JP2861832B2 - Surface coated tungsten carbide based cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer - Google Patents

Surface coated tungsten carbide based cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer

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Publication number
JP2861832B2
JP2861832B2 JP28145994A JP28145994A JP2861832B2 JP 2861832 B2 JP2861832 B2 JP 2861832B2 JP 28145994 A JP28145994 A JP 28145994A JP 28145994 A JP28145994 A JP 28145994A JP 2861832 B2 JP2861832 B2 JP 2861832B2
Authority
JP
Japan
Prior art keywords
layer
cemented carbide
based cemented
hard coating
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28145994A
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Japanese (ja)
Other versions
JPH08118105A (en
Inventor
恵滋 中村
和裕 秋山
育郎 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP28145994A priority Critical patent/JP2861832B2/en
Priority to US08/541,088 priority patent/US5652045A/en
Priority to EP95116113A priority patent/EP0709484B2/en
Priority to DE69509035T priority patent/DE69509035T3/en
Priority to KR1019950036041A priority patent/KR100187369B1/en
Publication of JPH08118105A publication Critical patent/JPH08118105A/en
Application granted granted Critical
Publication of JP2861832B2 publication Critical patent/JP2861832B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、硬質被覆層がすぐれ
た層間密着性を有し、したがって切削抵抗の大きい、例
えば軟鋼などの切削に用いた場合に長期に亘ってすぐれ
た切削性能を発揮する表面被覆炭化タングステン基超硬
合金製切削工具(以下、被覆超硬切削工具という)に関
するものである。
BACKGROUND OF THE INVENTION The present invention relates to a hard coating layer having excellent interlayer adhesion and, therefore, exhibits excellent cutting performance over a long period of time when used for cutting, for example, mild steel having a large cutting resistance. The present invention relates to a surface-coated tungsten carbide based cemented carbide cutting tool (hereinafter referred to as a coated cemented carbide cutting tool).

【0002】[0002]

【従来の技術】従来、例えば特公昭57−1585号公
報や特公昭59−52703号公報に記載されるよう
に、全体的に均質な炭化タングステン基超硬合金基体
や、結合相形成成分としての例えばCoなどの含有量が
基体内部に比して相対的に高い表面部、すなわち表面部
に結合相富化帯域を有する炭化タングステン基超硬合金
基体(以下、これらを総称して超硬合金基体という)の
表面に、化学蒸着法や物理蒸着法を用いて、窒化チタン
(以下、TiNで示す)の第1層、炭窒化チタン(以
下、TiCNで示す)の第2層、炭酸化チタン(以下、
TiCOで示す)または炭窒酸化チタン(以下、TiC
NOで示す)の第3層、および酸化アルミニウム(以
下、Al2 3 で示す)の第4層、さらに必要に応じて
TiNの第5層からなる硬質被覆層を3〜30μmの平
均層厚で形成してなる被覆超硬切削工具が、主に合金鋼
や鋳鉄の施削やフライス切削などに用いられていること
は、良く知られているところである。
2. Description of the Related Art Conventionally, as described in, for example, JP-B-57-1585 and JP-B-59-52703, a tungsten carbide-based cemented carbide substrate as a whole, For example, a tungsten carbide-based cemented carbide substrate having a surface portion having a relatively high content of Co or the like as compared with the inside of the substrate, that is, a tungsten carbide-based cemented carbide substrate having a binder phase enriched zone on the surface portion (hereinafter, collectively referred to as a cemented carbide substrate) ), A first layer of titanium nitride (hereinafter, referred to as TiN), a second layer of titanium carbonitride (hereinafter, referred to as TiCN), and titanium carbonate ( Less than,
TiCO) or titanium carbonitride (hereinafter TiC)
NO), a fourth layer of aluminum oxide (hereinafter referred to as Al 2 O 3 ), and, if necessary, a hard coating layer of a fifth layer of TiN with an average layer thickness of 3 to 30 μm. It is well known that the coated carbide cutting tool formed by the above is mainly used for cutting or milling of alloy steel or cast iron.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削機械
のFA化はめざましく、かつ切削加工の省力化の要求と
相まって、切削工具には汎用性が求められる傾向にある
が、上記の従来被覆超硬切削工具においては、これを合
金鋼や鋳鉄などの切削に用いた場合には問題はないが、
特に切削抵抗の高い軟鋼などの切削に用いた場合、硬質
被覆層の層間密着性が十分でないために、硬質被覆層に
層間剥離やチッピングが発生し易く、これが原因で比較
的短時間で使用寿命に至るのが現状である。
On the other hand, in recent years, the use of FA in cutting machines has been remarkable, and in conjunction with the demand for labor saving in cutting work, cutting tools tend to be required to be versatile. For carbide cutting tools, there is no problem if this is used for cutting alloy steel or cast iron, etc.
Particularly when used for cutting mild steel with high cutting resistance, the interlayer adhesion of the hard coating layer is not sufficient, so that the hard coating layer is liable to delamination and chipping, which causes a relatively short service life. At present.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、上記の従来被覆超硬切削工具に
着目し、これを構成する硬質被覆層の層間密着性の向上
をはかるべく研究を行なった結果、 (a) 上記の従来被覆超硬切削工具を構成する硬質被
覆層において、超硬合金基体に対する第1層のTiN層
の密着性はきわめて高いが、構成層間の密着性はいずれ
も低いものであり、これが原因で層間剥離やチッピング
が発生し易くなること。 (b) 上記の従来被覆超硬切削工具を構成する硬質被
覆層において、第1層のTiN層、第2層のTiCN
層、第3層のTiCO層およびTiCNO層、さらに必
要に応じて形成される第5層のTiN層はいずれも粒状
結晶組織をもち、第4層のAl2 3 層はアルファ型結
晶組織をもつが、前記第2層のTiCN層を縦長成長結
晶組織とすると共に、前記第4層のAl2 3 層をカッ
パー型結晶を主体とする組織、望ましくは、カッパー型
結晶が50容量%以上を占め、残りがアルファ型結晶か
ら混合組織、さらに望ましくは実質的にカッパー型結晶
からなる組織とすると、前記第2層に対する第1層のT
iN層、第3層のTiCO層、およびTiCNO層、並
びに前記第4層に対する第3層のTiCO層、TiCN
O層、および第5層のTiN層の密着性が著しく向上す
ること。 (c) 第2層のTiCN層形成後に、10〜100to
rrの水素雰囲気中、温度:850〜1100℃に1〜5
時間保持の条件で加熱処理を施すと、超硬合金基体を構
成する成分のうち少なくともWとCo成分が毛細管現象
により第1,2層の粒界に拡散移動し、第1,2層のい
ずれの粒界にも少なくともWとCoが含有するようにな
り、この結果結晶粒間密着性の向上と相まって層間密着
性が一段と向上するようになること。 以上(a)〜(c)に示される研究結果を得たのであ
る。
Means for Solving the Problems Accordingly, the present inventors have
From the above-mentioned viewpoint, the above-mentioned conventional coated carbide cutting tool was focused on, and a study was conducted to improve the interlayer adhesion of the hard coating layer constituting the cutting tool. In the hard coating layer constituting the cutting tool, the adhesion of the first TiN layer to the cemented carbide substrate is extremely high, but the adhesion between the constituent layers is low, so that delamination or chipping occurs. It is easy to occur. (B) In the hard coating layer constituting the conventional coated carbide cutting tool, the first TiN layer and the second TiCN layer
The layer, the third layer TiCO layer and the TiCNO layer, and the fifth layer TiN layer formed as required, all have a granular crystal structure, and the fourth layer Al 2 O 3 layer has an alpha type crystal structure. In addition, the TiCN layer of the second layer has a vertically elongated crystal structure, and the Al 2 O 3 layer of the fourth layer has a structure mainly composed of copper-type crystals, preferably, the copper-type crystal is 50% by volume or more. And the remainder is a mixed structure composed of an alpha-type crystal, and more desirably, a structure substantially composed of a kappa-type crystal.
an iN layer, a third TiCO layer, and a TiCNO layer; and a third TiCO layer, TiCN for the fourth layer.
The adhesion between the O layer and the fifth TiN layer is significantly improved. (C) After forming the second TiCN layer, 10 to 100 to
rr in a hydrogen atmosphere, temperature: 1 to 5 at 850 to 1100 ° C
When the heat treatment is performed under the condition of holding time, at least W and Co components among the components constituting the cemented carbide substrate are diffused and moved to the grain boundaries of the first and second layers by a capillary phenomenon. At least W and Co are contained in the grain boundaries of, and as a result, the interlayer adhesion is further improved in combination with the improvement of the intercrystalline adhesion. The research results shown in (a) to (c) above were obtained.

【0005】この発明は、上記の研究結果にもとづいて
なされたものであって、超硬合金基体の表面に、第1層
のTiN層、第2層のTiCN層、第3層のTiCO層
またはTiCNO層、および第4層のAl2 3 層、さ
らに必要に応じて第5層のTiN層からなる硬質被覆層
を3〜30μmの平均層厚で形成してなる被覆超硬切削
工具において、(a) 上記第1層、上記第3層、およ
び上記第5層を粒状結晶組織、上記第2層を縦長成長結
晶組織、上記第4層をカッパー型結晶を主体とした組織
とすると共に、(b) 上記第1層および第2層の結晶
粒界に、上記超硬合金基体を構成する成分のうちの少な
くともWとCoを含有させること、以上(a)および
(b)により上記硬質被覆層にすぐれた層間密着性を具
備せしめた被覆超硬切削工具に特徴を有するものであ
る。
The present invention has been made on the basis of the above research results, and includes a first TiN layer, a second TiCN layer, a third TiCO layer or a third TiN layer on a surface of a cemented carbide substrate. A coated cemented carbide cutting tool comprising a TiCNO layer, a fourth Al 2 O 3 layer, and, if necessary, a hard coating layer comprising a fifth TiN layer with an average layer thickness of 3 to 30 μm, (A) The first layer, the third layer, and the fifth layer have a granular crystal structure, the second layer has a vertically-grown crystal structure, and the fourth layer has a structure mainly composed of copper-type crystals. (B) The grain boundaries of the first layer and the second layer contain at least W and Co of the components constituting the cemented carbide substrate, and the hard coating is performed by the above (a) and (b). Coated carbide cutting with excellent interlayer adhesion Again and again it has the characteristics.

【0006】なお、この発明の被覆超硬切削工具を構成
する硬質被覆層のうちの第2層の縦長結晶組織を有する
TiCN層は、例えば特開平6−8010号公報に記載
される通り、 (ア) 反応ガス組成、容量%で、TiCl4 :1〜4
%、 CH3 CN:0.1〜5%、N2 :0〜35
%、 H2 :残り、 (イ) 反応温度:850〜950℃、 (ウ) 雰囲気圧力:30〜200torr、の条件で形成
するのが望ましい。一方、粒状結晶組織を有するTiC
N層は、通常、 (ア) 反応ガス組成、容量%で、TiCl4 :1〜5
%、 CH4 :2〜7%、N2 :15〜30%、
2 :残り、 (イ) 反応温度:950〜1050℃、 (ウ) 雰囲気圧力:30〜200torr、の条件で形成
される。また、カッパー型結晶を主体とする組織を有す
るAl2 3 層は、 (ア) 反応ガス組成、容量%で、初期段階の1〜12
0分を、AlCl3 :1〜20%、 H2 :残り、ま
たは、AlCl3 :1〜20%、HCl:1〜20%お
よび/またはH2 S:0.05〜5%、H2 :残り、と
し、以後、AlCl3 :1〜20%、 CO2 :0.
5〜30%、H2 :残り、または、AlCl3 :1〜2
0%、 CO2 :0.5〜30%、HCl:1〜20
%および/またはH2 S:0.05〜5%、H2 :残
り、 (イ) 反応温度:850〜1000℃、 (ウ) 雰囲気圧力:30〜200torr、の条件で形成
される。
[0006] The TiCN layer having a vertically elongated crystal structure of the second layer of the hard coating layer constituting the coated carbide cutting tool of the present invention is, for example, as described in JP-A-6-8010. A) TiCl 4 : 1 to 4 in terms of reaction gas composition and volume%
%, CH 3 CN: 0.1~5% , N 2: 0~35
%, H 2 : remaining, (a) Reaction temperature: 850 to 950 ° C., (c) Atmospheric pressure: preferably 30 to 200 torr. On the other hand, TiC having a granular crystal structure
The N layer is usually composed of (a) a reaction gas composition, volume%, TiCl 4 : 1 to 5
%, CH 4: 2~7%, N 2: 15~30%,
H 2 : remaining, (a) reaction temperature: 950 to 1050 ° C., (c) ambient pressure: 30 to 200 torr. Further, the Al 2 O 3 layer having a structure mainly composed of a copper-type crystal has the following characteristics.
0 minutes, AlCl 3 : 1 to 20%, H 2 : remaining, or AlCl 3 : 1 to 20%, HCl: 1 to 20% and / or H 2 S: 0.05 to 5%, H 2 : After that, it is assumed that AlCl 3 : 1 to 20%, CO 2 : 0.
5~30%, H 2: remainder, or,, AlCl 3: 1~2
0%, CO 2: 0.5~30% , HCl: 1~20
% And / or H 2 S: 0.05 to 5%, H 2 : remaining, (a) reaction temperature: 850 to 1000 ° C., (c) atmosphere pressure: 30 to 200 torr.

【0007】また、この発明の被覆超硬切削工具を構成
する硬質被覆層は、化学蒸着法および/または物理蒸着
法にて、上記の条件および通常の条件で、超硬合金基体
の表面に、まず第1層のTiN層を蒸着し、ついで第2
層のTiCN層から第4層のAl2 3 層まで、さらに
必要に応じて第5層のTiN層を順次蒸着することによ
って形成されるが、前記第2層以降の形成に際して、前
記第1層のTiN層中に前記超硬合金基体中のC成分が
拡散固溶する場合があるが、この場合は前記第1層の一
部あるいは全体がTiCNとなる。
[0007] The hard coating layer constituting the coated cemented carbide cutting tool of the present invention is formed on the surface of the cemented carbide substrate by the chemical vapor deposition method and / or the physical vapor deposition method under the above-mentioned conditions and ordinary conditions. First, a first TiN layer is deposited, and then a second TiN layer is deposited.
From the TiCN layer of the layer to the Al 2 O 3 layer of the fourth layer, the fifth layer of TiN is further formed as necessary, if necessary. In some cases, the C component in the cemented carbide substrate diffuses and forms a solid solution in the TiN layer. In this case, part or all of the first layer is TiCN.

【0008】さらに、上記硬質被覆層の平均層厚を3〜
30μmと定めたのは、その平均層厚が3μm未満では
所望のすぐれた耐摩耗性を確保することができず、一方
その平均層厚が30μmを越えると耐欠損性が急激に低
下するようになるという理由によるものであり、また第
1層のTiN層の平均層厚は0.1〜5μm、第2層の
TiCN層のそれは3〜20μm、第3層のTiCO層
またはTiCNO層は0.01〜2μm、第4層のAl
2 3 層は0.1〜15μm、さらに第5層のTiN層
は0.1〜5μmの平均層厚とするのが望ましい。
Further, the average thickness of the hard coating layer is 3 to
The reason why the thickness is set to 30 μm is that if the average layer thickness is less than 3 μm, it is not possible to secure desired excellent wear resistance, while if the average layer thickness exceeds 30 μm, the chipping resistance sharply decreases. The average thickness of the first TiN layer is 0.1 to 5 μm, that of the second TiCN layer is 3 to 20 μm, and that of the third TiCO layer or TiCNO layer is 0.1 μm. 01 to 2 μm, Al of the fourth layer
The average thickness of the 2 O 3 layer is preferably 0.1 to 15 μm, and the average thickness of the fifth TiN layer is 0.1 to 5 μm.

【0009】[0009]

【実施例】つぎに、この発明の被覆超硬切削工具を実施
例により具体的に説明する。原料粉末として、平均粒
径:3μmを有する中粒WC粉末、同5μmの粗粒WC
粉末、同1.5μmの(Ti,W)C(重量比で、以下
同じ、TiC/WC=30/70)粉末、同1.2μm
の(Ti,W)CN(TiC/TiN/WC=24/2
0/56)粉末、および同1.2μmのCo粉末を用意
し、これら原料粉末を表1に示される配合組成に配合
し、ボールミルで72時間湿式混合し、乾燥した後、I
SO・CNMG120408(超硬合金基体A〜D用)
および同SEEN42AFTN1(超硬合金基体E用)
に定める形状の圧粉体にプレス成形し、この圧粉体を同
じく表1に示される条件で真空焼結することにより超硬
合金基体A〜Eをそれぞれ製造した。さらに、上記超硬
合金基体Bに対して、100torrのCH4 ガス雰囲気
中、温度:1400℃に1時間保持後、徐冷の浸炭処理
を施し、処理後、基体表面に付着するカーボンとCoを
酸およびバレル研磨で除去することにより、表面から1
0μmの位置で最大Co含有量:15重量%、深さ:4
0μmのCo富化帯域を基体表面部に形成した。また、
上記超硬合金基体AおよびDには、焼結したままで、表
面部に表面から15μmの位置で最大Co含有量:9重
量%、深さ:20μmのCo富化帯域が形成されてお
り、残りの超硬合金基体CおよびEには、前記Co富化
帯域の形成がなく、全体的に均質な組織をもつものであ
った。さらに、表1には上記超硬合金基体A〜Eの内部
硬さ(ロックウェル硬さAスケール)をそれぞれ示し
た。
Next, the coated carbide cutting tool of the present invention will be described in detail with reference to examples. As raw material powder, medium-grain WC powder having an average particle diameter of 3 μm, coarse WC powder having an average particle diameter of 5 μm
Powder, 1.5 μm (Ti, W) C (weight ratio, same hereafter, TiC / WC = 30/70) powder, 1.2 μm
(Ti, W) CN (TiC / TiN / WC = 24/2)
0/56) A powder and a Co powder of 1.2 μm were prepared, and these raw material powders were blended in the composition shown in Table 1, wet-mixed in a ball mill for 72 hours, dried, and dried.
SO ・ CNMG120408 (for cemented carbide substrates A to D)
And SEEN42AFTN1 (for cemented carbide substrate E)
Each of the compacts was press-molded into a green compact having the shape specified in Table 1, and the green compact was vacuum-sintered under the conditions shown in Table 1 to produce cemented carbide substrates A to E, respectively. Further, the cemented carbide substrate B was maintained at a temperature of 1400 ° C. for 1 hour in a CH 4 gas atmosphere at 100 torr, and then subjected to a slow cooling carburizing treatment. By removing with acid and barrel polishing, 1
Maximum Co content at 0 μm: 15% by weight, depth: 4
A 0 μm Co-enriched zone was formed on the substrate surface. Also,
In the cemented carbide substrates A and D, a Co-enriched zone having a maximum Co content of 9% by weight and a depth of 20 μm was formed on the surface portion at a position of 15 μm from the surface while being sintered, The remaining cemented carbide substrates C and E had no formation of the Co-enriched zone and had an overall homogeneous structure. Further, Table 1 shows the internal hardness (Rockwell hardness A scale) of each of the cemented carbide substrates A to E.

【0010】ついで、これらの超硬合金基体A〜Eの表
面に、ホーニングを施した状態で、通常の化学蒸着装置
を用い、表2に示される条件で、表3〜6に示される組
成および結晶組織、並びに平均層厚の硬質被覆層を形成
し、この間第2層形成後に35torrの水素雰囲気中、温
度:1050℃に1〜5時間の範囲内の所定時間保持の
条件で加熱処理を施すことにより本発明被覆超硬切削工
具1〜7を製造すると共に、前記加熱処理を行なわずに
従来被覆超硬切削工具1〜7をそれぞれ製造した。この
結果得られた各種の被覆超硬切削工具を構成する硬質被
覆層の第1,2層について、それぞれの層を透過電子顕
微鏡(TEM)で観察して各層毎適宜5ヶ所の粒界を特
定し、この特定粒界のWおよびCo含有量をエネルギー
分散型X線測定装置で定量分析した。これらの結果を表
3〜6に平均値で示した。
Next, the surfaces of these cemented carbide substrates A to E are honed, and the compositions and the compositions shown in Tables 3 to 6 are obtained by using an ordinary chemical vapor deposition apparatus under the conditions shown in Table 2. A hard coating layer having a crystal structure and an average thickness is formed. During the formation of the second layer, a heat treatment is performed in a hydrogen atmosphere of 35 torr at a temperature of 1050 ° C. for a predetermined time within a range of 1 to 5 hours after forming the second layer. Thus, the coated carbide cutting tools 1 to 7 of the present invention were manufactured, and the conventional coated carbide cutting tools 1 to 7 were respectively manufactured without performing the heat treatment. The resulting first and second hard coating layers constituting the various coated carbide cutting tools were observed with a transmission electron microscope (TEM) to identify five grain boundaries as appropriate for each layer. Then, the W and Co contents of this specific grain boundary were quantitatively analyzed by an energy dispersive X-ray measuring apparatus. These results are shown in Tables 3 to 6 as average values.

【0011】また、上記本発明被覆超硬切削工具1〜5
および従来被覆超硬切削工具1〜5について、 被削材:軟鋼の丸棒、 切削速度:335m/min.、 送り:0.26mm/rev.、 切込み:2mm、 切削時間:20分、 の条件での軟鋼の連続切削試験、および、 被削材:軟鋼の角材、 切削速度:305m/min.、 送り:0.26mm/rev.、 切込み:1.5mm、 切削時間:25分、 の条件での軟鋼の断続切削試験を行ない、いずれの切削
試験でも切刃の逃げ面摩耗幅を測定した。これらの測定
結果を表4,6に示した。さらに、上記本発明被覆超硬
切削工具6,7および従来被覆超硬切削工具6,7につ
いて、 被削材:軟鋼の角材、 切削速度:305m/min.、 送り:0.36mm/刃、 切込み:2.5mm、 切削時間:30分、 の条件で軟鋼のフライス切削を行ない、切刃の逃げ面摩
耗幅を測定した。この測定結果も表4,6に示した。
Further, the coated carbide cutting tools of the present invention 1 to 5
For the conventional coated carbide cutting tools 1 to 5, work material: mild steel round bar, cutting speed: 335 m / min., Feed: 0.26 mm / rev., Depth of cut: 2 mm, cutting time: 20 minutes. And continuous cutting test of mild steel, and work material: square bar of mild steel, cutting speed: 305 m / min., Feed: 0.26 mm / rev., Depth of cut: 1.5 mm, cutting time: 25 minutes. In each cutting test, the flank wear width of the cutting edge was measured. Tables 4 and 6 show the measurement results. Further, regarding the coated carbide cutting tools 6 and 7 of the present invention and the conventional coated carbide cutting tools 6 and 7, a work material: a square bar of mild steel, a cutting speed: 305 m / min., A feed: 0.36 mm / tooth, and a cutting depth : 2.5 mm, Cutting time: 30 minutes, Mild steel was milled, and the flank wear width of the cutting edge was measured. The measurement results are also shown in Tables 4 and 6.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【表2】 [Table 2]

【0014】[0014]

【表3】 [Table 3]

【0015】[0015]

【表4】 [Table 4]

【0016】[0016]

【表5】 [Table 5]

【0017】[0017]

【表6】 [Table 6]

【0018】[0018]

【発明の効果】表3〜6に示される結果から、本発明被
覆超硬切削工具1〜7は、いずれも切削抵抗の高い軟鋼
の切削にもかかわらず、硬質被覆層に層間剥離やチッピ
ングの発生なく、すぐれた耐摩耗性を示すのに対して、
従来被覆超硬切削工具1〜7は、硬質被覆層における層
間密着性が不十分なために、軟鋼の切削では層間剥離や
チッピングが発生し、比較的短時間で使用寿命に至るこ
とが明らかである。上述のように、この発明の被覆超硬
切削工具は、これを構成する硬質被覆層がすぐれた層間
密着性を有するので、合金鋼や鋳鉄などの切削は勿論の
こと、切削抵抗の高い軟鋼などの切削に用いた場合にも
長期に亘ってすぐれた切削性能を発揮するのである。
According to the results shown in Tables 3 to 6, the coated carbide cutting tools 1 to 7 according to the present invention show that delamination or chipping of the hard coating layer occurs in the hard coating layer despite the cutting of mild steel having high cutting resistance. While showing no abrasion and excellent wear resistance,
Conventionally, the coated carbide cutting tools 1 to 7 clearly show that the interlayer adhesion in the hard coating layer is insufficient, and delamination and chipping occur in the cutting of mild steel, resulting in a relatively short service life. is there. As described above, the coated cemented carbide cutting tool according to the present invention has a hard coating layer having excellent interlayer adhesion, so that it can cut not only alloy steel and cast iron, but also mild steel having a high cutting resistance. Even when used for cutting, excellent cutting performance is exhibited over a long period of time.

フロントページの続き (51)Int.Cl.6 識別記号 FI C23C 28/04 C23C 28/04 (56)参考文献 特開 平6−57429(JP,A) 特開 平8−71814(JP,A) 特開 平6−17229(JP,A) 特開 平5−123904(JP,A) 特許2800571(JP,B2) 特公 平7−32962(JP,B2) 特公 平7−100858(JP,B2) (58)調査した分野(Int.Cl.6,DB名) B23B 27/14 B23P 15/28 C23C 14/06 C23C 16/30 C23C 28/04Continuation of the front page (51) Int.Cl. 6 Identification symbol FI C23C 28/04 C23C 28/04 (56) References JP-A-6-57429 (JP, A) JP-A-8-71814 (JP, A) JP-A-6-17229 (JP, A) JP-A-5-123904 (JP, A) Patent 2800571 (JP, B2) JP-B 7-32962 (JP, B2) JP-B 7-100858 (JP, B2) (58) Fields surveyed (Int. Cl. 6 , DB name) B23B 27/14 B23P 15/28 C23C 14/06 C23C 16/30 C23C 28/04

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 全体的に均質な炭化タングステン基超硬
合金基体、または表面部に結合相富化帯域を有する炭化
タングステン基超硬合金基体の表面に、窒化チタンの第
1層、炭窒化チタンの第2層、炭酸化チタンまたは炭窒
酸化チタンの第3層、および酸化アルミニウムの第4層
からなる硬質被覆層を3〜30μmの平均層厚で形成し
てなる表面被覆炭化タングステン基超硬合金製切削工具
において、 (a) 上記第1層および第3層を粒状結晶組織、上記
第2層を縦長成長結晶組織、上記第4層をカッパー型結
晶を主体とした組織とすると共に、 (b) 上記第1層および第2層の結晶粒界に、上記基
体を構成する成分のうちの少なくともWとCoが拡散含
有すること、を特徴とする硬質被覆層がすぐれた層間密
着性を有する表面被覆炭化タングステン基超硬合金製切
削工具。
1. A first layer of titanium nitride, titanium carbonitride on a surface of a generally homogeneous tungsten carbide based cemented carbide substrate or a tungsten carbide based cemented carbide substrate having a binder phase enriched zone on its surface. Surface-coated tungsten carbide-based cemented carbide formed by forming a hard coating layer consisting of a second layer of titanium, a third layer of titanium carbonate or titanium carbonitride, and a fourth layer of aluminum oxide with an average layer thickness of 3 to 30 μm. (A) The first and third layers have a granular crystal structure, the second layer has a vertically-grown crystal structure, and the fourth layer has a structure mainly composed of copper-type crystals. b) The hard coating layer, characterized in that at least W and Co of the components constituting the base are diffused and contained in the crystal grain boundaries of the first and second layers, have excellent interlayer adhesion. Surface coated tan carbide Gusten-based cemented carbide cutting tool.
【請求項2】 全体的に均質な炭化タングステン基超硬
合金基体、または表面部に結合相富化帯域を有する炭化
タングステン基超硬合金基体の表面に、窒化チタンの第
1層、炭窒化チタンの第2層、炭酸化チタンまたは炭窒
酸化チタンの第3層、および酸化アルミニウムの第4
層、さらに窒化チタンの第5層からなる硬質被覆層を3
〜30μmの平均層厚で形成してなる表面被覆炭化タン
グステン基超硬合金製切削工具において、 (a) 上記第1層、上記第3層、および第5層を粒状
結晶組織、上記第2層を縦長成長結晶組織、上記第4層
をカッパー型結晶を主体とした組織とすると共に、 (b) 上記第1層および第2層の結晶粒界に、上記基
体を構成する成分のうちの少なくともWとCoが拡散含
有すること。を特徴とする硬質被覆層がすぐれた層間密
着性を有する表面被覆炭化タングステン基超硬合金製切
削工具。
2. A first layer of titanium nitride, titanium carbonitride on a surface of a tungsten carbide based cemented carbide substrate which is entirely homogeneous, or a tungsten carbide based cemented carbide substrate having a binder phase enriched zone on its surface. A third layer of titanium carbonate or titanium oxycarbonitride, and a fourth layer of aluminum oxide.
Layer and a fifth hard layer of titanium nitride.
In a cutting tool made of a surface-coated tungsten carbide-based cemented carbide formed with an average layer thickness of 3030 μm, (a) the first layer, the third layer, and the fifth layer are a granular crystal structure, and the second layer is Is a vertically-grown crystal structure, and the fourth layer is a structure mainly composed of a copper-type crystal. (B) At least one of the components constituting the base is provided at the crystal grain boundaries of the first layer and the second layer. W and Co are diffused and contained. A cutting tool made of a surface-coated tungsten carbide-based cemented carbide having a hard coating layer having excellent interlayer adhesion.
JP28145994A 1994-10-20 1994-10-20 Surface coated tungsten carbide based cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer Expired - Lifetime JP2861832B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP28145994A JP2861832B2 (en) 1994-10-20 1994-10-20 Surface coated tungsten carbide based cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer
US08/541,088 US5652045A (en) 1994-10-20 1995-10-11 Coated tungsten carbide-based cemented carbide blade member
EP95116113A EP0709484B2 (en) 1994-10-20 1995-10-12 Coated tungsten carbide-based cemented carbide blade member
DE69509035T DE69509035T3 (en) 1994-10-20 1995-10-12 Coated cemented tungsten carbide-based blade
KR1019950036041A KR100187369B1 (en) 1994-10-20 1995-10-18 Coated tungsten carbide-based cemented carbide blade member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28145994A JP2861832B2 (en) 1994-10-20 1994-10-20 Surface coated tungsten carbide based cemented carbide cutting tool with excellent interlayer adhesion with hard coating layer

Publications (2)

Publication Number Publication Date
JPH08118105A JPH08118105A (en) 1996-05-14
JP2861832B2 true JP2861832B2 (en) 1999-02-24

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Country Link
JP (1) JP2861832B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69831219T2 (en) * 1997-11-06 2006-03-30 Sumitomo Electric Industries, Ltd. TOOL COATED WITH SINTER CARBIDE
US6723389B2 (en) 2000-07-21 2004-04-20 Toshiba Tungaloy Co., Ltd. Process for producing coated cemented carbide excellent in peel strength
US6589602B2 (en) 2001-04-17 2003-07-08 Toshiba Tungaloy Co., Ltd. Highly adhesive surface-coated cemented carbide and method for producing the same
WO2007122859A1 (en) 2006-03-28 2007-11-01 Kyocera Corporation Cutting tool, method for producing same and cutting method
EP2058070B1 (en) 2006-08-31 2014-02-26 Kyocera Corporation Cutting tool, process for producing the same, and method of cutting
CN102196874B (en) * 2008-10-28 2014-07-23 京瓷株式会社 Surface covered tool
EP2839907B1 (en) 2012-04-19 2018-10-03 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
KR102056206B1 (en) * 2012-10-01 2019-12-16 미츠비시 히타치 쓰루 가부시키가이샤 Hard film coating tool and method for manufacturing said tool

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