JP2907545B2 - 光学要素または系を検査する方法および装置 - Google Patents

光学要素または系を検査する方法および装置

Info

Publication number
JP2907545B2
JP2907545B2 JP3503434A JP50343491A JP2907545B2 JP 2907545 B2 JP2907545 B2 JP 2907545B2 JP 3503434 A JP3503434 A JP 3503434A JP 50343491 A JP50343491 A JP 50343491A JP 2907545 B2 JP2907545 B2 JP 2907545B2
Authority
JP
Japan
Prior art keywords
collimator
source
photodetector
optical system
wavefront
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3503434A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04504762A (ja
Inventor
ベルンハルト ブラウネッカー
ベルンハルト ゲヒター
アンドレ フイザー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RAIKA HEERUBURUTSUGU AG
Original Assignee
RAIKA HEERUBURUTSUGU AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RAIKA HEERUBURUTSUGU AG filed Critical RAIKA HEERUBURUTSUGU AG
Publication of JPH04504762A publication Critical patent/JPH04504762A/ja
Application granted granted Critical
Publication of JP2907545B2 publication Critical patent/JP2907545B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP3503434A 1990-02-07 1991-02-05 光学要素または系を検査する方法および装置 Expired - Lifetime JP2907545B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4003699A DE4003699A1 (de) 1990-02-07 1990-02-07 Verfahren und anordnung zur pruefung optischer komponenten oder systeme
DE4003699.5 1990-02-07

Publications (2)

Publication Number Publication Date
JPH04504762A JPH04504762A (ja) 1992-08-20
JP2907545B2 true JP2907545B2 (ja) 1999-06-21

Family

ID=6399643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3503434A Expired - Lifetime JP2907545B2 (ja) 1990-02-07 1991-02-05 光学要素または系を検査する方法および装置

Country Status (5)

Country Link
US (1) US5289254A (en, 2012)
EP (1) EP0466889B1 (en, 2012)
JP (1) JP2907545B2 (en, 2012)
DE (2) DE4003699A1 (en, 2012)
WO (1) WO1991012510A1 (en, 2012)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69314829T2 (de) * 1992-03-14 1998-03-05 Roke Manor Research Krümmungsmessung einer Oberfläche
CA2113295A1 (en) * 1994-01-12 1995-07-13 Roger Dore Lens markings viewer
DE4416988A1 (de) * 1994-05-13 1995-11-16 Eos Electro Optical Syst Vorrichtung und Verfahren zum Herstellen eines dreidimensionalen Objekts
DE4416901A1 (de) * 1994-05-13 1995-11-16 Eos Electro Optical Syst Vorrichtung und Verfahren zum Herstellen eines dreidimensionalen Objekts
EP0758952B1 (de) * 1994-05-13 1998-04-08 EOS GmbH ELECTRO OPTICAL SYSTEMS Verfahren und vorrichtung zum herstellen dreidimensionaler objekte
DE19516017C1 (de) * 1995-05-02 1996-09-19 Leica Ag Verfahren zur Kompensation von Wellenfrontdeformationen
US6184974B1 (en) * 1999-07-01 2001-02-06 Wavefront Sciences, Inc. Apparatus and method for evaluating a target larger than a measuring aperture of a sensor
AU2003240945A1 (en) * 2002-05-31 2003-12-19 Wavefront Sciences, Inc. Methhod and system for sensing and analyzing a wavefront of an optically transmissive system
DE102007003681B4 (de) 2006-02-10 2017-11-30 Hochschule Bremen Verfahren und Vorrichtung zur Analyse einer optischen Einrichtung
JP5452032B2 (ja) * 2009-02-13 2014-03-26 株式会社日立製作所 波面収差測定方法及びその装置
US8593622B1 (en) * 2012-06-22 2013-11-26 Raytheon Company Serially addressed sub-pupil screen for in situ electro-optical sensor wavefront measurement
DE102014010667B4 (de) 2014-07-18 2017-07-13 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co Verfahren und Vorrichtung zur Messung der Form einer Wellenfront eines optischen Strahlungsfeldes
CN114729849A (zh) * 2019-11-19 2022-07-08 惠普发展公司，有限责任合伙企业 确定扫描仪的优选区域
EP4231001A1 (en) * 2022-02-16 2023-08-23 Carl Zeiss Vision International GmbH Testing device and testing method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3832066A (en) * 1972-10-27 1974-08-27 Acuity Syst Inc Apparatus and method for analyzing sphero-cylindrical optical systems
GB1490215A (en) * 1974-07-15 1977-10-26 Inst Nat Du Verre Method and apparatus for testing lenses
US4007990A (en) * 1975-05-23 1977-02-15 Acuity Systems, Incorporated Apparatus and method for measuring refractive properties of a sphero-cylindrical optical system
JPS58205834A (ja) * 1982-05-25 1983-11-30 Canon Inc 収差測定方法
EP0112403B1 (de) * 1982-12-24 1987-06-03 Ibm Deutschland Gmbh Opto-elektronische Abtastvorrichtung
DD213296A1 (de) * 1983-01-03 1984-09-05 Zeiss Jena Veb Carl Vorrichtung zum pruefen des optischen leistungszustandes von objektiven
DE3620108A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Vorrichtung zum beleuchten von bauteilen aus transparentem material bei der fehlerpruefung
DE3620129A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Vorrichtung zum pruefen von bauteilen aus transparentem material auf oberflaechenfehler und einschluesse

Also Published As

Publication number Publication date
WO1991012510A1 (de) 1991-08-22
US5289254A (en) 1994-02-22
DE4003699A1 (de) 1991-08-22
EP0466889B1 (de) 1994-09-14
EP0466889A1 (de) 1992-01-22
DE59102914D1 (de) 1994-10-20
JPH04504762A (ja) 1992-08-20
DE4003699C2 (en, 2012) 1992-09-03

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