JPH057032A - Manufacture of gas-filled discharge tube - Google Patents

Abstract

PURPOSE:To obtain the manufacturing method of a gass-filled discharge tube wherein a discharge tube in which high pressure inert gas is encapsulated can be massproduced at a very low cost. CONSTITUTION:A plurality of cylinder bodies 2 both end opening parts of which are sealed by electrode plates 3 are arranged in series via linkage tubes 6, a plurality of cylinder body rows 4 constituted of a plurality of the cylinder bodies 2 are arranged in parallel, a cylinder group 5 is arranged on a jig 1, a collection tube 7 for encapsulation to be connected with a vacuum equipment M is arranged at the central part of the cylinder body group 5, collection tubes 8 for encapsulation are arranged on both end portions of the cylinder group 5, and the cylinder body group 5 in a linked state with a collection tube 7 for encasulation is formed. The cylinder body group 5 is vacuumized with the vacuum equipment M connected with the collection tube 7 for encapsulation, and gas is encapsulated. Finally, the connection parts of the cylinder body 5 are sealed and cut, and individual discharge tubes T are formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a gas-filled discharge tube, and more particularly to a method of manufacturing a gas-filled discharge tube suitable for use as a discharge gap switch of a laser device.

[0002]

2. Description of the Related Art Conventionally, a discharge gap switch has been used for starting a laser device, for example, and it has been proposed to configure these discharge gap switches by a discharge tube filled with an inert gas. It is also known that in these discharge gap switches, the pressure of the inert gas sealed in the discharge tube is increased to several atmospheres or more in order to raise the discharge start voltage of the discharge tube to some extent and increase the overvoltage ratio. There is.

In such a discharge tube T, as shown in FIG. 8, a pair of metal electrode plates each having a discharge electrode portion 3a formed at both ends of a cylindrical body 2 made of an electrically insulating material such as ceramics. The electrode plate 3 is sealed by a glass frit, a brazing metal, or the like. This step is preferably performed in an electric furnace filled with an inert gas, and at the same time as the welding operation, the inert gas is filled in the cylindrical body 2.

However, as described above, since it is necessary to fill the discharge tube T with a high-pressure inert gas, it is necessary to create a high-pressure gas atmosphere in the electric furnace. Originally, there is an inconvenience that the welding work cannot be performed with high quality (high quality brazing cannot be performed), and it is also necessary to increase the pressure resistance of the electric furnace, resulting in an increase in the size of the entire apparatus. was there.

Therefore, the present inventors, as shown in FIG. 9, attach the discharge tube T to the electrode plate 3 and the discharge electrode portion 3a of the discharge tube T.
A through hole 11 is provided to communicate the inside and outside of the
A gas discharge pipe 12a, 12b is hermetically fitted to the above, one of the gas seal pipes 12a is sealed, and then a high pressure inert gas is sealed in the pipe through the other gas seal pipe 12b. Proposed tube T (Practical application 1-
84030).

[0006]

However, in the above-mentioned conventional discharge tube T, as shown in FIG. 10, one gas-filled pipe 12a is sealed and then the other gas-filled pipe 12b is joined to the joint portion 10b. , The valve 9 and the joint portion 10a are coupled to each other, the joint portion 10a is connected to the vacuum device M, the vacuum device M is switched to perform evacuation and gas filling, and then the other gas filling pipe 12b is sealed. Since it is necessary to perform the gas filling process for each discharge tube T, it is necessary to perform such a gas filling process for each discharge tube T. It has the disadvantage of extremely poor mass productivity.

Further, in the above-mentioned gas filling process,
Since the joint portion 10b is disposable for each discharge tube T, there is also a disadvantage that the manufacturing cost thereof increases.

The present invention has been made in view of the above points, and it is an object of the present invention to provide a method of manufacturing a gas-filled discharge tube which enables mass production of a discharge tube filled with a high-pressure inert gas at an extremely low cost. It is what

[0009]

In order to achieve the above object, in a method of manufacturing a gas-filled discharge tube according to the present invention, an open end portion of an electrically insulating cylinder is sealed with a pair of electrodes having a discharge electrode portion. In the method for producing a gas-filled discharge tube in which a gas is filled in the cylindrical body, the cylindrical body having both open ends sealed by the electrodes is arranged in series through a connecting tube, and the plural cylindrical bodies are arranged. The sealing tube is connected to the cylinder body at one end of the cylinder, and the gas supply pipe is connected to the cylinder body at the other end. After the gas is filled into each cylinder through the gas supply pipe, the gas supply pipe And that the connecting pipe is sealed and cut.

Further, in place of the above-mentioned structure, a plurality of cylinders whose open ends are sealed by electrodes are arranged in series through a connecting pipe, and a plurality of cylinder rows composed of the plurality of cylinders are arranged in parallel. A collecting pipe in which a sealing pipe is connected to the cylindrical body at one end of each cylindrical body row and has the same number of branch portions as the plurality of cylindrical body rows, and the collecting portion is connected to the gas supply portion. Is connected to the other end of each cylinder row in which the one end is sealed via each branch, and gas is sealed in each cylinder through the collecting pipe and the connecting pipe. After the sealing, each branch portion of the collecting pipe is sealed and cut, and the connecting pipe between the cylinders is sealed and cut.

[0011]

According to the present invention, a large amount of gas-filled discharge tubes filled with a high-pressure inert gas can be manufactured at one time,
In addition, it is possible to improve the disposable state of the joint portion used for each tubular body, which is unavoidable in the conventional manufacturing method.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an arrangement example for carrying out the method of manufacturing a gas-filled discharge tube according to the present invention.
And a pair of metal electrode plates 3 having discharge electrode portions at both ends opened in advance in a separate process on the upper surface of the jig 1, and electrically insulated from ceramics or the like. A plurality of cylindrical bodies 2 made of a material are arranged in series at a predetermined interval, and a plurality of cylindrical body rows 4 composed of the plurality of cylindrical bodies 2 are arranged in parallel. A cylinder group 5 is arranged on the upper part 1. Further, as shown in FIG. 4, each of the cylinders 2 is provided with a through hole 11 for communicating the inside and outside of the cylinder 2 in the electrode plate 3 and the discharge electrode portion 3a thereof. Between the adjacent cylinders 2 of the row 4, a metal connecting pipe 6 having the same inner diameter as the through hole 11 is arranged. Then, the tubular bodies 2 of each of the tubular body rows 4 are brought into communication with each other through the connecting pipe 6.

Further, the cylindrical body 2 and the connecting pipe 6 are arranged on the jig 1 in a separate step from the work of arranging the same, and the same number of branch portions 7a as the arranged cylinder body rows 4 are provided, and a collecting portion thereof. There is provided a set of metal-made encapsulation collecting pipes 7 of which 7b is connected to a vacuum device M described later (FIG. 2).
Assembling is performed by brazing at a temperature different from the above-mentioned brazing temperature of the electrode plate 3 to the tubular body 2 and the brazing temperature of the tubular body 2 and the connecting pipe 6 described later. The branch portion 7a of the enclosing collecting pipe 7 is the connecting pipe 6
The inner diameter is the same as the through hole 11 in the same manner as
The enclosing collecting pipe 7 is arranged on the jig 1 so that the respective branch portions 7a are located at substantially the central portions of the corresponding cylindrical body rows 4, thereby branching through the branch portions 7a. Part 7a
The cylinders 2 located on both sides of the cylinder 2 are in communication with each other. As a result, the enclosing collecting pipe 7 and the respective cylinder rows 4 are in communication with each other, and the enclosing collecting pipe 7 divides the cylinder group 5 arranged on the jig 1 into two parts. Has become.

Further, it is formed in a separate step by brazing at the same temperature as that of the encapsulating collecting pipe 7, and has the same number of branch portions 8a as the cylinder row 4, and the branch portions 8a.
Are brought into communication with each other at the collecting portion 8b, and the branching portion 8a
Is provided with two sets of metal sealing collecting pipes 8 whose one end 8a 'is sealed as described later. Each of the sealing collecting pipes 8 is arranged on the jig 1 and It is arranged so as to be located at both ends of the tubular body group 5. Here, the branching portion 8a of the sealing collecting pipe 8 has an inner diameter equal to that of the through hole 11 similarly to the connecting pipe 6, so that the branching portion 8a does not become the sealing end of the branching portion 8a. Through each cylinder row 4
The cylindrical body 2 located at the end of the and the collecting pipe 8 are in communication with each other.

A state in which the cylindrical body 2, the connecting pipe 6, the enclosing collecting pipe 7 and the sealing collecting pipe 8 are arranged on the jig 1 and a metal brazing material or the like is applied to their connecting portions. so,
The entire jig 1 is carried into, for example, a vacuum electric furnace (not shown), and in this state, the brazing temperature of the electrode plate 3 to the cylindrical body 2, the encapsulation collecting pipe 7, and the sealing assembly. The tubular body 2 and the connecting pipe 6, the tubular body 2 and the enclosing collecting pipe 7, and the tubular body 2 and the sealing collecting pipe 8 are brazed at a temperature different from the assembling brazing temperature of the pipe 8. ing. Further, when the brazing is completed, the unbrazed open end 8a 'of the branching portion 8a of the sealing collecting pipe 8 is sealed by electric welding or the like. As a result, on the jig 1, a chain-shaped cylindrical body group 5 is formed which is in communication with the enclosing collecting pipe 7.

Further, the pipe system of the vacuum device M is connected to the collecting portion 7b of the enclosing collecting pipe 7 via the valve 9 and the joint portions 10a and 10b, whereby the cylinder is formed. The body group 5 and the vacuum device M are in communication with each other, and by switching the vacuum device M, evacuation and gas filling of the cylindrical body group 5 are performed as described later.

Next, the procedure of the manufacturing method according to the present invention will be described. First, the evacuation is performed by the vacuum device M connected to the enclosing collecting pipe 7, and the cylinder group 5 communicating with the enclosing collecting pipe 7 is evacuated. Here, whether or not the tubular body group 5 is in a vacuum state is judged by a pressure gauge or the like provided in the vacuum device M, and if it is in a complete vacuum state, the vacuum device M is switched next to the tubular body group 5 Inert an inert gas.

When the gas filling is completed, the branch portion 7a connecting the filling collecting pipe 7 and the tubular body 2, the branching portion 8a of the sealing collecting pipe 8 and the connecting pipe 6 between the tubular bodies 2 are almost in the middle. The portion is welded and sealed with a predetermined width by an electric welding device (not shown) or the like, and a substantially intermediate portion of the sealed portion with the predetermined width is cut by a cutting blade (not shown) built in the electric welding device to form a chain. The formed cylinder group 5 is used as individual gas-containing discharge tubes T as shown in FIG.

Further, when the evacuation by the vacuum device M is not sufficient as judged from the pressure gauge, it is revealed that some of the various brazing operations of the cylinder group 5 are not complete, etc.
In this case, since the incomplete location cannot be specified, at that time, as shown in FIG. 1, a part of the branch portion 7a of the enclosing collecting pipe 7 arranged in the central portion of the tubular body group 5 is electrically connected to the above-mentioned electric Sealing and cutting by welding or the like (line A in the figure) divides the tubular body group 5 into two, and the one of the two tubular body groups 5a and the enclosing collecting pipe 7 connected to the vacuum device M are connected. It will be in the state where it did.
Then, in this state, vacuuming of the one tubular body group 5a is performed again, and if the tubular body group 5a is in a completely vacuum state, it is revealed that the other tubular body group 5b has a problem. The above-described various operations are performed on the other tubular body group 5a, and the individual gas-filled discharge tubes T are formed.

As for the other cylindrical body group 5b having a problem, the central portion of the collecting portion 8b of the sealing collecting pipe 8 brazed to the end portion of the cylindrical body group 5b is described above. And then cut (line B in the figure) to form a cylinder group 5b.
Is further divided into two. And, each of the two divided cylinder groups 5
Sealing end 8a 'of the branching portion 8a of the collecting pipe 8 for c and 5d
One of the cylinder groups 5c and 5d is connected to the open end by connecting a vacuum device to the open end through a valve (not shown) and a joint.
The vacuum is applied to find out which group of cylinders has the problem. Then, the same work as described above is performed for a group of cylinders having no problem to form individual gas-filled discharge tubes T, and for the group of cylinders having a problem, the above-described work is repeated to find a location Is specified so that the non-defective gas-filled discharge tubes T are mass-produced.

The gas-filled portion 6 (7a, 8a) of the gas-filled discharge tube T (FIG. 3) formed as described above is used for positioning and locking when it is incorporated as a starting discharge gap switch of a laser device, for example. It can be used as a member. Further, in order to enhance the reliability of the sealing of the gas filled portion 6 of the gas-filled discharge tube T, the filled portion 6 may be sealed at two places as shown in FIG.

Therefore, in this embodiment, a plurality of cylindrical bodies 2 whose both open ends are sealed by the electrode plate 3 are arranged in series through the connecting pipe 6, and the cylindrical body composed of the plurality of cylindrical bodies 2 is arranged. A plurality of rows 4 are arranged in parallel and a cylinder group 5 is arranged on the jig 1, and the same number of branch portions 7a as the plurality of cylinder rows 4 are provided at the center of the cylinder group 5. The collecting portion 7b is provided with the collecting pipe 7 for encapsulation connected to the vacuum device M, and further, the same number of the cylindrical body rows 4 are connected to both ends of the cylindrical body group 5 by the collecting portion 8b. A sealing collecting pipe 8 having a portion 8a and one end of the branching portion 8a sealed is arranged, and in this state, the cylindrical body 2, the connecting pipe 6, the enclosing collecting pipe 7 and the sealing collecting pipe are arranged. The tube 8 is brazed to form the cylindrical body group 5 that is in communication with the encapsulation collecting pipe 7, and then the vacuum device M connected to the encapsulation collecting pipe 7 is used to perform a true operation. Performs gas sealing performs pull, finally, the connecting tube 6, the branch portion 7 of the encapsulating collecting pipe 7
Since a and the branch portion 8a of the sealing collecting tube 8 are sealed and cut to form the gas-filled discharge tube T, the gas-filled discharge tube T in which a high-pressure inert gas is sealed is formed at one time. It can be manufactured in large quantities and its productivity can be significantly improved.

Further, instead of connecting a vacuum device to each cylinder 2 via a valve and a joint as in the conventional case, a cylinder group 5 is used.
To the vacuum device M via the valve 9 and the joints 10a and 10b.
Therefore, the disposable state of the joint portion 10b used for each tubular body 2, which is inevitable in the conventional manufacturing method, can be improved, and the overall manufacturing cost can be significantly reduced.

Further, when the tube group 5 in communication with the enclosing collecting tube 7 cannot be evacuated, the enclosing collecting tube 7 is sealed and cut to separate the tube group 5 into two. By dividing the tubular body groups 5a and 5b and connecting a vacuum device to each of the divided tubular body groups to perform evacuation, a tubular body group that is not in a vacuum state can be identified. By repeating this operation, manufacturing It is possible to mass-produce only non-defective gas-filled discharge tubes T while inspecting whether or not there is a defective product in the tube group to be manufactured.

6 and 7 show another arrangement example for carrying out the manufacturing method according to the present invention. A plurality of cylindrical bodies 2 arranged in series on the jig 1 via a connecting pipe 6. Is arranged so that its longitudinal direction is substantially parallel to the collecting portion (not shown) of the collecting pipe for encapsulation as shown in FIG. 6, and two connecting pipes 6 are provided on one electrode plate 3 of the cylindrical body 2. The arrangement is similar to the above arrangement example. Even with this,
Similar to the arrangement example described above, it is possible to manufacture a large number of non-defective gas-filled discharge tubes T filled with a high-pressure inert gas, and to reduce the manufacturing cost.

The present invention is not limited to the above-described embodiment, but can be modified in various ways. For example, as described above, the enclosing collecting pipe 7 and the cylindrical body group 5 are arranged.
It may be arranged at one end of the tubular body group 5 and not at the center thereof, and the sealing collecting pipe 8 may be arranged at the other end. Further, without disposing the tubular body 2 to which the electrode plate 3 is sealed in advance on the jig 1, the tubular body 2, the electrode plate 3, the connecting pipe 6, and the enclosing collecting pipe 7 are provided.
Alternatively, the collecting pipe 8 for sealing may be arranged on the jig 1, and these may be brazed at once.

[0027]

As described above, in the method of manufacturing a gas-filled discharge tube according to the present invention, a plurality of cylinders whose open ends are sealed by electrodes are arranged in series via a connecting tube. A sealing pipe is connected to the cylinder at one end of the cylinder, and a gas supply pipe is connected to the cylinder at the other end, and after the gas is filled into each cylinder through the gas supply pipe, the gas The supply pipe and the connecting pipe are sealed and cut, and a plurality of cylinders whose both ends are sealed with electrodes are arranged in series through the connecting pipe, and a cylinder row composed of the plurality of cylinders is arranged in parallel. A plurality of cylinders are connected to each other, a sealing pipe is connected to the cylinder at one end of each cylinder row, and the same number of branch portions as the plurality of cylinder rows are provided, and the collecting portion is connected to the gas supply portion. The collecting pipe is connected to the other end of each cylindrical body row in which the one end is sealed via the branching parts, and the collecting pipe and the connecting pipe are connected to each other. The gas sealed in the tubular body, after the gas filled, each branch portion of the collecting pipe sealing, as well as cutting,
Since the connecting tube between the cylinders is sealed and cut, a large volume of gas-filled discharge tubes filled with a high-pressure inert gas can be manufactured at one time, which significantly improves the productivity. It is also possible to connect the gas supply section through the valve and the joint section for each cylinder as in the conventional case.
Since the gas supply unit is connected to multiple cylinders via valves and joints, it is possible to improve the disposable state of the joints used for each cylinder, which was inevitable with the conventional manufacturing method. Further, it is possible to significantly reduce the overall manufacturing cost.

[Brief description of drawings]

FIG. 1 is a schematic view showing an arrangement example for carrying out a manufacturing method according to the present invention.

FIG. 2 is a perspective view of an enclosing collecting pipe used in the arrangement example of FIG.

FIG. 3 is a perspective view of a discharge tube formed by the present manufacturing method.

FIG. 4 is a cross-sectional view of a discharge tube formed by the present manufacturing method.

FIG. 5 is a perspective view of a discharge tube having a higher sealing property.

FIG. 6 is a schematic view showing another arrangement example for carrying out the manufacturing method according to the present invention.

7 is a perspective view of a discharge tube formed by the arrangement example of FIG.

FIG. 8 is a cross-sectional view showing a conventional discharge tube.

FIG. 9 is a cross-sectional view showing a conventional discharge tube with a gas filled pipe.

FIG. 10 is a schematic view showing a conventional gas charging method.

[Explanation of symbols]

1 jig 2 cylinders 3 electrode plate 4 cylinder row 5 cylinder group 6 connecting pipe 7 Enclosing collecting pipe 8 Collecting pipe for sealing M vacuum device T discharge tube

Claims (2)

[Claims] 1. A method of manufacturing a gas-filled discharge tube in which an open end portion of an electrically insulating tubular body is sealed with a pair of electrodes having a discharge electrode portion, and a gas is enclosed in the tubular body. A plurality of cylinders whose parts are sealed are arranged in series via a connecting pipe, a sealing pipe is connected to the cylinder at one end of the plurality of cylinders, and a gas supply pipe is connected to the cylinder at the other end. Is connected, and after filling the inside of each of the cylinders with the gas through the gas supply pipe, the gas supply pipe and the connecting pipe are sealed and cut. 2. A method of manufacturing a gas-filled discharge tube in which both ends of an electrically insulating tubular body are sealed with a pair of electrodes having a discharge electrode portion, and a gas is sealed in the tubular body. A plurality of cylinders whose parts are sealed are arranged in series via a connecting pipe, and a plurality of cylinder rows composed of the plurality of cylinders are arranged in parallel, and a cylinder at one end of each cylinder row is arranged. A sealing pipe is connected, and a collecting pipe having the same number of branch portions as the plurality of cylindrical body rows, the collecting portion of which is connected to the gas supply portion, the one end portion is sealed through each of the branch portions. Connected to the other end of each cylinder row, and gas is sealed in each cylinder through the collecting pipe and the connecting pipe, and after the gas is sealed, each branch portion of the collecting pipe is sealed and cut. In addition, the method for producing a gas-filled discharge tube is characterized in that the connecting tube between the cylinders is sealed and cut.