JP2907241B2 - Manufacturing method of gas-filled discharge tube - Google Patents
Manufacturing method of gas-filled discharge tubeInfo
- Publication number
- JP2907241B2 JP2907241B2 JP3156970A JP15697091A JP2907241B2 JP 2907241 B2 JP2907241 B2 JP 2907241B2 JP 3156970 A JP3156970 A JP 3156970A JP 15697091 A JP15697091 A JP 15697091A JP 2907241 B2 JP2907241 B2 JP 2907241B2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- gas
- group
- cylinder
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Lasers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はガス入り放電管の製造方
法に係り、例えばレーザ装置の放電ギャップスイッチ用
として好適なガス入り放電管の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a gas-filled discharge tube, and more particularly to a method for manufacturing a gas-filled discharge tube suitable for use as a discharge gap switch of a laser device.
【０００２】[0002]
【従来の技術】従来から、例えばレーザ装置の始動に放
電ギャップスイッチを用いており、これらの放電ギャッ
プスイッチを不活性ガスを封入した放電管で構成するこ
とが提案されている。また、これらの放電ギャップスイ
ッチにおいて、放電管の放電開始電圧をある程度高くし
て過電圧率を高めるために、上記放電管内に封入する不
活性ガスの圧力を数気圧以上と高くすることも知られて
いる。2. Description of the Related Art Conventionally, it has been proposed to use a discharge gap switch for starting a laser device, for example, and to configure these discharge gap switches with a discharge tube filled with an inert gas. Further, in these discharge gap switches, it is also known that the pressure of the inert gas sealed in the discharge tube is increased to several atmospheres or more in order to increase the discharge starting voltage of the discharge tube to some extent and increase the overvoltage ratio. I have.
【０００３】このような放電管Ｔは、図８に示したよう
に、セラミックス等の電気絶縁性材料で形成された筒体
２の両端開放部が放電電極部３ａを有する一対の金属製
電極板３で封着されたもので、上記電極板３の筒体２へ
の封着としては、ガラスフリット、金属ろう等により溶
着する方法が用いられている。かかる工程は、不活性ガ
スが満たされた電気炉内で行われるのが好ましく、上記
溶着作業と同時に上記筒体２内への不活性ガスの封入も
行うようにしていた。As shown in FIG. 8, such a discharge tube T has a pair of metal electrode plates each having a discharge electrode portion 3a at both ends of a cylindrical body 2 formed of an electrically insulating material such as ceramics. In order to seal the electrode plate 3 to the cylindrical body 2, a method of welding with a glass frit, a metal braze, or the like is used. This step is preferably performed in an electric furnace filled with an inert gas, and the inert gas is sealed in the cylindrical body 2 simultaneously with the welding operation.
【０００４】ところが、上記したように、放電管Ｔ内に
は高圧の不活性ガスを封入する必要があるので、上記電
気炉内を高圧のガス雰囲気にする必要があり、かかる高
圧のガス雰囲気のもとでは、上記溶着作業を高品質に行
うことができない（良質のろう付けを行うことができな
い）という不都合があり、また、電気炉の耐圧化も必要
となり、装置全体が大型化するという不都合があった。However, as described above, since it is necessary to fill the discharge tube T with a high-pressure inert gas, it is necessary to set the inside of the electric furnace to a high-pressure gas atmosphere. Originally, there is a disadvantage that the above welding operation cannot be performed with high quality (high quality brazing cannot be performed). In addition, the pressure resistance of the electric furnace also needs to be increased, resulting in an increase in size of the entire apparatus. was there.
【０００５】そこで、発明者らは、図９に示したよう
に、放電管Ｔの電極板３及び放電電極部３ａに放電管Ｔ
の内外を連通するような貫通孔１１を設け、この貫通孔
１１にガス封入パイプ１２ａ、１２ｂを気密に嵌着し、
このガス封入パイプの一方１２ａを封止してから他方の
ガス封入パイプ１２ｂを介して高圧の不活性ガスを管内
に封入するようにした放電管Ｔを提案している（実願平
１−８４０３０号参照）。Therefore, as shown in FIG. 9, the inventors of the present invention have attached the discharge tube T to the electrode plate 3 and the discharge electrode portion 3a of the discharge tube T.
And a through hole 11 communicating the inside and the outside of the through hole.
11 , gas-sealed pipes 12a and 12b are fitted airtightly,
A discharge tube T has been proposed in which one of the gas-sealed pipes 12a is sealed and then a high-pressure inert gas is sealed in the tube via the other gas-sealed pipe 12b (Japanese Utility Model Application No. 1-84030). No.).
【０００６】[0006]
【発明が解決しようとする課題】しかし、上記従来の放
電管Ｔにおいては、図１０に示したように、一方のガス
封入パイプ１２ａを封止してから他方のガス封入パイプ
１２ｂに継手部１０ｂ、バルブ９、継手部１０ａを結合
し、この継手部１０ａを真空装置Ｍに接続して、真空装
置Ｍの切り換えで真空引きとガス封入とを行い、その後
上記他方のガス封入パイプ１２ｂを封止するというガス
入れ加工を行わなければならず、かかるガス入れ加工
は、放電管Ｔ１つ毎に行う必要があるので、かかる高圧
のガス入り放電管Ｔを製造するにあたっては、その工程
が極めて多く、量産性が極めて悪いという不都合を有し
ている。また、上記したガス入れ加工においては、上記
継手部１０ｂが１つの放電管Ｔ毎に使い捨てとなるの
で、その製造コストが嵩むという不都合も有している。 However, in the above-described conventional discharge tube T, as shown in FIG. 10, one gas-sealed pipe 12a is sealed and then the other gas-sealed pipe 12b is joined to the joint 10b. , The valve 9, and the joint 10a, and the joint 10a is connected to the vacuum device M, and the vacuum device M is switched to perform evacuation and gas filling, and then the other gas filling pipe 12b is sealed. In order to manufacture such a high-pressure gas-filled discharge tube T, the number of steps is extremely large, since the gas-filling process must be performed for each discharge tube T. It has a disadvantage that mass productivity is extremely poor. In addition, in the gas filling process described above,
The joint portion 10b is disposable for each discharge tube T.
In addition, there is a disadvantage that the manufacturing cost increases.
【０００７】さらに、電極にガス封入のための管を接続
し、該ガス封入のための管を介して放電管内の排気及び
ガス吸気を行う、上述の実願平１−８４０３０号や、特
開平３−１４１５７３号のガス入り放電管を、特公平１
−１３６２７号や特開昭５２−１４６５４９号の放電管
製造方法や、実開昭６２−３３１４７号のマニホールド
を用いて、複数同時に排気及びガス吸気することも考え
られる。 しかし、特公平１−１３２６２７号の放電管製
造方法を用いる場合には、直列に接続することで放電管
列をなした各放電管へのガス充填が、その放電管列の一
端を閉塞した状態で、この閉塞端側から反対の開放端側
に向かう一方向で行われ、その充填ガスの流れが閉塞端
で止まってしまうので、終局的には放電管列内で供給ガ
スが滞留してしまい、各放電管相互のガス濃度やガス圧
力の均等化を確実に達成することが困難となり、各放電
管のガス濃度やガス圧力にばらつきが発生してしまうと
いう不都合を有している。 また、特開昭５２−１４６５
４９号の放電管製造方法や、実開昭６２−３３１４７号
のマニホールドを用い、複数の放電管を並列接続して各
放電管にガスを充填する場合にも、これらにガスを供給
する経路は最後に閉塞されているため、充填ガスの流れ
は一方向となり、従って、充填ガスが終局的には放電管
列内で滞留してしまい、各放電管相互のガス濃度やガス
圧力の均等化を確実に達成することが困難となり、各放
電管のガス濃度やガス圧力にばらつきが発生してしまう
という不都合を有している。 そして、上述した各放電管
のガス濃度やガス圧力のばらつきは、特に、放電管の直
列接続数を増やすほど一層顕著となってしまう。 Further, a tube for gas filling is connected to the electrode.
And exhausting the gas in the discharge tube through the gas filling tube and
Japanese Patent Application No. 1-84030 described above, which performs gas intake,
The gas-filled discharge tube of Kaihei 3-141573 is
Discharge tube disclosed in JP-A-13627 and JP-A-52-146549
Manufacturing method and manifold of Japanese Utility Model Application Laid-open No. Sho 62-33147.
Considering simultaneous exhaust and gas intake using multiple
Can be However, it is made by the discharge tube of Japanese Patent Publication No. 1-132627.
When using the fabrication method, the discharge tube can be connected in series.
The gas filling of each discharge tube in a row corresponds to one of the discharge tube rows.
With the end closed, open end opposite to the closed end
Flow in one direction toward the closed end
Supply gas in the discharge tube row.
The gas concentration and gas pressure between each discharge tube
It is difficult to reliably achieve power equalization, and each discharge
If the gas concentration and gas pressure in the tube fluctuate,
It has the inconvenience mentioned above. Also, Japanese Patent Application Laid-Open No. Sho 52-1465
No. 49 discharge tube manufacturing method and Japanese Utility Model Application Laid-Open No. 62-33147.
Using multiple manifolds, connect multiple discharge tubes in parallel
When filling the discharge tube with gas, supply gas to them.
Flow path is closed at the end of the
Is one-way, so that the fill gas eventually
The gas stays in the row and the gas concentration and gas
It is difficult to reliably achieve pressure equalization, and
Variations occur in the gas concentration and gas pressure of the electric tube
Has the disadvantage of And each of the above-mentioned discharge tubes
In particular, variations in gas concentration and gas pressure
This becomes more remarkable as the number of column connections increases.
【０００８】本発明は上記した点に鑑みてなされたもの
で、高圧の不活性ガスが封入された放電管を、均一なガ
ス濃度及びガス圧力で極めて安価に量産できるようにし
たガス入り放電管の製造方法を提供することを目的とす
るものである。[0008] The present invention has been made in view of the above points, and is intended to provide a uniform discharge tube filled with a high-pressure inert gas.
It is an object of the present invention to provide a method of manufacturing a gas-filled discharge tube which can be mass-produced at a very low cost with a gas concentration and a gas pressure .
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係るガス入り放電管の製造方法は、電気絶
縁性筒体の両端開放部を、放電電極部を有する一対の電
極で封着し、１つが上記筒体の一方の端部に形成され、
かつ、他の１つが該筒体の一方及び他方のうちいずれか
の端部に形成されて、各々が上記筒体の内外を連通する
２つの貫通孔を介して、上記筒体内にガスを充填し、該
ガスが充填された上記筒体の上記各貫通孔をそれぞれ封
止して上記筒体内にガスを封入するガス入り放電管の製
造方法において、複数の上記筒体を、各筒体の一方の貫
通孔どうしを管体により互いに接続すると共に、各筒体
の他方の貫通孔どうしを管体により互いに接続すること
で、これら複数の筒体の内部どうしが互いに並列に連通
した並列筒体群とし、上記並列筒体群を構成する上記各
筒体の一方及び他方のうちいずれかの貫通孔どうしの管
体による接続部分から、該並列筒体群を構成する各筒体
の内部にガスを充填し、上記各筒体の内部へのガスの充
填後、各筒体の貫通孔どうしの管体による接続部分を封
止、切断するようにしたことをその特徴とするものであ
る。In order to achieve the above object, a method of manufacturing a gas-filled discharge tube according to the present invention is characterized in that an open portion at both ends of an electrically insulating tubular body is formed by a pair of electrodes having a discharge electrode portion. One is formed at one end of the tubular body,
And the other one is one of the one and the other of the cylindrical body.
Are formed at the ends of the cylindrical body, and each communicates with the inside and outside of the cylindrical body.
A gas-filled discharge tube that fills the cylinder with gas through two through holes, seals each of the through holes of the cylinder filled with the gas, and fills the gas into the cylinder. in the method, a plurality of the cylindrical body, with one of transmural <br/> holes each other of each tubular body are connected to each other by a tube, together the other penetrations holes each other of the cylindrical body by means of a tube body connection doing, the parallel cylindrical body group inside each other of the plurality of tubular bodies communicating in parallel with each other, any one and of the other of the respective cylindrical body constituting the parallel cylindrical body group penetrations holes each other of tube
From the connecting portion by the body, the gas filled inside each cylindrical body constituting the said parallel cylindrical body group, after filling of the gas into the interior of each cylindrical body, due to penetrations holes each other of the tubular body of the cylindrical body It is characterized in that the connection portion is sealed and cut.
【００１０】また、上記構成に代えて、複数の上記筒体
を、各筒体の片方の貫通孔を他の筒体の片方の貫通孔と
管体により接続することで、これら複数の上記筒体の内
部どうしが互いに連鎖状に連通した連鎖状筒体群とし、
複数の上記連鎖状筒体群を、各連鎖状筒体群の両端部の
うち一方の端部に各々位置する各筒体の片方の貫通孔ど
うしを管体により互いに接続すると共に、各連鎖状筒体
群の両端部のうち他方の端部に各々位置する各筒体の片
方の貫通孔どうしを管体により互いに接続することで、
各連鎖状筒体群を構成する複数の筒体の内部どうしが上
記複数の連鎖状筒体群の相互間に亘って連通した並列連
鎖状筒体群とし、上記並列連鎖状筒体群を構成する上記
各連鎖状筒体群の一方の端部及び他方の端部のうちいず
れかの端部に各々位置する各筒体の片方の貫通孔どうし
の管体による接続部分から、該並列連鎖状筒体群を構成
する各連鎖状筒体群の各筒体の内部にガスを充填し、上
記各筒体の内部へのガスの充填後、各筒体の貫通孔どう
しの管体による接続部分を封止、切断するようにしたこ
とをその特徴とするものである。[0010] Instead of the above structure, a plurality of the cylindrical body, and one transmembrane hole of one transmural hole the other of the cylindrical body of each cylindrical body
By being connected by a pipe , a plurality of the above-mentioned cylinders are connected to each other in a chain-like cylinder group in a chain-like manner,
A plurality of the above-mentioned chain-like cylinder groups are connected to each other by a tube between one through-holes of the respective cylinders located at one end of both ends of each chain-like cylinder group. A piece of each cylinder located at the other end of both ends of the cylinder group
By connecting the two through holes to each other with a pipe ,
The inside of a plurality of cylinders constituting each chain-like cylinder group is a parallel chain-like cylinder group that is communicated between the plurality of chain-like cylinder groups, and constitutes the parallel chain-like cylinder group from the one end portion and the connecting portion due to one of the through-holes each other of the tubular body of the cylindrical body respectively located at either end of the other end of the chain-like cylindrical body group to, said parallel concatenated the gas filled in the respective cylindrical body of the chain-like cylindrical body group constituting the cylindrical body unit, after filling of the gas into the interior of each cylindrical body, connected by transmural holes each other of the tubular body of the cylindrical body The feature is that the portion is sealed and cut.
【００１１】[0011]
【作用】本発明によれば、高圧の不活性ガスが封入され
たガス入り放電管を一度に大量に製造することができ、
また、従来の製造方法では不可避であった筒体毎に使用
した継手部の使い捨て状態を改善することが可能とな
る。しかも、各放電管の筒体の内部どうしが、筒体の貫
通孔どうしを互いに接続する管体を介して他の筒体の内
部と連通していて、全体で並列の筒体群や並列の連鎖状
筒体群をなしていることから、並列筒体群の内部や並列
連鎖状筒体群の内部では閉塞端が形成されず、従って、
筒体内に供給されるガスが滞留することなく環流して全
ての筒体に万遍なく行き渡り、これにより、各放電管の
ガス濃度やガス圧力がばらつくのを確実に防止すること
が可能となる。According to the present invention, a large quantity of gas-filled discharge tubes filled with high-pressure inert gas can be manufactured at one time.
Further, it is possible to improve the disposable state of the joint portion used for each cylinder, which is inevitable in the conventional manufacturing method. Moreover, the insides of the cylinders of the respective discharge tubes communicate with the insides of the other cylinders through the tubes that connect the through holes of the cylinders to each other, and the cylinders in parallel as a whole are Since the body group and the parallel chain cylinder group are formed, no closed end is formed inside the parallel cylinder group or inside the parallel chain cylinder group.
The gas supplied into the cylinder circulates without stagnation and circulates evenly in all the cylinders, thereby making it possible to reliably prevent the gas concentration and gas pressure of each discharge tube from fluctuating. .
【００１２】[0012]
【実施例】以下、本発明の実施例を図面を参照して説明
する。図１は本発明に係るガス入り放電管の製造方法を
実施するための一配置例を示したもので、板状の治具１
を配設し、この治具１の上面には、予め別工程において
その両端開放部に放電電極部を有する一対の金属製電極
板３がろう付け等で封着されたセラミックス等の電気絶
縁性材料からなる筒体２が所定間隔おいて直列に複数個
配置されており、また、この複数個の筒体２からなる筒
体列４が並列に複数列配置されており、これにより、治
具１上には筒体群５が配置されるようになっている。ま
た、上記各筒体２には、図４に示したように、その電極
板３及び放電電極部３ａに、筒体２の内外を連通する貫
通孔１１が設けられており、上記各筒体列４の隣接する
筒体２間には、上記貫通孔１１と内径が等しい金属製の
連接管６が配置されるようになっている。そして、この
連接管６を介して上記各筒体列４の筒体２が連通状態と
なるようになっている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of an arrangement for carrying out a method for manufacturing a gas-filled discharge tube according to the present invention.
On a top surface of the jig 1, a pair of metal electrode plates 3 having discharge electrode portions at both open ends in a separate process is sealed in advance by brazing or the like. A plurality of cylinders 2 made of a material are arranged in series at a predetermined interval, and a plurality of cylinder rows 4 composed of the plurality of cylinders 2 are arranged in parallel. A cylindrical group 5 is arranged on the top 1. Further, in each of the above cylindrical body 2, as shown in FIG. 4, to the electrode plate 3 and the discharge electrode portions 3a, transmural that communicates the inside and outside of the cylindrical body 2
A through-hole 11 is provided, and a metal connecting pipe 6 having the same inner diameter as the through-hole 11 is arranged between the adjacent cylinders 2 of each of the cylinder rows 4. Then, the cylinders 2 of each of the cylinder rows 4 are in a communicating state via the connecting pipe 6.
【００１３】また、上記治具１上への筒体２及び連接管
６の配置作業と別工程で形成され、上記配置された筒体
列４と同数の分岐部７ａを有し、その集合部７ｂが後述
する真空装置Ｍに接続される１組の金属製封入用集合管
７が設けられており（図２）、この封入用集合管７は、
上述した筒体２への電極板３のろう付け温度及び後述す
る筒体２と連接管６等とのろう付け温度と異なる温度の
ろう付け加工等により組み立てられるようになってい
る。上記封入用集合管７の分岐部７ａは、上記連接管６
と同様にその内径が上記貫通孔１１と等しくなってお
り、この各分岐部７ａが対応する各筒体列４のほぼ中央
部に位置するように、上記封入用集合管７が上記治具１
上に配置されることで、上記分岐部７ａを介して分岐部
７ａの両側に位置する筒体２が連通状態となるようにな
っている。そしてこれにより、上記封入用集合管７と各
筒体列４とが連通状態となり、また、上記封入用集合管
７により上記治具１上に配置された筒体群５が二分され
るようになっている。Further, it is formed in a separate step from the operation of disposing the cylinder 2 and the connecting pipe 6 on the jig 1 and has the same number of branches 7a as the cylinder rows 4 arranged. 7b is provided with a set of metal encapsulation collecting pipe 7 connected to a vacuum apparatus M described later (FIG. 2).
The assembling is performed by brazing at a temperature different from the above-mentioned brazing temperature of the electrode plate 3 to the cylindrical body 2 and the brazing temperature of the cylindrical body 2 and the connecting pipe 6 described later. The branch portion 7a of the enclosing collecting pipe 7 is connected to the connecting pipe 6
In the same manner as described above, the inside diameter of the jig 1 is equal to that of the through hole 11, and the enclosing collecting pipe 7 is positioned so that each branch portion 7 a is located substantially at the center of the corresponding cylindrical body row 4.
By being disposed on the upper side, the cylinders 2 located on both sides of the branch portion 7a are in a communicating state via the branch portion 7a. Thereby, the enclosing collecting pipe 7 and each of the cylindrical body rows 4 are in communication with each other, and the cylindrical group 5 disposed on the jig 1 is divided into two by the enclosing collecting pipe 7. Has become.
【００１４】さらに、上記封入用集合管７と同様な温度
のろう付け加工等により別工程で形成され、上記筒体列
４と同数の分岐部８ａを有すると共に、この分岐部８ａ
が集合部８ｂで連通状態とされ、かつ、上記分岐部８ａ
の一端部８ａ′が後述するように封止される２組の金属
製封止用集合管８が設けられており、この各封止用集合
管８が上記治具１上に配置されて上記筒体群５の両端部
に位置するようになされている。ここで、上記封止用集
合管８の分岐部８ａも、上記連接管６と同様にその内径
が上記貫通孔１１と等しくなっており、これにより、上
記分岐部８ａの封止端とならない部位を介して各筒体列
４の端部に位置する筒体２と封止用集合管８とが連通状
態となるようになっている。Further, it is formed in a separate step by brazing or the like at the same temperature as that of the enclosing collecting pipe 7 and has the same number of branch portions 8a as the cylindrical body row 4 and the branch portions 8a.
Are brought into communication with each other at the collecting portion 8b, and the branch portion 8a
There are provided two sets of metal sealing collecting pipes 8 whose one end 8a 'is sealed as described later, and each of these sealing collecting pipes 8 is arranged on the jig 1 and It is located at both ends of the cylinder group 5. Here, the branch portion 8a of the sealing collecting pipe 8 also has the same inner diameter as the through hole 11 as in the case of the connecting pipe 6, and therefore, a portion that does not become a sealing end of the branch portion 8a. The cylindrical body 2 located at the end of each cylindrical body row 4 and the sealing collecting pipe 8 are in communication with each other.
【００１５】そして、上記治具１上に筒体２、連接管
６、封入用集合管７及び封止用集合管８が配置され、か
つ、これらの接続部に金属ろう等が塗布された状態で、
上記治具１全体が例えば真空の電気炉（図示せず）内に
搬入され、この状態で、上記筒体２への電極板３のろう
付け温度及び上記封入用集合管７、封止用集合管８の組
み立てろう付け温度と異なる温度で、筒体２と連接管
６、筒体２と封入用集合管７及び筒体２と封止用集合管
８とのろう付けが行われるようになっている。また、上
記ろう付けが終了した段階で、上記封止用集合管８の分
岐部８ａのろう付けがされていない開放端部８ａ′が電
気溶接等により封止されるようになっている。従って、
本実施例では、各筒体列４とそれ以外の他の少なくとも
１つの筒体列４とが、封入用集合管７及び封止用集合管
８を介して、連鎖状に連通して、請求項に記載の連鎖状
筒体群を構成している。また、本実施例では、各筒体列
４の各筒体２が、同じ筒体列４の他の筒体２や連接管６
を介し、さらに、封入用集合管７及び封止用集合管８を
介して互いに連通し、これにより、請求項中に記載の並
列筒体群を構成している。そして、請求項中に記載の連
鎖状筒体群と並列筒体群とを組み合わせた構成の、全筒
体２の内部どうしが互いに連通した連鎖状の筒体群５
が、請求項中に記載の並列連鎖状筒体群として上記治具
１上に形成されるようになっている。A state in which the cylindrical body 2, the connecting pipe 6, the collecting pipe 7 for enclosing, and the collecting pipe 8 for sealing are arranged on the jig 1, and a metal braze or the like is applied to these connection parts. so,
The entire jig 1 is carried into, for example, a vacuum electric furnace (not shown), and in this state, the temperature at which the electrode plate 3 is brazed to the cylindrical body 2, the encapsulation collecting pipe 7, and the sealing assembly At a temperature different from the assembly brazing temperature of the pipe 8, the brazing of the cylindrical body 2 and the connecting pipe 6, the cylindrical body 2 and the collecting pipe 7 for enclosing, and the cylindrical body 2 and the collecting pipe 8 for sealing are performed. ing. When the brazing is completed, the unbrazed open end 8a 'of the branch portion 8a of the sealing collecting pipe 8 is sealed by electric welding or the like. Therefore,
In the present embodiment, each of the cylindrical body rows 4 and at least one other cylindrical body row 4 are connected in a chain via the enclosing collecting pipe 7 and the sealing collecting pipe 8, and are connected to each other. The chain-shaped cylindrical body group described in the item is constituted. Further, in the present embodiment, each cylinder 2 of each cylinder row 4 is connected to another cylinder 2 or connecting pipe 6 of the same cylinder row 4.
, And further through a collecting pipe 7 for encapsulation and a collecting pipe 8 for sealing, thereby forming a parallel cylinder group described in the claims . A chain-like cylinder group 5 in which the insides of all the cylinders 2 communicate with each other has a configuration in which the chain-like cylinder group and the parallel cylinder group described in the claims are combined.
Are formed on the jig 1 as a parallel chained cylinder group described in the claims .
【００１６】また、上記封入用集合管７の集合部７ｂに
は、バルブ９及び継手部１０ａ、１０ｂを介して真空装
置Ｍの配管系が接続されるようになっており、これによ
り、上記筒体群５と真空装置Ｍとが連通状態となり、こ
の真空装置Ｍの切り換えで、後述するように上記筒体群
５の真空引きとガス封入とが行われるようになってい
る。A piping system of the vacuum apparatus M is connected to the collecting section 7b of the enclosing collecting pipe 7 via a valve 9 and joints 10a and 10b. The body group 5 and the vacuum device M are in communication with each other, and the switching of the vacuum device M causes the evacuation and gas sealing of the cylinder group 5 as described later.
【００１７】次に、本発明に係る製造方法の手順につい
て説明する。まず、封入用集合管７に接続した真空装置
Ｍにより真空引きを行い、封入用集合管７と連通状態と
なった筒体群５を真空にする。ここで、この筒体群５が
真空状態か否かは、真空装置Ｍに設けた圧力計等で判断
し、完全な真空状態であれば、次に真空装置Ｍを切り換
えて、筒体群５に不活性ガスを封入する。この際、各筒
体列４の各筒体２には、封入用集合管７側からと封止用
集合管８側からとの両方から真空装置Ｍによりガスが供
給され、換言すると、封入用集合管７側から各筒体列４
の各筒体２に供給されたガスは、封止用集合管８側から
真空装置Ｍ側や他の筒体列４に還流し、反対に、封止用
集合管８側から各筒体列４の各筒体２に供給されたガス
は、封入用集合管７側から真空装置Ｍ側や他の筒体列４
に環流する。 従って、真空装置Ｍから各筒体列４の各筒
体２に供給されたガスは、筒体群５のどこかで滞留する
ことなく、筒体群５の全筒体２に行き渡る。 Next, the procedure of the manufacturing method according to the present invention will be described. First, a vacuum is drawn by the vacuum device M connected to the enclosing collecting pipe 7, and the cylinder group 5 which is in communication with the enclosing collecting pipe 7 is evacuated. Here, whether or not the cylinder group 5 is in a vacuum state is determined by a pressure gauge or the like provided in the vacuum device M. If the cylinder group 5 is in a completely vacuum state, the vacuum device M is switched next, and the cylinder group 5 is switched. Is filled with an inert gas. At this time, each tube
Each cylindrical body 2 of the body row 4 is sealed from the enclosing collecting pipe 7 side.
Gas is supplied from both sides of the collecting pipe 8 by the vacuum device M.
In other words, each cylinder row 4
The gas supplied to each of the cylindrical bodies 2 from the sealing collecting pipe 8 side
Refluxes to the vacuum device M side or to another cylinder row 4, and on the contrary, for sealing
Gas supplied from the collecting pipe 8 side to each cylinder 2 of each cylinder row 4
Are from the enclosing collecting pipe 7 side to the vacuum device M side and other cylindrical body rows 4.
Reflux. Therefore, each cylinder of each cylinder row 4 is
The gas supplied to the body 2 stays somewhere in the cylinder group 5
Without spreading, it reaches all the cylinders 2 of the cylinder group 5.
【００１８】そして、ガス封入が終了したら、封入用集
合管７と筒体２とを接続する分岐部７ａ、封止用集合管
８の分岐部８ａ及び筒体２間の連接管６のほぼ中間部分
を図示しない電気溶接装置等により所定幅溶着すると共
に封止し、この所定幅の封止部分のほぼ中間部位を、上
記電気溶接装置に内蔵された図示しない切断刃で切断
し、連鎖状に形成した筒体群５を図３に示したような個
々のガス入り放電管Ｔにする。When the gas filling is completed, a branching portion 7a connecting the collecting pipe 7 and the cylindrical body 2, a branching section 8a of the sealing collecting pipe 8, and a substantially intermediate portion of the connecting pipe 6 between the cylindrical bodies 2 are formed. The portion is welded and sealed with a predetermined width by an electric welding device or the like (not shown), and a substantially intermediate portion of the sealed portion with the predetermined width is cut by a cutting blade (not shown) built in the electric welding device to form a chain. The formed cylinder group 5 is formed into individual gas-filled discharge tubes T as shown in FIG.
【００１９】また、上記真空装置Ｍによる真空引きが圧
力計から判断して十分でない時は、上記筒体群５の上記
各種ろう付け作業の一部が完全でない等が判明するが、
この場合、その不完全な場所が特定できないので、その
時は、図１に示したように、筒体群５の中央部に配置さ
れた封入用集合管７の分岐部７ａの一部を上記電気溶接
等で封止すると共に切断し（図中Ａ線）、筒体群５を二
分して、この二分した一方の筒体群５ａと上記真空装置
Ｍに接続した封入用集合管７とが接続した状態とする。
そして、この状態で一方の筒体群５ａの真空引きを再び
行い、この筒体群５ａが完全な真空状態であれば、他方
の筒体群５ｂに問題があることが判明するので、問題の
ない一方の筒体群５ａについては上述した各種作業を行
って個々のガス入り放電管Ｔを形成する。When the evacuation by the vacuum device M is not sufficient based on the judgment from the pressure gauge, it is determined that a part of the various brazing operations of the cylindrical body group 5 is not complete.
In this case, the imperfect location cannot be specified. At that time, as shown in FIG. 1, a part of the branching portion 7a of the enclosing collecting pipe 7 arranged at the center of the cylinder group 5 is electrically connected to the electric part. Sealing is performed by welding or the like and cut (line A in the figure), the cylinder group 5 is divided into two, and one of the divided cylinder groups 5a is connected to the enclosing collecting pipe 7 connected to the vacuum device M. State.
Then, in this state, one of the cylinder groups 5a is evacuated again, and if this cylinder group 5a is in a completely vacuum state, it becomes clear that there is a problem in the other cylinder group 5b. The above-described various operations are performed on one of the cylinder groups 5a to form individual gas-filled discharge tubes T.
【００２０】また、問題がある上記他方の筒体群５ｂに
ついては、この筒体群５ｂの端部にろう付けされた上記
封止用集合管８の集合部８ｂのほぼ中央部分を上記した
ように封止すると共に切断し（図中Ｂ線）、筒体群５ｂ
をさらに二分する。そして、この二分した各筒体群５
ｃ、５ｄの封止用集合管８の分岐部８ａの封止端８ａ′
の一つを開放し、この開放端に図示しないバルブ、継手
部を介して真空装置を接続し、上記各筒体群５ｃ、５ｄ
の真空引きを行って問題がある筒体群がどれであるかを
判明させる。そして、問題がない筒体群については上述
した同様の作業を行って個々のガス入り放電管Ｔを形成
し、また、問題がある筒体群についても、上述した作業
を繰り返して問題がある場所がどこであるかを特定する
ようにし、これにより、良品のガス入り放電管Ｔを量産
するようにする。As for the other cylinder group 5b which has a problem, the central portion of the gathering portion 8b of the sealing manifold 8 brazed to the end of the cylinder group 5b is as described above. And cut (line B in the figure) to form a cylinder group 5b.
Is further divided into two. Then, each of the divided cylinder groups 5
c, 5d, the sealing end 8a 'of the branch portion 8a of the sealing collecting pipe 8
And a vacuum device is connected to this open end via a valve and a joint (not shown), and each of the above-mentioned cylinder groups 5c, 5d
To determine which cylinder group has a problem. Then, for the cylinder group having no problem, the same operation as described above is performed to form the individual gas-filled discharge tubes T. Further, for the cylinder group having the problem, the above operation is repeated to obtain a place where there is a problem. Is specified, thereby mass-producing non-defective gas-filled discharge tubes T.
【００２１】なお、上述したように形成したガス入り放
電管Ｔ（図３）のガス封入部分６（７ａ、８ａ）は、例
えばレーザ装置の始動用放電ギャップスイッチとして組
み込むにあたっての位置決め並びに係止用部材として使
用できるものである。また、上記ガス入り放電管Ｔのガ
ス封入部分６の封止の信頼性を高めるために、図５に示
したように、上記封入部分６を二か所で封止するように
してもよい。The gas-filled portion 6 (7a, 8a) of the gas-filled discharge tube T (FIG. 3) formed as described above is used for positioning and locking for assembling as, for example, a discharge gap switch for starting a laser device. It can be used as a member. In addition, in order to increase the reliability of sealing the gas-filled portion 6 of the gas-filled discharge tube T, the sealed portion 6 may be sealed at two places as shown in FIG.
【００２２】従って、本実施例においては、電極板３で
両端開放部が封着された筒体２を連接管６を介して直列
に複数配置すると共に、この複数の筒体２からなる筒体
列４を並列に複数配置して治具１上に筒体群５を配置
し、この筒体群５の中央部に、上記複数の筒体列４と同
数の分岐部７ａを有し、その集合部７ｂが真空装置Ｍに
接続される封入用集合管７を配置し、さらに、上記筒体
群５の両端部に、上記筒体列４と同数で集合部８ｂで連
通状態とされた分岐部８ａを有し、この分岐部８ａの一
端部が封止された封止用集合管８を配置し、この状態で
上記筒体２、連接管６、封入用集合管７及び封止用集合
管８をろう付けして上記封入用集合管７と連通状態の筒
体群５を形成し、その後、上記封入用集合管７に接続さ
れた真空装置Ｍで真空引きを行うと共にガス封入を行
い、最後に、上記連接管６、封入用集合管７の分岐部７
ａ及び封止用集合管８の分岐部８ａを封止、切断してガ
ス入り放電管Ｔを形成するようにしているので、高圧の
不活性ガスが封入されたガス入り放電管Ｔを一度に大量
に製造することができ、その生産性を著しく向上させる
ことができる。Accordingly, in the present embodiment, a plurality of cylinders 2 having both ends opened by the electrode plate 3 are sealed in series via the connecting pipe 6, and a plurality of cylinders 2 composed of the plurality of cylinders 2 are formed. A plurality of rows 4 are arranged in parallel, and a group of cylinders 5 is arranged on the jig 1. At the center of the group of cylinders 5, there are the same number of branches 7 a as the plurality of rows of cylinders 4. A collecting section 7b whose collecting section 7b is connected to the vacuum device M is arranged, and furthermore, the same number of the pipe rows 4 as the number of the above-mentioned cylindrical body rows 4 are connected to the both ends of the above-mentioned cylindrical body group 5 by the collecting section 8b. A sealing collecting tube 8 having a portion 8a and one end of the branching portion 8a sealed is arranged, and in this state, the cylindrical body 2, the connecting tube 6, the sealing collecting tube 7, and the sealing collecting tube 8 are sealed. The tube 8 is brazed to form a cylindrical group 5 in communication with the enclosing collecting pipe 7, and then the tube group 5 is connected to the enclosing collecting pipe 7 by a vacuum device M. Performs gas sealing performs pull, finally, the connecting tube 6, the branch portion 7 of the encapsulating collecting pipe 7
a and the branch portion 8a of the sealing collecting tube 8 are sealed and cut to form the gas-filled discharge tube T, so that the gas-filled discharge tube T filled with the high-pressure inert gas can be removed at one time. It can be manufactured in large quantities, and its productivity can be significantly improved.
【００２３】また、従来のように筒体２毎にバルブ、継
手部を介して真空装置を接続するのではなく、筒体群５
にバルブ９、継手部１０ａ、１０ｂを介して真空装置Ｍ
を接続するようにしているので、従来の製造方法では不
可避であった筒体２毎に使用した継手部１０ｂの使い捨
て状態を改善することができ、全体の製造コストを著し
く低減させることができる。しかも、筒体群５におい
て、封入用集合管７側と封止用集合管８側とのうちいず
れか一方側から各筒体列４の各筒体２に供給された真空
装置Ｍからのガスが、封入用集合管７側と封止用集合管
８側とのうちいずれか他方側から真空装置Ｍ側や他の筒
体列４に環流し、筒体群５のどこかで滞留することな
く、筒体群５の全筒体２に行き渡るので、筒体群５の各
筒体２において内部に充填されるガスの濃度や圧力にば
らつきが発生するのを確実に防止し、全筒体２に均一し
た濃度及び圧力でガスを充填、封入することができる。 Instead of connecting a vacuum device via a valve and a joint for each cylinder 2 as in the prior art, a cylinder group 5
Device M via a valve 9 and joints 10a and 10b
Are connected, so that the disposable state of the joint portion 10b used for each cylinder 2 which is inevitable in the conventional manufacturing method can be improved, and the overall manufacturing cost can be significantly reduced. Besides, it is in the cylinder group 5
Of the collecting pipe 7 and the sealing pipe 8
Vacuum supplied to each cylinder 2 of each cylinder row 4 from one side
The gas from the device M is supplied to the sealing collecting pipe 7 side and the sealing collecting pipe.
From the other side of the vacuum device M side and other cylinders
Reflux to body row 4 and do not stay somewhere in cylinder group 5
And all the cylinders 2 of the cylinder group 5 are distributed.
Depending on the concentration and pressure of the gas charged inside the cylinder 2,
Prevents the occurrence of flicker and ensures uniformity on all cylinders 2
The gas can be filled and sealed at a different concentration and pressure.
【００２４】さらに、上記封入用集合管７と連通状態に
ある上記筒体群５の真空引きができない場合には、封入
用集合管７を封止、切断して上記筒体群５を二つの筒体
群５ａ、５ｂに分割し、この分割した各筒体群に真空装
置を接続して真空引きを行うことで、真空状態とならな
い筒体群が判明でき、この作業を繰り返すことで、製造
すべき筒体群内に不良品が有るか否かを検査しつつ、良
品のガス入り放電管Ｔのみを量産することができる。Further, when it is not possible to evacuate the cylindrical group 5 in communication with the enclosing collecting pipe 7, the enclosing collecting pipe 7 is sealed and cut to separate the cylindrical group 5 into two. The cylinder group is divided into the cylinder groups 5a and 5b, and a vacuum device is connected to each of the divided cylinder groups to perform evacuation, whereby a cylinder group that does not enter a vacuum state can be identified. It is possible to mass-produce only non-defective gas-filled discharge tubes T while checking whether or not there is a defective product in the cylinder group to be manufactured.
【００２５】図６及び図７は本発明に係る製造方法を実
施するための他の配置例を示したもので、治具１上に連
接管６を介して直列に配置した複数の筒体２を、図６の
ように、その長手方向が封入用集合管の集合部（図示せ
ず）と略平行になるように配置し、連接管６が筒体２の
一方の電極板３に２本配置されるようにしたもので、他
は上記配置例と同様となっている。このようにしても、
上記配置例と同様に高圧の不活性ガスが封入された良品
のガス入り放電管Ｔを大量に製造することができ、か
つ、その製造コストを低減させることができるものであ
る。FIGS. 6 and 7 show another example of arrangement for carrying out the manufacturing method according to the present invention, in which a plurality of cylinders 2 arranged in series on a jig 1 via a connecting pipe 6 are shown. As shown in FIG. 6, two connecting pipes 6 are arranged on one electrode plate 3 of the cylindrical body 2 so that the longitudinal direction thereof is substantially parallel to a collecting portion (not shown) of the collecting pipe for encapsulation. The other arrangement is the same as that of the above arrangement example. Even if you do this,
As in the above arrangement example, a good-quality gas-filled discharge tube T in which high-pressure inert gas is sealed can be manufactured in large quantities, and the manufacturing cost can be reduced.
【００２６】なお、本発明は上述した実施例に限定され
るものではなく、種々変更することができるものであ
り、例えば、上述したように封入用集合管７を筒体群５
の中央部に配置せずに筒体群５の一端部に配置し、他端
部には封止用集合管８を配置するようにしてもよい。ま
た、予め電極板３が封着された筒体２を治具１上に配置
せずに、筒体２、電極板３、連接管６、封入用集合管７
及び封止用集合管８を治具１上にそれぞれ配置し、これ
らを一度にろう付け加工するようにしてもよい。The present invention is not limited to the above-described embodiment, but can be variously modified. For example, as described above, the sealing collecting pipe 7 is
May be arranged at one end of the cylindrical body group 5 without being arranged at the central portion, and the sealing collecting pipe 8 may be arranged at the other end. In addition, the cylinder 2, the electrode plate 3, the connecting pipe 6, and the encapsulating collecting pipe 7 are not disposed on the jig 1 without the cylinder 2 to which the electrode plate 3 is sealed in advance.
Alternatively, the sealing collecting pipe 8 may be arranged on the jig 1 and brazed at once.
【００２７】[0027]
【発明の効果】以上述べたように本発明に係るガス入り
放電管の製造方法は、電気絶縁性筒体の両端開放部を、
放電電極部を有する一対の電極で封着し、１つが上記筒
体の一方の端部に形成され、かつ、他の１つが該筒体の
一方及び他方のうちいずれかの端部に形成されて、各々
が上記筒体の内外を連通する２つの貫通孔を介して、上
記筒体内にガスを充填し、該ガスが充填された上記筒体
の上記各貫通孔をそれぞれ封止して上記筒体内にガスを
封入するガス入り放電管の製造方法において、複数の上
記筒体を、各筒体の一方の貫通孔どうしを管体により互
いに接続すると共に、各筒体の他方の貫通孔どうしを管
体により互いに接続することで、これら複数の筒体の内
部どうしが互いに並列に連通した並列筒体群とし、上記
並列筒体群を構成する上記各筒体の一方及び他方のうち
いずれかの貫通孔どうしの管体による接続部分から、該
並列筒体群を構成する各筒体の内部にガスを充填し、上
記各筒体の内部へのガスの充填後、各筒体の貫通孔どう
しの管体による接続部分を封止、切断するようにした
り、複数の上記筒体を、各筒体の片方の貫通孔を他の筒
体の片方の貫通孔と管体により接続することで、これら
複数の上記筒体の内部どうしが互いに連鎖状に連通した
連鎖状筒体群とし、複数の上記連鎖状筒体群を、各連鎖
状筒体群の両端部のうち一方の端部に各々位置する各筒
体の片方の貫通孔どうしを管体により互いに接続すると
共に、各連鎖状筒体群の両端部のうち他方の端部に各々
位置する各筒体の片方の貫通孔どうしを管体により互い
に接続することで、各連鎖状筒体群を構成する複数の筒
体の内部どうしが上記複数の連鎖状筒体群の相互間に亘
って連通した並列連鎖状筒体群とし、上記並列連鎖状筒
体群を構成する上記各連鎖状筒体群の一方の端部及び他
方の端部のうちいずれかの端部に各々位置する各筒体の
片方の貫通孔どうしの管体による接続部分から、該並列
連鎖状筒体群を構成する各連鎖状筒体群の各筒体の内部
にガスを充填し、上記各筒体の内部へのガスの充填後、
各筒体の貫通孔どうしの管体による接続部分を封止、切
断するようにした。このため、高圧の不活性ガスが封入
されたガス入り放電管を一度に大量に製造することがで
き、その生産性を著しく向上させることができ、また、
従来の製造方法では不可避であった筒体毎に使用した継
手部の使い捨て状態を改善することができ、全体の製造
コストを著しく低減させることができる。しかも、各放
電管の筒体の内部どうしが、筒体の貫通孔どうしを互い
に接続する管体を介して他の筒体の内部と連通してい
て、全体で並列の筒体群や並列の連鎖状筒体群をなして
いることから、並列筒体群の内部や並列連鎖状筒体群の
内部では閉塞端が形成されず、従って、筒体内に供給さ
れるガスが滞留することなく環流して全ての筒体に万遍
なく行き渡り、これにより、各放電管のガス濃度やガス
圧力がばらつくのを確実に防止することができる。As described above, in the method for manufacturing a gas-filled discharge tube according to the present invention, the open portions at both ends of the electrically insulating tubular body are formed.
Sealed with a pair of electrodes having a discharge electrode part, one of which is the cylinder
Formed at one end of the body and another one of the cylinders
Formed at either end of one or the other, each
There via two through-holes communicating the inside and the outside of the cylinder, filling the gas into the cylinder body, the respective through hole of the cylinder to which the gas-filled sealed with the the tubular body, respectively the method of manufacturing a gas-filled discharge tube enclosing a gas, a plurality of the cylindrical body, as well as connected to each other <br/> physician by one penetrations holes each other the tubular body of the cylindrical body, the other of each cylindrical body tube transmural hole each other of
By connecting to each other by the body, and parallel cylindrical body group inside each other of the plurality of tubular bodies communicating in parallel with each other, either transmural one and of the other of the respective cylindrical body constituting the parallel cylindrical body group from the connecting portion by the tube of each other through holes, the gas filled inside each cylindrical body constituting the said parallel cylindrical body group, after filling of the gas into the interior of each cylindrical body, transmural hole of the cylindrical body sealing the connecting portion due to what is in the tube, or so as to cut a plurality of the cylindrical body, connected by transmural hole and the pipe of one of one of the transmural hole the other of the cylindrical body of each cylindrical body In this way, the inside of the plurality of cylinders is a chain cylinder group that is connected to each other in a chain, and the plurality of chain cylinder groups are one end of both ends of each chain cylinder group. the one of the through-holes each other of each cylindrical body to each position as well as connected to each other by a pipe body parts, each chained cylindrical body A plurality of cylindrical body constituting by connecting to each other <br/>, each chained cylindrical body group by one of the through-holes each other the tubular body of the cylindrical body respectively located at the other end of the both ends of the The insides of the plurality of chained cylinder groups are connected to each other between the plurality of chained cylinder groups to form a parallel chained cylinder group, and one end of each of the chained cylinder groups constituting the parallel chained cylinder group And each of the cylinders located at either end of the other end
A gas is filled into each of the cylinders of each of the chained cylinder groups forming the parallel chained cylinder group from a connection portion formed by the pipes of the one through-holes, and the gas is supplied to the interior of each of the cylinders. After filling
Sealing a connecting portion by penetrations holes each other of the tubular body of the cylindrical body, and to be cut. For this reason, a gas-filled discharge tube filled with a high-pressure inert gas can be mass-produced at a time, and its productivity can be significantly improved.
It is possible to improve the disposable state of the joint portion used for each cylinder, which is inevitable in the conventional manufacturing method, and it is possible to significantly reduce the overall manufacturing cost. Moreover, another internal each other is, was what transmural hole of the cylindrical body of the cylinder of the discharge tube
Since it communicates with the inside of other cylinders through the pipes connected to it and forms a parallel cylinder group or parallel chain cylinder group as a whole, the inside of the parallel cylinder group and the parallel No closed end is formed inside the chain-shaped cylindrical body group, and therefore, the gas supplied to the cylindrical body circulates without stagnation and reaches all the cylindrical bodies evenly. Variations in concentration and gas pressure can be reliably prevented.
【図１】本発明に係る製造方法を実施するための一配置
例を示す概略図である。FIG. 1 is a schematic view showing an example of an arrangement for implementing a manufacturing method according to the present invention.
【図２】図１の配置例に使用する封入用集合管の斜視図
である。FIG. 2 is a perspective view of a sealing collecting pipe used in the arrangement example of FIG.
【図３】本製造方法により形成された放電管の斜視図で
ある。FIG. 3 is a perspective view of a discharge tube formed by the present manufacturing method.
【図４】本製造方法により形成された放電管の断面図で
ある。FIG. 4 is a sectional view of a discharge tube formed by the present manufacturing method.
【図５】封止性をより高めた放電管の斜視図である。FIG. 5 is a perspective view of a discharge tube with further improved sealing properties.
【図６】本発明に係る製造方法を実施するための他の配
置例を示す概略図である。FIG. 6 is a schematic view showing another arrangement example for carrying out the manufacturing method according to the present invention.
【図７】図６の配置例により形成された放電管の斜視図
である。FIG. 7 is a perspective view of a discharge tube formed by the arrangement example of FIG.
【図８】従来の放電管を示す断面図である。FIG. 8 is a sectional view showing a conventional discharge tube.
【図９】従来のガス封入パイプ付放電管を示す断面図で
ある。FIG. 9 is a sectional view showing a conventional discharge tube with a gas-filled pipe.
【図１０】従来のガス封入方法を示す概略図である。FIG. 10 is a schematic view showing a conventional gas filling method.
１ 治具 ２ 筒体 ３ 電極板 ４ 筒体列 ５ 筒体群 ６ 連接管 ７ 封入用集合管 ８ 封止用集合管１１ 貫通孔 Ｍ 真空装置 Ｔ 放電管DESCRIPTION OF SYMBOLS 1 Jig 2 Cylindrical body 3 Electrode plate 4 Cylindrical body row 5 Cylindrical body group 6 Connecting pipe 7 Enclosing collecting pipe 8 Sealing collecting pipe 11 Through hole M Vacuum device T Discharge tube
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平３−141573（ＪＰ，Ａ) 特開 昭52−146549（ＪＰ，Ａ) 実開 平３−24290（ＪＰ，Ｕ) 実開 昭62−33147（ＪＰ，Ｕ) 特公 平１−13627（ＪＰ，Ｂ１) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-141573 (JP, A) JP-A-52-146549 (JP, A) JP-A-3-24290 (JP, U) JP-A 62-146549 33147 (JP, U) JP 1-13627 (JP, B1)
Claims (2)
極部を有する一対の電極で封着し、１つが上記筒体の一
方の端部に形成され、かつ、他の１つが該筒体の一方及
び他方のうちいずれかの端部に形成されて、各々が上記
筒体の内外を連通する２つの貫通孔を介して、上記筒体
内にガスを充填し、該ガスが充填された上記筒体の上記
各貫通孔をそれぞれ封止して上記筒体内にガスを封入す
るガス入り放電管の製造方法において、 複数の上記筒体を、各筒体の一方の貫通孔どうしを管体
により互いに接続すると共に、各筒体の他方の貫通孔ど
うしを管体により互いに接続することで、これら複数の
筒体の内部どうしが互いに並列に連通した並列筒体群と
し、 上記並列筒体群を構成する上記各筒体の一方及び他方の
うちいずれかの貫通孔どうしの管体による接続部分か
ら、該並列筒体群を構成する各筒体の内部にガスを充填
し、 上記各筒体の内部へのガスの充填後、各筒体の貫通孔ど
うしの管体による接続部分を封止、切断するようにし
た、 ことを特徴とするガス入り放電管の製造方法。1. A both end opening portions of the electrically insulating tubular member and sealed with a pair of electrodes having a discharge electrode part, one of the cylindrical body one
And one of the other ends is formed at one end of the cylindrical body.
And one of the other ends, each of which is
The inside and outside of the tubular body through the two through holes communicating to fill the gas into the cylindrical body, said the tubular body said gas-filled
The method of manufacturing a gas-filled discharge tube of the through holes is sealed respectively to enclose the gas in the cylindrical body, a plurality of the cylindrical body, one tube transmural holes each other of the cylindrical body
By well as connected to each other, the other penetrations holes each other of the tubular body by connecting to each other by a pipe member, and parallel cylindrical body group inside each other of the plurality of tubular bodies communicating in parallel with each other, the parallel cylinder from one and the connecting portion according to any of the penetrations holes each other of the tubular body of the other of the respective cylindrical body constituting the group, the gas filled inside each cylindrical body constituting the said parallel cylindrical body group, each of after filling of the gas into the interior of the tubular body, it seals the connection portion due to penetrations holes each other of the tubular body of the cylindrical body, and to be cut, a manufacturing method of a gas-filled discharge tube, characterized in that.
極部を有する一対の電極で封着し、１つが上記筒体の一
方の端部に形成され、かつ、他の１つが該筒体の一方及
び他方のうちいずれかの端部に形成されて、各々が上記
筒体の内外を連通する２つの貫通孔を介して、上記筒体
内にガスを充填し、該ガスが充填された上記筒体の上記
各貫通孔をそれぞれ封止して上記筒体内にガスを封入す
るガス入り放電管の製造方法において、 複数の上記筒体を、各筒体の片方の貫通孔を他の筒体の
片方の貫通孔と管体により接続することで、これら複数
の上記筒体の内部どうしが互いに連鎖状に連通した連鎖
状筒体群とし、 複数の上記連鎖状筒体群を、各連鎖状筒体群の両端部の
うち一方の端部に各々位置する各筒体の片方の貫通孔ど
うしを管体により互いに接続すると共に、各連鎖状筒体
群の両端部のうち他方の端部に各々位置する各筒体の片
方の貫通孔どうしを管体により互いに接続することで、
各連鎖状筒体群を構成する複数の筒体の内部どうしが上
記複数の連鎖状筒体群の相互間に亘って連通した並列連
鎖状筒体群とし、 上記並列連鎖状筒体群を構成する上記各連鎖状筒体群の
一方の端部及び他方の端部のうちいずれかの端部に各々
位置する各筒体の片方の貫通孔どうしの管体による接続
部分から、該並列連鎖状筒体群を構成する各連鎖状筒体
群の各筒体の内部にガスを充填し、 上記各筒体の内部へのガスの充填後、各筒体の貫通孔ど
うしの管体による接続部分を封止、切断するようにし
た、 ことを特徴とするガス入り放電管の製造方法。Wherein both end opening portions of the electrically insulating tubular member and sealed with a pair of electrodes having a discharge electrode part, one of the cylindrical body one
And one of the other ends is formed at one end of the cylindrical body.
And one of the other ends, each of which is
The inside and outside of the tubular body through the two through holes communicating to fill the gas into the cylindrical body, said the tubular body said gas-filled
The method of manufacturing a gas-filled discharge tube of the through holes is sealed respectively to enclose the gas in the cylindrical body, a plurality of the cylindrical body, the one of the one transmembrane hole the other of the cylindrical body of each cylindrical body by connecting the transmembrane hole and the tubular body, and a chain-like cylindrical body group inside each other it is communicated with the chain with each other of the plurality of the cylindrical body, a plurality of the chain-like cylindrical body group, the chained cylindrical body One through-hole of each cylindrical body located at one end of both ends of the group is connected to each other by a pipe, and each of the through-holes is located at the other end of both ends of each chain-like cylindrical group. Piece of each cylinder
By connecting the two through holes to each other with a pipe ,
The inside of the plurality of cylinders constituting each chain-like cylinder group is a parallel chain-like cylinder group that communicates between the plurality of chain-like cylinder groups, and constitutes the parallel chain-like cylinder group from the one end portion and the connecting portion due to one of the through-holes each other of the tubular body of the cylindrical body respectively located at either end of the other end of the chain-like cylindrical body group to, said parallel concatenated the gas filled in the respective cylindrical body of the chain-like cylindrical body group constituting the cylindrical body unit, after filling of the gas into the interior of each cylindrical body, connected by transmural holes each other of the tubular body of the cylindrical body A method for manufacturing a gas-filled discharge tube, characterized in that a portion is sealed and cut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3156970A JP2907241B2 (en) | 1991-06-27 | 1991-06-27 | Manufacturing method of gas-filled discharge tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3156970A JP2907241B2 (en) | 1991-06-27 | 1991-06-27 | Manufacturing method of gas-filled discharge tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH057032A JPH057032A (en) | 1993-01-14 |
| JP2907241B2 true JP2907241B2 (en) | 1999-06-21 |
Family
ID=15639309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3156970A Expired - Lifetime JP2907241B2 (en) | 1991-06-27 | 1991-06-27 | Manufacturing method of gas-filled discharge tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2907241B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0785840A (en) * | 1993-09-20 | 1995-03-31 | Yazaki Corp | Gas-filled discharge tube |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03141573A (en) * | 1989-10-25 | 1991-06-17 | Nec Corp | Discharge tube |
| JP3024290U (en) * | 1995-10-31 | 1996-05-17 | 喜嗣 平野 | Iron lid for underground structure |
-
1991
- 1991-06-27 JP JP3156970A patent/JP2907241B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057032A (en) | 1993-01-14 |
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| A02 | Decision of refusal |
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