Tetrahedron Letters)」27巻46号5633〜563
6頁(1986)(文献2)には親水基にピロールを導入し
ポリマー化した導電率0.1s/cmのポリピロールLB膜が開
示されている。更に第6回次世代産業基盤技術シンポジ
ウム高機能性高分子材料予稿集,185,1988(文献3)で
は、芳香族環をもたないジアセチレン酸を用いてLB膜を
作製し、光重合後熱処理又は電子線照射して分子内環化
させてえられたポリアセンLB膜はヨー素ドーピングを行
なうと1×1-3s/cmオーダーにまで導電度が増大する旨
報告されている。ここにあげられたLB膜の一層はほぼ30
〜50Åの厚さを有するものと認められる。
Various attempts have been made to impart conductivity to the conductive LB film, for example, "Chemistry Letters", pp. 1667-1670 (1970).
According to (Reference 1), an LB film having a conductivity of 1 s / cm is obtained by using a charge transfer complex for a hydrophilic group, and “Tetrahedron Letters”, Vol. 27, No. 46, No. 5633-563.
Page 6 (1986) (Literature 2) discloses a polypyrrole LB film having a conductivity of 0.1 s / cm in which pyrrole is introduced into a hydrophilic group and polymerized. Furthermore, in the 6th Next-Generation Industrial Technology Symposium, Preliminary Collection of Highly Functional Polymer Materials, 185, 1988 (Reference 3), an LB film was prepared using diacetylenic acid having no aromatic ring, and after photopolymerization. It has been reported that the conductivity of polyacene LB films obtained by heat treatment or electron beam irradiation and intramolecular cyclization increases to the order of 1 × 1 −3 s / cm when iodine is doped. One layer of the LB film mentioned here is almost 30
It is found to have a thickness of ~ 50mm.

このような導電性の比較的良好なLB膜は将来電子材料
への応用が期待されているが従来の方法で作られたLB膜
は一般に導電性が低く電極材料等の用途への実用化にお
ける重大な問題点となっている。
Such LB films with relatively good conductivity are expected to be applied to electronic materials in the future, but LB films made by conventional methods generally have low conductivity and are not suitable for practical applications such as electrode materials. It is a serious problem.

例えば「電気学会論文誌」106巻、9号(昭61)435〜
441頁(文献4)にはポリイミドLB超薄膜に関する報告
がなされており、熱的、機械的特性の優れた約4Åの厚
さの超薄膜が得られているが、導電性は極めて低く、累
積20層、50層の導電率は夫々8.00×10-15、8.19×10-15
(s/cm)と報告されている。
For example, "Transactions of the Institute of Electrical Engineers of Japan", Vol. 106, No. 9, 1986-435
On page 441 (Reference 4), there is a report on a polyimide LB ultrathin film. An ultrathin film with a thickness of about 4 mm having excellent thermal and mechanical properties has been obtained, but the conductivity is extremely low and Conductivity of 20 layers and 50 layers is 8.00 × 10 -15 and 8.19 × 10 -15 respectively
(S / cm).

ポリイミドなどの芳香族耐熱性高分子は焼成すること
により、導電性パイロポリマーとなることが知られてい
るが、LB膜で作製された例はない。LB法で作製すること
により、超薄膜化が可能であり、分子を高度に配列配向
できるために、キャスト膜よりも低いエネルギーで同等
の特性を有するパイロポリマーを作製できることが期待
される。
It is known that an aromatic heat-resistant polymer such as polyimide can be converted into a conductive pyropolymer by firing, but there is no example in which an LB film is used. By using the LB method, an ultrathin film can be formed and molecules can be highly aligned and aligned. Therefore, it is expected that a pyropolymer having the same characteristics as the cast film can be manufactured with lower energy than the cast film.

〔発明の概要〕[Summary of the Invention]

本発明者らは上記の如き問題点を解決して導電性を向
上せしめて電極材料等への用途への実用化を図りうる導
電性有機薄膜を提供することを目的として種々研究、実
験を重ねた結果、上記文献4に記載のポリイミドの如き
芳香族環を有する有機分子の薄膜を加熱して熱分解重合
することが極めて低かった導電性を顕著に向上しうるこ
とを見出して本発明に至ったものである。
The present inventors have conducted various studies and experiments with the aim of providing a conductive organic thin film that can solve the above-mentioned problems and improve the conductivity and can be put to practical use for electrode materials and the like. As a result, it has been found that heating a thin film of an organic molecule having an aromatic ring such as a polyimide described in the above-mentioned Document 4 to thermally decompose and polymerize it can significantly improve the conductivity, which was extremely low. It is a thing.

従って本発明は芳香族環を有する有機分子についてLB
法を用いて作製された薄膜を加熱して熱分解重合してえ
られた導電性有機薄膜を提供するものである。
Therefore, the present invention relates to an organic molecule having an aromatic ring.
The present invention provides a conductive organic thin film obtained by heating a thin film produced by the method and thermally decomposing and polymerizing the thin film.

〔発明の詳細な説明〕[Detailed description of the invention]

本発明について以下に詳細に説明する。 The present invention will be described in detail below.

本発明において用いられる有機分子は芳香族環を有す
るものであり、ポリイミド、ポリパラフェニレンビニレ
ン等があげられ、その中ではポリイミドが望ましい。こ
のポリイミドの分子式の1例を示せば次のとおりであ
る。
The organic molecule used in the present invention has an aromatic ring, and examples thereof include polyimide and polyparaphenylene vinylene. Among them, polyimide is preferable. An example of the molecular formula of this polyimide is as follows.

この有機分子の薄膜を通常上記の如きLB法によって基
板上に作製する。LB法によればポリイミドの場合4Åの
如き超薄膜をつくることができその場合良好な透明電極
ができて有効であるが本発明ではこのような超薄膜に限
られることなく通常この方法でえられる任意の厚さのも
のも含まれる。
This organic molecule thin film is usually formed on a substrate by the LB method as described above. According to the LB method, in the case of polyimide, an ultrathin film such as 4 mm can be formed, and in that case, a good transparent electrode can be formed, which is effective. However, the present invention is not limited to such an ultrathin film and is usually obtained by this method. Any thickness is also included.

基板としては単にLB法のみに用いるときはスライドガ
ラス、アルミニウム蒸着板も用いることができるが、本
発明では後の熱処理にも耐えられる石英ガラス板、シリ
コンウェハ、雲母等を用いるのが好ましい。基板上には
操作を繰返すことによって1層から100層又はそれ以上
の累積された薄膜からなる積層体を形成することができ
る。本発明ではかかる薄膜は1層でもよく多数層でもよ
くその数は任意である。
When the substrate is used only for the LB method, a slide glass or an aluminum vapor-deposited plate can be used. However, in the present invention, it is preferable to use a quartz glass plate, a silicon wafer, mica, or the like that can withstand a heat treatment performed later. By repeating the operation on the substrate, a laminate composed of one to 100 or more accumulated thin films can be formed. In the present invention, such a thin film may be a single layer or multiple layers, and the number is arbitrary.

このようにしてえられた芳香族環を有する有機分子の
有機薄膜を熱処理して有機分子を熱分解重合する。その
際の温度、時間等の条件は熱分解重合を起させるに必要
な程度に定められ、ポリイミドの場合は700℃又はそれ
以上の温度、約1000℃の温度に加熱する。時間は薄膜層
の数又は厚みによって異なるが約60分間で十分である。
The thus-obtained organic thin film of organic molecules having an aromatic ring is subjected to a heat treatment to thermally decompose and polymerize the organic molecules. Conditions such as temperature and time are determined to the extent necessary for causing thermal decomposition polymerization. In the case of polyimide, heating is performed at 700 ° C. or higher, at a temperature of about 1000 ° C. The time depends on the number or thickness of the thin film layers, but about 60 minutes is sufficient.

この熱処理は高真空中(1×10-5torr前後)又は窒
素、アルゴン等の不活性ガス雰囲気内で行なわれる。こ
のように上記有機分子を熱分解重合してパイロポリマー
化する。
This heat treatment is performed in a high vacuum (about 1 × 10 −5 torr) or in an atmosphere of an inert gas such as nitrogen or argon. Thus, the organic molecules are pyrolyzed and polymerized to form a pyropolymer.

このようにして得られた有機薄膜はたとえば50層の積
層体で70s/cmを越える導電率を有しており熱処理前と比
べて格段と高く、かつ安定性に優れた電極材料である。
The organic thin film thus obtained has, for example, a conductivity of more than 70 s / cm in a laminate of 50 layers, is an electrode material that is much higher than before heat treatment and has excellent stability.

〔実施例〕〔Example〕

以下実施例及び比較例により本発明を更に詳しく説明
する。
Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples.

実施例1 ポリイミドの累積多層膜を上記文献4の教示に従って
作製した。
Example 1 A cumulative multilayer film of polyimide was prepared according to the teaching of the above-mentioned reference 4.

先ずピロメリット酸二無水物(PMDA)と4,4′−ジア
ミノジフェニルエーテル(DDE)をN,N′−ジメチルアセ
トアミド(DMAC)中で重合してポリアミド酸(PAA)を
合成する。このポリアミド酸のDMAC溶液にベンゼンを加
えて、この両溶媒の溶液をつくる。このPAA溶液と同じ
溶媒で同濃度に調製したN,N−ジメチル−n−ヘキサデ
シルアミン(C16DMA)溶液とを混合してポリアミド酸誘
導体(PAAD)溶液をつくる。このPAAD分子では長鎖をも
つC16DMAの部分が疎水性となって単分子の膜の形成を可
能にする。
First, polyamic acid (PAA) is synthesized by polymerizing pyromellitic dianhydride (PMDA) and 4,4'-diaminodiphenyl ether (DDE) in N, N'-dimethylacetamide (DMAC). Benzene is added to this polyamic acid DMAC solution to make a solution of both solvents. This PAA solution is mixed with an N, N-dimethyl-n-hexadecylamine (C 16 DMA) solution prepared in the same solvent and at the same concentration to prepare a polyamic acid derivative (PAAD) solution. In this PAAD molecule, the portion of the C 16 DMA having a long chain becomes hydrophobic, enabling the formation of a monomolecular film.

基板として石英ガラス板を用い、これを純水の水面上
に出し入れする垂直浸漬法に従って有機分子薄膜をつく
る。膜累積時の温度は約20℃とする。
A quartz glass plate is used as a substrate, and an organic molecular thin film is formed according to a vertical immersion method in which the quartz glass plate is put in and out of the surface of pure water. The temperature during film accumulation is about 20 ° C.

このポリアミド酸誘導体(PAAD)の累積条件をまとめ
れば次の表のとおりである。
The following table summarizes the cumulative conditions of this polyamic acid derivative (PAAD).

このポリアミド酸誘導体LB膜を無水酢酸:ピリジン:
ベンゼン(1:1:3容積比)混合溶液中に約12時間常温で
浸し、イミド化を進行させポリイミドLB膜を形成した。
This LB film of polyamic acid derivative is treated with acetic anhydride: pyridine:
It was immersed in a benzene (1: 1: 3 volume ratio) mixed solution at room temperature for about 12 hours, and imidization proceeded to form a polyimide LB film.

このようにしてポリイミドLB膜51層を石英ガラス板上
に作成した。得られたLB膜を1×10-5torrの真空下で10
00℃で60分間熱処理を施し、熱分解重合し、パイロポリ
マーLB膜を作成した。
Thus, 51 layers of the polyimide LB film were formed on the quartz glass plate. The obtained LB film was dried under vacuum of 1 × 10 −5 torr for 10
A heat treatment was performed at 00 ° C. for 60 minutes, followed by thermal decomposition polymerization to form a pyropolymer LB film.

このパイロポリマーLB膜の導電率を図面第1図の如き
測定系により測定した。図において1が縦(l)1.3cm,
厚さ(t)1mmの石英基板でありその上にLB膜2が形成
されている。この基板1上にd=0.5cm互いに離して二
つの銀ペースト端子3を設けこれに銅線4を接続する。
この測定系を作製し、導電度測定は直流2端子法により
通常のデジタルボルトメーターを用いて行った。本発明
にかかるパイロポリマー膜の膜厚を1層4Åで換算する
との膜厚は51層で204Åであり導電率は51層で74s/cmで
あり、極めて高い導電性を有していた。また、このパイ
ロポリマーLB膜の導電率は空気中42日経過後も変化なく
極て安定性があった。
The conductivity of the pyropolymer LB film was measured by a measuring system as shown in FIG. In the figure, 1 is vertical (l) 1.3cm,
It is a quartz substrate having a thickness (t) of 1 mm, on which an LB film 2 is formed. Two silver paste terminals 3 are provided on the substrate 1 with d = 0.5 cm apart from each other, and a copper wire 4 is connected thereto.
This measurement system was prepared, and the conductivity was measured using a normal digital voltmeter by a DC two-terminal method. When the thickness of the pyropolymer film according to the present invention was converted into 4Å per layer, the thickness was 51Å for the 51 layers and the conductivity was 74 s / cm for the 51 layers, which was extremely high. The conductivity of the pyropolymer LB film was extremely stable without change even after 42 days in the air.

比較例1 上記ポリイミドLB膜を累積していない、石英基板につ
いて実施例1と同じ条件で熱処理したものを作製したが
実施例1のような導電性はなく、熱処理による新規物質
の形成はなく、LB膜を熱処理することにより形成される
導電性薄膜であることが確認された。
Comparative Example 1 A quartz substrate, on which the polyimide LB film was not accumulated, was heat-treated under the same conditions as in Example 1, but was not conductive as in Example 1, and no new substance was formed by the heat treatment. It was confirmed that the LB film was a conductive thin film formed by heat treatment.

因みに上記実施例による熱処理前のポリイミドLB膜に
ついても実施例1の測定系を用いて導電率を測定したと
ころ、YHP4329 HIGH RESISTANCE METERで測定した結果
1.89×10-8s/cm以下であった。
By the way, the conductivity of the polyimide LB film before the heat treatment according to the above example was measured using the measurement system of Example 1, and the result was measured by YHP4329 HIGH RESISTANCE METER.
1.89 × 10 −8 s / cm or less.

これから明らかなように本発明により熱処理してられ
た有機薄膜は格段と高い導電性を有しており電極等の用
途へ良好に用いることができる。
As is clear from this, the organic thin film heat-treated according to the present invention has remarkably high conductivity, and can be favorably used for applications such as electrodes.

【図面の簡単な説明】[Brief description of the drawings]

図面第1図は本発明にかかる有機薄膜の導電率の測定系
を示す模式図である。 1…石英基板、2…有機薄膜、3…銀ペースト電極、4
…導線。
FIG. 1 is a schematic view showing a system for measuring the conductivity of an organic thin film according to the present invention. DESCRIPTION OF SYMBOLS 1 ... Quartz substrate, 2 ... Organic thin film, 3 ... Silver paste electrode, 4
... lead wire.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】芳香族環を含む有機分子についてLB法を用
いて作製された薄膜を熱処理して熱分解重合することに
よつてえられる導電性有機薄膜。
1. A conductive organic thin film obtained by subjecting a thin film produced by an LB method to an organic molecule containing an aromatic ring and subjecting it to thermal decomposition polymerization.
JP1304484A 1989-11-22 1989-11-22 Conductive organic thin film Expired - Fee Related JP2918587B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1304484A JP2918587B2 (en) 1989-11-22 1989-11-22 Conductive organic thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1304484A JP2918587B2 (en) 1989-11-22 1989-11-22 Conductive organic thin film

Publications (2)

Publication Number Publication Date
JPH03165834A JPH03165834A (en) 1991-07-17
JP2918587B2 true JP2918587B2 (en) 1999-07-12

Family

ID=17933588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1304484A Expired - Fee Related JP2918587B2 (en) 1989-11-22 1989-11-22 Conductive organic thin film

Country Status (1)

Country Link
JP (1) JP2918587B2 (en)

Also Published As

Publication number Publication date
JPH03165834A (en) 1991-07-17

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